JP2012096269A - Sealing machine of vacuum laser welding - Google Patents

Sealing machine of vacuum laser welding Download PDF

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JP2012096269A
JP2012096269A JP2010246638A JP2010246638A JP2012096269A JP 2012096269 A JP2012096269 A JP 2012096269A JP 2010246638 A JP2010246638 A JP 2010246638A JP 2010246638 A JP2010246638 A JP 2010246638A JP 2012096269 A JP2012096269 A JP 2012096269A
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vacuum
laser welding
sealing machine
jacket material
chamber
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Mitsuru Hashimoto
本 満 橋
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NPC Inc
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PROBLEM TO BE SOLVED: To provide a sealing machine of vacuum laser welding, which can reliably weld and seal a metal foil by a laser beam when manufacturing a vacuum heat insulating material.SOLUTION: The sealing machine of vacuum laser welding includes: a body (10) having a chamber lower part (2), a chamber lid (1) having a light-transmitting window (6), which forms sealed space (8) by engaging with the chamber lower part and is openable/closable, a support arranged so that a material to be sealed is wrapped by a metal sheathing material in the space, and a pressing mechanism (16) for closely contacting the metal sheathing materials with each other in the space; an evacuating apparatus arranged on an outer part of the body part, which evacuates the space by exhausting air in the space; and laser welding mechanisms (31-33) arranged on the outer part of the body part, which weld and seal the closely contacted metal sheathing material by irradiating the metal sheathing material with the laser through the light-transmitting window.

Description

本発明は真空断熱材や電池等の被封止物をレーザー溶接により真空封止する真空レーザー溶接封止機に関する。   The present invention relates to a vacuum laser welding sealing machine that vacuum seals a sealed object such as a vacuum heat insulating material or a battery by laser welding.

真空断熱材は、グラスウール等の芯材をガスバリア性を有する外被材で包装し、チャンバの内部を減圧して真空状態とし外被材を封止することで製造される。また、物品を真空封止する場合にも封止を行うチャンバとして真空チャンバが用いられ、外被材の封止部の接着には通常は樹脂系接着剤が用いられる。   The vacuum heat insulating material is manufactured by wrapping a core material such as glass wool with a jacket material having a gas barrier property, and reducing the pressure inside the chamber to form a vacuum state and sealing the jacket material. Further, when the article is vacuum-sealed, a vacuum chamber is used as a chamber for sealing, and a resin-based adhesive is usually used for bonding the sealing portion of the jacket material.

特許文献1には、外被材として金属を使用し、真空容器内で透明窓から照射するレーザー光による溶接封止を行う方法および装置が開示されている。   Patent Document 1 discloses a method and apparatus for performing welding and sealing with a laser beam irradiated from a transparent window in a vacuum vessel using a metal as an outer cover material.

特開2004−90060号公報Japanese Patent Laid-Open No. 2004-90060

しかしながら、真空断熱材の製造においては真空包装機に投入する前に芯材、および外被材を十分に乾燥させる必要があり、乾燥に長時間を要する。また、封止封止剤として樹脂系接着剤を使用した場合の酸素透過率は0%ではない。   However, in the manufacture of the vacuum heat insulating material, it is necessary to sufficiently dry the core material and the jacket material before putting them into the vacuum packaging machine, which requires a long time for drying. Further, the oxygen transmission rate when a resin adhesive is used as a sealing sealant is not 0%.

特許文献1に記載の金属外被材をレーザー溶接して封止する封止方法はこの点では有効であるが、真空断熱材のような大型の被封止物を薄膜の金属箔で封止するためには、2枚の金属箔を長い距離平坦に固定し、被封止物に密着させる必要がある。   The sealing method of sealing the metal jacket material described in Patent Document 1 by laser welding is effective in this respect, but seals a large sealed object such as a vacuum heat insulating material with a thin metal foil. In order to do this, it is necessary to fix the two metal foils flat for a long distance and to adhere to the object to be sealed.

そこで本発明は、このような課題に鑑みてなされたものであり、真空断熱材製造時のレーザー光による金属箔溶接封止を確実に行うことのできる真空レーザー溶接封止機を提供することを目的とする。   Then, this invention is made | formed in view of such a subject, and provides the vacuum laser welding sealing machine which can perform reliably metal foil welding sealing by the laser beam at the time of vacuum heat insulating material manufacture. Objective.

上記の課題を解決するために、本発明によれば、
チャンバ下部と、このチャンバ下部と係合して密閉空間を形成し、かつ開閉可能で、光透過窓を備えたチャンバ蓋と、前記空間内には、被封止物を金属外被材で包まれた状態で載置する支持体と、前記金属外被材どうしを密着させる押さえ機構とを有する本体部と、
前記本体部の外部に設けられ、前記空間内の排気を行って真空にする真空化装置と、
前記本体部の外部に設けられ、前記光透過窓を介してレーザーを前記密着された金属外被材に照射することにより前記金属外被材を溶接して封止するレーザー溶接機構と、
を備えた真空レーザー溶接封止機が提供される。
In order to solve the above problems, according to the present invention,
A chamber lower part, a chamber lid that engages with the chamber lower part to form a sealed space, can be opened and closed, and has a light transmission window; A main body having a support placed in a rare state, and a pressing mechanism for bringing the metal jacket materials into close contact with each other;
A vacuuming device that is provided outside the main body and evacuates the space to create a vacuum;
A laser welding mechanism that is provided outside the main body, and welds and seals the metal jacket material by irradiating the metal jacket material with the laser through the light transmission window; and
A vacuum laser welding sealing machine is provided.

前記押さえ機構は、押さえと同時に前記金属外被材を密着させるように押さえ部材が溶接位置を中心に前記金属外被材を両側に伸ばすようにスライドする機構であることが好ましい。   The pressing mechanism is preferably a mechanism in which the pressing member slides so as to extend the metal jacket material to both sides around the welding position so that the metal jacket material is brought into close contact with the pressing mechanism.

前記レーザー溶接機構は、前記光透過窓に沿ってレーザー照射ヘッドを平行移動させる移動機構を備えると良い。   The laser welding mechanism may include a moving mechanism that translates the laser irradiation head along the light transmission window.

本発明にかかる真空レーザー溶接封止機では、被封止物を金属外被材で包まれた状態で載置する支持体と、前記金属外被材どうしを密着させる押さえ機構とヒータとをチャンバ内に備え、チャンバ外に真空化装置およびレーザー溶接機構を備えることにより、乾燥、真空引き、封止の一連の作業を1つの装置で行うことができるため、効率的な封止作業が可能となる。特にレーザーを用いた真空中の非接触溶接封止が可能となるため、きわめて低い酸素透過率を長期にわたって維持できる製品を製造できる。   In the vacuum laser welding sealing machine according to the present invention, a support body for placing an object to be sealed in a state of being wrapped in a metal jacket material, a pressing mechanism for closely contacting the metal jacket materials, and a heater are provided in a chamber. By providing a vacuuming device and a laser welding mechanism outside the chamber, a series of operations of drying, evacuation, and sealing can be performed with a single device, enabling efficient sealing work. Become. In particular, since non-contact welding sealing in a vacuum using a laser becomes possible, a product capable of maintaining a very low oxygen transmission rate over a long period of time can be manufactured.

押さえ機構は、押さえと同時に前記金属外被材を密着させるように押さえ部材が溶接位置を中心に前記金属外被材を両側に伸ばすようにスライドする機構とすることにより、金属外被材のしわやたるみを除去し、金属外被材どうしを確実に密着させることができる。   The pressing mechanism is a mechanism in which the pressing member slides so as to extend the metal jacket material to both sides centering on the welding position so that the metal jacket material is brought into close contact with the pressing member. The slack can be removed, and the metal jacket materials can be securely adhered to each other.

光透過窓に沿ってレーザー照射ヘッドを平行移動させる移動機構を備えることにより、連続的なシーム溶接が可能となり、封止性能が向上する。   By providing a moving mechanism that translates the laser irradiation head along the light transmission window, continuous seam welding is possible, and sealing performance is improved.

本発明にかかる真空レーザー溶接封止機の一実施例を示す概略平面図である。It is a schematic plan view which shows one Example of the vacuum laser welding sealing machine concerning this invention. 図1の右側面から見た断面図である。It is sectional drawing seen from the right side surface of FIG. 図1の正面から見た断面図である。It is sectional drawing seen from the front of FIG. 溶接封止のためにレーザー光が移動する様子を示す説明図である。It is explanatory drawing which shows a mode that a laser beam moves for welding sealing. 図1の外被材押さえ治具部の詳細図である。FIG. 2 is a detailed view of a jacket material pressing jig portion of FIG. 1. 図5の外被材押さえ治具部の動作を示す説明図である。It is explanatory drawing which shows operation | movement of the jacket material pressing jig part of FIG.

以下、本発明の実施の形態について、詳細に説明する。   Hereinafter, embodiments of the present invention will be described in detail.

図1は本発明にかかる真空レーザー溶接封止機の一実施例を説明する概略平面図であり、図2は図1の右側面から見た断面図、図3は図1の正面から見た断面図である。   1 is a schematic plan view for explaining an embodiment of a vacuum laser welding sealing machine according to the present invention, FIG. 2 is a cross-sectional view seen from the right side of FIG. 1, and FIG. 3 is seen from the front of FIG. It is sectional drawing.

真空レーザー溶接封止機は、チャンバ下部をなす底板2と、この底板の全周縁部に各辺の先端部が搭載されることにより、空間であるチャンバ8が形成されるチャンバ蓋1を有している。この底板とチャンバ蓋との接触部にはOリングが介装され、底板とチャンバ蓋とを圧力をかけながら密着させあるいは開放する開閉機構(図示せず)を備えることにより、閉じたときには底板とチャンバ蓋2によってチャンバ8は機密性を備え、封止対象物の交換等の場合には、チャンバ蓋1を開閉機構で開放させることができる。   The vacuum laser welding sealing machine has a bottom plate 2 that forms a lower portion of the chamber, and a chamber lid 1 in which a front end portion of each side is mounted on the entire peripheral portion of the bottom plate to form a chamber 8 that is a space. ing. An O-ring is interposed in the contact portion between the bottom plate and the chamber lid, and an opening / closing mechanism (not shown) that closes or opens the bottom plate and the chamber lid while applying pressure is provided. The chamber lid 2 has confidentiality due to the chamber lid 2, and the chamber lid 1 can be opened by an opening / closing mechanism in the case of replacement of a sealing object or the like.

底版2の一部に、外部に設けられた真空ポンプ(図示せず)との接続用の孔部9(波線で表現)が設けられ、ここに真空ポンプからのホースが接続され、真空ポンプを駆動させて真空引きすることによって機密性を備えたチャンバは真空度が1Pa以下の高真空チャンバとなる。   A part of the bottom plate 2 is provided with a hole 9 (represented by a wavy line) for connection to a vacuum pump (not shown) provided outside, to which a hose from the vacuum pump is connected, A chamber having confidentiality by being driven and evacuated becomes a high vacuum chamber having a vacuum degree of 1 Pa or less.

さらにチャンバ8内には乾燥工程の短縮と、より高真空封止による高断熱性達成と、品質保持のために熱乾燥および真空乾燥用の加熱ヒータ(図示せず)が備えられており、高真空を保ったままチャンバ内を200℃まで加熱することができる。このヒータは底版2内に埋め込まれ絶縁シーズヒータ、チャンバ蓋1の内面壁に取り付けられたフィルム状ヒータなど、種々の形態をとることができる。この加熱により水分の沸点に達しない温度域では熱乾燥が、沸点に達すると真空乾燥が真空引きと平行して行われる。   Furthermore, a heater (not shown) for heat drying and vacuum drying is provided in the chamber 8 for shortening the drying process, achieving high heat insulation by higher vacuum sealing, and maintaining quality. The inside of the chamber can be heated to 200 ° C. while maintaining a vacuum. This heater can take various forms such as an insulating sheathed heater embedded in the bottom plate 2 and a film heater attached to the inner wall of the chamber lid 1. Thermal drying is performed in a temperature range where the boiling point of moisture is not reached by this heating, and vacuum drying is performed in parallel with evacuation when the boiling point is reached.

なお、被封止物への悪影響がない限り、加熱温度は高いほど乾燥効率も良好である。   As long as there is no adverse effect on the object to be sealed, the higher the heating temperature, the better the drying efficiency.

一方、チャンバ蓋1にはチャンバ8内に配置される外被材の溶接位置に対応した位置に透過窓6が開けられ、この位置に対応してレーザー光透過ガラス5がチャンバ蓋1の内側に設けられている。図1の実施例の場合、長い断熱材等の外被材をシーム溶接できるよう、真空レーザー溶接封止機の一辺に直線状に形成される。   On the other hand, a transmission window 6 is opened in the chamber lid 1 at a position corresponding to the welding position of the jacket material arranged in the chamber 8, and the laser light transmission glass 5 is placed inside the chamber lid 1 corresponding to this position. Is provided. In the case of the embodiment of FIG. 1, it is formed linearly on one side of a vacuum laser welding sealing machine so that a jacket material such as a long heat insulating material can be seam welded.

この透過窓は、溶接対象物に応じて複数箇所に設けることができる。   This transmission window can be provided at a plurality of locations depending on the object to be welded.

チャンバ8の外に備えられたレーザー溶接器で発せられたレーザー光は透過窓6に対して垂直に照射されるが、透過窓に沿って移動させるため、図2および図3に示されるように、チャンバ蓋1上には透過窓に平行なレール31に係合して水平方向に摺動する移動部材32より成るロボット機構30が設けられ、移動部材32に取り付けられたレーザー照射ヘッド33を移動させるようにしている。   Laser light emitted from a laser welder provided outside the chamber 8 is irradiated perpendicularly to the transmission window 6, but is moved along the transmission window as shown in FIGS. 2 and 3. On the chamber lid 1, a robot mechanism 30 comprising a moving member 32 that slides in the horizontal direction by engaging with a rail 31 parallel to the transmission window is provided, and a laser irradiation head 33 attached to the moving member 32 is moved. I try to let them.

次に、溶接対象物を取り扱う機構につき、図2と図5を参照して説明する。   Next, a mechanism for handling an object to be welded will be described with reference to FIGS.

チャンバ8の内部には定盤4とシール台3と押さえ治具16が備えられている。   Inside the chamber 8, a surface plate 4, a sealing table 3, and a pressing jig 16 are provided.

一方、チャンバ8の外のチャンバ蓋1の上面には、照射窓の中央の両側にエアーシリンダ11がチャンバ蓋1に対して垂直な方向をなすように設けられ、このエアーシリンダ11のそれぞれには連結バー13が取り付けられている。この連結バー13はシリンダ取り付け部を中心として対称的な長さを有しており、その両端部にはスライドシャフト14がエアーシリンダ11のシリンダロッドと平行に、すなわちチャンバ蓋1の上面に対して垂直に配置されている。これらのスライドシャフト14はチャンバ蓋1を貫通してチャンバ蓋1に取り付けられたリニア軸受12によってそれぞれガイドされている。このリニア軸受け12のチャンバ蓋1上の径が大きい部分12aはフランジであり、チャンバ蓋上でリニア軸受け12を安定的に取り付けるためのものである。   On the other hand, on the upper surface of the chamber lid 1 outside the chamber 8, air cylinders 11 are provided on both sides of the center of the irradiation window so as to be perpendicular to the chamber lid 1. A connecting bar 13 is attached. The connecting bar 13 has a symmetrical length with respect to the cylinder mounting portion, and slide shafts 14 are parallel to the cylinder rod of the air cylinder 11 at both ends, that is, with respect to the upper surface of the chamber lid 1. It is arranged vertically. These slide shafts 14 are respectively guided by linear bearings 12 that pass through the chamber lid 1 and are attached to the chamber lid 1. A portion 12a having a large diameter on the chamber lid 1 of the linear bearing 12 is a flange for stably mounting the linear bearing 12 on the chamber lid.

チャンバ蓋1を貫通した、チャンバ8内のスライドシャフト14の先端にはブラケット15が取り付けられている。ブラケット15にはこれとほぼ直角をなして押さえ治具16が固着され、両者の固着部は、透過窓の方向に垂直な方向に設けられた軸17により、両者一体としてこの軸17の回りを回動する。   A bracket 15 is attached to the tip of the slide shaft 14 in the chamber 8 that penetrates the chamber lid 1. A holding jig 16 is fixed to the bracket 15 at a substantially right angle to the bracket 15, and the fixing portion of both is fixed around the shaft 17 by a shaft 17 provided in a direction perpendicular to the direction of the transmission window. Rotate.

次にこの真空レーザー溶接封止機の動作について図2を参照して説明する。   Next, the operation of this vacuum laser welding sealing machine will be described with reference to FIG.

まず、封止対象物の支持体としての定盤4上に外被材20が載置され、その上に被封止物21が載置される。さらにその上にもう1枚の外被材20が重ねて載置される。ここで封止対象物が例えば真空断熱材の場合、外被材20としてはステンレス材のSUS304の厚さ50μ〜80μの箔が代表的なものではあるが、他の耐環境性の良好な種々の材料を使用することができる。   First, the jacket material 20 is placed on the surface plate 4 as a support for the object to be sealed, and the article 21 to be sealed is placed thereon. Further, another outer covering material 20 is placed thereon. Here, when the object to be sealed is, for example, a vacuum heat insulating material, a stainless steel material SUS304 having a thickness of 50 μ to 80 μm is representative as the jacket material 20, but other various environmentally-resistant materials are also available. The material can be used.

外被材に金属箔、特にステンレス鋼SUS304を使用することで厚さ50μの素材を溶接面最小1mmのピンポイントで溶接することができるようになり、酸素透過率0%を長期間保つことができる。   By using a metal foil, especially stainless steel SUS304, as the jacket material, it becomes possible to weld a material with a thickness of 50 μm with a pinpoint of a minimum of 1 mm on the welding surface, and to keep oxygen transmission rate 0% for a long time. it can.

また、被封止物21は真空断熱材の場合、グラスファイバやセラミック粉末等多孔質のものが好適である。   In addition, in the case of a vacuum heat insulating material, the object to be sealed 21 is preferably a porous material such as glass fiber or ceramic powder.

真空断熱材の製造には、被封止物と外被材がともに十分に乾燥していることが必要であるので、チャンバ蓋1を閉じて真空引きを行って真空度1Pa以下とし、同時にヒータにより、200℃の加熱を行う。これにより、チャンバ8内部では高い真空度での真空乾燥と高温乾燥が同時に行われるため、短時間で乾燥工程が終了する。   In order to manufacture the vacuum heat insulating material, it is necessary that both the object to be sealed and the outer covering material are sufficiently dried. Therefore, the chamber lid 1 is closed and evacuation is performed so that the degree of vacuum is 1 Pa or less. Thus, heating at 200 ° C. is performed. Thereby, since the vacuum drying at a high vacuum degree and the high temperature drying are simultaneously performed in the chamber 8, the drying process is completed in a short time.

乾燥と真空引き工程が終了するとシール台3に載せている外被材20を押さえ治具16によって固定し、レーザー溶接機からレーザー透過ガラスを介して溶接箇所にレーザーを導き、シール台3に設置された外被材20に照射され溶接が行われる。   When the drying and evacuation processes are completed, the jacket material 20 placed on the sealing table 3 is fixed by the holding jig 16, the laser is guided from the laser welding machine to the welding location through the laser transmitting glass, and installed on the sealing table 3. The outer covering material 20 is irradiated and welded.

押さえ治具16の動作をシール台3と外被材押さえ部の詳細図である図6を参照して説明する。   The operation of the holding jig 16 will be described with reference to FIG. 6 which is a detailed view of the sealing table 3 and the jacket material pressing portion.

外被材押さえ機構の動作は、エアーシリンダ11のシリンダロッドが収縮することにより、取り付けられた連結バー13、スライドシャフト14、ブラケット15が下降する。押さえ治具16は軸17により吊り下げられた状態であり軸17を中心に自由に回動することができる。   In the operation of the jacket material pressing mechanism, when the cylinder rod of the air cylinder 11 contracts, the attached connecting bar 13, slide shaft 14, and bracket 15 are lowered. The holding jig 16 is suspended by a shaft 17 and can freely rotate about the shaft 17.

押さえ治具16は外被材押さえ面(下面)の溶接位置の反対方向である後端部に突起16aが設けられている。押さえ治具16が下降すると、破線で示されるように、シール台3上の外被材を押さえ治具16後端部の突起16aで押さえた状態になる。このとき先端部16bは浮いており外被材20を押さえていない。さらにブラケット15が下降すると、軸17は左右に移動できないため、押さえ治具16は軸17を軸に回動し、実線で示すように、後端部16aは後方に移動し、先端部16bは外被材20を押さえることができる。   The holding jig 16 is provided with a protrusion 16a at the rear end portion which is the direction opposite to the welding position of the jacket material holding surface (lower surface). When the pressing jig 16 is lowered, the outer cover material on the seal table 3 is pressed by the protrusion 16a at the rear end portion of the pressing jig 16 as indicated by a broken line. At this time, the tip end portion 16b is floating and does not hold the jacket material 20. When the bracket 15 is further lowered, the shaft 17 cannot move to the left and right. Therefore, the holding jig 16 rotates about the shaft 17, and as shown by a solid line, the rear end portion 16 a moves rearward, and the front end portion 16 b The jacket material 20 can be held down.

このように、押さえ治具16は後端部で外被材20を押さえたまま後方に移動することによって、外被材20は溶接位置から外側の方向に引っ張られ、しわやたるみを無くすことができると同時に、押さえ治具の先端で確実に押さえることができ、2枚の外被材20を密着させることができる。   As described above, the holding jig 16 moves rearward while holding the jacket material 20 at the rear end portion, so that the jacket material 20 is pulled outward from the welding position, and wrinkles and sagging can be eliminated. At the same time, it can be reliably pressed by the tip of the pressing jig, and the two outer jacket materials 20 can be brought into close contact with each other.

この真空レーザー溶接封止機を用いることにより、外被材にSUS304を使用することで厚さ50μの素材を溶接面最小1mmのピンポイントで溶接することができる。   By using this vacuum laser welding sealing machine, it is possible to weld a material having a thickness of 50 μm with a pinpoint of a minimum welding surface of 1 mm by using SUS304 as a jacket material.

そして、真空断熱材の外被材に金属箔を使用し金属箔を直接レーザー溶接して封止することにより、酸素透過率0%を永年保つことができる。   Then, by using a metal foil as the jacket material of the vacuum heat insulating material and sealing the metal foil by direct laser welding, the oxygen transmission rate of 0% can be maintained for many years.

以上の実施例では、外被材の片側だけを封止しているが、通常は反対側も封止が必要であるので、一旦チャンバ蓋をあけ、反対側の溶接位置をセットして同様の方法を行うことにより封じが行われる。なお、全周にわたって封止を行うときはさらに同じ工程を2回繰り返せばよい。   In the above embodiment, only one side of the jacket material is sealed, but normally the opposite side also needs to be sealed, so the chamber lid is once opened and the welding position on the opposite side is set and the same Sealing is performed by performing the method. In addition, what is necessary is just to repeat the same process twice further when sealing over the perimeter.

なお、2枚の金属箔の間に封止対象物を置く代わりに1枚の大きな金属箔で包むようにしたり、予め2枚の金属箔の3辺を溶接して袋状に形成したものの中に封止対象物を入れて残りの1辺を本発明にかかる真空レーザー溶接封止機により溶接を行って封止するようにすることもできる。
以上の実施例では、押さえ治具を動作させる駆動手段としてエアーシリンダ11を用いているが、エアーシリンダに限られることなく、油圧を用いたもの、電磁アクチュエータ等往復動作するものであればどのようなものでも使用可能である。
It should be noted that instead of placing the object to be sealed between two metal foils, it is wrapped in one large metal foil, or is formed in a bag shape by welding three sides of two metal foils in advance. An object to be sealed can be put in and the remaining one side can be sealed by welding with a vacuum laser welding sealing machine according to the present invention.
In the above embodiment, the air cylinder 11 is used as the driving means for operating the holding jig. However, the present invention is not limited to the air cylinder, and any type that reciprocates such as a hydraulic device or an electromagnetic actuator can be used. Anything can be used.

また、押さえ機構としては実施例に示した機構だけでなく、外被材の押さえつけと外方への引っ張りを同時にできるようなものであれば、どのような構成のものでも良く、例えば本実施例のような1つのブラケットが両方の機能を持つようなものの他、押さえつけ部材と引っ張り部材を別の部材とすることもできる。   Further, the pressing mechanism is not limited to the mechanism shown in the embodiment, and may be of any configuration as long as it can simultaneously press the outer cover material and pull outwards. For example, this embodiment In addition to the one bracket having both functions, the pressing member and the pulling member may be separate members.

1 チャンバ蓋
2 下ケース
3 シール台
4 定盤
5 透過ガラス
6 透過窓
7 Oリング
8 チャンバ
9 孔部
10 本体部
11 エアーシリンダ
12 スライド軸受
12a フランジ
13 連結バー
14 スライドシャフト
15 ブラケット
16 押さえ治具
17 軸
20 外被材
21 被封止物
30 ロボット
31 レール
32 移動部材
33 レーザー照射ヘッド
DESCRIPTION OF SYMBOLS 1 Chamber lid 2 Lower case 3 Seal stand 4 Surface plate 5 Transmission glass 6 Transmission window 7 O-ring 8 Chamber 9 Hole 10 Main body 11 Air cylinder 12 Slide bearing 12a Flange 13 Connection bar 14 Slide shaft 15 Bracket 16 Holding jig 17 Shaft 20 Cover material 21 Sealed object 30 Robot 31 Rail 32 Moving member 33 Laser irradiation head

Claims (4)

チャンバ下部と、このチャンバ下部と係合して密閉空間を形成し、かつ開閉可能で、光透過窓を備えたチャンバ蓋と、前記空間内には、被封止物を金属外被材で包まれた状態で載置する支持体と、前記金属外被材どうしを密着させる押さえ機構とを有する本体部と、
前記本体部の外部に設けられ、前記空間内の排気を行って真空にする真空化装置と、
前記本体部の外部に設けられ、前記光透過窓を介してレーザーを前記密着された金属外被材に照射することにより前記金属外被材を溶接して封止するレーザー溶接機構と、
を備えた真空レーザー溶接封止機。
A chamber lower part, a chamber lid that engages with the chamber lower part to form a sealed space, can be opened and closed, and has a light transmission window; A main body having a support placed in a rare state, and a pressing mechanism for bringing the metal jacket materials into close contact with each other;
A vacuuming device that is provided outside the main body and evacuates the space to create a vacuum;
A laser welding mechanism that is provided outside the main body, and welds and seals the metal jacket material by irradiating the metal jacket material with the laser through the light transmission window; and
Vacuum laser welding sealing machine equipped with.
前記押さえ機構は、押さえと同時に前記金属外被材を密着させるように押さえ部材が溶接位置を中心に前記金属外被材を両側に伸ばすようにスライドする機構であることを特徴とする、請求項1に記載の真空レーザー溶接封止機。   The presser mechanism is a mechanism in which a presser member slides so as to extend the metal jacket material to both sides around a welding position so that the metal jacket material is brought into close contact with the presser at the same time. The vacuum laser welding sealing machine according to 1. 前記押さえ機構は、前記光透過窓の中心線に対して両側に2組設けられたことを特徴とする請求項2に記載の真空レーザー溶接封止機。   The vacuum laser welding sealing machine according to claim 2, wherein two sets of the pressing mechanisms are provided on both sides with respect to the center line of the light transmission window. 前記レーザー溶接機構は、前記光透過窓に沿ってレーザー照射ヘッドを平行移動させる移動機構を備えたことを特徴とする、請求項1ないし3のいずれかに記載の真空レーザー溶接封止機。   The vacuum laser welding sealing machine according to any one of claims 1 to 3, wherein the laser welding mechanism includes a moving mechanism that translates a laser irradiation head along the light transmission window.
JP2010246638A 2010-11-02 2010-11-02 Sealing machine of vacuum laser welding Withdrawn JP2012096269A (en)

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Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105149778A (en) * 2015-07-30 2015-12-16 江苏大学 Device and method for eliminating aluminum-steel dissimilar metal laser welding cracks and gas holes
WO2020066178A1 (en) * 2018-09-28 2020-04-02 日鉄日新製鋼株式会社 Method for welding stainless steel foils, and welded structure
JP2020166987A (en) * 2019-03-28 2020-10-08 日鉄日新製鋼株式会社 Welding method for battery sheath material
CN115255732A (en) * 2022-08-03 2022-11-01 山东美生热能科技有限公司 Novel vacuum sealing device for heat insulation oil sleeve
CN117415406A (en) * 2023-12-05 2024-01-19 山东联创高科自动化有限公司 Laser welding protection assembly and welding method
CN117415406B (en) * 2023-12-05 2024-04-19 山东联创高科自动化有限公司 Laser welding protection assembly and welding method

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN105149778A (en) * 2015-07-30 2015-12-16 江苏大学 Device and method for eliminating aluminum-steel dissimilar metal laser welding cracks and gas holes
WO2020066178A1 (en) * 2018-09-28 2020-04-02 日鉄日新製鋼株式会社 Method for welding stainless steel foils, and welded structure
JP2020055010A (en) * 2018-09-28 2020-04-09 日鉄日新製鋼株式会社 Method of welding stainless steel foil, and weld structure
JP2020166987A (en) * 2019-03-28 2020-10-08 日鉄日新製鋼株式会社 Welding method for battery sheath material
CN115255732A (en) * 2022-08-03 2022-11-01 山东美生热能科技有限公司 Novel vacuum sealing device for heat insulation oil sleeve
CN115255732B (en) * 2022-08-03 2023-06-02 山东美生热能科技有限公司 Novel vacuum sealing device for heat-insulating oil sleeve
CN117415406A (en) * 2023-12-05 2024-01-19 山东联创高科自动化有限公司 Laser welding protection assembly and welding method
CN117415406B (en) * 2023-12-05 2024-04-19 山东联创高科自动化有限公司 Laser welding protection assembly and welding method

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