JP7016465B2 - Fluid control device - Google Patents

Description

The present invention relates to a fluid control device.

In various manufacturing processes such as semiconductor manufacturing processes, fluid control devices that integrate various fluid devices such as on-off valves, regulators, and mass flow controllers are used to supply accurately weighed process gas to the process chamber. There is.
In a fluid control device as described above, instead of a pipe joint, an installation block (hereinafter referred to as a joint block) having a flow path is arranged along the longitudinal direction of the base plate, and a plurality of fluid devices are arranged on the joint block. Integration is realized by installing various fluid devices including joint blocks to which pipe joints are connected (see, for example, Patent Document 1).

Japanese Unexamined Patent Publication No. 2007-3013 Japanese Unexamined Patent Publication No. 2013-127312

In a fluid control device as disclosed in Patent Document 1, a joint block is fixed to a base plate with a bolt, various fluid devices are installed in the joint block, and the fluid device is fixed to the joint block with a bolt, and the joint block and the fluid are fixed. The gasket provided around the flow path connected to the device is pressed and sealed by the fastening force of the bolt. As described above, in assembling the fluid control device, a huge amount of bolts need to be tightened.
Patent Document 2 discloses a technique for fixing various fluid devices to a base plate with bolts via a joint block. This technique eliminates the need to bolt the joint block to the base plate.
However, if there is a dimensional difference between adjacent joint blocks, there is a possibility that the sealing property between the fluid device and the joint block cannot be ensured.

One object of the present invention is to significantly reduce the number of fastening bolts required for assembly, and to secure the sealing property between the fluid device and the joint block even if there is a dimensional difference between adjacent joint blocks. The purpose is to provide a fluid control device capable of this.
Another object of the present invention provides a flow rate control method using the above-mentioned fluid control device, a joint block applied to the above-mentioned fluid control device, a semiconductor manufacturing device using the above-mentioned fluid control device, and a semiconductor manufacturing method. There is something in it.

The fluid control device of the present invention is a fluid control device having a base plate, a fluid device, and a block-shaped first joint block and a second joint block interposed between the base plate and the fluid device. ,
The first and second joint blocks define upper and lower surfaces facing each other, side surfaces extending between the upper and lower surfaces, and flow paths having openings at least two openings on the upper surface.
The fluid device defines a flow path having first and second openings that open at at least two locations on the bottom surface and at least a pair of bolt insertion holes located on either side of each of the openings. Has a body,
One of the first opening of the body and one of the first joint blocks abutted against the first opening of the body, and one of the second opening of the body and the second joint block abutted against the second opening of the body. Further have gaskets, each placed around the opening of the
The body of the fluid device and the base plate are connected by inserting a fastening bolt into each of the bolt insertion holes of the body of the fluid device and screwing it into a threaded portion formed on the base plate, and the gasket is connected. The fastening force of the fastening bolts is used to seal between the lower surface of the body of the fluid device and the opening which is deformed and abutted between the upper surfaces of the first and second joint blocks.
It has a difference receiving mechanism that secures the sealing property by the gasket while accepting the dimensional difference in the height direction from at least the lower surface to the upper surface existing between the first joint block and the second joint block.

Preferably, the difference receiving mechanism supports the first joint block and the second joint block in a displaceable manner in order to accept the dimensional difference while supporting the fastening force by the fastening bolt. A configuration can be adopted that includes an elastic member interposed between the block and the second joint block and the base plate.
The joint block of the present invention is a joint block used in the above-mentioned fluid control device.
It has a recess for accommodating the elastic member.

Alternatively, the difference receiving mechanism is formed on at least one of the body of the fluid device and the first joint block and the second joint block and is tilted with respect to the reference plane due to the dimensional difference. A configuration having a notch for preventing interference between the body of the fluid device and the first joint block and the second joint block can be adopted.
The other joint blocks of the present invention are
A joint block used in the above fluid control device.
An annular protrusion to which the gasket is pressed is formed around each of the openings on the upper surface.
A pair of protrusions for positioning the gasket are formed on both sides of each of the openings on the upper surface.
The notch portion is composed of a flat surface formed adjacent to and lower than the annular protrusion, except for the pair of protrusions.

The flow rate control method of the present invention uses the above-mentioned fluid control device for the flow rate control of the process gas.

In the semiconductor manufacturing method of the present invention, the above fluid control device is used for controlling the process gas in a semiconductor process that requires a processing step with a process gas in a closed processing chamber.

The semiconductor manufacturing apparatus of the present invention has a fluid control device for supplying a process gas to the processing chamber.
The fluid control device includes the above-mentioned fluid control device.

According to the present invention, in addition to not fastening the first and second joint blocks to the base plate with fastening bolts, it is possible to accept at least height dimensional differences between the first and second joint blocks. Therefore, the device can be easily assembled and the manufacturing cost can be reduced.

The external perspective view of the fluid control apparatus which concerns on one Embodiment of this invention. The side view of the opening / closing valve of the fluid control device of FIG. 1 as seen from the A1 direction. The side view of the opening / closing valve of the fluid control device of FIG. 1 as seen from the B1 direction. FIG. 1 is a diagram including a cross section showing a relationship between an on-off valve of the fluid control device of FIG. 1, two joint blocks, and a base plate. FIG. 3A is an enlarged cross-sectional view inside the circle A of FIG. 3A. Top view of the gasket mechanism. FIG. 4B is a cross-sectional view taken along the line 4B-4B of FIG. 4A. Top view of the joint block. Front view of the joint block of FIG. 5A. FIG. 5A is a side view of the joint block. FIG. 5A is a cross-sectional view of the joint block of FIG. 5A. Top view of an example of a joint block without a notch. FIG. 6B is a cross-sectional view taken along the line 6B-6B of FIG. 6A. The figure which includes the cross section in a part which shows the relationship between one valve device, two joint blocks and a base plate of the fluid control device which concerns on 2nd Embodiment of this invention. FIG. 7A is an enlarged cross-sectional view inside the circle B of FIG. 7A. Top view of the joint block according to the second embodiment. The front view of the joint block of FIG. 8A. Bottom view of the joint block of FIG. 8A. FIG. 8A is a cross-sectional view taken along the line 8D-8D of the joint block of FIG. 8A. The figure which shows the state before the fastening force acts on the joint block which concerns on 2nd Embodiment of this invention. The figure which shows the state which the fastening force acted on the joint block which concerns on 2nd Embodiment of this invention. The schematic block diagram of the semiconductor manufacturing apparatus which concerns on one Embodiment of this invention.

Hereinafter, embodiments of the present invention will be described with reference to the drawings. In the present specification and the drawings, the same reference numerals are used for components having substantially the same functions, thereby omitting duplicate description.
1st Embodiment
FIG. 1 shows a fluid control device 1 according to an embodiment of the present invention.
In FIG. 1, the longitudinal direction of the base plate 50 having a rectangular outer shape is indicated by arrows A1 and A2, and the width direction of the base plate 50 is indicated by arrows B1 and B2.
In FIG. 1, various fluid devices 10A to 10H are arranged on the base plate 50 along the longitudinal directions A1 and A2. For convenience of explanation, the fluid devices 10A to 10H are arranged in only one row, but are actually arranged in a plurality of rows.
The fluid devices 10A to 10H include, but are not limited to, an on-off valve, a mass flow controller, a three-way valve, a regulator, and the like.
Here, the "fluid device" in the present invention is a device used for a fluid control device that controls a fluid flow or flow rate, and includes a body that defines a flow path, and this flow path is the lower surface of the body ( A device having at least two openings that open on the surface).

2A and 2B show the relationship between the on-off valve 10D as a fluid device, the joint block 20 (20A, 20B), the base plate 50, and the fastening bolt BT.
The on-off valve 10D has an actuator portion 10a and a metal body 11. The body 11 has four leg portions 11a extending downward from the lower surface 11b thereof, and each of the leg portions 11a is formed with a bolt insertion hole through which a fastening bolt BT is inserted. The fastening bolt BT is screwed into the screw hole 51 (see FIG. 1) formed in the base plate 50 through the body 11. It should be noted that a configuration in which the legs 11a are not provided can also be adopted.
As can be seen from FIGS. 2A and 2B, the lower end of the leg portion 11a of the body 11 is arranged at a position away from the upper surface of the base plate 50.
As shown in FIG. 3, the body 11 is formed with flow paths 12 and 13, and these flow paths 12 and 13 have openings 12a and 13a that are opened by the lower surface 11b of the body 11, respectively. ..
The body 11 has a built-in diaphragm (valve body) (not shown), and the diaphragm is operated by an actuator built in the actuator portion 10a and using an air pressure or the like as a drive source to operate the diaphragm between the flow path 12 and the flow path 13. Can be opened and closed.
In the width directions B1 and B2, two joint blocks 20A and 20B are arranged between the opposing leg portions 11a of the body 11. The body 11 is arranged on two joint blocks 20A and 20B in the longitudinal directions A1 and A2.
As shown in FIGS. 3A and 3B, V-shaped flow paths 21 are formed in the two joint blocks 20A and 20B, and the flow paths 21 have openings 21a, which are opened at two locations on the upper surfaces of the joint blocks 20A and 20B. Has 21b. The detailed structure of the joint block 20 (20A, 20B) will be described later.

As shown in FIG. 3B, the opening 13a of the flow path 13 of the on-off valve 10D is butted with the opening 21a of the flow path 21 of the joint block 20B. Although not shown, the opening 12a of the flow path 12 of the on-off valve 10D is abutted with the opening 21b of the flow path 21 of the joint block 20A. A gasket mechanism 40 is interposed between the opening 12a and the opening 21b and between the opening 13a and the opening 21a, respectively.

The gasket mechanism 40 has a guide 41 formed in a cylindrical shape and a gasket 42 formed in an annular shape that fits on the inner circumference of the guide 41. The gasket 42 has two connected to each other: an upper end surface 42a that is deformed by the annular protrusion 14 of the body 11 of the opening / closing valve 10D, and a lower end surface 42b that is deformed by the annular protrusion 22 of the joint block 20. It has an inner peripheral surface 42c connecting between the flow paths.
Examples of the gasket 42 include gaskets made of metal or resin. Examples of the gasket include a soft gasket, a semi-metal gasket, and a metal gasket. Specifically, the following are preferably used.
(1) Soft gasket, rubber O-ring, rubber sheet (for full seat)
-Joint sheet-Expanded graphite sheet-PTFE sheet-PTFE jacket type (2) Semi-metal gasket-Spiral-wound gaskets
・ Metal jacket gasket (3) Metal gasket ・ Metal flat gasket ・ Metal hollow O-ring ・ Ring joint

As shown in FIG. 3B, a holding recess 11c is formed around the opening 13a of the body 11 of the on-off valve 10D, and the gasket mechanism 40 is fitted therein. A holding recess is similarly formed around the opening 12a.
As described above, an annular protrusion 14 formed with a hardness higher than that of the material for forming the gasket 42 is formed around the opening 13a. Although not shown, an annular protrusion is also formed around the opening 12a.
As shown in FIGS. 3B, 5A and 5D, an annular protrusion 22 formed with a hardness higher than that of the material for forming the gasket 42 is formed around the openings 21a and 21b of the joint block 20. ..
The above-mentioned fastening bolt BT is arranged on both sides of the protrusion 14 and the protrusion 22 in the width directions B1 and B2, and the center position of the protrusion 14 and the protrusion 22 is the insertion hole of the fastening bolt BT in the longitudinal directions A1 and A2. It almost coincides with the center position. When each fastening bolt BT is screwed into the base plate and tightened, the tightening force of the fastening bolt BT acts on the joint block 20 interposed between the body 11 of the on-off valve 10D and the base plate 50, and the protrusions 14 and 22 By biting into the gasket 42, the space between the openings 12a and 13a of the flow paths 12 and 13 of the body 11 and the openings 21a and 21b of the flow path 21 of the joint block 20 is sealed.
In order to ensure the sealing property between the openings 12a and 13a of the flow paths 12 and 13 of the body 11 and the openings 21a and 21b of the flow paths 21 of the joint block 20, the tightening torque should be equal to or higher than the specified value. Each fastening bolt BT is tightened.

As shown in FIGS. 5A to 5D, the joint block 20 has a pair of protruding portions 23 formed on the upper surface of the opening of the flow path 21 so as to sandwich the openings 21a and 21b. As is clear from FIG. 5B and the like, these protrusions 23 project higher than the protrusions 22. The arcuate curved surface 23a of the protrusions 23 is provided for positioning the gasket 42 held by the gasket mechanism 40 with respect to the protrusions 22.
In the arrangement direction of the openings 21a and 21b of the joint block 20, the ends on the opening 21a side, between the openings 21a and 21b, and the ends on the opening 21b side are
The notch portion 24 is formed.
The notch 24 is formed of a flat surface adjacent to the annular protrusion 22 and formed lower than the protrusion 22.

6A and 6B show the joint block 220 in which the notch 24 is not formed for comparison.
The joint block 220 has a V-shaped flow path 221 like the joint block 20, and the flow path 221 has openings 221a and 221b on the upper surface 224. An annular protrusion 222 is formed around the openings 221a and 221b, and a holding recess 223 for holding the gasket mechanism 40 is formed on the outer periphery thereof. The upper surface 224 is located higher than the protrusion 222.
The cutout portion 24 of the joint block 20 is obtained by removing a part of the upper surface 224 of the joint block 220 described above by cutting or the like.

Next, the role of the cutout portion 24 of the joint block 20 will be described.
Although the two joint blocks 20A and 20B are designed to have the same height dimension (distance from the lower surface to the upper surface), there is actually a manufacturing dimensional difference. Such a dimensional difference exists not only in the height but also in other dimensions, but in the present embodiment, only the height dimension will be described.
As shown in FIG. 3A, the height of the joint block 20A is H1, and the height of the joint block 20B is H2. When each fastening bolt BT (not shown in FIG. 3A) is screwed into the screw hole 51 of the base plate 50 and tightened, each gasket 42 is deformed as described above. When the height H1 is larger than the height H2, the on-off valve 10D (body 11) is inclined in the C2 direction. When the height H1 is smaller than the height H2, the on-off valve 10D (body 11) is inclined in the C1 direction.
When the lower surface 11b of the body 11 and the upper surfaces of the joint blocks 20A and 20B are close to each other, that is, when the notch portion 24 does not exist, the lower surface 11b of the body 11 and the lower surface 11b of the body 11 depend on the inclination direction and the degree of inclination of the body 11. There is a possibility of interference with the upper surfaces of the joint blocks 20A and 20B.
In the present embodiment, by forming the cutout portion 24 in the joint blocks 20A and 20B, the occurrence of interference between the body 11 and the joint blocks 20A and 20B is surely prevented. The cutout portion 24 constitutes a difference receiving mechanism that secures the sealing property by the gasket 42 while accepting the dimensional difference between the joint blocks 20A and 20B.

As described above, according to the present embodiment, in addition to being able to omit the work of fastening the joint blocks 20A and 20B to the base plate with the fastening bolts, a reliable seal between the on-off valve 10D and the joint blocks 20A and 20B can be achieved. Can be secured.
In this embodiment, the case where the notch portion 24 is provided in the joint blocks 20A and 20B is illustrated, but the notch portion 24 may be provided in the lower surface 11b of the body 11 of the on-off valve 10D, or the joint block 20A may be provided. , 20B and the body 11 may be provided.
Further, a notch is provided so as to avoid interference between the body 11 and the joint blocks 20A and 20B due to inclination in a direction different from the C1 and C2 directions as well as the C1 and C2 directions as shown in FIG. 3A. You can also.
In the present embodiment, the case where the present invention is applied to the on-off valve 10D and the joint blocks 20A and 20B is illustrated, but it is naturally applicable to other fluid devices and the joint block.

Second Embodiment A second embodiment of the present invention will be described with reference to FIGS. 7A-9B. In FIGS. 7A to 9B, the same reference numerals are used for the same components as those in the above embodiment.
In FIG. 7A, the difference from the above embodiment is the structure of the joint block 120 (120A, 120B).
Similar to the joint blocks 20 and 220 described above, the joint block 120 includes a V-shaped flow path 121, and the flow path 121 has openings 121a and 121b that are opened at two points on the upper surface 120a. An annular protrusion 122 to be pressed against the gasket 42 is formed around the openings 121a and 121b, and a holding recess 123 for holding the gasket mechanism 40 is formed on the outer periphery thereof. There is no notch on the upper surface 120a of the joint block 120, and as can be seen from FIG. 7B, a slight gap is formed between the lower surface 11b of the body 11 of the on-off valve 10D and the upper surface 120a of the joint block 120. To.
A pin hole 125 is formed on the lower surface 120b of the joint block 120 at a position substantially corresponding to the openings 121a and 121b. A coil spring 160 and a support pin 150 as elastic members are provided in the pin hole 125. A part of the support pin 150 protrudes from the lower surface 120b. As will be described later, the support pin 150 and the coil spring 160 constitute a difference receiving mechanism that secures the sealing property by the gasket 42 while accepting the dimensional difference between the joint blocks 120A and 120B.

As shown in FIGS. 9A and 9B, the support pin 150 is arranged on the upper surface of the base plate 50 and supports the joint blocks 120A and 120B via the coil spring 160.
As shown in FIG. 9A, the height of the joint block 120A is H1, the height of the joint block 120B is H2, and the height H2 is larger than the height H1. When the fastening force of the fastening bolt BT does not act on the joint blocks 120A and 120B, the upper surface 120a of the joint block 120B is located higher than the upper surface 120a of the joint block 120A from the upper surface of the base plate 50.
As each fastening bolt BT is tightened, a force F1 is applied to the joint block 120A from the body 11 and a force F2 is applied to the joint block 120B from the body 11 as shown in FIG. 9B. The forces F1 and F2 are forces acting on the joint blocks 120A and 120B when the fastening bolt BT is tightened to a torque value at which the required sealing performance by the gasket 42 can be obtained. If the heights of the joint blocks 120A and 120B are ideally equal, the forces F1 and F2 should be about the same magnitude. When there is a difference between the height H2 and the height H1, the forces F1 and F2 are different from each other, and the magnitude of the force acting on the coil spring 160 of the joint block 120A and the force acting on the joint block 120B according to this difference. The difference will be different. When the fastening bolts BT are tightened so that the height positions of the upper surfaces 120a of the joint blocks 120A and 120B are substantially equal, as shown in FIG. 9B, the displacement of one joint block 120B toward the base plate 50 is the displacement of the other joint block 120A. Is greater than the displacement of. As a result, the lower surface 11b of the body 11 is also arranged substantially parallel to the upper surface of the base plate 50 which is the reference plane.

According to the present embodiment, in addition to being able to omit the work of fastening the joint blocks 120A and 120B to the base plate 50 with the fastening bolts, the on-off valve 10D and the joint block 120A, without tilting the on-off valve 10D with respect to the base plate 50, A reliable seal between the 120B and 120B can be secured.
In the present embodiment, the case where the present invention is applied to the on-off valve 10D and the joint blocks 120A and 120B is illustrated, but it is naturally applicable to other fluid devices and the joint block.
In the present embodiment, the coil spring 160 is used as the elastic member, but the present invention is not limited to this, and other elements such as a disc spring may be used. It is also possible to omit the support pin 150.

Next, an application example of the above-mentioned fluid control device 1 will be described with reference to FIG.
The semiconductor manufacturing apparatus 1000 shown in FIG. 10 is an apparatus for executing a semiconductor manufacturing process by the ALD method, 300 is a process gas supply source, 400 is a gas box, 500 is a tank, 600 is a control unit, and 700 is a processing chamber. , 800 indicates an exhaust pump, and 900 indicates an on-off valve.
In the semiconductor manufacturing process by the ALD method, it is necessary to precisely adjust the flow rate of the processing gas, and it is also necessary to secure the flow rate of the processing gas to some extent by increasing the diameter of the substrate.
The gas box 400 incorporates the above-mentioned fluid control device 1 in which various fluid devices such as an on-off valve, a regulator, and a mass flow controller are integrated and housed in the box in order to supply the accurately weighed process gas to the processing chamber 700. is doing.
The tank 500 functions as a buffer for temporarily storing the processing gas supplied from the gas box 400.
The on-off valve 900 controls the flow rate of the gas measured by the gas box 400.
The control unit 600 controls the on-off valve 900 to execute the flow rate control.
The processing chamber 700 provides a sealed processing space for film formation on the substrate by the ALD method.
The exhaust pump 800 evacuates the inside of the processing chamber 700.

In the above application example, the case where the fluid control device 1 is used in the semiconductor manufacturing process by the ALD method has been exemplified, but the present invention is not limited to this, and the present invention is, for example, an atomic layer etching method (ALE: atomic layer etching method). It can be applied to all objects that require precise flow control.

1 Fluid control device 10A to 10H Fluid equipment 10a Actuator part 10D Open / close valve (fluid equipment)
11 Body 11a Legs 11b Bottom surface 11c Holding recesses 12, 13 Flow paths 12a, 13a Openings 14 Protrusions 20, 20A, 20B Joint block 21 Flow paths 21a, 21b Openings 22 Protrusions 23 Protrusions 23a Curved surfaces 24 Notches 40 Gasket mechanism 41 Guide 42a, 42b Upper end surface 42c Inner peripheral surface 50 Base plate 51 Thread hole 120 Joint block 121 Flow path 122 Protrusion 123 Holding recess 150 Support pin 160 Coil spring (elastic member)
220 Fitting block 221 Flow path 221a, 221b Opening 224 Top surface BT Fastening bolt A1, A2 Longitudinal direction B1, B2 Width direction

Claims (7)

A fluid control device having a base plate, a fluid device, and a block-shaped first joint block and a second joint block interposed between the base plate and the fluid device.
The first and second joint blocks define an upper surface and a lower surface facing each other, a side surface extending between the upper surface and the lower surface, and a flow path having an opening opened in the upper surface.
The fluid device has a body that defines a flow path having first and second openings that open at at least two locations on the lower surface and a pair of bolt insertion holes located on either side of each of the openings. death,
The opening of the first opening of the body and the opening of the first joint block that is abutted against the first opening of the body, and the opening of the second opening of the body and the opening of the second joint block that is abutted against the second opening of the body. It also has gaskets placed around it,
The body of the fluid device and the base plate are connected by inserting a fastening bolt into each of the bolt insertion holes of the body of the fluid device and screwing it into a threaded portion formed on the base plate, and the gasket is connected. By deforming between the lower surface of the body of the fluid device and the upper surface of the first and second joint blocks due to the fastening force of the fastening bolt, the contact surface with each opening is sealed.
It has a difference receiving mechanism that secures the sealing property by the gasket while accepting the difference in the height direction from at least the lower surface to the upper surface existing between the first joint block and the second joint block.
The difference receiving mechanism supports the first joint block and the second joint block in a displaceable manner in order to accept the dimensional difference while supporting the fastening force by the fastening bolt, the first joint block and the second joint block. A fluid control device comprising an elastic member interposed between the joint block of the body and the base plate . A fluid control device having a base plate, a fluid device, and a block-shaped first joint block and a second joint block interposed between the base plate and the fluid device.
The first and second joint blocks define an upper surface and a lower surface facing each other, a side surface extending between the upper surface and the lower surface, and a flow path having an opening opened in the upper surface.
The fluid device has a body that defines a flow path having first and second openings that open at at least two locations on the lower surface and a pair of bolt insertion holes located on either side of each of the openings. death,
The opening of the first opening of the body and the opening of the first joint block that is abutted against the first opening of the body, and the opening of the second opening of the body and the opening of the second joint block that is abutted against the second opening of the body. It also has gaskets placed around it,
The body of the fluid device and the base plate are connected by inserting a fastening bolt into each of the bolt insertion holes of the body of the fluid device and screwing it into a threaded portion formed on the base plate, and the gasket is connected. By deforming between the lower surface of the body of the fluid device and the upper surface of the first and second joint blocks due to the fastening force of the fastening bolt, the contact surface with each opening is sealed.
It has a difference receiving mechanism that secures the sealing property by the gasket while accepting the difference in dimensions in the height direction from at least the lower surface to the upper surface existing between the first joint block and the second joint block.
The difference receiving mechanism is formed on at least one of the body of the fluid device and the first joint block and the second joint block, and the body of the fluid device is inclined with respect to the reference plane due to the dimensional difference. A fluid control device having a notch for preventing interference between the first joint block and the second joint block . A joint block used in the fluid control device according to claim 1 .
A joint block having a recess for accommodating the elastic member. A joint block used in the fluid control device according to claim 2 .
An annular protrusion to which the gasket is pressed is formed around each of the openings on the upper surface.
A pair of protrusions for positioning the gasket are formed on both sides of each of the openings on the upper surface.
The notch is a joint block formed of a flat surface adjacent to and lower than the annular protrusion, except for the pair of protrusions. The flow rate control method using the fluid control device according to claim 1 or 2 for controlling the flow rate of the process gas. A semiconductor manufacturing method using the fluid control device according to claim 1 or 2 for controlling the process gas in a semiconductor process that requires a processing step using a process gas in a closed processing chamber. It has a fluid control device to supply the process gas to the processing chamber,
The fluid control device is a semiconductor manufacturing device including the fluid control device according to claim 1 or 2 .

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