JP2012099634A - Substrate processing method and storage medium storing program for carrying out the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To prevent damage to a mount table due to abnormal discharge as much as possible by, even when displacement of a substrate occurs immediately after start of discharge, detecting the displacement at an early stage and halting processing without delay.SOLUTION: A substrate processing method includes a discharge step for, when a flow amount of heat transfer gas that temporarily rises at start of supply of the heat transfer gas becomes equal to or lower than a predetermined pressure control finish reference value before the flow amount is lowered and stabilized, supplying high-frequency power into a processing container and starting discharge to thereby generate plasma of process gas on a process target substrate on a substrate holding surface. In the discharge step, a plurality of determination points, at each of which it is determined that displacement of the substrate occurs when the heat transfer gas flow amount detected by a flow amount sensor exceeds a predetermined threshold value, are provided at points in time, at each of which the heat transfer gas flow amount is not stabilized yet, and the threshold value is set for each determination point, thereby performing the substrate displacement determination without waiting for the heat transfer gas flow amount to be stabilized.

Description

  The present invention relates to a substrate processing method for performing plasma processing on a large substrate such as a flat panel display (FPD) substrate and a storage medium for storing a program for executing the method.

  In the manufacture of FPD panels, pixel devices or electrodes and wirings are generally formed on a substrate made of an insulator such as glass. Of these various panel manufacturing processes, fine processing such as etching, CVD, ashing, and sputtering is often performed by a plasma processing apparatus. The plasma processing apparatus, for example, places a substrate on a mounting table including a susceptor that constitutes a lower electrode in a depressurized processing container, and supplies high frequency power to the susceptor, thereby generating plasma of a processing gas on the substrate. Then, a predetermined process such as etching is performed on the substrate by the plasma.

  In this case, it is necessary to control the temperature of the substrate to be constant while suppressing a temperature rise due to heat generation during plasma processing. For this reason, a coolant whose temperature is controlled by the chiller is circulated and supplied to the coolant passage in the mounting table, and at the same time, a gas having good heat transfer property (heat transfer gas) such as He gas is supplied to the back surface of the substrate through the mounting table. Therefore, a method of indirectly cooling the substrate is often used. In this cooling method, for example, in a mounting table that holds a substrate on the substrate holding surface of the substrate holding unit by electrostatic adsorption force, the substrate can be fixedly held on the mounting table against the supply pressure of He gas. Therefore, it is preferably used.

  By the way, when holding the substrate by suction, if the substrate is displaced with respect to the substrate holding surface on the mounting table, the substrate holding surface is exposed on the susceptor. In this state, high frequency power is applied to the susceptor. If plasma is generated, abnormal discharge may occur and damage the susceptor. Therefore, the occurrence of abnormal discharge can be prevented in advance by detecting such a displacement of the substrate before the generation of plasma.

  As a method for detecting the holding state of the substrate, conventionally, as in the technique described in Patent Document 1, for example, a pressure measurement hole is provided in the upper part of the mounting table, and the pressure measuring gas is supplied to the mounting table and the substrate through the pressure measuring hole. And the pressure of the pressure measurement gas is monitored. In this method, for example, when there is no substrate or when the electrostatic holding force is small, gas leaks from the pressure measurement hole and the pressure decreases. Therefore, by monitoring the pressure, the presence or absence of the substrate on the mounting table The holding state is detected.

  Further, in Patent Document 2, even after the generation of plasma, if the gas supplied between the mounting table and the substrate is stabilized, the pressure will drop if there is a leak. The pressure change is monitored to detect whether or not a leak has occurred.

Japanese Patent Laid-Open No. 04-359539 JP 2001-338914 A

  However, depending on the substrate processing method, the high-frequency power may be increased immediately after the plasma is generated, or the heat transfer gas pressure may be increased, which may cause gas leakage due to the displacement of the substrate. Therefore, even if the gas leak is determined only before the generation of plasma as in Patent Document 1, it is not possible to detect the gas leak due to the subsequent substrate displacement. In addition, if the gas leakage is monitored after waiting until the gas pressure (flow rate) is sufficiently stabilized as in Patent Document 2, the displacement cannot be detected immediately, and abnormal discharge occurs.

  In this regard, although gas leakage can be detected by detecting the flow rate of gas supplied between the mounting table and the substrate, high-frequency power can be increased immediately after plasma generation, or the heat transfer gas pressure can be increased. Then, since the fluctuation of the gas flow rate may become large, it is very difficult to determine the substrate deviation by monitoring the gas flow rate immediately after the plasma generation.

  Therefore, the present invention has been made in view of such problems, and the object of the present invention is to determine the substrate deviation after the start of discharge for generating plasma and before the heat transfer gas flow rate is stabilized. Thus, even if a substrate is misaligned immediately after the start of discharge, a substrate processing method that can prevent damage to the mounting table due to abnormal discharge as much as possible by detecting it early and stopping the process immediately. It is to provide.

  In order to solve the above-described problems, according to one aspect of the present invention, there is provided a substrate processing method for performing processing with plasma on a substrate to be processed in a depressurizable processing vessel provided in a plasma processing apparatus, The plasma processing apparatus is disposed in the processing container and includes a substrate holding unit that constitutes a mounting table for mounting and holding the substrate to be processed, the substrate holding unit, and a substrate to be processed held on the substrate holding surface, A heat transfer gas channel for supplying a heat transfer gas from a heat transfer gas supply source, a flow rate sensor for detecting a flow rate of the heat transfer gas flowing out to the heat transfer gas channel, and generating the plasma A high-frequency power source for supplying high-frequency power to the inside of the processing vessel, and a processing gas supply unit for supplying a processing gas that is converted into plasma by the high-frequency power into the processing chamber, from the heat transfer gas supply source to the substrate Holding part A pressure adjusting step for supplying the heat transfer gas so that the heat transfer gas has a predetermined pressure with the substrate to be processed, and the heat transfer gas temporarily increased at the start of supply of the heat transfer gas. When the flow rate falls below a predetermined pressure regulation end reference value before the flow rate is stabilized, high-frequency power is supplied into the processing vessel to start discharging, and the substrate is placed on the substrate to be processed on the substrate holding surface. A discharge step for generating plasma of the processing gas, and in the discharge step, when the heat transfer gas flow rate detected by the flow sensor exceeds a predetermined threshold, a determination point for determining that there is a substrate shift is Substrate deviation determination is performed without waiting for stabilization of the heat transfer gas flow rate by providing a plurality of threshold values at each determination point and setting the threshold value for each determination point before the gas flow rate is stabilized. The law is provided.

  In order to solve the above-described problems, according to another aspect of the present invention, a computer executes a substrate processing method for performing processing by plasma on a substrate to be processed in a depressurizable processing vessel provided in a plasma processing apparatus. A computer-readable storage medium storing a program for causing the plasma processing apparatus to be disposed in the processing container and constituting a mounting table for mounting and holding the substrate to be processed; A heat transfer gas passage for supplying a heat transfer gas from a heat transfer gas supply source between the substrate holding portion and the substrate to be processed held on the substrate holding surface; and A flow sensor for detecting a flow rate of the heat transfer gas to be discharged; a high-frequency power source for supplying high-frequency power for generating the plasma into the processing vessel; and a processing gas that is converted into plasma by the high-frequency power. A processing gas supply unit that supplies the processing chamber, and the substrate processing method is configured such that the heat transfer gas has a predetermined pressure between the substrate holding unit and the substrate to be processed from the heat transfer gas supply source. Pressure regulation step for supplying the heat transfer gas, and a predetermined pressure regulation end reference value before the flow rate of the heat transfer gas temporarily increased at the start of the supply of the heat transfer gas decreases and stabilizes A discharge step of supplying a high-frequency power into the processing vessel to start discharge and generating plasma of the processing gas on the substrate to be processed on the substrate holding surface. , A plurality of determination points for determining that there is substrate displacement when the heat transfer gas flow rate detected by the flow sensor exceeds a predetermined threshold value are provided before the heat transfer gas flow rate is stabilized, Threshold By setting the storage medium and performs the substrate deviation determination without waiting for stabilization of the heat transfer gas flow rate is provided.

  Moreover, it is preferable that the threshold value at each determination point is determined based on the past flow rate of the heat transfer gas or the amount of change thereof. In this case, the past flow rate or the change amount thereof may be an average value of the flow rate or the change amount of the same determination point in the substrate processing executed before the substrate processing, or the previous determination point in the substrate processing. Or a change amount thereof.

  If the discharge step includes a step of increasing the pressure of the heat transfer gas after the start of discharge, the substrate displacement determination is stopped immediately before the pressure increase, and the substrate displacement determination is restarted immediately after the pressure increase. Also good. In this case, it is preferable that a determination point is set between the start of discharge and the pressure increase of the heat transfer gas, and the heat transfer gas is increased after the substrate shift determination is performed. The determination point before the heat transfer gas pressure increase may be set only immediately before the heat transfer gas pressure increase to determine the substrate displacement. In addition, as the determination point before the heat transfer gas pressure increase, a plurality of determination points may be set between the start of discharge and the heat transfer gas pressure increase to perform the substrate deviation determination. The high-frequency power is supplied into the processing container by the high-frequency power source by, for example, applying high-frequency power to a susceptor provided in the processing chamber.

  According to the present invention, even after the start of discharge, a plurality of determination points for determining substrate displacement based on the heat transfer gas flow rate are provided before the heat transfer gas flow rate is stabilized, and a threshold value is set for each point. Thus, the displacement of the substrate can be judged without waiting for the heat transfer gas flow rate to stabilize. As a result, even if a positional deviation occurs in the substrate immediately after the start of discharge, it is possible to prevent damage to the mounting table due to abnormal discharge as much as possible by detecting it early and immediately stopping the processing.

1 is an external perspective view of a processing apparatus according to an embodiment of the present invention. It is sectional drawing of the plasma processing apparatus in the embodiment. It is a figure for demonstrating the structural example of the heat transfer gas supply mechanism in the embodiment. It is a figure for demonstrating the effect | action of the mounting base in the embodiment, Comprising: It is a case where the leak of the heat transfer gas has generate | occur | produced by board | substrate deviation. It is a figure for demonstrating the effect | action of the mounting base in the embodiment, Comprising: It is a case where a plasma is generated in the state of FIG. It is a timing diagram for demonstrating the board | substrate process concerning a comparative example. It is a flowchart which shows the outline of the main routine as a specific example of the board | substrate process in the embodiment. It is a flowchart which shows the outline of the subroutine as a specific example of the board | substrate deviation determination process shown in FIG. It is a timing diagram for demonstrating the specific example of the board | substrate process concerning this embodiment. It is a timing diagram for demonstrating the modification of the board | substrate process concerning this embodiment. It is a timing diagram for demonstrating the other modification of the board | substrate process concerning this embodiment. It is a timing diagram for demonstrating the other board | substrate process concerning this embodiment. It is a flowchart which shows the outline of the subroutine of the modification of the board | substrate deviation determination process shown in FIG.

Hereinafter, preferred embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the present specification and drawings, components having substantially the same functional configuration are denoted by the same reference numerals, and redundant description is omitted. In this specification, 1 mTorr is (10 ⁻³ × 101325/760) Pa.

(Configuration example of substrate processing equipment)
First, an embodiment when the present invention is applied to a multi-chamber type substrate processing apparatus having a plurality of plasma processing apparatuses will be described with reference to the drawings. FIG. 1 is an external perspective view of a substrate processing apparatus 100 according to the present embodiment. The substrate processing apparatus 100 shown in FIG. 1 uses a flat panel display substrate (FPD substrate) such as a glass substrate as a substrate to be processed (hereinafter also simply referred to as “substrate”) G, and performs plasma processing on the substrate G. There are provided three plasma processing apparatuses 200 for performing the above.

  The plasma processing apparatus 200 includes a chamber composed of a processing container, and a mounting table on which the substrate G is mounted is provided in the chamber. A shower head for introducing processing gas (for example, process gas) is provided above the mounting table. The mounting table includes a susceptor as a lower electrode constituting the main body, and a shower head provided in parallel with the susceptor also serves as an upper electrode. Each plasma processing apparatus 200 may perform the same processing (for example, etching processing) or different processing (for example, etching processing and ashing processing). A specific configuration example in the plasma processing apparatus 200 will be described later.

  Each plasma processing apparatus 200 is connected via a gate valve 102 to a side surface of a transfer chamber 110 having a polygonal cross section (for example, a rectangular cross section). A load lock chamber 120 is further connected to the transfer chamber 110 via a gate valve 104. A substrate carry-in / out mechanism 130 is provided adjacent to the load lock chamber 120 via a gate valve 106.

  Two indexers 140 are provided adjacent to the substrate carry-in / out mechanism 130, respectively. On the indexer 140, a cassette 142 for storing the substrate G is placed. The cassette 142 is configured to accommodate a plurality of (for example, 25) substrates G.

  When plasma processing is performed on the substrate G using such a plasma processing apparatus, the substrate G in the cassette 142 is first carried into the load lock chamber 120 by the substrate carry-in / out mechanism 130. At this time, if there is a processed substrate G in the load lock chamber 120, the processed substrate G is carried out of the load lock chamber 120 and replaced with an unprocessed substrate G. When the substrate G is loaded into the load lock chamber 120, the gate valve 106 is closed.

  Next, after reducing the pressure in the load lock chamber 120 to a predetermined degree of vacuum, the gate valve 104 between the transfer chamber 110 and the load lock chamber 120 is opened. Then, after the substrate G in the load lock chamber 120 is loaded into the transfer chamber 110 by a transfer mechanism (not shown) in the transfer chamber 110, the gate valve 104 is closed.

  The gate valve 102 between the transfer chamber 110 and the plasma processing apparatus 200 is opened, and the unprocessed substrate G is loaded onto the mounting table in the chamber of the plasma processing apparatus 200 by the transfer mechanism. At this time, if there is a processed substrate G, the processed substrate G is unloaded and replaced with an unprocessed substrate G.

  In the chamber of the plasma processing apparatus 200, a processing gas is introduced into the chamber through a shower head, and high frequency power is supplied to the lower electrode or the upper electrode, or both the upper electrode and the lower electrode, thereby A predetermined plasma process is performed on the substrate G held on the mounting table by generating plasma of a processing gas between the upper electrode and the upper electrode.

(Configuration example of plasma processing equipment)
Next, a specific configuration example of the plasma processing apparatus 200 will be described with reference to the drawings. Here, a configuration example when the plasma processing apparatus of the present invention is applied to a capacitively coupled plasma (CCP) etching apparatus for etching the substrate G will be described. FIG. 2 is a cross-sectional view showing a schematic configuration of the plasma processing apparatus 200 according to the present embodiment.

  A plasma processing apparatus 200 shown in FIG. 2 includes a chamber 202 made of a substantially rectangular tube-shaped processing container made of aluminum, for example, whose surface is anodized (anodized). Chamber 202 is grounded to ground. On the bottom of the chamber 202, a mounting table 300 having a susceptor 310 constituting a lower electrode is disposed. The mounting table 300 functions as a substrate holding mechanism that fixes and holds the rectangular substrate G, and is formed in a rectangular shape corresponding to the rectangular substrate G. A specific configuration example of the mounting table will be described later.

  Above the mounting table 300, a shower head 210 that functions as an upper electrode is disposed so as to face the susceptor 310 in parallel. The shower head 210 is supported on the upper portion of the chamber 202, has a buffer chamber 222 therein, and has a plurality of discharge holes 224 for discharging process gas on the lower surface facing the susceptor 310. This shower head 210 is grounded to the ground, and constitutes a pair of parallel plate electrodes together with the susceptor 310.

  A gas inlet 226 is provided on the upper surface of the shower head 210, and a gas inlet tube 228 is connected to the gas inlet 226. A processing gas supply source 234 is connected to the gas introduction pipe 228 via an open / close valve 230 and a mass flow controller (MFC) 232. These constitute a processing gas supply unit.

The processing gas from the processing gas supply source 234 is controlled to a predetermined flow rate by a mass flow controller (MFC) 232 and is introduced into the buffer chamber 222 of the shower head 210 through the gas introduction port 226. As the processing gas (etching gas), for example, a gas usually used in this field such as a halogen-based gas, O ₂ gas, Ar gas, or the like can be used.

  A gate valve 102 for opening and closing the substrate loading / unloading port 204 is provided on the side wall of the chamber 202. Further, an exhaust port is provided below the side wall of the chamber 202, and an exhaust device 209 including a vacuum pump (not shown) is connected to the exhaust port via an exhaust pipe 208. By exhausting the inside of the chamber 202 by the exhaust device 209, the inside of the chamber 202 can be maintained in a predetermined vacuum atmosphere (for example, 10 mTorr = about 1.33 Pa) during the plasma processing.

  A control unit (overall control device) 400 is connected to the plasma processing apparatus 200, and each part of the plasma processing apparatus 200 is controlled by the control unit 400. In addition, the control unit 400 includes a keyboard on which an operator inputs commands for managing the plasma processing apparatus 200, a display that visualizes and displays the operating status of the plasma processing apparatus 200, and an input operation terminal function. An operation unit 410 including a touch panel having both state display functions is connected.

  Further, the control unit 400 includes a program for realizing various processes (such as a substrate process described later) executed by the plasma processing apparatus 200 under the control of the control unit 400 and processing conditions necessary for executing the program ( A storage unit 420 storing recipes and the like is connected.

  In the storage unit 420, for example, a plurality of processing conditions (recipe) used in substrate processing, a reference value (for example, pressure adjustment end reference value, determination reference value, etc.) The threshold value of each determination point is stored. Among the processing conditions, a plurality of parameter values such as control parameters and setting parameters for controlling each part of the plasma processing apparatus 200 are collected. Each processing condition has parameter values such as a processing gas flow rate ratio, chamber pressure, and high-frequency power. In the plasma processing apparatus 200, when substrate processing is performed using such processing conditions, a plurality of substrates G can be processed continuously under the same processing conditions by loading and unloading the substrates G.

  Note that these programs and processing conditions may be stored in a hard disk or semiconductor memory, or are stored in a storage medium that can be read by a portable computer such as a CD-ROM or DVD, in the storage unit 420. You may set it to a position.

  The control unit 400 executes a desired process in the plasma processing apparatus 200 by reading a desired program and processing conditions from the storage unit 420 based on an instruction from the operation unit 410 and controlling each unit. Further, the processing condition can be edited by an operation from the operation unit 410.

(Configuration example of a mounting table to which a substrate holding mechanism is applied)
Here, a specific configuration example of the mounting table 300 to which the substrate holding mechanism according to the present invention is applied will be described with reference to FIGS. FIG. 3 is a diagram illustrating a configuration example of the heat transfer gas supply mechanism of the mounting table 300. FIG. 3 shows a simplified cross section of the upper part of the mounting table 300 shown in FIG. In FIG. 3, the electrostatic holding part 320 shown in FIG.

  As shown in FIG. 2, the mounting table 300 is a rectangular block-shaped susceptor made of an insulating base member 302 and a conductor (for example, aluminum) provided on the base member 302 and constituting the main body of the mounting table 300. 310. The side surface of the susceptor 310 is covered with an insulating film 311 as shown in FIG.

  On the susceptor 310, an electrostatic holding unit 320 is provided as an example of a substrate holding unit that holds the substrate G on the substrate holding surface. The electrostatic holding unit 320 is configured, for example, by sandwiching an electrode plate 322 between a lower dielectric layer and an upper dielectric layer. A rectangular frame-shaped outer frame 330 made of, for example, an insulating member made of ceramic or quartz is disposed so as to constitute an outer frame of the mounting table 300 and surround the base member 302, the susceptor 310, and the electrostatic holding unit 320. Is done.

  A direct current (DC) power source 315 is electrically connected to the electrode plate 322 of the electrostatic holding unit 320 via a switch 316. The switch 316 can switch, for example, the DC power source 315 and the ground potential with respect to the electrode plate 322. A high-frequency cutoff unit (illustrated) that blocks high-frequency waves from the susceptor 310 side between the electrode plate 322 and the direct current (DC) power source 315 and prevents leakage of high-frequency waves on the susceptor 310 side to the DC power source 315 side. No) may be provided. The high-frequency cutoff unit is preferably constituted by a resistor having a high resistance value of 1 MΩ or more or a low-pass filter that passes direct current.

  When the switch 316 is switched to the DC power source 315 side, a DC voltage from the DC power source 315 is applied to the electrode plate 322. When this DC voltage is a positive voltage, it accumulates on the upper surface of the substrate G so as to attract negative charges (electrons and negative ions). As a result, a Coulomb force that attracts each other with the substrate G and the upper dielectric layer sandwiched between the negative surface charge on the upper surface of the substrate G and the electrode plate 322, that is, the electrostatic force attracts the substrate G. It is sucked and held on the mounting table 300. When the switch 316 is switched to the ground side, the supply of the DC voltage to the electrode plate 322 is stopped, and the electrostatic holding unit 320 upper surface (substrate holding surface) and the substrate G are subjected to a predetermined static elimination process as necessary. And the electrostatic attraction force is released.

  The output terminal of the high frequency power supply 314 is electrically connected to the susceptor 310 via the matching unit 312. The output frequency of the high frequency power supply 314 is selected to be 13.56 MHz, for example. A plasma PZ of a processing gas is generated on the substrate G by the high frequency power from the high frequency power source 314 applied to the susceptor 310, and a predetermined plasma etching process is performed on the substrate G.

  A refrigerant flow path 340 is provided inside the susceptor 310, and a refrigerant adjusted to a predetermined temperature flows from the chiller device (not shown) through the refrigerant flow path 340. With this refrigerant, the temperature of the susceptor 310 can be adjusted to a predetermined temperature.

  The mounting table 300 includes a heat transfer gas supply mechanism that supplies heat transfer gas (for example, He gas) at a predetermined pressure between the substrate holding surface of the electrostatic holding unit 320 and the back surface of the substrate G. The heat transfer gas supply mechanism supplies the heat transfer gas to the back surface of the substrate G at a predetermined pressure via the gas flow path 352 inside the susceptor 310.

  Specifically, the heat transfer gas supply mechanism is configured as shown in FIG. 3, for example. That is, the upper surface of the susceptor 310 and the electrostatic holding part 320 (not shown in FIG. 3) shown in FIG. 2 are provided with a large number of gas holes 354, and these gas holes 354 communicate with the gas flow path 352. . For example, a large number of gas holes 354 are arranged at predetermined intervals in a gas hole forming region R spaced inward from the outer periphery of the substrate holding surface Ls.

  A heat transfer gas supply source 366 that supplies, for example, a heat transfer gas (eg, He gas) is connected to the gas flow path 352 via a pressure control valve (PCV) 362. The pressure control valve (PCV) 362 adjusts the flow rate so that the heat transfer gas pressure supplied to the gas hole 354 side becomes a predetermined pressure.

  The pressure adjustment valve (PCV) 362 includes, for example, a flow sensor (flow meter) 364 for measuring the heat transfer gas flow rate, a pressure sensor and a flow adjustment valve (for example, a piezo valve) (not shown), and a controller for controlling the same. Configured.

  Although FIG. 3 shows an example in which the pressure control valve (PCV) 362 in which the flow sensor 364, the pressure sensor, and the flow control valve are integrated is shown, the present invention is not limited to this, and the gas flow path 352 includes these. The flow rate sensor 364, the pressure sensor, and the flow rate adjustment valve may be provided separately.

  An example of such a pressure sensor is a manometer (for example, a capacitance manometer (CM)). The flow rate adjusting valve is not limited to a piezo valve, and may be a solenoid valve, for example.

  Each of these pressure adjustment valves (PCV) 362 and the heat transfer gas supply source 366 is connected to a control unit 400 that controls each part of the substrate processing apparatus 100. The control unit 400 controls the heat transfer gas supply source 366 to flow out the heat transfer gas, sets the set pressure in the pressure adjustment valve (PCV) 362, and supplies the heat transfer gas to the pressure adjustment valve (PCV) 362. The flow rate is adjusted to be supplied to the gas flow path 352. The controller of the pressure adjustment valve (PCV) 362 controls the piezo valve so that the gas pressure becomes the set pressure by, for example, PID control, thereby controlling the heat transfer gas flow rate. Thus, the heat transfer gas is supplied to the back surface of the substrate G at a predetermined pressure through the gas flow path 352 and the gas hole 354.

  By the way, in such a heat transfer gas supply mechanism, since the pressure of the gas flow path 352 can be measured by a pressure sensor built in the pressure regulating valve (PCV) 362, the heat transfer gas flow rate is based on the measured heat transfer gas pressure. It is possible to detect whether or not a leak has occurred by monitoring the flow rate of the heat transfer gas using the built-in flow rate sensor 364. Since the leakage of the heat transfer gas changes due to the displacement of the substrate G, the displacement of the substrate G can be detected by monitoring the flow rate of the heat transfer gas.

  For example, as shown in FIG. 4, when the displacement of the substrate G occurs, the heat transfer gas leaks from the portion where the substrate G is not present on the formation region R of the gas hole 354, so the flow rate of the heat transfer gas is Larger than when no leakage occurs. Therefore, the positional deviation of the substrate G can be detected by monitoring the flow rate of the heat transfer gas.

  If the position shift of the substrate G occurs as shown in FIG. 4, a part on the susceptor 310 (a part of the substrate holding surface) is exposed, so that the plasma PZ is generated as shown in FIG. If it does, abnormal discharge will generate | occur | produce and may damage the susceptor 310 or a substrate holding surface, and may cause the mounting table 300 to be damaged.

  For this reason, from the viewpoint of preventing abnormal discharge after plasma generation, it is preferable to detect the positional deviation of the substrate G by monitoring the heat transfer gas flow rate before generating the plasma PZ. Also, immediately after plasma generation, the heat transfer gas flow rate may fluctuate significantly by increasing the high-frequency power or increasing the heat transfer gas pressure. If the heat transfer gas flow rate is monitored after waiting, the positional deviation of the substrate G can be accurately detected.

  These points will be described more specifically with reference to FIG. FIG. 6 is a timing chart showing changes in the heat transfer gas flow rate when the substrate processing is performed to change the heat transfer gas pressure and the applied voltage of the high frequency power immediately after the generation of plasma. In FIG. 6, a specific example is substrate processing in which the heat transfer gas pressure and the high-frequency power are increased stepwise.

  As shown in FIG. 6, in the substrate processing, first, the pressure of the heat transfer gas is adjusted by the pressure adjusting step, and then the discharging step for generating the plasma PZ by applying the high frequency power is executed. At this time, the heat transfer gas pressure is set to the first pressure (for example, 1.5 Torr) in the pressure adjusting step, and the supply of the heat transfer gas is started (t1).

  Then, the heat transfer gas flow rate rapidly rises and is supplied to the lower side of the substrate G, and gradually decreases as it accumulates to some extent. The flow rate of the heat transfer gas at this time is monitored, and when the pressure becomes less than a preset pressure regulation end reference value, high frequency power is applied to start discharging. As a result, plasma PZ is generated and a discharge step is started. In particular, in recent years, the size of the substrate G is further increased, and accordingly, the size of the mounting table 300 is also increased more than before, so it takes time until the heat transfer gas flow rate is sufficiently stabilized. For this reason, the pressure regulation end reference value is set based on the flow rate at the time point (t2) when the pressure is stabilized to some extent.

  At this time, if the heat transfer gas flow rate does not fall below the pressure regulation end reference value even after the timeout period has elapsed, it is considered that the heat transfer gas has leaked and the heat transfer gas has leaked. And the discharge for generating plasma is not performed. Thereby, abnormal discharge can be prevented in advance.

  Thereafter, in the discharging step, the heat transfer gas pressure is increased (for example, 3 Torr), and the high frequency power is also increased. At this time, when the set pressure of the heat transfer gas is increased, the flow rate of the heat transfer gas increases rapidly and then gradually decreases, and the pressure of the heat transfer gas reaches the set pressure. Thus, immediately after the start of the discharge step, the change in the heat transfer gas flow rate becomes large, and the change in the flow rate also changes according to the processing conditions, so the determination of the heat transfer gas flow rate for determining the positional deviation of the substrate G. It is extremely difficult to determine a reference value.

  Therefore, conventionally, when the heat transfer gas flow rate is monitored after the discharge for generating the plasma PZ is started (after t2 has elapsed), a predetermined delay time has elapsed since the start of discharge (t2). After (t4), that is, wait until the discharge step heat transfer gas flow rate is sufficiently stable, start monitoring the heat transfer gas flow rate, and if there is a change in the flow rate after the stabilization, there will be a leak. It was determined that the substrate was misaligned. Specifically, a determination reference value lower than the pressure adjustment end reference value is uniformly set, and when the determination reference value is exceeded, it is determined that the substrate G is misaligned.

  However, as shown in the discharge step of FIG. 6, when the high frequency power is increased immediately after the plasma is generated or the heat transfer gas pressure is increased, the substrate G is displaced between t2 and t4. Sometimes. Even in this case, if the monitoring of the heat transfer gas flow rate is started after t4 has elapsed, the monitoring is not performed during the period from t2 to t4. It will occur and the mounting table 300 will be damaged.

  Therefore, in this embodiment, a plurality of determination points for determining the displacement of the substrate G from the heat transfer gas flow rate are provided from the point before the heat transfer gas flow rate is stabilized even after the discharge starts, and a threshold value is set for each point. Is set so that the displacement of the substrate G can be determined without waiting for the heat transfer gas flow rate to stabilize (without waiting for t4 to elapse). According to this, even if a position shift occurs in the substrate G immediately after the plasma is generated, it can be detected early. Therefore, if the position shift occurs in the substrate G, the processing is stopped as soon as possible to prevent damage to the mounting table 300 due to abnormal discharge as much as possible.

  A specific example of the substrate processing including the positional deviation determination of the substrate G in the present embodiment will be described with reference to the drawings. FIG. 7 is a flowchart showing an outline of a main routine as a specific example of substrate processing in the present embodiment. FIG. 8 is a flowchart showing an outline of a subroutine as a specific example of the substrate deviation determination process shown in FIG. FIG. 9 is a diagram showing the timing in the processing of FIGS. Here, the substrate processing which raises heat-transfer gas pressure and high frequency electric power in steps like FIG. 6 is given as a specific example.

  The control unit 400 executes the substrate processing shown in FIG. 7 on the substrate G placed on the placement table 300 based on a predetermined program. In this substrate processing, first, a pressure adjusting step (steps S110 to S130) is performed, and then a plasma processing is performed in a discharging step (steps S140 to S190).

  Specifically, the pressure in the chamber 202 is reduced to a predetermined vacuum pressure in step S110, the processing gas is introduced into the chamber 202 from the shower head 210, and the introduction of the heat transfer gas is started in step S120. Then, as shown in FIG. 9, the heat transfer gas flow rate rapidly rises and is supplied to the lower side of the substrate G and gradually decreases as it accumulates to some extent.

  In step S130, the heat transfer gas flow rate is monitored by the flow rate sensor 364 of the pressure adjustment valve (PCV), and it is determined whether or not the heat transfer gas flow rate is equal to or lower than the pressure regulation end reference value. At this time, if it is determined that the heat transfer gas flow rate is not equal to or lower than the pressure regulation end reference value, the elapsed time from the start of heat transfer gas introduction is compared with a preset time-out time in step S132, and the time-out time is exceeded. Judge whether or not.

  If it is determined in step S132 that the time-out period has not been exceeded, the process returns to step S130 to continue monitoring the heat transfer gas flow rate. If it is determined in step S132 that the time-out period has been exceeded, there is a high possibility that heat transfer gas has leaked, and therefore, a stability waiting error process is performed in step S134.

  For example, there is a possibility that the substrate G is not mounted on the mounting table 300, the adsorption failure of the substrate G has occurred, or the position shift of the substrate G has occurred. Therefore, in such a case, it is assumed that a stability waiting error process is performed in step S134. In the stability waiting error process, for example, the supply of heat transfer gas is stopped, and an error is displayed on the display of the operation unit 410 or an alarm is notified.

  On the other hand, if it is determined that the heat transfer gas flow rate is equal to or less than the pressure regulation end reference value, it is determined that the substrate mounting state is OK and the heat transfer gas supply state is OK, and the substrate G is subjected to the discharge step after step S140. Start processing. Specifically, in step S140, a first high-frequency power (for example, 5 kW) is applied to generate plasma PZ of a processing gas.

  Subsequently, the heat transfer gas is boosted in step S150, and second high frequency power higher than the first high frequency power is applied in step S160. At this time, as shown in FIG. 9, the heat transfer gas flow rate rises temporarily and then gradually decreases.

  In the present embodiment, the substrate deviation determination process (step S200) is executed after steps S150 and S160, that is, based on the heat transfer gas flow rate immediately after the heat transfer gas has temporarily increased rapidly. Specifically, as shown in FIG. 8, it is determined whether or not it is a determination point in step S210.

  For example, the elapsed time from the heat transfer gas pressure increase (t3) is compared with a plurality of preset determination points (determination point times), and the processing from step S220 is executed each time the determination point is reached. The white circle shown in FIG. 9 is the time point of the determination point, and in FIG. 9, the first determination point is tp. The determination points are set at a predetermined interval, and the determination can be performed in real time as the interval is shortened.

  If it is determined in step S210 that it is a determination point, the heat transfer gas flow rate at the determination point is stored in the storage unit 420 in step S220. This is because it is used to set a threshold value for the same determination point when processing the next substrate.

  Next, in step S230, the threshold set based on the heat transfer gas flow rate at the same determination point in the previous substrate processing is compared with the heat transfer gas flow rate at this determination point. The threshold value in this case may be an average value of the actual heat transfer gas flow rate in the substrate processing before the previous time, or a value obtained by adding a predetermined allowable flow rate to this average value. Note that the heat transfer gas flow rate used when setting the threshold value is that when no substrate displacement occurs in order to improve the accuracy of substrate displacement determination.

  In step S240, it is determined whether or not the heat transfer gas flow rate at the determination point is equal to or less than a threshold value. If it is determined that the heat transfer gas flow rate is not less than or equal to the threshold value, it is determined in step S242 that there is an abnormality in substrate displacement, and substrate displacement error processing is performed in step S244. In the substrate misalignment error processing, for example, the substrate processing is temporarily stopped, and the determination result is displayed on the display or notified by an alarm.

  If it is determined in step S240 that the heat transfer gas flow rate is equal to or less than the threshold value, it is determined that there is no substrate displacement, and the process returns to the process of FIG. Substrate processing is continued, and each time a determination point is reached, substrate deviation is determined based on the threshold value set for that determination point. If it is determined in step S180 that the processing time has elapsed, the high-frequency power is stopped in step S190, the processing gas and the heat transfer gas are stopped, and the series of substrate processing ends.

  According to this, as shown in FIG. 9, it is possible to determine the substrate displacement from the time tp before the time (t4) when the heat transfer gas is stabilized in the discharge step. Even if the substrate shift occurs after the high-frequency power is raised and before t4 elapses, it can be detected before the time (t4) when the heat transfer gas is stabilized, and the processing is immediately stopped. be able to. Thereby, damage of the mounting table 300 due to abnormal discharge can be prevented as much as possible.

  In addition, a more accurate threshold can be set by using the actual heat transfer gas flow rate at the same determination point in the past substrate processing as the threshold of each determination point. For example, the actual heat transfer gas flow rate slightly changes for each plasma processing apparatus 200 and for each processing condition, so that an appropriate threshold value can be automatically set in accordance with it. Thereby, the precision of board | substrate deviation determination can be improved.

  Note that the threshold value may be a value calculated and set when comparing the heat transfer gas flow rate at each determination point, or the substrate processing threshold value may be calculated when the temperature control gas flow rate is stored. What has been set and stored may be used for determination at the same determination point in the next substrate processing.

  Further, instead of using the actual heat transfer gas flow rate at the same determination point in the past substrate processing, the amount of change in the heat transfer gas flow rate may be used as the threshold value of each determination point. In this case, “flow rate” in steps S230 and S240 shown in FIG. 8 can be replaced with “flow rate change amount”. Depending on the processing conditions of the substrate processing (type of processing gas, pressure in the chamber, etc.), the upper surface potential of the electrostatic holding unit 320 slightly changes, so the heat transfer gas flow rate is not necessarily reduced or constant, There are cases where it rises gradually.

  Even in such a case, as described above, by using the change amount of the heat transfer gas flow rate as the threshold value of each determination point, even if the heat transfer gas flow rate is increased, the change amount is more than the threshold value at each determination point. If it does not increase, it can be determined that there is no leakage and there is no substrate displacement.

  In addition, since the threshold value set in this way varies depending on the actual flow rate, a fixed threshold value is set in advance, and if it becomes too large compared to the fixed threshold value, it is reset to the fixed threshold value. May be.

  In addition, in the substrate processing shown in FIG. 9, there is a possibility that the substrate shift occurs after the discharge step is started by applying the relatively low first high frequency power at the time (t2) when the pressure adjustment is below the reference value. is there. For this reason, even immediately before the pressure increase of the heat transfer gas, the substrate displacement may be determined based on the heat transfer gas flow rate at that time.

  Specifically, for example, as shown in FIG. 10, the heat transfer gas flow rate is also measured immediately before the heat transfer gas pressure increase (ta), and the heat transfer gas flow rate is lower than the pressure regulation end reference value. You may make it judge whether it is below a value. At this time, it is normal if it is determined that it is below the reference value at the time (ta) immediately before the heat transfer gas is increased, and if it is determined that it is not below the reference value, leakage occurs due to substrate displacement. There is a possibility.

  For this reason, if it is determined that the value is less than the determination reference value, the substrate processing is continued. If it is determined that the value is not less than the determination reference value, the substrate processing is performed by the substrate misalignment error processing as in step S244 in FIG. Is temporarily suspended. According to this, even if a position shift occurs in the substrate G after the start of the discharge step, the substrate processing can be stopped by detecting immediately before the heat transfer gas is increased before the high-frequency power is raised. It is possible to prevent damage to the mounting table 300 due to the abnormal discharge.

  Further, not only the time point (ta) immediately before the heat transfer gas pressure increase but also a plurality of determination points are set from the time point (t2) when the discharge step is started to immediately before the pressure increase of the heat transfer gas (ta) as shown in FIG. You may make it determine by doing. In this case, the determination may be made using a threshold set based on the flow rate at the same determination point before the previous time as in the substrate displacement process shown in FIG.

  Then, the substrate processing is continued when it is determined that each determination point is equal to or less than the threshold value, and when it is determined that the threshold value is not equal to or less than the threshold value, the substrate processing is performed by the substrate misalignment error processing as in step S244 of FIG. Stop temporarily. According to this, even if a positional deviation occurs in the substrate G after the start of the discharge step, it can be detected immediately and the substrate processing can be stopped, so that damage to the mounting table 300 due to abnormal discharge can be prevented as much as possible.

  In addition, according to the processes of FIGS. 10 and 11 described above, the heat transfer gas flow rate is measured after applying a relatively low first high-frequency power that can increase the adsorption power of the substrate within a range in which abnormal discharge hardly occurs. Therefore, the occurrence of leakage can be accurately detected. Then, after confirming that no heat transfer gas leaks, the substrate processing can be performed by applying the second high-frequency power and performing the main discharge.

  Up to this point, the case where the heat transfer gas is boosted immediately after the start of the discharge step has been described as an example. However, the substrate processing in this embodiment can also be applied when the heat transfer gas is not boosted. Here, FIG. 12 shows a timing chart when the heat transfer gas is not increased immediately after the start of the discharge step. In the case shown in FIG. 12, since the heat transfer gas is not boosted, the heat transfer gas flow rate does not change greatly after the start of discharge (t2), but decreases gradually and stabilizes.

  In this case, step S150 shown in FIG. 7 can be omitted and applied. Further, if there is no significant change in the heat transfer gas after the discharge step, the substrate deviation determination process (step S200) may be performed from the start of the discharge step (step S140) as shown in FIG. According to this, even after the start of the discharge step, a plurality of determination points for determining the positional deviation of the substrate G from the heat transfer gas flow rate are provided from the time (t2) before the heat transfer gas flow rate is stabilized. By setting the threshold value to, the substrate deviation determination process can be performed from the time (t2) before the time (t4) when the heat transfer gas flow rate is stabilized. As a result, the substrate displacement can be detected at an early stage without waiting for the heat transfer gas flow rate to stabilize (without waiting for the elapse of t4), so that damage to the mounting table 300 due to abnormal discharge can be prevented as much as possible.

  By the way, in the substrate deviation determination process shown in FIG. 8, the case where the actual heat transfer gas flow rate at the same determination point in the past substrate processing is used as the threshold value of each determination point has been described as an example. The threshold value of the point is not limited to this. For example, the actual heat transfer gas flow rate at the determination point immediately before the same substrate processing may be set as the threshold value.

  Here, FIG. 13 shows a substrate deviation determination process when the threshold value of each determination point is set to the actual heat transfer gas flow rate at the immediately preceding determination point. In FIG. 13, step S230 of FIG. 8 is replaced with steps S232 and S234.

  More specifically, if it is determined at step S210 shown in FIG. 13 that it is a determination point, the heat transfer gas flow rate at the determination point is stored in the storage unit 420 at step S220. This is because the threshold value for the next determination point in the same substrate processing is used here.

  Next, in step S232, it is determined whether or not it is the first determination point. If it is determined that it is the first determination point, the process returns to step S210 to determine whether or not it is the next determination point. This is because the first determination point has no previous determination point, and therefore a threshold is set based on the heat transfer gas flow rate from the next determination point to the previous determination point. Note that at the first determination point, the substrate displacement may be determined using a default value obtained based on the heat transfer gas flow rate at the same determination point in the past substrate processing as a threshold value.

  If it is determined in step S232 that it is not the first determination point, the threshold set based on the heat transfer gas flow rate at the immediately preceding determination point in step S234 is compared with the heat transfer gas flow rate at this determination point. . In this case, the threshold value may be a value of the actual heat transfer gas flow rate at the immediately preceding determination point, or a value obtained by adding a predetermined allowable flow rate to this value.

  In step S240, it is determined whether or not the heat transfer gas flow rate at the determination point is equal to or less than a threshold value. If it is determined that the heat transfer gas flow rate is not less than or equal to the threshold value, it is determined in step S242 that there is an abnormality in substrate displacement, and substrate displacement error processing is performed in step S244. In the substrate misalignment error processing, for example, the substrate processing is temporarily stopped, and the determination result is displayed on the display or notified by an alarm.

  If it is determined in step S240 that the heat transfer gas flow rate is equal to or less than the threshold value, it is determined that there is no substrate displacement, and the process returns to the process of FIG. Substrate processing is continued, and each time a determination point is reached, substrate deviation is determined based on the threshold value set for that determination point.

  Specifically, in the substrate misalignment determination process shown in FIG. 13, the actual heat transfer gas flow rate at the immediately preceding determination point in the same substrate process is used as the threshold value for each determination point. If the flow rate is too low, it is determined to be normal, and if the flow rate just before is exceeded, leakage of the heat transfer gas occurs and it is determined that there is a substrate shift. This is because if a substrate shift occurs, a leak should have occurred from that point, so the heat transfer gas flow rate is considered to be greater than the previous judgment point by the amount of the leak.

  Also by the substrate deviation determination process shown in FIG. 13, the time (tp shown in FIG. 9 or FIG. 12) before the time (t4) when the heat transfer gas is stabilized in the discharge step as shown in FIG. 9 and FIG. Therefore, even when the substrate shift occurs after boosting the heat transfer gas or increasing the high-frequency power, for example, from the time (t4) when the heat transfer gas is stabilized. It can be detected before and processing can be stopped immediately. Thereby, damage of the mounting table 300 due to abnormal discharge can be prevented as much as possible. In addition, the substrate deviation can be determined in real time as the interval between the determination points is shortened.

  In the substrate misalignment determination process shown in FIG. 13, as in the case shown in FIG. 9, instead of using the actual heat transfer gas flow rate at the previous determination point as the threshold value of each determination point, the heat transfer gas flow rate is used. May be used. In this case, “flow rate” in steps S234 and S240 shown in FIG. 13 can be replaced with “flow rate change amount”. According to this, not only when the heat transfer gas flow rate decreases or becomes constant, but also when it gradually increases, if the change amount does not become larger than the threshold at each judgment point, the leakage It can be determined that there is no substrate displacement and there is no normal state.

  In addition, a medium such as a storage medium storing a software program for realizing the functions of the above-described embodiments is supplied to the system or apparatus, and the computer (or CPU or MPU) of the system or apparatus stores the medium in the storage medium or the like. The present invention can also be achieved by reading and executing a stored program.

  In this case, the program itself read from the medium such as a storage medium realizes the functions of the above-described embodiment, and the medium such as the storage medium storing the program constitutes the present invention. Examples of the medium such as a storage medium for supplying the program include a floppy (registered trademark) disk, a hard disk, an optical disk, a magneto-optical disk, a CD-ROM, a CD-R, a CD-RW, a DVD-ROM, and a DVD-RAM. DVD-RW, DVD + RW, magnetic tape, nonvolatile memory card, ROM, and the like. It is also possible to provide a program downloaded to a medium via a network.

  Note that by executing the program read by the computer, not only the functions of the above-described embodiments are realized, but also an OS or the like running on the computer is part of the actual processing based on the instructions of the program. Alternatively, the case where the functions of the above-described embodiment are realized by performing all of the above processing is also included in the present invention.

  Furthermore, after a program read from a medium such as a storage medium is written to a memory provided in a function expansion board inserted into the computer or a function expansion unit connected to the computer, the function is determined based on the instructions of the program. The present invention also includes a case in which the CPU or the like provided in the expansion board or the function expansion unit performs part or all of the actual processing and the functions of the above-described embodiments are realized by the processing.

  As mentioned above, although preferred embodiment of this invention was described referring an accompanying drawing, it cannot be overemphasized that this invention is not limited to the example which concerns. It will be apparent to those skilled in the art that various changes and modifications can be made within the scope of the claims, and these are naturally within the technical scope of the present invention. Understood.

  For example, in each of the above embodiments, the case where a high frequency is applied to the susceptor to generate plasma has been described. However, a method other than applying a high frequency to the susceptor, for example, a high frequency for plasma generation is applied to the upper portion by capacitively coupled discharge. In some cases, or when plasma is generated by inductively coupled discharge, plasma may be generated by microwaves. Even if the plasma generated by any of these methods is used, the same abnormal discharge can occur if the substrate holding surface is exposed. Therefore, the method of supplying the high-frequency processing container to generate plasma is described above. It is not restricted to what was demonstrated with the form.

  The present invention can be applied to a substrate processing method and a storage medium that stores a program for executing the method.

DESCRIPTION OF SYMBOLS 100 Substrate processing apparatus 102,104,106 Gate valve 110 Transfer chamber 120 Load lock chamber 130 Substrate carrying in / out mechanism 140 Indexer 142 Cassette 200 Plasma processing apparatus 202 Chamber (processing container)
204 Substrate loading / unloading port 208 Exhaust pipe 209 Exhaust device 210 Shower head 222 Buffer chamber 224 Discharge hole 226 Gas introduction port 228 Gas introduction pipe 230 On-off valve 232 Mass flow controller (MFC)
234 Processing gas supply source 300 Mounting base 302 Base member 310 Susceptor 311 Insulating film 312 Matching device 314 High frequency power supply 315 DC power supply 316 Switch 320 Electrostatic holding part 322 Electrode plate 330 Outer frame part 340 Refrigerant flow path 352 Gas flow path 354 362 Pressure control valve (PCV)
364 Flow rate sensor 366 Heat transfer gas supply source 400 Control unit 410 Operation unit 420 Storage unit G Substrate

Claims (10)

A substrate processing method for performing plasma processing on a substrate to be processed in a depressurizable processing vessel provided in a plasma processing apparatus,
The plasma processing apparatus includes:
A substrate holder that is disposed in the processing container and constitutes a mounting table for mounting and holding the substrate to be processed;
A heat transfer gas flow path for supplying a heat transfer gas from a heat transfer gas supply source between the substrate holding portion and the substrate to be processed held on the substrate holding surface;
A flow rate sensor for detecting a flow rate of the heat transfer gas flowing out to the heat transfer gas flow path;
A high-frequency power source for supplying high-frequency power for generating the plasma into the processing vessel;
A processing gas supply unit for supplying a processing gas that is converted into plasma by the high-frequency power into the processing chamber,
A pressure adjusting step of supplying the heat transfer gas from the heat transfer gas supply source so that the heat transfer gas has a predetermined pressure between the substrate holder and the substrate to be processed;
When the flow rate of the heat transfer gas temporarily increased at the start of supply of the heat transfer gas falls below a predetermined pressure regulation end value before the flow rate decreases and stabilizes, high-frequency power is supplied into the processing container. A discharge step for starting discharge and generating plasma of the processing gas on the substrate to be processed on the substrate holding surface,
In the discharge step, when the heat transfer gas flow rate detected by the flow sensor exceeds a predetermined threshold, a plurality of determination points for determining that there is a substrate shift are provided at a time before the heat transfer gas flow rate is stabilized, By setting the threshold value for each point, the substrate shift determination is performed without waiting for the heat transfer gas flow rate to stabilize. The substrate processing method according to claim 1, wherein the threshold value at each determination point is determined based on a past flow rate or a change amount of the heat transfer gas. 3. The substrate processing method according to claim 2, wherein the past flow rate or a change amount thereof is a flow rate at the same determination point or an average value of the change amount in the substrate processing performed before the substrate processing. . The substrate processing method according to claim 2, wherein the past flow rate or a change amount thereof is a flow rate or a change amount of the immediately preceding determination point in the substrate processing. In the discharging step, when the step of increasing the pressure of the heat transfer gas after starting discharge, the substrate displacement determination is stopped immediately before the pressure increase, and the substrate displacement determination is restarted immediately after the pressure increase. The substrate processing method in any one of Claims 1-4. 6. The substrate processing method according to claim 5, wherein a determination point is set between the start of discharge and the pressure increase of the heat transfer gas, and the heat transfer gas is increased after the substrate shift determination is performed. The substrate processing method according to claim 6, wherein the determination of the substrate displacement is performed by setting the determination point before the heat transfer gas is increased only immediately before the pressure increase of the heat transfer gas. The substrate processing method according to claim 6, wherein the determination of the substrate shift is performed by setting a plurality of determination points from the start of discharge to the increase of the heat transfer gas as the determination points before the pressure increase of the heat transfer gas. . The supply of the high-frequency power into the processing container by the high-frequency power source is performed by applying high-frequency power to a susceptor provided in the processing chamber. Substrate processing method. A computer-readable storage medium storing a program for causing a computer to execute a substrate processing method for performing processing by plasma on a substrate to be processed in a depressurizable processing vessel provided in a plasma processing apparatus,
The plasma processing apparatus includes:
A substrate holder that is disposed in the processing container and constitutes a mounting table for mounting and holding the substrate to be processed;
A heat transfer gas flow path for supplying a heat transfer gas from a heat transfer gas supply source between the substrate holding portion and the substrate to be processed held on the substrate holding surface;
A flow rate sensor for detecting a flow rate of the heat transfer gas flowing out to the heat transfer gas flow path;
A high-frequency power source for supplying high-frequency power for generating the plasma into the processing vessel;
A processing gas supply unit for supplying a processing gas that is converted into plasma by the high-frequency power into the processing chamber,
The substrate processing method includes:
A pressure adjusting step of supplying the heat transfer gas from the heat transfer gas supply source so that the heat transfer gas has a predetermined pressure between the substrate holder and the substrate to be processed;
When the flow rate of the heat transfer gas temporarily increased at the start of supply of the heat transfer gas falls below a predetermined pressure regulation end value before the flow rate decreases and stabilizes, high-frequency power is supplied into the processing container. A discharge step for starting discharge and generating plasma of the processing gas on the substrate to be processed on the substrate holding surface,
In the discharge step, when the heat transfer gas flow rate detected by the flow sensor exceeds a predetermined threshold, a plurality of determination points for determining that there is a substrate shift are provided at a time before the heat transfer gas flow rate is stabilized, By setting the threshold value for each point, the substrate shift determination is performed without waiting for the heat transfer gas flow rate to stabilize.

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