JP2012142400A - METHOD OF MANUFACTURING ANTICORROSIVE R-Fe-B-BASED SINTERED MAGNET - Google Patents

METHOD OF MANUFACTURING ANTICORROSIVE R-Fe-B-BASED SINTERED MAGNET Download PDF

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JP2012142400A
JP2012142400A JP2010293533A JP2010293533A JP2012142400A JP 2012142400 A JP2012142400 A JP 2012142400A JP 2010293533 A JP2010293533 A JP 2010293533A JP 2010293533 A JP2010293533 A JP 2010293533A JP 2012142400 A JP2012142400 A JP 2012142400A
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temperature
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masahide Fujiwara
真秀 藤原
Masayuki Yoshimura
吉村  公志
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Proterial Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a method of manufacturing an R-Fe-B-based sintered magnet which contains only a small amount of RH or does not contain the RH, and has an excellent corrosion resistance.SOLUTION: The method of manufacturing an R-Fe-B-based sintered magnet includes a step for performing heat treatment at 200-450°C in an atmosphere where the oxygen partial pressure is 1×10-1×10Pa, the water vapor partial pressure is lower than 1000 Pa and the ratio of the oxygen partial pressure and the water vapor partial pressure (oxygen partial pressure/water vapor partial pressure) is 1-20000 for an R-Fe-B-based sintered magnet containing 4.5 mass% or less of heavy rare-earth elements (at least one kind selected from RH:Dy and Tb). Temperature of the magnet is lowered from the heat treatment temperature at an average cooling rate of 650°C/hour or higher at least until 100°C.

Description

本発明は、耐食性R−Fe−B系焼結磁石の製造方法に関する。より詳細には、重希土類元素(RH:DyおよびTbから選択される少なくとも1種)含有量が少ないか、またはRHを含まない、耐食性に優れるR−Fe−B系焼結磁石の製造方法に関する。   The present invention relates to a method for producing a corrosion-resistant R—Fe—B based sintered magnet. More specifically, the present invention relates to a method for producing an R—Fe—B based sintered magnet having a low content of heavy rare earth elements (RH: at least one selected from Dy and Tb) or not containing RH and excellent in corrosion resistance. .

Nd−Fe−B系焼結磁石に代表されるR−Fe−B系焼結磁石は、資源的に豊富で安価な材料が用いられ、かつ、高い磁気特性を有していることから今日様々な分野で使用されているが、反応性の高い希土類元素:Rを含むため、大気中で酸化腐食されやすいという特質を有する。従って、R−Fe−B系焼結磁石は、通常、その表面に金属被膜や樹脂被膜などの耐食性被膜を形成して実用に供されるが、ハイブリッド自動車や電気自動車の駆動モータとして使用されたり、空調機のコンプレッサーなどに組み込まれたりするIPM(Interior Permanent Magnet)モータなどのように、磁石が部品に埋め込まれて使用される態様の場合には、必ずしもこのような耐食性被膜を磁石の表面に形成することは必要とされない。しかしながら、磁石が製造されてから部品に埋め込まれるまでの期間における磁石の耐食性の確保は当然に必要である。
上記の通り、R−Fe−B系焼結磁石に対して耐食性を付与する方法としては、その表面に金属被膜や樹脂被膜などの耐食性被膜を形成する方法が代表的であるが、近年、酸化性雰囲気下での熱処理(酸化熱処理)を磁石に対して行うことによって磁石の表面を改質する方法が簡易耐食性向上技術として注目されている。例えば、特許文献1や特許文献2には、酸素を利用して酸化性雰囲気を形成して熱処理する方法が記載され、特許文献3〜特許文献6には、水蒸気を単独で利用して、或いは、水蒸気に酸素を組み合わせて酸化性雰囲気を形成して熱処理する方法が記載されている。しかしながら、これらの方法で磁石に対して表面改質を行っても、温度や湿度の管理がされていない輸送環境や保管環境などのような、温度や湿度が変動することで磁石の表面に微細な結露を繰り返し生じさせてしまう環境では必ずしも十分な耐食性が得られないこと、特許文献3〜特許文献6においては、水蒸気分圧は10hPa(1000Pa)以上が好適とされているが、このような水蒸気分圧が高い雰囲気下で熱処理を行うと、磁石の表面で起こる酸化反応によって水素が副産物として大量に生成し、磁石が生成した水素を吸蔵して脆化することで磁気特性が低下してしまうことが本発明者らの検討によって明らかになった。そこで本発明者らは、R−Fe−B系焼結磁石に対するより優れた表面改質方法として、酸素分圧と、特許文献3〜特許文献6において不適とされている10hPa未満の水蒸気分圧を適切に制御した酸化性雰囲気下での熱処理方法、具体的には、酸素分圧が1×10Pa〜1×10Paで水蒸気分圧が0.1Pa〜1000Pa(但し1000Paを除く)の雰囲気下、200℃〜600℃で熱処理を行う方法を特許文献7において提案した。
R-Fe-B-based sintered magnets represented by Nd-Fe-B-based sintered magnets are widely used today because they use resource-rich and inexpensive materials and have high magnetic properties. Although it is used in various fields, since it contains a highly reactive rare earth element: R, it has the property of being easily oxidized and corroded in the atmosphere. Therefore, the R—Fe—B based sintered magnet is usually used for practical use by forming a corrosion-resistant coating such as a metal coating or a resin coating on the surface thereof. However, it can be used as a drive motor for a hybrid vehicle or an electric vehicle. In the case where the magnet is embedded in a part, such as an IPM (Interior Permanent Magnet) motor incorporated in a compressor of an air conditioner, etc., such a corrosion-resistant coating is not necessarily provided on the surface of the magnet. It is not required to form. However, it is of course necessary to ensure the corrosion resistance of the magnet during the period from when the magnet is manufactured to when it is embedded in the part.
As described above, as a method of imparting corrosion resistance to the R—Fe—B based sintered magnet, a method of forming a corrosion resistant coating such as a metal coating or a resin coating on the surface is representative, but in recent years, oxidation A method of modifying the surface of a magnet by performing heat treatment (oxidation heat treatment) on the magnet in a neutral atmosphere has attracted attention as a simple technique for improving corrosion resistance. For example, Patent Document 1 and Patent Document 2 describe a method of forming an oxidizing atmosphere using oxygen and performing a heat treatment, and Patent Documents 3 to 6 use water vapor alone, or A method is described in which oxygen is combined with water vapor to form an oxidizing atmosphere and heat treatment is performed. However, even if surface modification is performed on the magnet by these methods, the surface of the magnet is finely affected by fluctuations in temperature and humidity, such as in transportation and storage environments where temperature and humidity are not controlled. In an environment where repeated condensation occurs repeatedly, sufficient corrosion resistance is not necessarily obtained. In Patent Documents 3 to 6, the water vapor partial pressure is preferably 10 hPa (1000 Pa) or more. When heat treatment is performed in an atmosphere with a high water vapor partial pressure, a large amount of hydrogen is generated as a by-product due to an oxidation reaction that occurs on the surface of the magnet, and the magnetic properties are reduced by occlusion and embrittlement of the hydrogen generated by the magnet. This has been clarified by the study of the present inventors. Therefore, the present inventors, as a better surface modification method for R-Fe-B based sintered magnets, oxygen partial pressure and water vapor partial pressure of less than 10 hPa, which is inappropriate in Patent Documents 3 to 6. Is a heat treatment method in an oxidizing atmosphere appropriately controlled, specifically, an oxygen partial pressure of 1 × 10 2 Pa to 1 × 10 5 Pa and a water vapor partial pressure of 0.1 Pa to 1000 Pa (excluding 1000 Pa) Patent Document 7 proposed a method of performing heat treatment at 200 ° C. to 600 ° C. in the atmosphere described above.

特許第2844269号公報Japanese Patent No. 2844269 特開2002−57052号公報JP 2002-57052 A 特開2006−156853号公報JP 2006-156853 A 特開2006−210864号公報JP 2006-210864 A 特開2007−103523号公報JP 2007-103523 A 特開2007−207936号公報JP 2007-207936 A 国際公開第2009/041639号International Publication No. 2009/041639

ところで、R−Fe−B系焼結磁石が使用環境において高温に晒される場合には、その保磁力の低下に対する対策が必要とされる。こうした対策の一つとして、Rとして含まれる軽希土類元素(RL:NdおよびPrから選択される少なくとも1種)の一部を、RHに置換することで保磁力を向上させる方法が知られている。しかしながら、RHは希少資源であるので使用量の削減が求められる他、RLのRHによる置換割合が大きくなると残留磁束密度が低下するという問題がある。そこで、より少ないRHの使用量で残留磁束密度の低下を抑制しつつ保磁力を向上させる方法が各種提案されているが、こうしたRH含有量の少ないR−Fe−B系焼結磁石や、RHを含まない磁石においても、当然のことながら耐食性の確保が必要となる。
そこで本発明は、RH含有量が少ないか、またはRHを含まない、耐食性に優れるR−Fe−B系焼結磁石の製造方法を提供することを目的とする。
By the way, when the R—Fe—B based sintered magnet is exposed to a high temperature in the usage environment, a countermeasure against a decrease in coercive force is required. As one of such measures, there is known a method for improving the coercive force by replacing a part of a light rare earth element (RL: at least one selected from Nd and Pr) contained as R with RH. . However, since RH is a scarce resource, it is required to reduce the amount used, and there is a problem that the residual magnetic flux density decreases when the replacement ratio of RL with RH increases. Thus, various methods for improving the coercive force while suppressing the decrease in the residual magnetic flux density with a smaller amount of RH used have been proposed, but such R—Fe—B based sintered magnets with a low RH content, RH Of course, it is necessary to secure corrosion resistance even in a magnet that does not contain.
Accordingly, an object of the present invention is to provide a method for producing an R—Fe—B based sintered magnet having a low RH content or containing no RH and having excellent corrosion resistance.

本発明者らは、上記の点に鑑みて鋭意検討を行う過程において、特許文献7において提案したR−Fe−B系焼結磁石に対する表面改質方法を、RH含有量が少ない磁石や、RHを含まない磁石に対して適用したところ、期待通りの表面改質効果が得られる一方で、全く意外なことに、RH含有量が多い磁石では起こらない保磁力低下が起こることがわかった。そこで、この現象の解消を図るべくさらに検討を重ねた結果、所定の条件での熱処理を行った後の磁石の降温を急速に行うことが、この現象の解消に有効であることを見出した。   In the process of conducting intensive studies in view of the above points, the present inventors applied a surface modification method for the R—Fe—B based sintered magnet proposed in Patent Document 7 to a magnet with a low RH content, RH When applied to a magnet that does not contain, the surface modification effect as expected can be obtained, but surprisingly, it has been found that the coercive force decrease that does not occur in a magnet with a high RH content occurs. Therefore, as a result of further studies to eliminate this phenomenon, it has been found that it is effective to eliminate this phenomenon by rapidly lowering the temperature of the magnet after performing the heat treatment under a predetermined condition.

上記の知見に基づいて完成された本発明の耐食性R−Fe−B系焼結磁石の製造方法は、請求項1記載の通り、RH含有量が4.5mass%以下のR−Fe−B系焼結磁石に対し、酸素分圧が1×10Pa〜1×10Paで水蒸気分圧が1000Pa未満であり、かつ、酸素分圧と水蒸気分圧の比率(酸素分圧/水蒸気分圧)が1〜20000の雰囲気下、200℃〜450℃で熱処理を行う工程を含み、熱処理を行った温度からの磁石の降温を、少なくとも100℃に至るまで650℃/時間以上の平均冷却速度で行うことを特徴とする。
また、請求項2記載の製造方法は、請求項1記載の製造方法において、平均冷却速度を2000℃/時間以下とすることを特徴とする。
The manufacturing method of the corrosion-resistant R—Fe—B based sintered magnet of the present invention completed based on the above knowledge, as described in claim 1, has an RH content of 4.5 mass% or less. For the sintered magnet, the oxygen partial pressure is 1 × 10 3 Pa to 1 × 10 5 Pa, the water vapor partial pressure is less than 1000 Pa, and the ratio of oxygen partial pressure to water vapor partial pressure (oxygen partial pressure / water vapor partial pressure) ) Includes a step of performing heat treatment at 200 ° C. to 450 ° C. in an atmosphere of 1 to 20000, and lowering the temperature of the magnet from the heat-treated temperature at an average cooling rate of 650 ° C./hour or more until reaching at least 100 ° C. It is characterized by performing.
The manufacturing method according to claim 2 is characterized in that, in the manufacturing method according to claim 1, the average cooling rate is 2000 ° C./hour or less.

本発明によれば、RH含有量が少ないか、またはRHを含まないR−Fe−B系焼結磁石に対し、保磁力低下を起こすことなくその表面改質を行うことによって優れた耐食性を付与することができる。   According to the present invention, excellent corrosion resistance is imparted to a R-Fe-B sintered magnet having a low RH content or no RH by performing surface modification without causing a reduction in coercive force. can do.

本発明の耐食性R−Fe−B系焼結磁石の製造方法に好適に採用することができる連続処理炉の一例の概略図(側面図)である。It is the schematic (side view) of an example of the continuous processing furnace which can be employ | adopted suitably for the manufacturing method of the corrosion-resistant R-Fe-B type sintered magnet of this invention.

本発明の耐食性R−Fe−B系焼結磁石の製造方法は、RH含有量が4.5mass%以下のR−Fe−B系焼結磁石に対し、酸素分圧が1×10Pa〜1×10Paで水蒸気分圧が1000Pa未満であり、かつ、酸素分圧と水蒸気分圧の比率(酸素分圧/水蒸気分圧)が1〜20000の雰囲気下、200℃〜450℃で熱処理を行う工程を含み、熱処理を行った温度からの磁石の降温を、少なくとも100℃に至るまで650℃/時間以上の平均冷却速度で行うことを特徴とするものである。 The method for producing a corrosion-resistant R—Fe—B based sintered magnet of the present invention has an oxygen partial pressure of 1 × 10 3 Pa to an R—Fe—B based sintered magnet having an RH content of 4.5 mass% or less. Heat treatment is performed at 200 ° C. to 450 ° C. in an atmosphere of 1 × 10 5 Pa with a water vapor partial pressure of less than 1000 Pa and a ratio of oxygen partial pressure to water vapor partial pressure (oxygen partial pressure / water vapor partial pressure) of 1 to 20000. The temperature drop of the magnet from the temperature at which the heat treatment was performed is performed at an average cooling rate of 650 ° C./hour or more until reaching at least 100 ° C.

熱処理を行う工程における酸素分圧を1×10Pa〜1×10Paと規定するのは、酸素分圧が1×10Paよりも小さいと、雰囲気中の酸素量が少なすぎることで、磁石の表面改質に時間がかかりすぎたり、磁石のその保持部材と接する部分の表面改質が十分に行われないことにより、当該部分に十分な耐食性や安定性が付与されなかったり当該部分に保持部材との接点跡が残ってしまったりする恐れがあるからである。一方、酸素分圧を1×10Paより大きくしても、酸素分圧を大きくすることによる磁石の表面改質効果はさほど認められず、コストアップを招来するだけになってしまう恐れがあるからである。磁石の表面に対して所望する改質をより効果的かつ低コストに行うためには、酸素分圧は1×10Pa〜5×10Paが望ましく、1×10Pa〜3×10Paがより望ましい。水蒸気分圧を1000Pa未満と規定するのは、水蒸気分圧が1000Pa以上であると、雰囲気中の水蒸気量が多すぎることで、磁石の表面を優れた耐食性を発揮する安定なものに改質することができない恐れがあるからである。磁石の表面に対して所望する改質をより効果的かつ低コストに行うためには、水蒸気分圧は700Pa以下が望ましく、45Pa以下がより望ましい。なお、水蒸気分圧の下限は特段制限されるものではないが、通常、1Paが望ましい。酸素分圧と水蒸気分圧の比率を1〜20000と規定するのは、当該比率が1よりも小さいと、雰囲気中の酸素量に対する水蒸気量が多すぎることで、磁石の表面を優れた耐食性を発揮する安定なものに改質することができない恐れがあるからである。一方、当該比率が20000よりも大きい雰囲気は特殊環境といえ、実用的でないからである。磁石の表面に対して所望する改質をより効果的かつ低コストに行うためには、当該比率は10〜10000が望ましく、300〜5000がより望ましく、450〜4000がさらに望ましい。処理室内の雰囲気は、例えば、これらの酸化性ガスを所定の分圧となるように個別に導入することによって形成してもよいし、これらの酸化性ガスが所定の分圧で含まれる露点を有する大気を導入することによって形成してもよい。また、処理室内には、窒素ガスやアルゴンガスなどの不活性ガスを共存させてもよい。雰囲気の全圧を大気圧やその近傍の圧力(具体的には例えば9×10Pa〜1.2×10Pa)とすれば、特別な圧力調整手段を必要とすることなく所定の雰囲気を容易に形成して磁石の表面改質を行うことができる。 By to define the oxygen partial pressure in the step of performing a heat treatment with 1 × 10 3 Pa~1 × 10 5 Pa is the oxygen partial pressure is less than 1 × 10 3 Pa, the oxygen content in the atmosphere is too low The surface modification of the magnet takes too much time, or the surface of the part of the magnet that contacts the holding member is not sufficiently modified, so that sufficient corrosion resistance and stability are not given to the part. This is because the contact mark with the holding member may remain. On the other hand, even if the oxygen partial pressure is made higher than 1 × 10 5 Pa, the effect of surface modification of the magnet by increasing the oxygen partial pressure is not recognized so much, which may only lead to an increase in cost. Because. In order to perform the desired modification on the surface of the magnet more effectively and at low cost, the oxygen partial pressure is preferably 1 × 10 3 Pa to 5 × 10 4 Pa, and 1 × 10 4 Pa to 3 × 10. 4 Pa is more desirable. The water vapor partial pressure is defined as less than 1000 Pa. If the water vapor partial pressure is 1000 Pa or more, the amount of water vapor in the atmosphere is excessive, and the surface of the magnet is modified to a stable one that exhibits excellent corrosion resistance. Because there is a fear that it cannot be done. In order to perform the desired modification on the surface of the magnet more effectively and at low cost, the water vapor partial pressure is desirably 700 Pa or less, and more desirably 45 Pa or less. The lower limit of the water vapor partial pressure is not particularly limited, but is usually 1 Pa. The ratio between the oxygen partial pressure and the water vapor partial pressure is defined as 1 to 20000. If the ratio is smaller than 1, the amount of water vapor with respect to the amount of oxygen in the atmosphere is too large, so that the surface of the magnet has excellent corrosion resistance. This is because there is a possibility that it cannot be reformed to a stable one. On the other hand, an atmosphere in which the ratio is greater than 20000 is a special environment and is not practical. In order to perform the desired modification on the surface of the magnet more effectively and at a low cost, the ratio is preferably 10 to 10,000, more preferably 300 to 5000, and further preferably 450 to 4000. The atmosphere in the processing chamber may be formed, for example, by individually introducing these oxidizing gases so as to have a predetermined partial pressure, or a dew point at which these oxidizing gases are included at a predetermined partial pressure. You may form by introduce | transducing the atmosphere which has. Further, an inert gas such as nitrogen gas or argon gas may coexist in the processing chamber. If the total pressure of the atmosphere is set to atmospheric pressure or a pressure in the vicinity thereof (specifically, for example, 9 × 10 4 Pa to 1.2 × 10 5 Pa), a predetermined atmosphere is not required without requiring special pressure adjusting means. Can be easily formed to improve the surface of the magnet.

熱処理の温度を200℃〜450℃と規定するのは、200℃よりも低いと、磁石の表面に対して所望する改質を行い難くなる恐れがある一方、熱処理温度が450℃よりも高いと、磁石の磁気特性に悪影響を及ぼす恐れがあるからである。熱処理の温度は240℃〜430℃が望ましく、280℃〜400℃がより望ましい。熱処理の時間は1分間〜3時間が望ましく、15分間〜2.5時間がより望ましい。時間が短すぎると、磁石の表面に対して所望する改質を行い難くなる恐れがある一方、時間が長すぎると、磁石の磁気特性に悪影響を及ぼす恐れがある。   The temperature of the heat treatment is defined as 200 ° C. to 450 ° C. If the temperature is lower than 200 ° C., it may be difficult to perform the desired modification on the surface of the magnet, while the heat treatment temperature is higher than 450 ° C. This is because the magnetic properties of the magnet may be adversely affected. The temperature of the heat treatment is preferably 240 ° C to 430 ° C, and more preferably 280 ° C to 400 ° C. The heat treatment time is preferably 1 minute to 3 hours, more preferably 15 minutes to 2.5 hours. If the time is too short, it may be difficult to perform the desired modification on the surface of the magnet, while if the time is too long, the magnetic properties of the magnet may be adversely affected.

なお、磁石を常温から熱処理を行う温度まで昇温する工程は、酸素分圧が1×10Pa〜1×10Paで水蒸気分圧が1Pa〜100Paの雰囲気下で行うことが望ましい。このような雰囲気下で昇温することにより、磁石の表面に少なからず自然吸着している水分を早期に脱離させることで、磁石の表面に存在する水分が昇温の際に磁石に対して悪影響を与えることを極力回避することができる。平均昇温速度は、例えば100℃/時間〜2000℃/時間とすればよい。なお、本発明において「常温」とは、表面改質が行われるR−Fe−B系焼結磁石が昇温を開始する時点で置かれている環境の温度(例えば室温)を指し、例示的には、日本工業規格のJIS Z 8703において5℃〜35℃と規定されている温度を意味する。 In addition, it is desirable to perform the process of raising the temperature of the magnet from room temperature to the temperature at which heat treatment is performed in an atmosphere having an oxygen partial pressure of 1 × 10 3 Pa to 1 × 10 5 Pa and a water vapor partial pressure of 1 Pa to 100 Pa. By raising the temperature in such an atmosphere, moisture that is naturally adsorbed on the surface of the magnet is desorbed at an early stage, so that the moisture present on the surface of the magnet is It is possible to avoid adverse effects as much as possible. The average heating rate may be, for example, 100 ° C./hour to 2000 ° C./hour. In the present invention, “normal temperature” refers to the temperature (for example, room temperature) of the environment in which the R—Fe—B sintered magnet subjected to surface modification is placed at the start of temperature rise, and is illustrative. Means a temperature defined as 5 ° C. to 35 ° C. in JIS Z 8703 of the Japanese Industrial Standard.

本発明において特徴付けられる、熱処理を行った後の磁石を降温する工程は、熱処理温度から少なくとも100℃に至るまで650℃/時間以上の平均冷却速度で行う。本発明者らの検討によれば、上述した条件での熱処理を行うことで表面改質されたRH含有量が4.5mass以下の磁石の保磁力は、熱処理後の降温工程における冷却速度に大きく依存し(とりわけ400℃〜200℃の温度域における冷却速度に依存するようである)、冷却速度が遅いと保磁力低下が起こる。この保磁力低下は、本発明者らが全く予測していなかった現象であり、RH含有量が4.5mass%を超える磁石では起こらない。そこで、本発明では、熱処理を行った温度からの磁石の降温を、少なくとも100℃に至るまで650℃/時間以上の平均冷却速度で行うことで、熱処理後の降温時における保磁力低下を抑制する。平均冷却速度の上限は特段制限されるものではないが、簡易な方法で低コストに降温を行うためには、2000℃/時間とすることが望ましい。磁石の温度が100℃に達した後のさらなる降温の際は、上記の平均冷却速度を維持してもよいし、維持しなくてもよい。なお、熱処理を行った磁石を降温する工程は、磁石の熱処理を行うに際しての昇温工程において採用する雰囲気と同じ雰囲気を採用して行うことが、工程中に磁石の表面が結露することで磁石が腐食して磁気特性が低下するといった現象を防ぐことができる点において望ましい。   The step of lowering the magnet after the heat treatment, which is characterized in the present invention, is performed at an average cooling rate of 650 ° C./hour or more from the heat treatment temperature to at least 100 ° C. According to the study by the present inventors, the coercive force of the magnet whose surface-modified RH content is 4.5 mass or less by performing the heat treatment under the above-described conditions is large in the cooling rate in the temperature lowering process after the heat treatment. The coercive force is lowered when the cooling rate is low (depending on the cooling rate in the temperature range of 400 ° C. to 200 ° C.). This decrease in coercive force is a phenomenon that the present inventors have not predicted at all, and does not occur in a magnet having an RH content exceeding 4.5 mass%. Therefore, in the present invention, the temperature drop of the magnet from the temperature at which the heat treatment is performed is performed at an average cooling rate of 650 ° C./hour or more until reaching a temperature of at least 100 ° C., thereby suppressing a decrease in coercive force during the temperature drop after the heat treatment. . The upper limit of the average cooling rate is not particularly limited, but is preferably 2000 ° C./hour in order to lower the temperature at a low cost by a simple method. When the temperature of the magnet further decreases after reaching 100 ° C., the above average cooling rate may or may not be maintained. The step of lowering the temperature of the magnet that has been heat-treated is performed by adopting the same atmosphere as that used in the temperature-raising step when performing heat treatment of the magnet. It is desirable in that it can prevent the phenomenon that the magnetic properties deteriorate due to corrosion.

熱処理を行った後の磁石を上記の平均冷却速度で降温するための具体的手段は特段限定されるものではない。例えば、磁石に対する昇温工程、熱処理工程、降温工程を、内部に雰囲気ガスを流通させることでその雰囲気の制御が可能なSUS,Ti,Mo,Nbなどの材質からなる耐熱性容器に磁石を収容し、磁石を収容した耐熱性容器をバッチ式の熱処理炉の処理室に収容して耐熱性容器の内部の雰囲気を制御しながら行う場合、磁石の降温に用いる雰囲気ガスの流量を増加したり温度を下げたりすることにより、所望する平均冷却速度で磁石を降温することができる。所望する平均冷却速度での磁石の降温は、磁石を収容した耐熱性容器を収容した処理室内を大気開放する方法、耐熱性容器に収容する磁石の個数を減らす方法、磁石を収容した耐熱性容器を熱処理炉から取り出して別途に冷却する方法などによっても行うことができる。また、磁石に対する昇温工程、熱処理工程、降温工程を、磁石が収容された処理室内の環境を順次それぞれの工程を行うための環境に変化させることができるバッチ式の熱処理炉を用いて行う場合、降温工程を、磁石の降温に用いる雰囲気ガスを処理室内に導入することによって行うこととし、その流量を増加したり温度を下げたりすることにより、所望する平均冷却速度で磁石を降温することができる。   The specific means for lowering the temperature of the magnet after the heat treatment at the above average cooling rate is not particularly limited. For example, the magnet is housed in a heat-resistant container made of a material such as SUS, Ti, Mo, Nb, etc., capable of controlling the atmosphere by circulating an atmosphere gas in the temperature raising process, heat treatment process, and temperature lowering process. When a heat-resistant container containing a magnet is housed in a processing chamber of a batch-type heat treatment furnace and the atmosphere inside the heat-resistant container is controlled, the flow rate of atmospheric gas used to lower the temperature of the magnet is increased or the temperature is increased. The temperature of the magnet can be lowered at a desired average cooling rate. The temperature drop of the magnet at the desired average cooling rate can be achieved by opening the processing chamber containing the heat-resistant container containing the magnet to the atmosphere, reducing the number of magnets contained in the heat-resistant container, and the heat-resistant container containing the magnet. It can also be carried out by a method of taking out from the heat treatment furnace and cooling separately. In addition, when performing a temperature raising process, a heat treatment process, and a temperature lowering process for a magnet using a batch-type heat treatment furnace that can change the environment in the processing chamber in which the magnet is accommodated to an environment for sequentially performing each process. The temperature lowering step is performed by introducing an atmospheric gas used for lowering the temperature of the magnet into the processing chamber, and the temperature of the magnet can be decreased at a desired average cooling rate by increasing the flow rate or decreasing the temperature. it can.

また、磁石に対する昇温工程、熱処理工程、降温工程を、内部がそれぞれの工程を行うための環境に制御された領域に分割され、各領域に磁石を順次移動させることができる連続処理炉(例えば図1に示すようなもの)を用いて行う場合、所望する平均冷却速度での磁石の降温は、降温領域における磁石の降温環境を適切に制御することによって行うことができる。例えば図1に示す連続処理炉においては、ベルトコンベアなどの移動手段によって磁石を図の左から右に移動させながら各処理を施す。矢印は図略の給気手段と排気手段によって形成される各領域における雰囲気ガスの流れである。昇温領域の入口および降温領域の出口は、例えばエアカーテンで区画され、昇温領域と熱処理領域の境界および熱処理領域と降温領域の境界は、例えば矢印の雰囲気ガスの流れにより区画される(これらの区画は機械的にシャッターで行われてもよい)。大量の磁石に対して安定した品質の表面改質を連続的に行うことができるこのような連続処理炉を用いる場合、所望する平均冷却速度での磁石の降温は、降温領域において用いる雰囲気ガスの流量を増加したり温度を下げたりする方法や、移動手段の移動速度を調整する方法によって行うことができる。   Moreover, the temperature raising process, heat treatment process, and temperature lowering process for the magnet are divided into areas controlled to the environment for performing each process, and a continuous processing furnace (for example, a magnet can be sequentially moved to each area (for example, In the case of using a magnet as shown in FIG. 1, the temperature of the magnet can be decreased at a desired average cooling rate by appropriately controlling the temperature decreasing environment of the magnet in the temperature decreasing region. For example, in the continuous processing furnace shown in FIG. 1, each process is performed while moving the magnet from the left to the right in the figure by a moving means such as a belt conveyor. Arrows indicate the flow of the atmospheric gas in each region formed by an unillustrated air supply means and exhaust means. The inlet of the temperature rising region and the outlet of the temperature falling region are partitioned by, for example, an air curtain, and the boundary between the temperature rising region and the heat treatment region and the boundary between the heat treatment region and the temperature lowering region are partitioned by, for example, the flow of the atmospheric gas indicated by the arrows (these This may be done mechanically with a shutter). When such a continuous processing furnace capable of continuously performing surface modification with a stable quality on a large number of magnets is used, the temperature drop of the magnet at the desired average cooling rate is the same as that of the atmospheric gas used in the temperature drop region. This can be done by increasing the flow rate or lowering the temperature, or by adjusting the moving speed of the moving means.

上記の工程によってR−Fe−B系焼結磁石の表面に形成される表面改質層の厚みは0.5μm〜10μmが望ましい。厚みが薄すぎると十分な耐食性を発揮しない恐れがある一方、厚みが厚すぎると磁石の磁気特性に悪影響を及ぼす恐れがある。   The thickness of the surface modification layer formed on the surface of the R—Fe—B based sintered magnet by the above process is preferably 0.5 μm to 10 μm. If the thickness is too thin, sufficient corrosion resistance may not be exhibited. On the other hand, if the thickness is too thick, the magnetic properties of the magnet may be adversely affected.

本発明が適用されるR−Fe−B系焼結磁石としては、例えば、下記の製造方法によって製造されたRH含有量が4.5mass%以下のものが挙げられる。
25mass%以上40mass%以下の希土類元素Rと、0.6mass%〜1.6mass%のB(硼素)と、残部Feおよび不可避不純物とを包含する合金を用意する。ここで、Rは重希土類元素RHを含んでいてもよい。また、Bの一部はC(炭素)によって置換されていてもよいし、Feの一部は(50mass%以下)は、他の遷移金属元素(例えば、CoまたはNi)によって置換されていてもよい。この合金は、種々の目的により、Al、Si、Ti、V、Cr、Mn、Ni、Cu、Zn、Ga、Zr、Nb、Mo、Ag、In、Sn、Hf、Ta、W、Pb、およびBiからなる群から選択された少なくとも1種の添加元素Mを0.01〜1.0mass%程度含有していてもよい。
上記の合金は、原料合金の溶湯を例えばストリップキャスト法によって急冷して好適に作製され得る。以下、ストリップキャスト法による急冷凝固合金の作製を説明する。
まず、上記組成を有する原料合金をアルゴン雰囲気中において高周波溶解によって溶解し、原料合金の溶湯を形成する。次に、この溶湯を1350℃程度に保持した後、単ロール法によって急冷し、例えば厚さ約0.3mmのフレーク状合金鋳塊を得る。こうして作製した合金鋳片を、次の水素粉砕処理前に例えば1〜10mmのフレーク状に粉砕する。なお、ストリップキャスト法による原料合金の製造方法は、例えば、米国特許第5、383、978号明細書に開示されている。
[粗粉砕工程]
上記のフレーク状に粗く粉砕された合金鋳片を水素炉の内部へ収容する。次に、水素炉の内部で水素脆化処理(以下、「水素粉砕処理」や単に「水素処理」と称する場合がある)工程を行う。水素粉砕処理後の粗粉砕粉合金粉末を水素炉から取り出す際、粗粉砕粉が大気と接触しないように、不活性雰囲気下で取り出し動作を実行することが好ましい。そうすれば、粗粉砕粉が酸化・発熱することが防止され、磁石の磁気特性の低下が抑制できるからである。
水素粉砕処理によって、希土類合金は0.1mm〜数mm程度の大きさに粉砕され、その平均粒径は500μm以下となる。水素粉砕処理後、脆化した原料合金をより細かく解砕するとともに冷却することが好ましい。比較的高い温度状態のまま原料を取り出す場合は、冷却処理の時間を相対的に長くすればよい。
[微粉砕工程]
次に、粗粉砕粉に対してジェットミル粉砕装置を用いて微粉砕を実行する。本実施形態で使用するジェットミル粉砕装置にはサイクロン分級機が接続されている。ジェットミル粉砕装置は、粗粉砕工程で粗く粉砕された希土類合金(粗粉砕粉)の供給を受け、粉砕機内で粉砕する。粉砕機内で粉砕された粉末はサイクロン分級機を経て回収タンクに集められる。こうして、0.1〜20μm程度の微粉末を得ることができる。このような微粉砕に用いる粉砕装置は、ジェットミルに限定されず、アトライタやボールミルであってもよい。粉砕に際して、ステアリン酸亜鉛などの潤滑剤を粉砕助剤として用いてもよい。
[プレス成形]
本実施形態では、上記方法で作製された磁性粉末に対し、例えばロッキングミキサー内で潤滑剤を例えば0.3mass%添加・混合し、潤滑剤で合金粉末粒子の表面を被覆する。次に、上述の方法で作製した磁性粉末を公知のプレス装置を用いて配向磁界中で成形する。印加する磁界の強度は、例えば1.0〜1.7テスラ(T)である。また、成形圧力は、成形体のグリーン密度が例えば4〜4.5g/cm程度になるように設定される。
[焼結工程]
上記の粉末成形体に対して、例えば、1000〜1200℃の範囲内の温度で10〜240分間行う。650〜1000℃の範囲内の温度で10〜240分間保持する工程と、その後、上記の保持温度よりも高い温度(例えば、1000〜1200℃)で焼結を更に進める工程とを順次行ってもよい。焼結時、特に液相が生成されるとき(温度が650〜1000℃の範囲内にあるとき)、粒界相中のRリッチ相が融け始め、液相が形成される。その後、焼結が進行し、焼結磁石体が形成される。焼結工程の後、時効処理(400℃〜700℃)や寸法調整のための研削を行ってもよい。
Examples of the R—Fe—B based sintered magnet to which the present invention is applied include those having an RH content of 4.5 mass% or less manufactured by the following manufacturing method.
An alloy containing 25 mass% or more and 40 mass% or less of rare earth element R, 0.6 mass% to 1.6 mass% of B (boron), the balance Fe and inevitable impurities is prepared. Here, R may contain a heavy rare earth element RH. Further, a part of B may be substituted by C (carbon), and a part of Fe (50 mass% or less) may be substituted by another transition metal element (for example, Co or Ni). Good. This alloy is suitable for a variety of purposes, including Al, Si, Ti, V, Cr, Mn, Ni, Cu, Zn, Ga, Zr, Nb, Mo, Ag, In, Sn, Hf, Ta, W, Pb, and You may contain about 0.01-1.0 mass% of the at least 1 sort (s) of additional element M selected from the group which consists of Bi.
The above-mentioned alloy can be suitably produced by rapidly cooling a molten raw material alloy by, for example, a strip casting method. Hereinafter, preparation of a rapidly solidified alloy by a strip casting method will be described.
First, a raw material alloy having the above composition is melted by high-frequency melting in an argon atmosphere to form a molten raw material alloy. Next, after holding this molten metal at about 1350 ° C., it is rapidly cooled by a single roll method to obtain, for example, a flake-shaped alloy ingot having a thickness of about 0.3 mm. The alloy slab thus produced is pulverized into, for example, 1 to 10 mm flakes before the next hydrogen pulverization treatment. In addition, the manufacturing method of the raw material alloy by a strip cast method is disclosed by US Patent 5,383,978 specification, for example.
[Coarse grinding process]
The alloy slab coarsely crushed into flakes is accommodated in the hydrogen furnace. Next, a hydrogen embrittlement treatment process (hereinafter sometimes referred to as “hydrogen pulverization treatment” or simply “hydrogen treatment”) is performed inside the hydrogen furnace. When the coarsely pulverized powder alloy powder after the hydrogen pulverization treatment is taken out from the hydrogen furnace, the takeout operation is preferably performed in an inert atmosphere so that the coarsely pulverized powder does not come into contact with the atmosphere. By doing so, it is possible to prevent the coarsely pulverized powder from oxidizing and generating heat, and to suppress the deterioration of the magnetic properties of the magnet.
By the hydrogen pulverization treatment, the rare earth alloy is pulverized to a size of about 0.1 mm to several mm, and the average particle size becomes 500 μm or less. After the hydrogen pulverization treatment, the embrittled raw material alloy is preferably crushed more finely and cooled. When the raw material is taken out in a relatively high temperature state, the cooling process time may be relatively long.
[Fine grinding process]
Next, the coarsely pulverized powder is finely pulverized using a jet mill pulverizer. A cyclone classifier is connected to the jet mill crusher used in the present embodiment. The jet mill pulverizer is supplied with the rare earth alloy (coarse pulverized powder) coarsely pulverized in the coarse pulverization step, and pulverizes in the pulverizer. The powder pulverized in the pulverizer is collected in a collection tank through a cyclone classifier. Thus, a fine powder of about 0.1 to 20 μm can be obtained. The pulverizer used for such fine pulverization is not limited to a jet mill, and may be an attritor or a ball mill. In grinding, a lubricant such as zinc stearate may be used as a grinding aid.
[Press molding]
In the present embodiment, for example, 0.3 mass% of a lubricant is added to and mixed with the magnetic powder produced by the above method in a rocking mixer, for example, and the surface of the alloy powder particles is coated with the lubricant. Next, the magnetic powder produced by the above-described method is molded in an orientation magnetic field using a known press machine. The intensity of the applied magnetic field is, for example, 1.0 to 1.7 Tesla (T). The molding pressure is set so that the green density of the molded body is, for example, about 4 to 4.5 g / cm 3 .
[Sintering process]
It carries out for 10 to 240 minutes with respect to said powder molded object at the temperature within the range of 1000-1200 degreeC, for example. Even if the step of holding at a temperature in the range of 650 to 1000 ° C. for 10 to 240 minutes and the step of further promoting the sintering at a temperature higher than the above holding temperature (for example, 1000 to 1200 ° C.) are sequentially performed. Good. During sintering, particularly when a liquid phase is generated (when the temperature is in the range of 650 to 1000 ° C.), the R-rich phase in the grain boundary phase begins to melt and a liquid phase is formed. Then, sintering progresses and a sintered magnet body is formed. After the sintering step, aging treatment (400 ° C. to 700 ° C.) and grinding for dimension adjustment may be performed.

本発明の製造方法によって製造される表面改質されたR−Fe−B系焼結磁石は、優れた耐食性が酸化熱処理によって付与されているとともに、熱処理後の降温時における保磁力低下が抑制されているので、例えば、ハイブリッド自動車や電気自動車の駆動モータとして使用されたり、空調機のコンプレッサーなどに組み込まれたりするIPMモータでの使用に適したものである。なお、本発明の製造方法によって製造される表面改質されたR−Fe−B系焼結磁石を用いてIPMモータを製造する場合、ロータの内部に磁石を埋め込む工程を経て行えばよい。   The surface-modified R—Fe—B sintered magnet produced by the production method of the present invention has excellent corrosion resistance imparted by an oxidation heat treatment, and a decrease in coercive force when the temperature is lowered after the heat treatment is suppressed. Therefore, for example, it is suitable for use in an IPM motor that is used as a drive motor for a hybrid vehicle or an electric vehicle, or incorporated in a compressor of an air conditioner. In addition, what is necessary is just to pass through the process of embedding a magnet in the inside of a rotor, when manufacturing an IPM motor using the surface-modified R-Fe-B system sintered magnet manufactured by the manufacturing method of this invention.

以下、本発明を実施例によってさらに詳細に説明するが、本発明はこれに限定して解釈されるものではない。   EXAMPLES Hereinafter, although an Example demonstrates this invention further in detail, this invention is limited to this and is not interpreted.

(実施例1)
Nd:20.8、Pr:5.9、Dy:3.0、B:0.93、Co:2.0、Cu:0.1、Al:0.15、Ga:0.07、残部:Fe(単位はmass%)の組成を有する厚さ0.2mm〜0.3mmの合金薄片をストリップキャスト法により作製した。
次に、この合金薄片を容器に充填し、水素処理装置内に収容した。そして、水素処理装置内を圧力500kPaの水素ガスで満たすことにより、室温で合金薄片に水素吸蔵させた後、放出させた。このような水素処理を行うことにより、合金薄片を脆化し、大きさ約0.15mm〜0.2mmの粗粉砕粉末を作製した。
上記の水素処理により作製した粗粉砕粉末に対し粉砕助剤として0.04mass%のステアリン酸亜鉛を添加し混合した後、ジェットミル装置による粉砕工程を行うことにより、粉末粒径が約3μmの微粉末を作製した。
こうして作製した微粉末をプレス装置により成形し、粉末成形体を作製した。具体的には、印加磁界中で粉末粒子を磁界配向した状態で圧縮し、プレス成形を行った。その後、成形体をプレス装置から抜き出し、真空炉により1050℃で4時間の焼結工程を行い、焼結体ブロックを得た。
得られた焼結体ブロックを真空中にて490℃で2.5時間の時効処理を行った後、その表面に対し研削加工を行って寸法調整し、厚さ6mm×縦7mm×横7mmの焼結磁石を得た。
Example 1
Nd: 20.8, Pr: 5.9, Dy: 3.0, B: 0.93, Co: 2.0, Cu: 0.1, Al: 0.15, Ga: 0.07, balance: An alloy flake having a composition of Fe (unit: mass%) and having a thickness of 0.2 mm to 0.3 mm was prepared by strip casting.
Next, this alloy flake was filled in a container and accommodated in a hydrogen treatment apparatus. Then, the hydrogen treatment apparatus was filled with hydrogen gas at a pressure of 500 kPa, so that hydrogen was occluded in the alloy flakes at room temperature and then released. By performing such hydrogen treatment, the alloy flakes were embrittled and coarsely pulverized powder having a size of about 0.15 mm to 0.2 mm was produced.
After adding 0.04 mass% zinc stearate as a pulverization aid to the coarsely pulverized powder produced by the above hydrogen treatment and mixing, a pulverization step using a jet mill device is performed to obtain a fine particle diameter of about 3 μm. A powder was prepared.
The fine powder thus produced was molded by a press apparatus to produce a powder compact. Specifically, the powder particles were compressed in a magnetic field-oriented state in an applied magnetic field and pressed. Thereafter, the molded body was extracted from the press apparatus, and a sintering process was performed at 1050 ° C. for 4 hours in a vacuum furnace to obtain a sintered body block.
The obtained sintered body block was subjected to an aging treatment at 490 ° C. for 2.5 hours in a vacuum, and then the surface was ground to adjust the dimensions, and the thickness was 6 mm × length 7 mm × width 7 mm. A sintered magnet was obtained.

上記の方法で得た焼結磁石を超音波水洗した後、図1に示した構成を有する連続処理炉を用いて、昇温工程、熱処理工程、降温工程を実行し、表面改質を行った。なお、焼結磁石の温度の測定は、熱電対を装着した温度測定用磁石の温度をモニタリングすることにより行った。
(1)昇温工程
常温(25℃を意味する。以下同じ)から熱処理を行う温度(420℃)までの昇温を、露点−40℃の大気(酸素分圧20000Pa,水蒸気分圧19Pa,酸素分圧/水蒸気分圧=1052)の雰囲気下、500℃/時間の平均昇温速度で行った。
(2)熱処理工程
露点0℃の大気(酸素分圧20000Pa,水蒸気分圧600Pa,酸素分圧/水蒸気分圧=33.3)の雰囲気下、420℃で30分間の熱処理を行った。
(3)降温工程
昇温工程において採用した雰囲気と同じ雰囲気下、420℃から100℃までの降温を690℃/時間の平均冷却速度で行った。なお、平均冷却速度の調整は、降温に用いる雰囲気ガスの流量を調整することにより行った。
After the sintered magnet obtained by the above method was ultrasonically washed, the temperature was improved, the heat treatment step, and the temperature reduction step were performed using the continuous processing furnace having the configuration shown in FIG. . The temperature of the sintered magnet was measured by monitoring the temperature of a temperature measuring magnet equipped with a thermocouple.
(1) Temperature rising step Temperature rising from room temperature (meaning 25 ° C., the same applies hereinafter) to the temperature at which heat treatment is performed (420 ° C.) is carried out in the atmosphere with a dew point of −40 ° C. (oxygen partial pressure 20000 Pa, water vapor partial pressure 19 Pa, oxygen The reaction was performed at an average temperature increase rate of 500 ° C./hour in an atmosphere of partial pressure / water vapor partial pressure = 1052).
(2) Heat treatment step Heat treatment was performed at 420 ° C. for 30 minutes in an atmosphere with a dew point of 0 ° C. (oxygen partial pressure 20000 Pa, water vapor partial pressure 600 Pa, oxygen partial pressure / water vapor partial pressure = 33.3).
(3) Temperature-falling step In the same atmosphere as that employed in the temperature-raising step, the temperature was lowered from 420 ° C. to 100 ° C. at an average cooling rate of 690 ° C./hour. The average cooling rate was adjusted by adjusting the flow rate of the atmospheric gas used for cooling.

以上の方法で焼結磁石の表面に形成された改質層の厚みは1.7μmであった。なお、改質層の厚みは、表面改質された焼結磁石を樹脂埋め研磨後、イオンビーム断面加工装置(SM09010:日本電子社製)を用いて試料作製し、電界放出型走査電子顕微鏡(S−4300:日立ハイテクノロジー社製)を用いて断面観察を行うことによって測定した。   The thickness of the modified layer formed on the surface of the sintered magnet by the above method was 1.7 μm. The thickness of the modified layer was determined by preparing a sample using an ion beam cross-section processing device (SM09010: manufactured by JEOL Ltd.) after embedding and polishing a surface-modified sintered magnet, and then using a field emission scanning electron microscope ( S-4300: manufactured by Hitachi High-Technology Corporation) was used for cross-sectional observation.

(実施例2)
熱処理工程を露点−40℃の大気(酸素分圧20000Pa,水蒸気分圧19Pa,酸素分圧/水蒸気分圧=1052)の雰囲気下、420℃で20分間行ったこと以外は実施例1と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.6μmであった。
(Example 2)
The same method as in Example 1 except that the heat treatment step was performed at 420 ° C. for 20 minutes in the atmosphere of dew point −40 ° C. in the atmosphere (oxygen partial pressure 20000 Pa, water vapor partial pressure 19 Pa, oxygen partial pressure / water vapor partial pressure = 1052). The surface modification of the sintered magnet was performed. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.6 μm.

(実施例3)
内部に雰囲気ガスを流通させることでその雰囲気を制御するためのガス導入路とガス排出路を備えたSUS製の耐熱性容器に焼結磁石を収容し、焼結磁石を収容した耐熱性容器をバッチ式の熱処理炉の処理室に収容して耐熱性容器の内部の雰囲気を制御しながら昇温工程と熱処理工程を実行した後、降温工程を、耐熱性容器の内部を降温工程のための雰囲気とした後に耐熱性容器を熱処理炉から取り出して別途に冷却することで1800℃/時間の平均冷却速度で実行したこと以外は実施例1と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.7μmであった。
(Example 3)
A sintered magnet is accommodated in a SUS heat-resistant container equipped with a gas introduction path and a gas discharge path for controlling the atmosphere by circulating the atmosphere gas inside, and a heat-resistant container containing the sintered magnet is provided. After performing the temperature raising process and heat treatment process while controlling the atmosphere inside the heat-resistant container housed in the processing chamber of the batch type heat treatment furnace, the temperature-lowering process is performed and the atmosphere inside the heat-resistant container is the atmosphere for the temperature-lowering process. After that, the surface modification of the sintered magnet was performed in the same manner as in Example 1 except that the heat-resistant container was taken out of the heat treatment furnace and cooled separately to carry out at an average cooling rate of 1800 ° C./hour. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.7 μm.

(実施例4)
Nd:19.8、Pr:5.7、Dy:4.3、B:0.93、Co:2.0、Cu:0.1、Al:0.15、Ga:0.07、残部:Fe(単位はmass%)の組成を有する厚さ0.2mm〜0.3mmの合金薄片を用いて焼結磁石を作製したことと、熱処理工程を400℃で30分間行ったこと以外は実施例3と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.5μmであった。
Example 4
Nd: 19.8, Pr: 5.7, Dy: 4.3, B: 0.93, Co: 2.0, Cu: 0.1, Al: 0.15, Ga: 0.07, balance: Except that a sintered magnet was produced using an alloy flake having a composition of Fe (unit: mass%) having a thickness of 0.2 mm to 0.3 mm, and the heat treatment step was performed at 400 ° C. for 30 minutes. The surface modification of the sintered magnet was performed in the same manner as in No. 3. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.5 μm.

(実施例5)
Nd:19.8、Pr:5.7、Dy:4.3、B:0.93、Co:2.0、Cu:0.1、Al:0.15、Ga:0.07、残部:Fe(単位はmass%)の組成を有する厚さ0.2mm〜0.3mmの合金薄片を用いて焼結磁石を作製したことと、熱処理工程を露点−40℃の大気(酸素分圧20000Pa,水蒸気分圧19Pa,酸素分圧/水蒸気分圧=1052)の雰囲気下、420℃で20分間行ったことと、750℃/時間の平均冷却速度で降温工程を行ったこと以外は実施例1と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.8μmであった。
(Example 5)
Nd: 19.8, Pr: 5.7, Dy: 4.3, B: 0.93, Co: 2.0, Cu: 0.1, Al: 0.15, Ga: 0.07, balance: A sintered magnet was prepared using an alloy flake with a thickness of 0.2 mm to 0.3 mm having a composition of Fe (unit: mass%), and the heat treatment step was performed in an atmosphere with a dew point of −40 ° C. (oxygen partial pressure 20000 Pa, Example 1 except that it was performed at 420 ° C. for 20 minutes in an atmosphere of water vapor partial pressure 19 Pa and oxygen partial pressure / water vapor partial pressure = 1052) and that the temperature lowering step was performed at an average cooling rate of 750 ° C./hour. The surface modification of the sintered magnet was performed by the same method. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.8 μm.

(実施例6)
Nd:30.5、B:0.95、Co:0.9、Cu:0.1、Al:0.1、Ga:0.1、残部:Fe(単位はmass%)の組成を有する厚さ0.2mm〜0.3mmの合金薄片を用いて焼結磁石を作製したことと、熱処理工程を340℃で120分間行ったこと以外は実施例3と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.2μmであった。
(Example 6)
Thickness having a composition of Nd: 30.5, B: 0.95, Co: 0.9, Cu: 0.1, Al: 0.1, Ga: 0.1, balance: Fe (unit: mass%) Surface modification of the sintered magnet in the same manner as in Example 3 except that a sintered magnet was prepared using an alloy flake with a thickness of 0.2 mm to 0.3 mm and the heat treatment step was performed at 340 ° C. for 120 minutes. Went. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.2 μm.

(実施例7)
Nd:23.0、Pr:6.6、Dy:1.2、B:1.00、Co:2.0、Cu:0.1、Al:0.2、残部:Fe(単位はmass%)の組成を有する厚さ0.2mm〜0.3mmの合金薄片を用いて焼結磁石を作製したことと、熱処理工程を露点−40℃の大気(酸素分圧20000Pa,水蒸気分圧19Pa,酸素分圧/水蒸気分圧=1052)の雰囲気下、300℃で120分間行ったことと、750℃/時間の平均冷却速度で降温工程を行ったこと以外は実施例1と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは0.9μmであった。
(Example 7)
Nd: 23.0, Pr: 6.6, Dy: 1.2, B: 1.00, Co: 2.0, Cu: 0.1, Al: 0.2, balance: Fe (unit is mass%) ) And the heat treatment process was performed in the atmosphere (oxygen partial pressure 20000 Pa, water vapor partial pressure 19 Pa, oxygen Sintered magnet in the same manner as in Example 1 except that it was performed at 300 ° C. for 120 minutes in an atmosphere of partial pressure / water vapor partial pressure = 1052) and that the temperature lowering step was performed at an average cooling rate of 750 ° C./hour. The surface was modified. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 0.9 μm.

(比較例1)
420℃/時間の平均冷却速度で降温工程を行ったこと以外は実施例1と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.6μmであった。
(Comparative Example 1)
The surface modification of the sintered magnet was performed in the same manner as in Example 1 except that the temperature lowering step was performed at an average cooling rate of 420 ° C./hour. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.6 μm.

(比較例2)
530℃/時間の平均冷却速度で降温工程を行ったこと以外は実施例2と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.7μmであった。
(Comparative Example 2)
The surface modification of the sintered magnet was performed in the same manner as in Example 2 except that the temperature lowering step was performed at an average cooling rate of 530 ° C./hour. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.7 μm.

(比較例3)
530℃/時間の平均冷却速度で降温工程を行ったこと以外は実施例4と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.6μmであった。
(Comparative Example 3)
The surface modification of the sintered magnet was performed in the same manner as in Example 4 except that the temperature lowering step was performed at an average cooling rate of 530 ° C./hour. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.6 μm.

(比較例4)
490℃/時間の平均冷却速度で降温工程を行ったこと以外は実施例6と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.3μmであった。
(Comparative Example 4)
The surface modification of the sintered magnet was performed in the same manner as in Example 6 except that the temperature lowering step was performed at an average cooling rate of 490 ° C./hour. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.3 μm.

(比較例5)
530℃/時間の平均冷却速度で降温工程を行ったこと以外は実施例7と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは0.9μmであった。
(Comparative Example 5)
The surface modification of the sintered magnet was performed in the same manner as in Example 7 except that the temperature lowering step was performed at an average cooling rate of 530 ° C./hour. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 0.9 μm.

(参考例1)
Nd:18.1、Pr:5.2、Dy:6.5、B:0.95、Co:2.0、Cu:0.1、Al:0.15、Ga:0.07、残部:Fe(単位はmass%)の組成を有する厚さ0.2mm〜0.3mmの合金薄片を用いて焼結磁石を作製したことと、熱処理工程を400℃で30分間行ったことと、690℃/時間の平均冷却速度で降温工程を行ったこと以外は実施例1と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.6μmであった。
(Reference Example 1)
Nd: 18.1, Pr: 5.2, Dy: 6.5, B: 0.95, Co: 2.0, Cu: 0.1, Al: 0.15, Ga: 0.07, balance: A sintered magnet was produced using an alloy flake having a composition of Fe (unit: mass%) having a thickness of 0.2 mm to 0.3 mm, a heat treatment step was performed at 400 ° C. for 30 minutes, and 690 ° C. The surface modification of the sintered magnet was performed in the same manner as in Example 1 except that the temperature lowering step was performed at an average cooling rate of / hour. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.6 μm.

(参考例2)
Nd:15.4、Pr:4.3、Dy:11.7、B:0.95、Co:2.0、Cu:0.1、Al:0.15、Ga:0.07、残部:Fe(単位はmass%)の組成を有する厚さ0.2mm〜0.3mmの合金薄片を用いて焼結磁石を作製したことと、熱処理工程を400℃で30分間行ったことと、690℃/時間の平均冷却速度で降温工程を行ったこと以外は実施例1と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.7μmであった。
(Reference Example 2)
Nd: 15.4, Pr: 4.3, Dy: 11.7, B: 0.95, Co: 2.0, Cu: 0.1, Al: 0.15, Ga: 0.07, balance: A sintered magnet was produced using an alloy flake having a composition of Fe (unit: mass%) having a thickness of 0.2 mm to 0.3 mm, a heat treatment step was performed at 400 ° C. for 30 minutes, and 690 ° C. The surface modification of the sintered magnet was performed in the same manner as in Example 1 except that the temperature lowering step was performed at an average cooling rate of / hour. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.7 μm.

(参考例3)
420℃/時間の平均冷却速度で降温工程を行ったこと以外は参考例1と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.7μmであった。
(Reference Example 3)
The surface modification of the sintered magnet was performed in the same manner as in Reference Example 1 except that the temperature lowering step was performed at an average cooling rate of 420 ° C./hour. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.7 μm.

(参考例4)
420℃/時間の平均冷却速度で降温工程を行ったこと以外は参考例2と同じ方法で焼結磁石の表面改質を行った。その結果、焼結磁石の表面に形成された改質層の厚みは1.6μmであった。
(Reference Example 4)
The surface modification of the sintered magnet was performed in the same manner as in Reference Example 2 except that the temperature lowering step was performed at an average cooling rate of 420 ° C./hour. As a result, the thickness of the modified layer formed on the surface of the sintered magnet was 1.6 μm.

(磁気特性評価)
実施例1〜7、比較例1〜5、参考例1〜4のそれぞれにおいて表面改質を行った焼結磁石の固有保磁力を、表面改質を行う前の焼結磁石の固有保磁力と比較し、下記の数式で固有保磁力劣化率を算出した。結果を表1に示す。なお、固有保磁力の測定は、磁気測定装置(TPN−2−10:東英工業社製)を用いて行った。
固有保磁力劣化率(%)=((A−B)/A)×100
A:表面改質前の焼結磁石の固有保磁力(20個の平均値)
B:表面改質後の焼結磁石の固有保磁力(20個の平均値)
(Evaluation of magnetic properties)
The intrinsic coercivity of the sintered magnet subjected to surface modification in each of Examples 1 to 7, Comparative Examples 1 to 5, and Reference Examples 1 to 4, and the intrinsic coercivity of the sintered magnet before surface modification In comparison, the intrinsic coercivity deterioration rate was calculated by the following formula. The results are shown in Table 1. The intrinsic coercive force was measured using a magnetometer (TPN-2-10: manufactured by Toei Kogyo Co., Ltd.).
Inherent coercive force deterioration rate (%) = ((A−B) / A) × 100
A: Intrinsic coercive force of sintered magnet before surface modification (average value of 20)
B: Intrinsic coercive force of sintered magnet after surface modification (average value of 20)

(耐食性評価)
実施例1〜7、比較例1〜5、参考例1〜4のそれぞれにおいて表面改質を行った焼結磁石に対し、温度:60℃×相対湿度:90%の高温高湿条件下での耐食性試験を24時間行い、試験後の表面発錆の有無を外観観察により調べた。試験に供した各20個の磁石のうち表面発錆が認められた磁石の個数を表1に示す。
(Corrosion resistance evaluation)
For each sintered magnet subjected to surface modification in each of Examples 1 to 7, Comparative Examples 1 to 5, and Reference Examples 1 to 4, the temperature was 60 ° C. and the relative humidity was 90% under high temperature and high humidity conditions. A corrosion resistance test was conducted for 24 hours, and the presence or absence of surface rust after the test was examined by appearance observation. Table 1 shows the number of magnets on which surface rusting was observed among the 20 magnets subjected to the test.

(まとめ)
参考例から明らかなように、RH含有量が多い(具体的には6.5mass%以上)焼結磁石は、熱処理後の降温の際の平均冷却速度にかかわらず固有保磁力劣化率は極めて低い数値であり、降温時における保磁力低下は認められなかった。これに対し、実施例と比較例から明らかなように、RH含有量が少ない焼結磁石は、熱処理後の降温の際の平均冷却速度が遅いと固有保磁力劣化率が高い数値となり、降温時における保磁力低下が認められたが、平均冷却速度を速めることで固有保磁力劣化率の改善が図られ、降温時における保磁力低下を抑制することができた。なお、降温の際の平均冷却速度が遅いことによる保磁力低下は、RH含有量が少なくとも4.5mass%の焼結磁石において認められ、平均冷却速度が少なくとも650℃/時間で保磁力低下の抑制効果が認められた(別途の実験による)。焼結磁石の表面改質によって付与された耐食性は、実施例、比較例、参考例の間で差異はなく、いずれにおいても優れたものであった。
(Summary)
As is clear from the reference examples, sintered magnets with a high RH content (specifically, 6.5 mass% or more) have an extremely low intrinsic coercive force deterioration rate regardless of the average cooling rate when the temperature is lowered after heat treatment. This is a numerical value, and no decrease in coercive force was observed when the temperature was lowered. On the other hand, as is clear from the examples and comparative examples, the sintered magnet with a low RH content has a high rate of deterioration of the intrinsic coercive force when the average cooling rate at the time of temperature reduction after the heat treatment is slow, Although a decrease in coercive force was observed, the rate of degradation of the intrinsic coercive force was improved by increasing the average cooling rate, and the decrease in coercive force during cooling could be suppressed. In addition, a decrease in coercive force due to a slow average cooling rate at the time of temperature decrease was observed in a sintered magnet having an RH content of at least 4.5 mass%, and the decrease in coercive force was suppressed at an average cooling rate of at least 650 ° C./hour. The effect was recognized (by a separate experiment). The corrosion resistance imparted by the surface modification of the sintered magnet was not different among Examples, Comparative Examples, and Reference Examples, and was excellent in all cases.

本発明は、RH含有量が少ないか、またはRHを含まない、耐食性に優れるR−Fe−B系焼結磁石を、工程中に保磁力低下を起こすことなく製造する方法を提供することができる点において産業上の利用可能性を有する。   INDUSTRIAL APPLICABILITY The present invention can provide a method for producing an R—Fe—B based sintered magnet having a low RH content or containing no RH and having excellent corrosion resistance without causing a reduction in coercive force during the process. In terms of industrial applicability.

Claims (2)

重希土類元素(RH:DyおよびTbから選択される少なくとも1種)含有量が4.5mass%以下のR−Fe−B系焼結磁石に対し、酸素分圧が1×10Pa〜1×10Paで水蒸気分圧が1000Pa未満であり、かつ、酸素分圧と水蒸気分圧の比率(酸素分圧/水蒸気分圧)が1〜20000の雰囲気下、200℃〜450℃で熱処理を行う工程を含み、かつ、熱処理を行った温度からの磁石の降温を、少なくとも100℃に至るまで650℃/時間以上の平均冷却速度で行うことを特徴とする耐食性R−Fe−B系焼結磁石の製造方法。 The oxygen partial pressure is 1 × 10 3 Pa to 1 × for an R—Fe—B based sintered magnet having a heavy rare earth element (RH: at least one selected from Dy and Tb) content of 4.5 mass% or less. Heat treatment is performed at 200 ° C. to 450 ° C. in an atmosphere of 10 5 Pa with a water vapor partial pressure of less than 1000 Pa and a ratio of oxygen partial pressure to water vapor partial pressure (oxygen partial pressure / water vapor partial pressure) of 1 to 20000. A corrosion-resistant R—Fe—B-based sintered magnet comprising a step of lowering the temperature of the magnet from the heat-treated temperature at an average cooling rate of 650 ° C./hour or more until reaching a temperature of at least 100 ° C. Manufacturing method. 平均冷却速度を2000℃/時間以下とすることを特徴とする請求項1記載の製造方法。   The method according to claim 1, wherein the average cooling rate is 2000 ° C / hour or less.
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JP2012204486A (en) * 2011-03-24 2012-10-22 Hitachi Metals Ltd SURFACE-MODIFIED R-Fe-B BASED SINTERED MAGNET AND PRODUCTION METHOD THEREFOR
JP2012204581A (en) * 2011-03-25 2012-10-22 Hitachi Metals Ltd PRODUCTION METHOD OF SURFACE MODIFIED R-Fe-B BASED SINTERED MAGNET
JP2014063792A (en) * 2012-09-20 2014-04-10 Hitachi Metals Ltd METHOD OF MANUFACTURING SURFACE-MODIFIED R-Fe-B-BASED SINTERED MAGNET
JP2017036483A (en) * 2015-08-11 2017-02-16 セイコーエプソン株式会社 Manufacturing method for sintered body, manufacturing method for degreased body and heating furnace
CN109192424A (en) * 2018-08-29 2019-01-11 宁波招宝磁业有限公司 A kind of ultra-high coercive force sintered Nd-Fe-B magnet

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JP2009054704A (en) * 2007-08-24 2009-03-12 Shin Etsu Chem Co Ltd Manufacturing method of rare earth permanent magnet
JP2010251340A (en) * 2009-03-26 2010-11-04 Hitachi Metals Ltd METHOD FOR MANUFACTURING SURFACE-MODIFIED R-Fe-B-BASED SINTERED MAGNET
JP2010251341A (en) * 2009-03-26 2010-11-04 Hitachi Metals Ltd METHOD FOR PREVENTING PARTICLE SHEDDING OF R-Fe-B-BASED SINTERED MAGNET

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2012204486A (en) * 2011-03-24 2012-10-22 Hitachi Metals Ltd SURFACE-MODIFIED R-Fe-B BASED SINTERED MAGNET AND PRODUCTION METHOD THEREFOR
JP2012204581A (en) * 2011-03-25 2012-10-22 Hitachi Metals Ltd PRODUCTION METHOD OF SURFACE MODIFIED R-Fe-B BASED SINTERED MAGNET
JP2014063792A (en) * 2012-09-20 2014-04-10 Hitachi Metals Ltd METHOD OF MANUFACTURING SURFACE-MODIFIED R-Fe-B-BASED SINTERED MAGNET
JP2017036483A (en) * 2015-08-11 2017-02-16 セイコーエプソン株式会社 Manufacturing method for sintered body, manufacturing method for degreased body and heating furnace
CN109192424A (en) * 2018-08-29 2019-01-11 宁波招宝磁业有限公司 A kind of ultra-high coercive force sintered Nd-Fe-B magnet

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