JP2012114237A - Nozzle cleaning device and electronic component mounting device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a nozzle cleaning device which prevents a cleaning fluid from easily scattering while moving and requires only a small installation space, and to provide an electronic component mounting device including the nozzle cleaning device.SOLUTION: A nozzle cleaning device 5 includes a device body 6 which has: a cleaning part 60 having a cleaning tank 600 in which a cleaning fluid L is accumulated and cleaning a cleaned part 82 of a nozzle 8; a dry part 61 disposed above the cleaning part 60 and drying the cleaned part 82 by spraying a gas G to the cleaned part 82 after cleaning; and a shutter part 62 disposed between the cleaning part 60 and the dry part 61 and partitioning the cleaning part 60 from the dry part 61 so as to make communication between the parts or separate the parts from each other. In the cleaning mode, the shutter 620 is opened to clean the cleaned part 82. In the dry mode, the shutter 620 is closed to dry the cleaned part 82.

Description

  The present invention relates to a pin transfer nozzle for transferring solder or the like to a substrate, a nozzle cleaning device for cleaning a nozzle such as a suction nozzle for mounting an electronic component on a substrate, and an electronic component mounting machine including the nozzle cleaning device.

  The pin transfer nozzle includes a large number of pins. A solder film is formed on the dipping device. When transferring the solder to the substrate, first, the pin transfer nozzle is immersed in the solder film, and the solder is attached to a large number of pins. Next, the pin transfer nozzle is moved to the substrate. Then, a large number of pins are brought into contact with the substrate. In this way, the solder is transferred to the substrate. A large number of pins are densely arranged. For this reason, it is easy for solder to adhere between adjacent pins. When the solder is transferred to the substrate in this state, a solder bridge is formed on the substrate. Therefore, the pin transfer nozzle is periodically taken out of the apparatus and subjected to ultrasonic cleaning.

  Further, the suction nozzle sucks the electronic component by suction force. For this reason, negative pressure is supplied to the opening of the suction nozzle. Therefore, the opening of the suction nozzle is likely to be clogged. Therefore, like the pin transfer nozzle, the suction nozzle is periodically taken out of the apparatus and subjected to ultrasonic cleaning.

  However, the cleaning operation of the pin transfer nozzle and the suction nozzle is complicated. In this regard, Patent Documents 1 and 2 disclose an electronic component mounting machine capable of automatically cleaning and drying the suction nozzle. Each of the electronic component mounting machines disclosed in Patent Documents 1 and 2 includes an ultrasonic cleaning device and a drying device. The suction nozzle that has been clogged is cleaned by an ultrasonic cleaning device. The cleaned suction nozzle is dried by a drying device. According to the electronic component mounting machines disclosed in Patent Documents 1 and 2, the suction nozzle can be automatically cleaned and dried. For this reason, the productivity of the substrate is improved.

JP-A-5-75292 JP-A-10-305263

  However, according to the electronic component mounting machines disclosed in Patent Documents 1 and 2, the ultrasonic cleaning device and the drying device are arranged at different positions in the horizontal direction. For this reason, it is necessary to move the suction nozzle after cleaning in the horizontal direction from the ultrasonic cleaning device to the drying device. Therefore, the cleaning liquid may be scattered on the electronic component mounting machine during the movement. Further, since the ultrasonic cleaning device and the drying device are arranged at different positions in the horizontal direction, the installation space for both devices in the electronic component mounting machine is increased accordingly.

  The nozzle cleaning device and the electronic component mounting machine of the present invention have been completed in view of the above problems. SUMMARY OF THE INVENTION An object of the present invention is to provide a nozzle cleaning device in which a cleaning liquid is less likely to be scattered on an electronic component mounting machine during movement, and a small installation space, and an electronic component mounting machine including the nozzle cleaning device.

  (1) In order to solve the above-described problem, a nozzle cleaning device of the present invention has a cleaning tank in which a cleaning liquid is stored, and at least a cleaning unit that cleans a portion to be cleaned of the nozzle with the cleaning liquid, and above the cleaning unit The drying unit is disposed between the cleaning unit and the drying unit, and the cleaning unit and the drying unit are disposed between the cleaning unit and the drying unit. In a cleaning mode for cleaning the portion to be cleaned, the shutter is opened to allow the cleaning portion and the drying portion to communicate with each other. In the drying mode in which the part to be cleaned is lowered to the cleaning tank through the drying part, the part to be cleaned is cleaned, and the part to be cleaned is dried. To the drying section and the shutter Close isolation from the said cleaning unit and said drying unit, characterized in that drying the 該被 cleaning unit.

  According to the nozzle cleaning apparatus of the present invention, the cleaning unit, the shutter unit, and the drying unit are arranged in the vertical direction. For this reason, the installation space which occupies for an electronic component mounting machine can be narrowed. Moreover, what is necessary is just to move a to-be-cleaned part not in the horizontal direction but in the upper direction when drying the to-be-cleaned part after washing | cleaning. For this reason, it is difficult for the cleaning liquid to be scattered on the electronic component mounting machine.

  A shutter unit is interposed between the cleaning unit and the drying unit. In the drying mode, the shutter of the shutter unit is closed. For this reason, there is no possibility that the liquid level of the cleaning liquid is disturbed by the drying gas. Therefore, there is no possibility that the cleaning liquid in the cleaning tank (the cleaning liquid splashed from the liquid surface) adheres to the portion to be cleaned during drying.

  (2) Preferably, in the configuration of (1) above, it is better to have a configuration including a common base to which a plurality of the apparatus main bodies are attached in a replaceable manner. According to this configuration, a plurality of apparatus main bodies can be exchanged and detached from the common base. For example, a plurality of types of apparatus main bodies can be exchanged and used in accordance with the type of nozzle. In this case, according to the kind of nozzle, compared with the case where the whole nozzle cleaning apparatus is replaced | exchanged, replacement | exchange work is easy. Also, by preparing a plurality of apparatus main bodies of the same type, it is possible to perform cleaning and drying of nozzles using other apparatus main bodies while maintaining an arbitrary apparatus main body. For this reason, the downtime accompanying a maintenance can be reduced.

  (3) Preferably, in the configuration of (1) or (2), the cleaning unit includes a brush accommodated in the cleaning tank, and the cleaning target is slidably contacted with the brush in the cleaning mode. It is better to have a configuration for cleaning the portion to be cleaned. According to this configuration, it is possible to clean the portion to be cleaned by using the cleaning liquid and the brush together.

  (4) Preferably, in any one of the configurations (1) to (3), the drying unit is disposed above the cleaning tank, and the drying unit side insertion hole through which the nozzle is inserted, and the drying unit A gas passage having an upstream passage having a blow-out opening at the downstream end opened at the inner peripheral surface of the part-side insertion hole, and a downstream passage having an inlet opening at the upstream end opened at the inner peripheral surface. It is preferable to have a configuration in which a drying member is provided, and in the drying mode, the gas is blown from the outlet to the portion to be cleaned, and is exhausted to the outside from the inlet through the downstream passage.

  The drying unit includes a drying member. The drying member includes a drying section side insertion hole and a gas passage. According to this structure, it becomes easy to spray gas to a to-be-cleaned part. Moreover, it becomes easy to exhaust gas from the inside in the radial direction of the drying portion side insertion hole to the outside.

  (4-1) Preferably, in the configuration of the above (4), the drying unit is arranged between the downstream passage and the outside, and has a filter for filtering the gas. According to this configuration, the cleaning liquid and dust can be filtered out from the gas. For this reason, the gas exhausted outside can be purified.

  (5) Preferably, in the configuration of the above (4), the shutter is disposed below the drying unit side insertion hole, and has a shutter side insertion hole through which the nozzle is inserted. A shutter insertion member having a shutter chamber in which the shutter is slidably accommodated, and a pair of insertion member side insertion holes arranged on both sides in the vertical direction of the shutter chamber and through which the nozzle is inserted, and the insertion member side insertion hole And a sliding contact portion made of fluororesin or fluororubber which is elastically slidably contacted with the shutter, and is a space radially inside the shutter chamber and the insertion member side insertion hole. It is better to have a configuration having a pair of seal members that block

  The shutter unit includes a shutter, a shutter insertion member, and a pair of seal members. The shutter insertion member includes a shutter chamber and a pair of insertion member side insertion holes. The shutter is accommodated in the shutter chamber.

  The seal member is disposed between the shutter and the hole edge on the shutter chamber side of the insertion member side insertion hole. The shutter chamber is isolated from the space inside the radial direction of the insertion member side insertion hole by the seal member. For this reason, in the cleaning mode, it is possible to suppress the cleaning liquid from entering the shutter chamber. Further, in the drying mode, it is possible to prevent the cleaning liquid or gas from entering the shutter chamber. The sliding contact portion of the seal member is made of fluororesin or fluororubber. For this reason, the frictional resistance against the shutter is small. Therefore, the shutter is easy to slide.

  (6) Preferably, in the configuration of the above (4) or (5), the nozzle has a flange portion disposed above the portion to be cleaned, and the apparatus main body includes the drying portion side insertion hole. Made of an elastomer having an elastic member side insertion hole that is disposed above and has a smaller diameter than the drying portion side insertion hole and a larger diameter than the flange portion, and the flange portion is disposed radially inward in the drying mode. It is better to have a configuration having the elastic member.

  According to this structure, the flange part is arrange | positioned in the radial direction inner side of the elastic member side insertion hole in dry mode. For this reason, it is difficult for gas to leak outside from a dry part via an elastic member side penetration hole. The elastic member is made of an elastomer. For this reason, when a flange part contacts the internal peripheral surface of an elastic member side insertion hole, the impact which a flange part receives from an internal peripheral surface can be relieve | moderated.

  (7) In order to solve the above-described problem, an electronic component mounting machine according to the present invention includes a nozzle cleaning device having any one of the above-described configurations (1) to (6). According to the electronic component mounting machine of the present invention, the cleaning unit, the shutter unit, and the drying unit are arranged in the vertical direction. For this reason, the installation space which occupies for the electronic component mounting machine of a nozzle cleaning apparatus can be narrowed. Moreover, what is necessary is just to move a to-be-cleaned part not in the horizontal direction but in the upper direction when drying the to-be-cleaned part after washing | cleaning. For this reason, it is difficult for the cleaning liquid to be scattered on the electronic component mounting machine.

  A shutter unit is interposed between the cleaning unit and the drying unit. In the drying mode, the shutter of the shutter unit is closed. For this reason, there is no possibility that the liquid level of the cleaning liquid is disturbed by the drying gas. Therefore, there is no possibility that the cleaning liquid in the cleaning tank (the cleaning liquid splashed from the liquid surface) adheres to the portion to be cleaned during drying.

  According to the present invention, it is possible to provide a nozzle cleaning device having a narrow installation space and an electronic component mounting machine including the nozzle cleaning device, in which the cleaning liquid is less likely to be scattered on the electronic component mounting machine during movement.

It is a perspective view of the electronic component mounting machine of one Embodiment of this invention. It is a permeation | transmission perspective view of the mounting head of the same electronic component mounting machine. It is a perspective view of the pin transfer nozzle with which the mounting head is mounted. It is a perspective view of the nozzle cleaning apparatus of one Embodiment of this invention. It is sectional drawing of the front-back direction of the nozzle cleaning apparatus. FIG. 6 is a cross-sectional view in the VI-VI direction of FIG. 5. It is a disassembled perspective view of the same nozzle cleaning apparatus. It is a disassembled perspective view of the apparatus main body of the nozzle cleaning apparatus. FIG. 3 is an exploded perspective view of the vicinity of the shutter unit and the cleaning unit of the apparatus main body. It is a perspective view of the shutter insertion member of the shutter part. It is an enlarged view in the frame XI of FIG. It is an enlarged view in the frame XII of FIG. It is a perspective view of the drying part of the apparatus main body. It is sectional drawing of the front-back direction in the cleaning mode of the nozzle cleaning apparatus. It is an enlarged view in the frame XV of FIG. It is sectional drawing of the front-back direction in the drying mode of the nozzle cleaning apparatus. It is an enlarged view in the frame XVII of FIG. FIG. 18A is a schematic diagram of the first stage of movement when the apparatus main body is removed from the base of the nozzle cleaning apparatus. FIG. 18B is a schematic diagram of the second stage of movement when the apparatus main body is removed. FIG. 18C is a schematic diagram of a third stage of movement when the apparatus main body is removed. It is a perspective view at the time of attaching another apparatus main body to the base of the same nozzle cleaning apparatus. It is a perspective view of the drying part of the apparatus main body of the nozzle cleaning apparatus of other embodiment.

  Hereinafter, embodiments of a nozzle cleaning device and an electronic component mounting machine according to the present invention will be described.

<Configuration of electronic component mounting machine>
First, the configuration of the electronic component mounting machine of this embodiment will be described. In the following drawings, the left side corresponds to the upstream side in the substrate transport direction. The right side corresponds to the downstream side in the substrate transport direction. FIG. 1 is a perspective view of the electronic component mounting machine according to the present embodiment. As shown in FIG. 1, the electronic component mounting machine 1 includes a base 2, a module 3, a dip device 4, and a nozzle cleaning device 5.

[Base 2]
The base 2 has a rectangular parallelepiped box shape. The base 2 is disposed on the floor F of the factory. A device pallet 20 is attached to the front opening of the base 2.

[Module 3]
As shown in FIG. 1, the module 3 includes a substrate transfer device 30, an XY robot 31, a mounting head 32, a mark camera 33, a parts camera 34, a control device (not shown), and an image processing device (see FIG. 1). Abbreviation).

(Substrate transfer device 30)
The substrate transport apparatus 30 includes a front side transport unit 303f, a back side transport unit 303r, a front side clamp unit 302f, and a back side clamp unit 302r. Each of the front-side transport unit 303f and the back-side transport unit 303r includes a pair of front and rear conveyor belts. A total of four conveyor belts extend in the left-right direction. A substrate Bf is installed on the near-side transport unit 303f. A substrate Br is installed on the back side conveyance unit 303r.

  Each of the front side clamp portion 302f and the back side clamp portion 302r includes a pair of front and rear clamp pieces. A total of four clamp pieces extend in the left-right direction. The near side clamp part 302f is arranged above the near side transport part 303f. The back side clamp part 302r is arrange | positioned above the back side conveyance part 303r.

(Substrate lifting device 35)
The substrate elevating device 35 includes a front side elevating unit 350f and a back side elevating unit 350r. The front side lifting unit 350f is disposed below the front side transport unit 303f. The back side lifting unit 350r is disposed below the back side transport unit 303r. The front side elevating part 350f and the back side elevating part 350r are each movable in the vertical direction. When the solder is transferred, the board Bf is sandwiched and fixed from above and below by the front side clamp part 302f and the front side lifting part 350f. The substrate Br is sandwiched and fixed from above and below by the back side clamp part 302r and the back side lifting part 350r.

(XY robot 31)
The X direction corresponds to the left-right direction, the Y direction corresponds to the front-rear direction, and the Z direction corresponds to the up-down direction. The XY robot 31 includes a Y direction slider 310, an X direction slider 311, a pair of left and right Y direction guide rails 312, and a pair of upper and lower X direction guide rails 313.

  The pair of left and right Y-direction guide rails 312 are disposed on the upper surface of the housing internal space of the module 3. The Y-direction slider 310 has a long block shape in the left-right direction. The Y-direction slider 310 is attached to a pair of left and right Y-direction guide rails 312 so as to be slidable in the front-rear direction. The pair of upper and lower X-direction guide rails 313 is disposed on the front surface of the Y-direction slider 310. The X direction slider 311 has a rectangular plate shape. The X-direction slider 311 is attached to a pair of upper and lower X-direction guide rails 313 so as to be slidable in the left-right direction.

(Mounting head 32, mark camera 33, parts camera 34)
The mounting head 32 is attached to the X direction slider 311. For this reason, the mounting head 32 can be moved in the front-rear and left-right directions by the XY robot 31. FIG. 2 is a transparent perspective view of the mounting head of the electronic component mounting machine according to the present embodiment. As shown by a thin line in FIG. 2, the mounting head 32 includes a ball screw portion 320 and a holder 321.

  The ball screw portion 320 is built in the mounting head 32. The ball screw portion 320 includes a nut portion 320a and a shaft portion 320b. The nut part 320a can be rotated by a motor (not shown). The shaft portion 320b extends in the vertical direction. The shaft portion 320b is inserted through the nut portion 320a. The nut part 320a and the shaft part 320b are screwed together via a large number of balls (not shown). For this reason, as shown by a one-dot chain line in FIG. 2, when the nut portion 320a rotates, the shaft portion 320b moves in the vertical direction.

  The holder 321 has a cylindrical shape. The holder 321 is attached to the lower end of the shaft portion 320b. The holder 321 can be rotated around an axis by a motor (not shown). A suction port (not shown) is provided on the lower surface of the holder 321. The pin transfer nozzle 8 is attached to the lower surface of the holder 321 by the negative pressure supplied from the suction port. The pin transfer nozzle 8 is included in the concept of “nozzle” of the present invention.

  FIG. 3 is a perspective view of a pin transfer nozzle mounted on the mounting head of the electronic component mounting machine according to the present embodiment. The pin transfer nozzle 8 includes a holder suction portion 80, a flange portion 81, a portion to be cleaned 82, and a connecting portion 83. The holder suction part 80 has a disk shape. The holder suction unit 80 is sucked on the lower surface of the holder 321. The flange portion 81 has a disk shape with a smaller diameter than the holder suction portion 80. The flange portion 81 is disposed below the holder suction portion 80. The connecting portion 83 has a columnar shape that is long in the vertical direction. The connecting portion 83 connects the holder suction portion 80 and the flange portion 81. The cleaned portion 82 includes a large number of transfer pins 820 and a cleaned plate 821. The plate 821 to be cleaned has a square plate shape. The plate 821 to be cleaned is fixed to the lower surface of the flange portion 81. A large number of transfer pins 820 are arranged on the lower surface of the plate 821 to be cleaned. A large number of transfer pins 820 are arranged in mirror symmetry with the land patterns of the substrates Bf and Br. Transfer solder is attached to a large number of transfer pins 820 by a dipping device 4 described later.

  Returning to FIG. 2, the mark camera 33 is disposed behind the mounting head 32. The imaging area of the mark camera 33 is below. The mark camera 33 is used for positioning the substrates Bf and Br.

  Returning to FIG. 1, the parts camera 34 is disposed in front of the front-side transport unit 303f. The imaging area of the parts camera 34 is above. The state of solder adhesion to a large number of transfer pins 820 is imaged when the mounting head 32 passes over the parts camera 34.

[Dip device 4]
The dip device 4 is disposed on the upper surface of the device pallet 20. The dip device 4 includes a rotary table 40 and a squeegee 41. The rotary table 40 has a disk shape. The rotary table 40 can rotate around an axis. Solder (not shown) is supplied to the upper surface of the rotary table 40. The squeegee 41 is disposed above the rotary table 40. When the rotary table 40 supplied with the solder is rotated, the squeegee 41 pushes the solder over substantially the entire upper surface of the rotary table 40. For this reason, a solder film (not shown) having a substantially constant film thickness is formed on the upper surface of the turntable 40.

[Nozzle cleaning device 5]
A cleaning device base 90 is disposed on the upper surface of the device pallet 20. The nozzle cleaning device 5 is disposed behind the upper surface of the cleaning device base 90. FIG. 4 is a perspective view of the nozzle cleaning device of the present embodiment. FIG. 5 shows a cross-sectional view in the front-rear direction of the nozzle cleaning device. FIG. 6 is a cross-sectional view in the VI-VI direction of FIG. FIG. 7 shows an exploded perspective view of the nozzle cleaning device. FIG. 8 shows an exploded perspective view of the main body of the nozzle cleaning device. FIG. 9 shows an exploded perspective view of the vicinity of the shutter portion and the cleaning portion of the apparatus main body.

  In FIG. 4, the shutter 620 inside the shutter insertion member 621 is indicated by a thin line. In FIG. 5, the lever 75 on the front side of the drawing with respect to the cross section is indicated by a one-dot chain line. In FIG. 7, the shutter 620 inside the shutter insertion member 621, the pair of main body side engaging portions 625L and 625R, and the pair of plungers 72L and 72R are indicated by thin lines. In FIG. 9, the pair of main body side engaging portions 625L and 625R and the cleaning tank seal frame 621e are indicated by thin lines. As shown in FIGS. 4 to 9, the nozzle cleaning device 5 includes a device main body 6 and a base portion 7.

(Base 7)
The base portion 7 includes a pair of base side engaging portions 70L and 70R, a front wall portion 71, a pair of plungers 72L and 72R, a pair of swinging claws 73L and 73R, a shaft 74, a lever 75, and a pair of Side wall portions 76L and 76R and a bottom wall portion 77 are provided. These members are all made of metal. The base 7 is fixed to the upper surface of the cleaning device base 90.

  The bottom wall 77 has a rectangular plate shape. Each of the pair of side wall portions 76L and 76R has a thin plate shape. The side wall portion 76 </ b> L is erected from the left edge of the bottom wall portion 77. The side wall portion 76 </ b> R is erected from the right edge of the bottom wall portion 77. The front wall 71 has a thin plate shape. The front wall 71 is erected from the front edge of the bottom wall 77.

  Each of the pair of base side engaging portions 70L and 70R has a J-shape that curves forward (in the direction of the pair of main body side engaging portions 625L and 625R). The pair of base-side engaging portions 70L and 70R are disposed on the upper surface of the bottom wall portion 77 so as to be separated from each other by a predetermined distance in the left-right direction.

  Each of the pair of plungers 72L, 72R has a long round bar shape in the front-rear direction. The pair of plungers 72L and 72R are provided so as to protrude rearward (in the direction of the front wall 624 described later) from the rear surface of the front wall 71 by a predetermined distance in the left-right direction.

  The shaft 74 has a round bar shape that is long in the left-right direction. The shaft 74 is provided between the front upper end of the side wall portion 76L and the front upper end of the side wall portion 76R so as to be rotatable about an axis. The lever 75 has an L shape that curves forward. The lever 75 is fixed to the right end of the shaft 74 on the right side of the side wall portion 76R.

  Each of the pair of swing claws 73L and 73R has a J-shape that curves downward (in a direction to engage with a pair of engaged portions 624aL and 624aR described later). The pair of swing claws 73L and 73R are fixed to the shaft 74 at a predetermined interval in the left-right direction.

  In this way, the lever 75 and the pair of swinging claws 73L and 73R are connected via the shaft 74. Therefore, when the operator rotates the lever 75, the shaft 74 rotates and the pair of swinging claws 73L and 73R swings.

(Device main body 6)
The apparatus main body 6 includes a cleaning unit 60, a drying unit 61, a shutter unit 62, an elastic member 63, an outer plate 64, a retainer 65, and a pair of cleaning liquid sensors 66L and 66R.

(Shutter 62)
FIG. 10 is a perspective view of the shutter insertion member of the shutter unit. In FIG. 10, the members accommodated in the shutter insertion member 621 are indicated by thin lines. In addition, a member disposed on the lower surface of the lower wall of the shutter insertion member 621 is indicated by an alternate long and short dash line.

  As shown in FIGS. 4 to 10, the shutter portion 62 includes a shutter 620, a shutter insertion member 621, a pair of seal members 622 and 623, a front wall portion 624, and a pair of main body side engaging portions 625 </ b> L and 625 </ b> R. And four guide members 621LU, 621LD, 621RU, 621RD, and a cleaning tank seal frame 621e.

  The shutter 620 is made of metal and has a rectangular plate shape. A shutter-side insertion hole 620a is disposed substantially at the center of the shutter 620. The shutter side insertion hole 620a has a circular shape and penetrates the shutter 620 in the vertical direction.

  The shutter insertion member 621 is made of metal and has a thin bottomed rectangular tube shape that opens forward (in the direction opposite to the substrates Bf and Br). The shutter insertion member 621 includes a shutter chamber 621a, a pair of insertion member side insertion holes 621b and 621c, and a slit 621d. The shutter chamber 621 a is an internal space of the shutter insertion member 621. The insertion member side insertion hole 621b is disposed at the approximate center of the upper wall of the shutter insertion member 621. The insertion member side insertion hole 621b is circular and penetrates the upper wall of the shutter insertion member 621 in the vertical direction. The insertion member side insertion hole 621c is disposed at the approximate center of the lower wall of the shutter insertion member 621. The insertion member side insertion hole 621c is circular and penetrates the lower wall of the shutter insertion member 621 in the vertical direction. The pair of insertion member side insertion holes 621b and 621c have the same diameter as the shutter side insertion hole 620a. The slit 621d extends in the left-right direction. The slit 621d opens on the front surface of the shutter insertion member 621. The shutter 620 is inserted into the shutter chamber 621a of the shutter insertion member 621 from the front (direction intersecting the insertion direction of the pin transfer nozzle 8) through the slit 621d.

  The four guide members 621LU, 621LD, 621RU, and 621RD are each made of metal and have a long prismatic shape in the front-rear direction. The guide member 621LU is at the upper left corner of the shutter chamber 621a, the guide member 621LD is at the lower left corner of the shutter chamber 621a, the guide member 621RU is at the upper right corner of the shutter chamber 621a, and the guide member 621RD is at the lower right corner of the shutter chamber 621a. Has been placed. The pair of left guide members 621LU and 621LD guide the left edge of the shutter 620. The pair of guide members 621RU and 621RD on the right side guide the right edge of the shutter 620.

  Each of the pair of main body side engaging portions 625L and 625R is made of metal and has a J-shape that curves backward (in the direction of the pair of base side engaging portions 70L and 70R). The pair of main body side engaging portions 625L and 625R are disposed on the lower surface of the lower wall of the shutter insertion member 621 at a predetermined interval in the left-right direction. The main body side engaging portions 625L and 625R and the base side engaging portions 70L and 70R are detachably engaged. When the apparatus main body 6 is attached to the base portion 7, the base side engaging portions 70L and 70R serve as a reference for the main body side engaging portions 625L and 625R, that is, the attachment position of the apparatus main body 6.

  The cleaning tank seal frame 621e is made of rubber and has a square frame shape. The cleaning tank seal frame 621e is disposed on the lower surface of the lower wall of the shutter insertion member 621. The cleaning tank seal frame 621e surrounds the insertion member side insertion hole 621c.

  FIG. 11 shows an enlarged view in the frame XI of FIG. As shown in FIGS. 10 and 11, the seal members 622 and 623 are each made of PTFE (polytetrafluoroethylene) and have a ring shape. PTFE is included in the concept of the “fluororesin” of the present invention. In the inner peripheral surfaces of the seal members 622 and 623, the hollow portions 622b and 623b are recessed, respectively. Sliding contact portions 622a and 623a project from the tips of the seal members 622 and 623, respectively. 11, the sliding contact portion 622a is displaced upward (in the direction in which the elastic restoring force is accumulated) and the sliding contact portion 623a is in the downward direction (in the direction in which the elastic restoring force is accumulated). ) Are in elastic contact with the shutter 620. The seal members 622 and 623 seal the shutter chamber 621a from the radially inner space of the shutter side insertion hole 620a and the pair of insertion member side insertion holes 621b and 621c.

  FIG. 12 shows an enlarged view in the frame XII of FIG. As shown in FIGS. 10 and 12, the front wall portion 624 is made of metal and has a rectangular plate shape that is long in the left-right direction. The front wall portion 624 protrudes downward from the lower surface front edge of the lower wall of the shutter insertion member 621. The front wall portion 624 includes a pair of engaged portions 624aL and 624aR. The pair of engaged portions 624aL and 624aR are each made of metal and have a long round bar shape in the left-right direction. The pair of engaged portions 624aL and 624aR are disposed on the front surface of the front wall portion 624 at a predetermined interval in the left-right direction. A pair of swinging claws 73L and 73R are engaged with the engaged portions 624aL and 624aR in a detachable manner. The front ends (rear ends) of the plungers 72L and 72R are in contact with the front surface of the front wall portion 624.

(Retainer 65)
Returning to FIGS. 4 to 9, the retainer 65 is made of metal and has a bottomed rectangular tube shape that opens upward. The retainer 65 is provided on the lower surface of the lower wall of the shutter insertion member 621. The insertion member side insertion hole 621 c is accommodated in the retainer 65.

(Cleaning liquid sensors 66L and 66R)
The cleaning liquid sensor 66L is arranged on the right surface of the left wall of the retainer 65. The cleaning liquid sensor 66R is disposed on the left side of the right wall of the retainer 65. The cleaning liquid sensor 66L and the cleaning liquid sensor 66R face each other in the left-right direction.

(Washing part 60)
The cleaning unit 60 includes a cleaning tank 600 and a brush 601. The cleaning unit 60 is accommodated in the retainer 65. The cleaning tank 600 is made of metal and has a rectangular tube shape opening upward. A cleaning liquid L is stored in the cleaning tank 600. The amount of the cleaning liquid L (the height of the liquid level) is detected by the cleaning liquid sensors 66L and 66R.

  That is, the optical axis passes through the cleaning liquid L when the cleaning liquid L is contained in the cleaning tank 600, and the optical axis does not pass through the cleaning liquid L when the cleaning liquid L is not contained. The cleaning liquid sensors 66L and 66R are attached to the retainer 65. From the change in the amount of received light, the cleaning liquid sensors 66L and 66R detect the remaining amount of the cleaning liquid L.

  The brush 601 includes a base 601a and a raised portion 601b. The brush 601 is stored in the cleaning tank 600 while being immersed in the cleaning liquid L. The base 601a is made of resin and has a square plate shape. The raised portions 601b are made of resin and are implanted on the upper surface of the base portion 601a.

(Drying part 61)
The drying unit 61 includes a drying member 610 and a filter 611. The drying unit 61 is stacked on the upper surface of the upper wall of the shutter insertion member 621. FIG. 13 is a perspective view of the drying unit of the apparatus main body of the nozzle cleaning apparatus of this embodiment. In FIG. 13, the gas passage 610b and the filter 611 inside the drying member 610 are indicated by thin lines.

  As shown in FIG. 13, the drying member 610 includes a drying unit side insertion hole 610 a, a gas passage 610 b, and a model mark 610 g (character “A”). The drying part side insertion hole 610 a is disposed at the approximate center of the drying member 610. The drying section side insertion hole 610a is circular and penetrates the drying member 610 in the vertical direction. The drying section side insertion hole 610a has the same diameter as the pair of insertion member side insertion holes 621b and 621c. The drying section side insertion hole 610a is disposed above the pair of insertion member side insertion holes 621b and 621c. The model mark 610g is disposed in the upper right rear corner of the drying member 610. The model mark 610g is imaged by the mark camera 33 shown in FIG.

  Returning to FIG. 13, the gas passage 610 b is disposed inside the drying member 610. The gas passage 610b includes an upstream passage 610c and a downstream passage 610e. The upstream passage 610c extends in a J shape from the left corner of the rear end surface of the drying member 610. An air supply pipe 95 is connected to the upstream end of the upstream passage 610c. The downstream end of the upstream passage 610c branches in three directions in the left-right direction (the circumferential direction of the inner peripheral surface of the drying section side insertion hole 610a). Square outlets 610dL, 610dM, and 610dR are arranged at three branch ends. The air outlets 610dL, 610dM, and 610dR each open to the front side of the inner peripheral surface of the drying unit side insertion hole 610a. The downstream side passage 610e is disposed between the drying unit side insertion hole 610a and a filter 611 described later. A slit-like inlet 610f that is long in the left-right direction (the circumferential direction of the inner peripheral surface of the drying section side insertion hole 610a) is disposed at the upstream end of the downstream-side passage 610e. The inflow port 610f opens to the rear side of the inner peripheral surface of the drying section side insertion hole 610a. The outlets 610dL, 610dM, 610dR and the inflow port 610f are opposed to each other in the front-rear direction.

  The filter 611 is made of a nonwoven fabric and has a rectangular plate shape. The filter 611 is disposed inside the drying member 610. The filter 611 is disposed near the hole edge of the drying member 610. The downstream end of the downstream passage 610e is connected to the upstream end of the filter 611. An exhaust pipe 96 is connected to the downstream end of the filter 611.

(Elastic member 63)
Returning to FIGS. 4 to 9, the elastic member 63 is made of rubber and has a rectangular plate shape. Rubber is included in the “elastomer” concept of the present invention. The elastic member 63 is laminated on the upper surface of the drying member 610. The elastic member 63 includes an elastic member side insertion hole 630 and eight slits 631. The elastic member side insertion hole 630 is disposed substantially at the center of the elastic member 63. The elastic member side insertion hole 630 is circular and penetrates the elastic member 63 in the vertical direction. The elastic member side insertion hole 630 has a smaller diameter than the drying part side insertion hole 610a. The elastic member side insertion hole 630 is disposed above the drying unit side insertion hole 610a. The eight slits 631 extend radially from the hole edge of the elastic member side insertion hole 630 toward the radially outer side.

(Outer plate 64)
The outer plate 64 is made of metal and has a rectangular plate shape. An outer plate side insertion hole 640 is disposed substantially at the center of the outer plate 64. The outer plate side insertion hole 640 is circular, and penetrates the outer plate 64 in the vertical direction. The outer plate side insertion hole 640 has the same diameter as the drying portion side insertion hole 610a. The outer plate side insertion hole 640 is disposed above the elastic member side insertion hole 630.

<Movement of electronic component mounting machine during nozzle cleaning>
Next, the movement at the time of nozzle cleaning of the electronic component mounting machine of this embodiment will be described. As shown in FIG. 1, during production of the substrates Bf and Br, the solder is transferred from the rotary table 40 to the substrates Bf and Br by the pin transfer nozzle 8 attached to the mounting head 32. When transferring, the mounting head 32 passes through the parts camera 34. At this time, as shown in FIG. 3, an image of the state of attachment of solder to the large number of transfer pins 820 of the portion 82 to be cleaned is captured. The imaging data is processed by an image processing device. As a result of the processing, when the solder adhesion state is poor (for example, when adjacent transfer pins 820 are connected by solder), the control device determines cleaning of the pin transfer nozzle 8.

[Washing mode]
FIG. 14 shows a cross-sectional view in the front-rear direction in the cleaning mode of the nozzle cleaning apparatus of the present embodiment. FIG. 15 shows an enlarged view in the frame XV of FIG. In the cleaning mode, first, as shown in FIGS. 1 and 4, the pin transfer nozzle 8 is moved above the outer plate side insertion hole 640 of the nozzle cleaning device 5 by the mounting head 32. Further, as shown in FIG. 5, the shutter 620 is opened. That is, the outer plate side insertion hole 640, the elastic member side insertion hole 630, the drying part side insertion hole 610a, the insertion member side insertion hole 621b, the shutter side insertion hole 620a, and the insertion member side insertion hole 621c are arranged in the vertical direction (pin transfer nozzle 8 in the insertion direction).

  Next, as shown in FIG. 2, the ball screw part 320 is driven and the pin transfer nozzle 8 is lowered. 14 and 15, the outer plate side insertion hole 640, the elastic member side insertion hole 630, the drying section side insertion hole 610a, the insertion member side insertion hole 621b, the shutter side insertion hole 620a, the insertion member side insertion. The portion 82 to be cleaned of the pin transfer nozzle 8 is brought into contact with the raised portion 601b of the brush 601 through the hole 621c. Further, the portion to be cleaned 82 is immersed in the cleaning liquid L. In this state, the portion to be cleaned 82 is moved in the front-rear and left-right directions and the rotation direction. That is, the portion 82 to be cleaned is rubbed against the raised portion 601b. In this way, the cleaned portion 82 is cleaned.

[Drying mode]
FIG. 16 is a cross-sectional view in the front-rear direction in the drying mode of the nozzle cleaning apparatus of the present embodiment. FIG. 17 shows an enlarged view in the frame XVII in FIG. In the drying mode, first, as shown in FIG. 2, the ball screw portion 320 is driven to raise the pin transfer nozzle 8. Then, as shown in FIGS. 16 and 17, the pin transfer nozzle 8 is disposed inside the elastic member side insertion hole 630 in the radial direction. Further, the lower end of the flange portion 81 and the lower end of the elastic member side insertion hole 630 are substantially flush with each other. Next, by sliding the shutter 620 forward, the outer plate side insertion hole 640, the elastic member side insertion hole 630, the drying section side insertion hole 610a, the insertion member side insertion hole 621b, and the insertion member side insertion hole 621c The shutter side insertion hole 620a is shifted forward.

  A minute gap C is formed between the outer peripheral surface of the flange portion 81 and the inner peripheral surface of the elastic member side insertion hole 630. As shown by a thick line in FIG. 17, the drying chamber S above the shutter 620 is sealed from the outside except for the gap C, the outlets 610dL, 610dM, 610dR, and the inlet 610f.

  Then, the air G is blown into the drying chamber S through the upstream passage 610c and the outlets 610dL, 610dM, and 610dR while rotating the pin transfer nozzle 8 about the axis. The air G is included in the concept of “gas” of the present invention. The cleaning liquid L and dust adhering to the cleaned portion 82 are blown away by the air G. The air G containing the cleaning liquid L and dust flows into the downstream passage 610e via the inflow port 610f. As shown in FIG. 13, the cleaning liquid L and dust in the air G are removed by a filter 611. For this reason, clean air G is exhausted from the exhaust pipe 96.

<Operations when replacing the nozzle cleaning device of an electronic component mounting machine>
Next, the movement of the electronic component mounting machine of this embodiment when the nozzle cleaning device is replaced will be described. FIG. 18A is a schematic diagram of the first stage of movement when the apparatus main body is removed from the base of the nozzle cleaning apparatus of the present embodiment. FIG. 18B shows a schematic diagram of the second stage of the movement when the apparatus main body is removed. FIG. 18 (c) shows a schematic diagram of the third stage of movement when the apparatus main body is removed. In FIG. 19, the perspective view at the time of attaching another apparatus main body to the base of the nozzle cleaning apparatus of this embodiment is shown.

  When removing the apparatus main body 6 from the base 7, first, the air supply pipe 95 and the exhaust pipe 96 are removed from the apparatus main body 6, as shown in FIG. Next, the lever 75 is swung forward. That is, the swinging claws 73L and 73R are removed from the engaged portions 624aL and 624aR. Subsequently, as shown in FIG. 18B, the apparatus main body 6 is swung upward with the engaging portions of the main body side engaging portions 625L and 625R and the base side engaging portions 70L and 70R as a substantial center. Then, as shown in FIG. 18C, the apparatus body 6 is pulled out obliquely forward and upward with respect to the base portion 7. In this way, the apparatus main body 6 is removed from the base portion 7. Then, as shown in FIG. 19, another apparatus main body 6 corresponding to the four pin transfer nozzles 8 is attached to the base 7.

  When attaching, work is performed in the order of FIG. 18 (c) → FIG. 18 (b) → FIG. 18 (a). The correspondence between the apparatus main body 6 and the pin transfer nozzle 8 is confirmed by imaging the model mark 610g (character “B”) with the mark camera 33 shown in FIG.

<Effect>
Next, functions and effects of the nozzle cleaning device and the electronic component mounting machine according to the present embodiment will be described. According to the nozzle cleaning device 5 of the present embodiment, as shown in FIG. 5, the cleaning unit 60, the shutter unit 62, and the drying unit 61 are stacked in the vertical direction. For this reason, the installation space which occupies for the electronic component mounting machine 1 can be narrowed. Further, when the cleaned portion 82 to be cleaned is dried, the cleaned portion 82 may be moved not in the horizontal direction but in the upward direction. For this reason, it is difficult for the cleaning liquid L to scatter to parts other than the nozzle cleaning device 5 in the electronic component mounting machine 1.

  Further, a shutter unit 62 is interposed between the cleaning unit 60 and the drying unit 61. As shown in FIGS. 16 and 17, in the drying mode, the shutter 620 of the shutter unit 62 is closed. For this reason, there is no possibility that the liquid level of the cleaning liquid L is disturbed by the air G. Therefore, there is no possibility that the cleaning liquid L in the cleaning tank 600 (the cleaning liquid L splashed from the liquid surface) adheres to the portion 82 to be cleaned.

  Further, according to the nozzle cleaning device 5 of the present embodiment, as shown in FIGS. 7 and 19, a plurality of types of device main bodies 6 can be exchanged for the common base portion 7. For this reason, according to the type of the pin transfer nozzle 8, a plurality of types of apparatus main bodies 6 can be exchanged and used. Therefore, according to the type of the pin transfer nozzle 8, the replacement operation is simpler than the case where the entire nozzle cleaning device 5 is replaced. Further, by imaging the model mark 610g with the mark camera 33, the correspondence between the apparatus main body 6 and the pin transfer nozzle 8 can be easily confirmed. In particular, this function is effective when there are many types of apparatus main body 6 and pin transfer nozzle 8. Moreover, the removal | desorption operation | work of the apparatus main body 6 with respect to the base 7 can be performed without a tool. For this reason, the removal | desorption operation | work is easy. Further, when the apparatus main body 6 is attached to the base portion 7, the base side engaging portions 70 </ b> L and 70 </ b> R serve as a reference for the attachment positions of the main body side engaging portions 625 </ b> L and 625 </ b> R, that is, the apparatus main body 6. For this reason, positioning of the apparatus main body 6 is easy.

  Also, by preparing a plurality of apparatus main bodies 6 of the same type, cleaning and drying of the pin transfer nozzle 8 can be performed using other apparatus main bodies 6 while maintaining an arbitrary apparatus main body 6. . For this reason, the downtime accompanying a maintenance can be reduced.

  Further, according to the nozzle cleaning apparatus 5 of the present embodiment, the cleaning unit 60 includes the cleaning liquid L and the brush 601 as shown in FIG. For this reason, the to-be-cleaned part 82 can be wash | cleaned using the washing | cleaning liquid L and the brush 601 together.

  Moreover, according to the nozzle cleaning apparatus 5 of this embodiment, as shown in FIG. 13, the drying member 610 is provided with the drying part side insertion hole 610a and the gas passage 610b. For this reason, it becomes easy to blow the air G onto the cleaned portion 82. Moreover, it becomes easy to exhaust the air G from the inner side in the radial direction of the drying section side insertion hole 610a to the outside. In addition, three outlets 610dL, 610dM, and 610dR are opened along the circumferential direction of the flange portion 81 on the inner peripheral surface of the drying portion side insertion hole 610a. For this reason, as shown in FIG. 17, the air G can be supplied over the entire surface of the portion 82 to be cleaned.

  Further, according to the nozzle cleaning device 5 of the present embodiment, the drying unit 61 includes the filter 611. For this reason, the cleaning liquid L and dust can be filtered out from the air G. Therefore, the air G exhausted outside can be purified.

  Further, according to the nozzle cleaning device 5 of the present embodiment, as shown in FIG. 11, the seal members 622 and 623 are disposed from the radially inner space of the shutter side insertion hole 620a and the pair of insertion member side insertion holes 621b and 621c. The shutter chamber 621a is sealed. For this reason, in the cleaning mode, it is possible to prevent the cleaning liquid L and dust from entering the shutter chamber 621a. Further, in the drying mode, it is possible to prevent the cleaning liquid L, air G, dust and the like from entering the shutter chamber 621a. The seal members 622 and 623 are made of PTFE. For this reason, the frictional resistance with respect to the shutter 620 is small. Therefore, the shutter 620 is easy to slide.

  Further, according to the nozzle cleaning device 5 of the present embodiment, as shown in FIG. 15, the elastic member side insertion hole 630 includes an outer plate side insertion hole 640, a drying section side insertion hole 610a, an insertion member side insertion hole 621b, and a shutter. It has a smaller diameter than the side insertion hole 620a and the insertion member side insertion hole 621c. For this reason, when the pin transfer nozzle 8 moves vertically inside the holes in the radial direction, the pin transfer nozzle 8 is a hard (metal) outer plate side insertion hole 640, a drying section side insertion hole 610a, and an insertion member. It is difficult to contact the side insertion hole 621b, the shutter side insertion hole 620a, and the insertion member side insertion hole 621c.

  The elastic member 63 is made of rubber that is more flexible than metal or resin. For this reason, when the flange part 81 contacts the internal peripheral surface of the elastic member side insertion hole 630, the impact which the flange part 81 receives from an internal peripheral surface can be relieved. In addition, eight slits 631 are arranged at the hole edge of the elastic member side insertion hole 630. When the flange part 81 contacts the inner peripheral surface of the elastic member side insertion hole 630, the inner peripheral surface of the elastic member side insertion hole 630 is easily deformed by opening the slit 631. Also in this respect, the impact received by the flange portion 81 from the inner peripheral surface can be mitigated.

  Moreover, according to the nozzle cleaning apparatus 5 of this embodiment, as shown in FIG. 17, the flange part 81 is arrange | positioned in the radial direction inner side of the elastic member side penetration hole 630 in dry mode. For this reason, the air G hardly leaks from the drying unit 61 to the outside through the elastic member side insertion hole 630.

  Further, according to the nozzle cleaning device 5 of the present embodiment, the moving distance of the pin transfer nozzle 8 is shortened compared to the case where the cleaning unit 60 and the drying unit 61 are arranged in the horizontal direction. For this reason, the power consumption required for cleaning and drying the pin transfer nozzle 8 is reduced. Also, the downtime is shortened.

  Further, according to the nozzle cleaning device 5 of the present embodiment, the cleaning liquid L adhering to the pin transfer nozzle 8 is blown off by the air G in the drying mode. That is, the pin transfer nozzle 8 is dried in a non-contact state. For this reason, it is difficult for dust to adhere to the pin transfer nozzle 8.

  Further, according to the nozzle cleaning device 5 of the present embodiment, as shown in FIG. 6, the amount of the cleaning liquid L can be confirmed at any time by the cleaning liquid sensors 66L and 66R. Further, according to the nozzle cleaning device 5 of the present embodiment, as shown in FIG. 6, when the cleaning liquid sensors 66L and 66R detect the shortage of the cleaning liquid L, the apparatus main body 6 is replaced as shown in FIG. Thus, the cleaning liquid L can be replenished to the cleaning tank 600 of the apparatus main body 6 after use. Alternatively, the entire cleaning tank 600 of the apparatus main body 6 after use can be replaced. For this reason, downtime due to replenishment of the cleaning liquid L can be reduced.

  Further, according to the nozzle cleaning device 5 of the present embodiment, as shown in FIGS. 5 and 12, when the device main body 6 is pushed between the base side engaging portions 70L, 70R and the plungers 72L, 72R, The backlash of the apparatus main body 6 with respect to the base 7 is restricted. Further, the main body side engaging portions 625L and 625R are engaged with the base side engaging portions 70L and 70R, and the pair of swing claws 73L and 73R are engaged with the engaged portions 624aL and 624aR from above. Thus, the backlash in the vertical direction of the apparatus main body 6 with respect to the base 7 is restricted. For this reason, the apparatus main body 6 is unlikely to come off the base portion 7.

<Others>
The embodiment of the nozzle cleaning device and the electronic component mounting machine according to the present invention has been described above. However, the embodiment is not particularly limited to the above embodiment. Various modifications and improvements that can be made by those skilled in the art are also possible.

  The positional relationship, shape, and arrangement number of the outlet 610d and the inlet 610f are not particularly limited. In FIG. 20, the perspective view of the drying part of the apparatus main body of the nozzle cleaning apparatus of other embodiment is shown. In addition, about the site | part corresponding to FIG. 13, it shows with the same code | symbol. As shown in FIG. 20, a ring-shaped air outlet 610d may be arranged so as to open over the entire inner peripheral surface of the drying section side insertion hole 610a. In addition, the inlet 610f may be shifted in the vertical direction with respect to the outlet 610d. Further, the filter 611 may not be arranged. That is, the downstream end of the downstream side passage 610e may be opened to the outside. Further, by applying a negative pressure from the downstream side, the air G on the radially inner side of the drying section side insertion hole 610a may be sucked through the inflow port 610f.

  In the above embodiment, the air G is used as the gas of the present invention, but other gases such as an inert gas may be used. In the above embodiment, the shutter 620 with the shutter side insertion hole 620a is used, but a shutter 620 without the shutter side insertion hole 620a may be used. In this case, the state where the shutter 620 is inserted into the shutter chamber 621a is the closed state, and the state where the shutter 620 is extracted from the shutter chamber 621a is the open state. In the above embodiment, the pin transfer nozzle 8 is used as the nozzle of the present invention, but a suction nozzle that sucks an electronic component may be used. In the above embodiment, the cleaning tank 600 and the brush 601 are disposed in the cleaning unit 60, but the cleaning tank 600 and the ultrasonic oscillator may be disposed. That is, the pin transfer nozzle 8 may be ultrasonically cleaned. In this case, the ultrasonic oscillator may be disposed on the base 7 side and the cleaning tank 600 may be disposed on the apparatus main body 6 so that the ultrasonic oscillator and the bottom surface of the cleaning tank 600 are in contact with each other. In the above embodiment, the portion 82 to be cleaned is dried using only the air G, but infrared rays or the like may be used in combination.

  In the above embodiment, the cleaning unit 60 is disposed in the apparatus body 6, but at least a part of the cleaning unit 60 may be disposed in the base 7. Further, the base 7 may not be arranged. That is, members such as the cleaning unit 60, the drying unit 61, the shutter unit 62, the elastic member 63, the outer plate 64, the retainer 65, and the pair of cleaning liquid sensors 66L and 66R may be disposed on the cleaning device base 90.

  In the above embodiment, the entire seal members 622 and 623 are made of PTFE, but only the sliding contact portions 622a and 623a may be made of PTFE. Further, the portion other than the sliding contact portion may be made of an elastomer such as rubber. If it carries out like this, the sealing members 622 and 623 will become easy to elastically deform. Further, instead of PTFE, other fluororesin or fluororubber may be used. Fluororesin includes PFA (tetrafluoroethylene / perfluoroalkyl vinyl ether copolymer), FEP (tetrafluoroethylene / hexafluoropropylene copolymer (4.6 fluoride)), ETFE (tetrafluoroethylene / ethylene copolymer) Coalescence), PVDF (polyvinylidene fluoride (difluoride)), PCTFE (polychlorotrifluoroethylene (trifluoride)), ECTFE (chlorotrifluoroethylene-ethylene copolymer), and the like may be used. As the fluororubber, FKM (vinylidene fluoride rubber), FEPM (tetrafluoroethylene-propylene rubber), FFKM (tetrafluoroethylene-purple fluorovinyl ether rubber), or the like may be used.

  In the above embodiment, the elastic member 63 is made of rubber, but may be made of other elastomer. In the above embodiment, the filter 611 is made of nonwoven fabric, but may be made of woven fabric, porous material, or the like. Moreover, the detection method of the cleaning liquid L of the cleaning liquid sensors 66L and 66R is not particularly limited. For example, an optical type, a magnetic type, an electrode type, or an ultrasonic type may be used.

  With respect to the base portion 7, the apparatus main body 6 may be replaceable with a unit for another use such as a nozzle stocker that accommodates transfer pins and suction nozzles, a flux transfer unit, and a component disposal box. Even in this case, the type of unit can be confirmed by capturing the model mark 610g with the mark camera 33.

1: electronic component mounting machine, 2: base, 3: module, 4: dipping device, 5: nozzle cleaning device, 6: device main body, 7: base, 8: pin transfer nozzle (nozzle).
20: Device pallet, 30: Substrate transport device, 31: XY robot, 32: Mounting head, 33: Mark camera, 34: Parts camera, 35: Substrate lifting device, 40: Rotary table, 41: Squeegee, 60: Cleaning unit 61: Drying section, 62: Shutter section, 63: Elastic member, 64: Outer plate, 65: Retainer, 66L: Cleaning liquid sensor, 66R: Cleaning liquid sensor, 70L: Base side engaging section, 70R: Base side engaging section 71: Front wall portion, 72L: Plunger, 72R: Plunger, 73L: Swing claw, 73R: Swing claw, 74: Shaft, 75: Lever, 76L: Side wall portion, 76R: Side wall portion, 77: Bottom wall portion 80: holder suction part, 81: flange part, 82: part to be cleaned, 83: connecting part, 90: base for cleaning device, 95: air supply pipe, 96: exhaust pipe.
302f: Front side clamp unit, 302r: Back side clamp unit, 303f: Front side transport unit, 303r: Back side transport unit, 310: Y direction slider, 311: X direction slider, 312: Y direction guide rail, 313: X Direction guide rail, 320: Ball screw part, 320a: Nut part, 320b: Shaft part, 321: Holder, 350f: Front side lifting part, 350r: Back side lifting part, 600: Cleaning tank, 601: Brush, 601a: Base part , 601b: Brushed portion, 610: Drying member, 610a: Drying portion side insertion hole, 610b: Gas passage, 610c: Upstream passage, 610d: Air outlet, 610dL: Air outlet, 610dM: Air outlet, 610dR: Air outlet, 610e: downstream passage, 610f: inflow port, 610g: model mark, 611: filter, 620: shutter, 62 a: shutter side insertion hole, 621: shutter insertion member, 621LD: guide member, 621LU: guide member, 621RD: guide member, 621RU: guide member, 621a: shutter chamber, 621b: insertion member side insertion hole, 621c: insertion member Side insertion hole, 621d: slit, 621e: cleaning tank seal frame, 622: seal member, 622a: sliding contact portion, 622b: filleting portion, 623: seal member, 623a: sliding contact portion, 623b: filleting portion, 624: front wall portion, 624aL: engaged portion, 624aR: engaged portion, 625L: main body side engaging portion, 625R: main body side engaging portion, 630: elastic member side insertion hole, 631: slit, 640: Outer plate side insertion hole, 820: transfer pin, 821: cleaned plate.
Bf: substrate, Br: substrate, C: gap, F: floor, G: air (gas), L: cleaning liquid, S: drying chamber.

Claims (7)

A cleaning section in which a cleaning liquid is stored, and a cleaning section that cleans at least the portion to be cleaned of the nozzle with the cleaning liquid;
A drying unit disposed above the cleaning unit and drying the cleaned unit by blowing gas to the cleaned unit after cleaning;
A shutter unit that is disposed between the cleaning unit and the drying unit, and includes a shutter that divides the cleaning unit and the drying unit so as to communicate with each other and be shut off;
An apparatus main body having
In the cleaning mode for cleaning the portion to be cleaned, the shutter is opened, the cleaning portion and the drying portion are communicated, the cleaning portion is lowered to the cleaning tank via the drying portion, and the cleaning target is Cleaning the part
In the drying mode for drying the portion to be cleaned, the portion to be cleaned after cleaning is raised from the cleaning tank to the drying portion, the shutter is closed, the cleaning portion and the drying portion are shut off, and the portion to be cleaned is cleaned. Nozzle cleaning device for drying parts.   The nozzle cleaning apparatus of Claim 1 provided with the common base to which the said some apparatus main body is attached so that replacement | exchange is possible. The cleaning unit has a brush accommodated in the cleaning tank,
3. The nozzle cleaning device according to claim 1, wherein, in the cleaning mode, the portion to be cleaned is cleaned by bringing the portion to be cleaned into sliding contact with the brush. The drying unit
A drying unit side insertion hole, which is disposed above the cleaning tank and through which the nozzle is inserted,
A gas passage having an upstream passage having a blower opening at the downstream end opening on the inner peripheral surface of the drying section side insertion hole, and a downstream passage having an inlet opening at the upstream end opening on the inner peripheral surface;
Having a drying member having
The said gas is sprayed to the said to-be-cleaned part from this blower outlet in the said dry mode, and is exhausted outside through this downstream channel | path from this inflow port. Nozzle cleaning device. The shutter is disposed below the drying unit side insertion hole, and has a shutter side insertion hole through which the nozzle is inserted,
The shutter part is
A shutter insertion member having a shutter chamber in which the shutter is slidably housed, and a pair of insertion member side insertion holes disposed on both sides in the vertical direction of the shutter chamber and through which the nozzle is inserted;
The insertion member side insertion hole is disposed at a hole edge on the shutter chamber side, and has a sliding contact portion made of fluororesin or fluororubber that elastically slides on the shutter, and the shutter chamber and the insertion member side insertion hole A pair of sealing members that block the radially inner space of
The nozzle cleaning apparatus of Claim 4 which has these. The nozzle has a flange portion disposed above the portion to be cleaned,
The apparatus main body is disposed above the drying section side insertion hole, has a smaller diameter than the drying section side insertion hole and a larger diameter than the flange section, and the flange section is radially inward in the drying mode. The nozzle cleaning device according to claim 4, further comprising an elastic member made of elastomer having an elastic member side insertion hole to be arranged.   An electronic component mounting machine comprising the nozzle cleaning device according to any one of claims 1 to 6.

Images