JP2012106341A5 - - Google Patents
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- Publication number
- JP2012106341A5 JP2012106341A5 JP2012055615A JP2012055615A JP2012106341A5 JP 2012106341 A5 JP2012106341 A5 JP 2012106341A5 JP 2012055615 A JP2012055615 A JP 2012055615A JP 2012055615 A JP2012055615 A JP 2012055615A JP 2012106341 A5 JP2012106341 A5 JP 2012106341A5
- Authority
- JP
- Japan
- Prior art keywords
- fluororesin
- group
- cmp apparatus
- thermoplastic resin
- adhesive
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 229920005992 thermoplastic resin Polymers 0.000 claims 7
- 239000010410 layer Substances 0.000 claims 5
- 239000000853 adhesive Substances 0.000 claims 4
- 230000001070 adhesive effect Effects 0.000 claims 4
- 239000012790 adhesive layer Substances 0.000 claims 3
- 239000011248 coating agent Substances 0.000 claims 3
- 238000000576 coating method Methods 0.000 claims 3
- 125000002915 carbonyl group Chemical group [*:2]C([*:1])=O 0.000 claims 2
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 claims 1
- IMROMDMJAWUWLK-UHFFFAOYSA-N Ethenol Chemical compound OC=C IMROMDMJAWUWLK-UHFFFAOYSA-N 0.000 claims 1
- 239000005977 Ethylene Substances 0.000 claims 1
- YCKRFDGAMUMZLT-UHFFFAOYSA-N Fluorine atom Chemical compound [F] YCKRFDGAMUMZLT-UHFFFAOYSA-N 0.000 claims 1
- 125000003277 amino group Chemical group 0.000 claims 1
- 239000011203 carbon fibre reinforced carbon Chemical group 0.000 claims 1
- 125000004093 cyano group Chemical group *C#N 0.000 claims 1
- 125000003700 epoxy group Chemical group 0.000 claims 1
- RTZKZFJDLAIYFH-UHFFFAOYSA-N ether Chemical group CCOCC RTZKZFJDLAIYFH-UHFFFAOYSA-N 0.000 claims 1
- 229910052731 fluorine Inorganic materials 0.000 claims 1
- 239000011737 fluorine Substances 0.000 claims 1
- 125000002887 hydroxy group Chemical group [H]O* 0.000 claims 1
- 125000005647 linker group Chemical group 0.000 claims 1
- 238000005498 polishing Methods 0.000 claims 1
- 229920006122 polyamide resin Polymers 0.000 claims 1
- 229920013716 polyethylene resin Polymers 0.000 claims 1
- 229920000642 polymer Polymers 0.000 claims 1
- 229920005989 resin Polymers 0.000 claims 1
- 239000011347 resin Substances 0.000 claims 1
- 125000003808 silyl group Chemical group [H][Si]([H])([H])[*] 0.000 claims 1
- 239000002002 slurry Substances 0.000 claims 1
- 125000000542 sulfonic acid group Chemical group 0.000 claims 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012055615A JP5472344B2 (ja) | 2012-03-13 | 2012-03-13 | Ｃｍｐ装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2012055615A JP5472344B2 (ja) | 2012-03-13 | 2012-03-13 | Ｃｍｐ装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2006070032A Division JP2007245266A (ja) | 2006-03-14 | 2006-03-14 | Ｃｍｐ装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012106341A JP2012106341A (ja) | 2012-06-07 |
| JP2012106341A5 true JP2012106341A5 (enExample) | 2012-11-22 |
| JP5472344B2 JP5472344B2 (ja) | 2014-04-16 |
Family
ID=46492538
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2012055615A Expired - Fee Related JP5472344B2 (ja) | 2012-03-13 | 2012-03-13 | Ｃｍｐ装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5472344B2 (enExample) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7224128B2 (ja) * | 2018-08-09 | 2023-02-17 | 株式会社荏原製作所 | 基板用洗浄具、基板洗浄装置、基板処理装置、基板処理方法および基板用洗浄具の製造方法 |
| JP7112010B2 (ja) | 2020-09-30 | 2022-08-03 | ダイキン工業株式会社 | フッ素樹脂、積層体およびチューブ |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3286682B2 (ja) * | 1992-10-15 | 2002-05-27 | 東ソー株式会社 | ポリフェニレンスルフィド樹脂組成物および光反射用成形品 |
| JP2003133270A (ja) * | 2001-10-26 | 2003-05-09 | Jsr Corp | 化学機械研磨用窓材及び研磨パッド |
| JP2003179021A (ja) * | 2001-12-11 | 2003-06-27 | Sony Corp | 化学機械研磨装置 |
| JP2005288286A (ja) * | 2004-03-31 | 2005-10-20 | Nippon Paper Industries Co Ltd | ハードコートフィルムの製造方法及びハードコートフィルム |
-
2012
- 2012-03-13 JP JP2012055615A patent/JP5472344B2/ja not_active Expired - Fee Related
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