JP2012079634A - Manufacturing method of organic el panel and substrate for organic el panel - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a manufacturing method of an organic EL panel in which a functional fluid can be applied exactly along the pixel region of a substrate for the organic EL panel, and to provide a substrate for the organic EL panel used in manufacture of the organic EL panel.SOLUTION: On one surface of substrates 12, 112 for an organic EL panel where a coating film is formed by applying a functional fluid, a coating position confirmation/adjustment region 109 to be coated temporarily with a functional fluid is formed of a liquid-repellent material on the outside of a region becoming a display region 106. When the coating position confirmation/adjustment region 109 is coated temporarily with a functional fluid, the functional fluid is retained in the shape of a sequence of points by liquid repellency thereof, and thereby the actual coating trace of coating can be obtained exactly before regular coating.

Description

  The present invention relates to an organic EL panel manufacturing method and an organic EL panel substrate. In particular, a method for producing an organic EL panel capable of accurately applying a coating liquid (functional liquid) for coating and forming an organic EL layer constituting an organic EL panel to a predetermined position of a substrate in a stripe shape and the organic The present invention relates to an organic EL panel substrate used for manufacturing an EL panel.

  In recent years, organic EL display devices have been actively developed as display devices. The organic EL display device is a display device using an organic EL (Electro Luminescence) material, and has a high display response speed, a wide viewing angle, light emission at a low voltage, and a high contrast ratio. , Is promising.

  There are two types of driving methods for organic EL display devices: passive matrix driving method and active matrix driving method. Which driving method is used depends on various factors such as cost, display performance, display area, current, and switching speed. Selected with consideration.

  An organic EL panel constituting an organic EL display device has an organic EL layer in a light emitting region. The organic EL layer is composed of various layers including at least a light emitting layer. For example, each of the constituent layers such as a hole injection layer, a hole transport layer, a light emitting layer, an electron transport layer, an electron injection layer, and the like are arbitrarily laminated on an ITO electrode serving as an anode. Such an organic EL layer is provided in a predetermined pattern on the substrate.

  As a method for patterning the organic EL layer, a method in which each constituent layer is vacuum-deposited through a shadow mask, each coating solution dissolved in an organic solvent (hereinafter also referred to as “functional solution”) is an inkjet method, a nozzle coating method. , A dispenser method, a gravure printing method, a screen printing method, a letterpress printing method and the like, a method of applying to a predetermined site, a method of removing unnecessary portions by ultraviolet irradiation after forming the entire surface or a large size, and the like. Among these, the ink jet method and the nozzle coating method have high utilization efficiency of materials and are advantageous in terms of manufacturing cost, and thus various studies have been made for practical use. Particularly recently, the nozzle coating method has been actively studied because of its simpler mechanism than the ink jet method and a wide range of applicable ink properties.

  In the nozzle coating method, a functional liquid in which constituent materials are dissolved or dispersed is sent to the nozzle at a constant speed using a constant flow pump, and the nozzle is reciprocated while continuously discharging the liquid from the nozzle. In this method, a substrate is pitch-fed to form a stripe-shaped material pattern. The organic EL panel has a partition pattern that defines electrodes and pixels. In order to arrange a stripe pattern by nozzle coating on a predetermined pattern of electrodes and pixels, accurate angle alignment and alignment (alignment) are performed. )Is required. In the case of a nozzle coating method using a multi-nozzle, it is necessary to adjust and confirm the coating pitch of a plurality of nozzles.

  In addition, the nozzle coating method is often replaced by functional liquid setup change, cleaning, and the like, and it is difficult to strictly align each time. Therefore, after a coating nozzle is positioned to some extent, a functional liquid is actually temporarily applied, a temporarily applied locus is imaged by an imaging means, and a calibration step is performed to calculate the center line of the application locus. Specifically, when the functional liquid is applied in stripes to the organic EL panel substrate, the imaging unit captures a narrow pixel region or a marker indicating the application position of the organic EL panel substrate. The functional liquid is applied to the organic EL panel substrate in a state where the center line is grasped, and the center line of the pixel region is coincident with the center line of the application locus calculated in advance. Thereby, the functional liquid can be more accurately applied to the pixel region.

  As such a method, for example, as described in Patent Document 1, ejection is performed on a coating position confirmation substrate different from the organic EL panel substrate, or, as described in Patent Documents 2 and 3, a nozzle is used. There has been proposed a method of performing ejection by diverting a mask for preventing application to an unnecessary area during application.

  The coating method described in Patent Document 1 is intended to apply the functional liquid to the organic EL panel substrate in advance before applying the functional liquid to the coating area of the organic EL panel substrate for the purpose of accurately applying the functional liquid in a stripe shape. Temporary coating is performed in the X-axis direction of the substrate (described as “main scanning direction” in Patent Document 1), and when a predetermined imaging delay time has elapsed from this temporary coating, two locations are used by using an imaging unit. The application locus is imaged and stored. Then, a deviation amount in the Y-axis direction (described as “sub-scanning direction” in Patent Document 1) between the imaged application locus and each imaging unit is calculated, and an imaging unit is calculated based on the deviation amount. Is moved in the Y-axis direction so that the relative positions of the functional liquid application nozzles with respect to the imaging means are adjusted to be equal to each other. Further, paragraph 0064 of Patent Document 1 describes that the functional liquid can be temporarily applied to an unnecessary area (an area where pixels, wirings, or the like are not formed) of the organic EL panel substrate.

  According to the application method described in Patent Document 1, the flow delay state and the penetration state of the functional liquid after temporary application at two locations are equalized by setting the imaging delay times in the first imaging means and the second imaging means to be equal. In this state, two images can be obtained. Thereby, since the positional relationship between the application locus of the two functional liquids and the imaging unit can be calculated easily and with high accuracy, the relative position of the organic EL panel substrate with respect to the functional liquid application nozzle is It can be adjusted with high accuracy.

JP 2007-185609 A JP 2004-5080 A JP 2004-74050 A

  However, as described in Patent Document 1, even when the imaging delay times in the first imaging unit and the second imaging unit are set to be equal to each other, they are directly applied to the upper surface of the insulating layer on the organic EL panel substrate. When the functional liquid is temporarily applied, the temporarily applied functional liquid wets and spreads unevenly and becomes irregularly fluidized or permeates. Even if such an application locus of the functional liquid having a deformed shape is imaged, a large error occurs between the obtained application locus and the actual application position.

  If a large error has occurred between the imaged application locus and the actual application position, the center line of the application locus calculated based on the application locus will also be greatly deviated from the actual application position. When the calculated center line is made to coincide with the center line of the pixel area on the organic EL panel substrate and the functional liquid is applied, the functional liquid is applied outside the pixel area of the organic EL panel substrate. It will cause a problem that it will be.

  Here, the functional liquid applied to the organic EL panel substrate includes various types of fluid materials that form a light emitting layer, a hole injection layer, a hole transport layer, a hole injection transport layer, and the like, and each has a viscosity. And physical properties such as surface tension are different. The application trajectory is disturbed due to the difference in physical properties, and the center line of the calculated application trajectory includes many measurement errors.

  Furthermore, in the method of Patent Document 1, not only the replacement of the substrate takes time, but also a space for placing the application position confirmation substrate is required. Further, in the methods of Patent Documents 2 and 3, since the mask is frequently used, the surface is not sufficiently cleaned, the wetting and spreading method is non-uniform, and this hinders accurate alignment and nozzle pitch adjustment. There is a problem of causing

  This invention is made | formed in view of the said subject, The objective is more accurate by reducing the difference of a temporary application locus | trajectory and an actual application position about the functional liquid which comprises various organic EL layers. An object of the present invention is to provide an organic EL panel manufacturing method capable of calculating a center line of a coating locus and an organic EL panel substrate used for manufacturing the organic EL panel.

The manufacturing method of the organic EL panel according to the present invention for solving the above-described problem is a functional liquid in which a functional material for an organic EL layer constituting the organic EL panel is dissolved or dispersed on one side of a substrate for an organic EL panel. When the one surface of the organic EL panel substrate is an XY plane, the coating nozzle is used for the organic EL panel. An X carriage that moves in the X-axis direction relative to the substrate, a Y carriage that moves the coating nozzle in the Y-axis direction relative to the organic EL panel substrate, and the organic EL panel substrate The coating film of the functional liquid is formed on one surface of the organic EL panel substrate using a manufacturing means of an organic EL panel having a θ stage that rotates about a rotation axis perpendicular to the one surface. A method of manufacturing a machine EL panel,
Each of the X, Y, and θ carriages of the organic EL panel manufacturing means is operated so that the coating nozzle is formed on a liquid repellent coating position confirmation adjustment region formed on one surface of the organic EL panel substrate. A temporary application step of arranging and temporarily applying the functional liquid while moving the X carriage; an imaging step of imaging the application locus of the temporarily applied functional liquid using the imaging means; and the captured functional liquid A center line calculating step for calculating the center line of the application locus, and the center line of the pixel region on the organic EL panel substrate by moving the Y carriage and the θ carriage, and the center line of the calculated application locus And a main coating step of moving the X carriage to perform the main coating of the functional liquid on the pixel region.

  According to this invention, since the functional liquid is temporarily applied to the coating position confirmation adjustment region formed on one surface of the organic EL panel substrate and having liquid repellency, the temporarily applied functional liquid may spread unevenly. , It is possible to prevent infiltration. Further, depending on the relationship between the liquid repellent physical properties and the functional fluid physical properties, the temporarily applied functional fluid is contracted, and, for example, round droplets are held in a row of dots. Accordingly, it is possible to reduce an error between the center line calculated by imaging the temporary application locus and performing image processing, and the actual application position.

  In the organic EL panel manufacturing method according to the present invention, the organic EL panel manufacturing means includes a plurality of application nozzles and nozzle fine movement means for adjusting intervals between the plurality of application nozzles, and the center line calculating step. The nozzle fine movement means is actuated later and before the alignment step, and the calculated intervals between the center lines of the application trajectories of the plurality of functional liquids are set in the plurality of pixel regions on the organic EL panel substrate. An interval adjusting step for matching with the interval between the center lines is provided.

  According to the present invention, it is possible to reduce an error between a center line calculated by imaging a plurality of temporary application trajectories and performing image processing, and an actual application position.

  An organic EL panel substrate according to the present invention for solving the above-described problems is composed of a liquid-repellent substance for temporarily applying the functional liquid to the outside of the display area on one side of the organic EL panel substrate. An application position confirmation adjustment area is provided.

  According to the present invention, the functional liquid can be provisionally applied to the application position confirmation adjustment region having liquid repellency formed on one surface of the organic EL panel substrate. The functional liquid temporarily applied to the application position confirmation adjustment region having liquid repellency does not cause a problem of uneven spreading or penetration. Further, depending on the liquid repellency, the temporarily applied functional liquid is contracted and the round liquid droplets are held in a state of being connected in a dot sequence. Therefore, when the center line is calculated by imaging the temporary application locus and performing image processing, the error from the actual application position can be reduced.

  According to the organic EL panel manufacturing method and the organic EL panel substrate used for manufacturing the organic EL panel according to the present invention, the application position confirmation adjustment having liquid repellency formed on one surface of the organic EL panel substrate is performed. When the functional liquid is temporarily applied to the area and the center line of the temporary application locus is calculated, the error between the center line of the temporary application locus and the actual application position can be reduced. By performing the main application of the functional liquid using the center line calculated in this way, the functional liquid can be more accurately applied to a predetermined pixel region of the organic EL panel substrate. Further, the functional liquid can be applied without breaking from a predetermined pixel region of the organic EL panel substrate.

  Further, when a plurality of application nozzles are used in the manufacturing means of the organic EL panel, the interval between the nozzles can be adjusted to a predetermined interval more accurately. Then, the functional liquid can be more accurately applied to a predetermined pixel region of the organic EL panel substrate. Further, the functional liquid can be applied without breaking from a predetermined pixel region of the organic EL panel substrate.

It is a block diagram of the manufacturing means used with the manufacturing method of the organic electroluminescent panel which concerns on this invention. It is a top view showing the single side | surface of the organic electroluminescent panel substrate for monochromatic light emission. It is a top view showing embodiment which formed the field for application position check adjustment outside the sealed area. It is a top view represented by embodiment which formed the area | region for application position confirmation adjustment inside the sealing area | region. It is a top view showing the single side | surface of the organic EL panel substrate for multicolor light emission. It is a block diagram of the manufacturing means of the organic electroluminescent panel which is provided with a some application nozzle and can apply | coat a functional liquid simultaneously in multiple lines. It is a flowchart explaining the temporary application | coating process of a functional liquid. It is a figure which shows the example of a display of the temporary application image which imaged the functional liquid temporarily applied. It is a figure which shows the example of a display of the temporary application | coating image which shows the state in which the center line of a temporary application | coating locus | trajectory and the superimpose line correspond. It is a figure which shows the example of a display of the temporary application image at the time of performing temporary application simultaneously using 3 sets of application nozzles. It is a figure which shows the example of a display of a temporary application image which shows the state in which the center line and superimpose line of 3 sets of temporary application locus | trajectories each correspond. It is a flowchart explaining the main application | coating process of a functional liquid. It is a graph showing the experimental result about the relationship between the contact angle of the xylene apply | coated to the application | coating position confirmation adjustment area | region, the width | variety of a temporary application | coating locus | trajectory, and the application | coating pitch of 250 micrometers.

  The structure and operation of the organic EL panel substrate used for manufacturing the organic EL panel of the present invention and the organic EL panel will be described in detail with reference to the drawings. In addition, this invention is not limited to the following embodiment.

[First Embodiment of Manufacturing Method of Organic EL Panel]
(Configuration of manufacturing means)
FIG. 1 is a block diagram of a manufacturing means 10 used in the method for manufacturing an organic EL panel according to the present invention. The organic EL panel manufacturing means 10 shown in FIG. 1 is an embodiment of a manufacturing means provided with one coating nozzle 20 for applying a functional liquid. The “manufacturing means” is used in the sense of a system (manufacturing system), manufacturing (manufacturing apparatus), etc. for manufacturing an organic EL panel by the method according to the present invention, and may be restated in these terms. .

  As shown in FIG. 1, the organic EL panel manufacturing means 10 includes a suction stage 14 for placing and sucking an organic EL panel substrate 12 to be processed, and a rotation perpendicular to one surface of the organic EL panel substrate 12. The suction stage 14 and the organic EL panel substrate 12 are rotated around the axis to position the θ stage 16.

  Further, the manufacturing means 10 of the organic EL panel has the θ stage 16, the suction stage 14, and the organic EL panel substrate 12 in the Y-axis direction (FIG. 1) when one surface of the organic EL panel substrate 12 is an XY plane. The Y carriage 18 that is moved toward the front and back sides of the paper surface, the coating nozzle 20 that coats the functional liquid on one side of the organic EL panel substrate 12, and the coating nozzle 20 with respect to the organic EL panel substrate 12 And an X carriage 22 that moves relatively in the X-axis direction (the horizontal direction of the paper surface shown in FIG. 1 and the scanning direction of the coating nozzle 20). In the embodiment shown in FIG. 1, the θ stage 16 is mounted on the Y carriage 18 and the X carriage 22 moves independently of the Y carriage 18. However, the θ carriage 16 moves on the XY stage. Other combinations such as arranging the stage 16 can also be adopted.

  Further, the organic EL panel manufacturing means 10 includes a nozzle fine movement means 24 for finely moving the coating nozzle 20 in the Y-axis direction, an imaging means 26 for imaging one surface of the organic EL panel substrate 12, and an imaging means 26 in the Y-axis direction. And an imaging fine movement means 28 for fine movement. In the embodiment shown in FIG. 1, the image pickup means 26 for picking up an image of one surface of the organic EL panel substrate 12 is arranged at two locations near both ends along the X axis. As long as it is possible to image the vicinity of both ends along the X axis on one side of the working substrate 12 with high accuracy, the plurality of imaging means 26 need not be arranged.

  The organic EL panel manufacturing means 10 generates a negative pressure based on a command from the control means 90 when adsorbing the organic EL panel substrate 12 to the adsorption stage 14, Based on the decompression generator 40 that releases the negative pressure when releasing the suction, the θ-axis driver 42 that controls the rotation and positioning of the θ stage 16 based on the command of the control unit 90, and the command of the control unit 90 A Y-axis driver 44 that controls the movement and positioning of the Y carriage 18 and an X-axis driver 50 that controls the movement and positioning of the X carriage 22 based on commands from the control means 90 are provided.

  Further, the manufacturing means 10 of the organic EL panel includes a constant flow pump 46 that controls the functional liquid discharged from the coating nozzle 20 based on a command from the control means 90, and a Y-axis for the coating nozzle 20 based on a command from the control means 90. A nozzle Y-axis driver 48 that controls fine movement and positioning in the direction and a camera Y-axis driver 52 that controls fine movement and positioning of the image pickup means 26 in the Y-axis direction based on a command from the control means 90 are provided.

(Control means)
Next, the configuration of the control means 90 shown in FIG. 1 will be described. The control unit 90 includes an image processing unit 951 that converts an imaging signal output from the imaging unit 26 into imaging data, and a keyboard, a switch, or a mouse that allows an operator to input various information to the manufacturing unit 10 of the organic EL panel. Input means 970 composed of, etc., display means 972 for displaying various information such as captured images and characters to the operator, decompression generator 40, θ-axis driver 42, Y-axis driver 44, constant flow pump 46, an I / O 976 for inputting / outputting control signals to / from external devices such as a nozzle Y-axis driver 48, an X-axis driver 50, and a camera Y-axis driver 52.

  The control unit 90 includes an information processing unit (CPU) 980 that controls the entire control unit 90, and a RAM 981 that is a form of a recording unit that serves as a work area when the information processing unit 980 executes processing. A ROM 982 that stores in advance processing programs executed by the information processing means 980, various constants, and the like, and a timer 990 that keeps time are provided.

  The information processing unit 980 in the control unit 90 and the peripheral circuits including the image processing unit 951, the input unit 970, the display unit 972, the I / O 976, the RAM 981, the ROM 982, the timer 990, and the like are connected by a bus 999. Based on a processing program executed by the information processing unit 980, the information processing unit 980 can control each peripheral circuit.

(Organic EL panel substrate for monochromatic light emission)
Next, the configuration of the organic EL panel substrate for monochromatic light emission will be described. FIG. 2 is a plan view showing one surface of an organic EL panel substrate 12 used in an organic EL panel for driving by a passive matrix driving method. As shown in FIG. 2, the organic EL panel substrate 12 is provided on one surface so as to demarcate the first electrode 102 of the anode and the first electrode pixel region 101 (light emitting region) on the first electrode 102. An insulating layer 103 having a predetermined pattern, a partition wall 104 provided on the insulating layer 103, and a transparent second electrode lead-out wiring 107 for a second electrode further formed on an organic EL layer to be formed later are provided. Yes. Here, the case of the passive matrix driving method will be described as an example, but the present invention can be similarly applied to the case of the active matrix driving method.

  As a one-sided coordinate system of the organic EL panel substrate 12 shown in FIG. 2, the horizontal direction of the paper shown in FIG. 2 is defined as the X axis and the vertical direction is defined as the Y axis. On the + X side and the −X side of the first electrode pixel region 101 arranged on one side of the organic EL panel substrate 12, coating markers 108 representing the center of the first electrode pixel region 101 are formed.

  The insulating layer 103 is opened so that the first electrode 102 is exposed to form the first electrode pixel region 101. When the functional liquid is applied on the insulating layer 103 in a stripe shape along the X axis. First, the Y carriage 18 is driven and positioned so that the center of the application marker 108 and the center of the application nozzle 20 coincide. Then, the X carriage 22 is driven while discharging the functional liquid from the application nozzle 20 to move the application nozzle 20 in the X-axis direction, thereby applying the functional liquid.

  In addition, as shown in FIG. 2, an “application position confirmation adjustment region 109” extending in the X-axis direction is provided in an unnecessary region (a region where no pixels, wirings, or the like are formed) on one surface of the organic EL panel substrate 12. It is formed. This application position confirmation adjustment region 109 is used to temporarily apply the functional liquid to the first electrode pixel area 101 before the main application of the functional liquid to image the application locus and calculate the center line of the actual application locus. This is a temporary application region.

  In the present invention, the application position confirmation adjustment region 109 is made of a material having liquid repellency. Conventionally, since the area where the functional liquid is temporarily applied is not made of a material having excellent liquid repellency, the temporarily applied functional liquid flows or permeates irregularly. Then, the shape of the application locus of the temporarily applied functional liquid collapses, and a large error may occur between the temporary application locus obtained by imaging and the actual application position.

  Here, “liquid repellency” refers to liquid repellency with respect to the functional liquid for forming each layer constituting the organic EL layer. Specifically, for example, the functional liquid for hole injection layer formation, hole transport It is liquid repellent with respect to a layer forming functional liquid, a light emitting layer forming functional liquid, and the like. These hole injection layer forming functional liquid, hole transport layer forming functional liquid, light emitting layer forming functional liquid, etc. are usually aromatic hydrocarbons, aromatic esters, aromatic ethers, etc. It is desirable for the solvent to be liquid repellent. The specific value of liquid repellency cannot be limited because it varies depending on the solvent or material used, but when applied with a nozzle on the liquid repellency area, the liquid repellency wets to a width greater than the desired pitch. The standard is not to spread.

  For example, when an organic EL panel substrate in which the application position confirmation adjustment region 109 was made lyophilic was prototyped and an experiment was performed to temporarily apply the functional liquid, the temporary application locus was too wide. I couldn't find it accurately. As a result, accurate alignment could not be performed, so that the ink applied to the pixel area broke down from the partition wall of the pixel area, resulting in a defect in the pixel area. The contact angle of xylene in the coating position confirmation adjustment region used at this time was 12 deg.

  In the present invention, the functional liquid is temporarily applied to the application position confirmation adjustment region 109 having liquid repellency. The functional liquid temporarily applied to the application position confirmation adjustment region 109 maintains a constant shape without flowing or penetrating. Further, depending on the liquid repellency, the applied functional liquid contracts, and the round droplets are held in a state of being connected in a dot array. By this phenomenon, an error between the center line calculated from the application locus obtained by imaging and the actual application position can be reduced. By using the center line of the application locus calculated in this way and making the main application of the functional liquid to coincide with the center line of the pixel area in the organic EL panel substrate, the functional liquid is more accurately applied to the pixel area of the substrate. Can be applied.

  In the embodiment shown in FIG. 2, the application position confirmation adjustment regions 109 are formed in two places on the upper and lower sides of the organic EL panel substrate 12, but are formed on one side of the organic EL panel substrate 12. It may be formed at three or more locations.

  As the configuration of the application position confirmation adjustment region 109, for example, after forming a photoresist pattern, it is made liquid-repellent by plasma treatment with a fluorine-based gas, or contains a liquid-repellent component such as a fluorine-based material The liquid-repellent application position confirmation adjusting region 109 can be formed by using a photo resist or a liquid repellent material formed on the entire surface and then patterned using photocatalytic lithography.

  As described above, the organic EL panel substrate includes the application position confirmation adjustment region 109 (that is, the application position confirmation adjustment region 109 having liquid repellency) for temporarily applying the functional liquid. A functional liquid is applied to a predetermined application region 105 of the organic EL panel substrate. In the present application, as long as the substrate is provided with the application position confirmation adjustment region 109 and is a target to which the functional liquid is to be applied, not only the substrate on which the functional liquid has not yet been applied, but also one on which one or more functional liquids have already been applied. Even so, the substrate to which the functional liquid is applied after being temporarily applied to the application position confirmation adjustment region 109 is also an “organic EL panel substrate” in the present application.

(substrate)
The material, transparency, thickness, and the like of the substrate constituting the organic EL panel substrate 12 are not particularly limited, and those having necessary properties according to the application can be arbitrarily adopted. For example, in addition to inorganic materials such as quartz and glass, polymer materials such as resin materials such as polycarbonate (PC), polyethylene terephthalate (PET), polyethylene naphthalate (PEN), and polyethersulfone (PES) can be used. . Note that a barrier film is preferably formed on these substrates in order to prevent permeation of moisture and oxygen. Whether the substrate is a transparent substrate or an opaque substrate can be arbitrarily selected depending on whether the light extraction side of the organic EL element is the first electrode side, the second electrode side, or both sides.

  The thickness of the substrate is not particularly limited, and various thicknesses can be applied. For example, 10 micrometers or more and 2 mm or less can be illustrated. In particular, a thin one has flexibility, and a thick one has rigidity, each having advantages. The shape of the substrate is not particularly limited, but is preferably a rectangular substrate such as a rectangle, a square, or a parallelogram.

(First electrode)
As shown in FIG. 2, the first electrode 102 is provided on the substrate in a pattern having a predetermined width extending in a stripe shape (strip shape) in the Y-axis direction. Further, the pattern is configured to intersect with a second electrode formed in a later process in a plan view, and the first electrode 102 and the second electrode constitute upper and lower electrodes of the passive matrix organic EL element. . Each striped first electrode 102 applies a drive signal to each first electrode pixel region 101 provided on each first electrode 102. The first electrode 102 and the second electrode constitute a scanning line and a data line, respectively.

  The constituent material of the first electrode 102 is not particularly limited, but a preferable constituent material is selected depending on whether the first electrode 102 is an anode or a cathode. Further, a preferable constituent material is selected depending on whether or not the first electrode 102 is on the light extraction side. Various materials are selected and used as such constituent materials. For example, when the first electrode 102 is an anode that supplies holes to the organic EL layer, the material for forming the first electrode 102 includes a simple metal, an alloy, a conductive metal oxide (transparent conductive film), a conductive inorganic Examples thereof include compounds and conductive polymers. These materials may be used singly or in combination of two or more, or two or more layers may be laminated. Note that ITO and IZO, which are transparent conductive films, are particularly preferably used when light is extracted from the first electrode 102 side with the first electrode 102 having transparency.

  The thickness of the 1st electrode 102 is not specifically limited, It sets suitably according to the electroconductive material to be used. Usually, it is about 50 to 200 nm. Examples of film forming means for the first electrode 102 include physical vapor deposition methods such as chemical vapor deposition, vacuum deposition, sputtering, and ion plating.

(Insulating layer)
As shown in FIG. 2, the insulating layer 103 is provided in a predetermined pattern on the first electrode 102. The insulating layer 103 is provided on each first electrode 102 provided in a predetermined stripe pattern in the Y-axis direction, but the pattern is removed so that each first electrode pixel region 101 becomes an opening. The first electrode 102 is provided so as to be exposed in each first electrode pixel region 101. Specifically, each of the white first electrode pixel regions 101 shown in FIG. 2 is not provided with the insulating layer 103, and the first electrode 102 is exposed. The functional liquid is applied to the stripe-shaped application region 105 where the first electrode pixel regions 101 are arranged in the X-axis direction while moving the application nozzle 20 in the X-axis direction. A partition 104 is provided between the stripe-shaped application region 105 and the adjacent stripe-shaped application region 105. The partition wall 104 is provided over the insulating layer 103.

  The insulating layer 103 has a stripe-like straight line portion extending in the X-axis direction and an opening of each first electrode pixel region 101 (the first electrode 102 is exposed in this opening) between the straight line portions. Have. An organic EL layer and a second electrode are formed in this order on each first electrode pixel region 101 to form a light emitting region. On the other hand, the organic EL layer and the second electrode are also formed on the insulating layer 103. Since this portion is insulated by the insulating layer 103, it becomes a non-light emitting region.

Examples of the material for forming the insulating layer 103 include resin materials such as novolac resins, polyimides, and acrylates, and inorganic materials such as SiO ₂ , Si ₃ N ₄ , and Al ₂ O ₃ . In the case of resin materials, the insulating layer 103 is formed by applying those resin materials over the entire surface. Thereafter, the linear portion and the lattice shape of a predetermined shape are patterned by a photolithography method that performs exposure, development, and the like, thereby forming the insulating layer 103 having the form shown in FIG. In the case of an inorganic material, the inorganic material is patterned by a technique in which etching or lift-off is combined with a photolithography method to form the insulating layer 103 having the form shown in FIG. The thickness of the insulating layer 103 is not particularly limited, and the lower limit is a thickness that can ensure at least insulation, and the upper limit may be a thickness that does not significantly impair the overall flatness. Usually, it is about 0.5 to 3 μm.

(Partition wall)
As shown in FIG. 2, the partition 104 is provided on the insulating layer 103 in the stripe-shaped coating region 105 in the X-axis direction in which the insulating layer 103 extends. The width of the partition 104 in the Y-axis direction is narrower than the width of the insulating layer 103 in the Y-axis direction. For example, the difference between the width of the insulating layer 103 in the Y-axis direction and the width of the partition wall 104 in the Y-axis direction is about 10 to 50 μm.

  A method for forming the partition wall 104 is not particularly limited, and a negative resist or a positive resist is applied and formed on the entire surface, and then exposed and developed by a photolithography method. In the case of using a negative resist, exposure is performed using a mask having an opening corresponding to a portion where the partition wall 104 is left, and after the solubility in the developing solution of the exposed portion is reduced, development is performed with the developer so that the partition wall 104 is formed. Form. On the other hand, when a positive resist is used, exposure is performed using a mask having an opening corresponding to a portion other than the portion where the partition wall 104 is left, and after the solubility in the developing solution in the exposed portion is increased, development is performed with the developing solution. Then, the partition wall 104 is formed. Usually, a negative resist is preferably used.

  The height of the partition 104 is not particularly limited, but the height may be such that the functional liquid applied after the partition 104 is formed does not flow into the adjacent first electrode pixel region 101 beyond the partition 104 or break down. desirable. Such a height cannot be generally specified, but is usually about 0.5 to 5 μm.

  The partition wall 104 may or may not be liquid repellent, but considering that the functional liquid does not flow into the adjacent first electrode pixel region 101 beyond the partition wall 104, Liquid repellency is preferred. The constituent material of the partition wall 104 can be the same as that of the application position confirmation adjustment region 109 described above. For example, after forming a photoresist pattern, plasma treatment with a fluorine-based gas is performed to make it liquid-repellent, a photoresist containing a liquid-repellent component such as a fluorine-based substance, or a liquid-repellent material After the film is formed on the entire surface, the liquid-repellent partition wall 104 can be formed using a material patterned using photocatalytic lithography.

  In addition, the liquid repellency of the partition wall 104 is also similar to that of the application position confirmation adjustment region 109 described above, with respect to the hole injection layer forming functional liquid, the hole transport layer forming functional liquid, the light emitting layer forming functional liquid, and the like. Usually, since the solvent of these functional liquids is aromatic hydrocarbon, aromatic ester, aromatic ether, etc., it is desirable that it is liquid repellent with respect to those solvents.

(Organic EL layer)
The organic EL layer is provided in a coating region 105 sandwiched between partitions on the first electrode 102 in the first electrode pixel region 101 shown in FIG.

  The organic EL layer only needs to have at least a light-emitting layer. A hole injection layer, a hole transport layer, a hole injection transport layer, an electron injection layer, an electron transport layer, an electron injection transport layer, a hole blocking layer, an electron A block layer or the like can be arbitrarily selected and further applied in an arbitrary layered form. The constituent materials of these layers are not particularly limited, and can be arbitrarily selected from known various materials. The layer depends on whether the first electrode 102 is an anode or a cathode, and whether the organic EL element is for full color (see FIG. 5) or monochrome (see FIG. 2). The configuration and the materials selected are different.

  Organic EL layer is a light emitting layer, hole injection layer, hole transport layer, hole injection transport layer, electron injection layer, electron transport layer, electron injection transport layer, hole block layer, electron block layer, etc. Depending on the type, various means such as a coating method, a vapor deposition method, and a CVD method can be selected and formed. Usually, a light emitting layer, a hole injection layer, a hole transport layer, a hole injection transport layer, etc. are often formed by a coating method, and an electron injection layer, an electron transport layer, an electron injection transport layer, etc. are formed by vapor deposition or CVD. Often formed by law. In the present invention, for example, a hole injection layer, a hole transport layer, a hole injection transport layer, a light emitting layer, and the like are applied and formed by a nozzle coating method.

  After applying the light emitting layer, hole injection layer, hole transport layer, hole injection transport layer, etc., the organic EL panel substrate 12 is once removed from the organic EL panel manufacturing means 10 and baked. The process of applying the functional liquid sequentially is repeated. The thickness of the organic EL layer is generally about 100 to 300 nm in a state where the layers are stacked.

(Second electrode)
The second electrode is formed on the organic EL layer after the organic EL layer is formed. Examples of the material for forming the second electrode include simple metals, alloys, conductive metal oxides (transparent conductive films), conductive inorganic compounds, and the like. These materials may be used singly or in combination of two or more, or two or more layers may be laminated.

(Sealing)
After the organic EL layer and the electrode are formed on one surface of the organic EL panel substrate 12, the whole is covered with a sealing material as needed, or a process of attaching a transparent substrate through the sealing material is performed. An epoxy resin or the like can be used as the sealing material. As the transparent substrate, highly transparent glass, polyethersulfone (PES), polyethylene terephthalate (PET), or the like can be used. Of these, those that transmit moisture and oxygen, such as a resin material substrate, preferably have a gas barrier film formed thereon.

  The relationship between the application position confirmation adjustment region 109 formed on the organic EL panel substrate 12 and the sealing region 100 will be described with reference to FIGS. 3 and 4. 3 and 4 are plan views showing one side of the organic EL panel substrate 12.

  The embodiment shown in FIG. 3 is an embodiment in which a coating position confirmation adjustment region 109 is formed outside the sealing region 100 covering the display region 106 formed on one surface of the organic EL panel substrate 12. In the case of this configuration, the application position confirmation adjustment region 109 can be cut and cut off after the sealing process.

  On the other hand, the embodiment shown in FIG. 4 is an embodiment in which the application position confirmation adjustment region 109 is formed inside the sealing region 100 covering the display region 106 formed on one side of the organic EL panel substrate 12. . As shown in FIGS. 3 and 4, the application position confirmation adjustment region 109 can be formed either inside or outside the sealing region 100.

(Organic EL panel substrate capable of multicolor emission)
FIG. 5 illustrates an embodiment of an organic EL panel substrate 112 capable of RGB multicolor light emission. In addition, about the structure similar to the board | substrate 12 for organic EL panels shown in FIG. 2, the same code | symbol is attached | subjected and the description is abbreviate | omitted. In the organic EL panel substrate 12 shown in FIG. 2, an organic EL panel is manufactured by applying the same functional liquid to all the first electrode pixel regions 101. On the other hand, the organic EL panel substrate 112 shown in FIG. 5 has different functions for the stripes of the first electrode pixel regions 101 of R that emits red, G that emits green, and B that emits blue. By applying the liquid, a light emitting region of each color can be formed.

[Second Embodiment of Manufacturing Method of Organic EL Panel]
FIG. 1 shows a block diagram of a manufacturing means 10 used in a method for manufacturing an organic EL panel having one coating nozzle for coating a functional liquid. On the other hand, the manufacturing means shown in FIG. 6 is provided with three sets of coating nozzles 20, and can apply the functional liquid to the three rows of coating areas 105 simultaneously, thereby reducing the time spent on the coating process. It is a block diagram of the manufacturing means 110 of EL panel. In addition, about the structure similar to the structure of the manufacturing means 10 of the organic electroluminescent panel shown in FIG. 1, the same code | symbol is attached | subjected and the description is abbreviate | omitted.

  When the X carriage 22 is provided with a plurality of application nozzles 20 as in the manufacturing means shown in FIG. 6, the interval between the application nozzles 20 in the Y-axis direction is determined by the application marker 108 on the organic EL panel substrate 12. It is necessary to match the interval in the Y-axis direction. However, when the application nozzles 20 are replaced by functional liquid setup change or cleaning, it is difficult to precisely align the intervals between the application nozzles 20 each time.

  Therefore, in the organic EL panel manufacturing means 110 shown in FIG. 6, the fine nozzle moving means 24 is arranged in each application nozzle 20 so that the interval between the application nozzles 20 can be automatically adjusted in the Y-axis direction. ing. In addition, when the functional liquid discharged from the three sets of the coating nozzles 20 is applied to the organic EL panel substrate 112 capable of emitting multiple colors as shown in FIG. 5, the functional liquid dedicated to each color of R, G, and B is used. Can be used. Further, when the functional liquid is applied to the organic EL panel substrate 12 capable of emitting monochromatic light as shown in FIG. 2, the same functional liquid can be discharged from the three sets of the coating nozzles 20.

  In the embodiment shown in FIG. 6, there is shown a configuration in which the nozzle fine movement means 24 is arranged in each of the three sets of application nozzles 20 and all the application nozzles 20 can be finely moved independently in the Y-axis direction. In addition to this, three sets of coating nozzles 20 are mounted at equal intervals on a rod-shaped mounting base that is rotatably supported in the XY plane to form an integrated nozzle. A configuration in which the coating pitch is adjusted by changing the angle from the state parallel to the Y axis toward the X axis in the coating direction can be used. In addition to adopting this integrated nozzle, the nozzle fine movement means 24 can be used in combination.

(Temporary application of functional fluid)
Prior to the main application of the functional liquid to the first electrode pixel area 101, first, the functional liquid is temporarily applied to the application position confirmation adjustment area 109. Then, the application locus of the temporarily applied functional liquid is imaged, and the center line of the application locus is calculated. Next, when the functional liquid is actually applied to the first electrode pixel area 101, the functional liquid main application is performed using the calculated center line of the application locus so as to coincide with the center line of the pixel area on the organic EL panel substrate. I do. The functional liquid provisional application step will be described with reference to the flowchart shown in FIG.

  First, the handled organic EL panel substrate 12 is placed at a predetermined position on the suction stage 14 in step S12 “placement / suction of the organic EL panel substrate on the suction stage” shown in FIG. Then, the information processing unit 980 outputs a command for generating a negative pressure to the decompression generator 40 via the I / O 976. Then, the adsorption stage 14 adsorbs the organic EL panel substrate 12, the organic EL panel substrate 12 is fixed to the adsorption stage 14, and flatness on one side of the organic EL panel substrate 12 is ensured.

  Next, a predetermined alignment marker (not shown) formed on the organic EL panel substrate 12 is imaged using the imaging unit 26, and the information processing unit 980 receives the image data via the image processing unit 951. get. The information processing means 980 detects the position of the imaged alignment marker, and measures the deviation between the XY coordinate axis on one side of the organic EL panel substrate 12 and the XY coordinate axis of the organic EL panel manufacturing means 10. A command for rotating the θ stage 16 is output to the θ-axis driver 42 via the I / O 976, and both XY coordinate axes are aligned. Further, the origin of the organic EL panel substrate 12 is acquired based on the position of the alignment marker, and a command to move the Y carriage 18 via the I / O 976 is output to the Y-axis driver 44, and the organic EL panel substrate is output. The process of positioning 12 at a predetermined place is performed.

  In the next step S14, “the functional liquid is provisionally applied along the X-axis to the application position confirmation adjustment region of the organic EL panel substrate”, the information processing means 980 has the organic EL panel substrate registered in the ROM 982 in advance. 12, a command to move the Y carriage 18 so that the coating nozzle 20 is disposed within the coating position confirmation adjustment region 109 is output to the Y-axis driver 44 via the I / O 976.

  Then, for example, a command to move the X carriage 22 so that the coating nozzle 20 is disposed on the −X side within the range of the coating position confirmation adjustment region 109 is output to the X-axis driver 50 via the I / O 976. Then, the information processing unit 980 outputs a command to move the X carriage 22 in the + X direction at a constant coating speed while outputting a command to discharge the functional liquid to the constant flow pump 46 via the I / O 976. To the X-axis driver 50.

  When the application nozzle 20 is moved to a predetermined position in the application position confirmation adjustment region 109, the information processing unit 980 outputs a command for stopping the discharge operation of the constant flow pump 46 via the I / O 976. Then, a command to stop the X carriage 22 is output to the X-axis driver 50 via the I / O 976. In this way, the temporary application of the functional liquid is completed.

  In the next step S16 “image the provisionally applied functional liquid and calculate the center line of the temporary application locus”, the information processing means 980 (center line calculation means) uses the imaging means 26 to temporarily apply the functional liquid. The information processing unit 980 acquires image data via the image processing unit 951 (imaging process). The information processing unit 980 performs processing for calculating the center line of the temporary application locus from the captured image of the functional liquid.

  Since the temporary application of the functional liquid is performed on the application position confirmation adjustment region 109 having liquid repellency, the temporarily applied functional liquid does not flow or permeate. For example, the liquid droplets are contracted and held in a state in which round droplets are connected in a row of dots. The state is shown in FIG.

  FIG. 8 is a diagram illustrating an example of the temporarily applied image 130 obtained by imaging the temporarily applied functional liquid. As illustrated in FIG. 8, the temporarily applied functional liquid 140 is held in a state of being connected in a dot array. The information processing unit 980 calculates the center line 150 of the temporary application locus of the functional liquid 140 that has been temporarily applied by performing image processing, using a least square method or the like.

  In step S18 shown in FIG. 7, the information processing unit 980 determines that the center line 150 of the temporary application locus is the superimpose line 160 by determining whether the center line of the temporary application locus matches the superimpose line. And whether or not they match within a predetermined tolerance range.

  As shown in FIG. 8, a superimpose line 160 is synthesized and displayed in the left-right direction at the center of the temporary application image 130. In step S <b> 18, the information processing unit 980 determines whether or not the center line 150 of the temporary application locus matches the superimpose line 160 within a predetermined tolerance.

  If the information processing means 980 determines that the center line 150 of the temporary application locus coincides with the superimpose line 160 within a predetermined tolerance, the next step S22 “Multiple application nozzles” is performed. Proceed to the determination of "Do you have it?" On the other hand, if the information processing unit 980 determines that the center line 150 of the temporary application locus does not coincide with the superimpose line 160 within a predetermined tolerance, step S20 “center line of temporary application locus And “superimpose line coincide with each other”. And when the process of step S20 is complete | finished, the process of step S18 is performed again.

  As a display method of the superimpose line 160, (1) a method in which a single-line reticle parallel to the X axis is arranged on the lens portion of the imaging unit 26, and imaging is performed simultaneously with the coating locus, and (2) the imaging unit 26 and the image A method of arranging a line generator between the processing unit 951 and synthesizing (superimposing) a straight line parallel to the X axis into a video signal; (3) an image acquired by the information processing unit 980 from the image processing unit 951; For example, a method of combining a straight line image parallel to the X axis with the data and outputting it to the display means can be used. In the present embodiment, a case where the information processing unit 980 of (3) performs composition will be described.

  As shown in FIG. 8, when the distance between the center line 150 of the temporary application trajectory and the superimpose line 160 exceeds a predetermined tolerance, the temporary application image 130 captured by the information processing unit 980 is displayed. The center line 150 of the temporary application trajectory and the superimpose line 160 are made to coincide with each other so as to be within a predetermined tolerance range. FIG. 9 shows a state where the center line 150 of the temporary application locus and the superimpose line 160 coincide with each other.

  Note that when the superimpose line 160 is synthesized and displayed by the method shown in (1) or (2) above, the information processing unit 980 causes the I / O 976 to finely move the camera Y-axis driver 52. Output the positioning command and move the image pickup means 26 in the Y-axis direction so that the center line 150 of the temporary application trajectory and the superimpose line 160 coincide with each other within a predetermined tolerance. Can do.

  Further, instead of moving the image pickup means 26, the information processing means 980 outputs a command to finely move the I / O 976 with respect to the nozzle Y-axis driver 48 and position the application nozzle 20 in the Y-axis direction. Thus, the center line 150 of the temporary application locus and the superimpose line 160 can be matched with each other within a predetermined tolerance.

  In the next step S22, the information processing unit 980 determines whether or not the organic EL panel manufacturing unit includes a plurality of coating nozzles 20. Since the quantity of the application nozzles 20 is stored in advance in the ROM 982, for example, the information is read and determined. If a plurality of application nozzles 20 are not provided (for example, in the case of the manufacturing means 10 of the organic EL panel shown in FIG. 1), the functional liquid provisional application process shown in FIG. 7 ends.

  On the other hand, when it is determined that the manufacturing means of the organic EL panel includes a plurality of coating nozzles 20 (for example, in the case of the manufacturing means 110 of the organic EL panel shown in FIG. 6), the next step S24 “each organic The process proceeds to the determination of whether the interval of the application locus of the EL functional liquid matches the application marker interval of the organic EL panel substrate.

  FIG. 10 shows a temporary application image 132 when temporary application is simultaneously performed using three sets of application nozzles 20. As shown in FIG. 10, among the three sets of temporarily applied functional liquids 140, 142, and 144, as a result of performing the processing in each of the above steps, the center line 150 of the temporary application locus and the superimpose line 160 have already been obtained. Are consistent.

  The intervals in the Y-axis direction of the superimpose lines 160, 162, and 164 are design values, and coincide with the intervals in the Y-axis direction of the coating markers 108 on the organic EL panel substrate 12 or the organic EL panel substrate 112. The center line of the point sequence of the temporarily applied functional liquid 142 is the center line 152 of the temporary application locus, and the center line of the point sequence of the functional liquid 144 is the center line 154 of the temporary application locus. The center lines 152 and 154 of the temporary application trajectory are calculated using the least square method or the like by image processing performed by the information processing unit 980 similarly to the center line 150 of the temporary application trajectory.

  If the information processing unit 980 determines in step S24 that the interval between the application trajectories of the organic EL functional liquids is equal to the application marker interval of the organic EL panel substrate, the temporary function liquid shown in FIG. The application process is terminated. On the other hand, when it is determined that the interval between the organic EL trajectories does not coincide with the coating marker interval of the organic EL panel substrate as in the case shown in FIG. 10, step S26 “the position of the coating nozzle is set to the organic EL panel. Branches to the process of “Adjust to the application marker interval of the substrate for use”.

  In step S26, the information processing unit 980 (interval adjusting unit) calculates the difference between the center line 152 of the temporary application locus and the superimpose line 162, and the difference between the center line 154 of the temporary application locus and the superimpose line 164. The fine movement amount in the Y-axis direction of the application nozzle 20 (see FIG. 6) is calculated so as to eliminate each difference. The information processing unit 980 outputs a command for finely moving the coating nozzle 20 in the Y-axis direction to the nozzle Y-axis driver 48 via the I / O 976 to operate the nozzle fine movement unit 24 and adjust the interval between the coating nozzles 20. Do.

  Next, in step S28 “move the organic EL panel substrate in the Y-axis direction”, the information processing means 980 sends a command to move the Y carriage 18 in the Y-axis direction via the I / O 976 to the Y-axis driver. 44, the Y carriage 18 is moved and positioned. The movement of the Y carriage 18 at this time is an inching to temporarily apply the functional liquid to the application position confirmation adjustment region 109 again, and therefore the range in which the application nozzle 20 does not exceed the range of the application position confirmation adjustment region 109. Then, the movement amount that does not overlap with the previous temporary application locus is set. If it exceeds the range of the application position confirmation adjustment region 109 above the organic EL panel substrates 12 and 112, the application position confirmation adjustment is formed below the organic EL panel substrates 12 and 112. Region 109 can be used.

  Next, in step S28 “temporarily apply the functional liquid again along the X axis”, the information processing means 980 first places the application nozzle 20 on the −X side within the application position confirmation adjustment region 109. Thus, a command to move the X carriage 22 is output to the X-axis driver 50 via the I / O 976. Then, the information processing unit 980 outputs a command to move the X carriage 22 in the + X direction at a constant coating speed while outputting a command to discharge the functional liquid to the constant flow pump 46 via the I / O 976. To the X-axis driver 50.

  When the application nozzle 20 is moved to a predetermined position in the application position confirmation adjustment region 109, the information processing unit 980 outputs a command for stopping the discharge operation of the constant flow pump 46 via the I / O 976. Then, a command to stop the X carriage 22 is output to the X-axis driver 50 via the I / O 976, and the process of temporarily applying the functional liquid is finished again.

  When the process in step S28 ends, the process in step S24 is executed again to determine whether or not the interval between the application trajectories of each organic EL functional liquid and the application marker interval of the organic EL panel substrate match. FIG. 11 shows a state in which the center lines 150, 152, and 154 of the temporary application locus coincide with the superimpose lines 160, 162, and 164, respectively.

(Main application of functional fluid)
After performing the temporary application of the functional liquid and confirming that the center line of the application locus coincides with the superimpose line, next, the function is applied to the first electrode pixel region 101 of the organic EL panel substrates 12 and 112. The liquid is subjected to a main coating process. The functional liquid main coating process will be described with reference to the flowchart shown in FIG.

  First, in step S42 shown in FIG. 12, “the organic EL panel substrate is moved in the Y-axis direction so that the superimpose line coincides with the application marker at the application start position”, the information processing means 980 moves the Y carriage 18 By moving, the superimpose line 160 is moved to the position of the application marker 108 to perform alignment (positioning step). Then, the center line of the application marker 108 and the superimpose line 160 are matched with each other within a predetermined tolerance.

  Next, in step S44 “application of the functional liquid to the stripe pattern of the organic EL panel substrate”, the information processing means 980 first sets the application nozzle 20 to X (minus) X side of the stripe pattern X The carriage 22 is moved. Next, the X carriage 22 is moved in the + (plus) X direction at a constant application speed while discharging the functional liquid from the application nozzle 20.

  Thereafter, in step S44 “Applying functional liquid to stripe pattern of organic EL panel substrate”, information processing means 980 moves Y carriage 18 by the coating pitch after moving application nozzle 20 to a predetermined position. Then, the X carriage is scanned in the −X direction, the functional liquid is applied to the next stripe pattern, and the Y carriage 18 is moved by the coating pitch. By repeating this, the functional liquid is applied to all necessary stripe patterns. The coating pitch (pitch for moving the Y carriage) and the number of coatings are specified in advance in the apparatus. When the specified number of coatings are completed, the functional liquid main coating process is terminated, and the process proceeds to the next baking process.

(Functional liquid used for substrate for organic EL panel for monochromatic light emission and baking process)
Next, each functional liquid applied to the organic EL panel substrate 12 for monochromatic light emission and an example of the baking process will be described.

(Hole injection layer)
As a functional liquid of the hole injection layer formed on the organic EL panel substrate for monochromatic light emission, for example, a functional liquid in which molybdenum hexacarbonyl is dissolved in ethyl benzoate can be used. In the baking step, the organic EL panel substrate 12 on which the application of the functional liquid has been completed is moved to a vacuum dryer, and the solvent is dried by exhausting with a pump. Next, the substrate is placed on a hot plate at 200 ° C. and baked for about 1 hour.

(Hole transport layer)
As a functional liquid for the hole transport layer formed on the organic EL panel substrate for monochromatic light emission, for example, poly [(9,9-dioctylfluorenyl-2,7-diyl)-which is a conjugated polymer material. co- (4,4 ′-(N- (4-sec-butylphenyl)) diphenylamine)] (TFB) and a low-molecular compound 2-methyl-9,10 bis (naphthalen-2-yl) anthracene ( MADN) can be used in a functional solution in which ethyl benzoate is dissolved.

  In the baking step, the organic EL panel substrate 12 on which the application of the functional liquid has been completed is moved to a vacuum dryer, and the solvent is dried by reducing the pressure. Next, nitrogen substitution was performed, and the organic EL panel substrate 12 was moved into a glove box in which the oxygen and moisture concentrations were kept at 1.0 ppm or less, and baked on a hot plate at 200 ° C. for 1 hour. To do.

(Light emitting layer)
For example, 1-tert-butyl-perylene (TBP) is contained as a light-emitting dopant as a functional liquid of a light-emitting layer formed on a substrate for an organic EL panel for monochromatic light emission, and 2-methyl-9,10 bis (naphthalene- An ethyl benzoate solution containing 2-yl) anthracene (MADN) as a host can be used.

  In the baking step, the organic EL panel substrate 12 on which the application of the functional liquid has been completed is moved to a vacuum dryer, and the solvent is dried by reducing the pressure. Next, nitrogen substitution is performed, and the organic EL panel substrate 12 is moved into a glove box in which the oxygen and moisture concentrations are kept at 1.0 ppm or less, and the baking is performed on a hot plate at 110 ° C. for 30 minutes. To do.

(Vapor deposition / sealing process)
Next, the organic EL panel substrate 12 is moved from the glove box to the vapor deposition machine. Then, Alq3 is deposited as an electron transport layer, lithium fluoride as an electron injection layer is deposited on the entire surface of the display region, and Al is deposited as a second electrode by mask deposition.

  Next, the organic EL panel substrate 12 is moved to GB, a dehydrating oxygen scavenger is attached to the countersink of the sealing glass on which the countersink is formed, and a UV curable epoxy resin adhesive is applied to the frame, It is bonded to the EL panel substrate 12. A mask is applied so that UV light is not irradiated to the display area, and the UV curable resin is cured by UV irradiation to seal the display area.

(Functional liquid and baking process used for organic EL panel substrates for multicolor light emission)
Next, each functional liquid applied to the organic EL panel substrate 112 for multicolor emission and an example of the baking process will be described.

(Hole injection layer)
As a functional liquid for the hole injection layer formed on the organic EL panel substrate for multicolor emission, for example, a functional liquid in which molybdenum hexacarbonyl is dissolved in ethyl benzoate can be used. In the baking step, the organic EL panel substrate 112 that has been applied with the functional liquid is moved to a vacuum dryer, and the solvent is dried by exhausting it with a pump. Next, the organic EL panel substrate 112 is placed on a 200 ° C. hot plate and baked for 1 hour.

(Hole transport layer)
As a functional liquid of a hole transport layer formed on a substrate for organic EL panel for multicolor emission, for example, poly [(9,9-dioctylfluorenyl-2,7-diyl) which is a conjugated polymer material -Co- (4,4 '-(N- (4-sec-butylphenyl)) diphenylamine)] (TFB) and 2-methyl-9,10 bis (naphthalen-2-yl) anthracene which is a low molecular compound A functional liquid in which (MADN) is dissolved in ethyl benzoate can be used.

  In the baking process, the organic EL panel substrate 112 that has been applied with the functional liquid is moved to a vacuum dryer and the solvent is dried by reducing the pressure. Next, nitrogen substitution was performed, and the organic EL panel substrate 112 was moved into a glove box in which the oxygen and moisture concentrations were kept at 1.0 ppm or less, and baked on a hot plate at 200 ° C. for 1 hour. To do.

(Light emitting layer)
As a functional liquid for a blue light emitting layer to be formed on a multicolor organic EL panel substrate, for example, 1-tert-butyl-perylene (TBP) is contained as a luminescent dopant, and 2-methyl-9,10 bis is contained. An ethyl benzoate solution containing (naphthalen-2-yl) anthracene (MADN) as a host can be used.

  In addition, Bis (2-phenylpyridine) (acetylacetonate) iridium (II) is contained as a luminescent dopant as a functional liquid for the green light-emitting layer, and 4,4′-Bis (9-carbazolyl) -2,2′-dimethylbiphenyl is contained. An ethyl benzoate solution contained as a host can be used.

  Moreover, Bis (1-phenylisoquinoline) (acetylacetonate) iridium (III) is contained as a luminescent dopant as a functional liquid for the red light emitting layer, and 4,4′-Bis (9-carbazolyl) -2,2′-dimethylbiphenyl is contained. An ethyl benzoate solution contained as a host can be used. In addition, using the manufacturing means 110 of an organic EL panel provided with three sets of coating nozzles 20 as shown in FIG. 6, the functional liquids for the light emitting layers of blue, green, and red are separately supplied from the respective coating nozzles 20. It is possible to apply the light emitting layers of three colors at a time by applying to the above.

  In the baking process, the organic EL panel substrate 112 that has been applied with the functional liquid is moved to a vacuum dryer and the solvent is dried by reducing the pressure. Next, nitrogen substitution is performed, and the organic EL panel substrate 112 is moved into a glove box in which the oxygen and moisture concentrations are kept at 1.0 ppm or less, and the baking is performed on a hot plate at 110 ° C. for 30 minutes. To do.

(Vapor deposition / sealing process)
Next, the organic EL panel substrate 112 is moved from the glove box to the vapor deposition machine. Then, Alq3 is deposited as an electron transport layer, lithium fluoride as an electron injection layer is deposited on the entire surface of the display region, and Al is deposited as a second electrode by mask deposition.

(Water repellency and effect of application position confirmation adjustment area)
For example, when the organic EL panel substrate 12 for monochromatic light emission in which the portion 109 for application position confirmation adjustment is changed to be lyophilic and the functional liquid temporary application step shown in FIG. Since the temporary application locus of the applied functional liquid was too wide, the center line 150 of the temporary application locus could not be accurately calculated.

  As a result, the superimpose line 160 and the actual application locus have shifted. Subsequently, the functional liquid main application step shown in FIG. 12 is performed, and when the functional liquid is applied to the first electrode pixel region 101 with the superimpose line 160 aligned with the application marker 108, the functional liquid is separated from the partition wall. The breakdown phenomenon that frequently flows into the adjacent first electrode pixel region 101 beyond 104 occurs frequently. Note that the contact angle of xylene applied to the coating position confirmation adjustment region 109 at this time was 12 deg.

  Next, FIG. 13 shows the experimental results regarding the relationship between the contact angle of xylene applied to the application position confirmation adjustment region 109, the width of the temporary application locus, and the applicability of the application pitch of 250 μm. FIG. 13 is a chart showing experimental results when the light emitting layer forming ink is used as the functional liquid and coating is performed under conditions of a flow rate of 110 μl / min and a movement speed of the coating nozzle 20 of 3 m / sec.

  According to the experimental results shown in FIG. 13, when the application pitch of the functional liquid applied to one side of the organic EL panel substrates 12 and 112 is 250 μm, the contact angle of xylene in the application position confirmation adjustment region 109 is 40 degrees. It is preferable that the liquid repellency is as described above. More preferably, the liquid crystal display device has a liquid repellency such that the contact angle of xylene in the application position confirmation adjustment region 109 is 47 degrees or more.

DESCRIPTION OF SYMBOLS 10 Organic EL panel manufacturing means 12 Organic EL panel substrate 14 Adsorption stage 16 θ stage 18 Y carriage 20 Coating nozzle 22 X carriage 24 Nozzle fine movement means 26 Imaging means 28 Fine movement means 40 Decompression generator 42 θ axis driver 44 Y axis driver 46 Constant flow pump 48 Y-axis driver 50 X-axis driver 52 Camera Y-axis driver 90 Control means 100 Sealing area 101 First electrode pixel area 102 First electrode 103 Insulating layer 104 Partition 105 Coating area 106 Display area 107 Second electrode extraction Wiring 108 Application marker 109 Application position confirmation adjustment region 112 Organic EL panel substrate 130 Temporary application image 140, 142, 144 Temporarily applied functional liquid 150, 152, 154 Center lines 160, 162, 164 of temporary application locus In 951 the image processing unit 970 input unit 972 display unit 976 I / O
980 Information processing means (center line calculating means, interval adjusting means)
981 RAM
982 ROM
990 timer 999 bus

Claims (3)

An application nozzle that applies a functional liquid in which a functional material for an organic EL panel is dissolved or dispersed on one surface of a substrate for an organic EL panel;
When the imaging means for imaging the application locus of the applied functional liquid and one surface of the organic EL panel substrate is an XY plane, the application nozzle is relatively X-axis with respect to the organic EL panel substrate. An X carriage to move in the direction;
A Y carriage that moves the coating nozzle in the Y-axis direction relative to the organic EL panel substrate;
A θ stage for rotating the organic EL panel substrate about a rotation axis perpendicular to the one surface;
In the manufacturing method of the organic EL panel which forms the coating film of the functional liquid on one side of the substrate for the organic EL panel, using the manufacturing means of the organic EL panel having
Each of the X, Y, and θ carriages of the manufacturing means of the organic EL panel is operated so that the application nozzle is formed on one surface of the organic EL panel substrate and has a liquid repellency application position confirmation adjustment region. A temporary application step of arranging and temporarily applying the functional liquid while moving the X carriage;
An imaging step of imaging the application locus of the temporarily applied functional liquid using the imaging means;
A center line calculating step of calculating a center line of the application locus of the imaged functional liquid;
An alignment step of moving the Y carriage and the θ stage so that the center line of the pixel region in the organic EL panel substrate matches the center line of the calculated application locus;
A main coating step of moving the X carriage to perform the main coating of the functional liquid on the pixel region;
The manufacturing method of the organic electroluminescent panel characterized by including. The manufacturing means of the organic EL panel is:
A plurality of application nozzles for simultaneously applying the functional liquid to a plurality of the pixel regions;
Nozzle fine movement means for adjusting an interval in the Y-axis direction between the plurality of application nozzles;
With
After the center line calculation step and before the alignment step, the nozzle fine movement means is operated to determine the intervals between the calculated center lines of the application traces of the plurality of functional liquids in the organic EL panel substrate. The manufacturing method of the organic electroluminescent panel of Claim 1 which has the space | interval adjustment process matched with the space | interval of the centerlines of several pixel area | regions. In a substrate for organic EL panel that applies a functional liquid in which a functional material for organic EL panel is dissolved or dispersed and forms a coating film thereof,
For an organic EL panel, comprising an application position confirmation adjustment region made of a liquid repellent material for temporarily applying the functional liquid outside a display region on one side of the organic EL panel substrate substrate.

Images