JP2012085110A - Surface acoustic wave device and support device of surface acoustic wave device - Google Patents
Surface acoustic wave device and support device of surface acoustic wave device Download PDFInfo
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本発明は、入力された電気信号を弾性表面波に変換し、この弾性表面波の圧電基板上における伝搬特性に基づく処理が施された後に電気信号に再び変換する弾性表面波デバイスと、その弾性表面波デバイスの動作を支援する弾性表面波デバイス支援装置とに関する。 The present invention relates to a surface acoustic wave device that converts an input electrical signal into a surface acoustic wave, converts the surface acoustic wave back into an electrical signal after processing based on propagation characteristics of the surface acoustic wave on a piezoelectric substrate, and the elasticity of the surface acoustic wave device. The present invention relates to a surface acoustic wave device support apparatus that supports the operation of a surface wave device.
弾性表面波センサ等の弾性表面波デバイスは、以下の好ましい特徴を有するために、これらの特徴を活かすことによる小型化、軽量化、無調整化が容易なデバイスとして多様なものが開発されつつある。 Since surface acoustic wave devices such as surface acoustic wave sensors have the following desirable characteristics, various devices are being developed that can be easily reduced in size, reduced in weight, and made non-adjustable by utilizing these characteristics. .
(1) 入力された電気信号が内部で変換されることによって得られる弾性表面波の波長が電磁波の波長の百万分の一程度と大幅に短い。
(2) 弾性表面波の伝搬路となる圧電基板上と、その圧電基板上に微細に形成可能な膜やパターンとして形成された電極等とから構成される。
(3) 圧電基板の表面の研磨は、弾性表面波の伝搬路が形成される片面だけで十分である。
(1) The wavelength of the surface acoustic wave obtained by internally converting the input electrical signal is significantly short, about one millionth of the wavelength of the electromagnetic wave.
(2) It is composed of a piezoelectric substrate serving as a surface acoustic wave propagation path, and a film, a pattern, and the like that can be finely formed on the piezoelectric substrate.
(3) For polishing the surface of the piezoelectric substrate, only one surface on which the propagation path of the surface acoustic wave is formed is sufficient.
(4) 弾性表面波の主要なエネルギーが圧電基板の表面に集中して伝搬するために、このような表面に形成された電極、あるいはその表面に接触する媒質との音響的な結合が密に、あるいは自在に達成される。
(5) 上記結合の下で弾性表面波に施される処理、あるいは生じる変化は、線形領域だけではなく非線形領域でも、安定に精度よく実現可能である。
(4) Since the main energy of the surface acoustic wave is concentrated and propagates on the surface of the piezoelectric substrate, the acoustic coupling between the electrode formed on such a surface or the medium in contact with the surface is tight. Or achieved at will.
(5) The process applied to the surface acoustic wave under the above-described coupling or the change that occurs can be realized stably and accurately not only in the linear region but also in the nonlinear region.
従来の弾性表面波センサとしては、例えば、後述する特許文献１に開示されるように以下の通りに構成された弾性表面波装置がある。
(1) 伝搬特性が同じである２つの伝搬路が圧電基板上に形成される。
As a conventional surface acoustic wave sensor, for example, there is a surface acoustic wave device configured as follows as disclosed in Patent Document 1 described later.
(1) Two propagation paths having the same propagation characteristics are formed on the piezoelectric substrate.
(2) これらの伝搬路の一方では、その伝搬路上に配置された遮断手段（該当する伝搬路上に塗布された樹脂、あるいは形成された溝）によって弾性表面波の伝搬が阻止されることによって、他方の伝搬路で生じるバルク波が予測される。
(3) 上記他方の伝搬路を伝搬した弾性波（弾性表面波およびバルク波を含む。）から上記予測されたバルク波が減じられることにより、バルク波の成分の抑圧が図られる。
(2) On one of these propagation paths, the propagation of the surface acoustic wave is blocked by the blocking means (resin applied on the propagation path or the groove formed) on the propagation path, A bulk wave generated in the other propagation path is predicted.
(3) The predicted bulk wave is subtracted from the elastic wave (including the surface acoustic wave and bulk wave) propagated through the other propagation path, thereby suppressing the bulk wave component.
このような構成の弾性表面波センサでは、バルク波に起因する精度や性能の低下が軽減される。 In the surface acoustic wave sensor having such a configuration, deterioration in accuracy and performance due to bulk waves is reduced.
なお、本発明に関連する先行技術としては、既述の特許文献１の他に後述する特許文献２がある。以下、これらの先行技術の概要を列記する。 In addition, as a prior art relevant to this invention, there exists patent document 2 mentioned later other than patent document 1 already stated. The outline of these prior arts is listed below.
(1) 「圧電性基板上に、弾性表面波を励振する入力電極と、該入力電極からの弾性表面波を電気信号に変換して出力する出力電極とを形成し、所望の周波数特性を得るために電極指交差幅に重み付けした弾性表面波装置において、前記入力電極は、前記弾性表面波の伝搬方向とほぼ直交する方向に互いに対向して配置され、且つ各々から弾性表面波と共に励振される前記圧電性基板の表面に対して平行に進行するバルク波を互いに逆相とするように構成された第１及び第２の入力電極を含み、該第１及び第２の入力電極の各々から前記出力電極へ伝搬する弾性表面波のいずれか一方を遮断する遮断手段を設けた」ことにより、「基板の特性によらず、主として圧電性基板に平行に進行する不要バルク波を抑圧して帯域外抑圧度を改善する」点に特徴がある弾性表面波装置…特許文献１ (1) “On the piezoelectric substrate, an input electrode for exciting a surface acoustic wave and an output electrode for converting the surface acoustic wave from the input electrode into an electric signal and outputting it are obtained to obtain a desired frequency characteristic. Therefore, in the surface acoustic wave device weighted to the electrode finger crossing width, the input electrodes are arranged to face each other in a direction substantially orthogonal to the propagation direction of the surface acoustic wave, and are excited together with the surface acoustic wave from each. First and second input electrodes configured so that bulk waves traveling parallel to the surface of the piezoelectric substrate are in opposite phases to each other, and from each of the first and second input electrodes By providing a blocking means to block any one of the surface acoustic waves propagating to the output electrode ”,“ outside of the band by suppressing unwanted bulk waves that travel mainly parallel to the piezoelectric substrate, regardless of the substrate characteristics. To improve the degree of suppression Characteristic surface acoustic wave device ... Patent Document 1
(2) 「弾性表面波素子の基板裏面を所定の条件を満たす角度に傾斜させる」ことにより、「この裏面で反射され基板表面に形成された出力電極または弾性表面波導波路の異なる位置に入射するバルク波による信号を相殺させ、高いＳＮ比で出力信号を取り出せるようにする」点に特徴がある…特許文献２ (2) By “inclining the back surface of the surface acoustic wave element to an angle satisfying a predetermined condition”, “incident at different positions of the output electrode or the surface acoustic wave waveguide reflected on the back surface and formed on the substrate surface It is characterized in that the signal due to the bulk wave is canceled and the output signal can be extracted with a high SN ratio.
ところで、上述した従来の弾性表面波センサでは、弾性表面波の伝搬の阻止や抑圧は、その弾性表面波の伝搬路に塗布された樹脂、あるいは形成された溝によって実現されていた。 By the way, in the conventional surface acoustic wave sensor described above, the propagation and suppression of the surface acoustic wave are realized by a resin applied to the propagation path of the surface acoustic wave or a groove formed.
また、このような樹脂の塗布や溝の形成は、弾性基板の表面に対する電極の形成とは別の工程として実現されるため、コスト高でとなるだけではなく、弾性表面波の伝搬を阻止する特性にバラツキが生じる要因となる可能性が高かった。 In addition, since the application of the resin and the formation of the groove are realized as a process different from the formation of the electrode on the surface of the elastic substrate, not only the cost is increased but also the propagation of the surface acoustic wave is prevented. There was a high possibility that this would cause variations in characteristics.
しかし、上記特性のバラツキについては、弾性表面波センサに対して要求される感度や性能のさらなる向上を妨げる要因となるために、解消や大幅な軽減を実現できる技術が強く要望されつつある。 However, since the variation in the above characteristics is a factor that hinders further improvement in sensitivity and performance required for the surface acoustic wave sensor, there is a strong demand for a technique that can be eliminated or greatly reduced.
本発明は、コストが大幅に増加することなく、性能が向上し、かつ特性のバラツキが安定に回避される弾性表面波デバイスおよび弾性表面波デバイス支援装置を提供することを目的とする。 SUMMARY OF THE INVENTION An object of the present invention is to provide a surface acoustic wave device and a surface acoustic wave device support apparatus that can improve performance and stably avoid variations in characteristics without significantly increasing costs.
請求項１に記載の発明では、圧電基板上に形成され、かつ電気信号を弾性波に変換する送波電極と、前記圧電基板を介して到来した弾性波を電気信号に変換する受波電極とを有する弾性表面波デバイスにおいて、伝搬速度調整体における弾性表面波の伝搬速度は、前記送波電極と前記受波電極とで挟まれた前記圧電基板上の領域に塗設あるいは形成され、前記受波電極に到来する弾性波の内、弾性表面波とバルク波との主要な成分が分布する期間の時間軸上における重なりが回避され、あるいは許容される程度に低い。 According to the first aspect of the present invention, a transmitting electrode that is formed on the piezoelectric substrate and converts an electric signal into an elastic wave, and a receiving electrode that converts the elastic wave that has arrived through the piezoelectric substrate into an electric signal; The surface acoustic wave propagation velocity in the propagation velocity adjusting body is coated or formed in a region on the piezoelectric substrate sandwiched between the transmission electrode and the reception electrode, and In the elastic wave arriving at the wave electrode, overlapping on the time axis during the period in which the main components of the surface acoustic wave and the bulk wave are distributed is avoided or allowed to be low.
すなわち、送波電極から圧電基板を介して伝搬する弾性波の内、弾性表面波とバルク波との主要な成分は、異なる期間に受波電極に到来する。 That is, main components of the surface acoustic wave and the bulk wave among the elastic waves propagating from the transmitting electrode through the piezoelectric substrate arrive at the receiving electrode in different periods.
請求項２に記載の発明では、請求項１に記載の弾性表面波デバイスにおいて、選択手段は、前記送波電極を励振した電気信号に同期して前記弾性表面波の主要な成分が前記受波電極に到来する期間のみに前記受波電極の出力を抽出する。 According to a second aspect of the present invention, in the surface acoustic wave device according to the first aspect, the selection means is configured so that a main component of the surface acoustic wave is the received wave in synchronization with an electrical signal that excites the transmitting electrode. The output of the receiving electrode is extracted only during the period of arrival at the electrode.
すなわち、弾性表面波とバルク波との伝搬速度の格差に基づくその弾性表面波の成分の抽出は、本発明に係る弾性表面波デバイスに内蔵された選択手段によって実現され、しかも、このような弾性表面波の成分が抽出されるべき期間は、本発明に係る弾性表面波デバイスの内部と外部との何れかに備えられた装置による指定が可能となる。 That is, the extraction of the surface acoustic wave component based on the difference in propagation speed between the surface acoustic wave and the bulk wave is realized by the selection means built in the surface acoustic wave device according to the present invention, and such an elastic wave The period during which the surface wave component is to be extracted can be specified by a device provided either inside or outside the surface acoustic wave device according to the present invention.
請求項３に記載の発明では、請求項４に記載の弾性表面波デバイスにおいて、前記選択手段は、前記弾性表面波の主要な成分が前記受波電極に到来する期間を外部から与えられる指示に基づいて識別する。 According to a third aspect of the invention, in the surface acoustic wave device according to the fourth aspect of the invention, the selecting means is configured to give an instruction given from the outside during which a main component of the surface acoustic wave arrives at the receiving electrode. Identify based on.
すなわち、受波電極に到来した弾性表面波の成分の内、所望の成分が分布する期間の多様な設定が柔軟に可能となる。 That is, various settings of the period during which a desired component is distributed among the components of the surface acoustic wave that has arrived at the receiving electrode can be flexibly made.
請求項４に記載の発明では、期間特定手段は、弾性表面波デバイスを励振した電気信号に同期して、前記弾性表面波デバイスの出力側の電極に弾性表面波の主要な成分が到来する期間を特定する。選択手段は、前記期間特定手段によって特定された期間のみに、前記弾性表面波デバイスの出力を抽出する。 In the invention according to claim 4, the period specifying means is a period in which the main component of the surface acoustic wave arrives at the output-side electrode of the surface acoustic wave device in synchronization with the electrical signal that has excited the surface acoustic wave device. Is identified. The selecting means extracts the output of the surface acoustic wave device only during the period specified by the period specifying means.
すなわち、弾性表面波とバルク波との伝搬速度の格差に基づくその弾性表面波の成分抽出は、本発明に係る弾性表面波デバイスに内蔵された期間特定手段および選択手段によって実現される。しかも、これらの期間特定手段は、これらに備えられるべき機能が既述の期間の特定とその期間におけるサンプリングとであるため、一般に、ハードウェアの総合的な規模の増加が極めて小さく抑えられる。 That is, the component extraction of the surface acoustic wave based on the difference in propagation speed between the surface acoustic wave and the bulk wave is realized by the period specifying means and the selection means built in the surface acoustic wave device according to the present invention. In addition, since the functions to be provided in these period specifying means are the above-described period specifying and sampling in the period, generally, the increase in the overall scale of hardware can be suppressed to be extremely small.
請求項５に記載の発明では、期間特定手段は、弾性表面波デバイスを励振した電気信号に同期して、前記弾性表面波デバイスの出力側の電極に弾性表面波の主要な成分が到来する期間を特定する。制御手段は、前記期間特定手段によって特定された期間を前記弾性表面波デバイスに指示する。 In the invention according to claim 5, the period specifying means is a period in which the main component of the surface acoustic wave arrives at the output-side electrode of the surface acoustic wave device in synchronization with the electrical signal that has excited the surface acoustic wave device. Is identified. The control unit instructs the surface acoustic wave device to specify the period specified by the period specifying unit.
このようにして弾性表面波デバイスに指示される期間は、その弾性表面波デバイスとは別体に備えられ、かつ本発明に係る弾性表面波デバイス支援装置によって特定される。 The period instructed to the surface acoustic wave device in this way is provided separately from the surface acoustic wave device and is specified by the surface acoustic wave device support apparatus according to the present invention.
本発明によれば、受波電極によって電気信号に変換される弾性表面波のＳＮ比が向上する。
また、本発明に係る弾性表面波デバイスが搭載されたシステムや装置は、構成、機能、性能および仕様の何れに対しても柔軟な適応が可能となる。
According to the present invention, the SN ratio of the surface acoustic wave that is converted into an electrical signal by the receiving electrode is improved.
In addition, the system and apparatus on which the surface acoustic wave device according to the present invention is mounted can be flexibly adapted to any configuration, function, performance, and specifications.
さらに、本発明に係る弾性表面波デバイスは、所望のシステムや装置の機能、性能および仕様に対する柔軟な適応が可能となる。 Furthermore, the surface acoustic wave device according to the present invention can be flexibly adapted to the functions, performances and specifications of a desired system or apparatus.
また、本発明に係る弾性表面波デバイスは、実装面における制約が大幅に増加することなく、安価に性能や機能が向上する。 In addition, the surface acoustic wave device according to the present invention can be improved in performance and function at a low cost without greatly increasing restrictions on the mounting surface.
さらに、本発明は、弾性表面波の主要な成分が受波電極に到来する期間の特定および指示の柔軟性が高められ、かつ適用可能なシステムや装置の容易な拡大が可能となる。 Furthermore, according to the present invention, the flexibility of specifying and indicating the period during which the main component of the surface acoustic wave arrives at the receiving electrode is enhanced, and the applicable system and apparatus can be easily expanded.
したがって、本発明が適用されたシステムや装置は、価格性能比に併せて、総合的な信頼性が高められる。 Therefore, the overall reliability of the system and apparatus to which the present invention is applied is enhanced in accordance with the price / performance ratio.
以下、図面に基づいて本発明の実施形態について詳細に説明する。
図１は、本発明の一実施形態を示す図である。
Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings.
FIG. 1 is a diagram showing an embodiment of the present invention.
図において、圧電基板１１が有する矩形の片面の中央部には、その片面に相似な矩形の伝搬路１２が確保され、かつたんぱく質等の膜が形成される。このような伝搬路１２の特定の辺の近傍には、圧電基板１１上におけるパターンとして櫛形電極(IDT:interdigital
transducer)１３Ｓが形成され、その伝搬路１２の特定の辺に対向する他の辺の近傍には、櫛形電極１３Ｒが上記櫛形電極１３Ｓに正対する状態で形成される。なお、このような櫛形電極１３Ｒの構成は既述の櫛形電極１３Ｓの構成と同じである。
In the figure, a rectangular propagation path 12 similar to one side is secured at the center of one side of the piezoelectric substrate 11 and a film of protein or the like is formed. In the vicinity of a specific side of the propagation path 12, a comb-shaped electrode (IDT: interdigital) is formed as a pattern on the piezoelectric substrate 11.
transducer) 13S is formed, and in the vicinity of the other side facing the specific side of the propagation path 12, a comb-shaped electrode 13R is formed in a state of facing the comb-shaped electrode 13S. The configuration of the comb electrode 13R is the same as the configuration of the comb electrode 13S described above.
櫛形電極１３Ｓの一方の端子には信号源２０の出力が接続され、その櫛形電極１３Ｓの他方の端子および信号源２０の接地端子は接地される。 The output of the signal source 20 is connected to one terminal of the comb electrode 13S, and the other terminal of the comb electrode 13S and the ground terminal of the signal source 20 are grounded.
また、信号源２０の出力は分離回路２１の一方の入力にも接続され、その分離回路２１の他方の入力には、櫛形電極１３Ｒの一方の端子が接続される。櫛形電極１３Ｒの他方の端子と分離回路２１の接地端子とは、共に接地される。 The output of the signal source 20 is also connected to one input of the separation circuit 21, and one terminal of the comb electrode 13 </ b> R is connected to the other input of the separation circuit 21. The other terminal of the comb electrode 13R and the ground terminal of the separation circuit 21 are both grounded.
図２は、本実施形態の動作原理を示す図である。
以下、図１および図２を参照して本実施形態の動作を説明する。
FIG. 2 is a diagram illustrating the operation principle of the present embodiment.
The operation of this embodiment will be described below with reference to FIGS.
信号源２０は、例えば、上記伝搬路１２の中央部に該当する反応場に滴下され、あるいは接触する媒質について、計測されるべき項目に適した所定の周波数の交流信号を櫛形電極１３Ｓに与える。ここに、「媒質」とは、例えば、本実施形態に係る弾性表面波センサによって行われる計測や検査の対象として、反応場上に滴下され（滴下され得る）液体や溶液を意味する。 The signal source 20 applies, for example, an alternating current signal having a predetermined frequency suitable for an item to be measured to the comb-shaped electrode 13 </ b> S with respect to a medium dropped or contacted with a reaction field corresponding to the central portion of the propagation path 12. Here, the “medium” means, for example, a liquid or a solution that is dropped (can be dropped) on the reaction field as an object of measurement or inspection performed by the surface acoustic wave sensor according to the present embodiment.
櫛形電極１３Ｓは、このような交流信号によって励振され、図１に太い実線の矢印で示すように、伝搬路１２に弾性表面波を送出する。 The comb-shaped electrode 13S is excited by such an AC signal, and sends a surface acoustic wave to the propagation path 12 as indicated by a thick solid arrow in FIG.
この弾性表面波は、伝搬路１２上において既述の媒質が滴下されあるいは接触する反応場を伝搬して櫛形電極１３Ｒに到達し、その櫛形電極１３Ｒによって電気信号Ｅａに変換される。 This surface acoustic wave propagates through the reaction field where the above-mentioned medium is dropped or contacts on the propagation path 12 to reach the comb electrode 13R, and is converted into an electric signal Ea by the comb electrode 13R.
ところで、櫛形電極１３Ｓによって送出された弾性表面波のエネルギーの一部は、例えば、櫛形電極１３Ｓを形成する金属膜の部位と伝搬路１２との間における弾性波の伝搬速度の差（以下、「伝搬速度の格差」という。）が大きい場合には、図１に点線の矢印で示すように、圧電基板１１の表面ではなく内部を伝搬するバルク波に変換される。 By the way, a part of the energy of the surface acoustic wave transmitted by the comb-shaped electrode 13S is, for example, the difference in the propagation speed of the acoustic wave between the metal film portion forming the comb-shaped electrode 13S and the propagation path 12 (hereinafter referred to as “ In the case where the difference in propagation speed is large), it is converted into a bulk wave propagating not inside the surface of the piezoelectric substrate 11 but as indicated by a dotted arrow in FIG.
したがって、上記電気信号Ｅａには、一般に、図２(a) に示すように、伝搬路１２を介して受波電極１３Ｒに到来した弾性表面波とバルク波とのそれぞれの主要な成分が分布する期間の一部は、時間軸上で重なる。 Therefore, in the electric signal Ea, generally, as shown in FIG. 2A, main components of the surface acoustic wave and the bulk wave that arrive at the receiving electrode 13R via the propagation path 12 are distributed. Part of the period overlaps on the time axis.
しかし、本実施形態では、伝搬路１２上に形成されたたんぱく質等の膜の厚さｔは、例えば、２１００オングストロームと、一般的な厚みに比べて大幅に大きく設定される。 However, in the present embodiment, the thickness t of the film of protein or the like formed on the propagation path 12 is set to 2100 angstroms, for example, significantly larger than the general thickness.
したがって、分離回路２１に上記電気信号Ｅａに代えて入力される電気信号Ｅｂに弾性表面波の成分が含まれる期間は、図２(b) に記載するように、時間軸上でバルク波の成分より大幅に遅れた期間ＰＳＡＷ となる。しかも、このような電気信号Ｅｂにバルク波の主要な成分が含まれる期間ＰＢＷは、そのバルク波の伝搬経路が圧電基板１１の内部（内層）であるため、伝搬路１２の表面の伝搬速度に左右されない。 Therefore, during the period in which the surface acoustic wave component is included in the electrical signal Eb that is input to the separation circuit 21 instead of the electrical signal Ea, the bulk wave component on the time axis as shown in FIG. It becomes the period P SAW that is significantly delayed. Moreover, during the period P BW in which the main component of the bulk wave is included in the electrical signal Eb, the propagation path of the bulk wave is inside (inner layer) of the piezoelectric substrate 11, and thus the propagation speed of the surface of the propagation path 12 Is not affected by
一方、分離回路２１は、本実施形態に係る弾性表面波センサの構成の下で上記期間ＰＳＡＷ の特定に必要なパラメータが予め与えられる。 On the other hand, the separation circuit 21 is given in advance parameters necessary for specifying the period P SAW under the configuration of the surface acoustic wave sensor according to the present embodiment.
さらに、分離回路２１は、信号源２０によって送波電極１３Ｓに与えられる交流信号に同期して上記パラメータを適用することにより期間ＰＳＡＷ を識別し、受波電極１３Ｒによって与えられる電気信号Ｅｂをその期間ＰＳＡＷ にサンプリングすることにより、電気信号Ｅｓを出力する。 Further, the separation circuit 21 identifies the period P SAW by applying the above parameters in synchronization with the AC signal given to the transmitting electrode 13S by the signal source 20, and the electric signal Eb given by the receiving electrode 13R By sampling in the period P SAW , the electric signal Es is output.
したがって、このような電気信号Ｅｓには、図２(c) に示すように、時間軸上でバルク波の主要な成分が分布しない期間ＰＳＡＷ に抽出された弾性表面波の主要な成分が含まれる。 Therefore, as shown in FIG. 2 (c), such an electric signal Es includes the main component of the surface acoustic wave extracted in the period P SAW in which the main component of the bulk wave is not distributed on the time axis. It is.
このように本実施形態によれば、従来例に比べて構成が大幅に複雑化することなく、バルク波に起因する精度や性能の低下が回避され、かつ感度の向上および安定化が図られる。 As described above, according to the present embodiment, the accuracy and performance due to the bulk wave are prevented from being lowered and the sensitivity is improved and stabilized without greatly complicating the configuration as compared with the conventional example.
なお、本実施形態では、上記厚みｔについては、以下に列記する何れかの形態で設定されてもよい。 In the present embodiment, the thickness t may be set in any of the forms listed below.
(1) 伝搬路１２（反応場）上にある（存在し得る）媒質の種類、量、分布等に応じて変化し得る弾性表面波の伝搬速度の範囲が加味される。 (1) The range of the propagation speed of the surface acoustic wave that can change according to the type, amount, distribution, etc. of the medium (which may exist) on the propagation path 12 (reaction field) is taken into account.
(2) 伝搬路１２に塗設されたたんぱく質等の膜に関して、厚みｔだけではなく、その厚みｔに併せて（あるいは、厚みｔとは別に）、厚みｔの物理的な分布と、該当する膜の形状、寸法、材質との全てまたは一部が好適に設定される。 (2) Regarding the protein film coated on the propagation path 12, not only the thickness t but also the physical distribution of the thickness t corresponding to the thickness t (or separately from the thickness t) All or part of the shape, dimensions, and material of the film is suitably set.
また、本実施形態では、上記伝搬路１２（反応場）上にある（存在し得る）媒質の種類、量、分布等が一定とは限らない場合には、例えば、これらの種類、量、分布等を計測し、その計測の結果に適した期間ＰＳＡＷ を直接または間接的に特定する装置（以下、「期間特定装置」という。）が備えられ、分離回路２１がその期間特定装置の配下で作動してもよい。 In the present embodiment, when the type, amount, distribution, etc. of the medium (which may exist) on the propagation path 12 (reaction field) is not always constant, for example, these types, amount, distribution And a device (hereinafter referred to as “period specifying device”) that directly or indirectly specifies a period P SAW suitable for the measurement result, and the separation circuit 21 is under the control of the period specifying device. It may be activated.
なお、上記計測された種類、量、分布等に基づいて期間ＰＳＡＷ を特定する処理は、以下の何れの形態で行われてもよい。 Note that the process of specifying the period P SAW based on the measured type, amount, distribution, and the like may be performed in any of the following forms.
(1) 予め実測や模擬（定量的な評価を含む。）に基づいて求められたテーブルをルックアップする処理
(2) 上記計測された種類、量、分布等に基づく定量的な評価として適宜行われる処理
(1) Processing to look up a table obtained in advance based on actual measurement or simulation (including quantitative evaluation)
(2) Processing appropriately performed as a quantitative evaluation based on the measured type, amount, distribution, etc.
また、このような期間ＰＳＡＷ の特定には、例えば、反応場（伝搬路１２）に塗設されたたんぱく質等の形状、寸法、配置、材質が加味されることが望ましい。 In order to specify such a period P SAW , for example, it is desirable to consider the shape, size, arrangement, and material of the protein or the like applied to the reaction field (propagation path 12).
さらに、本実施形態では、分離回路２１は、圧電基板１１上に配置されてもよい。 Further, in the present embodiment, the separation circuit 21 may be disposed on the piezoelectric substrate 11.
また、本実施形態では、分離回路２１（既述の「期間特定装置」が含まれてもよい。）の全てまたは一部は、例えば、ＤＳＰ(Digital Signal
Processor)等の情報処理装置で代替されてもよい。
In the present embodiment, all or part of the separation circuit 21 (which may include the above-described “period specifying device”) is, for example, a DSP (Digital Signal).
An information processing apparatus such as a processor may be substituted.
さらに、本発明は、本実施形態のような弾性表面波センサに限定されず、例えば、弾性表面波フィルタ、弾性表面波発振器、弾性表面波共振器、弾性表面波導波路、弾性表面波遅延器、弾性表面波相関器等の多様な弾性表面波デバイスにも同様に適用可能である。 Further, the present invention is not limited to the surface acoustic wave sensor as in the present embodiment. For example, the surface acoustic wave filter, the surface acoustic wave oscillator, the surface acoustic wave resonator, the surface acoustic wave waveguide, the surface acoustic wave delay device, The present invention can be similarly applied to various surface acoustic wave devices such as a surface acoustic wave correlator.
また、本発明は、上述した実施形態に限定されず、本発明の範囲において多様な実施形態の構成が可能であり、構成要素の全てまたは一部に如何なる改良が施されてもよい。 Further, the present invention is not limited to the above-described embodiments, and various configurations of the embodiments are possible within the scope of the present invention, and any improvements may be made to all or some of the components.
以下、本願に開示された発明を整理し、「特許請求の範囲」および「課題を解決するための手段」の欄の記載に準じた様式により列記する。 Hereinafter, the inventions disclosed in the present application will be organized and listed in a format according to the descriptions in the “Claims” and “Means for Solving the Problems” columns.
［請求項６］ 請求項１に記載の弾性表面波デバイスにおいて、
前記弾性表面波の伝搬速度が低下する程度は、
前記領域にありまたは存在し得る媒質と、前記伝搬速度調整体とによる前記弾性表面波の総合的な伝搬特性が加味されて設定された
ことを特徴とする弾性表面波デバイス。
[Claim 6] In the surface acoustic wave device according to claim 1,
The degree to which the propagation speed of the surface acoustic wave decreases is
A surface acoustic wave device characterized in that the surface acoustic wave device is set in consideration of a comprehensive propagation characteristic of the surface acoustic wave by the medium that can exist or exist in the region and the propagation velocity adjusting body.
このような構成の弾性表面波デバイスでは、請求項１に記載の弾性表面波デバイスにおいて、前記弾性表面波の伝搬速度が低下する程度は、前記領域にありまたは存在し得る媒質と、前記伝搬速度調整体とによる前記弾性表面波の総合的な伝搬特性が加味されて設定される。 In the surface acoustic wave device having such a configuration, in the surface acoustic wave device according to claim 1, the degree to which the propagation speed of the surface acoustic wave decreases is a medium that can exist or exist in the region, and the propagation speed. It is set in consideration of the overall propagation characteristics of the surface acoustic wave by the adjusting body.
すなわち、弾性表面波の主要な成分とバルク波の主要な成分とがそれぞれ受波電極に到来する期間の相違は、本発明に係る弾性表面波デバイスの構成だけではなく、その弾性表面デバイスが適用される分野と、実際に稼働すべき環境との双方が加味されることにより適切に確保される。 That is, the difference in the period in which the main component of the surface acoustic wave and the main component of the bulk wave arrive at the receiving electrode is applied not only to the configuration of the surface acoustic wave device according to the present invention but also to the surface acoustic wave device. It is ensured appropriately by taking into account both the field to be operated and the environment in which it should actually operate.
したがって、本発明が適用されたシステムや装置は、性能および信頼性が確度高く安定に高められる。 Therefore, the system and apparatus to which the present invention is applied have high performance and reliability with high accuracy and stability.
［請求項７］ 請求項４または請求項５に記載の弾性表面波デバイス支援装置において、
前記期間特定手段は、
前記弾性表面波デバイスの入力側の電極と出力側の電極とで挟まれた圧電基板上の領域にありまたは存在し得る媒質の量、分布、特性の全てまたは一部を加味して、前記受波電極に弾性表面波の主要な成分が到来する期間を特定する
ことを特徴とする弾性表面波デバイス支援装置。
[Claim 7] In the surface acoustic wave device support apparatus according to claim 4 or 5,
The period specifying means includes
In consideration of all or part of the amount, distribution, and characteristics of the medium that may be or exist in the region on the piezoelectric substrate sandwiched between the input electrode and the output electrode of the surface acoustic wave device, the receiving is performed. A surface acoustic wave device support apparatus characterized by specifying a period during which a major component of surface acoustic wave arrives at a wave electrode.
このような構成の弾性表面波デバイス支援装置では、請求項５または請求項６に記載の弾性表面波デバイス支援装置において、前記期間特定手段は、前記弾性表面波デバイスの入力側の電極と出力側の電極とで挟まれた圧電基板上の領域にありまたは存在し得る媒質の量、分布、特性の全てまたは一部を加味して、前記受波電極に弾性表面波の主要な成分が到来する期間を特定する。 In the surface acoustic wave device support apparatus having such a configuration, in the surface acoustic wave device support apparatus according to claim 5 or 6, the period specifying means includes an input side electrode and an output side of the surface acoustic wave device. The main component of the surface acoustic wave arrives at the receiving electrode, taking into account all or part of the amount, distribution, and characteristics of the medium that may or may exist in the region on the piezoelectric substrate sandwiched between the electrodes. Specify the period.
すなわち、本発明に係る弾性表面波デバイス支援装置と連係する弾性表面波デバイスでは、弾性表面波の主要な成分とバルク波の主要な成分とがそれぞれ受波電極に到来する期間の相違は、本発明に係る弾性表面波デバイスの構成だけではなく、その弾性表面デバイスが適用される分野と、実際に稼働すべき環境との双方が加味されることにより適切に確保される。 That is, in the surface acoustic wave device linked to the surface acoustic wave device support apparatus according to the present invention, the difference in the period in which the main component of the surface acoustic wave and the main component of the bulk wave arrive at the receiving electrode is Not only the structure of the surface acoustic wave device according to the invention, but also the field to which the surface acoustic wave device is applied and the environment in which the device is actually operated are taken into consideration, thereby ensuring adequately.
したがって、本発明が適用されたシステムや装置は、性能および信頼性が柔軟に確度高く安定に高められる。 Therefore, the system and apparatus to which the present invention is applied can be improved in performance and reliability flexibly with high accuracy and stability.
１１ 圧電基板
１２ 伝搬路
１３Ｒ，１３Ｓ 櫛形電極
２０ 信号源
２１ 分離回路
11 Piezoelectric substrate 12 Propagation path 13R, 13S Comb electrode 20 Signal source 21 Separation circuit
Claims (5)
前記送波電極と前記受波電極とで挟まれた前記圧電基板上の領域に塗設あるいは形成され、前記受波電極に到来する弾性波の内、弾性表面波とバルク波との主要な成分が分布する期間の時間軸上における重なりが回避され、あるいは許容される程度に前記弾性表面波の伝搬速度が低い伝搬速度調整体を備えた
ことを特徴とする弾性表面波デバイス。 A surface acoustic wave device formed on a piezoelectric substrate and having a transmitting electrode for converting an electric signal into an elastic wave and a receiving electrode for converting an elastic wave that has arrived through the piezoelectric substrate into an electric signal. ,
Main components of the surface acoustic wave and the bulk wave among the elastic waves that are coated or formed in a region on the piezoelectric substrate sandwiched between the transmission electrode and the reception electrode and arrive at the reception electrode. A surface acoustic wave device comprising: a propagation speed adjusting body in which the propagation speed of the surface acoustic wave is low enough to avoid or allow an overlap on a time axis during a period in which the wave is distributed.
前記送波電極を励振した電気信号に同期して前記弾性表面波の主要な成分が前記受波電極に到来する期間のみに前記受波電極の出力を抽出する選択手段を備えた
ことを特徴とする弾性表面波デバイス。 The surface acoustic wave device according to claim 1,
It further comprises selection means for extracting the output of the wave receiving electrode only during a period in which the main component of the surface acoustic wave arrives at the wave receiving electrode in synchronization with an electric signal that excites the wave transmitting electrode. A surface acoustic wave device.
前記選択手段は、
前記弾性表面波の主要な成分が前記受波電極に到来する期間を外部から与えられる指示に基づいて識別する
ことを特徴とする弾性表面波デバイス。 The surface acoustic wave device according to claim 4,
The selection means includes
A surface acoustic wave device, wherein a period during which a major component of the surface acoustic wave arrives at the receiving electrode is identified based on an instruction given from outside.
前記期間特定手段によって特定された期間のみに、前記弾性表面波デバイスの出力を抽出する選択手段と
を備えたことを特徴とする弾性表面波デバイス支援装置。 Period specifying means for specifying a period in which a main component of the surface acoustic wave arrives at the output-side electrode of the surface acoustic wave device in synchronization with the electrical signal that has excited the surface acoustic wave device;
A surface acoustic wave device support apparatus, comprising: a selection unit that extracts an output of the surface acoustic wave device only during a period specified by the period specifying unit.
前記期間特定手段によって特定された期間を前記弾性表面波デバイスに指示する制御手段と
を備えたことを特徴とする弾性表面波デバイス支援装置。 Period specifying means for specifying a period in which a main component of the surface acoustic wave arrives at the output-side electrode of the surface acoustic wave device in synchronization with the electrical signal that has excited the surface acoustic wave device;
A surface acoustic wave device support apparatus comprising: control means for instructing the surface acoustic wave device to specify a period specified by the period specifying means.
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