JP2012043789A - 導電性ペースト、前記導電性ペーストを用いて形成された電極を有する電子素子および太陽電池 - Google Patents
導電性ペースト、前記導電性ペーストを用いて形成された電極を有する電子素子および太陽電池 Download PDFInfo
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- JP2012043789A JP2012043789A JP2011175991A JP2011175991A JP2012043789A JP 2012043789 A JP2012043789 A JP 2012043789A JP 2011175991 A JP2011175991 A JP 2011175991A JP 2011175991 A JP2011175991 A JP 2011175991A JP 2012043789 A JP2012043789 A JP 2012043789A
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- conductive paste
- electrode
- conductive
- specific resistance
- conductive powder
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Classifications
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- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
- C22C45/02—Amorphous alloys with iron as the major constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
- C22C45/04—Amorphous alloys with nickel or cobalt as the major constituent
-
- C—CHEMISTRY; METALLURGY
- C22—METALLURGY; FERROUS OR NON-FERROUS ALLOYS; TREATMENT OF ALLOYS OR NON-FERROUS METALS
- C22C—ALLOYS
- C22C45/00—Amorphous alloys
- C22C45/10—Amorphous alloys with molybdenum, tungsten, niobium, tantalum, titanium, or zirconium or Hf as the major constituent
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01B—CABLES; CONDUCTORS; INSULATORS; SELECTION OF MATERIALS FOR THEIR CONDUCTIVE, INSULATING OR DIELECTRIC PROPERTIES
- H01B1/00—Conductors or conductive bodies characterised by the conductive materials; Selection of materials as conductors
- H01B1/20—Conductive material dispersed in non-conductive organic material
- H01B1/22—Conductive material dispersed in non-conductive organic material the conductive material comprising metals or alloys
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
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- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/02—Details
- H01L31/0224—Electrodes
- H01L31/022408—Electrodes for devices characterised by at least one potential jump barrier or surface barrier
- H01L31/022425—Electrodes for devices characterised by at least one potential jump barrier or surface barrier for solar cells
- H01L31/022441—Electrode arrangements specially adapted for back-contact solar cells
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
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- H01L31/04—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices
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- H01L31/068—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells
- H01L31/0682—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof adapted as photovoltaic [PV] conversion devices characterised by at least one potential-jump barrier or surface barrier the potential barriers being only of the PN homojunction type, e.g. bulk silicon PN homojunction solar cells or thin film polycrystalline silicon PN homojunction solar cells back-junction, i.e. rearside emitter, solar cells, e.g. interdigitated base-emitter regions back-junction cells
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
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- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
- Y02E10/547—Monocrystalline silicon PV cells
Abstract
【解決手段】導電性粉末、金属ガラスおよび有機ビヒクルを含み、前記金属ガラスは、低い比抵抗を有する元素と、前記導電性粉末と反応して固溶体を形成する元素と、酸化性の高い元素と、よりなる群から選ばれる少なくとも2種を含む合金であり、前記低い比抵抗を有する元素は100μΩcmより低い比抵抗を有し、前記酸化性の高い元素は酸化物形成のギブスフリーエネルギーの絶対値が100kJ/molより大きいものである導電性ペースト、前記導電性ペーストを用いて形成された電極を有する電子素子および太陽電池に関する。
【選択図】図4C
Description
(実施例1)
銀(Ag)粉末及び金属ガラスCu50Zr50をエチルセルロースバインダー及びブチルカルビトール溶媒を含む有機ビヒクルに添加した。この時、銀(Ag)粉末、金属ガラスCu50Zr50、及び有機ビヒクルは、導電性ペーストの総含有量に対してそれぞれ約84質量%、約4質量%、及び約12質量%で混合した。
金属ガラスとしてCu50Zr50の代わりにCu43Zr43Al7Ag7を使用したことを除いては、実施例1と同様の方法によって導電性ペーストを製造した後、電極を形成した。
実施例1及び2によって形成された電極の接触抵抗値及び比抵抗値を測定した。抵抗値はTransfer length method(TLM)で測定した。
110a:下部半導体層、
110b:上部半導体層、
111a:第1のドープ領域、
111b:第2のドープ領域、
112:絶縁膜、
115:バッファ層、
115a:金属ガラス、
115b:液体挙動の金属ガラス、
115c:結晶性金属ガラス、
120:前面電極部、
120a:導電性粉末、
120b:導電性粉末団塊、
120c:液体挙動の金属ガラスに拡散された導電性粒子、
120d:半導体基板の表面に存在する再結晶化した導電性粒子120d、
120:電極部、
121:第1電極部、
130:誘電膜、
135:貫通部、
140:背面電極部、
141:第2電極部、
150:誘電膜、
170:電極。
Claims (21)
- 導電性粉末、金属ガラスおよび有機ビヒクルを含み、
前記金属ガラスは、
低い比抵抗を有する元素と、
前記導電性粉末と反応して固溶体を形成する元素と、
酸化性の高い元素と、
よりなる群から選ばれる少なくとも2種を含む合金であり、
前記低い比抵抗を有する元素は、100μΩcmよりも低い比抵抗を有し、
前記酸化性の高い元素は、酸化物形成のギブスフリーエネルギーの絶対値が100kJ/molより大きいことを特徴とする、導電性ペースト。 - 前記導電性粉末は、銀(Ag)、アルミニウム(Al)、銅(Cu)、ニッケル(Ni)またはこれらの組合せを含むことを特徴とする、請求項1に記載の導電性ペースト。
- 前記導電性粉末は、1nm〜50μmの大きさ(平均粒径)を有することを特徴とする、請求項1または2に記載の導電性ペースト。
- 前記低い比抵抗を有する元素の比抵抗は、15μΩcmよりも低いことを特徴とする、請求項1〜3のいずれか1項に記載の導電性ペースト。
- 前記低い比抵抗を有する元素は、銀(Ag)、銅(Cu)、金(Au)、アルミニウム(Al)、カルシウム(Ca)、ベリリウム(Be)、マグネシウム(Mg)、ナトリウム(Na)、モリブデン(Mo)、タングステン(W)、錫(Sn)、亜鉛(Zn)、ニッケル(Ni)、カリウム(K)、リチウム(Li)、鉄(Fe)、パラジウム(Pd)、白金(Pt)、ルビジウム(Rb)、クロム(Cr)およびストロンチウム(Sr)よりなる群から選ばれる少なくとも1種を含むことを特徴とする、請求項1〜4のいずれか1項に記載の導電性ペースト。
- 前記導電性粉末と反応して固溶体を形成する元素は、前記導電性粉末との混合熱(heat of mixing)が0KJ/molよりも小さいことを特徴とする、請求項1〜5のいずれか1項に記載の導電性ペースト。
- 前記導電性粉末と反応して固溶体を形成する元素は、ランタン(La)、セリウム(Ce)、プラセオジミウム(Pr)、プロメチウム(Pm)、サマリウム(Sm)、ルテチウム(Lu)、イットリウム(Y)、ネオジウム(Nd)、ガドリニウム(Gd)、テルビウム(Tb)、ジスプロシウム(Dy)、ホルミウム(Ho)、エルビウム(Er)、ツリウム(Tm)、トリウム(Th)、カルシウム(Ca)、スカンジウム(Sc)、バリウム(Ba)、イッテルビウム(Yb)、ストロンチウム(Sr)、ユウロピウム(Eu)、ジルコニウム(Zr)、リチウム(Li)、ハフニウム(Hf)、マグネシウム(Mg)、リン(P)、砒素(As)、パラジウム(Pd)、金(Au)、プルトニウム(Pu)、ガリウム(Ga)、ゲルマニウム(Ge)、アルミニウム(Al)、亜鉛(Zn)、アンチモン(Sb)、ケイ素(Si)、錫(Sn)、チタニウム(Ti)、カドミウム(Cd)、インジウム(In)、白金(Pt)、ロジウム(Rh)、イリジウム(Ir)、ウラニウム(U)、ニッケル(Ni)、ルテニウム(Ru)、テクネチウム(Tc)、マンガン(Mn)、コバルト(Co)、タンタル(Ta)、ニオビウム(Nb)、オスミウム(Os)、バナジウム(V)、鉄(Fe)、クロム(Cr)、レニウム(Re)、モリブデン(Mo)、銀(Ag)、タングステン(W)、ベリリウム(Be)、ホウ素(B)、 銅(Cu)および水銀(Hg)よりなる群から選ばれる少なくとも1種を含むことを特徴とする、請求項6に記載の導電性ペースト。
- 前記酸化性の高い元素は、銅(Cu)、チタニウム(Ti)、ルテニウム(Ru)、カドミウム(Cd)、亜鉛(Zn)、ロジウム(Rh)、カリウム(K)、ナトリウム(Na)、ニッケル(Ni)、ビスマス(Bi)、錫(Sn)、バリウム(Ba)、ゲルマニウム(Ge)、リチウム(Li)、ストロンチウム(Sr)、マグネシウム(Mg)、ベリリウム(Be)、鉛(Pb)、カルシウム(Ca)、モリブデン(Mo)、タングステン(W)、コバルト(Co)、インジウム(In)、ケイ素(Si)、ガリウム(Ga)、鉄(Fe)、ジルコニウム(Zr)、クロム(Cr)、ホウ素(B)、マンガン(Mn)、アルミニウム(Al)、ランタン(La)、ネオジウム(Nd)、ニオビウム(Nb)、バナジウム(V)、イットリウム(Y)、及びスカンジウム(Sc)よりなる群から選ばれる少なくとも1種を含むことを特徴とする、請求項1〜7のいずれか1項に記載の導電性ペースト。
- 前記導電性粉末、前記金属ガラス及び前記有機ビヒクルは、前記導電性ペーストの総含量に対してそれぞれ30〜99質量%、0.1〜20質量%、および約0.9〜69.9質量%で含まれていることを特徴とする、請求項1〜8のいずれか1項に記載の導電性ペースト。
- 前記金属ガラスは、非晶質であることを特徴とする、請求項1〜9のいずれか1項に記載の導電性ペースト。
- 前記金属ガラスの過冷却液体区間は5〜200℃であることを特徴とする、請求項1〜10のいずれか1項に記載の導電性ペースト。
- 前記金属ガラスは、銅(Cu)およびジルコニウム(Zr)を含むことを特徴とする、請求項1〜11のいずれか1項に記載の導電性ペースト。
- 前記金属ガラスは、アルミニウム(Al)、銀(Ag)、ニッケル(Ni)、チタニウム(Ti)、鉄(Fe)、パラジウム(Pd)、およびハフニウム(Hf)よりなる群から選ばれる少なくとも1種をさらに含むことを特徴とする、請求項12に記載の導電性ペースト。
- 前記アルミニウム(Al)、銀(Ag)、ニッケル(Ni)、チタニウム(Ti)、鉄(Fe)、パラジウム(Pd)、およびハフニウム(Hf)よりなる群から選ばれる少なくとも1種は、前記金属ガラスの総含量に対して10at%以下で含まれていることを特徴とする、請求項13に記載の導電性ペースト。
- 請求項1ないし14のいずれか1項による導電性ペーストを用いて形成された電極を含むことを特徴とする、電子素子。
- 前記電極は1kΩcm2以下の接触抵抗を有することを特徴とする、請求項15に記載の電子素子。
- 前記電極は、10mΩcm以下の比抵抗を有することを特徴とする、請求項15または16に記載の電子素子。
- 半導体基板と、
請求項1ないし14のいずれか1項による導電性ペーストを用いて形成され、前記半導体基板と電気的に接続される電極と、
を含むことを特徴とする、太陽電池。 - 前記電極は1kΩcm2以下の接触抵抗を有することを特徴とする、請求項18に記載の太陽電池。
- 前記電極は、10mΩcm以下の比抵抗を有することを特徴とする、請求項18または19に記載の太陽電池。
- 前記電極は、前記半導体基板と隣接する領域に位置するバッファ層と、前記バッファ層以外の領域に位置して導電性物質を含む電極部とを含むことを特徴とする、請求項18〜20のいずれか1項に記載の太陽電池。
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US (1) | US20120037216A1 (ja) |
EP (1) | EP2450908B1 (ja) |
JP (1) | JP2012043789A (ja) |
KR (1) | KR101960463B1 (ja) |
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JP2013058722A (ja) * | 2011-09-08 | 2013-03-28 | Samsung Electro-Mechanics Co Ltd | 外部電極用導電性ペースト、これを用いた積層セラミック電子部品及びその製造方法 |
JP2014011158A (ja) * | 2012-06-27 | 2014-01-20 | Samsung Electronics Co Ltd | 導電性ペースト、前記導電性ペーストを用いて形成された電極を含む電子素子及び太陽電池 |
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Family Cites Families (11)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2003013103A (ja) * | 2001-06-26 | 2003-01-15 | Murata Mfg Co Ltd | 導電粉末の製造方法、導電粉末、導電性ペーストおよび積層セラミック電子部品 |
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-
2011
- 2011-02-04 US US13/021,535 patent/US20120037216A1/en not_active Abandoned
- 2011-07-06 KR KR1020110066739A patent/KR101960463B1/ko active IP Right Grant
- 2011-08-11 JP JP2011175991A patent/JP2012043789A/ja active Pending
- 2011-08-12 EP EP11177515.1A patent/EP2450908B1/en active Active
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JP2014011158A (ja) * | 2012-06-27 | 2014-01-20 | Samsung Electronics Co Ltd | 導電性ペースト、前記導電性ペーストを用いて形成された電極を含む電子素子及び太陽電池 |
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Also Published As
Publication number | Publication date |
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KR20120015997A (ko) | 2012-02-22 |
EP2450908A3 (en) | 2013-03-06 |
US20120037216A1 (en) | 2012-02-16 |
EP2450908A2 (en) | 2012-05-09 |
EP2450908B1 (en) | 2019-07-03 |
KR101960463B1 (ko) | 2019-03-21 |
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