JP2012077867A - Gasket holder and fluid controller using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a gasket holder capable of positioning a gasket in a prescribed place and precluding slipping off thereof, and provide a fluid controller using such a holder.SOLUTION: The gasket holder holds the gasket installed between the first and second passages between the joining surfaces of a first member having a first passage, and a second member joined with the first member and having a second passage in communication with the first passage. The gasket holder further includes a gasket holding piece 61 to hold the outer periphery of the gasket 51 between the joining surfaces of the first and second members, a coupling piece 65 provided at one end of the gasket holding piece 61, and a nipping piece 66 installed facing the gasket holding piece 61 via the coupling piece 65 for nipping and holding the second member.

Description

  The present invention relates to a gasket holder for holding a gasket interposed between flow paths communicating with each other and a fluid control apparatus using the gasket holder.

  As a device for controlling the supply of fluid such as gas in semiconductor manufacturing facilities, etc., an integrated gas stick in which a plurality of fluid control devices are connected in a row, or an integrated gas in which a large number of these integrated gas sticks are arranged in parallel on a base plate Panels are known.

  For example, a plurality of fluid control devices are arranged in a row on the mounting plate, and a flow path block is disposed between the mounting plate and the fluid control device between adjacent fluid control devices. An integrated valve (integrated gas stick) that allows fluid to flow through adjacent fluid control devices is known (see Patent Document 1).

In general, a gasket held by a gasket holder is disposed between the joint surfaces of the fluid control device and the flow path block.
Conventionally, as shown in FIG. 6, the gasket holder used between this type of joining surfaces is flat and has a gasket holding hole 71 for holding the gasket 51 at the center, and on both sides sandwiching the gasket holding hole 71. This is a structure in which an insertion hole 72 through which the tightening bolt is inserted is formed (see, for example, Non-Patent Document 1). Three engaging claws 73 that protrude into the insertion hole 72 and engage with the thread groove of the tightening bolt are formed at 120 ° intervals of the insertion hole 72.

  As shown in FIG. 7, the first member 81 having the first flow path 81A and the second member 82 having the second flow path 82A joined to the first member 81 and communicating with the first flow path 81A are joined. When the gasket 51 held by the gasket holder 70 is disposed between the first flow path 81A and the second flow path 82A, the gasket holder 70 holding the gasket 51 on the joint surface of the second member 82 is disposed between the surfaces. The fastening bolt 50 is inserted through the insertion holes 82B on both sides of the second member 82, and the thread groove of the fastening bolt 50 is screwed into the engagement claw 73 of the gasket holder 70. Then, the gasket holder 70 is held on the joint surface of the second member 82 by the two tightening bolts 50, and the gasket 51 is positioned in the second flow path 82A.

  In this state, when the second member 82 is positioned right above the first member 81 and then the fastening bolt 50 is screwed into the screw hole 81B of the first member 81, the first member 81 and the second member The member 82 is joined, the gasket holder 70 is held between these joining surfaces, and the gasket 51 held by the gasket holder 70 is interposed between the first flow path 81A and the second flow path 82A. Retained. Thereby, the gap between the first flow path 81A and the second flow path 82A is sealed.

JP 2003-65462 A

Microflex Technologies Catalog “Low Flow Sealing Systems” [online] [Search June 8, 2010] <Internet URL: http://www.microflexseals.com/products_catalog.htm>

  However, in the conventional structure, when the gasket holder 70 is held on the joint surface of the second member 82 with the two tightening bolts 50 during assembly, the thread groove of the tightening bolt 50 is engaged with the engaging claw 73 of the gasket holder 70. Therefore, the gasket holder 70 may be held with an inclination with respect to the joint surface of the second member 82. As a result, the gasket 51 is also displaced from the positions of the first flow path 81A and the second flow path 82A. As a result, a leak failure is likely to occur.

Further, during maintenance, when the two fastening bolts 50 are removed from the first member 81 and the second member 82 is removed from the first member 81, the fastening bolt 50 is removed from the screw hole 81B of the first member 81. Rotate in the direction. When the tightening bolt 50 is detached from the first member 81 and then further rotated, the tightening bolt 50 is also detached from the engaging claw 73 of the gasket holder 70, so that there is a problem that the gasket holder 70 falls off.
In particular, in the case of a fluid control apparatus in which this kind of fluid control device is integrated, there is only a narrow gap between the fluid control devices. Therefore, when the gasket holder 70 falls off and enters this gap, it can be taken out. Extremely difficult.

  An object of the present invention is to provide a gasket holder and a fluid control apparatus using the gasket holder that can solve the conventional problems and can position the gasket at a predetermined position and prevent the gasket from dropping off.

  The gasket holder of the present invention includes a first member having a first flow path and a bonding surface between a second member having a second flow path joined to the first member and communicating with the first flow path. A gasket holder for holding a gasket disposed between a first flow path and a second flow path, the gasket holding for holding an outer periphery of the gasket between joint surfaces of the first member and the second member. A piece, a connecting piece provided at one end of the gasket holding piece, and a clamping piece provided to face the gasket holding piece via the connecting piece and sandwich the second member. It is characterized by having.

According to the present invention, the second member includes the gasket holding piece portion that holds the outer periphery of the gasket, and the sandwiching piece portion that is provided on the gasket holding piece portion so as to face the gasket holding piece portion via the connecting piece portion. Therefore, the gasket can be accurately positioned at a predetermined position with respect to the second member, that is, the second flow path position. Therefore, since the gasket can be accurately positioned between the first flow path and the second flow path that are communicated with each other during assembly, it is possible to solve the problem that the position of the gasket is shifted and a leak failure occurs.
Further, even when the first member and the second member are separated at the time of maintenance or the like, the gasket holding piece portion is provided on the gasket holding piece portion so as to face the gasket holding piece portion via the connecting piece portion. Since the second member is sandwiched by the sandwiching piece portion, the gasket holder and the gasket can be prevented from falling off from the second member.

In the gasket holder of the present invention, it is preferable that the gasket holding piece portion, the connecting piece portion, and the sandwiching piece portion are formed by bending a single plate having elasticity into a U shape.
According to the present invention, the gasket holding piece portion, the connecting piece portion, and the sandwiching piece portion are formed by bending a single plate having elasticity into a U shape, and thus can be manufactured by press bending. Therefore, it can be configured easily and inexpensively.

  In the gasket holder of the present invention, a gasket holding hole for holding the gasket is formed in the approximate center of the gasket holding piece portion, and the gasket holding piece portion and the sandwiching piece portion are centered on the gasket holding hole. Insertion holes for fastening bolts for fixing the first member and the second member on both sides are formed, and among the insertion holes formed in the gasket holding piece part and the insertion piece part, It is preferable that at least one of the insertion holes is formed with three engaging claws that project into and engage with the thread groove of the tightening bolt.

According to this invention, the gasket holding piece portion and the sandwiching piece portion are formed with the insertion holes for the tightening bolts on both sides centering on the gasket holding hole. It can fix to the 1st member and the 2nd member on both sides centering on a hole. Therefore, the gasket held in the gasket holding hole can be positioned in a correct posture without being inclined.
Further, among the insertion hole formed in the gasket holding piece part and the insertion hole formed in the holding piece part, the inner peripheral surface of at least one insertion hole protrudes into and engages with the screw groove of the tightening bolt 3. Since the two engaging claws are formed, the gasket holding piece portion or the holding piece portion can be positioned with reference to the fastening bolt. Therefore, the gasket can also be accurately positioned at a predetermined position.

The fluid control device according to the present invention is a fluid control device that controls a fluid through a plurality of fluid control devices arranged in a row, and a surface on which a fluid flow path of the fluid control device is formed, and a member joined to the surface. The gasket held by any one of the gasket holders is disposed between the surface and the surface.
According to the present invention, in the fluid control apparatus that controls the fluid through a plurality of fluid control devices arranged in a line, the gasket can be positioned at a predetermined position and can be prevented from falling off.

1 is a partially cutaway front view showing an embodiment of a fluid control device according to the present invention. The top view of embodiment same as the above. Sectional drawing which shows the junction part of a massflow controller and a flow-path block in embodiment same as the above. The perspective view which shows the gasket holder of embodiment same as the above. FIG. 5 is a sectional view taken along line VV in FIG. 2. The perspective view which shows the conventional gasket holder. The figure at the time of arrange | positioning the gasket hold | maintained at the conventional gasket holder.

This embodiment is an example applied to an integrated gas stick that controls fluid (gas) through a plurality of fluid control devices arranged in a line.
<Description of integrated gas stick>
As shown in FIGS. 1 and 2, the integrated gas stick includes a base plate 1 and a plurality of fluid control devices arranged in a line on the base plate 1, here, a manual valve 2, an air valve 3, and a mass flow controller. 4, a plurality of flow path blocks 11, 12, 13, 14, 15, 16 disposed between the air valve 5 and the manual valve 6 and the fluid control devices adjacent to each other between the fluid control device and the base plate 1. A pipe 17 that is connected to the flow path block 11 on the start end side of the flow path blocks 11 to 16 and supplies the fluid to the manual valve 2 via the flow path block 11, and a terminal side of the flow path blocks 11 to 16 And a pipe 18 for supplying fluid from the manual valve 6 to a semiconductor manufacturing facility or the like.

  The manual valves 2 and 6 include a manual valve body 21 and a joint portion 22 provided at the lower part of the manual valve body 21. The manual valve main body 21 has a structure in which the valve 21A is moved up and down with respect to a valve seat 24 described later by manual operation. The joint portion 22 is formed with a mounting hole 23 and a valve seat 24 for attaching the lower end portion of the manual valve main body 21 at the center position on the upper surface, and communicates with each other via the valve seat 24 and is connected to the joint portion 22. A fluid inflow passage 25A and a fluid outflow passage 25B are formed in the lower surface. An internal thread is formed on the inner peripheral surface of the mounting hole 23.

  The air valves 3 and 5 include an air valve main body 31 and a joint portion 32 provided at a lower portion of the air valve main body 31. The air valve main body 31 has a structure in which the valve 31A is moved up and down with respect to a valve seat 34, which will be described later, by controlling air supply / cutoff. The joint portion 32 is formed with a mounting hole 33 and a valve seat 34 for attaching the lower end portion of the air valve main body 31 at the center position on the upper surface, and communicates with each other through the valve seat 34 and at the same time. A fluid inflow passage 35A and a fluid outflow passage 35B are formed in the lower surface.

  The mass flow controller 4 includes a mass flow controller main body 41 and a joint portion 42 provided on the mass flow controller main body 41 and having protrusions 42A and 42B that protrude in the front-rear direction of the arrangement from the mass flow controller main body 41. Although the detailed structure of the mass flow controller main body 41 is not shown, the flow rate detection unit that detects the flow rate of the fluid is compared with the flow rate detected by the flow rate detection unit and the set flow rate, and the detected flow rate is the set flow rate. And a control unit for controlling the flow rate of the fluid. The joint portion 42 communicates with the mass flow controller main body 41 and includes a fluid inflow passage 45A and a fluid outflow passage 45B as second flow passages opened on the lower surfaces of the protruding portions 42A and 42B of the joint portion 42.

  The channel block 11 is formed with an L-shaped channel 11 </ b> A that connects the pipe 17 and the fluid inflow channel 25 </ b> A of the manual valve 2. In the flow path block 12, a flow path 12A that connects the fluid outflow path 25B of the manual valve 2 and the fluid inflow path 35A of the air valve 3 is formed in a V shape. In the flow path block 13, a flow path 13 </ b> A is formed in a V shape as a first flow path that connects the fluid outflow path 35 </ b> B of the air valve 3 and the fluid inflow path 45 </ b> A of the mass flow controller 4. . In the flow path block 14, a flow path 14 </ b> A is formed in a V shape as a first flow path that connects the fluid outflow path 45 </ b> B of the mass flow controller 4 and the fluid inflow path 35 </ b> A of the air valve 3. . In the flow path block 15, a flow path 15A that connects the fluid outflow path 35B of the air valve 3 and the fluid inflow path 25A of the manual valve 2 is formed in a V shape. The channel block 16 is formed with an L-shaped channel 16 </ b> A that connects the fluid outlet channel 25 </ b> B of the manual valve 2 and the pipe 18.

Each flow path block 11-16 and each fluid control device (manual valve 2, air valve 3, mass flow controller 4, air valve 5, manual valve 6) have two tightening bolts at the part where they are stacked one above the other. 50 is fixed to the base plate 1.
In addition, between the flow paths that communicate with each other between the joint surfaces of each flow path block 11 to 16 and each fluid control device (manual valve 2, air valve 3, mass flow controller 4, air valve 5, manual valve 6). The gasket 51 is arranged. Here, the gasket 51 disposed between the joining surfaces of the mass flow controller 4 and the flow path blocks 13 and 14 is disposed while being held by the gasket holder 60 as shown in FIG.

  As shown in FIG. 4, the gasket holder 60 is a gasket holding piece for holding the outer periphery of the gasket 51 between the joint surfaces of the flow path blocks 13 and 14 as the first member and the mass flow controller 4 as the second member. 61, a connecting piece 65 provided at a right angle at one end of the gasket holding piece 61, and a holding piece 66 provided at a right angle to the tip of the connecting piece 65 and opposed to the gasket holding piece 61 Are formed in an L-shape. Specifically, a sheet of elastic material having a rectangular shape with a thickness sufficiently smaller than the thickness of the gasket 51 and a width dimension substantially the same as the width dimension of the joint portion 42 of the mass flow controller 4 is copied. The gasket holding piece portion 61, the connecting piece portion 65, and the sandwiching piece portion 66 are formed by being bent into a letter shape.

The gasket holding piece portion 61 has a gasket holding hole 62 for holding the gasket 51 at approximately the center thereof, and three holding claws 63 protruding into the gasket holding hole 62 at 120 ° intervals of the gasket holding hole 62. Insertion holes 64 for the fastening bolts 50 are provided on both sides of the holding hole 62. In addition, slits are formed on both sides of the two holding claws 63 out of the three holding claws 63 so that they can be greatly elastically deformed. The insertion hole 64 is formed in a shape opened on both sides of the gasket holding piece 61.
The connecting piece portion 65 is formed so that the height dimension is substantially the same as the height dimension of the joint portion 42 of the mass flow controller 4.
The clamping piece portion 66 includes insertion holes 67 for the tightening bolts 50 on both sides, that is, on both sides centered on the insertion hole 64 formed in the gasket holding piece portion 61. Three arcuate engagement claws 68 that protrude into the insertion hole 67 and engage with the thread groove of the tightening bolt 50 are formed at positions at intervals of 120 ° on the inner peripheral surface of the insertion hole 67.

<Description of assembly and disassembly method>
In assembling, the flow path blocks 11 to 16 are arranged on the base plate 1, and the fluid control device, that is, the manual valve 2, the air valve 3, the mass flow controller 4 and the air flow so as to straddle these flow path blocks 11 to 16. Valves 5 and manual valves 6 are arranged in a row.
At this time, between each flow path block 11-16 and each flow control apparatus (manual valve 2, air valve 3, mass flow controller 4, air valve 5, manual valve 6) between the flow paths mutually connected. The gasket 51 is disposed in advance.

As for the gasket 51 disposed between the joining surfaces of the mass flow controller 4 and the flow path blocks 13 and 14, first, as shown in FIG. 4, the gasket 51 is disposed in the gasket holding hole 62 of the gasket holder 60. At the same time, the outer peripheral groove 51 </ b> A of the gasket 51 is held by the three holding claws 63.
The gasket holder 60 in this state is sandwiched between the protruding portions 42 </ b> A and 42 </ b> B of the joint portion 42 of the mass flow controller 4. That is, the upper and lower surfaces of the projecting portions 42A and 42B are sandwiched between the gasket holding piece portion 61 and the sandwiching piece portion 66 of the gasket holder 60. Thereafter, the mass flow controller 4 is overlaid on the flow path blocks 13 and 14.

  In this way, after each fluid control device (manual valve 2, air valve 3, mass flow controller 4, air valve 5, manual valve 6) is disposed across each flow path block 11-16, each of the two tightening devices is tightened. When the attached bolt 50 is screwed to the base plate 1 through each fluid control device and the flow channel blocks 11 to 16, the upper surface of each flow channel block 11 to 16 and each fluid control device (manual valve 2, air valve 3, mass flow controller 4, Since the gasket 51 inserted between the flow paths communicating with each other is compressed at the joint surface with the lower surface of the air valve 5 and the manual valve 6), the flow paths can be reliably sealed.

  At this time, as shown in FIG. 5, the gasket holder 60 is made of a plate material that is sufficiently thinner than the thickness of the gasket 51, so that the gasket 51 interposed between the mass flow controller 4 and the flow path blocks 13 and 14. Can also be reliably compressed. That is, it is possible to reliably seal between the flow paths 13A and 45A and between the flow paths 45B and 14A.

On the other hand, when removing the mass flow controller 4 for maintenance or the like, the mass flow controller 4 can be separated from the flow path blocks 13 and 14 by loosening the fastening bolts 50 and removing them from the base plate 1.
At this time, the gasket holder 60 sandwiches the protruding portions 42A and 42B of the joint portion 42 of the mass flow controller 4, so that the gasket holder 60 does not come off the joint portion 42 of the mass flow controller 4. Therefore, it is possible to prevent the gasket 51 held by the gasket holder 60 from falling off.

<Effect of embodiment>
(1) According to the gasket holder 60 of the present embodiment, the gasket holding piece portion 61 that holds the outer periphery of the gasket 51, and the gasket holding piece portion 61 is opposed to the gasket holding piece portion 61 via the connecting piece portion 65. The sandwiching piece portion 66 provided in this manner sandwiches the protrusions 42A and 42B of the joint portion 42 of the mass flow controller 4, so that the gasket 51 is positioned at a predetermined position relative to the joint portion 42 of the mass flow controller 4, that is, The channel 45A, 45B can be accurately positioned. Therefore, since the gasket 51 can be accurately positioned between the flow paths 13A and 45A and the flow paths 45B and 14A that are communicated with each other during assembly, the position of the gasket 51 is shifted and the problem of leakage failure is solved. it can.

(2) Even when the mass flow controller 4 is separated from the flow path blocks 13 and 14 during maintenance, etc., the gasket holding piece 61 is connected to the gasket holding piece 61 via the connecting piece 65. Since the sandwiched piece portion 66 sandwiches the protruding portions 42A and 42B of the joint portion 42 of the mass flow controller 4, it is possible to prevent the gasket holder 60 and the gasket 51 from falling off the mass flow controller 4.

(3) Since the gasket holding piece portion 61, the connecting piece portion 65, and the sandwiching piece portion 66 are formed by bending a single plate material having elasticity into a U shape, it can be manufactured by press bending. Therefore, it can be configured easily and inexpensively.

(4) Since the insertion holes 64 and 67 of the tightening bolt 50 are formed on both sides of the gasket holding piece 62 and the gasket holding hole 62, the gasket holding piece 61 and the holding piece 66 are sandwiched between the gasket holding piece 61 and the holding piece 66. The piece 66 can be fixed to the flow path blocks 13 and 14 and the mass flow controller 4 on both sides with the gasket holding hole 62 as the center. Therefore, the gasket 51 held in the gasket holding hole 62 can be positioned in a correct posture without being inclined.
In addition, since three engagement claws 68 that engage with the thread grooves of the fastening bolt 50 are formed on the inner peripheral surface of the insertion hole 67 formed in the clamping piece portion 66, the fastening bolt 50 is used as a reference. The sandwiching piece 66, that is, the gasket holder 60 can be positioned. Therefore, the gasket 51 can also be accurately positioned at a predetermined position.

<Modification>
The present invention is not limited to the above-described embodiment, and modifications, improvements, and the like within the scope that can achieve the object of the present invention are included in the present invention.
In the gasket holder 60 of the above-described embodiment, the gasket holding piece portion 61, the connecting piece portion 65, and the sandwiching piece portion 66 are formed in a U-shape, but are not limited thereto. The gasket holding piece portion 61 and the holding piece portion 66 may have any shape that can hold the joint portion 42 of the mass flow controller 4. That is, it may be formed in a shape suitable for the shape of the member to be sandwiched.

In the gasket holder 60 of the above embodiment, the three engaging claws 68 are formed in the insertion holes 67 formed on both sides of the holding piece portion 66, but the engaging claws 68 are formed on both sides of the gasket holding piece portion 61. The insertion hole 64 may be provided. Or you may provide in the insertion holes 64 and 67 of the gasket holding piece part 61 and the clamping piece part 66, respectively.
In the gasket holder 60 of the above-described embodiment, the gasket holding hole 62 and the holding claw 63 are provided in the center of the gasket holding piece 61 so that the gasket 51 is held displaceably, but the gasket 51 is held displaceably. The structure is not limited to this. For example, the structure shown in FIG. 6 may be used.

  In the above embodiment, the example in which the gasket holder 60 is sandwiched between the joint portions 42 of the mass flow controller 4 has been described, but the present invention may be applied to other fluid control devices. Or you may make it provide in the flow-path blocks 11-16 side.

  In the fluid control apparatus of the embodiment, the example in which five fluid control devices are arranged in a row has been described, but the number of fluid control devices is not limited to the embodiment. For example, you may comprise with the mass flow controller 4 and two valves connected adjacent to this. Alternatively, a plurality of integrated gas sticks in which a plurality of fluid control devices are arranged in a line may be arranged side by side on the base plate 1 to form an integrated gas panel.

In the above-described embodiment, the system for controlling the flow rate of the fluid has been described.
The fluid is not limited to gas but may be liquid.

  The present invention can be used, for example, in a device for controlling the flow rate of a fluid or a device for controlling the pressure of a fluid in a semiconductor manufacturing facility or the like.

2, 6 ... Manual valve (fluid control device),
3, 5 ... Air valve (fluid control device),
4 ... Mass flow controller (fluid control device, second member),
13, 14 ... flow path block (first member),
13A, 14A ... flow path (first flow path),
45A ... Fluid inflow passage (second passage),
45B ... Flow-out channel (second channel),
50: Tightening bolt,
51 ... gasket,
60 ... gasket holder,
61 ... gasket holding piece,
62 ... gasket holding hole,
63 ... holding nail,
64 ... insertion hole,
65 ... connecting piece part,
66 ... sandwiching piece,
67 ... insertion hole,
68 ... engaging claw.

Claims (4)

Between the joint surface of the first member having the first flow path and the second member having the second flow path joined to the first member and communicating with the first flow path, the first flow path and the second flow path A gasket holder for holding a gasket disposed between the flow path,
Between the joint surfaces of the first member and the second member, a gasket holding piece for holding the outer periphery of the gasket;
A connecting piece provided at one end of the gasket holding piece,
A gasket holder, comprising: a sandwiching piece portion that is provided to face the gasket holding piece portion via the connecting piece portion and sandwiches the second member. The gasket holder according to claim 1,
The gasket holder, wherein the gasket holding piece portion, the connecting piece portion, and the clamping piece portion are formed by bending an elastic plate into a U-shape. In the gasket holder according to claim 1 or 2,
A gasket holding hole for holding the gasket is formed in the approximate center of the gasket holding piece,
The gasket holding piece portion and the sandwiching piece portion are formed with insertion holes for fastening bolts for fixing the first member and the second member on both sides of the gasket holding hole,
Of the insertion hole formed in the gasket holding piece part and the insertion hole formed in the holding piece part, the inner peripheral surface of at least one insertion hole protrudes and engages in the thread groove of the tightening bolt. A gasket holder characterized in that three engaging claws are formed. In a fluid control apparatus for controlling fluid through a plurality of fluid control devices arranged in a row,
The gasket held by the gasket holder according to any one of claims 1 to 3 is provided between a surface on which the fluid flow path of the fluid control device is formed and a surface of a member joined to the surface. A fluid control device, wherein the fluid control device is arranged.

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