JP2009236174A - Fluid control device - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a fluid control device for preventing incorrect assembling without impeding standardization. <P>SOLUTION: A male member 18 (for positioning), inserted in an additional male screw member insertion hole 17, equipped with an upper end part protruded above a second connection member 5a has a lower part screwed into a screw hole of a joint member 13 corresponding to an additional male member insertion hole 17 of a connection part 5a of a three-port valve 5. Male members 11 for fixing a fluid control device are inserted into the male member insertion holes 16 of four corners of the connection part 5a of the three-port valve 5 from above and the male screw members 11 are screwed and fit to screw holes 12a, 14a of joint members 12, 14. Female members 15 for fixing the fluid control device is screwed and fit to the upper end part of the male screw member 18 (for positioning) inserted to the additional male screw member insertion hole 17 of the connection part 5a of the three-port valve 5 from above. <P>COPYRIGHT: (C)2010,JPO&INPIT

Description

  The present invention relates to a fluid control device used in a semiconductor manufacturing apparatus or the like, and more particularly to a fluid control device formed by integrating a plurality of fluid control devices.

  In a fluid control device used in a semiconductor manufacturing apparatus, a plurality of fluid control devices are arranged in series, and a plurality of lines formed by connecting them without using pipes or joints are arranged in parallel on a base member. Integration is progressing in the area. In Patent Document 1, a plurality of block-shaped joint members that are lower layers are attached to a base member by male screw members, and a plurality of fluid control devices that are upper layers are attached so as to straddle adjacent joint members Is disclosed.

In the fluid control device (1) of Patent Document 1, as shown in FIG. 3, a plurality of joint members (8) (8A) (8B) arranged at the lower stage and a plurality of fluid control devices arranged at the upper stage (2) (3) (4) (5) (6) (7) is supported by the movable rail (9) to form one line (A) (B), and a plurality of lines (A) ( Each movable rail (1) of B) is slidably attached to a pair of fixed rails (10) to constitute the entire apparatus. Here, in each fluid control device (2) (3) (4) (5) (6) (7), a rectangular parallelepiped connection that is abutted with and connected to the joint member (8) (8A) (8B) The parts (2a) (3a) (4a) (5a) (6a) (7a) are designed to be shared, so that the fluid control device (2) (3) (4) (5) (6) (7) can be easily increased or decreased.
JP 2002-206700 A

  In the fluid control device (1) shown in FIG. 3, the fluid control device indicated by reference numeral (4) is a two-port valve, the fluid control device indicated by reference numeral (5) is a three-port valve, and is functional. Although the actuator section is common, the number of parts is further reduced (standardized). As a result, the difference in appearance between the 2-port valve (4) and the 3-port valve (3) is that the bolt insertion hole provided in the connecting portion (4a) (5a) (the connecting portion (4a) in the figure) The only difference is whether the bolts (11) attached to (5a) are only at the four corners or at the six corners between the four corners. In other words, it is possible to attach the 2-port valve (4) to the joint member (8A) (8B) supporting the 3-port valve (5). It has increased.

  An object of the present invention is to provide a fluid control apparatus that prevents erroneous assembly without hindering standardization.

  The fluid control device according to the present invention is attached to the joint member by a plurality of block-like joint members having a plurality of screw holes on the upper surface and a fluid control device fixing screw member from above so as to straddle adjacent joint members. A plurality of fluid control devices, and the plurality of fluid control devices have a rectangular parallelepiped connection portion that has a male screw member insertion hole and is abutted against the joint member. The first connection member provided with the screw member insertion hole at the corner and the second connection member having the same size as the first connection member and provided with the additional screw member insertion hole other than the four corners are used. In the fluid control device, the screw hole of the joint member corresponding to the additional male screw member insertion hole of the second connection member is inserted into the additional male screw member insertion hole, and the upper end portion is above the second connection member. Protruded to The lower part of the fixed male screw member is screwed in, and the male screw member for fixing the fluid control device is inserted from above into the screw member insertion holes at the four corners of the second connecting member. A female screw member for fixing a fluid control device from above on the upper end portion of the positioning and male screw member which is screwed into the screw hole of the joint member to be inserted and inserted into the additional male member insertion hole of the second connecting member Are screwed together.

  In this specification, the top and bottom refer to the top and bottom of FIG. The upper and lower sides are convenient, and the fluid control device of the present invention can be used either horizontally or vertically.

  Each joint member is provided with a passage opening upward, and each fluid control device is provided with a passage opening downward, and these passages are abutted with each other via a seal portion. In the fluid control apparatus, the joint member is first fixed to the base member by the joint member fixing male screw member, and each fluid control device is attached to the joint member by the fluid control device male screw member. A male screw member insertion hole through which the fluid control device male screw member is inserted is provided at the connection portion of each fluid control device, and each joint member has a female screw portion into which the male screw member for the fluid control device is screwed. Is formed. For example, in the fluid control device, one inlet passage and one outlet passage are formed, and two seal portions are provided accordingly. A 1st connection member respond | corresponds to such a fluid control apparatus, a screw member insertion hole is provided in four corners, and two screw members are made to correspond to one seal part, The sealing performance is ensured. In addition, in a fluid control device such as a three-port valve, in addition to an inlet passage and an outlet passage one by one, for example, inlet passages for different fluids are added, and accordingly, three seal portions are provided. The second connection member corresponds to a fluid control device such as a three-port valve, and is provided with an additional male member insertion hole in addition to the four corners. However, in order to make components common, the first connecting member and the second connecting member are the same except for the number of male screw member insertion holes in appearance.

  In the fluid control apparatus according to the present invention, each joint member and each fluid control device, including the additional screw member insertion hole, are used in the same manner as in the past, and the positioning and external thread member and the fluid control device fixing female are used. A screw member is newly added. The positioning and use male screw member is previously attached to the joint member, and is integrated with the joint member when the lower layer is formed by the plurality of joint members. When attaching a plurality of fluid control devices across the joint member, the joint member integrated with the positioning and male screw member has a male screw member insertion hole that can be inserted into the positioning and male screw member. Since only the second connecting member can be attached and the abutting surface of the first connecting member hits the positioning / male screw member, the first connecting member cannot be attached and erroneous assembly is reliably prevented. The attachment of the first connecting member to the joint member is performed by tightening the male screw member for fixing the fluid control device to the screw hole of the joint member, and this can be performed in a conventional manner. The second connecting member is attached to the joint member by tightening the female screw member for fixing the fluid control device to the male screw member for positioning and fastening the male screw member for fixing the fluid control device to the screw hole of the joint member. The latter can be performed in exactly the same manner as in the prior art, and only the former is a different operation. Note that either the fastening of the female screw member for fixing the fluid control device to the male screw member for positioning and the fastening of the male screw member for fixing the fluid control device to the screw hole of the joint member may be performed first.

  As the fluid control device, an on-off valve (a valve that shuts and opens the fluid passage), a pressure reducing valve, a pressure indicator, a flow rate regulator (mass flow controller), or the like is used.

  In one line, for example, a plurality of block-shaped joint members that are lower layers are attached to the movable rail by male screw members, and a plurality of fluid control devices that are upper layers so as to straddle adjacent joint members are fluids from above. The control device fixing male screw member and female screw member are attached to the joint member. If it does in this way, the fluid control apparatus of an upper stage can be taken out independently upwards by removing the external thread member and internal thread member from upper direction.

  The positioning / male screw member is preferably a headless bolt, and has a tool engagement hole (for example, a hexagon hole for a hexagon wrench) formed at the top (upper end) thereof. As the fluid control device fixing female screw member, a nut or a cap nut having a tool engaging portion (for example, a hexagonal column portion) formed on the outer peripheral surface can also be used, but preferably has a top wall and The outer periphery is a cylindrical surface, and a tool engagement hole (for example, a hexagon hole for a hexagon wrench) is formed on the top wall. In this way, tightening work in a narrow space where fluid control devices exist on both sides is facilitated, and the same tool (which can of course have different hole diameters) is used to tighten the male screw member. Thus, the internal thread member for fixing the fluid control device can be tightened.

  In the fluid control device of the present invention, a two-port valve having two seal portions and a three-port valve having three seal portions and the actuator portion being the same as the two-port valve are used as the fluid control device. In addition, the connecting portion of the 2-port valve is the first connecting member, and the connecting portion of the 3-port valve is the second connecting member, and the positioning-use male screw member is previously placed in the screw hole of the joint member supporting the 3-port valve. It is preferable that the two-port valve is prevented from being attached to the joint member that supports the three-port valve by being screwed.

  In this way, since the actuator portion is the same as the 2-port valve, parts dedicated to the 3-port valve are not required, and the number of parts can be reduced. On the other hand, there is an increased possibility that the 2-port valve is incorrectly installed at the mounting position of the 3-port valve. If incorrect installation is performed, the seal portion may be damaged or the fluid control device may be There is a possibility that excessive stress is transmitted to the part. According to the fluid control device of the present invention, such a problem is surely prevented by preventing the attachment of the 2-port valve to the joint member supporting the 3-port valve. Thus, the standardization of the entire system can be maintained and the safety of the system can be further improved.

  According to the fluid control device of the present invention, only the second connecting member having the male screw member insertion hole that can be inserted into the positioning and male screw member can be attached to the joint member integrated with the positioning and male screw member. In addition, since the butted surface of the first connecting member hits the positioning / male screw member, the first connecting member cannot be attached and erroneous assembly is reliably prevented. As a configuration for this purpose, it is only necessary to add a positioning and male screw member and a female screw member for fixing the fluid control device without changing the fluid control device and the joint member. Assembling is prevented and the safety of the system can be improved.

  Embodiments of the present invention will be described below with reference to the drawings.

  1 and 2 show a fluid control device of the present invention, which corresponds to a part of the fluid control device shown in FIG.

  In this fluid control device, at least a 2-port valve (4) and a 3-port valve (5) are used, and the mounting structure of the 3-port valve (5) is different from the conventional one shown in FIG. ing.

  The three-port valve (5) has a plurality of (three in the figure) block-shaped joint members (12, 13) arranged at the lower stage with a plurality of screw holes (12a) (13a) (14a) provided on the upper surface. It is attached to the joint member (12) (13) (14) by the male screw member (11) for fixing fluid control equipment and the female screw member (15) for fixing fluid control equipment from above so as to straddle (14) A rectangular parallelepiped having an actuator portion (5b) having a built-in opening / closing mechanism and a fluid passage (not shown) communicating with a fluid passage (not shown) formed in the joint member (12) (13) (14) A connecting portion (5a). This connecting portion (5a) is abutted against and connected to the joint members (12), (13) and (14), and is connected to the connecting portion of the three-port valve (5) (referred to as “second connecting member”) (5a ) Is, for example, a male screw member insertion hole (fluid control device inserted in the same hole) in a connection part (referred to as “first connection member”) (4a) of a fluid control device such as a two-port valve (4). The bolts (11) as fixing male screw members are provided only at the four corners, whereas the size is the same as the first connecting member (4a), and the screw member insertion holes (16 at the four corners). In addition, male screw member insertion holes (17) are provided at two places in the middle in the line direction.

  As shown in FIG. 1, the additional male screw member is inserted into the screw hole (13a) of the joint member (13) corresponding to the additional male screw member insertion hole (17) of the second connecting member (5a). The lower part of the positioning and male screw member (18) inserted through the hole (17) and projecting the upper end portion above the second connecting member (5a) is screwed. When mounting the three-port valve (5) to the joint members (12), (13), (14), the fluid control device is inserted into the screw member insertion holes (16) at the four corners of the second connection member (5a) from above. The fixing male screw member (11) is inserted, and the male screw member (11) is screwed into the screw holes (12a) (14a) of the corresponding joint members (12) (14), and the second The fluid control device fixing female screw member (15) is screwed into the upper end of the positioning and male screw member (18) inserted through the additional male screw member insertion hole (17) of the connecting member (5a) from above. ing.

  Hexagon socket head bolts are used as the male screw member (11) for fixing fluid control equipment, and headless bolts with hexagonal holes (18a) are used as the positioning male screw member (18). in use.

  As a result, the tightening operation using the hexagon socket head bolt (11) as the male screw member for fixing the fluid control device can be performed using a hexagon wrench, and the headless bolt (18) as the positioning male screw member can be used. The operation of integrating the joint member (13) can also be performed using a hexagon wrench.

  In addition, as the fluid control device fixing female screw member (15), a cylindrical cap nut having a top wall is used. The cap nut (15) as a female screw member for fixing the fluid control device has a female screw portion (15a) on the lower inner periphery, and the outer peripheral surface is a smooth cylindrical surface, and a wrench or the like. The engaging portion for engaging the tool is a hexagonal hole (15b) for engaging a hexagon wrench provided on the top wall. Therefore, when using a commercially available hexagonal column nut, it is necessary to work with a spanner or wrench with an outer diameter larger than the outer diameter of the nut, and work in a situation where fluid control devices exist on both sides. Although it is difficult, tightening with the female screw member (15) for fixing the fluid control device can also be performed using a hexagon wrench with an outer diameter smaller than the outer diameter of the female screw member (15). The tightening operation is the same as that of the device fixing male screw member (11), and can be easily performed even in a narrow space.

  When the three-port valve (5) is attached to the joint members (12), (13) and (14), as shown in FIG. 2, the positioning / male screw member (18) is screwed into the joint member (13) in advance. And, by inserting the additional male screw member insertion hole (17) of the second connecting member (5a) into the positioning / male screw member (18), an error in the mounting direction is prevented, and the three-port valve (5) Is positioned. After this, by tightening the male screw member (11) for fixing the fluid control device and the female screw member (15) for fixing the fluid control device with the specified torque, tightening with the sealing portion (19) ensuring the sealing performance is guaranteed. The Assuming that the 3-port valve (5) is attached to the 2-port valve (4b) where the actuator section (4b) is the same as the actuator section (5b) of the 3-port valve (5) and the size of the connection section (4a) is the same. ), The positioning / male screw member (18) hinders the attachment, and such erroneous assembly is reliably prevented.

FIG. 1 is a side view with a part cut away showing an embodiment of a fluid control apparatus according to the present invention. FIG. 2 is an exploded perspective view showing an embodiment of the fluid control apparatus according to the present invention. FIG. 3 is a perspective view showing a conventional fluid control device targeted by the present invention.

Explanation of symbols

(4) 2-port valve (fluid control device)
(4a) Connection part (first connection member)
(4b) Actuator
(5) 3-port valve (fluid control device)
(5a) Connection part (second connection member)
(5b) Actuator
(11) Male thread member for fixing fluid control equipment
(12) (13) (14) Joint member
(12a) (13a) (14a) Screw hole
(15) Female thread member for fixing fluid control equipment
(16) Male thread member insertion hole
(17) Additional male thread member insertion hole
(18) Positioning and external thread member

Claims (2)

A plurality of block-like joint members provided with a plurality of screw holes on the upper surface, and a plurality of fluid control devices attached to the joint members by fluid control device fixing screw members from above so as to straddle adjacent joint members The plurality of fluid control devices have a rectangular parallelepiped connection portion that has a male screw member insertion hole and is abutted against the joint member, and the screw member insertion holes are provided at four corners as these connection portions. In the fluid control device in which the first connection member provided and the second connection member having the same size as the first connection member and provided with additional screw member insertion holes other than the four corners are used,
Positioning / combining male screw that is inserted into the additional male screw member insertion hole into the screw hole of the joint member corresponding to the additional male screw member insertion hole of the second connection member, and whose upper end protrudes above the second connection member The lower part of the member is screwed, and the male screw member for fixing the fluid control device is inserted into the four screw member insertion holes at the four corners of the second connecting member from above, so that these male screw members correspond to the corresponding joint members. The fluid control device fixing female screw member is screwed onto the upper end portion of the positioning and male screw member inserted through the additional male screw member insertion hole of the second connecting member from above and screwed into the screw hole. A fluid control apparatus comprising:   As the fluid control device, a two-port valve having two seal portions and a three-port valve having three seal portions and the actuator portion being the same as the two-port valve are used, and the connection of the two-port valve is used. The first connecting member is the first connecting member, and the connecting portion of the three-port valve is the second connecting member, and the positioning and male screw member is screwed in advance into the screw hole of the joint member that supports the three-port valve. 2. The fluid control device according to claim 1, wherein the two-port valve is prevented from being attached to the joint member supporting the port valve.

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