JP2011521816A - 単結晶基板にエッチングすることによってインクジェット・デバイスのノズル及びインク室を形成する方法 - Google Patents
単結晶基板にエッチングすることによってインクジェット・デバイスのノズル及びインク室を形成する方法 Download PDFInfo
- Publication number
- JP2011521816A JP2011521816A JP2011512140A JP2011512140A JP2011521816A JP 2011521816 A JP2011521816 A JP 2011521816A JP 2011512140 A JP2011512140 A JP 2011512140A JP 2011512140 A JP2011512140 A JP 2011512140A JP 2011521816 A JP2011521816 A JP 2011521816A
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- etching
- nozzle
- etching step
- layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005530 etching Methods 0.000 title claims abstract description 54
- 239000000758 substrate Substances 0.000 title claims abstract description 53
- 238000000034 method Methods 0.000 title claims abstract description 43
- 239000013078 crystal Substances 0.000 title claims description 7
- 230000001133 acceleration Effects 0.000 claims abstract description 17
- 239000000463 material Substances 0.000 claims abstract description 6
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 4
- 229920005591 polysilicon Polymers 0.000 claims description 4
- 238000001039 wet etching Methods 0.000 claims description 4
- 238000004891 communication Methods 0.000 claims description 2
- 239000010409 thin film Substances 0.000 description 5
- 238000000708 deep reactive-ion etching Methods 0.000 description 3
- 238000004518 low pressure chemical vapour deposition Methods 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 239000011162 core material Substances 0.000 description 1
- 230000001419 dependent effect Effects 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000000206 photolithography Methods 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1646—Manufacturing processes thin film formation thin film formation by sputtering
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1607—Production of print heads with piezoelectric elements
- B41J2/161—Production of print heads with piezoelectric elements of film type, deformed by bending and disposed on a diaphragm
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1628—Manufacturing processes etching dry etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1626—Manufacturing processes etching
- B41J2/1629—Manufacturing processes etching wet etching
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1631—Manufacturing processes photolithography
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/1635—Manufacturing processes dividing the wafer into individual chips
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
- B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
- B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
- B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
- B41J2/01—Ink jet
- B41J2/135—Nozzles
- B41J2/16—Production of nozzles
- B41J2/1621—Manufacturing processes
- B41J2/164—Manufacturing processes thin film formation
- B41J2/1642—Manufacturing processes thin film formation thin film formation by CVD [chemical vapor deposition]
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Abstract
Description
‐基板においてノズルが形成されるべき側に環状溝を形成するステップ、及び
‐第2エッチング工程に対して耐久性を持つようにその溝の壁を不動態化するステップ、
が第1エッチング工程の前に行われる方法によって成し遂げられ、その溝によって取り囲まれる材料は第1エッチング工程において除去される。
Claims (7)
- インクジェット・デバイスのノズル及びインク室を形成する方法であり、ノズル通路は、基板を方向性のある第1エッチング工程に該基板の片側からさらすことによって形成され、第2エッチング工程は、前記ノズル通路の内部の部分を拡大するために前記基板の同じ側から適用されることから、前記ノズルに隣り合わせる前記インク室の少なくとも一部分を形成する空洞を形成し、該空洞の形状は、前記基板の反対側においてエッチング停止層の下に埋められたエッチング加速層を供給することによって、及び前記第2エッチング工程が前記エッチング加速層の中へ進むことを可能にすることによって制御され、以下:
‐前記基板において前記ノズルが形成されるべき側に環状溝を形成するステップ、及び
‐前記第2エッチング工程に対して耐久性を持つように、前記溝の壁を不動態化するステップ、
が前記第1エッチング工程に先行することを特徴とし、前記溝によって取り囲まれる材料は、該第1エッチング工程において除去されることを特徴とする、方法。 - 請求項1に記載の方法であり、前記基板は単結晶によって形成され、前記第2エッチング工程は、前記基板の異なる結晶学的方向に対して異なるエッチング速度を持つ工程であり、前記ノズル通路は、該エッチング速度が最も遅い結晶学的方向に関して傾いた方向に形成されることから、前記ノズルに向かって先細くなる壁を持つ空洞を形成する、方法。
- 前記第2エッチング工程がウェット・エッチング工程である、請求項2に記載の方法。
- 前記エッチング工程がKOHウェット・エッチング工程である、請求項3に記載の方法。
- 圧電アクチュエータの少なくとも1つの構成部品が、前記エッチング加速層を覆う前記エッチング停止層の一部分上に形成される、請求項1に記載の方法。
- 前記第2エッチング工程の後に、インク供給通路が前記エッチング停止層及び前記基板の一部分を通ってエッチングすることによって形成され、従って前記空洞と連通する通路を形成する、請求項1に記載の方法。
- 前記エッチング加速層がポリシリコンの層である、請求項1に記載の方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP08157747 | 2008-06-06 | ||
EP08157747.0 | 2008-06-06 | ||
PCT/EP2009/056925 WO2009147231A1 (en) | 2008-06-06 | 2009-06-05 | Method of forming a nozzle and an ink chamber of an ink jet device by etching a single-crystal substrate |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011521816A true JP2011521816A (ja) | 2011-07-28 |
JP5379850B2 JP5379850B2 (ja) | 2013-12-25 |
Family
ID=39760505
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2011512140A Expired - Fee Related JP5379850B2 (ja) | 2008-06-06 | 2009-06-05 | 単結晶基板にエッチングすることによってインクジェット・デバイスのノズル及びインク室を形成する方法 |
Country Status (4)
Country | Link |
---|---|
US (1) | US8377321B2 (ja) |
EP (1) | EP2300235B1 (ja) |
JP (1) | JP5379850B2 (ja) |
WO (1) | WO2009147231A1 (ja) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014083772A (ja) * | 2012-10-24 | 2014-05-12 | Canon Inc | 液体吐出ヘッドの製造方法 |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US20120211805A1 (en) | 2011-02-22 | 2012-08-23 | Bernhard Winkler | Cavity structures for mems devices |
EP2697068B1 (en) | 2011-04-13 | 2015-04-08 | OCE-Technologies B.V. | Method of forming a nozzle of a fluid ejection device |
KR101890755B1 (ko) * | 2011-11-25 | 2018-08-23 | 삼성전자 주식회사 | 잉크젯 프린팅 장치 및 노즐 형성 방법 |
DE102012206531B4 (de) * | 2012-04-17 | 2015-09-10 | Infineon Technologies Ag | Verfahren zur Erzeugung einer Kavität innerhalb eines Halbleitersubstrats |
KR101968636B1 (ko) | 2012-12-06 | 2019-04-12 | 삼성전자주식회사 | 잉크젯 프린팅 장치 및 노즐 형성 방법 |
US9136136B2 (en) | 2013-09-19 | 2015-09-15 | Infineon Technologies Dresden Gmbh | Method and structure for creating cavities with extreme aspect ratios |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001260355A (ja) * | 2000-03-21 | 2001-09-25 | Nec Corp | インクジェットヘッドおよびその製造方法 |
JP2002225277A (ja) * | 2001-01-08 | 2002-08-14 | Samsung Electronics Co Ltd | 半球形インクチャンバを有するインクジェットプリントヘッド及びその製造方法 |
JP2007210242A (ja) * | 2006-02-10 | 2007-08-23 | Canon Inc | インクジェット記録ヘッド及びその作製方法 |
Family Cites Families (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6171510B1 (en) * | 1997-10-30 | 2001-01-09 | Applied Materials Inc. | Method for making ink-jet printer nozzles |
US20020118253A1 (en) | 2000-03-21 | 2002-08-29 | Nec Corporation | Ink jet head having improved pressure chamber and its manufacturing method |
CN1314246A (zh) * | 2000-03-21 | 2001-09-26 | 日本电气株式会社 | 喷墨头及其制造方法 |
KR100429844B1 (ko) * | 2001-10-25 | 2004-05-03 | 삼성전자주식회사 | 일체형 잉크 젯 프린트헤드 및 그 제조방법 |
US6554403B1 (en) * | 2002-04-30 | 2003-04-29 | Hewlett-Packard Development Company, L.P. | Substrate for fluid ejection device |
US7036913B2 (en) * | 2003-05-27 | 2006-05-02 | Samsung Electronics Co., Ltd. | Ink-jet printhead |
US6930055B1 (en) * | 2004-05-26 | 2005-08-16 | Hewlett-Packard Development Company, L.P. | Substrates having features formed therein and methods of forming |
KR20060092397A (ko) | 2005-02-17 | 2006-08-23 | 삼성전자주식회사 | 압전 방식의 잉크젯 프린트헤드 및 그 제조방법 |
JP5028112B2 (ja) | 2006-03-07 | 2012-09-19 | キヤノン株式会社 | インクジェットヘッド用基板の製造方法およびインクジェットヘッド |
-
2009
- 2009-06-05 EP EP09757612A patent/EP2300235B1/en not_active Not-in-force
- 2009-06-05 JP JP2011512140A patent/JP5379850B2/ja not_active Expired - Fee Related
- 2009-06-05 WO PCT/EP2009/056925 patent/WO2009147231A1/en active Application Filing
-
2010
- 2010-12-02 US US12/959,130 patent/US8377321B2/en not_active Expired - Fee Related
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2001260355A (ja) * | 2000-03-21 | 2001-09-25 | Nec Corp | インクジェットヘッドおよびその製造方法 |
JP2002225277A (ja) * | 2001-01-08 | 2002-08-14 | Samsung Electronics Co Ltd | 半球形インクチャンバを有するインクジェットプリントヘッド及びその製造方法 |
JP2007210242A (ja) * | 2006-02-10 | 2007-08-23 | Canon Inc | インクジェット記録ヘッド及びその作製方法 |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2014083772A (ja) * | 2012-10-24 | 2014-05-12 | Canon Inc | 液体吐出ヘッドの製造方法 |
Also Published As
Publication number | Publication date |
---|---|
US20110132872A1 (en) | 2011-06-09 |
WO2009147231A1 (en) | 2009-12-10 |
EP2300235B1 (en) | 2012-09-19 |
US8377321B2 (en) | 2013-02-19 |
EP2300235A1 (en) | 2011-03-30 |
JP5379850B2 (ja) | 2013-12-25 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP5379850B2 (ja) | 単結晶基板にエッチングすることによってインクジェット・デバイスのノズル及びインク室を形成する方法 | |
USRE44945E1 (en) | Manufacturing method for ink jet recording head chip, and manfuacturing method for ink jet recording head | |
US20060214995A1 (en) | Ink jet recording head and manufacture method for the same | |
KR100374788B1 (ko) | 버블 젯 방식의 잉크 젯 프린트 헤드, 그 제조방법 및잉크 토출방법 | |
US6254222B1 (en) | Liquid jet recording apparatus with flow channels for jetting liquid and a method for fabricating the same | |
US8940559B2 (en) | Method of fabricating an integrated orifice plate and cap structure | |
KR100433530B1 (ko) | 일체형 잉크젯 프린트 헤드의 제조 방법 | |
JP2006150587A (ja) | 流体排出装置及び流体排出装置を形成する方法 | |
US7473649B2 (en) | Methods for controlling feature dimensions in crystalline substrates | |
US8329047B2 (en) | Method for producing liquid discharge head | |
JP4693496B2 (ja) | 液体吐出ヘッドおよびその製造方法 | |
US20060150408A1 (en) | Method of forming symmetric nozzles in an inkjet printhead | |
JP2011011425A (ja) | 液体吐出ヘッド用ノズルプレートの製造方法 | |
JP2016117174A (ja) | シリコン基板の加工方法、及び液体吐出ヘッド | |
JP2007160927A (ja) | パリレンマスクを用いたシリコン湿式エッチング方法及びこの方法を用いたインクジェットプリントヘッドのノズルプレートの製造方法 | |
JPH09207341A (ja) | インクジェットヘッド用ノズルプレートおよびその製造方法 | |
US8808553B2 (en) | Process for producing a liquid ejection head | |
WO2008075715A1 (ja) | 液体吐出ヘッド用ノズルプレートの製造方法、液体吐出ヘッド用ノズルプレート及び液体吐出ヘッド | |
US7871531B2 (en) | Method of manufacturing liquid ejection head | |
JP2007136875A (ja) | インクジェット記録ヘッド用基体 | |
EP4316855A1 (en) | Nozzle plate production method, nozzle plate, and fluid discharge head | |
JP5959979B2 (ja) | 貫通口を有する基板、液体吐出ヘッド用基板及び液体吐出ヘッドの製造方法 | |
JP2005178019A (ja) | 微小溝を持つ構造体、その製造方法、及びこれを用いて形成されるインクジェット用記録ヘッド | |
EP2147791A1 (en) | Method of manufacturing a droplet jetting device and an ink jet device | |
KR100400229B1 (ko) | 버블젯 방식의 잉크젯 프린트 헤드 및 그 제조방법 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20120323 |
|
A521 | Written amendment |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20130321 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20130906 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20130917 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20130927 |
|
R150 | Certificate of patent or registration of utility model |
Free format text: JAPANESE INTERMEDIATE CODE: R150 |
|
LAPS | Cancellation because of no payment of annual fees |