JP2011220977A - Magnetic field detector - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a magnetic field detector down-sized, while improving the accuracy of measurement of a magnetic field.SOLUTION: In the magnetic field detector 10, magnetic sensor elements 3 and 4 provided with magneto-sensitive sections 6, 7 and 8, each detecting a magnetic field in one axial direction, on respective specified surfaces of flat plate shaped and rectangular parallelepiped substrates are disposed on a mounting substrate with a signal processing IC 2. The magnetic field detector 10 has the plurality of magneto-sensitive sections 6 and 7 disposed in the vicinity of each other on a single substrate constituting the magnetic sensor element 3.

Description

  The present invention relates to a magnetic field detection device, and more particularly to a three-axis magnetic sensor.

  In recent years, there has been a demand for downsizing electronic devices such as personal computers, portable information devices, and electronic exchanges, and electronic components used in these electronic devices are also downsized, thinned, reduced in weight, and enhanced in functionality. Is strongly demanded.

  In a navigation device that is one of such electronic devices, an electronic compass is used to obtain direction information. The electronic compass is provided with a magnetic sensor element having a magnetic sensing part for detecting a magnetic field. In many electronic compasses, when three magnetic sensor elements are arranged on a mounting substrate, the magnetic sensitive directions (sensitivity axis directions) of the magnetic sensitive parts constituting each magnetic sensor element are arranged perpendicular to each other. (See, for example, Patent Document 1). That is, the magnetic fields applied to the three axes of the X axis, the Y axis, and the Z axis are measured using individual magnetic sensor elements (see FIG. 17). In FIG. 17, the longitudinal direction of the magnetic sensing part provided in each magnetic sensor element is drawn as the magnetic sensing direction. In general, the detection sensitivity of a high-sensitivity magnetic sensor such as an MI sensor or a fluxgate sensor depends on the length of the magnetically sensitive portion in the longitudinal direction.

In the conventional electronic compass shown in FIG. 17, the first magnetic sensor element 103 and the second magnetic sensor element 104 that detect magnetic fields applied in the X-axis direction and the Y-axis direction parallel to the mounting substrate surface 101, and the mounting substrate surface A magnetic sensor element 105 that detects a magnetic field applied in the Z-axis direction perpendicular to 101 and a signal processing IC 102 are provided.
Magnetic sensing directions of the first magnetic sensing unit 106 and the second magnetic sensing unit 107 constituting the first magnetic sensor element 103 and the second magnetic sensor element 104 are parallel to the mounting substrate surface 101, and each magnetic sensor element 103 and 104 are provided flat on the mounting substrate surface 101. On the other hand, the magnetic sensing direction of the third magnetic sensing part 108 constituting the third magnetic sensor element 105 is perpendicular to the mounting substrate surface 101, and the third magnetic sensor element 105 is provided vertically on the mounting substrate surface 101. It has been.

JP 2009-109378 A

Conventionally, a magnetic sensor element that detects a magnetic field applied in the vertical axis direction (Z-axis direction) of the mounting board surface is arranged in a parallel axis direction (X-axis direction, Y-axis direction) of the mounting board surface in order to ensure magnetic detection sensitivity. The magnetic sensor needs to be about the same size as a magnetic sensor for detecting such a magnetic field, and since it is arranged vertically, it becomes taller than a magnetic sensor element arranged flat, and the magnetic field detection device (Electronic compass) There is a problem that the whole becomes large. Moreover, improvement of the magnetic field measurement accuracy of a magnetic field detection apparatus is desired.
This invention is made | formed in view of the said situation, and makes it a subject to provide the magnetic field detection apparatus reduced in size, improving a magnetic field measurement precision.

According to a first aspect of the present invention, there is provided a magnetic field detection device including a magnetic sensor element including a magnetic sensing element that detects a magnetic field in one axial direction on a specific surface of a flat and rectangular parallelepiped substrate together with a signal processing IC. A magnetic field detection apparatus arranged on a substrate, wherein a plurality of the magnetic sensing portions are arranged in the vicinity of each other on a single substrate constituting the magnetic sensor element.
A magnetic field detection device according to a second aspect of the present invention is the magnetic field detection device according to the first aspect, wherein a magnetic sensing direction of at least two magnetic sensing units among the plurality of magnetic sensing units arranged on the single substrate is the mounting. It is characterized by being inclined with respect to the substrate surface.
A magnetic field detection device according to a third aspect of the present invention is the magnetic field detection device according to the first or second aspect, wherein magnetic sensitive axes of at least two magnetic sensitive portions among a plurality of magnetic sensitive portions arranged on the single substrate intersect. It is characterized by doing.
According to a fourth aspect of the present invention, in the magnetic field detection device according to any one of the first to third aspects, in addition to the magnetic sensor element, a magnetic sensing unit having the same function as the magnetic sensing unit performs the signal processing. It is provided on an IC.
According to a fifth aspect of the present invention, there is provided a magnetic field detection device including a magnetic sensor element having a magnetic sensing portion for detecting a magnetic field in one axial direction on a specific surface of a flat plate and a rectangular parallelepiped substrate together with a signal processing IC. A magnetic field detection device arranged on a substrate, wherein a plurality of the magnetic sensing units are arranged in the vicinity of each other on a single substrate constituting the signal processing IC.

According to the magnetic field detection device of the present invention, by concentrating a plurality of magnetic sensitive parts provided in the magnetic sensor elements arranged on the mounting substrate in the vicinity of each other and arranging them in one pole, Such a magnetic field can be measured with higher accuracy.
Further, the magnetic sensor is provided by arranging the magnetic sensing directions of the magnetic sensing units provided on a single substrate constituting the magnetic sensor element on the mounting substrate obliquely with respect to the mounting substrate surface. Since the element can be reduced in height, the magnetic field detection device can be reduced in size.
In addition, when a magnetic sensor having the same function as the magnetic sensor provided in the magnetic sensor element is provided on the signal processing IC instead of the magnetic sensor element, the area occupied by the magnetic sensor element on the mounting substrate is reduced. Therefore, the magnetic field detection device can be further downsized.

  In addition, according to the magnetic field detection device of the present invention, a plurality of magnetic sensitive parts provided in the signal processing IC arranged on the mounting substrate are concentrated in the vicinity of each other and arranged in one pole, so that The magnetic field applied to the pole can be measured with higher accuracy.

It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a figure which compares the height which the magnetic sensing part protruded from the mounting substrate surface 1. FIG. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in an example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in another example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in another example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in another example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in another example of the magnetic field detection apparatus concerning this invention. It is a perspective view which shows the layout of the magnetic sensor element and signal processing IC in the conventional magnetic field detection apparatus.

<First Embodiment of Magnetic Field Detection Device>
The present invention will be described below based on preferred embodiments with reference to the drawings.
FIG. 1 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in a magnetic field detection device 10A (10) which is a first embodiment of the magnetic field detection device according to the present invention.

The magnetic field detection device 10 </ b> A includes at least a signal processing IC 2, a first magnetic sensor element 3, and a second magnetic sensor element 4 on the mounting substrate surface 1.
On the mounting substrate surface 1, the first magnetic sensor element 3 is arranged vertically, and the second magnetic sensor element 4 is arranged flat (horizontal). The first magnetic sensor element 3 arranged vertically is taller than the second magnetic sensor element 4 and signal processing IC 2 arranged flat, and protrudes from the mounting substrate surface 1 to a higher position.

On a specific surface (one main surface) of a single flat and rectangular parallelepiped substrate constituting the first magnetic sensor element 3, a first magnetic sensing portion 6 and a second magnetic sensing portion 7 shown in a rectangular shape are provided. Is provided. The longitudinal direction of each rectangular shape represents the magnetic sensing direction of each magnetic sensing part. The magnetic sensitive direction of the first magnetic sensitive part 6 is parallel to the Y axis direction, and the magnetic sensitive direction of the second magnetic sensitive part 7 is parallel to the Z axis. Each of the Y-axis direction and the Z-axis direction is inclined at an angle of 45 ° with respect to the mounting substrate surface 1. The board surface provided with the first magnetic sensing part 6 and the second magnetic sensing part 7 of the first magnetic sensor element 3 is perpendicular to the mounting board surface 1.
On the specific surface of the flat and rectangular parallelepiped substrate constituting the second magnetic sensor element 4, there is provided one third magnetic sensing portion 8 shown in a strip shape, and X is the longitudinal direction of the strip shape. The axial direction indicates the magnetic sensing direction of the third magnetic sensing unit 8. This X-axis direction is parallel to the mounting substrate surface 1. The substrate surface on which the first magnetic sensing portion 8 of the second magnetic sensor element 4 is provided is parallel to the mounting substrate surface 1.
The X-axis direction, Y-axis direction, and Z-axis direction are orthogonal to each other.

In the magnetic field detection device 10A, the first magnetic sensor element 3 and the second magnetic sensor element 4 are arranged close together in the vicinity of the signal processing IC2. Further, a first magnetic sensing part 6 and a second magnetic sensing part 7 provided on a single substrate constituting the first magnetic sensor element 3 are provided in the vicinity of each other. For this reason, all the magnetic sensitive parts provided in the board | substrate which comprises each magnetic sensor element are arrange | positioned in the vicinity of each other.
That is, the first magnetic sensing part 6 has the second magnetic sensing part 7 and the third magnetic sensing part 8 arranged within the distance range of the length in the longitudinal direction. The first magnetic sensing part 6 and the third magnetic sensing part 8 are arranged within the distance range of the length in the longitudinal direction, and the third magnetic sensing part 8 is within the distance range of the length in the longitudinal direction, A first magnetic sensing part 6 and a second magnetic sensing part 7 are arranged.

Here, “each magnetic sensing part is arranged in the vicinity of each other” means that the first magnetic sensor element 3 and the second magnetic sensor element 4 are arranged in the vicinity of each other. At this time, parts other than the magnetic sensor element are sandwiched between the magnetic sensor elements and are not mounted. In such a state, a plurality of magnetic sensor elements can be densely arranged in the space. In this state, it is further preferable that at least one other magnetic sensitive part is arranged in the distance range of the length in the longitudinal direction of each magnetic sensitive part. Further, it is more preferable that each magnetic sensing portion is disposed within a distance range of the length in the longitudinal direction of all remaining magnetic sensing portions.
As described above, the magnetic sensitive parts are gathered close to each other and concentrated in one pole, so that the magnetic field in the one pole can be measured with higher accuracy. This mechanism will be described below.

  In a conventional magnetic field detection device (for example, the magnetic field detection device 100 shown in FIG. 17), the magnetic sensor elements are not arranged in the vicinity of each other. That is, since the magnetic sensor elements are arranged at different positions, the magnetic fields at the individual positions are measured. The magnetic field measured by each magnetic sensor element is finally synthesized by the signal processing IC 102, and the magnetic field (magnetic field vector) in the entire magnetic field detection apparatus 100 is calculated.

Thus, the magnetic field vector obtained by synthesizing the magnetic fields at positions separated from each other is the average of the magnetic fields at the three individual positions, and therefore the range in which each magnetic sensor element is disposed (the entire magnetic field detection device 100). The measurement accuracy is low because only the average magnetic field is measured.
Generally, a device that generates a magnetic field is often provided in the vicinity of the magnetic field detection device, and the magnetic field gradient in the magnetic field detection device is significant. Therefore, when the magnetic sensor elements are arranged apart from each other, each receives a different magnetic field gradient, and magnetic field measurement errors are likely to occur.

  On the other hand, in the magnetic field detection apparatus according to the present invention (for example, the magnetic field detection apparatus 10A shown in FIG. 1), the magnetic sensor elements are arranged in the vicinity of each other, and the magnetic sensor elements are concentrated and arranged in one pole ( Measuring the magnetic field at one location. The magnetic field measured by each magnetic sensor element is finally synthesized by the signal processing IC 2 to calculate the magnetic field (magnetic field vector) at the one pole.

  Thus, the magnetic field vector obtained by synthesizing the magnetic fields of one pole gathered close to each other is obtained by three magnetic sensor elements that detect the X, Y, and Z axis directions respectively. Since it was measured, it is difficult to be affected by the difference in magnetic field gradient at different positions of the magnetic field detection device. Therefore, the measurement accuracy of the magnetic field can be increased by arranging the magnetic sensor elements together.

  Also, the wiring (not shown) for electrically connecting each magnetic sensor element and the signal processing IC 2 can be made as short as possible in order to suppress the deterioration of the signal transmitted from each magnetic sensor element to the signal processing IC 2. desirable. For this reason, each magnetic sensor element is preferably arranged in the vicinity of the signal processing IC. More specifically, the signal processing IC is preferably arranged within a distance range corresponding to the length in the longitudinal direction of the substrate constituting each magnetic sensor element. This applies to all the magnetic field detection devices according to the present invention described later.

In the magnetic field detection device 10A, the axis of the magnetic sensing direction passing through the center of the second magnetic sensing unit 7 (the magnetic sensing axis of the second magnetic sensing unit 7) and the axis of the magnetic sensing direction passing through the center of the third magnetic sensing unit 8 ( And the magnetic sensitive axis of the third magnetic sensitive part 8 cross each other.
Here, “intersect” means an imaginary straight line (magnetic axis) extending in the longitudinal direction of the strip shape showing the second magnetic sensing portion 7 and a longitudinal direction of the strip shape showing the third magnetic sensing portion 8. It means that the extended virtual straight line (magnetic axis) intersects at one point (intersection) in space. This angle of intersection is not necessarily a right angle. Each magnetosensitive axis passes through the center of each magnetosensitive part.
Thus, it is preferable that at least two of the first to third magnetic sensor parts included in the first to third magnetic sensor elements intersect with each other. In this case, the magnetic field at the intersection can be measured with higher accuracy.

  In the magnetic field detection device 10A, the first magnetic sensor element 3 provided on one main surface of the first magnetic sensor element 3 is mounted while the magnetic sensitive direction of the first magnetic sensitive part 6 and the magnetic sensitive direction of the second magnetic sensitive part 7 are orthogonal to each other. The substrate surface 1 is inclined at 45 °. Further, the magnetic sensing direction of the third magnetic sensing part 8 constituting the second magnetic sensor element 4 is parallel to the mounting substrate surface 1, and the magnetic sensing direction of the first magnetic sensing part 6 and the second magnetic sensing part 7. Is orthogonal. For this reason, the first to third magnetic sensing units allow the magnetic field detection device 10A to detect the magnetic field in the three axial magnetic sensing directions orthogonal to each other.

  The three magnetic sensing directions by the three axes are orthogonal to each other, but two of the three magnetic sensing directions are orthogonal to each other, and the remaining one magnetic sensing direction is the two magnetic sensing directions. It does not have to be orthogonal, and all three magnetic sensing directions need not be orthogonal to each other. If the three magnetic sensitive directions are different from each other and all of the three magnetic sensitive directions do not exist on the same plane, a magnetic field vector in a three-dimensional space measured by each magnetic sensor element is signal processing IC2. Can be calculated.

  However, from the viewpoint of increasing the measurement accuracy and simplifying the calculation in the signal processing IC 2, it is preferable that at least two of the three magnetosensitive directions are orthogonal to each other. More preferably, all are orthogonal to each other.

When at least two of the three magnetic sensing directions are perpendicular to each other, the magnetic sensing direction of the first magnetic sensing unit 6 and the magnetic sensing direction of the second magnetic sensing unit 7 in the first magnetic sensor element 3 are the same. It is preferable that they are orthogonal to each other.
Since the first magnetic sensing part 6 and the second magnetic sensing part 7 are arranged on a specific surface of a single substrate, the magnetic sensing directions of the two magnetic sensing parts are orthogonal to each other when the first magnetic sensor element 3 is manufactured. Can be built in advance. As a result, at the stage of mounting the first magnetic sensor element 3 on the mounting substrate surface 1, it is not necessary to adjust the relative magnetic sensing direction of both magnetic sensing parts, so that the first magnetic sensor element 3 can be easily mounted.
On the other hand, the magnetic sensing direction of the third magnetic sensing unit 8 and the magnetic sensing direction of the first magnetic sensing unit 6 or the second magnetic sensing unit 7 arranged in the second magnetic sensor element 4 made of another substrate are mutually set. In order to make them orthogonal, both magnetic sensor elements must be mounted while strictly adjusting the relative arrangement of the first magnetic sensor element 3 and the second magnetic sensor element 4 on the mounting substrate surface 1.

The angle θ formed by the first magnetic sensing portion 6 with the mounting substrate surface 1 and the angle φ formed by the second magnetic sensing portion 7 with the mounting substrate surface 1 may be the same angle or different angles.
When the formed angle θ is different from the formed angle φ, the sum of the formed angle θ and the formed angle φ is preferably 90 °. By the sum being 90 °, at least the magnetic sensitive direction of the first magnetic sensitive part 6 and the magnetic sensitive direction of the second magnetic sensitive part 7 can be made orthogonal, and further, the first to third magnetic sensitive parts. The three magnetosensitive directions can be orthogonal to each other.

  When the formed angle θ and the formed angle φ are the same angle, the formed angle θ and the formed angle φ are preferably 45 °. By being 45 °, at least the magnetic sensing direction of the first magnetic sensing part 6 and the magnetic sensing direction of the second magnetic sensing part 7 can be orthogonal to each other (further, the three of the first to third magnetic sensing parts). It is also possible to make all the magnetic sensing directions orthogonal to each other), and the first magnetic sensor element 3 including the first magnetic sensing part 6 and the second magnetic sensing part 7 can be reduced in height. This reduction in height will be described below.

  As described above, the first magnetic sensor element 3 is arranged in a vertical position in which the substrate surface on which the first magnetic sensing unit 6 and the second magnetic sensing unit 7 are provided stands vertically with respect to the mounting substrate surface 1. Yes. For this reason, the first magnetic sensor element 3 is taller than the second magnetic sensor element 4 and the signal processing IC 2 arranged in a flat position. At this time, the first magnetic sensing part 6 and the second magnetic sensing part 7 constituting the first magnetic sensor element 3 protrude from the mounting substrate surface 1 at a height h (see FIG. 1). The height h is the highest when the angle θ (or the angle φ formed) between the first magnetic sensing portion 6 (or the second magnetic sensing portion 7) and the mounting substrate surface 1 is 90 ° (vertical). is there. The height h of the first magnetic sensing unit 6 in this case corresponds to the height H of the third magnetic sensing unit 108 in the conventional magnetic field detection device 100 (see FIG. 17).

  As the angle θ formed by the first magnetic sensing part 6 is changed from 90 ° to 45 °, the height h of the first magnetic sensing part 6 and the height of the first magnetic sensor element 3 can be gradually reduced ( (See FIG. 2). Specifically, when the formed angle θ is 45 °, the height h can be reduced by 0.75 times compared to the case where the formed angle θ is 90 °.

  When the angle θ formed by the first magnetic sensing part 6 is further changed from 45 ° to 0 °, the height h of the first magnetic sensing part 6 and the height of the first magnetic sensor element 3 are further reduced. sell. However, as described above, since the sum of the angle θ formed by the first magnetic sensing portion 6 and the angle φ formed by the second magnetic sensing portion 7 is preferably 90 °, the angle θ formed is smaller than 45 °. Then, the angle φ formed is larger than 45 °, the height h of the second magnetic sensing part 7 is increased, and as a result, the height of the first magnetic sensor element 3 is also increased.

  Therefore, in order to reduce the height of the first magnetic sensor element 3 arranged vertically on the mounting substrate surface 1 (the height h of the first magnetic sensing part 6 and the second magnetic sensing part 7), It is preferable that both the angles θ and φ are 45 °. Thus, by reducing the height of the magnetic sensor elements arranged vertically, the magnetic field detection device 10A of the present invention can be made lower in height than the conventional magnetic field detection device 100, and further downsized.

Examples of the material of the substrate of the magnetic field detection device according to the present invention include insulators such as glass, sapphire, plastic, and ceramics, and semiconductors such as silicon (Si).
As a magnetic sensor element used in the magnetic field detection apparatus according to the present invention, known elements such as an MI element (Magneto-Impedance element), a parallel fluxgate sensor element, an orthogonal fluxgate sensor element, and the like can be applied. A magnetic film patterned in a strip shape is used as the magnetic sensitive part constituting the MI element, the parallel fluxgate sensor element, and the orthogonal fluxgate sensor element. For the magnetic film, for example, CoNbZr having a zero magnetostrictive amorphous composition is used.

<Second Embodiment of Magnetic Field Detection Device>
FIG. 3 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in the magnetic field detection device 20A (20) which is the second embodiment of the magnetic field detection device according to the present invention.

The magnetic field detection device 20 </ b> A includes at least a signal processing IC 12 and a first magnetic sensor element 13 on the mounting substrate surface 11.
On the mounting substrate surface 11, the first magnetic sensor elements 13 are arranged vertically. The first magnetic sensor element 13 arranged vertically is taller than the signal processing IC 12 arranged flat, and protrudes from the mounting board surface 11 to a higher position.

The substrate constituting the signal processing IC 12 is provided with one third magnetic sensing portion 18 shown in a strip shape, and the X-axis direction which is the longitudinal direction of the strip shape is the magnetic sensing direction of the third magnetic sensing portion 18. Indicates. This X-axis direction is parallel to the mounting substrate surface 11. The substrate surface on which the third magnetic sensing portion 18 of the signal processing IC 12 is provided is parallel to the mounting substrate surface 11.
On a specific surface (one main surface) of a single flat plate and rectangular parallelepiped substrate constituting the first magnetic sensor element 13, a first magnetic sensing portion 16 and a second magnetic sensing portion 17 shown in a strip shape are provided. Is provided. The longitudinal direction of each rectangular shape represents the magnetic sensing direction of each magnetic sensing part. The magnetic sensing direction of the first magnetic sensing part 16 is parallel to the Y-axis direction, and the magnetic sensing direction of the second magnetic sensing part 17 is parallel to the Z-axis. Each of the Y-axis direction and the Z-axis direction is inclined at an angle of 45 ° with respect to the mounting substrate surface 11. The board surface provided with the first magnetic sensing part 16 and the second magnetic sensing part 17 of the first magnetic sensor element 13 is perpendicular to the mounting board surface 11.
The X-axis direction, Y-axis direction, and Z-axis direction are orthogonal to each other.

In the magnetic field detection device 20A, the first magnetic sensor elements 13 are arranged close to the vicinity of the signal processing IC 12. Further, a first magnetic sensing part 16 and a second magnetic sensing part 17 provided on a single substrate constituting the first magnetic sensor element 13 are provided in the vicinity of each other. For this reason, all the magnetic sensitive parts provided in the first magnetic sensor element 13 and the signal processing IC 12 are arranged in the vicinity of each other.
That is, the first magnetic sensing part 16 includes the second magnetic sensing part 17 and the third magnetic sensing part 18 within the distance range of the length in the longitudinal direction. The first magnetic sensing part 16 and the third magnetic sensing part 18 are arranged within the distance range of the length in the longitudinal direction, and the third magnetic sensing part 18 is within the distance range of the length in the longitudinal direction, A first magnetic sensing part 16 and a second magnetic sensing part 17 are arranged.

  Since the magnetic sensitive parts are concentrated in the vicinity of each other and arranged in one pole in this way, the influence of the magnetic field gradient received by the magnetic sensitive parts can be made uniform, so that the measurement of the magnetic field detection device 20A is possible. This is preferable because accuracy can be improved. This is the same as the description of the magnetic field detection device 10 described above.

In the magnetic field detection device 20 </ b> A, a magnetosensitive axis passing through the center of the first magnetosensitive part 16 (a magnetosensitive axis of the first magnetosensitive part 16) and a magnetosensitive axis passing through the center of the second magnetosensitive part 17 ( And the magnetic sensitive axis of the second magnetic sensitive part 17 cross each other.
Here, “intersect” means an imaginary straight line (magnetic axis) extending in the longitudinal direction of the strip shape showing the first magnetic sensing portion 16 and a longitudinal direction of the strip shape showing the second magnetic sensing portion 17. It means that the extended virtual straight line (magnetic axis) intersects at one point (intersection) in space. This angle of intersection is not necessarily a right angle. Each magnetosensitive axis passes through the center of each magnetosensitive part.
Thus, it is preferable that at least two of the first to third magnetic sensor parts included in the first to third magnetic sensor elements intersect with each other. In this case, the magnetic field at the intersection can be measured with higher accuracy.

  In the magnetic field detection device 20A, the magnetic sensing direction of the first magnetic sensing unit 16 and the magnetic sensing direction of the second magnetic sensing unit 17 constituting the first magnetic sensor element 13 are orthogonal to each other while being perpendicular to each other. The inclination is 45 °. Further, the magnetic sensing direction of the third magnetic sensing unit 18 disposed on the upper surface of the signal processing IC 12 is parallel to the mounting substrate surface 11, and the magnetic sensing direction of the first magnetic sensing unit 16 and the second magnetic sensing unit 17. Is orthogonal. For this reason, the first to third magnetic sensing units allow the magnetic field detection device 20A to detect a magnetic field in three magnetic sensing directions orthogonal to each other.

  The three magnetic sensing directions by the three axes are orthogonal to each other, but two of the three magnetic sensing directions are orthogonal to each other, and the remaining one magnetic sensing direction is the two magnetic sensing directions. It does not have to be orthogonal, and all three magnetic sensing directions need not be orthogonal to each other. If the three magnetosensitive directions are different from each other and all of the three magnetosensitive directions do not exist in the same plane, the magnetic field vector in the three-dimensional space detected by each magnetosensitive portion is signal-processed. It can be calculated by IC12.

  However, from the viewpoint of increasing the measurement accuracy and simplifying the calculation in the signal processing IC 12, it is preferable that at least two of the three magnetosensitive directions are orthogonal to each other. More preferably, all are orthogonal to each other.

  When at least two of the three magnetic sensing directions are perpendicular to each other, the magnetic sensing direction of the first magnetic sensing part 16 and the magnetic sensing direction of the second magnetic sensing part 17 in the first magnetic sensor element 13 are the same. It is preferable that they are orthogonal to each other. The reason for this preference is the same as in the case of the first magnetic sensor element 3 of the first embodiment described above, and it is easy to mount the first magnetic sensor element 13 on the mounting substrate surface 11.

The angle θ formed by the first magnetic sensing portion 16 with the mounting substrate surface 11 and the angle φ formed by the second magnetic sensing portion 17 with the mounting substrate surface 1 may be the same angle or different angles.
When the formed angle θ is different from the formed angle φ, the sum of the formed angle θ and the formed angle φ is preferably 90 °. When the sum is 90 °, at least the magnetic sensitive direction of the first magnetic sensitive part 16 and the magnetic sensitive direction of the second magnetic sensitive part 17 can be orthogonal to each other, and further the first to third magnetic sensitive parts. The three magnetosensitive directions can be orthogonal to each other.

  When the formed angle θ and the formed angle φ are the same angle, the formed angle θ and the formed angle φ are preferably 45 °. By being 45 °, at least the magnetic sensing direction of the first magnetic sensing part 16 and the magnetic sensing direction of the second magnetic sensing part 17 can be orthogonal to each other (further, three of the first to third magnetic sensing parts). It is also possible to make all the magnetic sensing directions orthogonal to each other), and the first magnetic sensor element 13 including the first magnetic sensing part 16 and the second magnetic sensing part 17 can be reduced in height. The description about this low profile is the same as that of the magnetic field detection apparatus 10 which is 1st embodiment mentioned above.

  In order to reduce the height of the first magnetic sensor element 13 arranged vertically on the mounting substrate surface 11 (the height h of the first magnetic sensing portion 16 and the second magnetic sensing portion 17), Both θ and φ are preferably 45 °. Thus, by reducing the height of the magnetic sensor elements arranged vertically, the magnetic field detection device 20A of the present invention can be made lower in height than the conventional magnetic field detection device 100 and further downsized.

In addition, the magnetic sensor element corresponding to the second magnetic sensor element 4 of the first embodiment described above is not necessary in the second embodiment by arranging the third magnetic sensing portion 18 on the upper surface of the substrate of the signal processing IC 12. . That is, there is one magnetic sensor element on the mounting substrate surface 11 of the magnetic field detection device 20, and no flat magnetic sensor element is arranged. For this reason, the area occupied by the magnetic sensor element on the mounting substrate surface 11 can be reduced. Therefore, the magnetic field detection device 20A can be further downsized than the magnetic field detection device 10.
Similar to the magnetic field detection device 20B (20) shown in FIG. 4, even if the second magnetic sensor element 14 provided with the third magnetic sensing unit 18 is stacked on the signal processing IC 12 and installed, the same small size is achieved. Is possible.

Moreover, you may distribute | arrange the 1st magnetic sensor element 13 on the upper surface of the board | substrate of signal processing IC12 like the magnetic field detection apparatus 20C (20) shown in FIG.
FIG. 5 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in the magnetic field detection device 20C (20) according to the second embodiment of the present invention. In the perspective view, the same components as those of the magnetic field detection device 20A (20) described above are denoted by the same reference numerals.
In the magnetic field detection device 20 </ b> C (20), the first magnetic sensor element 13 is disposed on the mounting substrate surface 11. However, the signal processing IC 12 is disposed between the mounting substrate 11 and the first magnetic sensor element 13.

  Also in the magnetic field detection device 20C (20), the third magnetic sensing unit 18, the first magnetic sensing unit 16, and the second magnetic sensing unit 17 are arranged in the vicinity of each other. The influence can be made uniform, and the measurement accuracy of the magnetic field detector 20C can be increased. Furthermore, the area occupied by the magnetic sensor element on the mounting substrate surface 11 can be eliminated. Therefore, the magnetic field detection device 20C can be further downsized than the magnetic field detection devices 10, 20A, and 20B. In addition, since the wiring between the first magnetic sensor element 13 and the signal processing IC 12 can be made shorter, signal deterioration that can occur when the measurement signal is transmitted to the signal processing IC 12 can be further suppressed, and the measurement accuracy can be improved. .

  When compared with the magnetic field detection devices 20A and 20B, the magnetic field detection device 20C can reduce the area of the mounting substrate surface 11, but the height of the first magnetic sensor element 13 from the mounting substrate surface 11 is the thickness of the signal processing IC 12. The height is increased by the amount (the height is increased by the height indicated by α in FIG. 5). That is, when both are compared, the reduction effect of the mounting substrate surface and the suppression of the increase in the height at which the magnetic sensor element protrudes from the mounting substrate surface are in a trade-off relationship. Which is prioritized may be appropriately selected according to the design of the device incorporating the magnetic field detection device. Whichever one is selected, the magnetic field detection devices 20A, 20B, and 20C can be made smaller than the magnetic field detection device 10.

<Third Embodiment of Magnetic Field Detection Device>
FIG. 6 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in the magnetic field detection device 30A (30) which is the first embodiment of the magnetic field detection device according to the present invention.

The magnetic field detection device 30 </ b> A includes at least a signal processing IC 22, a first magnetic sensor element 23, and a second magnetic sensor element 24 on the mounting substrate surface 21.
On the mounting substrate surface 21, the first magnetic sensor elements 23 are arranged vertically, and the second magnetic sensor elements 24 are arranged flat (horizontal). The first magnetic sensor element 23 arranged vertically is taller than the second magnetic sensor element 24 and signal processing IC 22 arranged flat, and protrudes from the mounting board surface 21 to a higher position.

In a single flat and rectangular parallelepiped substrate constituting the first magnetic sensor element 23, a first magnetic sensing portion 26 shown in a strip shape is provided on one main surface 23a, and on the other main surface 23b. Is provided with a second magnetic sensing part 27 shown in a strip shape. The longitudinal direction of each rectangular shape represents the magnetic sensing direction of each magnetic sensing part. The magnetic sensing direction of the first magnetic sensing unit 26 is parallel to the Y-axis direction, and the magnetic sensing direction of the second magnetic sensing unit 27 is parallel to the Z-axis. The Y-axis direction and the Z-axis direction are inclined at an angle of 45 ° with respect to the mounting substrate surface 21. Each main surface provided with the first magnetic sensing part 26 and the second magnetic sensing part 27 of the first magnetic sensor element 23 is perpendicular to the mounting substrate surface 21.
On the specific surface of the flat and rectangular parallelepiped substrate constituting the second magnetic sensor element 24, one third magnetic sensing portion 28 shown in a strip shape is provided, and X is the longitudinal direction of the strip shape. The axial direction indicates the magnetic sensing direction of the third magnetic sensing unit 28. This X-axis direction is parallel to the mounting substrate surface 21. The substrate surface on which the first magnetic sensing portion 28 of the second magnetic sensor element 24 is provided is parallel to the mounting substrate surface 21.
The X-axis direction, Y-axis direction, and Z-axis direction are orthogonal to each other.

In the magnetic field detection device 30 </ b> A, the first magnetic sensor element 23 and the second magnetic sensor element 24 are arranged close together in the vicinity of the signal processing IC 22. Further, a first magnetic sensing part 26 and a second magnetic sensing part 27 provided on a single substrate constituting the first magnetic sensor element 23 are provided in the vicinity of each other. For this reason, all the magnetic sensitive parts provided in the board | substrate which comprises each magnetic sensor element are arrange | positioned in the vicinity of each other.
That is, the first magnetic sensing part 26 is provided with the second magnetic sensing part 27 and the third magnetic sensing part 28 within the distance range of the length in the longitudinal direction. The first magnetic sensing part 26 and the third magnetic sensing part 28 are arranged within the distance range of the length in the longitudinal direction, and the third magnetic sensing part 28 is within the distance range of the length in the longitudinal direction, A first magnetic sensing part 26 and a second magnetic sensing part 27 are arranged.

  Since the magnetic sensitive parts are concentrated in the vicinity of each other and arranged in one pole in this manner, the influence of the magnetic field gradient received by the magnetic sensitive parts can be made uniform, so that the measurement of the magnetic field detection device 30A can be performed. This is preferable because accuracy can be improved. This is the same as the description of the magnetic field detection device 10 described above.

In the magnetic field detection device 30A, a magnetosensitive axis passing through the center of the first magnetosensitive portion 26 (a magnetosensitive axis of the first magnetosensitive portion 26) and a magnetosensitive axis passing through the center of the third magnetosensitive portion 28 ( And the magnetic sensitive axis of the third magnetic sensitive part 28 intersect each other. Further, the axis of the magnetic sensing direction passing through the center of the second magnetic sensing part 27 (the magnetic sensing axis of the second magnetic sensing part 27) and the axis of the magnetic sensing direction passing through the center of the third magnetic sensing part 28 (third magnetic sensing part). And the magnetic sensitive axis of the portion 28 intersect each other.
Here, “intersect” means an imaginary straight line (magnetic axis) extending in the longitudinal direction of the strip shape showing the first magnetic sensing portion 26 and a longitudinal direction of the strip shape showing the third magnetic sensing portion 28. It is said that the extended virtual straight line (magnetic axis) intersects at one point (intersection) in the space. Similarly, the virtual straight line (magnetic axis) extended in the longitudinal direction of the rectangular shape showing the second magnetic sensor 27. And a virtual straight line (magnetic axis) extending in the longitudinal direction of the strip showing the third magnetic sensing portion 28 intersects at one point (intersection) in space. This angle of intersection is not necessarily a right angle. Each magnetosensitive axis passes through the center of each magnetosensitive part.
Thus, it is preferable that at least two of the first to third magnetic sensor parts included in the first to third magnetic sensor elements intersect with each other. In this case, the magnetic field at the intersection can be measured with higher accuracy.

  In the magnetic field detection device 30A, the magnetic sensing direction of the first magnetic sensing unit 26 and the magnetic sensing direction of the second magnetic sensing unit 27 provided on both main surfaces 23a and 23b of the first magnetic sensor element 23 are orthogonal to each other, Each is inclined at 45 ° with respect to the mounting substrate surface 21. Further, the magnetic sensing direction of the third magnetic sensing unit 28 constituting the second magnetic sensor element 24 is parallel to the mounting substrate surface 21, and the magnetic sensing direction of the first magnetic sensing unit 26 and the second magnetic sensing unit 27. Is orthogonal. For this reason, the first to third magnetic sensing units allow the magnetic field detection device 30 </ b> A to detect the magnetic field in the three axial magnetic sensing directions orthogonal to each other.

  The three magnetic sensing directions by the three axes are orthogonal to each other, but two of the three magnetic sensing directions are orthogonal to each other, and the remaining one magnetic sensing direction is the two magnetic sensing directions. It does not have to be orthogonal, and all three magnetic sensing directions need not be orthogonal to each other. If the three magnetosensitive directions are different from each other and all of the three magnetosensitive directions do not exist in the same plane, the magnetic field vector in the three-dimensional space detected by each magnetosensitive portion is signal-processed. It can be calculated by IC22.

  However, from the viewpoint of increasing measurement accuracy and simplifying the calculation in the signal processing IC 22, it is preferable that at least two of the three magnetosensitive directions are orthogonal to each other. More preferably, all are orthogonal to each other.

When at least two of the three magnetic sensing directions are orthogonal to each other, the magnetic sensing direction of the first magnetic sensing unit 26 and the magnetic sensing direction of the second magnetic sensing unit 27 in the first magnetic sensor element 23 are the same. It is preferable that they are orthogonal to each other.
Since the first magnetic sensing part 26 and the second magnetic sensing part 27 are respectively arranged on surfaces facing each other in a single substrate, the magnetic sensing directions of both the magnetic sensing parts are different when the first magnetic sensor element 23 is manufactured. It can be made in advance so as to be orthogonal. As a result, at the stage of mounting the first magnetic sensor element 23 on the mounting substrate surface 21, it is not necessary to adjust the relative magnetic sensing direction of the two magnetic sensing parts, so that it can be easily mounted.
On the other hand, the magnetic sensing direction of the third magnetic sensing unit 28 and the magnetic sensing direction of the first magnetic sensing unit 26 or the second magnetic sensing unit 27 arranged in the second magnetic sensor element 24 composed of another substrate are mutually set. In order to make them orthogonal, both magnetic sensor elements must be mounted while strictly adjusting the relative arrangement of the first magnetic sensor element 23 and the second magnetic sensor element 24 on the mounting substrate surface 21.

  The first magnetic sensor element 23 is composed of a single flat and rectangular parallelepiped substrate, but the substrate may be formed by bonding (bonding) two base materials. Two base materials are prepared in which the first magnetic sensing portion 26 is arranged on the front surface of the first base material and the second magnetic sensing portion 27 is arranged on the front surface of the second base material, By joining the back surfaces of the base materials, the first magnetic sensor element 23 made of a single flat plate and a rectangular parallelepiped substrate can be manufactured. When joining the two substrates, the first magnetic sensor element is adjusted to a desired relative direction between the magnetic sensing direction of the first magnetic sensing unit 26 and the magnetic sensing direction of the second magnetic sensing unit 27. 23 can be manufactured.

The angle θ formed by the first magnetic sensing portion 26 with the mounting substrate surface 21 and the angle φ formed by the second magnetic sensing portion 27 with the mounting substrate surface 21 may be the same angle or different angles.
When the formed angle θ is different from the formed angle φ, the sum of the formed angle θ and the formed angle φ is preferably 90 °. When the sum is 90 °, at least the magnetic sensitive direction of the first magnetic sensitive part 26 and the magnetic sensitive direction of the second magnetic sensitive part 27 can be made orthogonal, and further, the first to third magnetic sensitive parts. The three magnetosensitive directions can be orthogonal to each other.

  When the formed angle θ and the formed angle φ are the same angle, the formed angle θ and the formed angle φ are preferably 45 °. By being 45 °, at least the magnetic sensing direction of the first magnetic sensing part 26 and the magnetic sensing direction of the second magnetic sensing part 27 can be orthogonal to each other (further, the three first to third magnetic sensing parts). It is also possible to make the magnetic sensing directions all orthogonal to each other), and the first magnetic sensor element 23 including the first magnetic sensing part 26 and the second magnetic sensing part 27 can be made low-profile. This reduction in height will be described below.

  As described above, the first magnetic sensor element 23 is arranged in a vertical position in which both main surfaces provided with the first magnetic sensing portion 26 and the second magnetic sensing portion 27 are vertically set with respect to the mounting substrate surface 21. Has been. For this reason, the first magnetic sensor element 23 is taller than the second magnetic sensor element 24 and the signal processing IC 22 that are arranged flat. At this time, the first magnetic sensing part 26 and the second magnetic sensing part 27 constituting the first magnetic sensor element 23 protrude from the mounting substrate surface 21 at a height h (see FIG. 6). The height h is the highest when the angle θ (or the angle φ formed) between the first magnetic sensing portion 26 (or the second magnetic sensing portion 27) and the mounting substrate surface 21 is 90 ° (vertical). is there. The height h of the first magnetic sensing unit 26 in this case corresponds to the height H of the third magnetic sensing unit 108 in the conventional magnetic field detection device 100 (see FIG. 17).

  As the angle θ formed by the first magnetic sensing part 26 is changed from 90 ° to 45 °, the height h of the first magnetic sensing part 26 and the height of the first magnetic sensor element 23 can be gradually reduced ( (See FIG. 2). Specifically, when the formed angle θ is 45 °, the height h can be reduced by 0.75 times compared to the case where the formed angle θ is 90 °.

  When the angle θ formed by the first magnetic sensing portion 26 is further changed from 0 ° to 45 °, the height h of the first magnetic sensing portion 26 and the height of the first magnetic sensor element 23 are further reduced. sell. However, as described above, since the sum of the angle θ formed by the first magnetic sensing part 26 and the angle φ formed by the second magnetic sensing part 27 is preferably 90 °, the angle θ formed is smaller than 45 °. As a result, the angle φ formed is larger than 45 °, the height h of the second magnetic sensing part 27 is increased, and as a result, the height of the first magnetic sensor element 23 is also increased.

  Therefore, in order to reduce the height of the first magnetic sensor element 23 arranged vertically on the mounting substrate surface 21 (the height h of the first magnetic sensing part 26 and the second magnetic sensing part 27), It is preferable that both the angles θ and φ are 45 °. Thus, by lowering the height of the magnetic sensor elements arranged vertically, the magnetic field detection device 30A of the present invention can be made lower in height than the conventional magnetic field detection device 100 and further downsized.

<Fourth Embodiment of Magnetic Field Detection Device>
FIG. 7 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in the magnetic field detection device 40A (40) which is the fourth embodiment of the magnetic field detection device according to the present invention.

The magnetic field detection device 40 </ b> A includes at least a signal processing IC 32 and a first magnetic sensor element 33 on the mounting substrate surface 31.
On the mounting substrate surface 31, the first magnetic sensor elements 33 are arranged vertically. The first magnetic sensor element 33 arranged vertically is taller than the signal processing IC 32 arranged flat, and protrudes from the mounting substrate surface 31 to a higher position.

The substrate constituting the signal processing IC 32 is provided with one third magnetic sensing portion 38 shown in a rectangular shape, and the X-axis direction, which is the longitudinal direction of the rectangular shape, is the magnetic sensing direction of the third magnetic sensing portion 38. Indicates. This X-axis direction is parallel to the mounting substrate surface 31. The substrate surface on which the third magnetic sensing portion 38 of the signal processing IC 32 is provided is parallel to the mounting substrate surface 31.
In a single flat and rectangular parallelepiped substrate constituting the first magnetic sensor element 33, a first magnetic sensing portion 36 shown in a strip shape is provided on one main surface 33a, and on the other main surface 33b. Is provided with a second magnetic sensing part 37 shown in a strip shape. The longitudinal direction of each rectangular shape represents the magnetic sensing direction of each magnetic sensing part. The magnetic sensing direction of the first magnetic sensing part 36 is parallel to the Y-axis direction, and the magnetic sensing direction of the second magnetic sensing part 37 is parallel to the Z-axis. Each of the Y-axis direction and the Z-axis direction is inclined at an angle of 45 ° with respect to the mounting substrate surface 31. Each main surface provided with the first magnetic sensing part 36 and the second magnetic sensing part 37 of the first magnetic sensor element 33 is perpendicular to the mounting substrate surface 31.
The X-axis direction, Y-axis direction, and Z-axis direction are orthogonal to each other.

In the magnetic field detection device 40A, the first magnetic sensor elements 33 are arranged close to the vicinity of the signal processing IC 32. In addition, a first magnetic sensing part 36 and a second magnetic sensing part 37 provided on a single substrate constituting the first magnetic sensor element 33 are provided in the vicinity of each other. For this reason, all the magnetic sensitive parts provided in the first magnetic sensor element 33 and the signal processing IC 32 are arranged in the vicinity of each other.
That is, the first magnetic sensing part 36 has the second magnetic sensing part 37 and the third magnetic sensing part 38 disposed within the distance range of the length in the longitudinal direction. The first magnetic sensing part 36 and the third magnetic sensing part 38 are arranged within the distance range of the length in the longitudinal direction, and the third magnetic sensing part 38 is within the distance range of the length in the longitudinal direction, A first magnetic sensing part 36 and a second magnetic sensing part 37 are arranged.

  Since the magnetic sensitive parts are concentrated in the vicinity of each other and arranged in one pole in this way, the influence of the magnetic field gradient received by the magnetic sensitive parts can be made uniform, so that the measurement of the magnetic field detection device 40A can be performed. This is preferable because accuracy can be improved. This is the same as the description of the magnetic field detection device 10 described above.

In the magnetic field detection device 40A, a magnetosensitive axis passing through the center of the first magnetosensitive part 36 (a magnetosensitive axis of the first magnetosensitive part 36) and a magnetosensitive axis passing through the center of the third magnetosensitive part 38 ( And the magnetic sensitive axis of the third magnetic sensitive part 38 intersect each other. Further, the axis of the magnetic sensing direction passing through the center of the second magnetic sensing part 37 (the magnetic sensing axis of the second magnetic sensing part 37) and the axis of the magnetic sensing direction passing through the center of the third magnetic sensing part 38 (third magnetic sensing part). And the magnetic sensitive axis of the portion 38 intersect each other.
Here, “intersect” means an imaginary straight line (magnetic axis) extending in the longitudinal direction of the strip shape showing the first magnetic sensing portion 36 and a longitudinal direction of the strip shape showing the third magnetic sensing portion 38. This means that the extended virtual straight line (magnetic axis) intersects at one point (intersection) in the space. Similarly, the virtual straight line (magnetic axis) extended in the longitudinal direction of the rectangular shape showing the second magnetic sensing part 37. ) And a virtual straight line (magnetic sensitive axis) extending in the longitudinal direction of the strip shape indicating the third magnetic sensitive portion 38 intersects at one point (intersection) in space. This angle of intersection is not necessarily a right angle. Each magnetosensitive axis passes through the center of each magnetosensitive part.
Thus, it is preferable that at least two of the first to third magnetic sensor parts included in the first to third magnetic sensor elements intersect with each other. In this case, the magnetic field at the intersection can be measured with higher accuracy.

  In the magnetic field detection device 40A, the magnetic sensitive direction of the first magnetic sensitive part 36 and the magnetic sensitive direction of the second magnetic sensitive part 37 constituting the first magnetic sensor element 33 are orthogonal to each other, and are respectively relative to the mounting substrate surface 31. The inclination is 45 °. Further, the magnetic sensing direction of the third magnetic sensing unit 38 disposed on the upper surface of the signal processing IC 32 is parallel to the mounting substrate surface 31, and the magnetic sensing direction of the first magnetic sensing unit 36 and the second magnetic sensing unit 37. Is orthogonal. For this reason, the first to third magnetic sensing units allow the magnetic field detection device 40A to detect a magnetic field in three magnetic sensing directions orthogonal to each other.

  The three magnetic sensing directions by the three axes are orthogonal to each other, but two of the three magnetic sensing directions are orthogonal to each other, and the remaining one magnetic sensing direction is the two magnetic sensing directions. It does not have to be orthogonal, and all three magnetic sensing directions need not be orthogonal to each other. If the three magnetosensitive directions are different from each other and all of the three magnetosensitive directions do not exist in the same plane, the magnetic field vector in the three-dimensional space detected by each magnetosensitive portion is signal-processed. It can be calculated by the IC 32.

  However, from the viewpoint of increasing the measurement accuracy and simplifying the calculation in the signal processing IC 32, it is preferable that at least two of the three magnetosensitive directions are orthogonal to each other. More preferably, all are orthogonal to each other.

  When at least two of the three magnetic sensing directions are perpendicular to each other, the magnetic sensing direction of the first magnetic sensing part 36 and the magnetic sensing direction of the second magnetic sensing part 37 in the first magnetic sensor element 33 are the same. It is preferable that they are orthogonal to each other. The reason for this preference is the same as in the case of the first magnetic sensor element 23 of the third embodiment described above, and it is easy to mount the first magnetic sensor element 33 on the mounting board surface 31.

  The first magnetic sensor element 33 is composed of a single flat and rectangular parallelepiped substrate, but the substrate may be formed by bonding (bonding) two base materials. Two base materials are prepared in which the first magnetic sensing portion 36 is arranged on the front surface of the first base material and the second magnetic sensing portion 37 is arranged on the front surface of the second base material, By joining the back surfaces of the base materials, the first magnetic sensor element 33 composed of a single flat plate and a rectangular parallelepiped substrate can be manufactured. When joining the two base materials, the relative direction between the magnetic sensing direction of the first magnetic sensing part 36 and the magnetic sensing direction of the second magnetic sensing part 37 is adjusted as desired to obtain the first magnetic sensor element. 33 can be manufactured.

The angle θ formed by the first magnetic sensing portion 36 with the mounting substrate surface 31 and the angle φ formed by the second magnetic sensing portion 37 with the mounting substrate surface 31 may be the same angle or different angles.
When the formed angle θ is different from the formed angle φ, the sum of the formed angle θ and the formed angle φ is preferably 90 °. When the sum is 90 °, at least the magnetic sensitive direction of the first magnetic sensitive part 16 and the magnetic sensitive direction of the second magnetic sensitive part 17 can be orthogonal to each other, and further the first to third magnetic sensitive parts. The three magnetosensitive directions can be orthogonal to each other.

  When the formed angle θ and the formed angle φ are the same angle, the formed angle θ and the formed angle φ are preferably 45 °. By being 45 °, at least the magnetic sensing direction of the first magnetic sensing part 36 and the magnetic sensing direction of the second magnetic sensing part 37 can be orthogonal to each other (further, the three of the first to third magnetic sensing parts). It is also possible to make the magnetic sensing directions all orthogonal to each other), and the first magnetic sensor element 33 provided with the first magnetic sensing part 36 and the second magnetic sensing part 37 can be reduced in height. The description about this low profile is the same as that of the magnetic field detection apparatus 30 which is 3rd embodiment mentioned above.

  In order to reduce the height of the first magnetic sensor element 33 arranged vertically on the mounting substrate surface 31 (the height h of the first magnetic sensing part 36 and the second magnetic sensing part 37), Both θ and φ are preferably 45 °. Thus, by lowering the height of the magnetic sensor elements arranged vertically, the magnetic field detection device 40A of the present invention can be made lower in height than the conventional magnetic field detection device 100, and further downsized.

Further, by providing the third magnetic sensing portion 38 on the upper surface of the substrate of the signal processing IC 32, the magnetic sensor element corresponding to the second magnetic sensor element 24 of the third embodiment described above is not necessary in the fourth embodiment. . That is, there is one magnetic sensor element on the mounting substrate surface 31 of the magnetic field detection device 40, and no flat magnetic sensor element is arranged. For this reason, the area occupied by the magnetic sensor element on the mounting substrate surface 31 can be reduced. Therefore, the magnetic field detection device 40A can be further downsized than the magnetic field detection device 30.
Even if the second magnetic sensor element 34 provided with the third magnetic sensing unit 38 is stacked on the signal processing IC 32 as in the magnetic field detection device 40B (40) shown in FIG. Is possible.

Further, the first magnetic sensor element 33 may be arranged on the upper surface of the substrate of the signal processing IC 32 as in the magnetic field detection device 40C (40) shown in FIG.
FIG. 9 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in the magnetic field detection device 40C (40) according to the fourth embodiment of the present invention. In the perspective view, the same components as those of the magnetic field detection device 40A (40) described above are denoted by the same reference numerals.
In the magnetic field detection device 40 </ b> C (40), the first magnetic sensor element 33 is disposed on the mounting substrate surface 31. However, a signal processing IC 32 is disposed between the mounting substrate 31 and the first magnetic sensor element 33.

  Also in the magnetic field detection device 40C (40), the third magnetic sensing unit 38, the first magnetic sensing unit 36, and the second magnetic sensing unit 37 are arranged in the vicinity of each other, and therefore, the magnetic field gradient received by each magnetic sensing unit. The influence can be made uniform, and the measurement accuracy of the magnetic field detection device 40C can be increased. Furthermore, the area occupied by the magnetic sensor element on the mounting substrate surface 31 can be eliminated. Therefore, the magnetic field detection device 40C can be further downsized than the magnetic field detection devices 30, 40A, and 40B. Further, since the wiring between the first magnetic sensor element 33 and the signal processing IC 32 can be made shorter, signal deterioration that can occur when the measurement signal is transmitted to the signal processing IC 32 can be further suppressed, and the measurement accuracy can be improved. .

  When compared with the magnetic field detection devices 40A and 40B, the magnetic field detection device 40C can reduce the area of the mounting substrate surface 31, but the height of the first magnetic sensor element 33 from the mounting substrate surface 31 is the thickness of the signal processing IC 32. The height is increased by the amount (the height is increased by the height indicated by α in FIG. 9). That is, when both are compared, the reduction effect of the mounting substrate surface and the suppression of the increase in the height at which the magnetic sensor element protrudes from the mounting substrate surface are in a trade-off relationship. Which is prioritized may be appropriately selected according to the design of the device incorporating the magnetic field detection device. Whichever one is selected, the magnetic field detection devices 40A, 40B, and 40C can be made smaller than the magnetic field detection device 30.

<Fifth Embodiment of Magnetic Field Detection Device>
FIG. 10 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in the magnetic field detection device 50A (50) which is the fifth embodiment of the magnetic field detection device according to the present invention.

The magnetic field detection device 50 </ b> A includes at least a signal processing IC 42, a first magnetic sensor element 43, and a second magnetic sensor element 44 on the mounting substrate surface 41.
On the mounting substrate surface 41, the first magnetic sensor elements 43 are arranged horizontally (horizontal placement), and the second magnetic sensor elements 44 are arranged vertically. The second magnetic sensor element 44 arranged vertically is taller than the first magnetic sensor element 43 and signal processing IC 42 arranged flat, and protrudes from the mounting board surface 41 to a higher position.

On a specific surface (one main surface) of a single flat plate and rectangular parallelepiped substrate constituting the first magnetic sensor element 43, a first magnetic sensing portion 46 and a second magnetic sensing portion 47 shown in a strip shape are provided. Is provided. The longitudinal direction of each rectangular shape represents the magnetic sensing direction of each magnetic sensing part. The magnetic sensitive direction of the first magnetic sensitive part 46 is parallel to the X axis direction, and the magnetic sensitive direction of the second magnetic sensitive part 47 is parallel to the Y axis. The X axis direction and the Y axis direction are parallel to the mounting substrate surface 41. The board surface on which the first magnetic sensing part 46 and the second magnetic sensing part 47 of the first magnetic sensor element 43 are provided is perpendicular to the mounting board surface 41.
On the specific surface of the flat and rectangular parallelepiped substrate constituting the second magnetic sensor element 44, one third magnetic sensing portion 48 shown in a strip shape is provided, and Z is the longitudinal direction of the strip shape. The axial direction indicates the magnetic sensing direction of the third magnetic sensing unit 48. This Z-axis direction is perpendicular to the mounting substrate surface 41. The board surface provided with the third magnetic sensing part 48 of the second magnetic sensor element 44 is perpendicular to the mounting board surface 41.
The X-axis direction, Y-axis direction, and Z-axis direction are orthogonal to each other.

In the magnetic field detection device 50A, the first magnetic sensor element 43 and the second magnetic sensor element 44 are arranged close together in the vicinity of the signal processing IC 42. Further, a first magnetic sensing part 46 and a second magnetic sensing part 47 provided on a single substrate constituting the first magnetic sensor element 43 are provided in the vicinity of each other. For this reason, all the magnetic sensitive parts provided in the board | substrate which comprises each magnetic sensor element are arrange | positioned in the vicinity of each other.
That is, the first magnetic sensing part 46 has the second magnetic sensing part 47 disposed within the distance range of the length in the longitudinal direction, and the second magnetic sensing part 47 has a distance range of the length in the longitudinal direction. The first magnetic sensing part 46 and the third magnetic sensing part 48 are arranged within the distance, and the third magnetic sensing part 48 has the second magnetic sensing part 47 arranged within the distance range of the length in the longitudinal direction. Yes.

  Since the magnetic sensitive parts are concentrated in the vicinity of each other and arranged in one pole in this manner, the influence of the magnetic field gradient received by the magnetic sensitive parts can be made uniform, so that the measurement of the magnetic field detection device 50A can be performed. This is preferable because accuracy can be improved. This is the same as the description of the magnetic field detection device 10 described above.

In the magnetic field detection device 50 </ b> A, the axis of the magnetic sensing direction passing through the center of the first magnetic sensing unit 46 (the magnetic sensing axis of the first magnetic sensing unit 46) and the axis of the magnetic sensing direction passing through the center of the second magnetic sensing unit 47 ( And the magnetic sensitive axis of the second magnetic sensitive part 47 intersect each other. Further, the axis of the magnetic sensing direction passing through the center of the second magnetic sensing part 47 (the magnetic sensing axis of the second magnetic sensing part 47) and the axis of the magnetic sensing direction passing through the center of the third magnetic sensing part 48 (third magnetic sensing part). And the magnetic sensitive axis of the portion 48 intersect each other.
Here, “intersect” means an imaginary straight line (magnetic axis) extending in the longitudinal direction of the strip shape showing the first magnetic sensing portion 46 and a longitudinal direction of the strip shape showing the second magnetic sensing portion 47. This means that the extended virtual straight line (magnetic axis) intersects at one point (intersection) in the space. Similarly, the virtual straight line (magnetic axis) extended in the longitudinal direction of the rectangular shape showing the second magnetic sensor 47. ) And an imaginary straight line (magnetic sensitive axis) extending in the longitudinal direction of the strip shape indicating the third magnetic sensitive part 48 intersects at one point (intersection) in space. This angle of intersection is not necessarily a right angle. Each magnetosensitive axis passes through the center of each magnetosensitive part.
Thus, it is preferable that at least two of the first to third magnetic sensor parts included in the first to third magnetic sensor elements intersect with each other. In this case, the magnetic field at the intersection can be measured with higher accuracy.

  In the magnetic field detection device 50A, the magnetic sensing direction of the first magnetic sensing unit 46 and the magnetic sensing direction of the second magnetic sensing unit 47 provided in the first magnetic sensor element 43 are orthogonal to each other and are respectively relative to the mounting substrate surface 41. Parallel. Further, the magnetic sensing direction of the third magnetic sensing part 48 constituting the second magnetic sensor element 44 is perpendicular to the mounting substrate surface 41, and the magnetic sensing direction of the first magnetic sensing part 46 and the second magnetic sensing part 47. Is orthogonal. For this reason, the first to third magnetic sensing units allow the magnetic field detection device 50A to detect a magnetic field in three axial magnetic sensing directions orthogonal to each other.

  The three magnetic sensing directions by the three axes are orthogonal to each other, but two of the three magnetic sensing directions are orthogonal to each other, and the remaining one magnetic sensing direction is the two magnetic sensing directions. It does not have to be orthogonal, and all three magnetic sensing directions need not be orthogonal to each other. If the three magnetosensitive directions are different from each other and all of the three magnetosensitive directions do not exist in the same plane, the magnetic field vector in the three-dimensional space detected by each magnetosensitive portion is signal-processed. It can be calculated by IC42.

  However, from the viewpoint of increasing measurement accuracy and simplifying the calculation in the signal processing IC 42, it is preferable that at least two of the three magnetosensitive directions are orthogonal to each other. More preferably, all are orthogonal to each other.

When at least two of the three magnetic sensing directions are orthogonal to each other, the magnetic sensing direction of the first magnetic sensing part 46 and the magnetic sensing direction of the second magnetic sensing part 47 in the first magnetic sensor element 43 are the same. It is preferable that they are orthogonal to each other.
Since the first magnetic sensing part 46 and the second magnetic sensing part 47 are arranged on a specific surface of a single substrate, the magnetic sensing directions of the two magnetic sensing parts are orthogonal to each other when the first magnetic sensor element 43 is manufactured. Can be built in advance. As a result, at the stage of mounting the first magnetic sensor element 43 on the mounting substrate surface 41, it is not necessary to adjust the relative magnetic sensing direction of the two magnetic sensing parts, so that it can be easily mounted.
On the other hand, the magnetic sensing direction of the third magnetic sensing part 48 and the magnetic sensing direction of the first magnetic sensing part 46 or the second magnetic sensing part 47 arranged on the second magnetic sensor element 44 constituted by another substrate are mutually set. In order to make them orthogonal, both magnetic sensor elements must be mounted while strictly adjusting the relative arrangement of the first magnetic sensor element 43 and the second magnetic sensor element 44 on the mounting board surface 41.

Next, the magnetic field detection device 50A and the conventional magnetic field detection device 100 are compared with respect to the area occupied by the magnetic sensor element on the mounting substrate surface.
Since the first magnetic sensing unit 46 and the second magnetic sensing unit 47 in the magnetic field detection device 50A are both provided in the first magnetic sensor element 43 formed of a single substrate, the mounting substrate surface 41 is provided only at one place. Occupy. On the other hand, the first magnetic sensing unit 106 and the second magnetic sensing unit 107 in the conventional magnetic field detection device 100 are divided into the first magnetic sensor element 103 and the second magnetic sensor element 104, and thus are individually mounted. The substrate surface 101 is occupied in two places.
Therefore, the area occupied by the magnetic sensor element on the mounting substrate surface is smaller in the magnetic field detection device 50A.
In the magnetic field detection device 50A, since the first magnetic sensing unit 46 and the second magnetic sensing unit 47 are provided on a single substrate, the area of the mounting substrate can be reduced while improving the measurement accuracy. It can be made smaller than the magnetic field detection device 100.

  Further, even if the first magnetic sensor element 43 is changed to the vertical position as in the magnetic field detection device 50B (50) shown in FIG. 11, the measurement accuracy of the magnetic field detection device 50B is increased similarly to the magnetic field detection device 50A. It can be downsized.

  FIG. 11 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in the magnetic field detection device 50B (10) according to the fifth embodiment of the present invention. In the perspective view, the same components as those of the magnetic field detection device 50A (50) described above are denoted by the same reference numerals.

The magnetic field detection device 50 </ b> B (50) includes at least a signal processing IC 42, a first magnetic sensor element 43, and a second magnetic sensor element 44 on the mounting substrate surface 41.
On the mounting substrate surface 41, the first magnetic sensor elements 43 are arranged vertically, and the second magnetic sensor elements 44 are arranged horizontally (horizontally).
In addition, the first to third magnetic sensing parts constituting each magnetic sensor element are arranged in the vicinity of each other. The first magnetic sensing part 46 has the second magnetic sensing part 47 arranged within the distance range of the length in the longitudinal direction, and the second magnetic sensing part 47 is within the distance range of the length in the longitudinal direction. The first magnetic sensing part 46 and the third magnetic sensing part 48 are arranged, and the second magnetic sensing part 47 is arranged within the distance range of the length in the longitudinal direction of the third magnetic sensing part 48.

In the magnetic field detection device 50B, the axis of the magnetic sensing direction passing through the center of the first magnetic sensing unit 46 (the magnetic sensing axis of the first magnetic sensing unit 46) and the axis of the magnetic sensing direction passing through the center of the second magnetic sensing unit 47 ( And the magnetic sensitive axis of the second magnetic sensitive part 47 intersect each other.
Here, “intersect” means an imaginary straight line (magnetic axis) extending in the longitudinal direction of the strip shape showing the first magnetic sensing portion 46 and a longitudinal direction of the strip shape showing the second magnetic sensing portion 47. It means that the extended virtual straight line (magnetic axis) intersects at one point (intersection) in space. This angle of intersection is not necessarily a right angle. Each magnetosensitive axis passes through the center of each magnetosensitive part.
Thus, it is preferable that at least two of the first to third magnetic sensor parts included in the first to third magnetic sensor elements intersect with each other. In this case, the magnetic field at the intersection can be measured with higher accuracy.

  In the magnetic field detection device 50B, similarly to the magnetic field detection device 50A, by providing the first magnetic sensing unit 46 and the second magnetic sensing unit 47 on a single substrate, the area of the mounting substrate can be reduced while improving measurement accuracy. Therefore, it can be made smaller than the conventional magnetic field detection device 100.

  Further, as in the magnetic field detection device 50C (50) shown in FIG. 12, the relative arrangement of the first to third magnetic sensing units is changed by changing the relative arrangement of the first magnetic sensor element 43 and the second magnetic sensor element 44. Even if the arrangement is changed, similarly to the magnetic field detection devices 50A and 50B, it is possible to reduce the size while improving the measurement accuracy of the magnetic field detection device 50C.

  FIG. 12 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in the magnetic field detection device 50C (50) according to the fifth embodiment of the present invention. In the perspective view, the same components as those of the magnetic field detection device 50A (50) described above are denoted by the same reference numerals.

The magnetic field detection device 50 </ b> C (50) includes at least a signal processing IC 42, a first magnetic sensor element 43, and a second magnetic sensor element 44 on the mounting substrate surface 41.
On the mounting substrate surface 41, the first magnetic sensor elements 43 are arranged horizontally (horizontal placement), and the second magnetic sensor elements 44 are arranged vertically.
The magnetic sensing direction of the first magnetic sensing unit 46 and the magnetic sensing direction of the second magnetic sensing unit 47 provided in the first magnetic sensor element 43 are orthogonal to each other and parallel to the mounting substrate surface 41. Further, the magnetic sensing direction of the third magnetic sensing part 48 constituting the second magnetic sensor element 44 is perpendicular to the mounting substrate surface 41, and the magnetic sensing direction of the first magnetic sensing part 46 and the second magnetic sensing part 47. Is orthogonal. For this reason, it is possible to detect a magnetic field by the 1st-3rd magnetosensitive part in the 3-axis magnetosensitive direction orthogonal to each other.

  In addition, the first to third magnetic sensing parts constituting each magnetic sensor element are arranged in the vicinity of each other. The first magnetic sensing part 46 has a second magnetic sensing part 47 and a third magnetic sensing part 48 arranged within a distance range of the length in the longitudinal direction, and the second magnetic sensing part 47 is arranged in the longitudinal direction. The first magnetic sensing part 46 and the third magnetic sensing part 48 are arranged within the distance range of the length of the first magnetic sensing part 48, and the third magnetic sensing part 48 is within the distance range of the length in the longitudinal direction thereof. A magnetic sensitive part 46 and a second magnetic sensitive part 47 are arranged.

In the magnetic field detection device 50 </ b> C, the axis of the magnetic sensing direction passing through the center of the first magnetic sensing unit 46 (the magnetic sensing axis of the first magnetic sensing unit 46) and the axis of the magnetic sensing direction passing through the center of the second magnetic sensing unit 47 ( The magnetic sensing axis of the second magnetic sensing part 47 and the axis of the magnetic sensing direction passing through the center of the third magnetic sensing part 48 (the magnetic sensing axis of the third magnetic sensing part 48) all cross each other.
Here, “all intersect with each other” means a virtual straight line (magnetic axis) extending in the longitudinal direction of the strip shape showing the first magnetic sensing portion 46 and the longitudinal length of the strip shape showing the second magnetic sensing portion 47. A virtual straight line (magnetic axis) extending in the direction intersects with a virtual straight line (magnetic axis) extending in the longitudinal direction of the rectangular shape showing the third magnetic sensing part 48 at one point (intersection) in space. Say. This angle of intersection is not necessarily a right angle. Each magnetosensitive axis passes through the center of each magnetosensitive part.
As described above, it is more preferable that all the magnetic sensitive axes of the first to third magnetic sensing parts included in the first to third magnetic sensor elements intersect each other. In this case, the magnetic field at the intersection can be measured with higher accuracy.

In the magnetic field detection device 50C, similarly to the magnetic field detection devices 50A and 50B, by providing the first magnetic sensing unit 46 and the second magnetic sensing unit 47 on a single substrate, the area of the mounting substrate can be increased while improving measurement accuracy. Since it can reduce, it can reduce in size rather than the conventional magnetic field detection apparatus 100. FIG.
In the magnetic field detection device 50C, all of the first to third magnetic sensing parts are arranged within a distance range of the length in the longitudinal direction of each other. For this reason, the measurement accuracy can be improved as compared with the magnetic field detection devices 50A and 50B.

<Sixth Embodiment of Magnetic Field Detection Device>
FIG. 13 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in the magnetic field detection device 60A (60) as an example of the sixth embodiment of the magnetic field detection device according to the present invention.

The magnetic field detection device 60 </ b> A includes at least a signal processing IC 52 and a first magnetic sensor element 53 on the mounting substrate surface 51.
On the mounting substrate surface 51, the first magnetic sensor elements 53 are arranged vertically. The first magnetic sensor element 53 arranged vertically is taller than the signal processing IC 52 arranged horizontally, and protrudes from the mounting board surface 51 to a higher position.

A flat and rectangular parallelepiped substrate constituting the signal processing IC 52 is provided with a first magnetic sensing part 56 and a second magnetic sensing part 57 shown in a strip shape. The longitudinal direction of each rectangular shape represents the magnetic sensing direction of each magnetic sensing part. The magnetic sensing direction of the first magnetic sensing unit 56 is parallel to the X-axis direction, and the magnetic sensing direction of the second magnetic sensing unit 57 is parallel to the Y-axis. The X-axis direction and the Y-axis direction are parallel to the mounting substrate surface 51, respectively. The board surface provided with the first magnetic sensing part 56 and the second magnetic sensing part 57 of the signal processing IC 52 is parallel to the mounting board surface 51.
On a specific surface of the flat and rectangular parallelepiped substrate constituting the first magnetic sensor element 53, a third magnetic sensing portion 58 shown in a strip shape is provided, and the Z-axis direction which is the longitudinal direction of the strip shape Represents the magnetic sensing direction of the third magnetic sensing part 58. This Z-axis direction is perpendicular to the mounting substrate surface 51. The board surface provided with the third magnetic sensing part 58 of the first magnetic sensor element 53 is perpendicular to the mounting board surface 51.
The X-axis direction, Y-axis direction, and Z-axis direction are orthogonal to each other.

In the magnetic field detection device 60 </ b> A, the first magnetic sensor elements 53 are arranged close to the vicinity of the signal processing IC 52. Further, a first magnetic sensing part 56 and a second magnetic sensing part 57 provided on a single substrate constituting the signal processing IC 52 are provided in the vicinity of each other. For this reason, all the magnetic sensitive parts provided in the first magnetic sensor element 53 and the signal processing IC 52 are arranged in the vicinity of each other.
That is, the first magnetic sensing part 56 has the second magnetic sensing part 57 and the third magnetic sensing part 58 arranged within the distance range of the length in the longitudinal direction. The first magnetic sensing part 56 and the third magnetic sensing part 58 are arranged within the distance range of the length in the longitudinal direction, and the third magnetic sensing part 58 is within the distance range of the length in the longitudinal direction, A first magnetic sensing part 56 and a second magnetic sensing part 57 are arranged.

  Since the magnetic sensitive parts are concentrated in the vicinity of each other and arranged in one pole in this way, the influence of the magnetic field gradient received by the magnetic sensitive parts can be made uniform, so that the measurement of the magnetic field detection device 60A can be performed. This is preferable because accuracy can be improved. This is the same as the description of the magnetic field detection device 10 described above.

In the magnetic field detection device 60 </ b> A, the axis of the magnetic sensing direction passing through the center of the first magnetic sensing unit 56 (the magnetic sensing axis of the first magnetic sensing unit 56) and the axis of the magnetic sensing direction passing through the center of the second magnetic sensing unit 57 ( And the magnetic sensitive axis of the second magnetic sensitive part 57 intersect each other.
Here, “intersect” means an imaginary straight line (magnetic axis) extending in the longitudinal direction of the strip shape showing the first magnetic sensing portion 56 and a longitudinal direction of the strip shape showing the second magnetic sensing portion 57. It means that the extended virtual straight line (magnetic axis) intersects at one point (intersection) in space. This angle of intersection is not necessarily a right angle. Each magnetosensitive axis passes through the center of each magnetosensitive part.
As described above, it is preferable that at least two of the first and third magnetic sensing units included in the first sensor element and the signal processing IC 52 intersect with each other. In this case, the magnetic field at the intersection can be measured with higher accuracy.

  In the magnetic field detection device 60A, the magnetic sensing direction of the first magnetic sensing unit 56 and the magnetic sensing direction of the second magnetic sensing unit 57 arranged on the upper surface of the substrate constituting the signal processing IC 52 are orthogonal to each other, and are mounted on the mounting substrate surface. 51 in parallel. Further, the magnetic sensing direction of the third magnetic sensing part 58 arranged in the first magnetic sensor element 53 is perpendicular to the mounting substrate surface 51, and the magnetic sensing of the first magnetic sensing part 56 and the second magnetic sensing part 57 is performed. It is orthogonal to the direction. For this reason, the first to third magnetic sensing units allow the magnetic field detection device 60A to detect a magnetic field in three axial magnetic sensing directions orthogonal to each other.

  The three magnetic sensing directions by the three axes are orthogonal to each other, but two of the three magnetic sensing directions are orthogonal to each other, and the remaining one magnetic sensing direction is the two magnetic sensing directions. It does not have to be orthogonal, and all three magnetic sensing directions need not be orthogonal to each other. If the three magnetosensitive directions are different from each other and all of the three magnetosensitive directions do not exist in the same plane, the magnetic field vector in the three-dimensional space detected by each magnetosensitive portion is signal-processed. It can be calculated by IC52.

  However, from the viewpoint of increasing the measurement accuracy and simplifying the calculation in the signal processing IC 52, it is preferable that at least two of the three magnetosensitive directions are orthogonal to each other. More preferably, all are orthogonal to each other.

  When at least two of the three magnetic sensing directions are orthogonal to each other, the magnetic sensing direction of the first magnetic sensing unit 56 and the magnetic sensing direction of the second magnetic sensing unit 57 in the signal processing IC 52 are orthogonal to each other. It is preferable. The reason for this preference is the same as in the case of the first magnetic sensor element 3 of the first embodiment described above, and it is easy to mount the signal processing IC 52 on the mounting board surface 51.

  Thus, by providing the first magnetic sensing part 56 and the second magnetic sensing part 57 on the upper surface of the substrate of the signal processing IC 52, a magnetic sensor element corresponding to the first magnetic sensor element 43 of the fifth embodiment described above. Is not necessary in the sixth embodiment. That is, there is one magnetic sensor element on the mounting substrate surface 51 of the magnetic field detection device 60, and no flat magnetic sensor element is arranged. For this reason, the area occupied by the magnetic sensor element on the mounting substrate surface 51 can be reduced. Therefore, the magnetic field detection device 60A can be further downsized than the magnetic field detection devices 10 and 50.

  FIG. 14 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in a magnetic field detection device 60B (60) which is another example of the sixth embodiment of the magnetic field detection device according to the present invention.

The magnetic field detection device 60 </ b> B includes at least a signal processing IC 52 and a first magnetic sensor element 53 on the mounting substrate surface 51.
On the mounting substrate surface 51, the first magnetic sensor elements 53 are arranged vertically. The first magnetic sensor element 53 arranged vertically is taller than the signal processing IC 52 arranged horizontally, and protrudes from the mounting board surface 51 to a higher position.

A flat and rectangular parallelepiped substrate constituting the signal processing IC 52 is provided with a first magnetic sensing part 56 and a second magnetic sensing part 57 shown in a strip shape. The longitudinal direction of each rectangular shape represents the magnetic sensing direction of each magnetic sensing part. The magnetic sensing direction of the first magnetic sensing unit 56 is parallel to the X-axis direction, and the magnetic sensing direction of the second magnetic sensing unit 57 is parallel to the Y-axis. The X-axis direction and the Y-axis direction are parallel to the mounting substrate surface 51, respectively. The board surface provided with the first magnetic sensing part 56 and the second magnetic sensing part 57 of the signal processing IC 52 is parallel to the mounting board surface 51.
On a specific surface of the flat and rectangular parallelepiped substrate constituting the first magnetic sensor element 53, a third magnetic sensing portion 58 shown in a strip shape is provided, and the Z-axis direction which is the longitudinal direction of the strip shape Represents the magnetic sensing direction of the third magnetic sensing part 58. This Z-axis direction is perpendicular to the mounting substrate surface 51. The board surface provided with the third magnetic sensing part 58 of the first magnetic sensor element 53 is perpendicular to the mounting board surface 51.
The X-axis direction, Y-axis direction, and Z-axis direction are orthogonal to each other.

In the magnetic field detection device 60B, the first magnetic sensor elements 53 are arranged close to the vicinity of the signal processing IC 52. Further, a first magnetic sensing part 56 and a second magnetic sensing part 57 provided on a single substrate constituting the signal processing IC 52 are provided in the vicinity of each other. For this reason, all the magnetic sensitive parts provided in the first magnetic sensor element 53 and the signal processing IC 52 are arranged in the vicinity of each other.
That is, the first magnetic sensing part 56 has the second magnetic sensing part 57 and the third magnetic sensing part 58 arranged within the distance range of the length in the longitudinal direction. The first magnetic sensing part 56 and the third magnetic sensing part 58 are arranged within the distance range of the length in the longitudinal direction, and the third magnetic sensing part 58 is within the distance range of the length in the longitudinal direction, A first magnetic sensing part 56 and a second magnetic sensing part 57 are arranged.

  Since the magnetic sensitive parts are concentrated in the vicinity of each other and arranged in one pole in this way, the influence of the magnetic field gradient received by the magnetic sensitive parts can be made uniform, so that the measurement of the magnetic field detection device 60B can be performed. This is preferable because accuracy can be improved. This is the same as the description of the magnetic field detection device 10 described above.

In the magnetic field detection device 60B, the axis of the magnetic sensing direction passing through the center of the first magnetic sensing unit 56 (the magnetic sensing axis of the first magnetic sensing unit 56) and the axis of the magnetic sensing direction passing through the center of the second magnetic sensing unit 57 ( The magnetic sensitive axis of the second magnetic sensitive part 57) and the axis of the magnetic sensitive direction passing through the center of the third magnetic sensitive part 58 (the magnetic sensitive axis of the third magnetic sensitive part 58) all cross each other.
Here, “all intersect with each other” means a virtual straight line (magnetic axis) extending in the longitudinal direction of the strip shape showing the first magnetic sensing portion 56 and the longitudinal shape of the strip shape showing the second magnetic sensing portion 57. A virtual straight line (magnetic axis) extending in the direction intersects with a virtual straight line (magnetic axis) extending in the longitudinal direction of the strip showing the third magnetic sensing part 58 at one point (intersection) in space. Say. This angle of intersection is not necessarily a right angle. Each magnetosensitive axis passes through the center of each magnetosensitive part.
As described above, it is more preferable that all the magnetic sensitive axes of the first to third magnetic sensing parts included in the first to third magnetic sensor elements intersect each other. In this case, the magnetic field at the intersection can be measured with higher accuracy.

  In the magnetic field detection device 60B, the magnetic sensing direction of the first magnetic sensing unit 56 and the magnetic sensing direction of the second magnetic sensing unit 57 arranged on the upper surface of the substrate constituting the signal processing IC 52 are orthogonal to each other, and are mounted on the mounting substrate surface. 51 in parallel. Further, the magnetic sensing direction of the third magnetic sensing part 58 arranged in the first magnetic sensor element 53 is perpendicular to the mounting substrate surface 51, and the magnetic sensing of the first magnetic sensing part 56 and the second magnetic sensing part 57 is performed. It is orthogonal to the direction. For this reason, the first to third magnetic sensing units allow the magnetic field detection device 60B to detect a magnetic field in the three axes of magnetic sensing directions orthogonal to each other.

  The three magnetic sensing directions by the three axes are orthogonal to each other, but two of the three magnetic sensing directions are orthogonal to each other, and the remaining one magnetic sensing direction is the two magnetic sensing directions. It does not have to be orthogonal, and all three magnetic sensing directions need not be orthogonal to each other. If the three magnetosensitive directions are different from each other and all of the three magnetosensitive directions do not exist in the same plane, the magnetic field vector in the three-dimensional space detected by each magnetosensitive portion is signal-processed. It can be calculated by IC52.

  However, from the viewpoint of increasing the measurement accuracy and simplifying the calculation in the signal processing IC 52, it is preferable that at least two of the three magnetosensitive directions are orthogonal to each other. More preferably, all are orthogonal to each other.

  When at least two of the three magnetic sensing directions are orthogonal to each other, the magnetic sensing direction of the first magnetic sensing unit 56 and the magnetic sensing direction of the second magnetic sensing unit 57 in the signal processing IC 52 are orthogonal to each other. It is preferable. The reason for this preference is the same as in the case of the first magnetic sensor element 3 of the first embodiment described above, and it is easy to mount the signal processing IC 52 on the mounting board surface 51.

Thus, by providing the first magnetic sensing part 56 and the second magnetic sensing part 57 on the upper surface of the substrate of the signal processing IC 52, a magnetic sensor element corresponding to the first magnetic sensor element 43 of the fifth embodiment described above. Is not necessary in the sixth embodiment. That is, there is one magnetic sensor element on the mounting substrate surface 51 of the magnetic field detection device 60, and no flat magnetic sensor element is arranged. For this reason, the area occupied by the magnetic sensor element on the mounting substrate surface 51 can be reduced. Therefore, the magnetic field detection device 60B can be further downsized than the magnetic field detection devices 10 and 50.
15, the second magnetic sensor element 54 provided with the first magnetic sensing unit 56 and the second magnetic sensing unit 57 is stacked on the signal processing IC 52 and installed. However, similar miniaturization is possible.

Further, the first magnetic sensor element 53 may be arranged on the upper surface of the substrate of the signal processing IC 52 as in the magnetic field detection device 60D (60) shown in FIG.
FIG. 16 is a perspective view showing a layout of magnetic sensor elements and signal processing ICs in the magnetic field detection device 60D (60) according to the sixth embodiment of the present invention. In the perspective view, the same components as those of the magnetic field detection device 60A (60) described above are denoted by the same reference numerals.
In the magnetic field detection device 60 </ b> D (60), the first magnetic sensor element 53 is disposed on the mounting substrate surface 51. However, the signal processing IC 52 is disposed between the mounting substrate 51 and the first magnetic sensor element 53.

  Also in the magnetic field detection device 60D (60), the first magnetic sensing unit 56, the second magnetic sensing unit 57, and the third magnetic sensing unit 58 are arranged in the vicinity of each other, so that the magnetic field gradient received by each magnetic sensing unit is the same. The influence can be made uniform, and the measurement accuracy of the magnetic field detection device 60D can be increased. Furthermore, the area occupied by the magnetic sensor element on the mounting substrate surface 51 can be eliminated. Therefore, the magnetic field detection device 60D can be further downsized than the magnetic field detection devices 10, 50, 60A, 60B, and 60C. In addition, since the wiring between the first magnetic sensor element 53 and the signal processing IC 52 can be made shorter, signal deterioration that can occur when the measurement signal is transmitted to the signal processing IC 52 can be further suppressed, and the measurement accuracy can be improved. .

  When compared with the magnetic field detection devices 60A, 60B, and 60C, the magnetic field detection device 60D can reduce the area of the mounting substrate surface 51, but the height of the first magnetic sensor element 53 from the mounting substrate surface 51 is the signal processing IC 52. (The height is increased by the height indicated by α in FIG. 16). That is, when both are compared, the reduction effect of the mounting substrate surface and the suppression of the increase in the height at which the magnetic sensor element protrudes from the mounting substrate surface are in a trade-off relationship. Which is prioritized may be appropriately selected according to the design of the device incorporating the magnetic field detection device. Whichever one is selected, the magnetic field detection devices 60A, 60B, 60C, and 60D can be made smaller than the magnetic field detection devices 10 and 50.

  The magnetic field detection apparatus of the present invention can be widely used in electronic devices such as navigation devices and portable information devices.

DESCRIPTION OF SYMBOLS 1 ... Mounting board surface, 2 ... Signal processing IC, 3 ... 1st magnetic sensor element, 4 ... 2nd magnetic sensor element, 6 ... 1st magnetic sensing part, 7 ... 2nd magnetic sensing part, 8 ... 3rd magnetic sensing , 10, 10A ... magnetic field detection device, 11 ... mounting board surface, 12 ... signal processing IC, 13 ... first magnetic sensor element, 16 ... first magnetic sensing part, 17 ... second magnetic sensing part, 18 ... third Magnetic sensing unit, 20, 20A, 20B, 20C ... magnetic field detection device, 21 ... mounting substrate surface, 22 ... signal processing IC, 23 ... first magnetic sensor element, 24 ... second magnetic sensor element, 26 ... first magnetic sensing element , 27 ... second magnetic sensing unit, 28 ... third magnetic sensing unit, 30, 30A ... magnetic field detection device, 31 ... mounting substrate surface, 32 ... signal processing IC, 33 ... first magnetic sensor element, 36 ... first Magnetosensitive part 37 ... Second magnetic sensor part 38 ... Third magnetic sensor part 40, 40A, 40B, 40C ... Magnetic field detection device 41 ... Mounting base , 42 ... signal processing IC, 43 ... first magnetic sensor element, 44 ... second magnetic sensor element, 46 ... first magnetic sensing part, 47 ... second magnetic sensing part, 48 ... third magnetic sensing part, 50, 50A, 50B, 50C ... Magnetic field detection device, 51 ... Mounting board surface, 52 ... Signal processing IC, 53 ... First magnetic sensor element, 56 ... First magnetic sensing part, 57 ... Second magnetic sensing part, 58 ... Third Magnetic sensing unit, 60, 60A, 60B, 60C, 60D ... magnetic field detection device, 100 ... conventional magnetic field detection device, 101 ... mounting substrate surface, 102 ... signal processing IC, 103 ... first magnetic sensor element, 104 ... second Magnetic sensor element 105 ... Third magnetic sensor element 106 ... First magnetic sensing part 107 ... Second magnetic sensing part 108 ... Third magnetic sensing part

Claims (5)

A magnetic field detection device in which a magnetic sensor element having a magnetic sensing portion for detecting a magnetic field in one axis direction on a specific surface of a flat plate and a rectangular parallelepiped substrate is arranged on a mounting substrate together with a signal processing IC,
A magnetic field detection apparatus, wherein a plurality of the magnetically sensitive parts are arranged in the vicinity of each other on a single substrate constituting the magnetic sensor element.   2. The magnetic sensing direction of at least two magnetic sensing parts among the plurality of magnetic sensing parts arranged on the single substrate is inclined with respect to the mounting substrate surface. The magnetic field detection apparatus described.   3. The magnetic field detection device according to claim 1, wherein magnetic sensing axes of at least two of the plurality of magnetic sensing units arranged on the single substrate intersect each other.   The magnetic field according to claim 1, wherein in addition to the magnetic sensor element, a magnetic sensing part having the same function as the magnetic sensing part is provided on the signal processing IC. Detection device. A magnetic field detection device in which a magnetic sensor element having a magnetic sensing portion for detecting a magnetic field in one axis direction on a specific surface of a flat plate and a rectangular parallelepiped substrate is arranged on a mounting substrate together with a signal processing IC,
A magnetic field detection apparatus, wherein a plurality of the magnetic sensitive parts are arranged in the vicinity of each other on a single substrate constituting the signal processing IC.

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