JP2012040836A - Laminate, and utilization thereof - Google Patents
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- 239000004642 Polyimide Substances 0.000 claims abstract description 68
- 239000000758 substrate Substances 0.000 claims abstract description 44
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- 238000005266 casting Methods 0.000 claims abstract description 7
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- 239000011521 glass Substances 0.000 claims description 19
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- 125000006158 tetracarboxylic acid group Chemical group 0.000 claims description 5
- 238000010943 off-gassing Methods 0.000 abstract 1
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- 238000010438 heat treatment Methods 0.000 description 10
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- NVKGJHAQGWCWDI-UHFFFAOYSA-N 4-[4-amino-2-(trifluoromethyl)phenyl]-3-(trifluoromethyl)aniline Chemical compound FC(F)(F)C1=CC(N)=CC=C1C1=CC=C(N)C=C1C(F)(F)F NVKGJHAQGWCWDI-UHFFFAOYSA-N 0.000 description 8
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 8
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 7
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- -1 aliphatic tertiary amine Chemical class 0.000 description 5
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- 239000011248 coating agent Substances 0.000 description 4
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- 239000003960 organic solvent Substances 0.000 description 4
- 229920005575 poly(amic acid) Polymers 0.000 description 4
- 239000002904 solvent Substances 0.000 description 4
- QQGYZOYWNCKGEK-UHFFFAOYSA-N 5-[(1,3-dioxo-2-benzofuran-5-yl)oxy]-2-benzofuran-1,3-dione Chemical compound C1=C2C(=O)OC(=O)C2=CC(OC=2C=C3C(=O)OC(C3=CC=2)=O)=C1 QQGYZOYWNCKGEK-UHFFFAOYSA-N 0.000 description 3
- CSCPPACGZOOCGX-UHFFFAOYSA-N Acetone Chemical compound CC(C)=O CSCPPACGZOOCGX-UHFFFAOYSA-N 0.000 description 3
- WEVYAHXRMPXWCK-UHFFFAOYSA-N Acetonitrile Chemical compound CC#N WEVYAHXRMPXWCK-UHFFFAOYSA-N 0.000 description 3
- ZMANZCXQSJIPKH-UHFFFAOYSA-N Triethylamine Chemical compound CCN(CC)CC ZMANZCXQSJIPKH-UHFFFAOYSA-N 0.000 description 3
- 238000002425 crystallisation Methods 0.000 description 3
- 230000008025 crystallization Effects 0.000 description 3
- 150000007529 inorganic bases Chemical class 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 2
- WYURNTSHIVDZCO-UHFFFAOYSA-N Tetrahydrofuran Chemical compound C1CCOC1 WYURNTSHIVDZCO-UHFFFAOYSA-N 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
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- 230000001737 promoting effect Effects 0.000 description 2
- 238000002371 ultraviolet--visible spectrum Methods 0.000 description 2
- 239000013585 weight reducing agent Substances 0.000 description 2
- VLDPXPPHXDGHEW-UHFFFAOYSA-N 1-chloro-2-dichlorophosphoryloxybenzene Chemical compound ClC1=CC=CC=C1OP(Cl)(Cl)=O VLDPXPPHXDGHEW-UHFFFAOYSA-N 0.000 description 1
- MXPYJVUYLVNEBB-UHFFFAOYSA-N 2-[2-(2-carboxybenzoyl)oxycarbonylbenzoyl]oxycarbonylbenzoic acid Chemical compound OC(=O)C1=CC=CC=C1C(=O)OC(=O)C1=CC=CC=C1C(=O)OC(=O)C1=CC=CC=C1C(O)=O MXPYJVUYLVNEBB-UHFFFAOYSA-N 0.000 description 1
- RXNKCIBVUNMMAD-UHFFFAOYSA-N 4-[9-(4-amino-3-fluorophenyl)fluoren-9-yl]-2-fluoroaniline Chemical compound C1=C(F)C(N)=CC=C1C1(C=2C=C(F)C(N)=CC=2)C2=CC=CC=C2C2=CC=CC=C21 RXNKCIBVUNMMAD-UHFFFAOYSA-N 0.000 description 1
- 125000004203 4-hydroxyphenyl group Chemical group [H]OC1=C([H])C([H])=C(*)C([H])=C1[H] 0.000 description 1
- JLTDJTHDQAWBAV-UHFFFAOYSA-N N,N-dimethylaniline Chemical compound CN(C)C1=CC=CC=C1 JLTDJTHDQAWBAV-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 125000001931 aliphatic group Chemical group 0.000 description 1
- 150000001408 amides Chemical class 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
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- WPYMKLBDIGXBTP-UHFFFAOYSA-N benzoic acid Chemical compound OC(=O)C1=CC=CC=C1 WPYMKLBDIGXBTP-UHFFFAOYSA-N 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000003086 colorant Substances 0.000 description 1
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- 238000007607 die coating method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- ANSXAPJVJOKRDJ-UHFFFAOYSA-N furo[3,4-f][2]benzofuran-1,3,5,7-tetrone Chemical compound C1=C2C(=O)OC(=O)C2=CC2=C1C(=O)OC2=O ANSXAPJVJOKRDJ-UHFFFAOYSA-N 0.000 description 1
- 239000012456 homogeneous solution Substances 0.000 description 1
- 238000010030 laminating Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000000178 monomer Substances 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 230000035699 permeability Effects 0.000 description 1
- 230000000704 physical effect Effects 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 238000006116 polymerization reaction Methods 0.000 description 1
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
- 238000004528 spin coating Methods 0.000 description 1
- 238000005507 spraying Methods 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- YLQBMQCUIZJEEH-UHFFFAOYSA-N tetrahydrofuran Natural products C=1C=COC=1 YLQBMQCUIZJEEH-UHFFFAOYSA-N 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
- 230000002087 whitening effect Effects 0.000 description 1
Landscapes
- Laminated Bodies (AREA)
- Moulding By Coating Moulds (AREA)
- Macromolecular Compounds Obtained By Forming Nitrogen-Containing Linkages In General (AREA)
Abstract
Description
本発明は、透明性、耐熱性に優れるポリイミドと無機基板の積層体、及びそれを用いたフラットパネルディスプレイ用部材、およびフレキシブルデバイスに関する。 The present invention relates to a laminate of a polyimide and an inorganic substrate having excellent transparency and heat resistance, a flat panel display member using the laminate, and a flexible device.
現在、フラットパネルディスプレイ、電子ペーパーなどの電子デバイスの分野では、主としてガラス基板が用いられているが、ガラス基板には重く壊れやすいという問題があるため、必ずしも理想的な基板と言えない。そこで、基板をガラスからポリマー材料へと置き換えたフレキシブルデバイスを実現しようとする検討が盛んに行われてきた。しかしながら、これらの技術の多くは新しい生産技術や装置を必要とするため、大量生産されるには至っていない。 At present, glass substrates are mainly used in the field of electronic devices such as flat panel displays and electronic paper. However, glass substrates are heavy and easily broken, so they are not necessarily ideal substrates. Therefore, studies have been actively conducted to realize a flexible device in which the substrate is replaced with glass from a polymer material. However, since many of these technologies require new production technologies and equipment, they have not been mass-produced.
近年、フラットパネルディスプレイの製造方法としては、軽量化や壊れにくさを具備する材料として薄いガラス基板にポリイミド層を設けた材料を用いる方法が提案されている。即ち、ガラス基板にポリイミド層を形成した積層体を作製し、ポリイミド表面上に薄膜トランジスタ(以下、TFT)や透明電極等を形成し、ディスプレイ部材として用いることができる。また、フレキシブルデバイス用の部材を製造する方法として、前記積層体のポリイミド表面上に薄膜トランジスタや透明電極等を形成した後にガラス基板を剥離除去する方法が提案されている。(非特許文献1)。 In recent years, as a method for manufacturing a flat panel display, a method of using a material in which a polyimide layer is provided on a thin glass substrate has been proposed as a material that is lightweight and difficult to break. That is, a laminate in which a polyimide layer is formed on a glass substrate is prepared, and a thin film transistor (hereinafter referred to as TFT), a transparent electrode, or the like is formed on the polyimide surface, and can be used as a display member. Further, as a method for manufacturing a member for a flexible device, a method of peeling and removing a glass substrate after forming a thin film transistor, a transparent electrode, or the like on the polyimide surface of the laminate has been proposed. (Non-Patent Document 1).
これらで用いられる積層体またはポリイミドは、ディスプレイ用途としての十分な透明性や製造時の高温プロセスに耐えうる耐熱性が求められる。特に薄膜トランジスタや透明導電膜の形成では、300℃以上の耐熱性が求められる。具体的には300℃におけるポリイミドからのアウトガスが0.5%未満であることが求められている。 The laminates or polyimides used in these materials are required to have sufficient transparency for display applications and heat resistance that can withstand high-temperature processes during production. Particularly in the formation of thin film transistors and transparent conductive films, heat resistance of 300 ° C. or higher is required. Specifically, the outgas from polyimide at 300 ° C. is required to be less than 0.5%.
また、透明性としては、ヘイズが低く、全光線透過率が高い事が求められており、更には、波長が400nmの光の透過率が50%以上であることが求められている。 Moreover, as transparency, it is calculated | required that haze is low and a total light transmittance is high, Furthermore, it is calculated | required that the transmittance | permeability of light with a wavelength of 400 nm is 50% or more.
良好な透明性や耐熱性を有する材料として3,3',4,4'-ビフェニルテトラカルボン酸二無水物と2,2'-ビス(トリフルオロメチル)ベンジジンから得られるポリイミド材料が提案されている。(特許文献1、特許文献2)。特許文献1には、化学転換法(触媒溶液の添加する方法)により得られたフィルムは、全光線透過率も70%以上と透明性に優れ、また低熱膨張係数を有している事が記載されているが、アウトガスについて記載がない。 A polyimide material obtained from 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and 2,2′-bis (trifluoromethyl) benzidine has been proposed as a material having good transparency and heat resistance. Yes. (Patent Document 1, Patent Document 2). Patent Document 1 describes that a film obtained by a chemical conversion method (a method of adding a catalyst solution) is excellent in transparency with a total light transmittance of 70% or more and has a low thermal expansion coefficient. However, there is no description about outgas.
また、特許文献2には、3,3',4,4'-ビフェニルテトラカルボン酸二無水物と2,2'-ビス(トリフルオロメチル)ベンジジンをm−クレゾール中で反応させて得られたポリアミド酸を、300℃まで徐々に加熱することでポリイミドを得たことが記載されているが、熱物性以外の詳細は記載されていない。 Patent Document 2 was obtained by reacting 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and 2,2′-bis (trifluoromethyl) benzidine in m-cresol. Although it is described that the polyimide was obtained by gradually heating the polyamic acid to 300 ° C., details other than the thermophysical properties are not described.
また、非特許文献1には、同じく両モノマーを用いて得られた溶液に、脱水触媒及びイミド化剤を添加してポリイミドが得られたことが記載されているが、ここには得られたゲルの熱物性が記載されているだけであって、フィルムの物性については記載されていない。 In addition, Non-Patent Document 1 describes that a polyimide was obtained by adding a dehydration catalyst and an imidizing agent to a solution obtained by using both monomers. It only describes the thermophysical properties of the gel, not the physical properties of the film.
上述のように、3,3',4,4'-ビフェニルテトラカルボン酸二無水物と2,2'-ビス(トリフルオロメチル)ベンジジンを用いて製造したポリイミドは従来知られていたが、ガス発生や前述の用途に使用する記載もない。さらに、上記のポリイミドは、高い温度で加熱すると結晶化によりフィルムが白濁してしまう傾向が有り、高い温度プロセスへ適用は困難であると考えられたため、本用途には使用されていなかった。 As described above, a polyimide produced using 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride and 2,2′-bis (trifluoromethyl) benzidine has been conventionally known. There is no description of occurrence or use for the aforementioned purposes. Furthermore, the above polyimide has not been used in this application because it tends to become cloudy due to crystallization when heated at a high temperature, and it is considered difficult to apply to a high temperature process.
本発明の目的は、フラットパネルディスプレイ用部材やフレキシブルデバイスに好適に用いることのできるポリイミドフィルムと無機基板からなる積層体を提供することを目的とする。具体的には優れた透明性と耐熱性に優れるポリイミドフィルムと無機基板との積層体を提供することを目的とし、更には、ポリイミド上に、電子素子が形成されたフラットパネルディスプレイ用部材やフレキシブルデバイスを提供することを目的とする。 The objective of this invention aims at providing the laminated body which consists of a polyimide film and an inorganic substrate which can be used suitably for the member for flat panel displays, or a flexible device. Specifically, it aims to provide a laminate of a polyimide film and an inorganic substrate having excellent transparency and heat resistance, and further, a flat panel display member in which an electronic element is formed on a polyimide or a flexible The purpose is to provide a device.
本発明者らは、鋭意検討した結果、特定構造のポリイミド前駆体の溶液を無機基板上に流延し、特定の温度範囲で乾燥およびイミド化することにより、結晶化によるフィルムの白化(高ヘイズ)をさせず、300℃におけるガス発生が低減されたポリイミドと無機基板との積層体を簡便に製造できることを見出し、本発明を為すに至った。すなわち、本発明は以下に関する。
1)化合物群(1)
As a result of intensive studies, the present inventors have cast a solution of a polyimide precursor having a specific structure on an inorganic substrate, dried and imidized at a specific temperature range, and thereby whitened the film by crystallization (high haze). It was found that a laminate of polyimide and an inorganic substrate with reduced gas generation at 300 ° C. can be easily produced, and the present invention has been achieved. That is, the present invention relates to the following.
1) Compound group (1)
より選択される少なくとも1種のテトラカルボン酸二無水物類と化合物群(2) At least one tetracarboxylic dianhydride selected from the group of compounds (2)
より選択される少なくとも1種のジアミン類から得られるポリイミド前駆体の溶液を無機基板上に流延し、乾燥およびイミド化して得られるポリイミドフィルムと無機基板とからなる積層体であって、該乾燥およびイミド化する工程における最高温度が、300℃を超え400℃以下であって、該ポリイミドフィルムの厚みが10μmにおいてヘイズが2%未満、全光線透過率が85%以上であり、かつ300℃におけるポリイミドフィルムからのアウトガスが0.5%未満であることを特徴とする積層体。
2)上記乾燥およびイミド化する工程における最高温度が、310℃を超え350℃以下であること特徴とする1)に記載の積層体。
3)前記無機基板がガラス基板であることを特徴とする1)または2)に記載の積層体
4)1)〜3)のいずれかに記載の積層体のポリイミドフィルム上に、電子素子を形成したことを特徴とするフラットパネルディスプレイ用部材。
5)1)〜3)のいずれかに記載の積層体のポリイミドフィルム上に、電子素子を形成し、その後、該ポリイミドフィルムを無機基板から剥離したことを特徴とするフレキシブルデバイス。
A laminate comprising a polyimide film obtained by casting a solution of a polyimide precursor obtained from at least one diamine selected from the above onto an inorganic substrate, drying and imidizing, and the inorganic substrate; And the maximum temperature in the step of imidizing is more than 300 ° C. and not more than 400 ° C., the thickness of the polyimide film is 10 μm, the haze is less than 2%, the total light transmittance is 85% or more, and at 300 ° C. A laminate having an outgas from the polyimide film of less than 0.5%.
2) The laminate according to 1), wherein a maximum temperature in the drying and imidization step is more than 310 ° C and not more than 350 ° C.
3) The said inorganic substrate is a glass substrate, The electronic element is formed on the polyimide film of the laminated body in any one of 1) or 2) characterized by 4) 1) -3) characterized by the above-mentioned. A flat panel display member characterized by the above.
5) A flexible device, wherein an electronic element is formed on the polyimide film of the laminate according to any one of 1) to 3), and then the polyimide film is peeled from the inorganic substrate.
本発明の積層体は、300℃におけるガス発生が低減され、優れた透明性と耐熱性を有し、フラットパネルディスプレイ用部材やフレキシブルディスプレイの製造に好適に用いることができる。また、本発明のポリイミドフィルム上に電子素子が形成されたフラットパネルディプレー用部材やフレキシブルデバイスは、軽量性、耐衝撃性に優れる。 The laminate of the present invention has reduced gas generation at 300 ° C., has excellent transparency and heat resistance, and can be suitably used for the production of flat panel display members and flexible displays. Moreover, the flat panel display member and flexible device in which the electronic element was formed on the polyimide film of this invention are excellent in lightweight property and impact resistance.
本発明の一実施形態について説明すると以下の通りであるが、本発明はこれに限定されるものではない。 An embodiment of the present invention will be described as follows, but the present invention is not limited to this.
本発明は、特定構造のポリイミド前駆体溶液を無機基板上に流延し、乾燥およびイミド化して得られるポリイミドフィルムと無機基板とからなる積層体であって、該ポリイミドの厚みが10μmにおいてヘイズが2%未満、全光線透過率が85%以上であり、かつ300℃におけるポリイミドからのアウトガスが0.5%未満であることを特徴とする積層体である。 The present invention is a laminate comprising a polyimide film obtained by casting a polyimide precursor solution having a specific structure on an inorganic substrate, drying and imidizing, and an inorganic substrate, and when the thickness of the polyimide is 10 μm, there is no haze. The laminate is characterized by having a light transmittance of less than 2%, a total light transmittance of 85% or more, and an outgas from polyimide at 300 ° C. of less than 0.5%.
(A)ポリイミド前駆体溶液
本発明に用いられるポリイミド前駆体溶液は、化合物群(1)
(A) Polyimide precursor solution The polyimide precursor solution used in the present invention is a compound group (1).
より選択される少なくとも1種のテトラカルボン酸二無水物類と化合物群(2) At least one tetracarboxylic dianhydride selected from the group of compounds (2)
より選択される少なくとも1種のジアミン類から得られるポリイミド前駆体溶液である。 It is the polyimide precursor solution obtained from the at least 1 sort (s) of diamine selected more.
上記テトラカルボン酸二無水物類およびジアミン類は、それぞれ1種または2種以上混合して用いる事ができる。 The tetracarboxylic dianhydrides and diamines can be used alone or in combination of two or more.
また、化合物群(1)のテトラカルボン酸二無水物類において、特に波長が400nmの光の透過度が50%以上のポリイミドを得られ易い点や、耐熱性、入手性に優れる点で、化合物群(3) In addition, in the tetracarboxylic dianhydrides of the compound group (1), the compound is particularly advantageous in that it is easy to obtain a polyimide having a light transmittance of 50% or more at a wavelength of 400 nm, and is excellent in heat resistance and availability. Group (3)
より選択される少なくとも1種のテトラカルボン酸二無水物類を用いる事が好ましい。 It is preferable to use at least one tetracarboxylic dianhydride more selected.
また、化合物群(2)のジアミン類において、透明性や耐熱性、入手性に優れる点で、化合物群(4) In the diamines of the compound group (2), the compound group (4) is excellent in transparency, heat resistance and availability.
より選択される少なくとも1種のジアミン類を用いる事が好ましい。 It is preferable to use at least one diamine more selected.
ポリイミド前駆体溶液の溶媒としては、テトラカルボン酸二無水物やジアミン類が溶解し反応させることが出来れば特に限定されないが、溶解性に優れる、反応を促進する、ポリイミド前駆体溶液を無機基板状に流延しやすいなどの点で、N,N−ジメチルホルムアミド(DMF)、N,N−ジメチルアセトアミド(DMAc)、N−メチル−2−ピロリドン(NMP)、ジメチルスルホキシド(DMSO)、ヘキサメチルホスホリルアミド、アセトニトリル、アセトン、テトラヒドロフランなどの溶剤を単独または混合物として用いることができ、N,N−ジメチルホルムアミド(DMF)、N,N−ジメチルアセトアミド(DMAc)を好ましく用いる事ができる。 The solvent for the polyimide precursor solution is not particularly limited as long as tetracarboxylic dianhydride and diamines can be dissolved and reacted. However, the polyimide precursor solution is excellent in solubility and promotes the reaction. N, N-dimethylformamide (DMF), N, N-dimethylacetamide (DMAc), N-methyl-2-pyrrolidone (NMP), dimethyl sulfoxide (DMSO), hexamethylphosphoryl Solvents such as amide, acetonitrile, acetone and tetrahydrofuran can be used alone or as a mixture, and N, N-dimethylformamide (DMF) and N, N-dimethylacetamide (DMAc) can be preferably used.
(ポリイミド前駆体溶液の製造方法)
ポリイミド前駆体溶液は、少なくとも1種の酸二無水物を含んでなる酸二無水物成分と、少なくとも1種のジアミンを含んでなるジアミン成分とを有機溶媒中で、上記酸二無水物とジアミンとが、実質的に等モルとなるようにして、反応させれば得ることができる。あるいは、2種以上の酸二無水物成分および2種以上のジアミン成分を用いる場合、複数のジアミン成分全量のモル比と複数の酸二無水物成分全量のモル比とを、実質的に等モルとなるように調整しておけば、ポリアミド酸共重合体を任意に得ることもできる。
(Method for producing polyimide precursor solution)
The polyimide precursor solution comprises an acid dianhydride component comprising at least one acid dianhydride and a diamine component comprising at least one diamine in an organic solvent, and the acid dianhydride and diamine. Can be obtained by reacting them so that they are substantially equimolar. Alternatively, when two or more types of acid dianhydride components and two or more types of diamine components are used, the molar ratio of the total amount of plural diamine components and the molar ratio of the total amount of plural acid dianhydride components are substantially equimolar. If adjusted so as to be, a polyamic acid copolymer can be arbitrarily obtained.
上記反応の代表的な手法としては、上記ジアミン成分を有機溶媒に溶解し、その後、上記酸二無水物成分を添加して、ポリアミド酸が溶解してなる溶液(以下、ポリアミド酸溶液と記載する)を得る方法が挙げられる。なお、ここで「溶解」とは、溶媒が溶質を完全に溶解した状態、及び、溶質が溶媒中に均一に分散又は拡散して、実質的に溶解している状態と同じ状態となる場合を含むものとする。 なお、上記ジアミン成分及び酸二無水物成分の添加順序は上記に限定されるものではなく、当業者であれば、その添加方法を適宜変更・修正・改変することができる。すなわち、例えば、上記添加方法は、酸二無水物成分を有機溶媒に溶解又は拡散させ、その後、ジアミン成分を加えて、ポリイミド前駆体溶液とする方法であってもよい。あるいは、まず、有機溶媒中に適量のジアミン成分を加え、続いて、ジアミン成分中のジアミンに対して過剰となる酸二無水物を含む酸二無水物成分を加え、該酸二無水物の過剰量に相当する量のジアミンを含むジアミン成分を添加して、ポリイミド前駆体溶液とする方法であってもよい。 As a typical method of the above reaction, a solution obtained by dissolving the diamine component in an organic solvent and then adding the acid dianhydride component to dissolve the polyamic acid (hereinafter referred to as a polyamic acid solution). ). Here, “dissolved” means a state where the solvent is completely dissolved in the solute, and a state where the solute is uniformly dispersed or diffused in the solvent and is substantially in the same dissolved state. Shall be included. The order of adding the diamine component and the acid dianhydride component is not limited to the above, and those skilled in the art can appropriately change, modify, or modify the addition method. That is, for example, the above addition method may be a method in which an acid dianhydride component is dissolved or diffused in an organic solvent, and then a diamine component is added to obtain a polyimide precursor solution. Alternatively, first, an appropriate amount of the diamine component is added to the organic solvent, and then an acid dianhydride component containing an acid dianhydride that is excessive with respect to the diamine in the diamine component is added, and the excess of the acid dianhydride is added. A method may be used in which a diamine component containing an amount of diamine corresponding to the amount is added to obtain a polyimide precursor solution.
上記酸二無水物とジアミンとの反応(ポリアミド酸の合成反応)の温度条件は、該酸二無水物とジアミンとを重合させることができれば特に限定されないが、80℃以下であることが好ましく、より好ましくは0〜50℃の範囲内がよい。また、反応時間は、酸二無水物とジアミンとの重合反応を完了させることができれば特に限定されないが、30分〜50時間の範囲内で任意に設定すればよい。 The temperature condition of the reaction between the acid dianhydride and the diamine (polyamide acid synthesis reaction) is not particularly limited as long as the acid dianhydride and the diamine can be polymerized, but is preferably 80 ° C. or less. More preferably, it is in the range of 0 to 50 ° C. The reaction time is not particularly limited as long as the polymerization reaction between the acid dianhydride and the diamine can be completed, but may be arbitrarily set within a range of 30 minutes to 50 hours.
ポリイミド前駆体の重量平均分子量としては、加熱により得られるポリイミドの機械的強度の点で、3千〜100万の範囲である事が好ましく、5千〜50万がより好ましく、1万〜50万が更に好ましい。重量平均分子量が3千未満であると得られるポリイミドの機械的強度が十分でなくもろくなる傾向がある。また重量平均分子量が100万を超えると前駆体の溶液としての取り扱い性が困難になる傾向がある。 The weight average molecular weight of the polyimide precursor is preferably in the range of 3,000 to 1,000,000, more preferably 5,000 to 500,000, more preferably 10,000 to 500,000 in terms of the mechanical strength of the polyimide obtained by heating. Is more preferable. If the weight average molecular weight is less than 3,000, the resulting polyimide tends to have insufficient mechanical strength and become brittle. On the other hand, when the weight average molecular weight exceeds 1,000,000, the handleability of the precursor as a solution tends to be difficult.
ポリイミド前駆体溶液の濃度や粘度は、無機基板に溶液をコーティングする方法コーティング厚み等に適切な固形分濃度や粘度に調整することが好ましい。 The concentration and viscosity of the polyimide precursor solution are preferably adjusted to a solid content concentration and viscosity suitable for the coating thickness and the like, which is a method of coating the inorganic substrate with the solution.
例えば、10μmのポリイミドを作製する場合には、固形分濃度が5〜30%、粘度が20℃〜25℃の温度領域で、10cP(センチポイズ)〜100000cP(センチポイズ)の範囲で調整することが好ましい。 For example, when producing a 10 μm polyimide, it is preferable to adjust in the range of 10 cP (centipoise) to 100,000 cP (centipoise) in the temperature range of solid content concentration of 5 to 30% and viscosity of 20 ° C. to 25 ° C. .
(積層体の製造方法)
ポリイミド前駆体溶液を無機基板に流延し、乾燥およびイミド化することにより本発明の積層体を製造することができる。
(Laminate manufacturing method)
The laminate of the present invention can be produced by casting a polyimide precursor solution onto an inorganic substrate, drying and imidizing.
本発明の積層体において、該ポリイミドフィルムの厚みが10μmでヘイズが2%未満、全光線透過率が85%以上かつ300℃におけるポリイミドフィルムからのアウトガスが0.5%未満とするためには、乾燥およびイミド化の加熱条件が重要である。 In the laminate of the present invention, in order that the thickness of the polyimide film is 10 μm, the haze is less than 2%, the total light transmittance is 85% or more and the outgas from the polyimide film at 300 ° C. is less than 0.5%, The heating conditions for drying and imidization are important.
アウトガスを低減するためには、加熱温度を上げることが有効であるがポリイミドの結晶性や着色等により、ヘイズが上昇したり全光線透過率が低下してしまう傾向がある。逆に透明性の低下や着色の抑制のため比較的緩やかな温度で加熱するとアウトガスの低減が出来なくなる、イミド化が十分に進まずポリイミドの機械的強度が不足する傾向がある。 In order to reduce outgas, it is effective to raise the heating temperature, but there is a tendency that haze increases or total light transmittance decreases due to crystallinity or coloring of polyimide. On the other hand, when the heating is performed at a relatively moderate temperature for the purpose of reducing transparency and suppressing coloring, the outgas cannot be reduced, and imidation does not proceed sufficiently, and the mechanical strength of polyimide tends to be insufficient.
透明性を損なうことなくアウトガスを低減する有効な方法としては、加熱する条件として、温度と加熱時間を適切に設定する必要がある。 As an effective method for reducing the outgas without impairing transparency, it is necessary to appropriately set the temperature and the heating time as the heating conditions.
加熱する条件(乾燥およびイミド化条件)としては、鋭意検討した結果、10μm〜50μmのフィルムを製造する場合は、流延後に100℃〜150℃の温度範囲で10分〜30分、次いで150℃〜200℃で10分〜30分、更に200℃〜250℃で5分〜10分、最後に最高温度で5〜10分加熱することが好ましい。特に200℃以下の温度で加熱する時間を200℃を越える加熱時間に比較して長くする事が好ましいことを見出した。 As a heating condition (drying and imidization condition), as a result of intensive studies, when a film of 10 μm to 50 μm is manufactured, it is casted at a temperature range of 100 ° C. to 150 ° C. for 10 minutes to 30 minutes, and then 150 ° C. It is preferable to heat at ~ 200 ° C for 10 minutes to 30 minutes, further at 200 ° C to 250 ° C for 5 minutes to 10 minutes, and finally at the maximum temperature for 5 to 10 minutes. In particular, it has been found that it is preferable to lengthen the time for heating at a temperature of 200 ° C. or less as compared with the heating time exceeding 200 ° C.
上記の最高温度は、フィルムの厚さに関係なく、300℃を超え400℃以下である必要があり、310℃を超え350℃以下で加熱することが好ましい。 The maximum temperature needs to be higher than 300 ° C. and lower than or equal to 400 ° C. regardless of the thickness of the film, and is preferably heated higher than 310 ° C. and lower than 350 ° C.
最高温度が300℃以下であると、アウトガスが低減できない、イミド化が不十分となる傾向がある。逆に400℃を超えるとポリイミドの結晶化などにより白化が顕著となる傾向がある。 When the maximum temperature is 300 ° C. or lower, outgas cannot be reduced, and imidation tends to be insufficient. Conversely, when the temperature exceeds 400 ° C., whitening tends to become remarkable due to crystallization of polyimide and the like.
また、厚みが50μmを超えるフィルムを製造する場合は、上記時間に厚み比を掛け合わせた時間を採用する事が好ましい。例えば100μmのフィルムを製造する場合は、上記時間の2倍の時間を加熱することが好ましい。 Moreover, when manufacturing the film which thickness exceeds 50 micrometers, it is preferable to employ | adopt the time which multiplied the thickness ratio for the said time. For example, in the case of producing a film having a thickness of 100 μm, it is preferable to heat for twice the above time.
上記の様に製造された積層体は、透明性に優れ、TFTや透明導電膜の形成における高温プロセスでもアウトガスを発生しないため、TFTや透明導電膜を良好に形成できる。 Since the laminate manufactured as described above is excellent in transparency and does not generate outgas even in a high temperature process in forming the TFT and the transparent conductive film, the TFT and the transparent conductive film can be formed satisfactorily.
また、流延直前に、イミド化を促進するための触媒溶液をポリイミド前駆体溶液に添加することもできる。触媒溶液としては、イミド化を促進する機能を有していれば特に限定されないが、例えば、(1)脂肪族または芳香族酸無水物等の1種又は2種以上の脱水剤と(2)トリエチルアミン等の脂肪族3級アミン、ジメチルアニリン等の芳香族3級アミン、ピリジン等の複素環3級アミン等の1種又は2種以上の触媒を混合した溶液を好ましく用いる事ができる。 Moreover, a catalyst solution for promoting imidization can be added to the polyimide precursor solution immediately before casting. The catalyst solution is not particularly limited as long as it has a function of promoting imidization. For example, (1) one or more dehydrating agents such as aliphatic or aromatic acid anhydrides and (2) A solution in which one or two or more catalysts such as an aliphatic tertiary amine such as triethylamine, an aromatic tertiary amine such as dimethylaniline, or a heterocyclic tertiary amine such as pyridine is mixed can be preferably used.
本発明の積層体に用いられる無機基材としては、高温プロセスへの耐性を有していれば特に限定されないが、ハンドリング性や透明性を有する点でガラスを好ましく用いる事ができる。 Although it will not specifically limit as an inorganic base material used for the laminated body of this invention if it has the tolerance to a high temperature process, Glass can be used preferably at the point which has handleability and transparency.
(ポリイミドフィルムの光学特定)
本発明の積層体において、該ポリイミドフィルムの厚みが10μmでヘイズが2%未満、全光線透過率が85%以上である。
(Optical identification of polyimide film)
In the laminate of the present invention, the polyimide film has a thickness of 10 μm, a haze of less than 2%, and a total light transmittance of 85% or more.
ヘイズが2%以上であるとフィルムの白濁が強くなるため、ディスプレイに使用した場合、画質の鮮明さが低下する傾向がある。 When the haze is 2% or more, the cloudiness of the film becomes strong. Therefore, when used in a display, the sharpness of the image quality tends to decrease.
全光線透過率が85%未満であると、光が透過し難くなるため、ディスプレイに使用した場合、全体が暗くなる傾向がある。明るくするために光源の発光を強くすることになり、消費電力が増大することになる。 If the total light transmittance is less than 85%, light is hardly transmitted. Therefore, when used for a display, the whole tends to be dark. In order to make it bright, the light emission of the light source will be strengthened, and the power consumption will increase.
また、光の透過性においては、特に波長が400nmの透過率が50%以上であることが好ましい。透過性が50%未満であると、ディスプレイに使用した場合、黄色が他の色と比較し強くなり、色のバランスが悪くなる傾向がある。 Further, in light transmittance, it is particularly preferable that the transmittance at a wavelength of 400 nm is 50% or more. When the transparency is less than 50%, when used in a display, yellow tends to be stronger than other colors and the color balance tends to be poor.
(電子素束子形成・剥離)
本発明の積層体は、ポリイミドフィルム上に、電子素子を形成することにより、フラットパネルディスプレイ用部材に好ましく使用できる。
(Electronic bundle formation / peeling)
The laminated body of this invention can be preferably used for the member for flat panel displays by forming an electronic element on a polyimide film.
この積層体は、ポリイミドフィルムにより無機基材の耐衝撃性を向上させることが出来るため、ガラス等の無機基材を薄くしても割れ難くなる傾向がある。無機基材を薄くする事によりフラットパネルディスプレイの軽量化、薄型化が可能となる。ポリイミドフィルム以外の材料は、耐衝撃性は向上できるものの、フィルム上に電子素子を形成する際の高いプロセス温度に耐えることができない。 Since this laminated body can improve the impact resistance of an inorganic base material with a polyimide film, even if it makes thin inorganic base materials, such as glass, it tends to become difficult to break. By reducing the thickness of the inorganic substrate, the flat panel display can be reduced in weight and thickness. Although materials other than polyimide film can improve impact resistance, they cannot withstand high process temperatures when forming electronic elements on the film.
ポリイミド前駆体溶液を無機基板上に流延またはコーティングする方法としては、公知の方法を用いる事ができる。例えば、ダイコート法、バーコート法、スピンコート法、スプレーコート法等、ポリイミド前駆体溶液の性状や塗布厚、無機基材の種類等により好適な方法を選択、用いる事ができる。 As a method for casting or coating the polyimide precursor solution on the inorganic substrate, a known method can be used. For example, a suitable method can be selected and used depending on the properties of the polyimide precursor solution, the coating thickness, the type of inorganic substrate, and the like, such as a die coating method, a bar coating method, a spin coating method, and a spray coating method.
また本発明の積層体は、ポリイミドフィルム上に、電子素子を形成し、その後、該ポリイミドフィルムを無機基板から剥離することにより、優れた特性を有するフレキシブルデバイスを得ることができる。さらに、上記工程は、既存のガラス基板を使用した生産装置をそのまま使用できるという利点があり、フラットパネルディスプレイ、電子ペーパーなどの電子デバイスの分野で有効に使用でき、大量生産にも適している。無機基板から剥離する方法には、公知の方法を用いることができる。例えば、人が引き剥がしても良いし、駆動ロール、ロボット等の機械装置を用いて引き剥がしても良い。更には、無機基板とポリイミドフィルムの間に剥離層を設ける方法も公知である。例えば、多数の溝を有するガラス基板上に酸化シリコン膜を形成し、エッチング液を浸潤させることによって剥離する方法、及びガラス基板上に非晶質シリコン層を設けレーザー光によって分離させる方法を挙げることが出来る。 Moreover, the laminated body of this invention can obtain the flexible device which has the outstanding characteristic by forming an electronic element on a polyimide film and peeling this polyimide film from an inorganic board | substrate after that. Furthermore, the above process has an advantage that a production apparatus using an existing glass substrate can be used as it is, can be used effectively in the field of electronic devices such as flat panel displays and electronic paper, and is suitable for mass production. A known method can be used as a method for peeling from the inorganic substrate. For example, it may be peeled off by a person, or may be peeled off by using a mechanical device such as a drive roll or a robot. Furthermore, a method of providing a release layer between an inorganic substrate and a polyimide film is also known. For example, a method of forming a silicon oxide film on a glass substrate having a large number of grooves and peeling it by infiltrating an etching solution, and a method of providing an amorphous silicon layer on a glass substrate and separating them by laser light I can do it.
また、ポリイミドフィルムを無機基板に積層するのではなく、ポリイミド前駆体の溶液を無機基板上に流延し、乾燥およびイミド化してポリイミドフィルムを形成することにより、既存の電子デバイス生産装置を効率よく使用できる。 Also, rather than laminating a polyimide film on an inorganic substrate, a solution of a polyimide precursor is cast on the inorganic substrate, dried and imidized to form a polyimide film, and thus an existing electronic device production apparatus can be efficiently used. Can be used.
以下、実施例により本発明を具体的に説明するが、本発明はこれら実施例のみに限定されるものではない。 EXAMPLES Hereinafter, although an Example demonstrates this invention concretely, this invention is not limited only to these Examples.
〔アウトガス量の測定〕
セイコーインスツルメンツ(株)製、TG/DTA220を用い下記条件にて重量減少量を測定し、100℃における重量を100%とした時の300℃における重量減少率(%)をアウトガス量とした。
(測定条件)
試料量:約10mg
測定温度範囲:室温〜400℃
昇温速度:5℃/min
雰囲気:窒素(流量50ml/min)。
[Measurement of outgas amount]
Using TG / DTA220 manufactured by Seiko Instruments Inc., the weight reduction amount was measured under the following conditions, and the weight reduction rate (%) at 300 ° C. when the weight at 100 ° C. was taken as 100% was defined as the outgas amount.
(Measurement condition)
Sample amount: about 10mg
Measurement temperature range: room temperature to 400 ° C
Temperature increase rate: 5 ° C / min
Atmosphere: Nitrogen (flow rate 50 ml / min).
〔全光線透過率、ヘイズの測定〕
日本電色工業(株)製 NDH−300Aを用いてフィルムのヘイズ及び全光線透過率(T.T.)を測定した。
[Measurement of total light transmittance and haze]
The haze and total light transmittance (TT) of the film were measured using NDH-300A manufactured by Nippon Denshoku Industries Co., Ltd.
〔UV−VIS吸収スペクトルの測定〕
日本分光(株)社製、V650DSを用いて、220〜800nmのUV−VIS吸収スペクトルを測定し、波長が400nmの光の透過率を測定した。
[Measurement of UV-VIS absorption spectrum]
Using a V650DS manufactured by JASCO Corporation, UV-VIS absorption spectrum of 220 to 800 nm was measured, and the transmittance of light having a wavelength of 400 nm was measured.
(実施例1)
(ポリイミド前駆体溶液の調整)
500mlセパラブルフラスコに、2,2'-ビス(トリフルオロメチル)ベンジジン(以下、TFMB)22.1g(69.1mmol)を投入し、175gのジメチルアセトアミド(DMAc)に溶解させ25℃の水浴中で撹拌した。そこへ、3,3',4,4'-ビフェニルテトラカルボン酸二無水物(以下、BPDA)22.4g(73.4mmol)を加えて室温で3時間撹拌して均一溶液とした。更に、この溶液に2,2'-ビス(トリフルオロメチル)ベンジジン1.1g(3.4mmol)を6gのDMAcに溶解させた溶液を添加した。2,2'-ビス(トリフルオロメチル)ベンジジン溶液を溶液に添加してから約4時間攪拌し固形分濃度は15.0重量%のポリイミド前駆体溶液1を得た。
Example 1
(Preparation of polyimide precursor solution)
A 500 ml separable flask was charged with 22.2 g (69.1 mmol) of 2,2′-bis (trifluoromethyl) benzidine (hereinafter referred to as TFMB) and dissolved in 175 g of dimethylacetamide (DMAc) in a 25 ° C. water bath. Stir with. Thereto, 22.4 g (73.4 mmol) of 3,3 ′, 4,4′-biphenyltetracarboxylic dianhydride (hereinafter, BPDA) was added and stirred at room temperature for 3 hours to obtain a homogeneous solution. Further, a solution prepared by dissolving 1.1 g (3.4 mmol) of 2,2′-bis (trifluoromethyl) benzidine in 6 g of DMAc was added to this solution. The 2,2′-bis (trifluoromethyl) benzidine solution was added to the solution and stirred for about 4 hours to obtain a polyimide precursor solution 1 having a solid content concentration of 15.0% by weight.
(ポリイミドフィルムと無機基板の積層体の作製)
得られたポリイミド前駆体溶液1を無機基板のガラス(松浪硝子工業(株)製、マイクロスライドグラスS9111、0.8〜1mm厚)に流延し、110℃で15分、170℃で15分、230℃で8分、320℃で8分加熱し、ガラス上に厚みが10μのポリイミドが形成された積層体を作製した。
(Preparation of laminate of polyimide film and inorganic substrate)
The obtained polyimide precursor solution 1 was cast on glass of an inorganic substrate (manufactured by Matsunami Glass Industry Co., Ltd., micro slide glass S9111, 0.8-1 mm thickness), and it was 15 minutes at 110 ° C. and 15 minutes at 170 ° C. The laminate was heated at 230 ° C. for 8 minutes and at 320 ° C. for 8 minutes to produce a laminate having a 10 μm thick polyimide formed on glass.
得られた積層体よりポリイミドを剥離し、アウトガス量、全光線透過率(T.T)、ヘイズ、波長が400nmの光の透過率を測定し、結果を表1に示した。 The polyimide was peeled from the obtained laminate, and the amount of outgas, total light transmittance (T. T), haze, and transmittance of light having a wavelength of 400 nm were measured. The results are shown in Table 1.
(実施例2)
BPDAに代えて、4,4’‐(ヘキサフルオロイソプロピリデン)ジフタル酸二無水物(以下、6FDA)を用いた以外は、実施例1と同様の方法でポリイミド前駆体溶液2、および積層体を作製し、ポリイミドの各種特性を測定し、その結果を表1に示した。
(Example 2)
The polyimide precursor solution 2 and the laminate were prepared in the same manner as in Example 1 except that 4,4 ′-(hexafluoroisopropylidene) diphthalic dianhydride (hereinafter referred to as 6FDA) was used instead of BPDA. The various properties of polyimide were measured and the results are shown in Table 1.
(実施例3)
BPDAに代えて、4、4’-オキシジフタル酸二無水物(以下、ODPA)を用いた以外は、実施例1と同様の方法でポリイミド前駆体溶液3、および積層体を作製し、ポリイミドの各種特性を測定し、その結果を表1に示した。
(Example 3)
A polyimide precursor solution 3 and a laminate were prepared in the same manner as in Example 1 except that 4,4′-oxydiphthalic dianhydride (hereinafter referred to as ODPA) was used instead of BPDA. The characteristics were measured and the results are shown in Table 1.
(実施例4)
BPDAに代えて、2,2?ビス(4?ヒドロキシフェニル)プロパンジベンゾエート?3、3’、4、4’?テトラカルボン酸二無水物(以下、ESDA)を用いた以外は、実施例1と同様の方法でポリイミド前駆体溶液4、および積層体を作製し、ポリイミドの各種特性を測定し、その結果を表1に示した。
Example 4
Example 1 except that 2,2-bis (4-hydroxyphenyl) propanedibenzoate-3,3 ', 4,4'-tetracarboxylic dianhydride (hereinafter referred to as ESDA) was used instead of BPDA. The polyimide precursor solution 4 and the laminate were prepared by the same method as above, and various characteristics of the polyimide were measured. The results are shown in Table 1.
(実施例5)
BPDAと6FDAのモル比1:1で混合して使用した以外は、実施例1と同様の方法でポリイミド前駆体溶液5、および積層体を作製し、ポリイミドの各種特性を測定し、その結果を表1に示した。
(Example 5)
A polyimide precursor solution 5 and a laminate were prepared in the same manner as in Example 1 except that BPDA and 6FDA were mixed at a molar ratio of 1: 1, and various properties of the polyimide were measured. It is shown in Table 1.
(実施例6)
ODPAと6FDAのモル比1:1で混合して使用した以外は、実施例1と同様の方法でポリイミド前駆体溶液6、および積層体を作製し、ポリイミドの各種特性を測定し、その結果を表1に示した。
(Example 6)
A polyimide precursor solution 6 and a laminate were prepared in the same manner as in Example 1 except that ODPA and 6FDA were mixed at a molar ratio of 1: 1, and various properties of the polyimide were measured. It is shown in Table 1.
(実施例7)
TFMBに代えて、9、9?ビス(4?アミノ?3?フルオロフェニル)フルオレン(以下、BFAF)を用いた以外は、実施例1と同様の方法でポリイミド前駆体溶液7、および積層体を作製し、ポリイミドの各種特性を測定し、その結果を表1に示した。
(Example 7)
The polyimide precursor solution 7 and the laminate were prepared in the same manner as in Example 1 except that 9,9-bis (4-amino-3-fluorophenyl) fluorene (hereinafter, BFAF) was used instead of TFMB. The various properties of polyimide were measured and the results are shown in Table 1.
(比較例1)
BPDAに代えて、ピロメリット酸二無水物(以下、PMDA)を用いた以外は、実施例1と同様の方法でポリイミド前駆体溶液8、および積層体を作製し、ポリイミドの各種特性を測定し、その結果を表1に示した。
(Comparative Example 1)
A polyimide precursor solution 8 and a laminate were prepared in the same manner as in Example 1 except that pyromellitic dianhydride (hereinafter referred to as PMDA) was used instead of BPDA, and various properties of the polyimide were measured. The results are shown in Table 1.
(比較例2)
ポリイミド前駆体溶液1を無機基板のガラス(松浪硝子工業(株)製、マイクロスライドグラスS9111、0.8〜1mm厚)に流延し、100℃で15分、150℃で15分、200℃で30分、300℃で30分加熱し、ガラス上に厚みが10μのポリイミドが形成された積層体を作製した。
(Comparative Example 2)
The polyimide precursor solution 1 is cast on an inorganic substrate glass (manufactured by Matsunami Glass Industry Co., Ltd., micro slide glass S9111, 0.8 to 1 mm thickness), 15 minutes at 100 ° C., 15 minutes at 150 ° C., 200 ° C. For 30 minutes and at 300 ° C. for 30 minutes to produce a laminate in which polyimide having a thickness of 10 μm was formed on glass.
得られた積層体よりポリイミドを剥離し、アウトガス量、全光線透過率(T.T)、ヘイズ、波長が400nmの光の透過率を測定し、結果を表1に示した。 The polyimide was peeled from the obtained laminate, and the amount of outgas, total light transmittance (T. T), haze, and transmittance of light having a wavelength of 400 nm were measured. The results are shown in Table 1.
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KR20210068394A (en) | 2018-09-29 | 2021-06-09 | 닛테츠 케미컬 앤드 머티리얼 가부시키가이샤 | Polyimide precursor and polyimide produced therefrom, and flexible device |
WO2021132279A1 (en) * | 2019-12-24 | 2021-07-01 | 株式会社カネカ | Resin composition and film |
CN114846082A (en) * | 2019-12-24 | 2022-08-02 | 株式会社钟化 | Resin composition and film |
KR20220109345A (en) | 2021-01-28 | 2022-08-04 | 닛테츠 케미컬 앤드 머티리얼 가부시키가이샤 | Polyimide precursor and polyimide |
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