JP2012015028A5 - - Google Patents
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- Publication number
- JP2012015028A5 JP2012015028A5 JP2010152535A JP2010152535A JP2012015028A5 JP 2012015028 A5 JP2012015028 A5 JP 2012015028A5 JP 2010152535 A JP2010152535 A JP 2010152535A JP 2010152535 A JP2010152535 A JP 2010152535A JP 2012015028 A5 JP2012015028 A5 JP 2012015028A5
- Authority
- JP
- Japan
- Prior art keywords
- observation apparatus
- observation
- electron beam
- optical system
- cylindrical side
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010152535A JP5517791B2 (ja) | 2010-07-02 | 2010-07-02 | 拡大観察装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010152535A JP5517791B2 (ja) | 2010-07-02 | 2010-07-02 | 拡大観察装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2012015028A JP2012015028A (ja) | 2012-01-19 |
| JP2012015028A5 true JP2012015028A5 (https=) | 2013-05-30 |
| JP5517791B2 JP5517791B2 (ja) | 2014-06-11 |
Family
ID=45601205
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010152535A Expired - Fee Related JP5517791B2 (ja) | 2010-07-02 | 2010-07-02 | 拡大観察装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5517791B2 (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP7525835B2 (ja) | 2020-06-01 | 2024-07-31 | 株式会社マイクロサポート | マイクロマニピュレータ 並びにマイクロマニピュレータによる観察・操作方法 |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS57132657A (en) * | 1981-02-06 | 1982-08-17 | Akashi Seisakusho Co Ltd | Inclined moving body tube type scanning electron microscope and its similar apparatus |
| JPH04106853A (ja) * | 1990-08-28 | 1992-04-08 | Jeol Ltd | 走査電子顕微鏡 |
| JP2004031207A (ja) * | 2002-06-27 | 2004-01-29 | Canon Inc | 電子線照射装置および走査型電子顕微鏡装置 |
| JP4004490B2 (ja) * | 2004-07-22 | 2007-11-07 | 株式会社トプコン | 走査型電子顕微鏡装置 |
| JP4842875B2 (ja) * | 2007-03-30 | 2011-12-21 | 株式会社日立ハイテクノロジーズ | 電子顕微鏡 |
-
2010
- 2010-07-02 JP JP2010152535A patent/JP5517791B2/ja not_active Expired - Fee Related
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