JP2006307983A - Chemical valve mounting method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a chemical valve mounting method for mounting a resin-made valve on a resin-made flow passage block constituting a chemical valve easily in a short time while keeping normal attitude of the resin-made valve to the resin-made flow passage block when mounting and connecting a gasket. <P>SOLUTION: This chemical valve mounting method comprises a first process for loosely mounting a mounting bracket 60 provided with a pressing means 70 for pressing an upper face of the resin-made valve 30 at the center and forming male screw head receiving parts 61 in two sections centered on the pressing means 70 in a female screw hole 41 of a base plate 40 by two tool screws 80 attached to the male screw head receiving parts 61 in two sections and passing through mounting through holes 313, 23 of the resin-made valve 30 and the resin-made flow passage block 20, a second process for moving the resin-made valve 30 to a final mounting position on the resin-made flow passage block 20 while the gasket 50 is mounted by pressing the upper face of the resin-made valve 30 by the pressing means 70, and a third process for mounting two mounting male screws 90 in female screw holes 41 in two sections without the tool screws 80. <P>COPYRIGHT: (C)2007,JPO&INPIT

Description

  The present invention relates to an attachment method for attaching a chemical valve to a resin flow path block via a seal member.

Many highly integrated gas supply units are used in semiconductor manufacturing lines. In the gas supply unit, a mass flow controller is used to supply a predetermined amount of gas. The mass flow controller uses very thin tubes, and the gas used in the semiconductor production line is often highly corrosive, so that clogging is likely to occur and the mass flow controller is frequently replaced.
The mass flow controller may be mounted in a narrow space, or may be mounted sideways or the like, which has a problem of poor workability at the time of replacement. A method of attaching a mass flow controller with a guide rod attached to two of the holes has been proposed.

On the other hand, in a semiconductor production line, etching may be performed using a chemical solution in addition to gas, and a chemical valve for supplying the chemical solution is often used. Since many chemical solutions are highly corrosive, fluorine-based resins such as PTFE and PFA are used as the material for the chemical solution valve.
The chemical valve also needs to be replaced in the event of a failure, but there is a problem that workability at the time of replacement is poor.
As shown in FIGS. 1 and 3, the chemical valve 10 includes a resin flow channel block 20 placed on the base plate 40 and an upper surface port 25 communicating with the flow channel formed in the resin flow channel block 20. And a resin valve 30 communicating with the lower surface port 315 in a state where the gasket 50 is attached to the base plate 40, and is attached to the base plate 40 with four mounting male screws 90.
JP 11-159656 A

  In order to replace the resin valve 30, the gasket 50 is gradually crushed by the thrust of the mounting male screw 90 when the new resin valve 30 is connected to the resin flow path block 20 by attaching the gasket 50 thereto. Things have been done. However, when using a gasket 50 having a press-fitting allowance in the radial direction as shown in FIG. 17, the press-fitting distance is related to the sealing performance. In many cases, a large gap is generated between the road block 20 and the resin valve 30.

  If this gap is large, the tip of the mounting male screw 90 does not reach the female screw hole 41 provided in the base plate 40 as shown in FIG. Forcibly pressing the resin valve 30 with a hand or the like to crush the gasket 50 and tightening the first mounting male screw 90, as shown in FIG. The manufactured valve 30 is inclined, and the sealing surface of the gasket 50 is inclined.

Even if the other three mounting male screws 90 are tightened while correcting the inclination, a uniform sealing force cannot be obtained on the sealing surface of the gasket 50, and there is a possibility that a chemical solution leaks.
If such a problem occurs and a semiconductor is manufactured and a defect is discovered in the final process of the wafer, the process will be traced all the way back to find the process where the problem occurred. If discovered, it was necessary to replace the chemical valve of the process on the spot.

  Similarly to the mass flow controller, the chemical valve is often mounted not only in a narrow space but also horizontally or upside down, and when replacing the chemical valve, the operator must hold the resin valve with one hand. While holding the resin channel block and pressing it, the other hand was forced to insert and tighten the four mounting male screws.

  Therefore, in order to solve such problems, the present invention provides a resin valve for a resin flow path block when the resin valve is connected to a resin flow path block constituting a chemical valve and a gasket is attached. It is an object of the present invention to provide a chemical valve mounting method that can be easily mounted in a short time while maintaining the normal posture.

  According to a first aspect of the present invention, there is provided a chemical valve mounting method comprising: a flow path communicating with an upper surface port; a resin flow path block in which a mounting through hole is formed; and a mounting through hole for the resin flow path block A base plate with a female screw hole in a state where a gasket is mounted between the upper surface port and the lower surface port, and a resin valve in which a mounting through hole coaxial with the lower surface port is formed, In the chemical valve mounting method of mounting with four mounting male screws to form a chemical valve, a pressing means for pressing the upper surface of the resin valve is provided in the center, and two male screw head receiving portions centering on the pressing means Are attached to the two male screw head receiving portions, and the female bracket is attached to the female valve by two jig screws penetrating through the mounting through holes of the resin valve and the resin flow channel block. Attached to the screw hole And pressing the upper surface of the resin valve with the pressing means to move the resin valve to the final mounting position on the resin flow channel block with the gasket attached. It has a 2nd process and the 3rd process of attaching two attachment male screws with respect to two female screw holes without the jig screw.

  Therefore, by inserting two jig screws through the through holes for mounting the resin flow path block and the resin valve and screwing them into the female screw holes of the base plate, the resin valve is guided by the jig screws. The resin valve can be positioned with respect to the resin flow path block, and it is made of resin while sandwiching the gasket by simply operating the pressing means provided on the mounting bracket loosely attached to the female screw hole of the base plate with the jig screw. Since the valve can be moved to the final mounting position, a uniform sealing force can be obtained on the gasket sealing surface, and the chemical valve can be easily and accurately placed on the base plate in a short time without generating particles from the gasket. Can be attached.

According to a second aspect of the present invention, there is provided the chemical valve mounting method according to the first aspect, wherein the pressing means is screwed into a female screw portion formed on the mounting bracket. It is a pressing bolt.
Accordingly, when the pressing bolt is screwed in, the pressing bolt gradually presses the upper surface of the resin valve, so that the resin valve can be gradually moved to the final mounting position while keeping the sealing surface of the gasket uniform.

According to a third aspect of the present invention, there is provided a chemical valve mounting method according to the first or second aspect, wherein the male screw head receiving portion of the mounting bracket has a notch. A small-diameter portion that is formed and engages with the notch portion of the mounting bracket is formed near the upper end of the jig screw.
Therefore, the jig screw is passed through the mounting through hole for the resin flow path block and the resin valve in advance and screwed into the female screw hole of the base plate, and then the notch of the mounting bracket is cured. The mounting bracket can be disposed above the resin valve with a single touch only by engaging with the small diameter portion of the tool screw.

Further, in the chemical valve mounting method according to claim 4 according to the present invention, in the chemical valve mounting method according to claim 1 or 2, a female screw hole is formed on the upper surface of the jig screw. The first step is performed by screwing a male screw bolt into the female screw hole.
Therefore, since the male screw bolt is inserted into the female screw hole from the upper part of the jig screw after the male screw bolt is inserted into the male screw head receiving portion of the mounting bracket, the mounting operation of the mounting bracket can be easily performed.

  According to the present invention, the resin valve can be arranged by positioning with a jig screw on the resin channel block, so that the operator can use both hands when replacing the resin valve. Further, the resin valve can be gradually and accurately positioned at the final mounting position of the resin flow path block by the pressing means provided on the mounting bracket loosely attached to the base plate by the jig screw.

Next, an embodiment of a chemical valve mounting method according to the present invention will be described with reference to the drawings. The chemical valve mounting method of the present embodiment is applied to a semiconductor manufacturing apparatus.
Here, FIG. 1 is a perspective view showing the entirety of the chemical valve, and FIG. 2 is a plan view of the chemical valve. FIG. 3 is a side sectional view of the chemical valve.

First, the configuration of the chemical valve will be described. As shown in FIG. 1 and FIG. 3, the chemical valve 10 includes a resin flow channel block 20 placed on a base plate 40 and a resin valve mounted on the resin flow channel block 20 with a gasket 50 interposed therebetween. 30.
The resin flow path block 20 and the resin valve 30 include a mounting through hole 23 provided in the resin flow path block 20 and a mounting through hole provided in the resin valve 30 and the resin flow path block 20. It is attached on the base plate 40 by four attachment male screws 90 that pass through the attachment through hole 313 coaxial with the attachment 23.
As can be seen from FIG. 1, two resin valves 30 are mounted side by side on the resin flow path block 20, but since the mounting methods are the same, the description is made of one resin. For the valve 30.

  The base plate 40 is a resin thick plate having the same size as the resin flow channel block 20, and is one piece of the resin valve 30 at the same pitch as the mounting through holes 23 provided in the resin flow channel block 20. Four female screw holes 41 are provided.

The resin flow channel block 20 is formed into a rectangular block shape with a resin that is not corroded by the chemical solution, and a chemical solution flow channel 21 is provided therein, and a vertical hole extends from the flow channel 21 toward the center of the valve 30. 211 is drilled, and an upper surface port 25 is formed at the upper end thereof.
In addition, at the four corners of the resin flow channel block 20, there are four mounting through holes 23 that penetrate from the upper surface to the lower surface and have the same pitch as the mounting through holes 313 provided in the resin valve 30. Is provided.

  The resin valve 30 includes a resin valve body 31 that is directly placed on the resin flow path block 20, and a resin cylinder 33 that is placed on the valve body 31 and accommodates the piston 331 therein. These are substantially square in plan view with a resin top cover 35 covering the upper part of the cylinder 33. Bolts are passed through through holes provided in the four corners of the cylinder 33 and the top cover 35. The valve body 31 is hermetically connected.

A flow path 311 that penetrates in the vertical direction is formed in a substantially central portion of the valve body 31, and a lower surface port 315 is formed at the lower end thereof.
In addition, a flange portion 317 is formed at the lower end of the valve body 31 so as to project outward in two directions. The flange portion 317 has four pieces at the same pitch as the mounting through holes 23 provided in the resin flow path block 20. Mounting through-holes 313 are provided.

In addition, although the port for the control air of the piston 331 or the chemical | medical solution going in and out is provided in the horizontal wall of the valve body 31, the cylinder 33, and the top cover 35, it is abbreviate | omitting in sectional drawing.
As shown in the enlarged sectional view of FIG. 17, a gasket 50 having an H-shaped cross section is inserted between the upper surface port 25 and the lower surface port 315 and is sealed so as to prevent leakage of the chemical solution.

The gasket 50 has a circumference formed into an H-shaped cross section, and upper and lower concave portions 51 and 52 at the center of the H-shaped cross section are tapered toward the opposite cross-section bottom, and about 2 minutes. A portion having a depth of 1 slightly protrudes toward the inside of the recess to form a crushing allowance.
On the other hand, ring-shaped convex portions 251 and 3151 that fit into the concave portions 51 and 52 of the gasket 50 are formed around the openings of the upper surface port 25 and the lower surface port 315 to which the gasket 50 is attached.

Next, the configuration of a jig used when the resin valve 30 is replaced with the resin flow channel block 20 will be described.
In the first embodiment, the jig uses a jig screw 80 as shown in FIG. 4 and a mounting bracket 60 having a pressing means 70 at the center as shown in FIGS.
The jig screw 80 is a long metal bolt longer than the height of the resin flow path block 20 and the resin valve 30, and a male screw portion 811 that is screwed into a female screw hole 41 provided in the base plate 40 at the lower end. The lower stepped portion 81 is formed by slightly reducing the diameter of the male screw portion 811 from the outer diameter of the general portion.

  A small diameter portion 85 slightly smaller than the outer diameter of the general portion is formed at the upper portion of the jig screw 80, and an upper stepped portion 83 is formed at the upper end of the small diameter portion 85 to again have the same outer diameter as the general portion. Returning to the outer diameter, a head 87 is provided which extends from the upper stepped portion 83 in a tapered manner and has a minus or plus driver groove (not shown) at its upper end. The distance L1 between the lower stepped portion 81 and the upper stepped portion 83 is manufactured with high accuracy.

As shown in FIGS. 7 and 8, the mounting bracket 60 includes a central circular portion 63 whose center swells circularly in a plan view, and a male screw head receiving portion 61 that protrudes axially symmetrically from the central circular portion 63. It is a metal plank provided.
A female screw hole 631 into which a large-diameter pressing bolt 71 as a pressing means 70 described later is screwed is provided in the center of the central circular portion 63.
The male screw head receiving portion 61 has a cutout opening in opposite directions at the same distance as the two female screw holes 41 on the diagonal line among the four female screw holes 41 provided in the base plate 40. A notch 611 is formed. The bottom of the notch 611 is formed in a semicircular shape slightly larger than the outer diameter of the small diameter portion 85 at the top of the jig screw 80 and smaller than the outer diameter of the upper stepped portion 83.

  The pressing means 70 has a circular head in plan view, a knurled anti-slip process on the outer periphery thereof, and a large-diameter metal pressing bolt 71 having a male screw formed on the lower portion thereof. 60 is configured to be screwed into a female screw hole 631 provided in 60.

  A mounting method when replacing the resin valve 30 of the chemical valve 10 using the jig screw 80, the mounting bracket 60, and the pressing means 70 of the first embodiment configured as described above will be described. However, it is assumed that the resin valve 30 and the gasket 50 that have been installed so far have already been removed, and that a new gasket 50 is temporarily attached to the lower surface port of the new resin valve 30. .

  First, as shown in FIG. 4, the male screw portion 811 at the lower end of the two jig screws 80 is inserted into the mounting through hole 23 on the diagonal line of the resin flow channel block 20, and the female screw hole of the base plate 40 is inserted. 41 is screwed until the lower stepped portion 81 of the jig screw 80 comes into contact with the upper surface of the base plate 40 and stops. Therefore, in this state, the two jig screws 80 protrude from the resin flow path block 20.

  Next, as shown in FIG. 5, a new resin valve 30 is attached to the two jig screws 80 projecting from the resin channel block 20 from above, and the mounting through holes provided in the valve body 31 are installed. Through the hole 313, the gasket 50 is placed while being guided by the jig screw 80 until it comes into contact with the upper surface port 25 of the resin valve 30 and stops. Therefore, in this state, the heads 87 of the two jig screws 80 are above the upper end of the resin valve 30.

6 and 7, the notch portion 611 provided in the male screw head receiving portion 61 in a state where the pressing bolt 71 is screwed into the female screw hole 631 of the mounting bracket 60 is replaced with the jig screw 80. The small-diameter portion 85 is engaged with the small-diameter portion 85 by rotating clockwise in plan view (this corresponds to the first step in the claims).
While holding the state where the mounting bracket 60 is engaged with the small diameter portion 85 of the jig screw 80 with one hand, the pressing bolt 71 is moved in the direction in which the lower end of the pressing bolt 71 extends from the mounting bracket 60 with the other hand. As shown in FIG. 8, the tip end of the pressing bolt 71 is brought into contact with the upper surface of the top cover 35 of the resin valve 30.

Further, when the pressing bolt 71 is rotated, the mounting bracket 60 is moved upward, and the upper surface of the male screw head receiving portion 61 comes into contact with the upper stepped portion 83 of the jig screw 80 at the notch portion 611. Further upward movement is prevented.
Further, when the pressing bolt 71 is further rotated, the resin valve 30 is pressed by the pressing bolt 71 and guided to the jig screw 80, and gradually contacts the resin flow path block 20. At this time, the ring-shaped convex portions 251 and 3151 are fitted into the concave portions 51 and 52 of the gasket 50, respectively, and the concave portions 51 and 52 and the convex portions 251 and 3151 are attached to the upper surface port 25 and the lower surface port 315 while being deformed. Is maintained (this corresponds to the second step in the claims).

Then, if it is confirmed that the resin valve 30 is securely in contact with the resin flow path block 20, the resin valve 30 is attached to two mounting through holes 313 and 23 on the other diagonal line to which the jig screw 80 is not attached. The male screw 90 is inserted, the tip of the male screw 90 is screwed into the female screw hole 41 of the base plate 40, and the resin valve 30 is tightened to the resin flow path block 20 and the base plate 40 with a prescribed torque (until the claims up to this point). Equivalent to the third step of the range).
Thereafter, the pressing bolt 71 is reversely rotated to release the pressed state, the mounting bracket 60 is rotated clockwise in plan view, and the cutout portion 611 of the male screw head receiving portion 61 is moved to the small diameter portion of the jig screw 80. By escaping from 85, the mounting bracket 60 is removed together with the pressing means 70 from the jig screw 80.

  Thereafter, the two jig screws 80 are reversely rotated to be removed from the female screw hole 41 and the mounting through holes 23 and 313 of the base plate 40, and the mounting male screws 90 are inserted into the two empty mounting through holes 23 and 313. Is inserted into the female screw hole 41 and tightened. As a result, a new resin valve 30 is attached to the base plate 40 via the resin flow path block 20, the exchange is completed, and the chemical valve is attached.

  Therefore, in the chemical valve mounting method of the first embodiment, the rod-shaped jig bolt 80 is erected on the resin flow path block 20 and the base plate 40 in advance, and the resin valve 30 is moved by the jig bolt 80. The notch 611 of the male screw head receiving portion 61 provided on the mounting bracket 60 including the pressing means 70 on the head of the jig bolt 80 can be engaged with one touch.

Next, a second embodiment of the mounting method when the resin valve 30 of the chemical liquid valve 10 is replaced will be described. In the second embodiment, the resin valve 30 to be replaced, the resin channel block 20 and the base plate 40 are exactly the same as those in the first embodiment, and only the jig used for the replacement work is different. This difference will be described.
In the second embodiment, the jig is a mounting bracket 260 as shown in FIG. 9, a jig screw 280 shown in FIG. 10, and the same pressing bolt as the first embodiment as the pressing means 70. 71 is used.

The mounting bracket 260 is similar in shape to the mounting bracket 60 of the first embodiment, and has a central circular portion 263 whose center swells circularly in plan view and a male screw that protrudes symmetrically from the central circular portion 263. It is formed of a thick metal plate having a head receiving portion 261.
In the center of the central circular portion 263, a female screw hole 2631 into which a large-diameter pressing bolt 71 as the pressing means 70 identical to that of the first embodiment is screwed is provided. The male screw head receiving portion 261 has an inner diameter slightly larger than the outer diameter of the general portion of the jig screw 280 at the same distance as the diagonal distance of the four female screw holes 41 provided in the base plate 40. A hole 2611 is formed.

  The jig screw 280 has a general outer diameter portion and a lower end male screw portion 2811 that are the same as the jig screw 80 of the first embodiment, and includes a bolt head 287 at the upper end. A lower stepped portion 281 is formed between the lower end of the general outer diameter portion and the upper end of the male screw portion 2811, and a distance L2 between the lower stepped portion 281 and the lower surface of the bolt head portion 287 is the first embodiment. The jig screw 80 is set to the same length as the distance L1 at the same position.

A mounting method when replacing the resin valve 30 of the chemical valve 10 using the jig screw 280, the mounting bracket 260, and the pressing means 70 of the second embodiment configured as described above will be described.
The jig screw 280 is inserted into the hole 2611 of the mounting bracket 260 in advance, and then the pressing bolt 71 is screwed into the female screw hole 2631. Further, the general outer diameter portion of the jig screw 280 is inserted into the mounting through-hole 313 of the new resin valve 30.
Then, as shown in FIG. 11, the male screw portion 2811 at the lower end of the two jig screws 280 is placed on the diagonal line of the resin through-hole 313 and the resin flow passage block 20 on the diagonal line of the resin valve 30. The base plate 40 is inserted into a certain mounting through-hole 23 until the gasket 50 temporarily attached to the lower surface port 315 of the resin valve 30 comes into contact with the upper surface port 25 of the resin flow path block 20 and stops. The lower stepped portion 281 of the jig screw 280 contacts with the upper surface of the base plate 40 and is screwed into the screw hole 41 (this corresponds to the first step in the claims).

Thereafter, the pressing bolt 71 is rotated in a direction in which the lower end of the pressing bolt 71 extends from the mounting bracket 60, the tip of the pressing bolt 71 is brought into contact with the upper surface of the top cover 35 of the resin valve 30, and further pressing is performed. When the bolt 71 is rotated, the mounting bracket 260 is moved upward, the upper surface of the male screw head receiving portion 261 contacts the lower surface of the bolt head 287 of the jig screw 280, and further upward movement is prevented. Is done.
Further, when the pressing bolt 71 is further rotated, the resin valve 30 is pressed by the pressing bolt 71 while being guided by the jig screw 280 as shown in FIG. Contact. At this time, the ring-shaped convex portions 251 and 3151 are fitted into the concave portions 51 and 52 of the gasket 50, respectively, and the concave portions 51 and 52 and the convex portions 251 and 3151 are attached to the upper surface port 25 and the lower surface port 315 while being deformed. Is maintained (this corresponds to the second step in the claims).

Then, if it is confirmed that the resin valve 30 is securely in contact with the resin flow path block 20, the mounting male screw is inserted into the two mounting through holes 23 on the other diagonal line where the jig screw 280 is not mounted. 90 is inserted, the tip is screwed into the female screw hole 41 of the base plate 40, and the resin valve 30 is fastened to the resin channel block 20 and the base plate 40 (the process up to this point is the third step of the claims). Equivalent).
Thereafter, the pressing bolt 71 is reversely rotated to release the pressed state, and the bolt head 287 of the jig screw 280 is reversely rotated to be removed from the female screw hole 41 of the base plate 40, and the resin flow path block 20 is attached. The mounting bracket 60 is removed together with the pressing means 70 by letting it escape from the through hole 23 for mounting and the mounting through hole 313 for the resin valve 30.

  Then, the mounting male screw 90 is inserted into the two open mounting through holes 23, 313, screwed into the female screw hole 41, and tightened. Thus, a new resin valve 30 is attached to the resin flow path block 20 and the base plate 40, and the exchange is completed.

  Therefore, in the chemical valve mounting method of the second embodiment, a bolt-shaped jig screw 280 is inserted into the hole 2611 of the mounting bracket 260 in advance, and the pressing bolt 71 as the pressing means 70 is screwed into this. Since they are combined, the jig can be brought in at once.

Next, a third embodiment of the mounting method when the resin valve 30 of the chemical liquid valve 10 is replaced will be described. The jig used in the third embodiment is a mounting screw provided with a jig screw 380, a male screw bolt 387 screwed into the head of the jig screw 380, and a pressing bolt 71 as the pressing means 70. Bracket 360.
As shown in FIG. 13, the jig screw 380 has a general outer diameter portion and a male screw portion 3811 at the lower end that are the same as the jig screw 80 of the first embodiment, and a female screw hole 385 is formed on the upper surface. Is. A lower stepped portion 381 is formed at the lower end of the general outer diameter portion and the upper end of the male screw portion 3811. The distance L3 between the lower stepped portion 381 and the upper surface of the jig screw 380 is the same as that of the first embodiment. It is set shorter than the distance L1 at the same position of the jig screw 80 by the thickness of the mounting bracket 360.

The male screw bolt 387 is a metal bolt having a bolt head portion 3871 and a male screw portion 3873 at a lower portion thereof.
The mounting bracket 360 is obtained by slightly reducing the diameter of the hole 2611 provided in the mounting bracket 260 of the second embodiment to form a hole 3611. Other configurations are the same as those of the second embodiment. The mounting bracket 260 is the same.

Using the jig screw 380, the male screw bolt 387, the mounting bracket 360, and the pressing means 70 of the third embodiment configured as described above, mounting when the resin valve 30 of the chemical valve 10 is replaced A method will be described.
First, as shown in FIG. 13, the male screw portion 3811 at the lower end of the two jig screws 380 is inserted into the mounting through hole 23 on the diagonal line of the resin flow path block 20, and the female screw hole of the base plate 40 is inserted. 41 is screwed until the lower stepped portion 381 of the jig screw 380 comes into contact with the upper surface of the base plate 40 and stops. Therefore, in this state, the two jig screws 380 protrude from the resin flow path block 20.

  Next, the male screw portion 3873 of the male screw bolt 387 is passed through the hole portion 311 of the mounting bracket 360, and the male screw portion 3873 is screwed into the female screw hole 385 provided on the upper surface of the jig screw 380. At this time, as shown in FIG. 14, the mounting bracket 360 is held between the upper surface of the jig screw 380 and the bolt head 3871 of the male screw bolt 387 and fixed to the upper end of the jig screw 380 (here Is equivalent to the first step of the claims).

  Thereafter, the pressing bolt 71 is rotated in a direction in which the lower end of the pressing bolt 71 extends from the mounting bracket 60, the tip of the pressing bolt 71 is brought into contact with the upper surface of the top cover 35 of the resin valve 30, and further pressing is performed. When the bolt 71 is rotated, the resin valve 30 is pressed by the pressing bolt 71 while being guided by the jig screw 380, and gradually contacts the resin flow path block 20, as shown in FIG. At this time, the ring-shaped convex portions 251 and 3151 are fitted into the concave portions 51 and 52 of the gasket 50, respectively, and the concave portions 51 and 52 and the convex portions 251 and 3151 are attached to the upper surface port 25 and the lower surface port 315 while being deformed. Is maintained (this corresponds to the second step in the claims).

Then, if it is confirmed that the resin valve 30 is securely in contact with the resin flow path block 20, the mounting male screw is inserted into the two mounting through holes 23 on the other diagonal line where the jig screw 380 is not mounted. 90 is inserted, the tip is screwed into the female screw hole 41 of the base plate 40, and the resin valve 30 is fastened to the resin channel block 20 and the base plate 40 (the process up to this point is the third step of the claims). Equivalent).
Thereafter, the pressing bolt 71 is reversely rotated to release the pressed state, and the bolt head portion 2871 of the male screw bolt 387 is rotated reversely to remove the male screw bolt 387 from the female screw hole 385 of the jig screw 380. Then, the mounting bracket 360 is removed together with the pressing means 70.

  Further, the general outer diameter portion of the jig screw 380 is rotated in the reverse direction to be removed from the female screw hole 41 of the base plate 40, and is escaped from the mounting through holes 23 and 313 for the resin flow path block 20 and the resin valve 30. Then, the mounting male screw 90 is inserted into the two open mounting through holes 23, 313, screwed into the female screw hole 41, and tightened. Thus, a new resin valve 30 is attached to the resin flow path block 20 and the base plate 40, and the exchange is completed.

  Therefore, in the chemical valve mounting method of the third embodiment, the rod-shaped jig bolt 380 is erected in advance on the resin flow path block 20 and the base plate 40, and the resin valve 30 is moved by the jig bolt 80. The mounting bracket 60 including the pressing means 70 can be fixed to the head of the jig bolt 380 with a male screw bolt 387.

In addition, this invention is not limited to the thing of the said embodiment, A various change is possible in the range which does not deviate from the meaning.
For example, in the above-described embodiment, the resin valve is described as being fastened to the resin flow path block and the base plate from the upper side (resin valve) side. It can also be applied to those that can be tightened.
In addition, although a description has been given of rotating a large-diameter pressing bolt as a pressing means, a lever type as shown in FIGS. 115 and 16 or a pantograph type although omitted in the figure is used as a mounting bracket. It may be provided.

  The present invention provides a resin flow channel block in which a flow channel communicating with an upper surface port and a mounting through hole are formed, and a mounting through hole and a lower surface port coaxial with the mounting through hole of the resin flow channel block. The plastic valve is attached with four mounting male screws to a base plate in which a female screw hole is formed in a state where a gasket is mounted between the upper surface port and the lower surface port. In the chemical liquid valve mounting method, the mounting bracket having a pressing means for pressing the upper surface of the resin valve at the center and having two male screw head receiving portions formed around the pressing means is provided at the two locations. A first step of attaching to the female screw hole by two jig screws that are attached to the male screw head receiving portion and pass through the mounting through holes of the resin valve and the resin flow channel block; By pressing means A second step of moving the resin valve to the final mounting position on the resin flow path block with the gasket attached by pressing the upper surface of the resin valve; Since there is a third step of attaching two mounting male screws to the two female screw holes, a new resin valve is not inclined on the resin channel block in advance by a jig screw. It was possible to move to the final mounting position while gradually pressing the gasket.

It is the perspective view which showed the whole chemical | medical solution valve which concerns on one embodiment of this invention. It is a top view of the chemical | medical solution valve which concerns on one embodiment of this invention. It is sectional drawing which follows the AA line of FIG. It is sectional drawing which erected the jig screw which concerns on 1st embodiment of this invention in the baseplate. It is sectional drawing which inserted the resin-made valve | bulb to the jig | tool screw which concerns on 1st embodiment of this invention. It is sectional drawing which attached the bracket for attachment to the jig | tool screw which concerns on 1st embodiment of this invention. It is a top view which mounted | wore the mounting bracket with the jig | tool screw which concerns on 1st embodiment of this invention. It is sectional drawing which pressed the resin-made valve | bulb to the resin-made flow path block by the press means which concerns on 1st embodiment of this invention. It is a top view of the bracket for attachment which concerns on 2nd embodiment of this invention. It is sectional drawing which inserted the jig | tool bolt in the bracket for attachment which concerns on 2nd embodiment of this invention. It is sectional drawing which inserted the jig | tool bolt which concerns on 2nd embodiment of this invention in resin-made valves, and stood on the baseplate. It is sectional drawing which pressed the resin-made valve | bulb to the resin-made flow path block by the press means which concerns on 2nd embodiment of this invention. FIG. 6 is a cross-sectional view in which a jig screw according to a third embodiment of the present invention is erected on a base plate and a resin valve is inserted into the jig screw. It is sectional drawing which fixed the bracket for attachment to the upper end of the jig screw which concerns on 3rd embodiment of this invention. It is sectional drawing which shows the non-pressing state of the modification of the press means which concerns on one embodiment of this invention. It is sectional drawing which shows the press state of the modification of the press means which concerns on one embodiment of this invention. It is an expanded sectional view of the gasket concerning one embodiment of the present invention. It is initial stage sectional drawing of the conventional chemical | medical solution valve attachment method. It is sectional drawing in the middle of the conventional chemical | medical solution valve attachment method.

Explanation of symbols

DESCRIPTION OF SYMBOLS 10 Chemical valve 20 Resin flow path block 23 Mounting through-hole 25 Upper surface port 251 Ring-shaped convex part 30 Resin valve 31 Valve seat 313 Mounting through-hole 315 Lower surface port 3151 Ring-shaped convex part 33 Cylinder 35 Top cover 40 Base plate 41 Female screw hole 50 Gasket 51, 52 Recess 60, 260, 360 Mounting bracket 61, 261 Male screw head receiving portion 611 Notch portion 2611, 3611 Hole portion 63, 263 Central circular portion 70 Pressing means 71 Pressing bolt 80, 280, 380 Jig screws 81, 281 and 381 Lower stepped portions 811, 2811 and 3811 Male screw portion 83 Upper stepped portions 287 and 3871 Bolt head 385 Female screw hole 387 Male screw bolt 90 Mounting male screw

Claims (4)

A resin flow channel block in which a flow channel communicating with the upper surface port and a mounting through hole are formed, and a resin flow block in which a mounting through hole coaxial with the mounting through hole of the resin flow channel block and a lower surface port are formed A chemical valve mounting in which a valve is mounted with four mounting male screws to a base plate in which a female screw hole is formed with a gasket mounted between the upper surface port and the lower surface port. In the method
A mounting bracket having a pressing means for pressing the upper surface of the resin valve in the center and having two male screw head receiving portions formed around the pressing means is attached to the two male screw head receiving portions. A first step that is attached and loosely attached to the female screw hole by two jig screws penetrating through the mounting through holes of the resin valve and the resin flow channel block;
A second step of moving the resin valve to a final mounting position on the resin channel block with the gasket attached by pressing the upper surface of the resin valve by the pressing means;
And a third step of attaching two attachment male screws to the two female screw holes without the jig screw. In the chemical valve mounting method according to claim 1,
The chemical valve mounting method, wherein the pressing means is a pressing bolt screwed into a female screw portion formed on the mounting bracket. In the chemical valve mounting method according to claim 1 or 2,
A notch is formed in the male screw head receiving portion of the mounting bracket,
A chemical valve mounting method, wherein a small-diameter portion that engages with the notch portion of the mounting bracket is formed in the vicinity of the upper end of the jig screw. In the chemical valve mounting method according to claim 1 or 2,
An internal thread hole is formed in the upper surface of the jig screw, and the first step is performed by screwing an external thread bolt into the internal thread hole.

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