JP2012115950A - Workpiece cutting method - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a cube-cutting type wire saw which can cut several cylindrical workpieces and cubic workpieces in the same size without exchanging a wire-guiding roller.SOLUTION: The cube-cutting type wire saw 1 cuts one or two or more of cubic workpieces 3 and several cylindrical workpieces 4 in the same size by using the wires 2 which intersect on a grid at a specific pitch. When cutting the several cylindrical workpieces 4 simultaneously, several cylindrical workpieces 4 are placed in a checker pattern on a grid of the wires 2 and several cylindrical workpieces 4 are arranged in a zigzag pattern on both sides of each of the wires 2 without changing the pitch of the wires 2 for cutting of cubic workpieces 3.

Description

  The present invention relates to a method of cutting different types of workpieces as a large number of quadrangular prisms with a square-cut wire saw.

  Patent Document 1 discloses an example of a wire cutting type wire saw. In general, in a square-cut wire saw, a wire is wound around a large number of rollers in a cross shape as viewed in a plan view and arranged in a grid pattern in a cutting area. During the cutting operation of the workpiece, the grid-like wire contacts the workpiece in the cutting area while traveling, and cuts the workpiece as a rectangular column having a predetermined dimension. Such a cutting form is also called “corner cutting” by those skilled in the art.

  Conventionally, square cutting uses this type of wire saw to position and cut a large cubic workpiece such as a silicon block, or to align a plurality of cylindrical workpieces such as a silicon ingot and cut simultaneously. I was going.

  FIG. 1 and FIG. 2 show a rectangular column having the same size by using one square-cut type wire saw 1 in accordance with the conventional method, and using the wire 2 to form one cubic workpiece 3 and a plurality of cylindrical workpieces 4. Shows the state when cutting.

  In FIG. 1, the wires 2 in the X-axis direction and the Y-axis direction are respectively wound around a roller 5 and a roller 6 with one or two or more wire guiding grooves at a predetermined equal pitch, and at positions corresponding to the workpiece 3. Crosses in a grid pattern to form a cutting area. Note that the wire 2 in the X-axis direction and the wire 2 in the Y-axis direction intersect at different XY planes, and thus are in positions that do not interfere with each other.

  As shown in FIG. 1, when cutting the workpiece 3, the workpiece 3 is arranged so as to face all the grids having the same pitch with respect to the grid-like wire 2. At the time of machining, the wire 2 in the X-axis direction and the Y-axis direction is in contact with the upper surface of the work 3 while traveling and is sent in the cutting direction, so that the work 3 is cut into a plurality of square pillars for each square of the wire 2 . Here, the vertical and horizontal dimensions of the rectangular column correspond to the pitch of the wire 2.

  In FIG. 2, the wires 2 in the X-axis direction and the Y-axis direction are wound around one or two or more rollers 5 and 6 in an intersecting state so as to alternately repeat a wide pitch and a narrow pitch. It corresponds to each workpiece 4 with a wide pitch grid. 2, as in FIG. 1, the wire 2 in the X-axis direction and the wire 2 in the Y-axis direction do not interfere with each other because they intersect at different XY planes.

  As shown in FIG. 2, when cutting a plurality of cylindrical workpieces 4, each of the workpieces 4 is arranged in a grid having a wide pitch. At the time of processing, the wires 2 in the X-axis direction and the Y-axis direction are in contact with the upper surface of each workpiece 4 while traveling and are sent in the cutting direction, thereby cutting the workpieces 4 into a substantially quadrangular prism shape. Here, the vertical and horizontal dimensions of the quadrangular prism correspond to a wide pitch of the wires 2 and are equal to the pitch of the wires 2 in FIG.

  As described above, according to the cutting of the conventional method, when the types of the workpieces 3 and 4 are different, even if the vertical and horizontal dimensions of the rectangular column after cutting, that is, the lengths of the four sides are the same, the arrangement of the wires 2 is As shown in FIG. 1 and FIG. Therefore, when the workpieces 3 and 4 are cut by using a single wire cutting saw 1, even when the vertical and horizontal dimensions of the square pillars after cutting are the same, the workpiece 4 and the workpiece 4 are cut. When the wire is cut, the arrangement of the wire 2 must be changed. For this reason, position adjustment and replacement of the rollers 5 and 6 with wire guiding grooves, replacement, and winding work of the wire 2 are necessary. In addition to the time required for the changeover, there are disadvantages in that the number of parts around the rollers 5 and 6 and the rollers increases.

JP 2009-241161 A

  Accordingly, an object of the present invention is to provide one or two or more cubic workpieces and a plurality of cylindrical workpieces having the same dimensions in a square-cut wire saw without adjusting or replacing the position of a roller with a wire guiding groove. Is to be able to cut as.

  Therefore, the inventor solves the above problems by cutting a plurality of columnar workpieces by paying attention to the arrangement of the workpieces and making the arrangement a special arrangement. That is, the present invention uses a wire that intersects in a grid pattern at a predetermined pitch to cut one or two or more cubic workpieces and a plurality of cylindrical workpieces as a rectangular column having the same dimensions. A plurality of cylindrical workpieces are arranged in a checkerboard pattern in a grid-like grid of the wires without changing the wire pitch at the time of cutting.

  More specifically, the workpiece cutting method according to the present invention uses one or two or more cubic workpieces and a plurality of cylindrical workpieces having the same dimensions by using wires that intersect in a grid pattern at a predetermined pitch. In a square-cut wire saw that cuts as a rectangular column, when simultaneously cutting a plurality of cylindrical workpieces, a plurality of cylindrical workpieces without changing the wire pitch when cutting one or more cubic workpieces Are arranged in a checkered pattern on a grid-like grid of wires, and a plurality of cylindrical workpieces are arranged in a staggered manner across each wire.

  In the workpiece cutting method, one or more cubic workpieces are fixed to one plate-like workpiece plate, and the plate-like workpiece plate is positioned on the base by a frame-frame-like positioning plate. Item 2).

  In the work cutting method, the frame-shaped positioning plate is positioned on the base by a plurality of positioning blocks.

  In the work cutting method described above, a plurality of cylindrical workpieces are fixed to individual cylindrical work plates, and these cylindrical work plates are fitted into positioning holes in a checkered pattern arrangement on a flat positioning plate. Are positioned on the base (claim 4).

  In the workpiece cutting method described above, the workpiece integrated with the cylindrical workpiece plate is positioned in the circumferential direction by fitting the positioning pin of the cylindrical workpiece plate into the positioning groove formed in the flat positioning plate. (Claim 5).

  In the workpiece cutting method, the flat plate-like positioning plate is positioned on the base so as to be adjustable in position by a plurality of position adjusting blocks and adjusting bolts.

  Furthermore, in the workpiece cutting method, one or more cubic workpieces and a plurality of cylindrical workpieces are positioned with respect to the wire of the wire saw through the same size base.

  According to the workpiece cutting method according to the present invention, when cutting a plurality of cylindrical workpieces at the same time in a square-cut wire saw, the pitch of the plurality of cylindrical bodies is changed without changing the wire pitch when cutting the cubic workpiece. Since the work is arranged in a checkered pattern in a grid-like grid of wires, in the case of cutting a plurality of cylindrical workpieces and in the case of cutting one or more cubic workpieces However, if the vertical and horizontal dimensions of the square pillar after cutting are the same, there is no need to change the pitch of the wire, rewind the wire, or adjust or replace the position of the roller for guiding the wire. Further, the number of parts around the roller for guiding the wire and the roller can be reduced (claim 1).

  Moreover, since the plurality of cylindrical workpieces are arranged in a staggered manner with the respective wires interposed therebetween, when the plurality of cylindrical workpieces are cut, the wires are separated from the center of the workpiece at the cutting position of each cylindrical workpiece. Even if the directional evacuation force is generated, the direction of the evacuation force is reversed between adjacent cylindrical workpieces in the traveling direction of the wire. (Claim 1).

  In the workpiece cutting method, one or two or more cubic workpieces are fixed to one plate-like workpiece plate, placed in a frame of a frame-shaped positioning plate, and positioned on the base. The workpiece can be accurately positioned (claim 2).

  In the work cutting method, the frame-shaped positioning plate is positioned on the base by the positioning block, and therefore the positioning plate is easily attached to the base in a positioning state.

  In the workpiece cutting method, a plurality of cylindrical workpieces are fixed to individual cylindrical workpiece plates, and are positioned on the base by being fitted into positioning holes in a checkered pattern arrangement of a flat positioning plate. The body workpiece is not displaced during the cutting operation, and the accuracy after the cutting is improved (Claim 4).

  In the work cutting method, the work piece integral with the cylindrical work plate is positioned in the circumferential direction by fitting the positioning pin of the cylindrical work plate into the positioning groove formed in the flat positioning plate. In addition, the plurality of cylindrical workpieces are surely prevented from rotating and are not displaced during the cutting operation, and the accuracy of the cut surface is improved (Claim 5).

  Further, in the work cutting method, since the flat plate-like positioning plate is positioned on the base by the position adjusting block and the adjusting bolt so that the position can be freely adjusted, by adjusting the position of the positioning plate with respect to the base, The cylindrical work plate can be accurately positioned with respect to the wire.

  Furthermore, in the workpiece cutting method, when one or two or more cubic workpieces and a plurality of cylindrical workpieces are positioned with respect to the wire saw wire via the same size base, they are common on the wire saw processing table. The positioning means can be used and the clamping operation is the same, which is advantageous in terms of work.

It is a top view at the time of the cutting | disconnection of one cube workpiece | work by the conventional cutting method. It is a top view at the time of the cutting | disconnection of the workpiece | work of the some cylindrical body by the conventional cutting method. It is a partially broken top view when cut | disconnecting the work of one legislature by the work cutting method which concerns on this invention. It is a partially broken side view when a workpiece of one legislature is cut by the workpiece cutting method according to the present invention. It is a top view when cut | disconnecting the workpiece | work of a some cylindrical body with the workpiece | work cutting method which concerns on this invention. It is a side view when cut | disconnecting the workpiece | work of a some cylindrical body with the workpiece | work cutting method which concerns on this invention. It is an expanded sectional view of the positioning part of the workpiece | work of a some cylindrical body. It is a top view of the positional relationship of a wire and a workpiece | work when cut | disconnecting the workpiece | work of a some cylindrical body with the workpiece | work cutting method which concerns on this invention.

  FIGS. 3 to 8 show an example in which one cube work 3 and a plurality of cylindrical works 4 have the same dimensions based on the cutting method of the present invention using a single wire cutting saw 1. The state when cutting as a quadrangular prism is shown. The cubic work 3 is, for example, polycrystalline silicon, and the cylindrical work 4 is, for example, single crystal silicon.

  First, FIG. 3 and FIG. 4 show a state when one cubic work 3 is cut as a plurality of quadrangular prisms. 3 and 4, the wire 2 in the X-axis direction and the Y-axis direction is usually one continuous cutting wire and is supported by a pair of shafts parallel to the X-axis direction, respectively, as in FIG. 1 or 2 or more wire guide grooves with one or more wire guide grooves supported by a pair of shafts parallel to the Y-axis direction after being wound in parallel in the cutting region on one or more rollers 5 with wire guide grooves The roller 6 is guided to the winding start position, and is wound around these rollers 6 in parallel at the cutting area.

  In this way, one wire 2 is orthogonal when viewed in a plane at an equal pitch, and forms a grid-like grid in a cutting area corresponding to the workpiece 3. Note that the wire 2 in the X-axis direction and the wire 2 in the Y-axis direction are in different XY planes and intersect at different planes, and thus are in positions that do not interfere with each other.

  The interval between the parallel wires 2 is regulated by the groove interval between the rollers 5 and 6, and is set to a predetermined equal pitch. The rollers 5 and 6 are generally independent for each wire winding position in order to facilitate the wire laying operation. However, if the wire wrapping operation is not considered, one roller is provided at each facing position. Can be configured as long rollers 5 and 6.

  The workpiece 3 is fixed to the upper surface of the plate-like workpiece plate 7 by the adhesive layer 9 so as to face all the grids having the same pitch with respect to the grid-like wire 2. The work plate 7 has a wire passing groove 10 that opens on the upper surface in an intersecting state in a grid pattern, and forms a clearance space for the wire 2 when cut.

  The work plate 7 is placed together with the work 3 on, for example, a magnetic adsorption type base 11 and is fitted and positioned in a frame of a frame-frame-shaped positioning plate 12 placed on the base 11. The positioning plate 12 has, for example, two L-shaped positioning blocks 13 for each side. Each positioning block 13 is attached to the outer peripheral edge of the positioning plate 12 by mounting bolts 14, and the positioning plate 12 is positioned with respect to the base 11 by applying a part of the positioning block 13, that is, the inner surface of the lower end to the side surface of the base 11. It is installed as a condition.

  In this way, the workpiece 3, the workpiece plate 7 and the positioning plate 12 integrated therewith are conveyed onto a machining table (not shown) at the machining position of the wire saw 1, and a plurality of locating pins and clamps as positioning means (not shown) of the machining table. By means, it is attached to the wire 2 in a precisely positioned state.

  At the time of machining, the wire 2 in the X-axis direction and the Y-axis direction is in contact with the upper surface of the work 3 while traveling and is sent in a cutting direction relative to the work 3, thereby moving the work 3 to the grid of the wire 2. Each is cut as a square square. Here, the vertical and horizontal dimensions of the rectangular column correspond to the pitch of the parallel wires 2. The wire 2 enters the wire passage groove 10 after the work 3 is completely cut.

  Next, FIG. 5 to FIG. 8 show a state in which a plurality of cylindrical workpieces 4 are cut into rectangular columns having the same vertical and horizontal dimensions while the pitch of the wires 2 is not changed by the square wire saw 1. .

  Also in FIGS. 5 and 6, the wires 2 in the X-axis direction and the Y-axis direction are wound in the same manner as in FIGS. 3 and 4, so that a grid-like grid is formed in the cutting area corresponding to the workpiece 4. Forming. Here, the pitches of the wire 2 in the X-axis direction and the Y-axis direction are set to be equal to the pitch in FIG.

  When the wire saw 1 having the same cutting method as that in FIG. 3 is used and the workpieces 4 of a plurality of cylindrical bodies are cut into the same dimensions in the vertical and horizontal directions without changing the pitch of the wires 2, each workpiece 4 has an individual cylindrical shape. The work plate 8 is fixed to the upper surface of the work plate 8 by the adhesive layer 15, and the work plate 8 is placed in the positioning hole 17 of the flat positioning plate 16. The work plate 8 is preferably a cylindrical body having the same diameter as the work 4.

  The positioning hole 17 of the positioning plate 16 is formed as a circle having a size that fits the work plate 8, and corresponds to the checkered black or white position at the grid-like grid position of the wire 2. Is formed. Each work plate 8 has a cross-girder-shaped wire passage groove 22 opened on the upper surface corresponding to the grid-like wire 2, and forms a clearance space for the wire 2 at the time of cutting.

  The positioning plate 16 is placed on, for example, a magnetic adsorption base 18 and attached to the base 18 in a positioning state by, for example, two position adjusting blocks 20 for every two adjacent sides. Preferably, the base 11 and the base 18 are configured to have the same size.

  As shown in FIG. 7, each position adjustment block 20 is substantially U-shaped, and is attached to the outer peripheral edge of the positioning plate 16 by two mounting bolts 19 as an example. Abut. Further, the position adjustment block 20 has an adjustment bolt 21 with a fastening bolt for fine adjustment of the positioning plate 16. The adjustment bolt 21 is screwed to the position adjustment block 20 and is in contact with the side surface of the base 18 at its tip.

  When the operator selects the direction of rotation of the adjustment bolt 21 on each side and rotates it in the selected direction, the positioning plate 16 can be moved in parallel in the X-axis direction or the Y-axis direction, and any turning direction on the XY plane. The position can be adjusted freely. By this adjustment, all the workpieces 4 can accurately correspond to the wires 2.

  As shown in FIG. 7, the work plate 8 has a positioning pin 23 in the radial direction on the outer peripheral surface. The positioning pin 23 is fitted in the positioning groove 24 of the positioning plate 16 and positioned in the circumferential direction. Is done. By this circumferential positioning, the work plate 8 and the work 4 fixed to the upper surface of the work plate 8 are prevented from rotating, and if necessary, the crystal directions of all the work 4 are aligned, and with respect to the wire 2. Is positioned. As a result, the wire passage groove 22 is also positioned with respect to the wire 2.

  The plurality of workpieces 4 and the workpiece plate 8 integrated therewith are placed on a machining table (not shown) of the wire saw 1 and attached to the machining table in a positioned state by a plurality of locating pins and clamping means (not shown). In this way, the plurality of workpieces 4 and the work plate 8 are finally accurately positioned with respect to the wire 2 of the wire saw 1.

  If the base 18 is configured to have the same dimensions as the base 11, the work table of the wire saw 1, and a plurality of locating pins and clamp means as positioning means (not shown) attached to the work table are used for the base of any workpiece 3, 4. 11 and 18 can be used in common.

  Due to the checkered pattern arrangement of the plurality of workpieces 4 as shown in FIG. 5, the plurality of workpieces 4 adjacent to each other are arranged in a staggered manner with the respective wires 2 in the direction of the Y-axis sandwiched as shown in FIG. Is done. This staggered arrangement is the same in the X-axis direction as in the Y-axis direction. For this reason, all the wires 2 in the X-axis direction and the Y-axis direction pass alternately through the strings of the left work 4 and the right work 4 in the traveling direction.

  At the time of processing, the wires 2 in the X-axis direction and the Y-axis direction are in contact with the upper surfaces of the plurality of workpieces 4 while traveling, and are sent in a cutting direction relative to the workpieces 4 so that the workpieces 4 are substantially square. Are cut into the shape of a rectangular column and finally enter the wire passage groove 22. The maximum vertical and horizontal dimensions of the quadrangular prism coincide with the pitch of the wire 2, and each side of the square, that is, the portion not including the arc corresponds to the length of the chord. After cutting, each workpiece 4 is removed from the processing table together with the workpiece plate 8 and separated from the workpiece plate 8.

  As shown in FIG. 8, due to the staggered arrangement of the plurality of workpieces 4 with respect to the wire 2, the workpieces are connected to the wires 2 due to the resistance difference due to the difference in the area of the cut surface at the cutting position of each workpiece 4 during the cutting of the workpiece 4. The escape force in the direction away from the center of 4 is generated. However, even if the escaping force is generated, the direction of the escaping force is reversed between the workpieces 4 adjacent to each other in the traveling direction of the wire 2. Accuracy is improved. Since this action occurs in the X-axis direction and the Y-axis direction of the wire 2, the processing accuracy of the cut surface is improved in all cut surfaces.

  In the embodiment of FIG. 3, one cubic workpiece 3 is targeted for cutting, but the workpiece 3 is bonded and fixed simultaneously to two workpieces 3 smaller than the workpiece plate 7 on one workpiece plate 7. It is also possible to cut.

  Also, according to the embodiment of FIGS. 3 and 5, the workpieces 3 and 4 are square quadrangular prisms after cutting, but they may be rectangular quadrangular prisms after cutting, and thus the checkered pattern is rectangular. Will form a square. By the way, the checkerboard pattern is originally a square grid, but now it is said to include a rectangle.

DESCRIPTION OF SYMBOLS 1 Wire cutting machine 2 Wire 3 Cubic workpiece 4 Cylindrical workpiece 5 Roller 6 Roller 7 Plate-shaped work plate 8 Cylindrical work plate 9 Adhesive layer 10 Wire passage groove 11 Base 12 Frame frame-shaped positioning plate 13 Positioning block 14 Mounting bolt 15 Adhesive layer 16 Flat positioning plate 17 Positioning hole 18 Base 19 Mounting bolt 20 Position adjusting block 21 Adjusting bolt 22 Wire passage groove 23 Positioning pin 24 Positioning groove

Claims (7)

  A plurality of cylindrical bodies in a square-cut wire saw that cuts one or two or more cubic workpieces and a plurality of cylindrical workpieces as quadrangular columns of the same size using wires that cross in a grid pattern at a predetermined pitch When simultaneously cutting a plurality of workpieces, a plurality of cylindrical workpieces are placed in a checkered pattern on a grid of grids without changing the wire pitch when cutting one or more cubic workpieces. A workpiece cutting method characterized by arranging a plurality of cylindrical workpieces in a staggered manner across each wire.   2. The workpiece according to claim 1, wherein one or more cubic workpieces are fixed to one plate-like workpiece plate, and the plate-like workpiece plate is positioned on the base by a frame-frame-like positioning plate. Cutting method.   3. The work cutting method according to claim 2, wherein the frame-shaped positioning plate is positioned on the base by a plurality of positioning blocks.   A plurality of cylindrical workpieces are fixed to individual cylindrical workpiece plates, and these cylindrical workpiece plates are fitted into positioning holes arranged in a checkered pattern on a flat positioning plate and positioned on a base. The work cutting method according to claim 1.   The cylindrical work plate positioning pin is fitted into a positioning groove formed in the flat positioning plate to position the work integral with the cylindrical work plate in the circumferential direction. 4. The work cutting method according to 4.   6. The workpiece cutting method according to claim 4, wherein the flat positioning plate is positioned on the base so as to be adjustable by a plurality of position adjusting blocks and adjusting bolts.   The one, two or more cubic workpieces and a plurality of cylindrical workpieces are positioned with respect to the wire of the wire saw through the base of the same size. The workpiece cutting method according to claim 4, claim 5, or claim 6.

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