JP2012004530A - Storage container - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a storage container capable of suppressing the accumulation in a door body of contaminants and the invasion into a container body of the contaminants, speeding-up work required for the door body; and improving economical efficiency.SOLUTION: A storage container comprises a container body 1 storing a substrate, and a door body 30 opening/closing an opening front surface 2 of the container body 1. At both side wall 8 front portions of the container body 1, a locking means 40 for locking the door body 30 fitted with the front surface 2 of the container body 1 is arranged. The locking means 40 is composed of an operated plate 41 sliding downward when the door body 30 is locked, and sliding upward when the door body 30 is unlocked; a locking plate 46 press-contacting with a peripheral wall of the door body 30 when the operated plate 41 slides downward, and separating from the peripheral wall of the door body 30 when the operated plate 41 slides upward; and a cam mechanism 48 formed on the operated plate 41 and the locking plate 46, and transmitting driving force accompanied with the sliding of the operated plate 41 to the locking plate 46.

Description

  The present invention relates to a storage container used for storing, storing, transporting, transporting articles such as substrates made of semiconductor wafers.

  Storage containers for storing substrates typified by semiconductor wafers are classified into several types depending on the size and configuration of the substrate. The bottom open box type has an open bottom and the front open box type has an open front. Is widely known.

  The bottom open box type storage container includes a container body for storing a separate cassette capable of aligning and storing a plurality of substrates (not shown) in a horizontal direction, and a hollow door body for opening and closing the opened lower surface of the container body, And a locking mechanism for locking the door body fitted to the opened lower surface of the container body, and the cassette is detachably mounted on the door body.

  The door body is configured by screwing and combining a plurality of parts, and is periodically cleaned with cleaning water in a cleaning tank. Moreover, the locking mechanism is configured by a complex combination of a plurality of parts, like the door body, and is operated from the outside by the door body opening / closing device. This type of storage container has a technology that can prevent the door body from flexing because it is assumed that the door body will be bent due to the fact that a heavy cassette containing multiple substrates is mounted in the door body. (See Patent Document 1).

  On the other hand, the front open box type storage container includes a container body that directly aligns and stores a plurality of substrates (not shown), a hollow door body that opens and closes the front of the container body, and an opening of the container body. And a locking mechanism that locks the door body fitted to the front surface, and a heavy cassette can be omitted (see Patent Document 2).

  The door body of the storage container is formed by screwing and combining a plurality of parts, and is periodically cleaned with cleaning water. Further, the locking mechanism is, for example, a rotating plate that is built in the door body and is rotated from the outside to the door body opening and closing device, and a plurality of slide plates that slide in the vertical direction inside the door body as the rotating plate rotates, As each slide plate slides, it is configured to protrude and retract from a small through-hole in the peripheral wall of the door body and engage and disengage in a locking hole on the inner periphery of the front surface of the container body.

  As described above, the conventional storage container includes a bottom open box type and a front open box type, and both types include a locking mechanism having a complicated configuration in the door body.

Japanese National Patent Publication No. 4-505234 JP-T-2002-514829

  A conventional storage container is configured as described above, and a locking mechanism having a complicated configuration is attached to the inside of the door body. Therefore, when locking and unlocking the door body, a plurality of parts of the locking mechanism rub against each other, such as particles. There is a problem that contaminants are generated and the contaminants are accumulated inside the door body. In addition, the contaminants remaining in the door body may enter the container body and contaminate the entire substrate including the substrate.

  In addition, since the through-hole through which the locking claw of the locking mechanism protrudes is small and simply perforated on the peripheral wall of the door body, cleaning water tends to remain during the internal cleaning of the door body, resulting in the internal cleaning of the door body. It takes a long time and the drying operation of the door body may be delayed. Furthermore, at the time of repair and inspection such as replacement of parts of the locking mechanism, it is necessary to remove a plurality of screws and disassemble the door body, but the operation becomes complicated and complicated. Therefore, the used door body itself may be replaced with a new door body. However, this is wasteful and causes economic loss.

  The present invention has been made in view of the above, and it is possible to suppress the accumulation of contaminants in the door body or to enter the inside of the container body, and to speed up the work required for the door body. It aims at providing the storage container which can improve property.

In order to solve the above-described problems, the present invention includes a container body that stores articles and a door body that opens and closes an opening of the container body, and the container is provided near the opening of the peripheral wall of the container body or on the peripheral wall of the door body. Provided with locking means for locking the door body fitted in the opening of the body,
The locking means slides in the locking direction that intersects the door opening and closing direction when the door body is locked, and slides in the unlocking direction opposite to the locking direction that intersects the door opening and closing direction when the door body is unlocked When the member and the operated member are slid in the locking direction, they are brought into contact with the peripheral wall of the door body fitted to the opening of the container body or the inner periphery of the opening of the container body, and when the operated member is slid in the unlocking direction, the container A locking member that is separated (separated) from the peripheral wall of the door body fitted to the opening of the body or the inner periphery of the opening of the container body, and a driving force transmission mechanism that transmits the driving force accompanying the slide of the operated member to the locking member It is characterized by comprising.

  In addition, the container body is formed in a front open box capable of storing a substrate, and locking means is provided at the front of the peripheral wall that defines the opened front surface, and the door body is detachably fitted to the opened front surface of the container body. Can do.

  The locking means is supported by the front side of the side wall of the container body, and slides in either the upper or lower locking direction when the door body is locked, and slides in the unlocking direction opposite to the locking direction when the door body is unlocked. When the operated member and the operated member slide in the locking direction, they contact the side wall of the door body fitted to the front of the container body, and when the operated member slides in the unlocking direction, the operated member fits to the front of the container body. A locking member that is separated from the side wall of the door body, and a cam mechanism that transmits the driving force accompanying the sliding of the operated member to the locking member to be operated can be included.

  The locking means is supported by the front side of the side wall of the container body, slides downward when the door body is locked, and slides upward when the door body is unlocked, and the front side wall of the container body. It is slidably interposed between the operated member, contacts the side wall of the door body fitted to the front of the container body when sliding the operated member downward, and container slides when the operated member slides upward. A locking member spaced from the side wall of the door body fitted to the front surface of the body, a cam mechanism provided on the operated member and the locking member, and operating by transmitting a driving force accompanying the slide of the operated member to the locking member; Can be included.

  In addition, a notch is formed in the front portion of the side wall of the container body, and a storage block for locking means for covering the notch is attached, and a guide piece for guiding an operated member of the locking means is attached to the storage block. It is possible to provide the guide piece with a position restricting portion for the operated member.

  In addition, a convex portion is formed on one of the storage block and the operated member of the locking means, and the first and second concave portions are formed on the other, and when the operated member slides in the locking direction, When the convex portion and the first concave portion are fitted and fixed, and the operated member slides in the unlocking direction, the convex portion and the second concave portion can be fitted and fixed.

  In addition, a long hole for fixing is provided in the operated member of the locking means, and a cover member fixed to the storage block is attached to the long hole so as to regulate the falling of the operated member from the storage block. A convex portion is formed on one of the member and the cover member, and the first and second concave portions are formed on the other. When the operated member slides in the locking direction, the convex portion and the first concave portion are formed. Are fitted and fixed, and when the operated member slides in the unlocking direction, the convex portion and the second concave portion can be fitted and fixed.

  Also, a locking protrusion is formed on the side wall of the door body corresponding to the notch at the front side of the container body, and the locking member of the locking means penetrates the storage block and is positioned in the notch of the container body. A piece may be formed, and the locking piece of the locking member may be hooked on the locking protrusion of the door body when the operated member slides in the locking direction.

In addition, an unlocking groove corresponding to a notch in the front portion of the side wall of the container body is formed on the side wall of the door body, and a locking projection piece is formed on the peripheral edge of the unlocking groove so that the operated member slides in the unlocking direction. The interference of the locking piece of the locking member with the locking protrusion of the door body may be released by the unlocking groove, and the unlocking groove may be covered by the locking member.
The cam mechanism can include a cam groove formed in the operated member and a cam protrusion formed in the locking member and fitted into the cam groove of the operated member.

  The locking means is supported by the front portion of the side wall of the container body, slides downward when the door body is locked, and is operated by the operated member that slides upward when the door body is unlocked. A connecting member that slides in the forward direction of the container body when sliding down the operated member, and a sliding member that slides backward in the container body when sliding up the operated member, and is rotatably supported by this connecting member When the connecting member slides in the forward direction, it contacts the side wall of the door body fitted in front of the container body, and when the connecting member slides in the rear direction, the door is separated from the side wall of the door body fitted in front of the container body. And a cam mechanism that transmits the driving force accompanying the slide of the operated member to the connecting member and slides the connecting member.

In addition, a cam groove of the cam mechanism is provided in the operated member, and a cam protrusion of the cam mechanism that slidably fits in the cam groove of the operated member is formed on the connecting member. A substantially U-shaped fitting support portion is formed and the opening thereof is directed toward the side wall of the door body, and a locking piece that contacts the side wall of the door body is formed at the front portion of the locking member, and at the rear portion of the locking member. Can also form a shaft portion slidably fitted to the fitting support portion of the connecting member.
In addition, a rotating roller having good slidability may be rotatably attached to at least one of the locking piece of the locking member and the cam protrusion fitted in the cam groove of the cam mechanism.

In addition, a notch is formed in the front portion of the side wall of the container body, a storage block for the locking means that covers the notch is attached, and a slit for the locking means is formed in the storage block,
On the side wall of the door body, a locking protrusion corresponding to the notch of the container body is formed,
The locking means is housed in a storage block of the container body, slides downward when the door body is locked, and slides upward when the door body is unlocked, and a storage block and operated member of the container body. The locking member that slides downward when the door body is locked, and slides upward when the door body is unlocked, and is provided on the storage block, the operated member, and the locking member. And a cam mechanism that operates by transmitting the driving force accompanying the slide to the locking member, and the locking member has a locking piece that passes through the slit of the storage block and can interfere with the locking protrusion of the door body when the door body is locked. And forming a cam mechanism on the locking member, a first cam protrusion formed on the storage block, a first cam groove formed on the locking member and slidably fitted on the first cam protrusion of the storage block, and the locking member A second cam projection which can be composed of a second cam groove to be fitted slidably in the second cam projection of the locking member is formed on the operated member.

Further, the first cam groove of the cam mechanism includes a vertical groove formed in the vertical direction of the locking plate, an inclined groove formed at an upper end portion of the vertical groove and extending obliquely upward of the locking plate, and The second cam groove is formed in a horizontal direction while being inclined obliquely above the operated plate, and an end of the gently inclined groove. Formed from a steeply inclined groove formed at the top while being inclined in the horizontal direction of the operated plate,
In the cam mechanism, when the second cam projection of the locking member and the gently inclined groove of the second cam groove come into contact with each other when the door body is locked, the change of the relative position between the operated member and the locking member is restricted, When the door cam is locked, the slant groove of the first cam groove contacts the first cam protrusion, and the second cam protrusion of the locking member contacts the vicinity of the boundary between the gently sloping groove and steeply sloping groove of the second cam groove. If the operated member and the locking member slide obliquely downward, and the second cam projection of the locking member and the steeply inclined groove of the second cam groove come into contact with each other when the door body is locked, the operated member is It is also possible to slide downward while moving in the direction, and move the locking member in the horizontal direction by the horizontal groove of the first cam groove so that the locking piece of the locking member interferes with the locking protrusion of the door body.

  Here, the article in the claims includes at least various substrates (for example, semiconductor wafers of φ200, 300, 450 mm, mask glass, liquid crystal glass, etc.), electrical parts, electronic parts, mechanical parts, building parts, chemical parts. Etc. are included in the singular. When this article is a substrate, the substrate may be supported by a container body or a door body. The container body and the door body may be transparent, opaque, or translucent. The container body is not particularly limited to a front open box type with a front opening, a top open box type with an upper opening.

  If the locking means is not inside the door body, the locking means can be provided in the vicinity of the opening of the peripheral wall of the container body, or can be provided on the peripheral wall of the door body. When this locking means is provided in the vicinity of the opening of the peripheral wall of the container body, it is provided at the front of the bottom plate, the front of the top plate, or the front of the side wall that partitions the opening of the container body, and the operated member is horizontally or vertically Can be slid by a predetermined device or manually. The operated member, locking member, and connecting member of the locking means may be plate-shaped, block-shaped, bar-shaped, or the like.

  Examples of the driving force transmission mechanism of the locking means include a cam mechanism, a link mechanism, a slider mechanism, a combination mechanism thereof, and the like that draw a locus such as a substantially J shape or a substantially L shape on the locking piece of the locking member. This driving force transmission mechanism may be one that directly transmits the driving force to the locking member, or may be one that indirectly transmits through various members such as a connecting member.

  According to the present invention, when locking the door body covering the opening of the storage container, the locking means slides the operated member in the locking direction to operate the driving force transmission mechanism, and this driving force transmission mechanism is the locking member. The driving force is transmitted directly and indirectly to the locking member, and the locking member contacts and fixes the peripheral wall of the door body or the inner periphery of the opening of the container body.

  On the other hand, when unlocking the door body covering the opening of the storage container, the locking means slides the operated member in the unlocking direction opposite to the locking direction to operate the driving force transmission mechanism. The driving force transmission mechanism directly and indirectly transmits the driving force to the locking member, and the locking member can be detached from the peripheral wall of the door body or the inner periphery of the opening of the container body to be removable.

  Further, when locking the door body covering the front of the container body in the front open box type storage container, the locking means provided at the front side of the side wall of the container body is such that the operated member is in the upward or downward locking direction. The cam mechanism is slid to operate, and the cam mechanism directly and indirectly transmits a driving force to the locking member, and the locking member contacts and locks the peripheral wall of the door body.

  On the other hand, when unlocking the door body that covers the front of the container body, the locking means causes the operated member to slide in the unlocking direction opposite to the locking direction to operate the cam mechanism. The driving force is directly and indirectly transmitted to the locking member, and the locking member is separated from the peripheral wall of the door body so that the door body can be removed.

  ADVANTAGE OF THE INVENTION According to this invention, there exists an effect that it can suppress that the contaminant accumulate | stores in a door body or penetrate | invades the inside of a container body, and can speed-up the operation | work which a door body requires. In addition, when the locking mechanism is repaired or inspected, it is not necessary to replace the door body in use with another new door body, so that waste can be saved and the economy can be improved.

  In addition, if the container body is formed in a front open box capable of storing a substrate and locking means is provided at the front part of the peripheral wall that defines the opened front surface, the locking means is provided at the front part of the bottom plate or top part of the top plate that defines the front surface. The installation and operation of the locking means are simplified and the manufacture of peripheral devices is facilitated as compared with the case of providing the device.

In addition, if the locking means includes a cam mechanism that operates by transmitting the driving force accompanying the slide of the operated member to the locking member, the locking / unlocking reproduction accuracy can be improved, and the rigidity of the operated member or locking member can be improved. And reliability can be improved.
Further, if the storage block is provided with a guide piece for guiding the operated member of the locking means, the operated member can be prevented from rattling and smoothly guided in the locking direction and the unlocking direction. Further, if the position restricting portion for the operated member is formed on the guide piece, it is possible to prevent the operated member from rattling in the width direction or the like.

Further, if a convex portion is formed on one of the storage block and the operated member of the locking means, and the first and second concave portions are formed on the other, the fitting of these members causes the displacement of the operated member. It becomes possible to suppress.
In addition, if the locking piece of the locking member is pulled on the locking protrusion of the door body when the operated member is slid in the locking direction, it is stronger than the case where the locking piece of the locking member is simply brought into contact with the door body and locked. It becomes possible to lock.

  In addition, when the operated member is slid in the unlocking direction, if the interference of the locking piece of the locking member with the locking protrusion of the door body is released by the unlocking groove, the locking piece of the locking member can be smoothly and quickly removed from the door body. Can be pulled apart. Furthermore, if this unlocking groove is covered with a locking member, contaminants hardly enter the unlocking groove of the door body from the outside, and prevention of contamination in the storage container can be expected.

It is a perspective explanatory view showing an embodiment of a storage container concerning the present invention typically. It is a disassembled perspective explanatory drawing which shows typically embodiment of the storage container which concerns on this invention. It is a perspective explanatory view showing typically a door body in an embodiment of a storage container concerning the present invention. It is a fragmentary sectional perspective view which shows typically the relationship between the door body and locking means in embodiment of the storage container which concerns on this invention. It is a fragmentary perspective explanatory view showing typically the unlocking groove and locking projection piece of the door body in the embodiment of the storage container according to the present invention. It is a fragmentary sectional side view which shows typically the locking state of the locking means in embodiment of the storage container which concerns on this invention. It is side explanatory drawing which shows typically the state in the unlocking of the locking means in embodiment of the storage container which concerns on this invention. It is side explanatory drawing which shows typically the unlocking state of the door body opening / closing apparatus and locking means in embodiment of the storage container which concerns on this invention. It is a perspective explanatory view showing a 2nd embodiment of a storage container concerning the present invention typically. It is a disassembled perspective explanatory drawing which shows typically 2nd Embodiment of the storage container which concerns on this invention. It is explanatory drawing which shows typically the to-be-operated plate and part of cam mechanism of the locking means in 2nd Embodiment of the storage container which concerns on this invention. It is a partial section explanatory view showing typically the state where the locking means in the 2nd embodiment of the storage container concerning the present invention was unlocked. It is a fragmentary sectional explanatory view showing typically the state where the locking means in the 2nd embodiment of the storage container concerning the present invention was locked. It is a disassembled perspective view which shows typically the storage block and locking means in 3rd Embodiment of the storage container which concerns on this invention. It is a figure which shows typically the locking operation state of the locking means in 3rd Embodiment of the storage container which concerns on this invention, (a) A figure is a perspective view which shows the start step of locking, (b) The figure shows the next step. FIG. 4C is a perspective view showing a stage where the operated plate and the locking plate slide obliquely downward, and FIG. 4D is a perspective view showing a final stage of locking. It is a figure which shows typically a motion of the locking plate with respect to the locking protrusion of the door body in 3rd Embodiment of the storage container which concerns on this invention, (a) A figure of locking piece of the locking plate with respect to the locking protrusion of a door body The perspective view which shows the state before locking, (b) The figure is a perspective view which shows the state which the locking plate of (a) figure slid downward, (c) The figure shows the state where a locking plate approaches the locking protrusion of a door body FIG. 4D is a perspective view showing a state in which the locking plate of FIG.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. As shown in FIGS. 1 to 8, a storage container according to the present embodiment is a hollow container body 1 in which a plurality of substrates are aligned and stored in an internal space. And a door body 30 that opens and closes the front surface 2 that is an opening of the container body 1 via a seal gasket 35, and is in the vicinity of the opening of the peripheral wall of the container body 1, in other words, the peripheral wall of the container body 1. Locking means 40 for locking the door body 30 fitted to the open front surface 2 of the container body 1 is provided at the front part of the side walls 8 respectively, and the door body opening / closing device 20 attached to the semiconductor processing apparatus is provided. Used as a substrate storage container.

  Although not shown, the substrate is a semiconductor wafer having a predetermined size, specifically, a φ300 mm silicon wafer having a thickness of 775 μm or a φ450 mm silicon wafer having a thickness of 925 μm. The notch for use is cut out into a plane V shape, and 25 pieces are aligned and stored in the container body 1.

  The container body 1 and the door body 30 are each formed by combining a plurality of parts by injection molding a plurality of parts using a molding material containing a predetermined resin. Examples of the predetermined resin of the molding material include thermoplastic resins such as polycarbonate, cycloolefin polymer, polyetherimide, polyether ketone, polybutylene terephthalate, polyether ether ketone, and liquid crystal polymer, and alloys thereof.

  To these resins, conductive agents such as carbon black, carbon fibers, carbon nanotubes, metal fibers, metal oxides, and conductive polymers, and various antistatic agents such as anions, cations, and nonionics can be added. It is also possible to add benzotriazole-based, salicylate-based, cyanoacrylate-based, oxalic acid anilide-based, hindered amine-based UV absorbers, or glass fibers or carbon fibers that improve rigidity.

  As shown in FIGS. 1 and 2, the container body 1 is formed in a front open box type in which the front surface 2 is opened horizontally, and the door attached to the semiconductor processing apparatus in a state where the opened front surface 2 is directed horizontally and horizontally. It is positioned and mounted on the body opening / closing device 20, or is washed with a washing liquid in a washing tank. The container body 1 is provided with a pair of left and right support pieces 3 for supporting the substrate substantially horizontally on both inner sides, in other words, on the inner surfaces of the both side walls 8, respectively. Arranged at a predetermined pitch, each support piece 3 is formed in an elongated plate shape that supports the side edge of the substrate.

  A separate bottom plate 4 is screwed horizontally to the bottom plate of the container body 1 via a screw tool, and a positioning tool 5 for positioning the container body 1 is provided at both the front side and the rear center of the bottom plate 4. Each is arranged. Each positioning tool 5 is basically formed in a substantially V-shaped cross section having a substantially elliptical shape in a plane, and a concave portion having a pair of inclined surfaces thereof is directed downward, and the positioning pin 22 of the door body opening / closing device 20 is viewed from above. The container body 1 functions to be positioned with high accuracy by fitting and sliding the recess.

  A top flange for transporting gripped by a factory ceiling transport mechanism is detachably attached to the central portion of the top plate 6 of the container body 1, and a rim projecting outward from the front peripheral edge of the container body 1. A flange 7 is formed to bulge through a holding rib, and a detachable door body 30 is press-fitted and fitted into the rim flange 7 by a door body opening / closing device 20. In addition, in addition to reinforcement and deformation prevention, grip portions that function for gripping are detachably attached to the center portions of both side walls 8 of the container body 1.

  As shown in FIG. 2, a plurality of locking means 40 are provided on the front part of each side wall 8 defining the front surface 2 of the container body 1, in other words, on each side part of the rim flange 7 facing the peripheral wall of the door body 30. The notches 9 are cut out side by side at intervals, and a vertically long storage block 10 covering the plurality of notches 9 is mounted, and the locking means 40 is efficiently gathered in the storage block 10. Stored.

  Each storage block 10 is basically formed in a substantially U shape having a length (height) longer than the side wall 8 of the container body 1, and is provided for fixing to prevent the locking means 40 from being displaced at a substantially central portion. The protrusions 11 are formed in a projecting manner, and the through grooves 12 for the locking means 40 corresponding to the notches 9 of the container body 1 are vertically perforated in the upper and lower parts, respectively, and the bent upper and lower ends are short. Are respectively provided with guide pieces 13 for guiding and preventing rattling of the locking means 40.

  Each guide piece 13 contains polyacetal, polyethylene, polybutylene terephthalate, polyether ether ketone, polyethylene terephthalate, polybutylene naphthalate, polypropylene, polyphenylene sulfide, and a thermoplastic resin to which a sliding agent is added. It is bent and formed into a substantially L shape by a molding material. Position restricting portions 14 for restricting the locking means 40 in the width direction are formed on both sides of the standing piece so as to protrude.

  As shown in FIG. 8, the door body opening / closing device 20 includes a stage 21 on which the container body 1 is mounted. On the stage 21, positioning pins 22 that are respectively inserted into the plurality of positioning tools 5 of the container body 1 are predetermined. It is erected at intervals. The door body opening / closing device 20 is provided with a plurality of drive pins 23 which are positioned above and below each storage block 10 of the container body 1 so as to be movable up and down, and the plurality of drive pins 23 are selectively lifted and lowered to the locking means 40. By accessing, the locking means 40 operates to lock or unlock the door body 30.

  As shown in FIGS. 1 to 5, the door body 30 includes a door main body 31 that is press-fitted into the rim flange 7 of the container body 1, and a surface plate 34 that covers an open front surface of the door main body 31. And a sealing gasket 35 for sealing and sealing interposed between the rim flange 7 of the container body 1 and the door main body 31. The door body 31 is basically formed in a substantially dish-shaped cross section with a shallow bottom, and a plurality of reinforcing and mounting ribs are disposed inside. A front retainer that elastically holds the front peripheral edge of the front retainer by an elastic piece is mounted.

  A frame-shaped fitting groove is formed in the rear peripheral edge of the door main body 31, and a seal gasket 35 that presses against the inner peripheral surface of the rim flange 7 is tightly fitted in the fitting groove. In addition, a plurality of unlocking grooves 32 for the locking means 40 corresponding to the notches 9 of the container body 1 are integrally formed on the outer surface of both side walls, which are the peripheral walls of the door body 31, arranged vertically at intervals. A locking protrusion 33 for the locking means 40 is integrally formed on the periphery of the locking groove 32. Each unlocking groove 32 is formed in a concave shape in a vertically long substantially rectangular shape, and a substantially L-shaped locking projection piece 33 is integrally formed on the lower peripheral edge.

  The surface plate 34 is formed in a horizontally long front rectangle, and a plurality of reinforcing and mounting ribs, screw holes, and the like are provided. Further, the seal gasket 35 is a frame that can be elastically deformed using, for example, fluoro rubber, silicone rubber, various thermoplastic elastomers (for example, olefin-based, polyester-based, polystyrene-based, etc.) excellent in heat resistance, weather resistance, etc. as a molding material. Molded into a shape.

  As shown in FIGS. 2, 4, 6 to 8, the locking means 40 is accommodated and supported by the storage block 10 of the container body 1 and slides up and down when the door body 30 is locked and unlocked. 41, a door body 30 interposed between the storage block 10 of the container body 1 and the operated plate 41 and fitted to the front surface 2 of the container body 1 according to the vertical sliding of the operated plate 41. A plurality of slidable locking plates 46 that come in contact with and away from the side walls, and the operated plate 41 and the plurality of locking plates 46, and a movement characteristic that transmits the driving force accompanying the sliding of the operated plate 41 to the locking plate 46. Is configured with a good cam mechanism 48.

  The operated plate 41 is basically formed into an elongated plate piece having substantially the same length (height) as the side wall 8 of the container body 1 using a predetermined material, and the plurality of guide pieces 13 of the storage block 10 are formed. Are supported so as to be slidable by each other, and are held between the position restricting portions 14 of the respective guide pieces 13 to prevent rattling and dropping. Examples of the material of the operated plate 41 include polycarbonate and polyether ether ketone having excellent rigidity, synthetic resin reinforced with carbon fiber and glass fiber, and metal such as SUS and aluminum.

  The operated plate 41 is formed with a fixing long hole 42 in a substantially central portion in a vertically long shape, and a cover plate 43 fixed to the storage block 10 is overlapped and loosely fitted in the long hole 42, whereby the storage block 10. Dropping off from is effectively prevented. The upper and lower end portions of the operated plate 41 are bent to have a flat surface, and the drive pins 23 of the door body opening / closing device 20 are accessed from above and below.

  The operated plate 41 is formed with first and second concave portions 44 and 45 that are engaged with the convex portion 11 of the storage block 10 at intervals in the vertical direction, and the first and second concave portions 44 and 45 are formed. By selectively meshing with the convex portion 11 of the storage block 10, unnecessary slide and displacement of the operated plate 41 when the door body 30 is locked / unlocked are restricted.

  Specifically, when the door body 30 is locked, the convex portion 11 of the storage block 10 and the first concave portion 44 above the operated plate 41 are engaged to position and fix the operated plate 41. At the time of unlocking, the convex portion 11 of the storage block 10 and the second concave portion 45 below the operated plate 41 are engaged to position and fix the operated plate 41. Such an operated plate 41 slides downward when the door body 30 is locked while being guided by the guide piece 13 by the drive pin 23 of the door body opening / closing device 20 accessing the bent upper and lower ends. When the body 30 is unlocked, it slides upward.

  Each locking plate 46 is formed in a plate shape shorter than the operated plate 41 using a predetermined material, and faces at least the unlocking groove 32 on the side wall of the door body 30 and the locking projection 33 via the storage block 10. And is slidably supported by the storage block 10. The locking plate 46 has a claw-shaped locking piece 47 that protrudes through the through-groove 12 of the storage block 10 and is located in the notch 9 of the container body 1, and the locking piece 47 is a door body. It enters into the 30 unlocking grooves 32 and interference locks on the locking projections 33.

  Examples of the material of the locking plate 46 include, for example, polyether ether ketone, polyethylene, polybutylene terephthalate, polybutylene naphthalate, polyacetal, polyetherimide, polycarbonate, and other synthetic resins having excellent slidability, fluorine resin such as PTFE, and silicone resin. The material which added the slidability modifier which consists of, and various thermoplastic elastomers correspond.

  Such a locking plate 46 presses and locks the locking piece 47 to the locking protrusion 33 of the door body 30 fitted to the open front surface 2 of the container body 1 when sliding down the operated plate 41. When the operated plate 41 is slid upward, it functions to separate the locking piece 47 in the direction of the unlocking groove 32 from the locking protrusion 33 of the door body 30 fitted to the front surface 2 of the container body 1.

  The cam mechanism 48 has a plurality of cam grooves 49 formed at intervals in the vertical direction of the operated plate 41, and is formed to protrude from each locking plate 46 so as to be slidable in the cam grooves 49 of the operated plate 41. It has a cylindrical cam projection 52 to be fitted, and functions to transmit the driving force accompanying the slide of the operated plate 41 to the locking plate 46 and to slide it stably in a vertical direction and an oblique horizontal direction at a high speed.

  Each cam groove 49 has an inclined groove 50 that extends while being slightly inclined in the vertical direction of the operated plate 41, and a bent groove that continuously extends while bending in the width direction of the operated plate 41 from the lower end portion of the inclined groove 50. 51, the locking piece 47 of the locking plate 46 is made to draw a substantially inverted or substantially J-shaped locus.

  In the above configuration, the case where the door body 30 of the storage container is locked will be described. As shown in FIG. 6, the locking means 40 in this case is such that each operated plate 41 slides downward and the storage block 10. The projection 11 and the first recess 44 of the operated plate 41 are engaged with each other to position and fix the operated plate 41 at the locking position, and the cam groove 49 and the cam projection 52 of each cam mechanism 48 interfere with each other. The upper end portion of the inclined groove 50 of the cam groove 49 interferes with the cam protrusion 52 of the locking plate 46.

  When the upper end of the inclined groove 50 and the cam projection 52 of the locking plate 46 move until they interfere with each other, the driving force is transmitted to the locking plate 46 through the cam groove 49 during the movement. Slides downward to cause the locking piece 47 to enter the unlocking groove 32 of the door body 30 and also to move toward the rear wall side in the opposite direction to the front surface 2 of the container body 1. The locking projection piece 33 of the door body 30 is approached and interference locked.

  At this time, since the locking piece 47 moves without rubbing against other members, the generation of particles can be remarkably reduced. Due to the interference locking between the locking protrusion 33 of the door body 30 and the locking piece 47 of the locking plate 46, the door body 30 fitted in a sealed state on the front surface 2 of the container body 1 is firmly locked.

  Next, when the storage container is mounted on the door body opening / closing device 20 and the door body 30 is unlocked, the container body 1 is positioned and mounted on the stage 21 of the door body opening / closing device 20, and then the locking means 40. The drive pin 23 of the door body opening / closing device 20 accesses and pushes up each operated plate 41 sliding downward.

  Then, in the locking means 40, as shown in FIG. 7, each operated plate 41 slides upward, and the engagement between the convex portion 11 of the storage block 10 and the first concave portion 44 of the operated plate 41 is released. The cam projection 52 of the locking plate 46 moves away from the upper end of the inclined groove 50 and moves in the direction of the bent groove 51. Thus, when the cam projection 52 of the locking plate 46 moves away from the upper end portion of the inclined groove 50 and moves to the bending groove 51, the driving force is transmitted to the locking plate 46, so that the locking piece 47 of the locking plate 46 is attached to the door body 30. Slide in the direction of the unlocking groove 32 from the locking protrusion 33.

  Next, when the drive pin 23 of the door body opening / closing device 20 accesses the operated plates 41 of the locking means 40 from below and further pushes up, the locking means 40 is moved upward as shown in FIG. Further, the protrusion 11 of the storage block 10 and the second recess 45 of the operated plate 41 are engaged with each other, and the operated plate 41 is positioned and fixed at the unlocked position. And the cam projection 52, specifically, the lower end portion of the bent groove 51 of the cam groove 49 and the cam projection 52 of the locking plate 46 interfere with each other.

  When the lower end of the bending groove 51 and the cam projection 52 of the locking plate 46 move until they interfere with each other, the driving force is transmitted to the locking plate 46 through the cam groove 49 during the movement. Slides in the two directions on the front side of the container body 1 and further slides upward to completely position the locking piece 47 in the unlocking groove 32 of the door body 30, and is fitted to the front surface 2 of the container body 1 in a sealed state. The door body 30 is in a removable state.

  At this time, since the unlocking groove 32 of the door body 30 is covered by the locking plate 46, particles do not enter the unlocking groove 32 of the door body 30 from the outside. Therefore, contamination of the storage container, the semiconductor processing apparatus, and the door body opening / closing apparatus 20 can be prevented. Moreover, since the locking piece 47 moves without rubbing against other members, the generation of particles can be remarkably reduced.

  According to the above configuration, the locking means 40 is disposed not in the door body 30 but in the front portion of the side wall 8 of the container body 1, so that contaminants such as particles are contaminated by the door body 30 when the door body 30 is locked / unlocked. Will not accumulate inside. Further, it is possible to effectively eliminate the possibility that contaminants remaining in the door body 30 enter the inside of the container body 1 and contaminate the entire substrate including the substrate.

  Further, since it is not necessary to make a small through-hole for the locking means 40 in the peripheral wall of the door body 30, it is possible to prevent cleaning water from remaining during the internal cleaning of the door body 30, and to clean and dry the door body 30. Smooth, quick and easy. Furthermore, since it is not necessary to remove the plurality of screws and disassemble the door body 30 when repairing or inspecting the locking means 40, there is no need to replace the door body 30 with a new door body 30 and it is economical. Improvements and cost reductions can be greatly expected.

  Next, FIG. 9 thru | or FIG. 13 shows the 2nd Embodiment of this invention, In this case, the locking means 40 is supported by the storage block 10 of the side wall 8 front part of the container body 1, and is a door body. The operated plate 41 that slides up and down at the time of locking / unlocking 30, a plurality of connecting plates 54 that slide in the front-rear direction of the container body 1 as the operated plate 41 slides up and down, and each connecting plate The container body 1 swings (rotates) in the left / right / inside / outward direction according to the slide in the front / rear direction, and can come in contact with / separate from the locking protrusion 33 of the door body 30 fitted to the front surface 2 of the container body 1 The locking plate 46 </ b> A and a cam mechanism 48 that transmits the driving force accompanying the slide of the operated plate 41 to each connecting plate 54 are configured.

  As shown in FIGS. 9 and 10, the container body 1 has a plurality of notches 9 </ b> A for the locking means 40 at the front portions of the side walls 8 that define the front surface 2, i.e., the side portions of the rim flange 7. And a storage block 10 that is cut out side by side and stores the locking means 40 is integrally formed. A plurality of cover bodies 53 covering the connecting plate 54, the locking plate 46A, and the cam mechanism 48 of the locking means 40 are detachably mounted in the front part of each side wall 8 in the vertical direction.

  As shown in FIGS. 10 and 11, the operated plate 41 is basically formed into a long and narrow plate piece having a length (height) substantially the same as the side wall 8 of the container body 1 using a predetermined material. The upper and lower ends are accessed by the drive block 23 of the door body opening / closing device 20. When the door body 30 is locked, the operated plate 41 slides downward when the drive pin 23 of the door body opening / closing device 20 is accessed from both the upper and lower ends, and upward when the door body 30 is unlocked. Slide to.

  As shown in FIGS. 10, 12, and 13, each connection plate 54 is formed in a substantially plate piece extending in a direction orthogonal to the operated plate 41, that is, in the front-rear direction of the container body 1. The surface to be supported is supported via a cam mechanism 48. A fitting support portion 55 having a substantially U-shaped cross section is formed at the front portion of the connecting plate 54 so that its opening 56 is directed toward the side wall of the door body 30, and the locking plate is placed in the fitting support portion 55. 46A is slidably supported.

  As shown in FIGS. 10, 12, and 13, each locking plate 46A is formed in a substantially plate piece smaller than the connecting plate 54, and has a substantially cylindrical shape located in the notch 9A of the container body 1 at the front. The locking piece 47 is formed to bulge, and this locking piece 47 interferes and locks with the locking protrusion 33 of the door body 30. A substantially cylindrical shaft portion 57 is integrally formed at the rear portion of the locking plate 46A. The shaft portion 57 is fitted and supported by the fitting support portion 55 of the connecting plate 54 and slides from the opening 56 toward the bottom.

  Such a locking plate 46A is locked to the locking protrusion 33 of the door body 30 fitted to the opened front surface 2 of the container body 1 by the advancement of the connecting plate 54 when the operation plate 41 slides downward. When the piece 47 is pressed and locked and slid upward in the operated plate 41, the locking piece 47 is moved from the locking projection piece 33 of the door body 30 fitted to the front surface 2 of the container body 1 by the retraction of the connecting plate 54. Swings away from each other.

  As shown in FIGS. 10 to 13, the cam mechanism 48 has a plurality of cam grooves 49 formed at intervals in the vertical direction of the operated plate 41, and is protruded from each connecting plate 54 to be operated. And a cylindrical cam projection 52 slidably fitted in the cam groove 49, and the driving force accompanying the slide of the operated plate 41 is transmitted to the connecting plate 54 so as to slide in the front-rear direction of the container body 1. Function.

  Each cam groove 49 is formed integrally with the inclined groove 50 extending slightly while being inclined in the width direction of the operated plate 41, and the upper and lower ends of the inclined groove 50, and is closely fitted to the cam protrusion 52 of the connecting plate 54. The first and second fitting grooves 58 and 59 that are substantially circular are integrally formed.

  In the above configuration, when the storage container is mounted on the door body opening / closing device 20 and the door body 30 is unlocked, the container body 1 is positioned and mounted on the stage 21 of the door body opening / closing device 20 and then the locking means. The drive pin 23 of the door body opening / closing device 20 is accessed from below and pushed up to each operated plate 41 sliding downward.

  Then, as shown in FIG. 12, each locking plate 41 slides upward in the locking means 40, and the cam protrusion 52 of the connecting plate 54 extends from the first fitting groove 58 of the cam groove 49 of the operating plate 41. Is separated and fitted into the second fitting groove 59, and the driving force is transmitted to the connecting plate 54. At this time, since the second fitting groove 59 of the operated plate 41 and the cam protrusion 52 of the connecting plate 54 are tightly fitted, the downward sliding of the operated plate 41 is effectively prevented.

  When the driving force is transmitted to the connecting plate 54, the connecting plate 54 moves backward in the container body 1, and the shaft portion 57 of the locking plate 46 </ b> A extends from the bottom of the fitting support portion 55 of the connecting plate 54 toward the opening 56. And the locking plate 46A swings (rotates) while drawing an arc around the shaft portion 57 so as to separate the locking piece 47 from the locking protrusion 33 of the door body 30, and The door body 30 fitted in a sealed state on the front surface 2 is in a removable state.

  On the other hand, when the door body 30 is locked to the container body 1 of the storage container positioned and mounted on the door body opening / closing device 20, the door 30 is slid upward when the door body 30 is locked. The drive pins 23 of the door body opening / closing device 20 are accessed from above and pushed down the respective operated plates 41.

  Then, as shown in FIG. 13, the locking means 40 slides each operated plate 41 downward, and the cam projection 52 of the connecting plate 54 from the second fitting groove 59 of the cam groove 49 of the operated plate 41. Are separated and fitted into the first fitting groove 58, and the driving force is transmitted to the connecting plate 54. At this time, since the first fitting groove 58 of the operated plate 41 and the cam protrusion 52 of the connecting plate 54 are tightly fitted, the upward sliding of the operated plate 41 is effectively prevented.

  When the driving force is transmitted to the connecting plate 54, the connecting plate 54 moves forward in the container body 1, and the shaft portion 57 of the locking plate 46 </ b> A extends from the opening 56 direction of the fitting support portion 55 of the connecting plate 54 to the bottom direction. And the locking plate 46A swings while drawing an arc around the shaft portion 57 so that the locking piece 47 interferes with the locking protrusion 33 of the door body 30 and is sealed to the front surface 2 of the container body 1. Thus, the door body 30 fitted in is firmly locked. The other parts are substantially the same as those in the above embodiment, and thus description thereof is omitted.

  In this embodiment, the same effect as the above embodiment can be expected, and the locking piece 47 of the locking plate 46A does not interfere and lock while contacting the locking protrusion 33 of the door body 30, but the door body 30. Since the locking piece 47 of the locking plate 46A is interfered and locked to the locking projection piece 33 only at the contact position, contaminants such as particles accompanying the contact between the locking projection piece 33 of the door body 30 and the locking piece 47 of the locking plate 46A. It is clear that the occurrence of the occurrence can be effectively prevented.

  Next, FIG. 14 to FIG. 16 show a third embodiment of the present invention. In this case, a plurality of notches 9 are respectively formed on the front portions of the side walls 8 of the container body 1, and A storage block 10A for the locking means 40 that covers the notch 9 is mounted, and a plurality of locking protrusions 33 corresponding to the plurality of notches 9 of the container body 1 are formed on both side walls of the door body 30, respectively. When the door body 30 is locked, the operated plate 41B slides downward. When the door body 30 is unlocked, the operated plate 41B slides downward. When the door body 30 is locked, the door body 30 unlocks. Sometimes the locking plate 46B that slides upward, the storage block 10A, the operated plate 41B, and the locking plate 46B are disposed on the locking plate 46B to lock the driving force accompanying the sliding of the operated plate 41B. Are to be composed of the cam mechanism 48B for operating is transmitted to the over preparative 46B.

  As shown in FIG. 14, each storage block 10 </ b> A is formed in a vertical plate having a substantially U-shaped cross section and a substantially rectangular front surface, and a slit 15 for the locking plate 46 </ b> B of the locking means 40 is linearly directed downward at the upper portion. The locking plate 46B is slidably sandwiched between both side portions bulged in the thickness direction, and functions to restrict the movement of the locking plate 46B in the width direction.

  As shown in FIG. 14, the operated plate 41B of the locking means 40 is formed in a substantially rectangular vertical plate that is accessed by the drive pin 23 of the door body opening / closing device 20, and is vertically moved between both side portions of the storage block 10A. The locking piece 47 is covered from the outside so that the movement in the width direction is restricted to both sides of the storage block 10A.

  As shown in the figure, the locking plate 46B is formed in a substantially rectangular vertical plate on the front surface, and has a generally bowl-shaped locking piece penetrating the slit 15 of the storage block 10A at the upper part of the back surface facing the front surface of the storage block 10A. 47 is bent and protruded, and the locking piece 47 interferes and locks with the locking protrusion 33 of the door body 30 when the door body 30 is locked. Such a locking plate 46B slides with the operated plate 41B at the initial stage of locking the door body 30, and slides in a direction different from the sliding direction of the operated plate 41B at the final stage of locking the door body 30.

  As shown in the figure, the cam mechanism 48B includes a pair of first cam protrusions 60 formed obliquely above and below the surface of the storage block 10A, and a pair of first cams formed on the locking plate 46B. A pair of first cam grooves 61 that are slidably fitted and supported by the protrusions 60, a pair of second cam protrusions 62 formed obliquely above and below the surface of the locking plate 46B, and the operated plate 41B are formed. And a pair of second cam grooves 63 slidably fitted to and supported by the second cam protrusions 62 of the locking plate 46B.

  Each of the first cam protrusions 60 and the second cam protrusions 62 is formed to protrude in a short cylindrical shape from the viewpoint of ensuring smooth movement and preventing wear. Each first cam protrusion 60 supports the locking plate 46B so as to be slidable in the vertical direction, and each second cam protrusion 62 functions to support the operated plate 41B so as to be slidable in the vertical direction.

  Each first cam groove 61 has a vertical groove 61a that extends in the vertical direction of the locking plate 46B, and an inclined groove that is formed in communication with the upper end of the vertical groove 61a and extends obliquely upward in the locking plate 46B. It is integrally formed in a substantially inverted J shape having 61b and a horizontal groove 61c that is formed in communication with the tip of the inclined groove 61b and extends in the horizontal direction.

  Each second cam groove 63 is formed in communication with the end of the gently inclined groove 63a, and a gently inclined groove 63a that is perforated by extending in the left-right horizontal direction while slightly tilting obliquely above the operated plate 41B. The operation plate 41B is integrally formed in a substantially L-shape including a steeply inclined groove 63b that extends and drills upward while slightly inclining in the horizontal direction of the left and right.

  Such a cam mechanism 48B is configured such that when the door body 30 is locked and the second cam protrusion 62 of the locking plate 46B and the gently inclined groove 63a of the second cam groove 63 are in contact, the operated plate 41B and the locking plate 46B. And the slant groove 61b of the first cam groove 61 comes into contact with the first cam protrusion 60 when the door body 30 is locked, and the second cam protrusion 62 of the locking plate 46B contacts the second cam groove 63. When contacting the vicinity of the boundary between the gently inclined groove 63a and the steeply inclined groove 63b, the operated plate 41B and the locking plate 46B function to slide obliquely downward.

  When the second cam projection 62 of the locking plate 46B comes into contact with the steeply inclined groove 63b of the second cam groove 63 when the door body 30 is locked, it slides downward while moving the operated plate 41B in the horizontal direction. Then, the locking plate 46B is moved in the horizontal direction by the horizontal groove 61c of the first cam groove 61, and the locking piece 47 of the locking plate 46B interferes with the locking protrusion 33 of the door body 30. That is, the cam mechanism 48 </ b> B causes the locking piece 47 of the locking plate 46 to draw a substantially inverted or substantially J-shaped trajectory.

  In the above configuration, when the storage container is mounted on the door body opening / closing device 20 and the door body 30 is locked, the drive pin 23 of the door body opening / closing device 20 accesses and pushes down each operated plate 41B of the locking means 40. . Then, the operated plate 41B and the locking plate 46B slide downward while being guided by the first cam protrusion 60 of the storage block 10A.

  At this time, since the second cam protrusion 62 and the tip of the gently inclined groove 63a are fitted to restrict sliding in the vertical direction, the relative position between the operated plate 41B and the locking plate 46B does not change. (See FIG. 15 (a)). Thus, the operated plate 41B and the locking plate 46B slide downward together until the upper end of the vertical groove 61a of the first cam groove 61 is fitted to the first cam protrusion 60 (see FIG. 15B).

  Next, when the inclined groove 61b of the first cam groove 61 is fitted to the first cam protrusion 60, and the second cam protrusion 62 is fitted near the boundary between the gently inclined groove 63a and the steeply inclined groove 63b, the operated plate 41B. And the locking plate 46B slide obliquely downward (see FIG. 15C). At this time, the locking piece 47 of the locking plate 46B slides while moving to the right side of FIG.

  When the operated plate 41B slides further downward, the second cam protrusion 62 of the locking plate 46B contacts the steeply inclined groove 63b of the second cam groove 63, and the second cam protrusion 62 comes to the end of the steeply inclined groove 63b. The operated plate 41B slides downward while moving slightly in the right direction in FIG. 15 until it moves.

  At this time, the locking plate 46B moves to the right in FIG. 15 along the horizontal groove 61c of the first cam groove 61 without sliding downward (see FIG. 15D). In this way, in the final stage of locking, the operated plate 41B and the locking plate 46B move in different directions, and the locking piece 47 of the locking plate 46B interferes with the locking protrusion 33 of the door body 30, whereby the storage container Is locked by the door body 30.

  The movement of the locking plate 46B with respect to the locking protrusion 33 of the door body 30 is replaced with the movement of the locking plate 46B, and will be described with reference to FIG. 16. First, before the door body 30 is locked, the locking plate 46B is released from the door body 30. A locking piece 47 is located near the periphery of the locking groove 32 (see FIG. 16A). When the operated plate 41B slides downward in this state, the locking plate 46B slides downward (see FIG. 16B), and then moves slightly so as to approach the locking protrusion 33 of the door body 30 (see FIG. 16B). (Refer FIG.16 (c)).

  When the locking plate 46B moves so as to approach, the locking plate 46B slides further downward, so that the locking piece 47 interferes with the locking protrusion 33 of the door body 30 and engages with the right direction in FIG. The storage container is locked by the door body 30 (see FIG. 16D).

When the storage container is mounted on the door body opening / closing device 20 and the door body 30 is unlocked, the locking means 40 operates in reverse to the above operation to unlock the door body 30 of the storage container. Since other parts are the same as those in the above embodiment, the description thereof is omitted.
In the present embodiment, it is obvious that the same operational effects as those of the above-described embodiment can be expected, and the configuration of the locking means 40 in the first embodiment can be simplified and the number of parts can be reduced.

  In addition, in the said embodiment, although the container body 1 and the door body 30 of the storage container were each made from resin, it is not limited to this at all. For example, you may form with the metal material which can be reduced in weight, such as a ceramic, duralumin, a titanium alloy.

  In addition, a gas barrier film that does not transmit oxygen or moisture can be attached to the inner and outer surfaces of the storage container, the sealing surface of the seal gasket 35, and the operating portion of the locking means 40, or metal coating, diamond-like coating, PEEK resin. Coating and fluororesin coating may be applied as appropriate. Moreover, you may coat photocatalyst materials, such as titanium dioxide, and can maintain electroconductivity by maintaining the transparency of the door body 30 by coating with a conductive paint.

  Further, the support pieces 3 may be detachably mounted by a screw tool, a friction engagement method, or the like, instead of integrally mounting the support pieces 3 on both sides of the container body 1. In addition, a rear retainer that can hold the rear periphery of the substrate can be selectively formed on the inner surface of the back wall of the container body 1. Further, instead of mounting the separate storage block 10 on the front side of the side wall 8 of the container body 1, the storage block 10 can be integrally formed on the front side of the side wall 8 of the container body 1.

  Further, the first and second concave portions 44 and 45 can be formed in the storage block 10, and the convex portion 11 can be formed in the operated plate 41. Further, instead of forming the convex portion 11 on the storage block 10, the convex portion 11 can be formed on the cover plate 43. It is also possible to employ a biasing means that biases the operated plate 41 of the locking means 40 in a locking direction with a certain force, specifically various magnets, springs, and the like. Further, a rotating roller that suppresses the generation of contaminants due to wear caused by contact may be inserted into the locking pieces 47 of the locking plates 46 and 46A and the cam protrusions 52 of the cam mechanism 48 so as to be freely rotatable.

  In this case, the rotating roller is made of a resin having good slidability such as polyacetal, polyetheretherketone, polybutylene terephthalate, polybutylene naphthalate, or a slidability such as a fluororesin made of PTFE or a silicone resin as a synthetic resin. It can be formed of a material provided with a modifier.

  In addition, the configuration of the locking means 40 is changed so that the locking means 40 is supported on the front side of the side wall of the container body 1 via the storage block 10 and slides upward when the door body 30 is locked. The operated plate 41 that slides downward when locked, and is slidably interposed between the front portion of the side wall of the container body 1 and the operated plate 41, and when the container plate 1 slides upward, A locking plate 46 that contacts the side wall of the door body 30 fitted to the front surface 2 and separates from the side wall of the door body 30 fitted to the front surface 2 of the container body 1 when sliding down the operated plate 41; A cam mechanism 48 that is provided on each of the operated plate 41 and the locking plate 46 and that operates by transmitting the driving force accompanying the slide of the operated plate 41 to the locking plate 46. It can also be configured.

  Furthermore, the structure of the locking means 40 is changed, and the locking means 40 is supported on the bottom plate front portion and the top plate 6 front portion of the container body 1 via the storage block 10 respectively, and is in the protruding position when the door body 30 is locked. Between the operated plate 41 that slides horizontally and protrudes and slides backward from the protruding position to the original reference position when the door body 30 is unlocked, and the bottom plate front portion of the container body 1 and the operated plate 41 And the slidably interposed between the front portion of the top plate 6 and the operated plate 41, and when the operated plate 41 is slid to the projecting position, the peripheral wall of the door body 30 is fitted to the front surface 2 of the container body 1. The locking plate 46 which contacts and separates from the peripheral wall of the door body 30 fitted to the front surface 2 of the container body 1 when the operated plate 41 slides to the reference position, and the operated plate 41 and the locking plate 4. Preparative the respectively provided, it may be composed of a cam mechanism 48. which is operated by transmitting the driving force caused by the sliding of the operation plate 41 in the locking plate 46.

  The storage container according to the present invention can be used in the field of manufacturing semiconductors, liquid crystals, mechanical parts, electrical and electronic parts, chemicals, buildings, and the like.

1 Container body 2 Front (opening)
7 Rim flange 8 Side wall (peripheral wall)
DESCRIPTION OF SYMBOLS 9 Notch 9A Notch 10 Storage block 10A Storage block 11 Convex part 13 Guide piece 14 Position control part 15 Slit 20 Door body opening / closing device 23 Drive pin 30 Door body 31 Door main body 32 Unlocking groove 33 Locking protrusion 40 Locking means 41 Operated plate (operated member)
41B Operated plate (operated member)
42 long hole 44 1st recessed part 45 2nd recessed part 46 Locking plate (locking member)
46A Locking plate (locking member)
46B Locking plate (locking member)
47 Locking piece 48 Cam mechanism (driving force transmission mechanism)
48B Cam mechanism (driving force transmission mechanism)
49 Cam groove 52 Cam projection 54 Connection plate (connection member)
55 Fitting support portion 57 Shaft portion 60 First cam projection 61 First cam groove 61a Vertical groove 61b Inclined groove 61c Horizontal groove 62 Second cam projection 63 Second cam groove 63a Slowly inclined groove 63b Steeply inclined groove

Claims (11)

A container body that stores articles and a door body that opens and closes the opening of the container body, and a door body that is fitted to the opening of the container body in the vicinity of the opening of the peripheral wall of the container body or the peripheral wall of the door body. A storage container provided with locking means for locking,
The locking means slides in the locking direction that intersects the door opening and closing direction when the door body is locked, and slides in the unlocking direction opposite to the locking direction that intersects the door opening and closing direction when the door body is unlocked When the member and the operated member are slid in the locking direction, they are brought into contact with the peripheral wall of the door body fitted to the opening of the container body or the inner periphery of the opening of the container body, and when the operated member is slid in the unlocking direction, the container A locking member that is separated from the peripheral wall of the door body or the inner periphery of the opening of the container body that is fitted to the opening of the body, and a driving force transmission mechanism that transmits the driving force accompanying the sliding of the operated member to the locking plate. A storage container characterized by that.   The container body is formed in a front open box that can store a substrate, and locking means are provided at the front of the peripheral wall that defines the opened front face, and the door body is detachably fitted to the opened front face of the container body. The storage container according to claim 1.   The locking means is supported by the front of the side wall of the container body, and slides in either the upper or lower locking direction when the door body is locked, and slides in the unlocking direction opposite to the locking direction when the door body is unlocked. When the member and the operated member slide in the locking direction, they contact the side wall of the door body fitted in front of the container body, and when the operated member slides in the unlocking direction, the door body fitted in front of the container body The storage container according to claim 2, further comprising: a locking member that is separated from the side wall of the first member; and a cam mechanism that transmits the driving force accompanying the slide of the operated member to the locking member to operate.   The locking means is supported by the front side of the side wall of the container body, slides downward when the door body is locked, and slides upward when the door body is unlocked, and the front side wall and the operated side of the container body The sliding member is slidably interposed between the member and the side wall of the door body fitted to the front surface of the container body when sliding the operated member downward, and when sliding the member upward, the container body A locking member that is spaced apart from the side wall of the door body fitted on the front surface, and a cam mechanism that is provided on the operated member and the locking member, and that operates by transmitting a driving force accompanying the slide of the operated member to the locking member. The storage container according to claim 2 or 3.   A notch is formed in the front part of the side wall of the container body, and a storage block for the locking means for covering the notch is attached, and this storage block is provided with a guide piece for guiding the operated member of the locking means, The storage container according to claim 3 or 4, wherein a position regulating portion for an operated member is formed on the guide piece.   A convex portion is formed on one of the storage block and the operated member of the locking means, and the first and second concave portions are formed on the other, and the convex portion is formed when the operated member slides in the locking direction. And the first concave portion are fitted and fixed, and when the operated member slides in the unlocking direction, the convex portion and the second concave portion are fitted and fixed. Or the storage container of 5.   Formed on the side wall of the door body is a locking protrusion corresponding to the notch on the front side of the container body, and the locking member of the locking means is provided with a locking piece penetrating the storage block and positioned in the notch of the container body. The storage container according to claim 5 or 6, wherein the storage container is formed and hooks the locking piece of the locking member on the locking protrusion of the door body when the operated member slides in the locking direction.   On the side wall of the door body, an unlocking groove corresponding to a notch on the front side of the side wall of the container body is formed, and a locking protrusion is formed on the peripheral edge of the unlocking groove. 8. The storage container according to claim 7, wherein the unlocking groove releases the interference of the locking member of the locking member with the locking protrusion of the body, and the unlocking groove is covered with the locking member.   The locking means is supported by the front portion of the side wall of the container body, slides downward when the door body is locked, and is operated by the operated member that slides upward when the door body is unlocked. A connecting member that slides in the forward direction of the container body when sliding down the operation member, and a sliding member that slides in the rear direction of the container body when sliding upward in the operated member, and is rotatably supported by this connecting member, Locking that contacts the side wall of the door body fitted to the front of the container body when the connecting member slides forward, and separates from the side wall of the door body fitted to the front of the container body when sliding backward of the connecting member. The storage container according to any one of claims 2 to 8, further comprising a member and a cam mechanism that transmits the driving force accompanying the slide of the operated member to the connecting member and slides the connecting member. A notch is formed in the front portion of the side wall of the container body, and a storage block for the locking means for covering the notch is attached, and a slit for the locking means is formed in the storage block,
On the side wall of the door body, a locking protrusion corresponding to the notch of the container body is formed,
The locking means is housed in a storage block of the container body, slides downward when the door body is locked, and slides upward when the door body is unlocked, and a storage block and operated member of the container body. The locking member that slides downward when the door body is locked, and slides upward when the door body is unlocked, and is provided on the storage block, the operated member, and the locking member. And a cam mechanism that operates by transmitting the driving force accompanying the slide to the locking member, and the locking member has a locking piece that passes through the slit of the storage block and can interfere with the locking protrusion of the door body when the door body is locked. And forming a cam mechanism on the locking member, a first cam protrusion formed on the storage block, a first cam groove formed on the locking member and slidably fitted on the first cam protrusion of the storage block, and the locking member Second cam protrusion and a receiving container according to any one of the preceding claims 2 was constructed and a second cam groove to be fitted slidably in the second cam projection of the locking member is formed on the operating member 8 to be. The first cam groove of the cam mechanism includes a vertical groove formed in the vertical direction of the locking plate, an inclined groove formed at an upper end portion of the vertical groove and extending obliquely upward of the locking plate, and a tip portion of the inclined groove The second cam groove is formed in a horizontal direction while being inclined obliquely above the operated plate, and at the end of the gently inclined groove. Formed from a steeply inclined groove formed above while being inclined in the horizontal direction of the operated plate,
The cam mechanism restricts a change in the relative position between the operated member and the locking member when the second cam projection of the locking member and the gently inclined groove of the second cam groove come into contact with each other when the door body is locked. When the body is locked, the inclined groove of the first cam groove comes into contact with the first cam protrusion, and the second cam protrusion of the locking member comes into contact with the vicinity of the boundary between the gently inclined groove and the gently inclined groove of the second cam groove. When the operated member and the locking member are slid obliquely downward, and the second cam projection of the locking member and the steeply inclined groove of the second cam groove come into contact with each other when the door body is locked, the operated member is moved in the horizontal direction. 11. The storage according to claim 10, wherein the lock member is slid downward while being moved to move the lock member horizontally by the horizontal groove of the first cam groove so that the lock piece of the lock member interferes with the lock protrusion of the door body. container.

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