JP2012081381A - Liquid drawing method, liquid drawing device, and functional mask for solar cell - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a liquid drawing method for forming a line pattern in a desired uniform thickness in a width direction.SOLUTION: The liquid drawing method includes: drawing line patterns 1 at equal intervals by using an inkjet head having a plurality of nozzles that are linearly aligned;selecting a nozzle for applying liquid to regions of edge parts 3 and a center part 4 in a width direction of the line pattern 1; and drawing the pattern while controlling the amount of liquid to be applied so as to uniform the thickness of the line pattern 1 in a width direction.

Description

  The present invention relates to a liquid drawing method, a liquid drawing apparatus, and a solar cell functional mask for drawing line patterns with equal widths and equal intervals using, for example, an inkjet device.

  Conventionally, when drawing an equiwidth and equidistant line pattern on an impermeable substrate using an inkjet head having nozzles that are a plurality of ejection holes arranged in a straight line, for example, as shown in FIG. By changing the inclination angle θ of the inkjet head 102 with respect to 101, each line 101 is drawn in one main scan at a nozzle row angle such that an integer multiple of the nozzle pitch in each nozzle 103 is equal to the line pitch P. It was. In the drawings attached to the present specification, among the nozzles, the nozzles that eject ink are expressed by concentric circles around black circles.

  Further, for example, in Japanese Patent Application Laid-Open No. 10-334805 (Patent Document 1), in a panel substrate of a plasma display panel, a red phosphor layer and a blue phosphor are formed in a plurality of recesses in which stripe-shaped partition walls are formed in a fixed pattern. In order to form a layer and a green phosphor layer, a coating liquid coating apparatus that can easily and accurately form a coating liquid such as a phosphor paste is disclosed.

  That is, in Patent Document 1, when forming a line width by paste, as shown in FIG. 9, a bank 201 having a constant width is provided in advance, and the paste 202 from the nozzle 203 is placed between adjacent banks 201, 201. Is poured. Accordingly, the line width can be controlled with high accuracy with a small number of discharges, and the line width is fixed by the bank 201, so that the film thickness can be easily adjusted by the discharge amount.

  However, the conventional line drawing method has the following problems. That is, in the drawing method shown in FIG. 8, in order to control the line width, the ejection frequency must be increased or decreased, or the moving speed in the main scanning direction (longitudinal direction of the line 101) must be changed. However, it was difficult to control the line width independently of the film thickness. That is, it is difficult to control the line width by wetting and spreading the discharged droplets based on the discharge amount.

  In addition, in the drawing method disclosed in Patent Document 1 shown in FIG. 9, it is essential to create the bank 201, and changing the line width and the inter-line pitch requires a change from the previous process, which is troublesome. Furthermore, it leads to cost increase for bank formation.

  In order to clarify the edge, for example, in the inkjet coating method disclosed in Japanese Patent Laid-Open No. 2005-246248 (Patent Document 2), in order to obtain the coated image shown in FIG. As shown in (c) to (f), all the edges are drawn first, and then, as shown in FIG. Is increasing.

  Next, as a technique for applying a pattern with a constant film thickness to a medium (substrate), for example, when RGB colors are colored by inkjet on pixels of a color filter (CF) of a liquid crystal, the periphery is liquid repellent. A black matrix (BM) having a high density is disposed and the enclosed area is made lyophilic, so that the applied ink can be applied using the difference in lyophilicity between the BM and the enclosed area. Some apply a predetermined amount of liquid so as to be within an area surrounded by the BM.

  In this case, in order to make the film thickness uniform, as shown in, for example, Japanese Patent Application Laid-Open No. 2008-68193 (Patent Document 3), the ejection target is considered in consideration of the inclination in the main scanning direction during the ejection scanning of the inkjet head. The discharge amount control is performed to increase the discharge amount step by step from the nozzle that is discharged and landed first in the pixel to the nozzle that is discharged later. As a result, it is possible to eliminate the problem that the film thickness becomes nonuniform due to the ink that has been landed on the substrate being first ejected and then attracted to the ink position, and the problem of remaining in the corners of the pixels being eliminated. The film thickness in the pixel is made uniform by the amount of ink.

  However, in this method, since the difference in lyophilicity between the application part and the surrounding area is used, and the application region is basically lyophilic, for example, P + and N + of crystalline solar cells When drawing the pattern by inkjet on the diffusion mask, the surface tension between the applied functional ink and the substrate on the Si substrate, where there is no difference in repellent pattern that serves as a guide to show the boundary of the application region For example, the difference in film thickness between the end portion of the applied pattern and the central portion increases. When the substrate applied at a high temperature of about 600 ° C. is baked and the applied pattern is solidified, the film will crack in the film thickness part, or the film function cannot be sufficiently exerted in the thin film part. The problem that diffusion spreads occurs.

JP-A-10-334805 JP 2005-246248 A JP 2008-68193 A

  Accordingly, an object of the present invention is to draw a plurality of line patterns on a non-permeable substrate with a liquid at a constant width or a constant interval, and to make the film thickness of the lines (liquid) uniform to a desired constant thickness in the width direction. An object of the present invention is to provide a liquid drawing method, a liquid drawing apparatus, and a functional mask for a solar cell manufactured using the apparatus.

In order to solve the above-described problem, the liquid drawing method of the present invention includes:
Liquid is discharged from a plurality of nozzles arranged in one direction onto the substrate, and a plurality of line patterns extending in the other direction intersecting the one direction are spaced on the substrate in the one direction. A liquid drawing method of forming side by side,
Separating the plurality of nozzles into a first nozzle group forming an edge portion located at an end in the width direction of each line pattern and a second nozzle group other than the first nozzle group, or
A first nozzle group for forming the plurality of nozzles at the edge in the width direction of each line pattern and a third nozzle group for forming a center at the center in the width direction of each line pattern And a nozzle sorting step for sorting into a fourth nozzle group other than the first and third nozzle groups,
A discharge amount adjustment step of adjusting the discharge amount of the liquid for each of the separated nozzle groups;
A step of discharging the adjusted discharge amount of liquid from the nozzle to form the plurality of line patterns on the substrate.

  According to the liquid drawing method of the present invention, the plurality of nozzles are classified into predetermined nozzle groups, the liquid discharge amount is adjusted for each of the sorted nozzle groups, and the discharge amount adjusted from the nozzles is adjusted. Since a plurality of line patterns are formed on the substrate by discharging the liquid, for example, at the edge portion of the line pattern that tends to be thin, the liquid discharge amount is increased to increase the film thickness. At the center of the line pattern where the film thickness tends to increase, the amount of liquid discharged can be reduced to reduce the film thickness, and the film thickness can be made uniform in the width direction of the line pattern. The film thickness can be easily adjusted.

In the liquid drawing method of one embodiment,
While the nozzle is moved twice in the main scanning direction which is the other direction relative to the substrate, liquid is ejected from the nozzle, and the nozzle is moved in the main scanning direction relative to the substrate. When forming the same line pattern on the substrate without discharging liquid from the nozzle while moving once in the intersecting sub-scanning direction,
In the nozzle sorting step, when the plurality of nozzles are sorted into the first nozzle group and the second nozzle group,
The difference between the number of nozzles in each nozzle group in the first movement in the main scanning direction and the number of nozzles in each nozzle group in the second movement in the main scanning direction is 1 or less, and
In each movement in the main scanning direction, while adjusting the discharge amount from the first nozzle group to be different from the discharge amount from the second nozzle group,
In the nozzle classification step, when the plurality of nozzles are classified into the first nozzle group, the third nozzle group, and the fourth nozzle group,
The difference between the number of nozzles in each nozzle group in the first movement in the main scanning direction and the number of nozzles in each nozzle group in the second movement in the main scanning direction is 1 or less, and
A discharge region from the third nozzle group on the substrate in the first movement in the main scanning direction and a discharge from the third nozzle group in the second movement in the main scanning direction onto the substrate. As the area overlaps,
In each movement in the main scanning direction, the discharge amount from the third nozzle group is adjusted to be ½ or less of the discharge amount from the fourth nozzle group.

  According to the liquid drawing method of this embodiment, the difference between the number of nozzles in each nozzle group in the first movement in the main scanning direction and the number of nozzles in each nozzle group in the second movement in the main scanning direction. When drawing one line pattern in two times, each nozzle applies the same amount of ink symmetrically from the end of the line pattern toward the center in the width direction of the line pattern. become. As a result, the film thickness can be easily adjusted in the width direction, for example, by reducing the deviation in the line width direction and leading to uniform film thickness.

  Further, in the nozzle sorting step, when the plurality of nozzles are sorted into the first nozzle group and the second nozzle group, in each movement in the main scanning direction, from the first nozzle group Is adjusted to be different from the discharge amount from the second nozzle group, the film thickness of the edge portion of the line pattern to be a thin film is increased, and the film thickness of the central portion of the line pattern to be a thick film is increased. Thus, the film thickness can be adjusted easily in the width direction, for example, by making the film thickness in the width direction of the line pattern constant.

  In the nozzle classification step, when the plurality of nozzles are classified into the first nozzle group, the third nozzle group, and the fourth nozzle group, in the first movement in the main scanning direction. Since the discharge area from the third nozzle group onto the substrate and the discharge area from the third nozzle group onto the substrate in the second movement in the main scanning direction overlap, two divided lines It is possible to eliminate the occurrence of island-like uncoated portions that are likely to occur at the joints of the pattern. Further, in each movement in the main scanning direction, the discharge amount from the third nozzle group is adjusted to be ½ or less of the discharge amount from the fourth nozzle group. In the width direction, the film thickness at the edge of the line pattern can be increased, the film thickness at the center of the line pattern to be thick can be reduced, and the film thickness in the width direction of the line pattern can be made constant. The film thickness can be easily adjusted.

In the liquid drawing method of one embodiment,
While the nozzle is moved twice in the main scanning direction which is the other direction relative to the substrate, liquid is ejected from the nozzle, and the nozzle is moved in the main scanning direction relative to the substrate. When forming the same line pattern on the substrate without discharging liquid from the nozzle while moving once in the intersecting sub-scanning direction,
Except for the nozzles that draw line patterns at both ends in the sub-scanning direction on the substrate, the nozzles that discharge on the outermost side in the one direction in each movement in the main scanning direction are:
When the plurality of nozzles are separated into the first nozzle group and the second nozzle group in the nozzle separation step, the nozzles are included in the second nozzle group,
When the plurality of nozzles are separated into the first nozzle group, the third nozzle group, and the fourth nozzle group in the nozzle sorting step, the third nozzle group or the fourth nozzle group included.

  According to the liquid drawing method of this embodiment, the nozzles that discharge on the outermost side in the one direction in each movement in the main scanning direction are the second nozzle group, the third nozzle group, Since it is included in the fourth nozzle group, when drawing more line patterns than the print width of the entire head, the line width can be formed in the outermost line pattern so as not to reduce the surrounding solvent atmosphere. .

  As a result, the line width variation due to the difference in the wetting and spreading of the line caused by the difference in the concentration of the solvent atmosphere due to the applied ink between the line pattern at the center and the line pattern at the end drawn by the two ejection movements in the main scanning direction. The line width can be made uniform. Furthermore, the film thickness can be made equal to other line patterns with the same discharge amount.

In the liquid drawing method of one embodiment,
In the nozzle classification step, when the plurality of nozzles are classified into the first nozzle group, the third nozzle group, and the fourth nozzle group,
In the discharge amount adjusting step, the discharge amount from the third nozzle group in the designated section on the inner side from both longitudinal ends of each line pattern is set to the third amount in the other section other than the designated section of each line pattern. More than the discharge amount from the nozzle group.

  According to the liquid drawing method of this embodiment, in the discharge amount adjustment step, the discharge amount from the third nozzle group in the designated section inside from the both ends in the longitudinal direction of the line patterns is set to the value of the line patterns. Since the discharge amount from the third nozzle group in other sections other than the designated section is larger than the discharge amount from the third nozzle group, when the discharge areas from the nozzles are overlapped by two movements in the main scanning direction, the start point of each line pattern At both ends in the longitudinal direction, which is the end point, the solvent atmosphere concentration is low, so wetting spread is reduced compared to the central portion in the longitudinal direction, but by increasing the amount of liquid at the joint portion that overlaps at both ends of each line pattern, In this joint portion, it is possible to eliminate the island missing state where the ink cannot be covered.

In the liquid drawing method of one embodiment,
When the nozzle is moved once in the main scanning direction, which is the other direction relative to the substrate, and liquid is ejected from the nozzle to form the same line pattern on the substrate,
In the nozzle sorting step, when the plurality of nozzles are sorted into the first nozzle group and the second nozzle group,
In the movement in the main scanning direction, while adjusting the discharge amount from the first nozzle group to be different from the discharge amount from the second nozzle group,
In the nozzle classification step, when the plurality of nozzles are classified into the first nozzle group, the third nozzle group, and the fourth nozzle group,
In the movement in the main scanning direction, the discharge amount from the third nozzle group is adjusted to be different from the discharge amount from the fourth nozzle group.

  According to the liquid drawing method of this embodiment, when the plurality of nozzles are separated into the first nozzle group and the second nozzle group in the nozzle separation step, in the movement in the main scanning direction, Since the discharge amount from the first nozzle group is adjusted to be different from the discharge amount from the second nozzle group, the film thickness of the edge portion of the line pattern to be a thin film is increased, and the line to be a thick film It is easy to adjust the film thickness in the width direction by reducing the film thickness at the center of the pattern and making the film thickness in the width direction constant.

  In the nozzle sorting step, when the plurality of nozzles are sorted into the first nozzle group, the third nozzle group, and the fourth nozzle group, the movement in the main scanning direction causes the first nozzle group. Since the discharge amount from the third nozzle group is adjusted to be different from the discharge amount from the fourth nozzle group, the film thickness of the edge portion of the line pattern to be a thin film is increased, and the line pattern to be a thick film is increased. It is easy to adjust the film thickness in the width direction, for example, by reducing the film thickness in the center and making the film thickness constant in the width direction of the line pattern.

In the liquid drawing method of one embodiment,
When the nozzle is moved once in the main scanning direction, which is the other direction relative to the substrate, and liquid is ejected from the nozzle to form the same line pattern on the substrate,
Except for the nozzles that draw line patterns at both ends in the sub-scanning direction on the substrate, the nozzles that discharge on the outermost side in the one direction in the movement in the main scanning direction are:
When the plurality of nozzles are separated into the first nozzle group and the second nozzle group in the nozzle separation step, the nozzles are included in the second nozzle group,
When the plurality of nozzles are separated into the first nozzle group, the third nozzle group, and the fourth nozzle group in the nozzle sorting step, the third nozzle group or the fourth nozzle group included.

  According to the liquid drawing method of this embodiment, the nozzle that discharges at the outermost side in the one direction in the movement in the main scanning direction is the second nozzle group, the third nozzle group, or the first nozzle. Therefore, when drawing more line patterns than the print width of the entire head, the outermost line patterns can be formed so as not to reduce the surrounding solvent atmosphere.

  As a result, it is possible to eliminate the variation in the line width due to the difference in the wetting and spreading of the line between the central line pattern and the end line pattern due to the difference in the concentration of the solvent atmosphere due to the applied ink, thereby making it possible to make each line width uniform. Furthermore, the film thickness can be made equal to other line patterns with the same discharge amount.

The liquid drawing apparatus of the present invention
Liquid is discharged from a plurality of nozzles arranged in one direction onto the substrate, and a plurality of line patterns extending in the other direction intersecting the one direction are spaced on the substrate in the one direction. A liquid drawing apparatus formed side by side,
Separating the plurality of nozzles into a first nozzle group forming an edge portion located at an end in the width direction of each line pattern and a second nozzle group other than the first nozzle group, or
A first nozzle group for forming the plurality of nozzles at the edge in the width direction of each line pattern and a third nozzle group for forming a center at the center in the width direction of each line pattern And a nozzle sorting unit for sorting into a fourth nozzle group other than the first and third nozzle groups,
For each nozzle group sorted by the nozzle sorting unit, a discharge amount adjusting unit that adjusts the liquid discharge amount;
A control unit that discharges the liquid of the discharge amount adjusted by the discharge amount adjustment unit from the nozzle onto the substrate while moving the nozzle in the main scanning direction that is the other direction relative to the substrate; It is characterized by having.

  According to the liquid drawing apparatus of the present invention, the nozzle separating unit separates the plurality of nozzles into a predetermined nozzle group, and the discharge amount adjusting unit is configured to supply a liquid for each nozzle group separated by the nozzle separating unit. The controller adjusts the discharge amount, and the control unit moves the nozzle in the main scanning direction relative to the substrate while discharging the liquid with the discharge amount adjusted by the discharge amount adjusting unit from the nozzle onto the substrate. For example, at the edge of a line pattern where the film thickness tends to be thin, the liquid discharge amount is increased to increase the film thickness, while at the center of the line pattern where the film thickness tends to be thick, for example. The film thickness can be easily adjusted in the width direction, for example, by reducing the liquid discharge amount to reduce the film thickness and realizing a uniform film thickness in the width direction of the line pattern.

  In one embodiment of the solar cell functional mask, the crystalline Si substrate as the substrate is arranged in the liquid drawing apparatus so that the slicing cut direction of the substrate coincides with the main scanning direction. The liquid drawing apparatus is used to apply the liquid onto the substrate to form the line pattern.

  According to the functional mask for solar cell of this embodiment, since it is manufactured using the liquid drawing apparatus, for example, a plurality of line patterns having equal widths and equal intervals are sliced and cut on the crystalline Si substrate. By coating and forming along the direction, a functional mask for P + and N + diffusion layers of a solar cell can be realized.

  In addition, arranging the substrate on the apparatus so that the slicing cut direction formed when the Si substrate is cut out and the main scanning direction (= discharge direction) are aligned with each other is caused by the slicing cut marks generated on the substrate. It is possible to prevent the linearity from being disturbed, and it is possible to form a line pattern with high accuracy with respect to the line spacing and the line width.

  According to the liquid drawing method of the present invention, the plurality of nozzles are classified into predetermined nozzle groups, the liquid discharge amount is adjusted for each of the sorted nozzle groups, and the discharge amount adjusted from the nozzles is adjusted. Since a plurality of line patterns are formed on the substrate by discharging the liquid, it is possible to achieve a uniform film thickness in the width direction of the line patterns. Furthermore, since the film thickness can be easily adjusted in the width direction, it is possible to adjust the film thickness when the end is thick and the center is thin, or when the opposite end is thin and the center is thick.

  According to the liquid drawing apparatus of the present invention, the nozzle separating unit separates the plurality of nozzles into a predetermined nozzle group, and the discharge amount adjusting unit is configured to supply a liquid for each nozzle group separated by the nozzle separating unit. The controller adjusts the discharge amount, and the control unit moves the nozzle in the main scanning direction relative to the substrate while discharging the liquid with the discharge amount adjusted by the discharge amount adjusting unit from the nozzle onto the substrate. Since the discharge is performed, the film thickness can be made uniform in the width direction of the line pattern. Furthermore, since the film thickness can be easily adjusted in the width direction, it is possible to adjust the film thickness when the end is thick and the center is thin, or when the opposite end is thin and the center is thick.

  According to the functional mask for solar cell of this embodiment, since it is produced using the liquid drawing apparatus, a line pattern can be formed with high accuracy with respect to the line spacing, the line width, and the like.

1 is a perspective view showing an ink jet drawing apparatus which is an embodiment of a liquid drawing apparatus of the present invention. It is a top view which shows the case where line drawing is performed by one main scanning. It is sectional drawing which shows the droplet at the time of performing line drawing by one main scanning. It is a top view which shows the 1st main scan in the case of performing line drawing by 2 main scans. It is a top view which shows the 2nd main scan in the case of performing line drawing by 2 main scans. It is sectional drawing which shows the droplet at the time of performing line drawing by two main scans. It is a top view which shows dividing the line pattern into the edge part, the center part, and other remaining parts. It is a top view which shows the case where a several line pattern is drawn on the whole board | substrate. When drawing a line pattern by two main scans, it is a top view which shows the line pattern drawn by the 1st main scan. FIG. 10 is a plan view showing a line pattern drawn by a second main scan when a line pattern is drawn by a second main scan. It is sectional drawing of the width direction of the line pattern at the time of apply | coating with the equivalent liquid quantity from each nozzle. It is sectional drawing of the width direction of a line pattern at the time of changing the application quantity of the edge part and center part of a line pattern. In the case of FIG. 7B, it is sectional drawing of the width direction of a line pattern at the time of discharging by overlapping the center part of each line pattern by two main scanning movements. It is a top view which shows the drawing method of the conventional line pattern. It is a top view which shows the drawing method of the other conventional pattern. It is a top view which shows the drawing method of the further another conventional pattern.

  Hereinafter, the present invention will be described in detail with reference to the illustrated embodiments.

  FIG. 1 shows a perspective view of an ink jet drawing apparatus which is an embodiment of the liquid drawing apparatus of the present invention. As shown in FIG. 1, the ink jet drawing apparatus 20 includes a plurality of substrate mounting tables 23 on which a plurality of substrates to be drawn 22 are placed above a base 21. The substrate mounting table 23 can move at a constant speed in the Y direction, which is the main scanning direction, with the drawing substrate 22 placed thereon.

  A slide mechanism 24 is provided at one end on the upper side of the base body 21, and a head unit 25 including the inkjet head 10 is provided on the slide mechanism 24.

  The head unit 25 can move in the Y direction, which is the main scanning direction, along the slide mechanism 24, so that the head unit 25 is positioned above the drawing substrate 22 on the substrate installation base 23. And a maintenance mechanism 26 provided in the central portion of the base 21 is movable.

  The head unit 25 is provided with a head slide mechanism 27. The head slide mechanism 27 allows the inkjet head 10 to freely move in the X direction, which is the sub-scanning direction. The main scanning direction (Y direction) and the sub-scanning direction (X direction) are orthogonal to each other, but it is only necessary to intersect.

  Then, ink as liquid is ejected from the plurality of nozzles of the inkjet head 10 onto the substrate 22, and a line pattern extending in the main scanning direction (Y direction) as the other direction is formed on the substrate 22. A plurality of them are formed side by side in the sub-scanning direction (X direction).

  Here, the basic idea about a line drawing method for drawing a plurality of line patterns composed of straight lines such as thin lines with equal width and equal spacing in the ink jet drawing apparatus 20 is shown in FIGS. 2A, 2B and 3A. This will be described with reference to FIGS. 3B and 3C.

  FIG. 2A is a plan view showing a case where the line pattern 1 is drawn by one main scan, and FIG. 2B is a droplet d when the line pattern 1 is drawn by one main scan. FIG. 3A is a plan view showing application in the first main scan in the case where the drawing of the line pattern 1 is divided into two main scans, and FIG. FIG. 3C is a plan view showing the application in the second main scan in the case of performing the drawing of 2 in the main scan, and FIG. 3C shows the liquid when the drawing of the line pattern 1 is performed in the two main scans. It is sectional drawing which shows the droplet d.

  As shown in FIGS. 2A to 3C, the plurality of nozzles 11 of the inkjet head 10 are arranged in a straight line in one direction intersecting the main scanning direction (Y direction). This one direction is inclined with respect to the sub-scanning direction (X direction). In the drawing, the ejection holes of each nozzle 11 are represented by black circles, and the nozzles 11 that eject ink among the plurality of nozzles 11 are represented by concentric circles around the black circles. In addition, a portion where the ink is applied in the line pattern 1 is indicated by hatching.

  First, when drawing the equally spaced line pattern 1, it is important that the line width W and the line interval are equal. If the line pitch P and the discharge hole pitch of the nozzle 11 are matched, a desired line is obtained. There is no ejection hole at the position for drawing the width W. That is, it is difficult to make the discharge holes correspond to both the line width W and the line pitch P in the case of the discharge hole array having an equal pitch. Further, when the ejection hole array in the inkjet head 10 is inclined with respect to the sub-scanning direction in order to optimize the ejection hole pitch, the film thickness is within the same line drawn by the early landing part and the late part. The difference will occur.

  Specifically, as shown in FIG. 2A, when drawing is performed in one main scan, a slight time difference occurs in landing due to the inclination of the nozzle row of the inkjet head 10 with respect to the sub-scanning direction. Since the ink is biased to the one that has landed even a little, the film thickness of the droplet d applied to the substrate 22 becomes uneven as shown in FIG. 2B.

  In order to solve this, in the case of drawing by one main scanning, the coating amount from the two nozzles 11 forming both ends in the width direction of the line pattern 1 is first discharged onto the substrate 22 according to the traveling direction. By relatively increasing the discharge amount from the nozzle 11 to be discharged to the substrate 22 later than the discharge amount from the nozzle 11, it is possible to prevent an uneven film thickness. Furthermore, the film thickness can be uniform by adjusting the coating amount from the nozzle 11 so as to reduce the discharge amount at the central portion in the width direction of the line pattern 1 with respect to the film thickness distribution that is wrinkled in the line width W direction. Can be achieved.

  As described above, when drawing in one main scan, it is optimal for drawing the line pattern 1 on the entire surface of the substrate 22 with the minimum number of scans, but depending on the printing interval of the fixed nozzles 11, Since the line width W or the line interval is basically determined, it is difficult to form a large number of line patterns 1 with an arbitrary line interval and line width W.

  Therefore, as a solution, as shown in FIG. 3A, a part of the width of the line pattern 1 is drawn in the first main scanning, and the position of the ejection hole of the nozzle 11 is moved by a certain amount in the sub-scanning direction. Then, as shown in FIG. 3B, there is a method of drawing at least the width of the remaining line pattern 1 in the second main scanning. When this method is used, the line width W or the line spacing can be arbitrarily set according to the amount of movement of the head 10 in the sub-scanning direction, and fine adjustment is possible. However, this method has an aspect in which the number of times of main scanning movement for drawing the entire substrate 22 is increased as compared with the drawing method in one main scanning described above. The proper use of forming the line pattern 1 in the divided main scanning movement is determined by the specification of the line pattern 1 applied to the substrate 22.

  Thus, as shown in FIGS. 3A and 3B, by drawing one line pattern 1 divided into two main scans, as shown in FIG. 3C, the droplet d applied to the substrate 22 is drawn. Unevenness of film thickness is reduced. Further, similarly to the case of one main scanning movement, the coating amount from the nozzles 11 assigned to each region is adjusted so that the film thicknesses at both ends of the line pattern 1 and at the center of the line pattern 1 can be adjusted. By controlling, the film thickness can be made uniform in the width direction.

  In short, as shown in FIG. 1, the inkjet drawing apparatus 20 includes a nozzle sorting unit 31, a discharge amount adjusting unit 32, and a control unit 30.

  The nozzle sorting unit 31 includes a first nozzle group that forms an edge portion (reference numeral 3 in FIG. 4) that positions the plurality of nozzles 11 at the ends in the width direction of the line patterns 1, and the first nozzles. Sort into a second nozzle group other than the group. In this case, the second nozzle group forms a region (reference numerals 4 and 5 in FIG. 4) other than the edge portion (reference numeral 3 in FIG. 4) of the line pattern 1.

  Alternatively, the nozzle sorting unit 31 includes a plurality of nozzles 11, a first nozzle group that forms an edge portion (reference numeral 3 in FIG. 4) located at an end in the width direction of each line pattern 1, and the width of each line pattern 1. This is divided into a third nozzle group that forms a central portion (reference numeral 4 in FIG. 4) located in the center of the direction and a fourth nozzle group other than the first and third nozzle groups. In this case, the fourth nozzle group forms a region (reference numeral 5 in FIG. 4) other than the edge portion (reference numeral 3 in FIG. 4) and the central portion (reference numeral 4 in FIG. 4) of the line pattern 1.

  The discharge amount adjusting unit 32 adjusts the liquid discharge amount for each nozzle group sorted by the nozzle sorting unit 31. The control unit 30 discharges the liquid of the discharge amount adjusted by the discharge amount adjustment unit 32 from the nozzle 11 onto the substrate 22 while moving the nozzle 11 in the main scanning direction relative to the substrate 22.

  Further, when a part of the width of the line pattern 1 is drawn in the first main scanning, it is originally sufficient to draw the remaining width in the second main scanning. In this case, if no error occurs, both borders coincide when the width of a part of the line pattern 1 is drawn in the first main scan and the remaining width is drawn in the second main scan. Should do. However, if there is an error, a gap may be formed at the center of the line pattern 1.

  Therefore, it is preferable to draw beyond the remaining width in the second main scan. As a result, the line width drawn in the first main scan and the remaining line width drawn in the second main scan can be overlapped, and the coating amount of the overlap portion is the same as the first time. The discharge amount is set to be approximately half of the predetermined amount so that the second amount is a predetermined amount. As a result, it is possible to prevent the formation of a slit-like uncoated portion at the center of the line pattern 1 and to make the film thickness uniform in the line width W direction.

  In the first main scan, it is preferable to draw a width that is half or more than the line pattern 1. That is, it is preferable that the drawing line widths W in the first main scanning and the second main scanning are equal from the viewpoint of film thickness uniformity. It is not preferable that the width W is too large or too small. Therefore, the number of nozzles assigned to the line pattern 1 divided into two times in order to make the line width W of the drawing of the first main scan and the second main scan half or slightly larger than that, that is, substantially half. Are set to be substantially the same number, at least the difference is suppressed to 1 or less, and the application amounts from the selected nozzles 11 are substantially equal, so that the film thickness is not biased to one edge portion, and the film The line pattern 1 having a constant width can be drawn with a uniform thickness.

  On the other hand, at both ends in the longitudinal direction (Y direction) of the line pattern 1, even if drawing is performed with the same coating amount, the line width W becomes a direction of narrowing. This is because there is a difference in the concentration of the solvent atmosphere generated from the ink already applied to the substrate 22 between the central portion and both ends in the longitudinal direction of the line pattern 1, and the wettability of the substrate 22 due to the atmosphere is different. is there. Therefore, at both ends in the longitudinal direction of the line pattern 1 having a low atmospheric concentration, the liquid wetting spread is less than in the longitudinal central portion having a high atmospheric concentration, and therefore the line width W tends to be narrower.

  Therefore, the joint portion of the line pattern 1 divided into two portions is overlapped with each other in the central portion in the longitudinal direction, and even when there is no gap, there is little wetting and spreading at both ends in the longitudinal direction. It was also clear from the experimental results that slight tears are likely to occur. Therefore, for the overlapped portion in the two patterns, the occurrence of a tear can be suppressed without hindering the uniform film thickness by slightly increasing the discharge amount in a limited section with a small solvent atmosphere.

  In addition, when forming more line patterns 1 on the substrate 22 than the print width of the entire inkjet head 10, the head 10 is moved in the sub-scanning direction about the print width of the entire head and the line pattern 1 is moved. It is necessary to form. In this case, as in the previous case, the end portion in the width direction of the line pattern 1 has a small solvent atmosphere, so that the liquid does not spread much and the line width tends to be narrow.

  Therefore, as shown in FIG. 5, in order to perform the remaining coating, the outermost portion is applied on the side where the head 10 is next moved in the sub-scanning direction, so that the outer edge portion of the line pattern 1 is not formed. To do. In FIG. 5, the line pattern 1 surrounded by a solid line represents the already applied line pattern 1, and the line pattern 1 surrounded by a broken line is applied after the head 10 is moved in the sub-scanning direction (X direction). Line pattern 1 is represented. The portion indicated as A corresponds to the outer edge portion of the line pattern 1 as the outermost coating.

  As a result, the outer edge portion whose wetness and spread is most different from the other line patterns 1 due to the influence of the solvent atmosphere is carried over to the application during the subsequent main scanning movement, so that the line in a state where the solvent atmosphere is small. The effect of avoiding the edge formation of pattern 1 is avoided.

  Next, a drawing method for drawing the same line pattern 1 by one main scanning movement will be described with reference to FIGS. That is, in the inkjet drawing apparatus 20, the nozzle 11 is moved once in the main scanning direction relative to the substrate 22, and liquid is ejected from the nozzle 11 to form the same line pattern 1 on the substrate 22. To do.

  FIG. 4 shows a case where a plurality of line patterns 1 are formed on the entire surface of the substrate 22 by two main scanning movements. A drawing area in the first main scanning movement is indicated by Z1, and a drawing area in the second main scanning movement is indicated by Z2. By the first main scanning movement, the inkjet head 10 moves in the main scanning direction Y, and the line pattern 1 is formed during the movement. At that time, for each line pattern 1, the area is divided into an edge portion 3 positioned at the end of the line pattern 1 in the width direction, a center portion 4 positioned at the center of the line pattern 1 in the width direction, and the remaining portion 5. Then, the nozzle groups assigned to the classified areas respectively set the discharge amounts from the individual nozzles 11 so that the film thickness becomes uniform, and form each area, thereby forming the line pattern 1. .

  Regarding the discharge amount setting from each nozzle 11, the film thickness shape of the line pattern 1 once applied on the non-permeable substrate 22 as a test sample is measured using a step gauge or the like, and the discharge amount is determined based on the measurement result. We will make adjustments. For example, when functional ink is applied as a diffusion mask for a crystal solar cell, the thickness of the applied line pattern 1 in the width direction is the same for all nozzles 11 that generate the line pattern 1. When it did, it became a bowl-like shape in the width direction. Therefore, the nozzle group forming the edge portion 3 is larger than the discharge amount from the other nozzle groups, and conversely, the nozzle group forming the central portion 4 is set to have a relatively small discharge amount so that the film thickness is uniform. I tried to change.

  Further, when not all the line patterns 1 can be drawn by one main scanning movement due to the size of the drawing substrate 22, the inkjet head 10 and the drawing substrate 22 are relatively moved as shown in FIG. 5. Moving in the sub-scanning direction X, the remaining line pattern 1 surrounded by the broken line in FIG. 5 is formed.

  At this time, the line pattern 1 (the portion indicated by B in FIG. 5) corresponding to the joint between the main scans is caused by the difference in the concentration of the solvent atmosphere that affects the wetting and spreading of the ink. ) In the width direction tends to be smaller than that of the line pattern 1 in the central portion. That is, it becomes thinner than other line widths.

  Therefore, the most extreme line pattern 1 (portion indicated by B in FIG. 5) corresponding to the joint with the next main scanning movement is the next main scanning side edge portion 3 as indicated by A in FIG. At least leave and draw. As a result, since the coating pattern exists around the line 2 on the most next main scanning side (the part indicated by C in FIG. 5), the difference in solvent atmosphere concentration is reduced. It can be identified by the line pattern 1.

  Furthermore, as indicated by D in FIG. 4, for a portion to be drawn overlapping in adjacent main scanning, a predetermined amount is applied so that the coating amount becomes a predetermined amount in total by two main scanning movements. The discharge amount during each main scanning movement is adjusted by 1/2.

  That is, the liquid drawing method of the present invention includes a nozzle sorting step, a discharge amount adjusting step, and a line pattern forming step.

  In the nozzle classification step, the plurality of nozzles 11 are classified into a first nozzle group that forms the edge portion 3 of each line pattern 1 and a second nozzle group other than the first nozzle group. Alternatively, in the nozzle separation step, the first nozzle group that forms the edge portion 3 of each line pattern 1 and the third nozzle group that forms the central portion 4 of each line pattern 1 are arranged in the first nozzle group. And a fourth nozzle group other than the third nozzle group.

  In the discharge amount adjusting step, the liquid discharge amount is adjusted for each of the separated nozzle groups. In the line pattern forming step, a plurality of line patterns 1 are formed on the substrate 22 by discharging the adjusted discharge amount of liquid from the nozzle 11.

  In the liquid drawing method, the plurality of nozzles 11 are separated into the first nozzle group and the second nozzle group in the nozzle separation step in a state where the nozzles 11 are ejected once in the main scanning direction. In this case, in the movement in the main scanning direction, the discharge amount from the first nozzle group is adjusted to be different from the discharge amount from the second nozzle group. Alternatively, in the nozzle sorting step, when the plurality of nozzles 11 are sorted into the first nozzle group, the third nozzle group, and the fourth nozzle group, in the movement in the main scanning direction, from the third nozzle group Is adjusted to be different from the discharge amount from the fourth nozzle group.

  In the liquid drawing method, the nozzle 11 is moved in the main scanning direction except for the nozzle 11 that draws the line pattern 1 at both ends in the sub-scanning direction on the substrate 22 in the discharge movement state in the main scanning direction once. The nozzles 11 that discharge at the outermost side in one direction are included in the second nozzle group when the plurality of nozzles 11 are separated into the first nozzle group and the second nozzle group in the nozzle sorting step. Alternatively, the nozzle 11 that discharges at the outermost side in one direction in the movement in the main scanning direction separates the plurality of nozzles 11 into the first nozzle group, the third nozzle group, and the fourth nozzle group in the nozzle separation step. In this case, it is included in the third nozzle group or the fourth nozzle group.

  Next, a drawing method for drawing the same line pattern 1 by two main scanning movements will be described with reference to FIGS. 6A and 6B. That is, in the inkjet drawing apparatus 20, while the nozzle 11 is moved twice in the main scanning direction relative to the substrate 22, the liquid is discharged from the nozzle 11, and the nozzle 11 is moved relative to the substrate 22. The same line pattern 1 is formed on the substrate 22 without moving the liquid from the nozzle 11 while moving once in the sub-scanning direction.

  6A and 6B show a state in which the same line pattern 1 is divided and drawn by two main scanning ejection movements. Regarding the two main scanning movements, there are a case in which the scanning direction is the same and a case in which the reciprocating path is in the opposite direction. In the present invention, both cases are possible.

  FIG. 6A shows a drawing pattern in the forward path as the first main scanning direction. One line pattern 1 is classified into an edge portion 3, a central portion 4, and a remaining portion 5 other than that. The nozzles 11 assigned to the respective areas are formed so that the coating amount from each nozzle 11 can be made uniform in the width direction as in the case of the single main scanning direction shown in FIGS. assign.

  Similarly, for the drawing pattern in the return path as the second main scanning direction shown in FIG. 6B, the application amount from the nozzle 11 assigned to each divided area is set. The number of nozzles assigned to the edge portion 3, the central portion 4, and the remaining portion 5 other than that of the forward path and the backward path is the same so that the application patterns of the forward path and the backward path are the same as the width and the coating amount. Like that. Further, the application amount from the assigned nozzle 11 is adjusted to be the same amount.

  And about the center part 4, a nozzle group is selected so that a drawing area may overlap in an outward path and a return path, and generation | occurrence | production of the uncoated part which becomes a tear between an outward path and a return path is suppressed. In addition, about the coating amount of this center part 4, about 1/2 of a predetermined amount is allocated to an outward path and a return path, respectively so that it may become a predetermined amount in a round trip. However, when the film thickness of the central portion 4 of the line pattern 1 is reduced as described above, the coating amount is adjusted to 1/2 or less to reduce the film thickness.

  On the other hand, even if the coating amount from the nozzle 11 is adjusted so that the film thickness falls within the predetermined value as described above, an uncoated portion that becomes a tear at the joint portion between the forward path and the backward path is present in the central portion of the line pattern 1. Even if it does not occur, at both ends in the longitudinal direction of the line pattern 1, the solvent atmosphere is small, and the wetness of the applied ink is small. May occur.

  Although this can be dealt with by increasing the predetermined discharge amount, when a too large coating amount is set, when the line pattern 1 is used as a diffusion mask for a crystalline solar cell, the coated line pattern 1 is not used. When firing, there was a problem that cracks occurred in the thick part. Therefore, in order to set a coating amount that realizes a constant film thickness and prevent the tearing of the entire line pattern 1, it is set for both the predetermined section, the forward path, and the return path from both ends in the longitudinal direction of the line pattern 1. The applied amount is adjusted so that an unapplied portion is eliminated by increasing the applied amount in the center portion 4.

  As described above, even when the same line pattern 1 is drawn by two main scanning movements, when the entire surface of the substrate 22 is drawn, the line pattern 1 is similar to the case described with reference to FIGS. The line pattern 1 of the joint portion with the overlap portion is generated so that the difference in the solvent atmosphere concentration is eliminated at the joint portion, and the uncoated portion that is torn in the line pattern 1 does not occur at the joint portion. Then, the film thickness is made uniform over the entire surface of the drawing substrate 22, and a large number of line patterns 1 having an equal width are formed at equal intervals.

  That is, in the liquid drawing method, the plurality of nozzles 11 are moved to the first in the nozzle separation step in the non-ejection movement of the nozzles 11 in one sub-scanning direction and the two ejection movements in the main scanning direction. When the nozzle group and the second nozzle group are separated, the number of nozzles in each nozzle group in the first movement in the main scanning direction and the number of nozzles in each nozzle group in the second movement in the main scanning direction The difference is set to 1 or less, and the discharge amount from the first nozzle group is adjusted to be different from the discharge amount from the second nozzle group in each movement in the main scanning direction. Alternatively, in the nozzle sorting step, when the plurality of nozzles 11 are sorted into the first nozzle group, the third nozzle group, and the fourth nozzle group, each nozzle group in the first movement in the main scanning direction. The difference between the number of nozzles and the number of nozzles in each nozzle group in the second movement in the main scanning direction is set to 1 or less, and from the third nozzle group in the first movement in the main scanning direction onto the substrate 22. And the discharge area from the third nozzle group on the substrate 22 in the second movement in the main scanning direction to each other, and the discharge from the third nozzle group in each movement in the main scanning direction. The amount is adjusted to be ½ or less of the discharge amount from the fourth nozzle group.

  In the liquid drawing method, the line pattern 1 at both ends in the sub-scanning direction on the substrate 22 is applied in the state in which the nozzle 11 is not ejected once in the sub-scanning direction and is ejected twice in the main scanning direction. Except for the nozzle 11 to be drawn, the nozzle 11 that discharges at the outermost side in one direction in each movement in the main scanning direction is a plurality of nozzles 11 in the first nozzle group and the second nozzle group in the nozzle separation step. When sorted, it is included in the second nozzle group. Alternatively, the nozzle 11 that discharges at the outermost side in one direction in each movement in the main scanning direction is a plurality of nozzles 11 in the nozzle sorting step, the first nozzle group, the third nozzle group, and the fourth nozzle group. Are classified into the third nozzle group or the fourth nozzle group.

  Further, in the liquid drawing method, when the plurality of nozzles 11 are separated into the first nozzle group, the third nozzle group, and the fourth nozzle group in the nozzle separation step, each line in the discharge amount adjustment step The discharge amount from the third nozzle group in the designated section inside from both ends in the longitudinal direction of the pattern 1 is made larger than the discharge amount from the third nozzle group in other sections other than the designated section of each line pattern 1. .

  According to the ink jet drawing apparatus 20 as the liquid drawing apparatus having the above-described configuration, the nozzle sorting unit 31 sorts the plurality of nozzles 11 into a predetermined nozzle group, and the discharge amount adjusting unit 32 has the nozzle sorting unit 31. The controller 30 adjusts the discharge amount of the liquid for each nozzle group sorted by the control unit 30, while adjusting the discharge amount adjustment unit 32 while moving the nozzle 11 in the main scanning direction relative to the substrate 22. Since the discharged amount of liquid is discharged from the nozzle 11 onto the substrate 22, for example, at the edge portion 3 of the line pattern 1 where the film thickness tends to be thin, the liquid discharge amount is increased to increase the film thickness. On the other hand, in the central portion 4 of the line pattern 1 where the film thickness tends to increase, the liquid discharge amount is reduced to reduce the film thickness, thereby making the film thickness uniform in the width direction of the line pattern 1. realizable.

  In other words, conventionally, the discharge amount is adjusted for each nozzle, but in the present invention, the nozzles are classified according to the area of the line pattern, and the discharge amount is adjusted for the classified nozzles. Yes. Therefore, for example, when many line patterns are drawn on the entire substrate by moving the nozzle a plurality of times in the main scanning direction (the other direction) with respect to the substrate 22, the same nozzle may be classified differently. The same nozzle, which is classified into different categories, draws a line pattern with a discharge amount corresponding to each category.

  As shown in FIG. 7B, the droplet d of the line pattern 1 drawn according to the present invention has a ridge-like film thickness direction with a thick central part and a thin end as shown in FIG. 7B. Further, by increasing the film thickness of the edge part 3 of the line pattern 1 to be a thin film and decreasing the film thickness of the central part 4 of the line pattern 1 to be a thick film, the film thickness in the width direction of the line pattern 1 is made constant. Can be achieved. Further, as shown in FIG. 7C, in the line pattern 1 drawn by FIGS. 6A and 6B, by applying the selected nozzle groups so as to overlap each other, two divided line patterns (first droplet d1 and It is possible to eliminate generation of island-like uncoated portions that are likely to occur at the joint portion of the second droplet d2).

  According to the liquid drawing method having the above-described configuration, the plurality of nozzles 11 are classified into predetermined nozzle groups, the liquid discharge amount is adjusted for each of the divided nozzle groups, and then the discharge adjusted from the nozzles 11 is adjusted. Since a plurality of line patterns 1 are formed on the substrate 22 by discharging an amount of liquid, for example, at the edge portion 3 of the line pattern 1 that tends to be thin, the liquid discharge amount is increased to increase the film thickness. In the central portion 4 of the line pattern 1 where the film thickness tends to increase, the liquid discharge amount is reduced to reduce the film thickness so that the film thickness is uniform in the width direction of the line pattern 1. Can be realized.

  According to the liquid drawing method having the above configuration, the difference between the number of nozzles in each nozzle group in the first movement in the main scanning direction and the number of nozzles in each nozzle group in the second movement in the main scanning direction is calculated. 1 or less, when drawing one line pattern 1 in two steps, each nozzle 11 applies the same amount of ink symmetrically from the end of the line pattern 1 to the center in the width direction of the line pattern 1. Will be applied. As a result, the film thickness is less biased in the line width direction, leading to uniform film thickness. Desirably, the number of nozzles is preferably the same. However, when the line pattern is formed with an odd number of nozzles, the number of the fourth nozzle groups cannot be set to the same number depending on the number of the third nozzle groups forming the central portion of the line pattern. In this case, each nozzle group is determined as a nozzle difference 1 for the fourth nozzle group.

  Further, in the nozzle sorting step, when the plurality of nozzles 11 are sorted into the first nozzle group and the second nozzle group, the first nozzle group in each movement in the main scanning direction. Since the discharge amount from the second nozzle group is adjusted to be different from the discharge amount from the second nozzle group, the thickness of the edge portion 3 of the line pattern 1 to be a thin film is increased, and the center of the line pattern 1 to be a thick film is increased. The film thickness of the portion 4 can be reduced, and the film thickness in the width direction of the line pattern 1 can be made constant.

  In the nozzle classification step, when the plurality of nozzles 11 are classified into the first nozzle group, the third nozzle group, and the fourth nozzle group, the first movement in the main scanning direction is performed. Since the discharge area from the third nozzle group to the substrate 22 and the discharge area from the third nozzle group to the substrate 22 in the second movement in the main scanning direction overlap, Occurrence of island-like uncoated portions that are likely to occur at the joints of the divided line pattern 1 can be eliminated. Further, in each movement in the main scanning direction, the discharge amount from the third nozzle group is adjusted to be ½ or less of the discharge amount from the fourth nozzle group. By increasing the film thickness of the edge portion 3 of the line pattern 1 to be reduced and reducing the film thickness of the central portion 4 of the line pattern 1 to be a thick film, the film thickness in the width direction of the line pattern 1 can be made constant. it can.

  According to the liquid drawing method with the above configuration, the nozzle 11 that discharges at the outermost side in the one direction in each movement in the main scanning direction is the second nozzle group, the third nozzle group, Since it is included in the fourth nozzle group, when drawing more line patterns 1 than the print width of the entire head, in the outermost line pattern 1, the line width is not reduced in the surrounding solvent atmosphere. Can be formed.

  As a result, the line pattern 1 at the central portion 4 and the line pattern 1 at the end, which are drawn by two ejection movements in the main scanning direction, are caused by the difference in the wetting and spreading of the line caused by the concentration difference in the solvent atmosphere due to the applied ink. The width variation can be eliminated and the line width can be made uniform. Furthermore, the film thickness can be made equal to the other line patterns 1 with the same discharge amount.

  According to the liquid drawing method having the above-described configuration, in the discharge amount adjusting step, the discharge amount from the third nozzle group in the designated section on the inner side from the both ends in the longitudinal direction of each line pattern 1 is set to the line pattern 1. Since the discharge amount from the third nozzle group in other sections other than the specified section is larger than the discharge amount from the third nozzle group, each line pattern 1 is used when the discharge areas from the nozzles 11 are overlapped by two movements in the main scanning direction. Since the solvent atmosphere concentration is low at both ends in the longitudinal direction, which are the start point and end point, the wetting spread is less than that in the central portion 4 in the longitudinal direction, but the amount of liquid in the joint portion that overlaps at both ends of each line pattern 1 By increasing, the occurrence of an island missing state where the ink cannot be covered can be eliminated at the joint portion.

  Actually, the liquid increase amount is limited to the overlapping nozzles 11 and is limited to a short section region, and the increase amount is suppressed to about 30% or less, so that the problem of island loss can be solved. In order to increase the discharge amount in the limited area, the film thickness around the periphery may be averaged due to the wetting and spreading of the ink, and the influence of the increase in the film thickness accompanying the increase in the discharge amount is slight.

  According to the liquid drawing method of the above configuration, when the plurality of nozzles 11 are separated into the first nozzle group and the second nozzle group in the nozzle separation step, in the movement in the main scanning direction, Since the discharge amount from the first nozzle group is adjusted to be different from the discharge amount from the second nozzle group, the film thickness of the edge portion 3 of the line pattern 1 to be a thin film is increased, By reducing the film thickness of the central portion 4 of the line pattern 1, the film thickness in the width direction of the line pattern 1 can be made constant.

  Further, in the nozzle sorting step, when the plurality of nozzles 11 are sorted into the first nozzle group, the third nozzle group, and the fourth nozzle group, in the movement in the main scanning direction, Since the discharge amount from the third nozzle group is adjusted to be different from the discharge amount from the fourth nozzle group, the film thickness of the edge portion 3 of the line pattern 1 to be a thin film is increased, resulting in a thick film. By reducing the film thickness of the central portion 4 of the line pattern 1, the film thickness in the width direction of the line pattern 1 can be made constant.

  According to the liquid drawing method having the above-described configuration, the nozzle 11 that discharges at the outermost side in the one direction in the movement in the main scanning direction is the second nozzle group, the third nozzle group, or the first nozzle. 4 is included in the nozzle group, when drawing more line patterns 1 than the print width of the entire head, the outermost line pattern 1 can be formed so as not to reduce the surrounding solvent atmosphere. .

  As a result, in the line pattern 1 at the central portion 4 and the line pattern 1 at the end, the line width variation is eliminated by the difference in the wetting and spreading of the line caused by the difference in concentration of the solvent atmosphere due to the applied ink, and each line width is made uniform. realizable. Furthermore, the film thickness can be made equal to the other line patterns 1 with the same discharge amount.

  In the functional mask for solar cell of the present invention, a crystalline Si substrate as the substrate 22 is applied to the inkjet drawing device 20 as the liquid drawing device, and the slicing cut direction of the substrate is set as the main scanning direction (Y The line pattern 1 is formed by applying the liquid on the substrate 22 and using the apparatus 20 so that the line pattern 1 is formed.

  According to the functional mask for a solar cell having the above-described configuration, since the device 20 is used, for example, a plurality of line patterns 1 having equal widths and equal intervals are sliced and cut on the crystalline Si substrate. The functional mask for the P + and N + diffusion layers of the solar cell can be realized by coating along the surface.

  In addition, arranging the substrate on the apparatus 20 so that the slicing cut direction formed when the Si substrate is cut out and the main scanning direction (= discharge direction) are aligned with each other is caused by the slicing cut marks generated on the substrate 20. The linearity of the pattern 1 can be prevented from being hindered, and the line pattern 1 can be formed with high accuracy with respect to the line spacing and the line width.

  In addition, this invention is not limited to the above-mentioned embodiment. For example, a plurality of nozzles may be classified into four or more nozzle groups. Further, the same line pattern may be formed by three or more main scans. Further, as the liquid drawing apparatus, an apparatus other than the ink jet drawing apparatus may be used.

  In the present embodiment, the liquid drawing method of the present invention includes a nozzle sorting step, a discharge amount adjusting step, and a line pattern forming step. As the liquid drawing apparatus, a nozzle sorting unit 31, a discharge amount adjusting unit 32, and a control Part 30. Therefore, it is suitable for forming the line pattern 1 having a constant film thickness in the line width direction, but furthermore, since the film thickness adjustment in the width direction is facilitated, the end is thick and the center is thin, It is also possible to adjust the film thickness in the line width direction when the opposite end is thin and the center is thick.

DESCRIPTION OF SYMBOLS 1 Line pattern 2 Between lines 3 Edge part (line pattern) 4 Central part (line pattern) 5 Remaining part (except the edge part and center part of a line pattern) 10 Inkjet head 11 Nozzle 20 Inkjet drawing apparatus 21 Base 22 Covered Drawing substrate 23 Substrate installation table 24 Slide mechanism 25 Head unit 26 Maintenance mechanism 27 Head slide mechanism 30 Control unit 31 Nozzle separation unit 32 Discharge amount adjustment unit X Sub-scanning direction Y Main scanning direction

Claims (8)

Liquid is discharged from a plurality of nozzles arranged in one direction onto the substrate, and a plurality of line patterns extending in the other direction intersecting the one direction are spaced on the substrate in the one direction. A liquid drawing method of forming side by side,
Separating the plurality of nozzles into a first nozzle group forming an edge portion located at an end in the width direction of each line pattern and a second nozzle group other than the first nozzle group, or
A first nozzle group for forming the plurality of nozzles at the edge in the width direction of each line pattern and a third nozzle group for forming a center at the center in the width direction of each line pattern And a nozzle sorting step for sorting into a fourth nozzle group other than the first and third nozzle groups,
A discharge amount adjustment step of adjusting the discharge amount of the liquid for each of the separated nozzle groups;
And a step of discharging the adjusted discharge amount of liquid from the nozzle to form the plurality of line patterns on the substrate. The liquid drawing method according to claim 1,
While the nozzle is moved twice in the main scanning direction which is the other direction relative to the substrate, liquid is ejected from the nozzle, and the nozzle is moved in the main scanning direction relative to the substrate. When forming the same line pattern on the substrate without discharging liquid from the nozzle while moving once in the intersecting sub-scanning direction,
In the nozzle sorting step, when the plurality of nozzles are sorted into the first nozzle group and the second nozzle group,
The difference between the number of nozzles in each nozzle group in the first movement in the main scanning direction and the number of nozzles in each nozzle group in the second movement in the main scanning direction is 1 or less, and
In each movement in the main scanning direction, while adjusting the discharge amount from the first nozzle group to be different from the discharge amount from the second nozzle group,
In the nozzle classification step, when the plurality of nozzles are classified into the first nozzle group, the third nozzle group, and the fourth nozzle group,
The difference between the number of nozzles in each nozzle group in the first movement in the main scanning direction and the number of nozzles in each nozzle group in the second movement in the main scanning direction is 1 or less, and
A discharge region from the third nozzle group on the substrate in the first movement in the main scanning direction and a discharge from the third nozzle group in the second movement in the main scanning direction onto the substrate. As the area overlaps,
A liquid characterized in that, in each movement in the main scanning direction, the discharge amount from the third nozzle group is adjusted to be ½ or less of the discharge amount from the fourth nozzle group. Drawing method. The liquid drawing method according to claim 1 or 2,
While the nozzle is moved twice in the main scanning direction which is the other direction relative to the substrate, liquid is ejected from the nozzle, and the nozzle is moved in the main scanning direction relative to the substrate. When forming the same line pattern on the substrate without discharging liquid from the nozzle while moving once in the intersecting sub-scanning direction,
Except for the nozzles that draw line patterns at both ends in the sub-scanning direction on the substrate, the nozzles that discharge on the outermost side in the one direction in each movement in the main scanning direction are:
When the plurality of nozzles are separated into the first nozzle group and the second nozzle group in the nozzle separation step, the nozzles are included in the second nozzle group,
When the plurality of nozzles are separated into the first nozzle group, the third nozzle group, and the fourth nozzle group in the nozzle sorting step, the third nozzle group or the fourth nozzle group A liquid drawing method characterized by being included. In the liquid drawing method as described in any one of Claim 1 to 3,
In the nozzle classification step, when the plurality of nozzles are classified into the first nozzle group, the third nozzle group, and the fourth nozzle group,
In the discharge amount adjusting step, the discharge amount from the third nozzle group in the designated section on the inner side from both longitudinal ends of each line pattern is set to the third amount in the other section other than the designated section of each line pattern. A liquid drawing method characterized in that it is larger than the discharge amount from a nozzle group. The liquid drawing method according to claim 1,
When the nozzle is moved once in the main scanning direction, which is the other direction relative to the substrate, and liquid is ejected from the nozzle to form the same line pattern on the substrate,
In the nozzle sorting step, when the plurality of nozzles are sorted into the first nozzle group and the second nozzle group,
In the movement in the main scanning direction, while adjusting the discharge amount from the first nozzle group to be different from the discharge amount from the second nozzle group,
In the nozzle classification step, when the plurality of nozzles are classified into the first nozzle group, the third nozzle group, and the fourth nozzle group,
A liquid drawing method, wherein, in the movement in the main scanning direction, the discharge amount from the third nozzle group is adjusted to be different from the discharge amount from the fourth nozzle group. The liquid drawing method according to claim 1 or 5,
When the nozzle is moved once in the main scanning direction, which is the other direction relative to the substrate, and liquid is ejected from the nozzle to form the same line pattern on the substrate,
Except for the nozzles that draw line patterns at both ends in the sub-scanning direction on the substrate, the nozzles that discharge on the outermost side in the one direction in the movement in the main scanning direction are:
When the plurality of nozzles are separated into the first nozzle group and the second nozzle group in the nozzle separation step, the nozzles are included in the second nozzle group,
When the plurality of nozzles are separated into the first nozzle group, the third nozzle group, and the fourth nozzle group in the nozzle sorting step, the third nozzle group or the fourth nozzle group A liquid drawing method characterized by being included. Liquid is discharged from a plurality of nozzles arranged in one direction onto the substrate, and a plurality of line patterns extending in the other direction intersecting the one direction are spaced on the substrate in the one direction. A liquid drawing apparatus formed side by side,
Separating the plurality of nozzles into a first nozzle group forming an edge portion located at an end in the width direction of each line pattern and a second nozzle group other than the first nozzle group, or
A first nozzle group for forming the plurality of nozzles at the edge in the width direction of each line pattern and a third nozzle group for forming a center at the center in the width direction of each line pattern And a nozzle sorting unit for sorting into a fourth nozzle group other than the first and third nozzle groups,
For each nozzle group sorted by the nozzle sorting unit, a discharge amount adjusting unit that adjusts the liquid discharge amount;
A control unit that discharges the liquid of the discharge amount adjusted by the discharge amount adjustment unit from the nozzle onto the substrate while moving the nozzle in the main scanning direction that is the other direction relative to the substrate; A liquid drawing apparatus comprising:   The liquid drawing apparatus according to claim 7, wherein a crystal Si substrate as the substrate is arranged so that a slicing cut direction of the substrate coincides with the main scanning direction, and the liquid drawing apparatus is used, A functional mask for a solar cell, which is produced by applying the liquid onto the substrate to form the line pattern.

Images