JP2011233332A - Method for manufacturing organic electroluminescent lighting device - Google Patents

Method for manufacturing organic electroluminescent lighting device Download PDF

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JP2011233332A
JP2011233332A JP2010101975A JP2010101975A JP2011233332A JP 2011233332 A JP2011233332 A JP 2011233332A JP 2010101975 A JP2010101975 A JP 2010101975A JP 2010101975 A JP2010101975 A JP 2010101975A JP 2011233332 A JP2011233332 A JP 2011233332A
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conductive film
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JP5403689B2 (en
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Yoshito Sakaguchi
嘉一 坂口
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Hotalux Ltd
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NEC Lighting Ltd
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Abstract

PROBLEM TO BE SOLVED: To provide a method for manufacturing an organic electroluminescent lighting device in which dielectric breakdown of an organic light-emitting film due to static electricity is not easily generated.SOLUTION: The method includes: a first film formation process for forming a plurality of transparent electrodes films 2 which are mutually separately arranged and a conductive film 3 joined with the plurality of transparent electrode films 2 on the surface of one transparent substrate 1. In the first film forming process, the plurality of transparent electrode films 2 are respectively formed as an anode film 2a and a cathode terminal film 2b arranged separately from the anode film 2a, and the conductive film 3 is formed on the outermost peripheral parts of the arrangement areas of the plurality of transparent electrode films 2 and in between the plurality of transparent electrodes 2 to electrically connect the anode film 2a and the cathode terminal film 2b through the conductive film 3. The method also includes a second film formation process for forming an organic light-emitting film 4 on the surface of the anode film 2a; a third film formation process for forming a cathode film 5 continued from the surface of the organic light-emitting film 4 to the surface of the anode terminal film 2b; and a division process for dividing the transparent substrate 1 along each conductive film 3 after the third film formation process.

Description

本発明は、1枚の透明基板で複数の照明パネルを作製する有機エレクトロルミネッセンス照明装置の製造方法に関する。   The present invention relates to a method for manufacturing an organic electroluminescence lighting device in which a plurality of lighting panels are manufactured using a single transparent substrate.

有機エレクトロルミネッセンス照明装置は、一般的に、有機発光膜を透明な平板状の陽極膜と平板状の陰極膜とで挟んでガラス基板などの透明基板に搭載した照明パネルを備えている。この照明パネルの生産性を向上させる方法として、1枚の透明基板から複数の照明パネルを作製する、いわゆる多面取りが知られ、例えば特許文献1に開示されている。   An organic electroluminescence illumination device generally includes an illumination panel in which an organic light-emitting film is sandwiched between a transparent flat anode film and a flat cathode film and mounted on a transparent substrate such as a glass substrate. As a method for improving the productivity of the lighting panel, so-called multi-planar manufacturing, in which a plurality of lighting panels are manufactured from a single transparent substrate, is disclosed in, for example, Patent Document 1.

特許文献1に開示された製造方法では、接着剤が塗布された封止基板に導電性の非接着層パターンが設けられている。そして、この非接着層パターンが、透明基板において互いに隣接する2つの陰極の各々の一部と接触するように封止基板を透明基板に貼り付けている。これにより、封止の際に各陰極の全部が接着剤で覆われなくなるので、陰極の通電が妨げられることなく封止基板を透明基板に確実に貼り付けることが可能となる。   In the manufacturing method disclosed in Patent Document 1, a conductive non-adhesive layer pattern is provided on a sealing substrate to which an adhesive is applied. The sealing substrate is attached to the transparent substrate so that the non-adhesive layer pattern is in contact with a part of each of the two cathodes adjacent to each other on the transparent substrate. As a result, all the cathodes are not covered with the adhesive at the time of sealing, so that the sealing substrate can be securely attached to the transparent substrate without obstructing the energization of the cathodes.

特開2008−130312号公報JP 2008-130212 A

有機エレクトロルミネッセンス照明装置の照明パネルは、上述したように、有機発光膜を平板状の陽極膜と平板状の陰極膜とで挟んだ構造となっているので、発光ダイオードであると同時にコンデンサでもある。そのため、製造工程中に発生した静電気により有機発光膜が絶縁破壊する可能性がある。照明パネルを多面取りで作製する場合には、一度に多くの照明パネルを製造するので歩留まりの低下が懸念される。これに対し、特許文献1に開示された製造方法では、非接着層パターンを介して極性が同じ電極膜(陰極)しか電気的に接続されないので有機発光膜の絶縁破壊に対処できない。   As described above, the lighting panel of the organic electroluminescence lighting device has a structure in which an organic light emitting film is sandwiched between a flat plate anode film and a flat plate cathode film, so that it is not only a light emitting diode but also a capacitor. . For this reason, there is a possibility that the organic light-emitting film breaks down due to static electricity generated during the manufacturing process. In the case where the lighting panel is manufactured by multi-chamfering, many lighting panels are manufactured at one time, so there is a concern that the yield may be reduced. On the other hand, in the manufacturing method disclosed in Patent Document 1, since only the electrode film (cathode) having the same polarity is electrically connected through the non-adhesive layer pattern, it is not possible to cope with the dielectric breakdown of the organic light emitting film.

そこで、本発明は、静電気による有機発光膜の絶縁破壊が生じにくい有機エレクトロルミネッセンス照明装置の製造方法を提供することを目的とする。   Accordingly, an object of the present invention is to provide a method for manufacturing an organic electroluminescence lighting device in which dielectric breakdown of an organic light emitting film is hardly caused by static electricity.

上記目的を達成するため本発明による有機エレクトロルミネッセンス照明装置の製造方法は、1枚の透明基板の表面に、互いに離れて配置される複数の透明電極膜と、前記複数の透明電極膜に接合される導電膜と、を成膜する第1の成膜工程であって、前記複数の透明電極膜の各々を、陽極膜と、該陽極膜から離れて配置される陰極端子膜として成膜し、前記複数の透明電極膜の配置領域の最外周部、および前記複数の透明電極膜の間に前記導電膜を成膜して前記陽極膜と前記陰極端子膜とを前記導電膜を介して電気的に接続する第1の成膜工程と、前記陽極膜の表面に有機発光膜を成膜する第2の成膜工程と、前記有機発光膜の表面から前記陰極端子膜の表面まで連続する陰極膜を成膜する第3の成膜工程と、前記第3の成膜工程の後、前記1枚の透明基板を、前記導電膜に沿って分断する分断工程と、を有する。   In order to achieve the above object, a method of manufacturing an organic electroluminescence lighting device according to the present invention is formed by bonding a plurality of transparent electrode films disposed on a surface of a single transparent substrate to each other, and the plurality of transparent electrode films. Each of the plurality of transparent electrode films is formed as an anode film and a cathode terminal film disposed away from the anode film, The conductive film is formed between the outermost peripheral portion of the arrangement region of the plurality of transparent electrode films and the plurality of transparent electrode films, and the anode film and the cathode terminal film are electrically connected through the conductive film. A first film-forming step connected to the surface, a second film-forming step of forming an organic light-emitting film on the surface of the anode film, and a cathode film continuous from the surface of the organic light-emitting film to the surface of the cathode terminal film A third film forming step for forming a film, and after the third film forming step, before The one transparent substrate, having a dividing step for cutting along the conductive layer.

本発明によれば、第1の成膜工程で陽極膜と陰極端子膜とが導電膜を介して電気的に接続される。また、第3の成膜工程において陰極膜が陰極端子膜に電気的に接続される。これにより、陽極膜と陰極膜とが電気的に接続された状態(短絡状態)となる。そのため、第3の成膜工程以降の工程で静電気が発生しても有機発光膜に電荷が蓄積しにくくなる。よって、有機発光膜の絶縁破壊が生じにくくなる。   According to the present invention, the anode film and the cathode terminal film are electrically connected via the conductive film in the first film forming step. In the third film forming step, the cathode film is electrically connected to the cathode terminal film. As a result, the anode film and the cathode film are electrically connected (short circuit state). Therefore, even if static electricity is generated in the processes after the third film forming process, it is difficult for charges to accumulate in the organic light emitting film. Therefore, the dielectric breakdown of the organic light emitting film is difficult to occur.

本実施形態の有機エレクトロルミネッセンス照明装置の製造工程を示すフローチャートである。It is a flowchart which shows the manufacturing process of the organic electroluminescent illuminating device of this embodiment. 第1の成膜工程を説明するための平面図である。It is a top view for demonstrating a 1st film-forming process. 図2に記載の切断線A−Aに沿った断面図である。FIG. 3 is a cross-sectional view taken along a cutting line AA shown in FIG. 2. 図2に記載の切断線B−Bに沿った断面図である。FIG. 3 is a cross-sectional view taken along a cutting line BB described in FIG. 2. 第3の成膜工程を説明するための平面図である。It is a top view for demonstrating a 3rd film-forming process. 図5に記載の切断線C−Cに沿った断面図である。FIG. 6 is a cross-sectional view taken along a cutting line CC shown in FIG. 5. 図5に記載の切断線D−Dに沿った断面図である。FIG. 6 is a cross-sectional view taken along a cutting line DD shown in FIG. 5. 検査工程における導電膜の分断箇所のパターンを示す平面図である。It is a top view which shows the pattern of the division location of the electrically conductive film in a test | inspection process. 検査工程における導電膜の分断箇所のパターンを示す平面図である。It is a top view which shows the pattern of the division location of the electrically conductive film in a test | inspection process. 検査工程における導電膜の分断箇所のパターンを示す平面図である。It is a top view which shows the pattern of the division location of the electrically conductive film in a test | inspection process. 検査工程における導電膜の分断箇所のパターンを示す平面図である。It is a top view which shows the pattern of the division location of the electrically conductive film in a test | inspection process. 検査工程における導電膜の分断箇所のパターンを示す平面図である。It is a top view which shows the pattern of the division location of the electrically conductive film in a test | inspection process. 検査工程における導電膜の分断箇所のパターンを示す平面図である。It is a top view which shows the pattern of the division location of the electrically conductive film in a test | inspection process. 導電膜の配置パターンの他の実施形態を示す平面図である。It is a top view which shows other embodiment of the arrangement pattern of an electrically conductive film.

本発明の有機エレクトロルミネッセンス照明装置の製造方法の一実施形態について説明する。図1は、本実施形態の有機エレクトロルミネッセンス照明装置の製造工程を示すフローチャートである。以下、図1のフローチャートに従って各工程を説明する。   An embodiment of a method for producing an organic electroluminescence lighting device of the present invention will be described. FIG. 1 is a flowchart showing a manufacturing process of the organic electroluminescence lighting device of the present embodiment. Hereafter, each process is demonstrated according to the flowchart of FIG.

まず、第1の成膜工程(ステップS1)について説明する。図2は、第1の成膜工程を説明するための平面図である。また、図3は図2に記載の切断線A−Aに沿った断面図であり、図4は図2に記載の切断線B−Bに沿った断面図である。   First, the first film forming step (step S1) will be described. FIG. 2 is a plan view for explaining the first film forming step. 3 is a cross-sectional view taken along a cutting line AA shown in FIG. 2, and FIG. 4 is a cross-sectional view taken along a cutting line BB shown in FIG.

図2〜図4に示すように、第1の成膜工程は、1枚の透明基板1の表面に、行列状に互いに離れて配列された複数の透明電極膜2と、複数の透明電極膜2に接合される導電膜3と、を成膜する工程である。透明基板1は、ガラス基板やプラスチック基板などである。   As shown in FIGS. 2 to 4, the first film forming step includes a plurality of transparent electrode films 2 arranged in a matrix and spaced apart from each other on the surface of one transparent substrate 1, and a plurality of transparent electrode films. 2 is a step of forming a conductive film 3 to be bonded to the film 2. The transparent substrate 1 is a glass substrate or a plastic substrate.

透明電極膜2は、陽極膜2aと、陽極膜2aから離れて配置された1対の陰極端子膜2bとで構成され、これらの材料は酸化インジウムスズ(ITO)などである。1対の陰極端子膜2bは、陽極膜2aを挟んで互いに対向している。また、1対の陰極端子膜2bの配列方向は行方向に揃えられている。なお、この配列方向は列方向に揃えられていてもよい。   The transparent electrode film 2 is composed of an anode film 2a and a pair of cathode terminal films 2b arranged away from the anode film 2a, and these materials are indium tin oxide (ITO) or the like. The pair of cathode terminal films 2b are opposed to each other with the anode film 2a interposed therebetween. The arrangement direction of the pair of cathode terminal films 2b is aligned in the row direction. The arrangement direction may be aligned with the column direction.

アルミニウム(Al)やクロム(Cr)などを材料とする導電膜3は、相互に接続される第1の導電膜3aと、第2の導電膜3bと、第3の導電膜3cとで構成されている。なお、導電膜3は、透明電極膜2と同じ材料であってもよい。   The conductive film 3 made of aluminum (Al), chromium (Cr), or the like is composed of a first conductive film 3a, a second conductive film 3b, and a third conductive film 3c that are connected to each other. ing. The conductive film 3 may be the same material as the transparent electrode film 2.

第1の導電膜3aは、複数の透明電極膜2の配置領域の最外周部に配置されている。第2の導電膜3bは、複数の透明電極膜2の行間に配置されている。第3の導電膜3cは、複数の透明電極膜2の列間に配置されている。これにより、全ての陽極膜2aと全ての陰極端子膜2bとが、第1の導電膜3a、第2の導電膜3b、および第3の導電膜3cを介して電気的に接続される。   The first conductive film 3 a is disposed on the outermost peripheral portion of the region where the plurality of transparent electrode films 2 are disposed. The second conductive film 3 b is disposed between the rows of the plurality of transparent electrode films 2. The third conductive film 3 c is disposed between the rows of the plurality of transparent electrode films 2. Thereby, all the anode films 2a and all the cathode terminal films 2b are electrically connected via the first conductive film 3a, the second conductive film 3b, and the third conductive film 3c.

次に、第2の成膜工程(ステップS2)について説明する。第2の成膜工程は、陽極膜2aの表面に有機発光膜4を成膜する工程である。有機発光膜4の材料については特に制限されるものでなく従来と同様でよい。   Next, the second film forming step (step S2) will be described. The second film forming step is a step of forming the organic light emitting film 4 on the surface of the anode film 2a. The material of the organic light emitting film 4 is not particularly limited, and may be the same as the conventional one.

次に、第3の成膜工程(ステップS3)について説明する。図5は、第3の成膜工程を説明するための平面図である。また、図6は、図5に記載の切断線C−Cに沿った断面図である。また、図7は、図5に記載の切断線D−Dに沿った断面図である。第3の成膜工程は、図5〜図7に示すように、有機発光膜4の表面から陰極端子膜2bの表面まで連続する陰極膜5を成膜する工程である。これにより、陰極膜5は、陰極端子膜2bと電気的に接続される。陰極端子膜2bと陽極膜2aとは導電膜3を介して電気的に接続されているので、陰極膜5と陽極膜2aとは電気的に接続された状態(短絡状態)となっている。そのため、第3の成膜工程以降の工程で静電気が発生しても、この状態が解除されるまでは有機発光膜4に電荷が蓄積しにくくなる。よって、静電気による有機発光膜4の絶縁破壊が生じにくくなる。   Next, the third film forming step (step S3) will be described. FIG. 5 is a plan view for explaining the third film forming step. 6 is a cross-sectional view taken along the cutting line CC shown in FIG. FIG. 7 is a cross-sectional view taken along the cutting line DD shown in FIG. As shown in FIGS. 5 to 7, the third film forming step is a step of forming a cathode film 5 that is continuous from the surface of the organic light emitting film 4 to the surface of the cathode terminal film 2 b. Thereby, the cathode film 5 is electrically connected to the cathode terminal film 2b. Since the cathode terminal film 2b and the anode film 2a are electrically connected via the conductive film 3, the cathode film 5 and the anode film 2a are in an electrically connected state (short circuit state). Therefore, even if static electricity is generated in the processes after the third film forming process, it is difficult for charges to be accumulated in the organic light emitting film 4 until this state is released. Therefore, dielectric breakdown of the organic light emitting film 4 due to static electricity is less likely to occur.

次に、第3の成膜工程の後に実施される検査工程(ステップS4)について図8〜図13を参照しながら説明する。図8〜図13の各々は、検査工程における導電膜3の分断箇所のパターンを示す平面図である。なお、図8〜図13の各々では、説明をわかりやすくするために陰極膜5の記載を省略している。   Next, the inspection process (step S4) performed after the third film forming process will be described with reference to FIGS. Each of FIG. 8 to FIG. 13 is a plan view showing a pattern of a part where the conductive film 3 is divided in the inspection process. In each of FIGS. 8 to 13, the description of the cathode film 5 is omitted for easy understanding.

検査工程は、まず、第1の導電膜3a、第2の導電膜3b、および第3の導電膜3cの各々を、陽極膜2aのみ電気的に接続する第1の部分8と、1対の陰極端子膜2bのみと電気的に接続する第2の部分と、に分断する。その後、第1の部分8および第2の部分を介して陽極膜2aと1対の陰極端子膜2bとの間に、順方向または逆方向の少なくとも一方の電圧を印加する。順方向の電圧を印加する場合には、エージング処理となり有機発光膜4の発光状態を検査することができる。一方、逆方向の電圧を印加する場合には、リペア処理となり有機発光膜4において電気的にショートした微小な部分を電気的にオープンにする。なお、検査が終了すると、透明電極膜2、有機発光膜4、陰極膜5の各々は封止される。   In the inspection step, first, the first conductive film 3a, the second conductive film 3b, and the third conductive film 3c are connected to the first portion 8 that electrically connects only the anode film 2a and a pair. It divides | segments into the 2nd part electrically connected only with the cathode terminal film | membrane 2b. Thereafter, at least one voltage in the forward direction or the reverse direction is applied between the anode film 2a and the pair of cathode terminal films 2b via the first portion 8 and the second portion. When a forward voltage is applied, an aging process is performed, and the light emission state of the organic light emitting film 4 can be inspected. On the other hand, when a voltage in the reverse direction is applied, a repair process is performed, and a minute portion electrically short-circuited in the organic light emitting film 4 is electrically opened. When the inspection is completed, each of the transparent electrode film 2, the organic light emitting film 4, and the cathode film 5 is sealed.

図8では、第1の導電膜3aと第2の導電膜3bとの接続部分、第1の導電膜3aと第3の導電膜3cとの接続部分、および第2の導電膜3bと第3の導電膜3cとの接続部分が分断箇所10となっている。このように各導電膜の接続部分を分断箇所とすることによって、第1の導電膜3a、第2の導電膜3b、および第3の導電膜3cのうち、2つの導電膜を一括して分断できる。そのため分断箇所を簡略化することが可能となる。なお、図8では、第1の導電膜3aが1行1列ずつ分断されているので、透明電極1に成膜された陽極膜2aと1対の陰極端子膜2bとの間の全てに電圧を印加するためには列数分の検査用陽極端子6と、行数分の検査用陰極端子7とが必要となる。   In FIG. 8, a connection portion between the first conductive film 3a and the second conductive film 3b, a connection portion between the first conductive film 3a and the third conductive film 3c, and the second conductive film 3b and the third conductive film. A connection portion with the conductive film 3 c is a cut portion 10. In this way, by setting the connection portion of each conductive film as a part to be divided, two conductive films among the first conductive film 3a, the second conductive film 3b, and the third conductive film 3c are divided at once. it can. Therefore, it becomes possible to simplify a parting part. In FIG. 8, since the first conductive film 3a is divided by one row and one column, a voltage is applied to all between the anode film 2a formed on the transparent electrode 1 and the pair of cathode terminal films 2b. To apply the number of inspection anode terminals 6 corresponding to the number of columns and the number of inspection cathode terminals 7 corresponding to the number of rows.

また、図9では、第1の導電膜3aと第2の導電膜3bとの接続部分が分断箇所10から除かれ、第1の導電膜3aの第2の部分9が先頭列または最後尾列にそれぞれ配列された透明電極2の陰極端子膜2に対して連続している。また、図10では、第1の導電膜3aと第3の導電膜3cとの接続部分が分断箇所10から除かれ、第1の導電膜3aの第1の部分8が先頭行または末端行にそれぞれ配列された透明電極2の陽極膜2aに対して連続している。これにより、検査用陽極端子6または検査用陰極端子7のいずれか一方を共通化できる。そのため、検査用陽極端子6および検査用陰極端子7の合計数を削減することが可能となる。   Further, in FIG. 9, the connection portion between the first conductive film 3a and the second conductive film 3b is removed from the dividing portion 10, and the second portion 9 of the first conductive film 3a is the first row or the last row. Are continuous with the cathode terminal film 2 of the transparent electrode 2 arranged respectively. Further, in FIG. 10, the connection portion between the first conductive film 3a and the third conductive film 3c is removed from the dividing portion 10, and the first portion 8 of the first conductive film 3a is in the first row or the last row. Each is continuous with the anode film 2a of the transparent electrode 2 arranged. Thereby, either the inspection anode terminal 6 or the inspection cathode terminal 7 can be made common. Therefore, the total number of the inspection anode terminal 6 and the inspection cathode terminal 7 can be reduced.

さらに、図11〜図13では、第1の導電膜3aと第2の導電膜3bとの接続部分、および第1の導電膜3aと第3の導電膜3cとの接続部分の両方が分断箇所10から除かれている。これにより、第1の検査用陽極端子6および検査用陰極端子7の両方を共通化できる。そのため、検査用陽極端子6または検査用陰極端子7の合計数をさらに削減することが可能となる。なお、図11、図12では、第2の導電膜3bと第3の導電膜3cとの接続部分も分断箇所10から除かれ、図13では、第2の導電膜3bと第3の導電膜3cとの接続部分は分断箇所10となっている。また、図11では、第2の導電膜3bと第3の導電膜3cとの接続部分の換わりに、該接続部分を挟む2箇所で第2の導電膜3bを分断する。一方、図12では、第2の導電膜3bと第3の導電膜3cとの接続部分の換わりに、該接続部分を挟む2箇所で第3の導電膜3cを分断する。   Further, in FIGS. 11 to 13, both the connection portion between the first conductive film 3 a and the second conductive film 3 b and the connection portion between the first conductive film 3 a and the third conductive film 3 c are divided. It is excluded from 10. Thereby, both the 1st inspection anode terminal 6 and the inspection cathode terminal 7 can be made common. Therefore, the total number of inspection anode terminals 6 or inspection cathode terminals 7 can be further reduced. 11 and 12, the connection portion between the second conductive film 3 b and the third conductive film 3 c is also removed from the dividing portion 10. In FIG. 13, the second conductive film 3 b and the third conductive film are removed. The connection part with 3c becomes the parting part 10. In FIG. 11, instead of the connection portion between the second conductive film 3b and the third conductive film 3c, the second conductive film 3b is divided at two positions sandwiching the connection portion. On the other hand, in FIG. 12, instead of the connection portion between the second conductive film 3b and the third conductive film 3c, the third conductive film 3c is divided at two positions sandwiching the connection portion.

次に、検査工程の後に実施される分断工程(ステップS5)について説明する。分断工程は、透明基板1を、導電膜3(第1の導電膜3a、第2の導電膜3b、第3の導電膜3c)に沿って分断する。これにより、第1の導電膜3a〜第3の導電膜3cの各々が透明電極膜2から分断されるとともに、1枚の透明基板1から有機エレクトロルミネッセンス照明装置用の複数の照明パネルが作製される。   Next, the cutting process (step S5) performed after the inspection process will be described. In the dividing step, the transparent substrate 1 is divided along the conductive film 3 (first conductive film 3a, second conductive film 3b, and third conductive film 3c). Thereby, each of the first conductive film 3a to the third conductive film 3c is separated from the transparent electrode film 2, and a plurality of lighting panels for an organic electroluminescence lighting device are manufactured from one transparent substrate 1. The

上述したように、本実施形態では、第1の成膜工程において陽極膜2aと陰極端子膜2bとが第1の導電膜3a〜第3の導電膜3cで短絡しているので、第3の成膜工程が終了した時点で、陰極膜5と陽極膜2aとは短絡している。そのため、第3の成膜工程が終了してから検査工程において各導電膜が分断箇所10で分断されるまでは、静電気が発生しても有機発光膜4に電荷が蓄積しにくくなる。さらに、第3の成膜工程が終了した時点で透明基板1に配置された陽極膜2aおよび陰極膜5の全てが等電位になるので、浮遊異物の静電的な吸着が発生しにくくなる。その結果、静電気による有機発光膜4の絶縁破壊が生じにくくなる
また、本実施形態では、検査工程において、第1の導電膜3a〜第3の導電膜3cを分断箇所10で分断することによって、エージング処理およびリペア処理を一括して行うことが可能となる。
As described above, in the present embodiment, since the anode film 2a and the cathode terminal film 2b are short-circuited by the first conductive film 3a to the third conductive film 3c in the first film formation step, the third film When the film forming process is completed, the cathode film 5 and the anode film 2a are short-circuited. Therefore, it is difficult for charges to be accumulated in the organic light emitting film 4 even if static electricity is generated until the conductive films are divided at the dividing points 10 in the inspection process after the completion of the third film forming process. Furthermore, since all of the anode film 2a and the cathode film 5 disposed on the transparent substrate 1 are equipotential when the third film forming step is completed, electrostatic adsorption of floating foreign matters is less likely to occur. As a result, the dielectric breakdown of the organic light emitting film 4 due to static electricity is less likely to occur. In the present embodiment, in the inspection process, the first conductive film 3a to the third conductive film 3c are divided at the dividing portion 10, The aging process and the repair process can be performed collectively.

なお、本発明では、上記のエージング処理およびリペア処理を分断工程の後に行い、かつ複数の透明電極膜2の行数および列数がともに偶数の場合、図14に示すように、第2の導電膜3bを1行おきに成膜し、第3の導電膜3cを1列おきに成膜することとしてもよい。この場合、第2の導電膜3bの数および第3の導電膜3cの数を削減することが可能となる。   In the present invention, when the aging process and the repair process are performed after the dividing step, and both the number of rows and the number of columns of the plurality of transparent electrode films 2 are even numbers, as shown in FIG. The film 3b may be formed every other row, and the third conductive film 3c may be formed every other column. In this case, the number of second conductive films 3b and the number of third conductive films 3c can be reduced.

1 透明基板
2 透明電極膜
2a 陽極膜
2b 陰極端子膜
3 導電膜
3a 第1の導電膜
3b 第2の導電膜
3c 第3の導電膜
4 有機発光膜
5 陰極膜
6 検査用陽極端子
7 検査用陰極端子
8 第1の部分
9 第2の部分
10 分断箇所
DESCRIPTION OF SYMBOLS 1 Transparent substrate 2 Transparent electrode film 2a Anode film 2b Cathode terminal film 3 Conductive film 3a First conductive film 3b Second conductive film 3c Third conductive film 4 Organic light emitting film 5 Cathode film 6 Anode terminal 7 for inspection For inspection Cathode terminal 8 1st part 9 2nd part 10

Claims (7)

1枚の透明基板の表面に、互いに離れて配置される複数の透明電極膜と、前記複数の透明電極膜に接合される導電膜と、を成膜する第1の成膜工程であって、前記複数の透明電極膜の各々を、陽極膜と、該陽極膜から離れて配置される陰極端子膜として成膜し、前記複数の透明電極膜の配置領域の最外周部、および前記複数の透明電極膜の間に前記導電膜を成膜して前記陽極膜と前記陰極端子膜とを前記導電膜を介して電気的に接続する第1の成膜工程と、
前記陽極膜の表面に有機発光膜を成膜する第2の成膜工程と、
前記有機発光膜の表面から前記陰極端子膜の表面まで連続する陰極膜を成膜する第3の成膜工程と、
前記第3の成膜工程の後、前記1枚の透明基板を、前記導電膜に沿って分断する分断工程と、を有する有機エレクトロルミネッセンス照明装置の製造方法。
A first film forming step of forming a plurality of transparent electrode films disposed on a surface of a single transparent substrate and a conductive film bonded to the plurality of transparent electrode films; Each of the plurality of transparent electrode films is formed as an anode film and a cathode terminal film arranged away from the anode film, and the outermost peripheral portion of the arrangement area of the plurality of transparent electrode films, and the plurality of transparent films A first film forming step of forming the conductive film between electrode films and electrically connecting the anode film and the cathode terminal film through the conductive film;
A second film forming step of forming an organic light emitting film on the surface of the anode film;
A third film forming step of forming a continuous cathode film from the surface of the organic light emitting film to the surface of the cathode terminal film;
The manufacturing method of the organic electroluminescent illuminating device which has a parting process of parting the said 1 transparent substrate along the said electrically conductive film after the said 3rd film-forming process.
前記第1の成膜工程において、前記陽極膜を挟んで互いに対向する1対の陰極端子膜を前記陰極端子膜として成膜し、前記複数の透明電極膜を行列状に配列し、前記1対の陰極端子膜の配列方向を行方向または列方向の一方に揃え、前記配置領域の最外周部に配置される第1の導電膜と、前記複数の透明電極膜の行間に配置される第2の導電膜と、前記複数の透明電極膜の列間に配置される第3の導電膜と、を前記導電膜として成膜し、前記第1の導電膜、前記第2の導電膜、および前記第3の導電膜を相互に接続する、請求項1に記載の有機エレクトロルミネッセンス照明装置の製造方法。   In the first film forming step, a pair of cathode terminal films facing each other with the anode film interposed therebetween are formed as the cathode terminal films, the plurality of transparent electrode films are arranged in a matrix, and the pair of cathode terminal films are arranged. The cathode terminal film is aligned in one of the row direction and the column direction, and the first conductive film disposed on the outermost peripheral portion of the placement region and the second conductive film disposed between the plurality of transparent electrode films. And the third conductive film disposed between the plurality of transparent electrode films as the conductive film, the first conductive film, the second conductive film, and the The manufacturing method of the organic electroluminescent illuminating device of Claim 1 which connects a 3rd electrically conductive film mutually. 前記第3の成膜工程と前記分断工程との間に、前記第1の導電膜、前記第2の導電膜、および前記第3の導電膜を、前記陽極膜のみと電気的に接続する第1の部分と、前記陰極端子膜のみと電気的に接続する第2の部分と、に分断し、その後、前記第1の部分および前記第2の部分を介して前記陽極膜と前記陰極端子膜との間に順方向または逆方向の少なくとも一方の電圧を印加する検査工程と、を有する請求項2に記載の有機エレクトロルミネッセンス照明装置の製造方法。   The first conductive film, the second conductive film, and the third conductive film are electrically connected only to the anode film between the third film forming step and the dividing step. 1 and a second portion that is electrically connected only to the cathode terminal film, and then the anode film and the cathode terminal film via the first portion and the second portion. And an inspection step of applying at least one voltage in the forward direction or the reverse direction between the first and second methods. 前記検査工程において、前記第1の導電膜の前記第1の部分が、複数の前記陽極膜に対して行方向または列方向のいずれか一方に連続している、請求項3に記載の有機エレクトロルミネッセンス照明装置の製造方法。   The organic electro according to claim 3, wherein in the inspection step, the first portion of the first conductive film is continuous in either the row direction or the column direction with respect to the plurality of anode films. Manufacturing method of luminescence lighting apparatus. 前記検査工程において、前記第1の導電膜の前記第2の部分が、複数の前記陰極端子膜に対して行方向または列方向のいずれか一方に連続している、請求項3または4に記載の有機エレクトロルミネッセンス照明装置の製造方法。   The said 2nd part of the said 1st electrically conductive film is the said test | inspection process, The said 2nd part is following either the row direction or the column direction with respect to the said some cathode terminal film | membrane, The Claim 3 or 4 Manufacturing method of the organic electroluminescence lighting device. 前記検査工程において、前記第1の導電膜、前記第2の導電膜、および前記第3の導電膜の分断箇所に、前記第1の導電膜と前記第2の導電膜との接続部分、前記第1の導電膜と前記第3の導電膜との接続部分、または前記第2の導電膜と前記第3の導電膜との接続部分の少なくとも一つが含まれている、請求項3に記載の有機エレクトロルミネッセンス照明装置の製造方法。   In the inspection step, a connection portion between the first conductive film and the second conductive film is formed at a portion where the first conductive film, the second conductive film, and the third conductive film are separated. 4. The device according to claim 3, wherein at least one of a connection portion between the first conductive film and the third conductive film or a connection portion between the second conductive film and the third conductive film is included. A manufacturing method of an organic electroluminescence lighting device. 前記第1の成膜工程において、前記複数の透明電極膜の行数および列数がともに偶数の場合、前記第2の導電膜を1行おきに成膜し、前記第3の導電膜を1列おきに成膜する、請求項2に記載の有機エレクトロルミネッセンス照明装置の製造方法。   In the first film forming step, when both the number of rows and the number of columns of the plurality of transparent electrode films are even, the second conductive film is formed every other row, and the third conductive film is set to 1 The manufacturing method of the organic electroluminescent illuminating device of Claim 2 formed into a film every row.
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Publication number Priority date Publication date Assignee Title
JPH1168110A (en) * 1997-08-13 1999-03-09 Semiconductor Energy Lab Co Ltd Manufacture of display
JP2005276730A (en) * 2004-03-26 2005-10-06 Optrex Corp Manufacturing method of organic el display device
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