JP2011521161A5 - - Google Patents

Download PDF

Info

Publication number
JP2011521161A5
JP2011521161A5 JP2011509914A JP2011509914A JP2011521161A5 JP 2011521161 A5 JP2011521161 A5 JP 2011521161A5 JP 2011509914 A JP2011509914 A JP 2011509914A JP 2011509914 A JP2011509914 A JP 2011509914A JP 2011521161 A5 JP2011521161 A5 JP 2011521161A5
Authority
JP
Japan
Prior art keywords
rotor
shaft
bearing element
vacuum pump
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011509914A
Other languages
English (en)
Other versions
JP5560263B2 (ja
JP2011521161A (ja
Filing date
Publication date
Priority claimed from DE102008024764A external-priority patent/DE102008024764A1/de
Application filed filed Critical
Publication of JP2011521161A publication Critical patent/JP2011521161A/ja
Publication of JP2011521161A5 publication Critical patent/JP2011521161A5/ja
Application granted granted Critical
Publication of JP5560263B2 publication Critical patent/JP5560263B2/ja
Expired - Fee Related legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Description

図２に示されている実施形態では、３つのロータ要素14,66,68が、軸12に設けられている。示された実施形態（図２）では、全てのロータ要素14,66,68が分子ポンプのロータ要素として示されているが、言うまでもなく、ロータ要素は異なるタイプであってもよい。更に、本実施形態でも、単一のロータ要素が複数の真空段を形成することが可能である。

Claims (2)

  1. 多段真空ポンプにおいて、
    複数のポンプ段(18,24,26)を構成すべくポンプハウジング(10)内の共通の軸(12)に配置された複数のロータ要素(14,16;14,66,68)、
    前記軸(12)を駆動するための駆動要素(40)、及び
    ２つのロータ要素(14,16;14,66) 間に配置された内側軸受要素(42)
    を備えていることを特徴とする多段真空ポンプ。
  2. 前記ロータ要素(16,66) は、前記内側軸受要素(42)と外側軸受要素(44)との間に配置されており、前記ロータ要素は、前記軸(12)に好ましくは密に接続されていることを特徴とする請求項１乃至６のいずれかに記載の多段真空ポンプ。
JP2011509914A 2008-05-23 2009-05-05 多段真空ポンプ Expired - Fee Related JP5560263B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE102008024764.2 2008-05-23
DE102008024764A DE102008024764A1 (de) 2008-05-23 2008-05-23 Mehrstufige Vakuumpumpe
PCT/EP2009/055397 WO2009141222A1 (de) 2008-05-23 2009-05-05 Mehrstufige vakuumpumpe

Publications (3)

Publication Number Publication Date
JP2011521161A JP2011521161A (ja) 2011-07-21
JP2011521161A5 true JP2011521161A5 (ja) 2012-06-07
JP5560263B2 JP5560263B2 (ja) 2014-07-23

Family

ID=40873510

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2011509914A Expired - Fee Related JP5560263B2 (ja) 2008-05-23 2009-05-05 多段真空ポンプ

Country Status (5)

Country Link
US (1) US20110135506A1 (ja)
EP (1) EP2288812A1 (ja)
JP (1) JP5560263B2 (ja)
DE (1) DE102008024764A1 (ja)
WO (1) WO2009141222A1 (ja)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE202009003880U1 (de) * 2009-03-19 2010-08-05 Oerlikon Leybold Vacuum Gmbh Multi-Inlet-Vakuumpumpe
DE102011105455A1 (de) * 2011-06-24 2013-01-10 Henkel Ag & Co. Kgaa Konversionsschichtfreie Bauteile von Vakuumpumpen
DE202012000611U1 (de) * 2012-01-21 2013-04-23 Oerlikon Leybold Vacuum Gmbh Turbomolekularpumpe
DE102013114290A1 (de) 2013-12-18 2015-06-18 Pfeiffer Vacuum Gmbh Vakuumpumpe
DE102014101257A1 (de) * 2014-02-03 2015-08-06 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3001039B1 (de) * 2015-09-11 2019-06-19 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP2021055613A (ja) * 2019-09-30 2021-04-08 ダイキン工業株式会社 ターボ圧縮機
US11519419B2 (en) 2020-04-15 2022-12-06 Kin-Chung Ray Chiu Non-sealed vacuum pump with supersonically rotatable bladeless gas impingement surface

Family Cites Families (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4579508A (en) * 1982-04-21 1986-04-01 Hitachi, Ltd. Turbomolecular pump
JPS6463698A (en) * 1987-09-02 1989-03-09 Hitachi Ltd Turbo vacuum pump
JPH02136595A (ja) * 1988-11-16 1990-05-25 Anelva Corp 真空ポンプ
FR2656658B1 (fr) * 1989-12-28 1993-01-29 Cit Alcatel Pompe a vide turbomoleculaire mixte, a deux arbres de rotation et a refoulement a la pression atmospherique.
US5618167A (en) * 1994-07-28 1997-04-08 Ebara Corporation Vacuum pump apparatus having peltier elements for cooling the motor & bearing housing and heating the outer housing
US5618187A (en) * 1994-11-17 1997-04-08 The Whitaker Corporation Board mount bus bar contact
GB9725146D0 (en) * 1997-11-27 1998-01-28 Boc Group Plc Improvements in vacuum pumps
DE19821634A1 (de) * 1998-05-14 1999-11-18 Leybold Vakuum Gmbh Reibungsvakuumpumpe mit Stator und Rotor
GB9921983D0 (en) * 1999-09-16 1999-11-17 Boc Group Plc Improvements in vacuum pumps
DE10003153A1 (de) * 2000-01-26 2001-08-02 Leybold Vakuum Gmbh Turboradialgebläse
JP2002138987A (ja) * 2000-10-31 2002-05-17 Seiko Instruments Inc 真空ポンプ
DE10211134C1 (de) * 2002-03-14 2003-08-14 Schwerionenforsch Gmbh Turbomolekularpumpe mit koaxial zentralem Durchgang
GB0229355D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
GB0229356D0 (en) * 2002-12-17 2003-01-22 Boc Group Plc Vacuum pumping arrangement
JP2005042709A (ja) * 2003-07-10 2005-02-17 Ebara Corp 真空ポンプ
FR2859250B1 (fr) * 2003-08-29 2005-11-11 Cit Alcatel Pompe a vide
JP2005240690A (ja) * 2004-02-26 2005-09-08 Kashiyama Kogyo Kk 真空ポンプ
EP1619395B1 (en) * 2004-07-20 2010-03-10 VARIAN S.p.A. Rotary vacuum pump, structure and method for the balancing thereof
DE202005019644U1 (de) * 2005-12-16 2007-04-26 Leybold Vacuum Gmbh Turbomolekularpumpe
DE102006020710A1 (de) * 2006-05-04 2007-11-08 Pfeiffer Vacuum Gmbh Vakuumpumpe mit Gehäuse
DE102006037187A1 (de) * 2006-08-09 2008-02-21 Pfeiffer Vacuum Gmbh Anordnung zur Lagerung einer Welle einer Vakuumpumpe

Similar Documents

Publication Publication Date Title
JP2011521161A5 (ja)
WO2012048684A3 (de) Pumpe mit integriertem elektronisch kommutierten gleichstrommotor
JP2009503358A5 (ja)
TW200644389A (en) Fan and rotor thereof
WO2013013778A3 (de) Innenläufermotor
ATE470075T1 (de) Tauchpumpenaggregat
WO2011106111A3 (en) Cooling system for a multistage electric motor
GB201201555D0 (en) Pump
JP2010285956A5 (ja)
EP2626562A3 (en) Pump
ATE473373T1 (de) Verdichtereinheit
WO2010012993A3 (en) Pump
MY162264A (en) Improvements in multi-stage centrifugal compressors
WO2011145844A3 (ko) 방수구조를 갖는 유체 펌프
WO2010074967A3 (en) Centripetal pumping stage and vacuum pump incorporating such pumping stage
EP2450576A3 (en) Fan
WO2011017783A3 (en) High-pressure multistage centrifugal compressor
WO2013107805A3 (de) Nassläuferpumpe mit leistungselektronik
WO2013030108A3 (de) Drehfeldmaschine mit aussenläufer
WO2009028099A1 (ja) ターボ分子ポンプ
EP2039940A3 (en) Radially staged microscale turbomolecular pump
FR2978214B1 (fr) Pompe a vide multi-etagee de type seche
EP2400156A3 (en) Multi-stage centrifugal fan
WO2012038213A3 (de) Pumpe mit elektromotor
WO2009145547A2 (ko) 차량용 진공 펌프