JP2011503906A - 選択的エッチング方法および装置 - Google Patents
選択的エッチング方法および装置 Download PDFInfo
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- JP2011503906A JP2011503906A JP2010534523A JP2010534523A JP2011503906A JP 2011503906 A JP2011503906 A JP 2011503906A JP 2010534523 A JP2010534523 A JP 2010534523A JP 2010534523 A JP2010534523 A JP 2010534523A JP 2011503906 A JP2011503906 A JP 2011503906A
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- 238000005530 etching Methods 0.000 title claims abstract description 56
- 238000000034 method Methods 0.000 title claims abstract description 26
- 239000013626 chemical specie Substances 0.000 claims abstract description 39
- 239000000463 material Substances 0.000 claims abstract description 38
- 239000000126 substance Substances 0.000 claims description 21
- 150000001875 compounds Chemical class 0.000 claims description 13
- 238000002604 ultrasonography Methods 0.000 claims description 5
- 239000002244 precipitate Substances 0.000 claims description 4
- 230000003746 surface roughness Effects 0.000 claims description 3
- 239000010410 layer Substances 0.000 description 39
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 19
- 239000010949 copper Substances 0.000 description 19
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 15
- HEMHJVSKTPXQMS-UHFFFAOYSA-M Sodium hydroxide Chemical compound [OH-].[Na+] HEMHJVSKTPXQMS-UHFFFAOYSA-M 0.000 description 15
- 229910052802 copper Inorganic materials 0.000 description 15
- 235000012431 wafers Nutrition 0.000 description 14
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 13
- 229910052710 silicon Inorganic materials 0.000 description 13
- 239000010703 silicon Substances 0.000 description 13
- 239000000460 chlorine Substances 0.000 description 11
- 229910052814 silicon oxide Inorganic materials 0.000 description 11
- 239000000758 substrate Substances 0.000 description 7
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 6
- 229910004298 SiO 2 Inorganic materials 0.000 description 6
- 239000000203 mixture Substances 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 239000007787 solid Substances 0.000 description 4
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 3
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 3
- 229920000642 polymer Polymers 0.000 description 3
- 239000011734 sodium Substances 0.000 description 3
- 238000012360 testing method Methods 0.000 description 3
- 229910021591 Copper(I) chloride Inorganic materials 0.000 description 2
- KRHYYFGTRYWZRS-UHFFFAOYSA-N Fluorane Chemical compound F KRHYYFGTRYWZRS-UHFFFAOYSA-N 0.000 description 2
- 229910004283 SiO 4 Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 229910052759 nickel Inorganic materials 0.000 description 2
- 230000001590 oxidative effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- PXGOKWXKJXAPGV-UHFFFAOYSA-N Fluorine Chemical compound FF PXGOKWXKJXAPGV-UHFFFAOYSA-N 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 229910000577 Silicon-germanium Inorganic materials 0.000 description 1
- NRTOMJZYCJJWKI-UHFFFAOYSA-N Titanium nitride Chemical compound [Ti]#N NRTOMJZYCJJWKI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 229910052801 chlorine Inorganic materials 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 238000005238 degreasing Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
- 239000011737 fluorine Substances 0.000 description 1
- 229910052731 fluorine Inorganic materials 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 238000011084 recovery Methods 0.000 description 1
- 239000000523 sample Substances 0.000 description 1
- LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3205—Deposition of non-insulating-, e.g. conductive- or resistive-, layers on insulating layers; After-treatment of these layers
- H01L21/321—After treatment
- H01L21/3213—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer
- H01L21/32133—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only
- H01L21/32134—Physical or chemical etching of the layers, e.g. to produce a patterned layer from a pre-deposited extensive layer by chemical means only by liquid etching only
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/08—Apparatus, e.g. for photomechanical printing surfaces
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23F—NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL; MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLIC MATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASS C23 AND AT LEAST ONE PROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
- C23F1/00—Etching metallic material by chemical means
- C23F1/10—Etching compositions
- C23F1/14—Aqueous compositions
- C23F1/16—Acidic compositions
- C23F1/18—Acidic compositions for etching copper or alloys thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/31—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to form insulating layers thereon, e.g. for masking or by using photolithographic techniques; After treatment of these layers; Selection of materials for these layers
- H01L21/3105—After-treatment
- H01L21/311—Etching the insulating layers by chemical or physical means
- H01L21/31105—Etching inorganic layers
- H01L21/31111—Etching inorganic layers by chemical means
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- Chemical Kinetics & Catalysis (AREA)
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- Computer Hardware Design (AREA)
- Materials Engineering (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Physics & Mathematics (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Inorganic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Weting (AREA)
Abstract
【選択図】図1
Description
−第1物質と反応可能であり、かつ第2物質と反応しない、1以上の化学種を選択する工程;
−前記物質と反応しないが、前述の化学種を放出可能である1以上の可溶性化合物を選択する工程;
−前記化合物を含有する溶液を生成する工程;
−構造物を溶液中に浸漬する工程; および
−可溶性化合物または沈殿物を生成しながら、化学種が生成され、第1物質と選択的に反応するように、キャビテーション気泡を生成可能な1以上の周波数で超音波を溶液中に発生させる工程。
このため、実施例1または実施例2の条件を、例えば、其々採用するが、超音波発生器の動作の継続時間を、例えば、数秒に制限し、それにより粗い領域または隆起を構成する物質だけを少なくとも部分的にエッチングする。
−リットル当たり1モルに希釈したシリカ+固体銅+HClの初期混合物は変化しない(安定を維持する)。Cl°ラジカルが溶液中に存在することを計算に加えると、固体銅はCu(OH)2およびCu2+ に完全に変化するが、シリカは変化しない;
−シリコン+シリカおよびリットル当たり1モルの水酸化ナトリウムの初期混合物は熱力学的に安定な混合物(変化しない)である。化学種OH°またはNa°が溶液中に形成されることを計算に加えると、熱力学的ソフトウエアは、シリカが固体化合物H4SiO4に変化するのに対して、シリコンは安定を維持することを示す。
Claims (9)
- 以下の工程を含む、エッチングする1以上の第1物質(4)と1以上の第2物質(2)とを含む構造物(1)を選択的にエッチングする方法:
−前記第1物質(4)と反応可能であり、かつ前記第2物質(3)と反応しない、1以上の化学種を選択する工程;
−前記物質と反応しないが、前述の化学種を放出可能である1以上の可溶性化合物を選択する工程;
−前記化合物を含有する溶液(11)を製造する工程;
−前記構造物(1)を前記溶液中に浸漬する工程;および
−可溶性化合物または沈殿物を生成しながら、前記化学種が生成され、前記第1物質と選択的に反応するように、キャビテーション気泡を生成可能な1以上の周波数で超音波を前記溶液中に発生させる工程。 - 前記超音波周波数が100kHz〜3MHzの間である請求項1に記載の方法。
- 前記超音波周波数が200kHz〜600kHzの間である請求項1に記載の方法。
- 前記溶液の濃度が、リットル当たり5モル未満である請求項1に記載の方法。
- 前記第1物質が完全に除去されるように、超音波を発生させる期間を決定する請求項1に記載の方法。
- 前記第1物質が、該第1物質の被覆されていない表面から除去されるように、超音波を発生させる期間を決定する請求項1に記載の方法。
- 前記第1物質の表面の粗さを低減させるように、超音波を発生させる期間を決定する請求項1に記載の方法。
- 前記第1物質の厚みを低減するように、超音波を発生させる期間を決定する請求項1に記載の方法。
- 第2物質に対して第1物質を選択的にエッチングする装置であって、前記物質に反応しないが、前記第2物質(2)をエッチングすることなく前記第1物質(4)をエッチングするための1以上の化学種を生成可能な溶液の浴槽(11)と、前記浴槽中に、100kHz〜3MHzの周波数で、超音波を発生するためのシステム(12)とを備える装置。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0759179A FR2923947B1 (fr) | 2007-11-20 | 2007-11-20 | Procede et dispositif de gravure selective. |
FR0759179 | 2007-11-20 | ||
PCT/FR2008/052069 WO2009071788A2 (fr) | 2007-11-20 | 2008-11-17 | Procede et dispositif de gravure selective |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2011503906A true JP2011503906A (ja) | 2011-01-27 |
JP5215407B2 JP5215407B2 (ja) | 2013-06-19 |
Family
ID=39472013
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2010534523A Expired - Fee Related JP5215407B2 (ja) | 2007-11-20 | 2008-11-17 | 選択的エッチング方法および装置 |
Country Status (5)
Country | Link |
---|---|
US (1) | US8440092B2 (ja) |
EP (1) | EP2212907B1 (ja) |
JP (1) | JP5215407B2 (ja) |
FR (1) | FR2923947B1 (ja) |
WO (1) | WO2009071788A2 (ja) |
Families Citing this family (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2945663B1 (fr) * | 2009-05-18 | 2012-02-17 | Inst Polytechnique Grenoble | Procede de gravure d'un materiau en presence de particules solides. |
FR2945662B1 (fr) | 2009-05-18 | 2012-02-17 | Inst Polytechnique Grenoble | Procede de gravure d'un materiau en presence d'un gaz. |
US9562291B2 (en) * | 2014-01-14 | 2017-02-07 | Mei, Llc | Metal etch system |
CN107833827B (zh) * | 2017-10-25 | 2020-07-31 | 武汉华星光电技术有限公司 | 一种阵列基板的刻蚀方法 |
CN111519188A (zh) * | 2020-05-07 | 2020-08-11 | 宁波福至新材料有限公司 | 一种用于不锈钢的震荡蚀刻方法 |
CN112266178B (zh) * | 2020-11-09 | 2022-07-22 | 泰极微技术(苏州)有限公司 | 一种玻璃蚀刻方法 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52114275A (en) * | 1976-03-22 | 1977-09-24 | Sony Corp | Etching method of semi-insulating film |
JPS59231818A (ja) * | 1983-06-14 | 1984-12-26 | Puretetsuku:Kk | エツチング処理装置 |
JPS6066825A (ja) * | 1983-09-22 | 1985-04-17 | Toshiba Corp | 半導体装置の製造方法 |
JPH10154690A (ja) * | 1996-11-15 | 1998-06-09 | Memc Electron Materials Inc | メガソニック場の存在下において稀薄化学エッチング剤を用いるSiO2エッチング速度の制御 |
US20040061199A1 (en) * | 2002-09-30 | 2004-04-01 | Brask Justin K. | Etching metal using sonication |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6770568B2 (en) * | 2002-09-12 | 2004-08-03 | Intel Corporation | Selective etching using sonication |
-
2007
- 2007-11-20 FR FR0759179A patent/FR2923947B1/fr not_active Expired - Fee Related
-
2008
- 2008-11-17 JP JP2010534523A patent/JP5215407B2/ja not_active Expired - Fee Related
- 2008-11-17 WO PCT/FR2008/052069 patent/WO2009071788A2/fr active Application Filing
- 2008-11-17 US US12/743,451 patent/US8440092B2/en not_active Expired - Fee Related
- 2008-11-17 EP EP08858110.3A patent/EP2212907B1/fr not_active Not-in-force
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS52114275A (en) * | 1976-03-22 | 1977-09-24 | Sony Corp | Etching method of semi-insulating film |
JPS59231818A (ja) * | 1983-06-14 | 1984-12-26 | Puretetsuku:Kk | エツチング処理装置 |
JPS6066825A (ja) * | 1983-09-22 | 1985-04-17 | Toshiba Corp | 半導体装置の製造方法 |
JPH10154690A (ja) * | 1996-11-15 | 1998-06-09 | Memc Electron Materials Inc | メガソニック場の存在下において稀薄化学エッチング剤を用いるSiO2エッチング速度の制御 |
US20040061199A1 (en) * | 2002-09-30 | 2004-04-01 | Brask Justin K. | Etching metal using sonication |
Also Published As
Publication number | Publication date |
---|---|
WO2009071788A3 (fr) | 2009-07-23 |
EP2212907B1 (fr) | 2014-06-18 |
FR2923947B1 (fr) | 2010-06-11 |
EP2212907A2 (fr) | 2010-08-04 |
JP5215407B2 (ja) | 2013-06-19 |
US8440092B2 (en) | 2013-05-14 |
FR2923947A1 (fr) | 2009-05-22 |
US20110017707A1 (en) | 2011-01-27 |
WO2009071788A2 (fr) | 2009-06-11 |
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