JP2011251375A - Machining device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a machining device prevented in being damaged or stopped in operation due to the breakage of piping or wiring housed in a bending housing.SOLUTION: The machining device includes the piping and/or the wiring connected with a movable part, and the bending housing for housing the piping and/or wiring inside thereof so as to be bendable. At least an inner circumference surface of the bending housing is coated with fluororesin.

Description

  The present invention relates to a processing apparatus including a bendable container that accommodates piping and wiring connected to a movable part.

  Many processing devices such as industrial machines and manufacturing devices use various fluids such as water and air, and the power and signals necessary for the operation of the movable parts constituting these fluids and processing devices are such as lead wires. Supplied to the movable part through wiring, tubes and piping. For example, a cutting apparatus for cutting a semiconductor wafer in a semiconductor device manufacturing process also uses various fluids.

  When performing cutting with a cutting device, a cutting blade in which abrasive grains such as diamond and CBN (Cubic Boron Nitride) are hardened with resin or metal is mounted on the tip of a spindle supported by an air bearing. On the other hand, a workpiece such as a semiconductor wafer is sucked and held by a chuck table of a cutting device.

  Then, the cutting is performed by rotating the cutting blade attached to the tip of the spindle at a high speed such as 30000 rpm and relatively moving the chuck table holding the workpiece and the cutting blade.

  The spindle supported by the air bearing has an air pipe for supplying air, a cooling water pipe for flowing cooling water to suppress heat generation, a cable for transmitting power and signals supplied to the motor for rotating the spindle, Wires such as lead wires are connected.

  On the other hand, vacuum piping for transmitting negative pressure that sucks workpieces to the chuck table, cleaning water piping for jetting cleaning water to prevent clogging of the chuck table due to foreign matter suction, movement by motor Wiring such as cables and lead wires for transmitting power and signals for rotation and signals is connected.

  In order to bundle and accommodate these wirings and pipes so as to be able to bend along with the operation of the movable part, for example, a bending type called “cable bear” in the registered trademark as described in JP-A-2002-176274 A container is used.

JP 2002-176274 A Japanese Patent Laid-Open No. 2006-246639

  However, in accordance with the operation of the movable part, the bendable container and the wiring and piping accommodated in the container may rub and generate dust, or the wiring and piping may be damaged. If a pipe through which air or water flows is broken, fluid such as air or water overflows in the processing apparatus, which may damage the processing apparatus itself. In addition, there is a problem that when the wiring is broken and disconnected, the movable part is not operated.

  The present invention has been made in view of the above points, and the object of the present invention is to be able to prevent damage to the processing apparatus and stoppage of operation due to breakage of piping or wiring accommodated in the bending type container. Is to provide a device.

  According to the present invention, there is provided a processing apparatus including a pipe and / or wiring connected to a movable part, and a bendable container that accommodates the pipe and / or wiring in a bendable manner. A processing apparatus is provided in which at least an inner peripheral surface of the tool is coated with a fluororesin.

  In the processing apparatus of the present invention, since at least the inner peripheral surface of the bending type container that accommodates the wiring and the piping is covered with the fluororesin, the wiring and the pipe are prevented from being rubbed and damaged.

It is a perspective view of a cutting device. It is sectional drawing of the bending type container currently used for the cutting device.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. Referring to FIG. 1, there is shown a perspective view of a cutting device (dicing device) 2 in which a bending container of the present invention that accommodates piping and wiring is used.

  The cutting device 2 is a two-spindle type cutting device that sucks and holds a workpiece on the chuck table 4, and the chuck table 4 reciprocates in the cutting feed direction (X-axis direction) while indexing feed direction (Y-axis direction). And the work of the first cutting means 6 and the second cutting means 8 moving in the cutting feed direction (Z-axis direction).

  For example, when dicing the semiconductor wafer W, the semiconductor wafer W held on the annular frame F via the dicing tape T is placed on the chuck table 4 and sucked and held as shown in FIG.

  The chuck table 4 is movable in the X-axis direction by the cutting feed means 10, and a first alignment means 12 having a first camera (first imaging means) 13 formed integrally with the first cutting means 6. The wafer W sucked and held by the chuck table 4 by the second alignment means 14 having the second camera (second imaging means) 15 formed integrally with the second cutting means 8 is a region to be cut. After the street is detected and the street and the cutting blade are aligned in the Y-axis direction, cutting is performed.

  The cutting feed means 10 includes a pair of X-axis guide rails 16 disposed in the X-axis direction, an X-axis movement base 18 slidably supported by the X-axis guide rails 16, and an X-axis movement base 18. An X-axis ball screw 20 that is screwed into a nut portion (not shown) formed on the X-axis, and an X-axis pulse motor 22 that rotationally drives the X-axis ball screw 20.

  The support base 24 that rotatably supports the chuck table 4 is fixed to the X-axis moving base 18, and is driven by the X-axis pulse motor 22 to rotate the X-axis ball screw 20. It is moved in the X-axis direction.

  Reference numeral 21 denotes a bent container called “cable bear”, which is a registered trademark according to the embodiment of the present invention, in which wiring, piping, and the like are housed. One end 21 a of the bending container 21 is fixed to the base 3 of the cutting device 2, and the other end 21 b is fixed to the X-axis moving base 18.

  When the X-axis pulse motor 22 of the cutting feed means 10 is driven, the chuck table 4 is guided by the X-axis guide rail 16 and moved in the X-axis direction. With this movement, the other end 21b of the bending container 21 is also moved to the X-axis. It moves with the moving base 18 to prevent the wiring, piping, etc. housed inside from interfering with the outside.

  On the other hand, the first cutting means 12 and the second cutting means 14 are supported by the guide means 26 so as to be indexable in the Y-axis direction. The guide means 26 includes a vertical column 28 disposed in the Y-axis direction orthogonal to the X-axis so as not to prevent movement of the chuck table 4 and a pair of Y disposed in the Y-axis direction on the side surface of the vertical column 28. A shaft guide rail 30, a first ball screw 32 and a second ball screw 34 arranged in parallel with the Y axis guide rail 30, and a first Y axis pulse motor connected to the first ball screw 32. 36 and a second Y-axis pulse motor 38 connected to the second ball screw 34.

  The Y-axis guide rail 30 supports the first support member 40 and the second support member 42 so as to be slidable in the Y-axis direction, and is provided in the first support member 40 and the second support member 42. Nuts (not shown) are screwed into the first ball screw 32 and the second ball screw 34, respectively.

  Driven by the first Y-axis pulse motor 36 and the second Y-axis pulse motor 38 and the first ball screw 32 and the second ball screw 34 rotate, respectively, the first support member 40 and the second The support members 42 are independently moved in the Y-axis direction.

  The positions of the first support member 40 and the second support member 42 in the Y-axis direction are measured by the linear scale 44 and used for precise control of the Y-axis direction positions. Although it is possible to provide a linear scale separately for each support member, it is better to measure the positions of both the first support member 40 and the second support member 42 with a single linear scale 44. It is possible to precisely control the distance between.

  A first moving member 46 to which the first cutting means 6 is attached is attached to the first support member 40 so as to be slidable in the vertical direction (Z-axis direction). The first Z-axis pulse motor When 48 is driven, the first moving member 46 is moved in the Z-axis direction.

  Similarly, a second moving member 50 to which the second cutting means 8 is attached is attached to the second support member 42 so as to be slidable in the vertical direction (Z-axis direction). By driving the shaft pulse motor 52, the second moving member 50 is moved in the Z-axis direction.

  Referring to FIG. 2, a cross-sectional view of the bendable container 21 is shown. As disclosed in Patent Document 1, the bending container 21 is assembled by inserting a pin formed in a unit unit 23 made of resin into a pin hole of an adjacent unit unit 23. Therefore, the bendable container 21 is bent at the pin portion as the X-axis moving base 18 moves, and the other end 21 b moves in the X-axis direction together with the X-axis moving base 18.

  The inner peripheral surface of the bendable container 21 is covered with a tetrafluoroethylene resin, that is, a fluorine resin 29 such as a trade name “Teflon”. The thickness of the fluororesin is preferably 0.5 mm or more. In this embodiment, 1 mm of tetrafluoroethylene resin is coated.

  As a covering method, a sheet-type fluororesin is stuck on the inner peripheral surface of the bendable container 21, or the fluororesin is coated on the inner peripheral surface of the bendable container 21. As an alternative, the fluororesin may be coated on the inner peripheral surface and the outer peripheral surface by immersing the bendable container 21 in the liquid fluororesin. A plurality of pipes 25 and a plurality of wires 27 are housed in the bending container 21.

  In the cutting device 2 using the bendable container 21 of the present embodiment, since at least the inner peripheral surface of the bendable container 21 is covered with the fluororesin 29, the fluororesin 29 covered with the pipe 25 and the wiring 27 is used. Even if the bendable container 21 is moved, the pipe 25 and the wiring 27 housed inside are prevented from being rubbed and damaged by the bendable container 21 even if the bendable container 21 moves.

2 Cutting device 4 Chuck table 6 1st cutting means 8 2nd cutting means 18 X-axis movement base 21 Bending type container 23 Unit unit 25 Piping 27 Wiring 29 Fluororesin coating

Claims (1)

A processing apparatus comprising a pipe and / or wiring connected to a movable part, and a bendable container that houses the pipe and / or wiring in a bendable manner,
A processing apparatus, wherein at least an inner peripheral surface of the bending container is coated with a fluororesin.

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