KR20140108848A

KR20140108848A - The digital absolute inclinometer or method by the the position of electronic circuit sensing pad in the ionic liquid which holds horizontal plane

Info

Publication number: KR20140108848A
Application number: KR1020130022611A
Authority: KR
Inventors: 조동혁; 건희 조; 영실 김
Original assignee: 태양광발전도로(주)
Priority date: 2013-03-04
Filing date: 2013-03-04
Publication date: 2014-09-15

Abstract

The present invention relates to a digital gradient measuring method and a sensor to measure gradient by detecting a sensing input terminal in which current flows through a conductive liquid holding the level surface by flowing, and more specifically, to an absolute inclinometer or a motion sensor, which installs a sensing input terminal detecting that current passes through a conductive liquid in a container at fixed intervals, measures the position of the sensing input terminal touching the conductive liquid using digital data, calculates a trigonometric function, or a plane equation and normal vector, and gets the gradient.

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a digital inclination measuring method and a sensor for measuring an inclination by sensing a sensing input terminal through which a current flows through a conductive liquid which flows, holds horizontal plane}

In order to measure the horizontal and inclination of the plane used, an analogue level has been used, which has long been filled with liquid to the extent that bubbles are formed in the cycle tube, and the gravity of the liquid horizontal plane is kept perpendicular to the center of the earth. Depending on the sensitivity of the cycle tube, the type 1 senses a slope of 4 seconds (0.02 mm / m), the second type measures 10 seconds (0.05 mm / m) and the third type has a precision of 20 seconds (0.1 mm / m) The basic principle is that when the level is tilted, the bubbles move toward the higher slope, so the scale is set on the left and right sides of the bubble tube and the slope is read by reading the position of the scale line indicated by the bubble. An electronic or digital level airway has been developed to measure the slope with digitized numbers and graphics. The basic principle is to install the centrifugal weights and measure the inclination by reading the coordinates of additional centrifugal points. Since the centrifugal weight must be mounted, it is very expensive in terms of size and weight and precision equipment. And it is electronicized so that the measured value can be transmitted to the computer. If it can be miniaturized (for example, 1cm x 1cm x 4mm package) so that it can be mounted on a portable terminal, an acceleration sensor or a gyro sensor that is installed in the current smart phone and automatically converts the screen display mode of the smart phone into the horizontal and vertical directions There is a possibility of replacing it. Acceleration sensors usually use the principle that a force is generated when an acceleration is generated in a piezoelectric material. By measuring the gravity acceleration in three axes direction and integrating it, the velocity and displacement can be obtained. However, The drift is serious due to the integral constant generated in the course of the process, and it is difficult to ensure the accuracy because correction is necessary. Therefore, the sensor is used as a simple motion sensor. The gyro sensor, which is a rotational angular velocity sensor, generates Coriolis force in the vertical direction of the rotating angle. It detects the vertical force and measures the rotation acceleration in each direction, which is more complicated than the geomagnetic sensor and the acceleration sensor. These sensors are made thinner and thinner than existing mechanical systems by applying MEMS (Micro Electro Mechanical Systems) technology. The present invention can be used not only as a motion sensor that is widely used in a mobile phone, a game machine, a camera, etc., but also as an acceleration sensor and a gyro sensor, And provides an improved absolute inclination angle sensor of digital positioning method.

At the analog level, the glass tube is filled with liquid, and the position of the bubble is measured to measure the slope of the reference plane to be measured. There is a means for electronically measuring the position of the bubbles on the outer wall of the glass tube (for example, the color of the liquid is red and measured using a color image sensor), and the inclination can be easily calculated by reading it. Alternatively, the degree of inclination can be measured by measuring the position of the bubble using conductivity. By measuring the displacement variation of bubbles in the glass tube and dividing it by unit time interval, the angular velocity component in the direction is created and the acceleration can be calculated by dividing the difference of the angular velocity component in the unit time by the unit time. Gyro sensors, which are currently used as motion sensors, measure the angular velocity of three axes. When three glass tubes are installed corresponding to each axis, the tilt angle, angular velocity and angular velocity of the corresponding axis can be measured. In this case, it is necessary to study the properties of the liquid viscosity, sealing pressure, lattice plate, and inner wall of the glass tube so that the liquid surface does not become loose. In a handheld device such as a mobile phone, the volume of the sensor is very important to simply mount it as a function to detect motion only (for example, change the web browser to landscape mode or portrait mode). As means for providing a sensor that measures the tilt angle, angular velocity, and angular acceleration of three axes directly on a printed circuit board (PCB) using a basic principle of sensing the height of the liquid surface as in a glass tube, Applications 10-2010-0051494 and 10-2010-0053118 and 10-2010-0128830. In the present invention, the present invention is proposed as a modified invention form centered on a method of solving the problem that occurred in the actual development process.

The present invention is to detect a motion by directly digitally measuring the inclination of a corresponding axis to replace a gyro sensor, an acceleration sensor, and a capacitive tilt sensor used in a smart phone. The basic principle of the gyro sensor and the acceleration sensor is to measure the force corresponding to the acceleration and the angular velocity, and calculate the displacement component by integrating it. Therefore, the drift phenomenon in which the error is accumulated while the integral is accumulated, There is a problem that the value fluctuates. The capacitive tilt sensor is an analog type sensor that measures the tilt using the characteristic that the liquid amount between the two poles is changed by changing the capacitance, and there is a limitation in the accuracy and the measuring range, and there is a limitation that the three axes can not be measured at the same time . In order to calculate velocity and displacement inversely, it is necessary to perform complex integral calculations in the means of measuring the acceleration. However, the means for measuring the displacement is to calculate the acceleration by dividing the displacement change by time and by dividing the velocity change by time. The inventors of the present invention have constructed a configuration (Absolute Inclinometer concept) in which the displacement is directly measured as a digital value differently from the conventional sensors through the patent applications 10-2010-0051494 and 10-2010-0053118 and 10-2010-0128830, And thus the measurement value is not changed fundamentally. In addition, the above-described problem is solved by calculating the rate of change in displacement per unit time to obtain the velocity and acceleration. In other words, a gyro sensor, an acceleration sensor, and a geomagnetic sensor require a circuit (for example, an A / D converter) that converts an analog numeric value to a digital value in both structure and principle of a sensor. A digital sensor has the advantage that the peripheral circuit and the calculation process are simple. In particular, analog measurement values are subject to environmental influences such as temperature and humidity, and include noise components. Therefore, there is a problem in that it is necessary to perform conversion to a circuit or a program, or to perform signal filtering and compensation according to need. The basic principle of the electronic level measuring the current horizontal plane is to calculate the tilt angle by measuring the tilted angle of the centrifugal weight from the slope toward the earth's central axis. It is possible to measure displacement such as inclination angle but it is not suitable for dynamic measurement such as angular velocity and it is difficult to miniaturize in the form of a semiconductor package, so that a motion recognition sensor There is a problem that it can not be used. Even when the displacement is directly measured as a digital value differently from the conventional sensors as in the present invention, there is an advantage that the digital value without drift is directly measured. However, since many sensing input terminals (for example, , 360 sensing input terminals are required to measure at an interval of 0.5 [deg.] In one axis of the 180 [deg.] Region), and a semiconductor wafer die for processing the semiconductor wafer die and a package size become large. That is, as the semiconductor die size increases, the product size increases (at least about 20 x 20 mm in the case of a semiconductor package having 360 pins), power consumption and cost increase in proportion to the wafer die size .

Sensors must be available in a lightweight, compact and low-power form that can be extended to a wide range of applications, such as those found in smartphones, mice, and remote controls. As the conductive liquid of the sensor means for measuring the tilt angle and calculating the angular velocity and the angular acceleration as in the present invention, an ionic liquid or the like can be used. In general, water is different depending on the particles contained in water, but it is known that the intrinsic resistance is usually about 1 to 2 MΩ / cm. Ionic liquids are advantageous in that they are relatively low in viscosity, nonvolatile, and have excellent electrical conductivity due to their high ion density. In order to directly measure a tilt by a digital value differently from existing sensors as in the present invention, generally, in the case of a hexahedral shape, sensing input terminals are provided on a maximum of six surfaces corresponding to the X, Y, and Z axes, (2) When the conductive liquid is sealed and the position touching the sensing input terminal is detected on up to 6 surfaces according to the tilt, (3) the tilt in three axial directions can be measured at the same time. The velocity component is calculated by measuring the amount of change in the unit time of this measured value, and the acceleration component is obtained by calculating the velocity change amount per unit time, so that it can be used as a motion recognition sensor. The present invention utilizes the principle that the liquid horizontal plane always keeps perpendicular to the direction of gravity, and the sensing input terminals are provided on each side (maximum six sides in the case of a rectangular parallelepiped) in a predetermined container to detect the position of the input terminal, do. In the case of measuring one axis facing each other, the slope can be measured by trigonometric function. However, when measuring three points touching the liquid, the plane equation, the normal vector and the direction cosine can be obtained to obtain the tilt of three axes. If the container is made of spherical shape, it is possible to calculate the slope by dividing the sphere into at least three equilibrium points and installing at least three sensing input terminal axes at the corresponding positions and measuring at least three points where the liquid touches. Since the conventional measurement method is mostly analog method, the measured value itself is measured by digital data. Therefore, AD converter and temperature compensation circuit for processing analog signal are not needed, so peripheral circuit and calculation algorithm are very simple and can be implemented stably There are features. However, the following problems have occurred in the process of developing a sensor that achieves this object. First, because pure water tends to produce conductivity and electrolysis, it is necessary to choose a stable liquid with sufficient conductivity, such as ionic liquids. Secondly, due to the viscosity of the liquid and the surface tension, there is no wetting phenomenon of the sensing input terminal according to the flow of the liquid. Therefore, it is necessary to perform surface treatment such as DLC coating in the area in contact with the liquid. DLC (Diamond Like Carbon) coating is a thin film-like material made by impinging carbon ions or activated hydrocarbon molecules in a plasma electrically with a substrate, which is amorphous carbon-based new material. It has hardness, corrosion resistance, abrasion resistance, The surface roughness and the self-lubricating property do not cause water droplets to be formed, thereby preventing the wetting phenomenon. Third, the ionic liquid tends to occur with decreasing conductivity along time (1 msec), so the voltage is applied in the form of pulses and the ON and OFF times are measured only during the ON time. It is decided by the characteristic. Fourth, in the routing process of grooving a groove of a general printed circuit board, the state of the surface of the sensing input terminal is rough. The surface that is routed before DLC coating should be polished with a precision grinding and end mill to smooth the surface condition. Fifthly, it is difficult to completely remove the wetting phenomenon due to the surface tension in the corner portion when a rectangular parallelepiped shape is formed. In case of the spherical shape, the sectional area of the inner liquid horizontal surface is always constant. Sixth, in the case where the displacement is directly measured by a digital value differently from the conventional sensors as in the present invention, a large number of sensing input terminals (for example, when three measuring axes are installed in the spherical shape mechanism, There are a problem in that the size of a semiconductor wafer die for direct connection processing is increased because 360 pieces are required to measure at intervals and 1,800 pieces at 0.1 degree intervals. As the size of the semiconductor wafer die increases, the size of the product increases (at least about 20 x 20 mm in the case of a semiconductor package having 360 pins), power consumption and cost increase in proportion to the wafer die size do. In order to improve this, a 20 x 20 key scan method can be used to measure up to 400 sensing inputs through 40 IO (Input Output) terminals. However, a sensing input terminal Are all shorted (electrically shorted when the conductive liquid resistance value is 0Ω), the key scan method does not work. In order to solve this problem, it is possible to arrange the same resistance to be connected to each sensing input terminal in series so as to be interconnected, and to measure the position and the coordinates of the conductive liquid by measuring resistance values at both ends including the portion contained in the conductive liquid , The position and coordinates of the conductive liquid touching one axis can be measured with two IO terminals (strictly speaking, used only as an input terminal but expressed as a general IO terminal). In this case, since the relative resistance value is measured from the horizontal plane of the conductive liquid, in order to measure the direction, the resistance value of the innermost sensing input terminal is measured to determine whether it is short or open. Therefore, it is possible to measure the horizontal coordinate of the conductive liquid in one axis with only three IOs, and the resistance value is configured to be read through the IC or processor's AD converter. Instead of installing the same resistor in series at each sensing input terminal, a capacitor (capacitance) and a coil (inductor) may be connected in series or in parallel to measure the change in capacitance and inductance. The present invention relates to a method for solving the sixth problem among the various problems.

In order to realize the basic principle that the liquid horizontal surface always maintains a vertical plane with respect to the direction of gravity, the present invention installs sensing input terminals at a predetermined interval to sense electric conduction through the conductive liquid in the container. The present invention relates to an Absolute Inclinometer or a motion sensor that directly measures the position of a sensing input terminal touching a conductive liquid as digital data, calculates a trigonometric function or a plane equation and a normal vector to obtain a gradient. Unlike a gyro sensor, an acceleration sensor, or a tilt sensor, the motion sensor of this concept has a merit that the measured value is always accurate and stable because there is no drift with respect to temperature and time by obtaining a gradient as a digital value rather than an analog value , And in the case of 0.5 degree class, 360 sensing input terminals are required on one axis, which increases the size of a semiconductor wafer die for processing the same. Accordingly, when the mutual connection resistance value (or the capacitance or inductance) of the resistance (or the capacitor or the inductor) is measured at each sensing input terminal to obtain the coordinates of the horizontal plane of the conductive liquid, The following effects can be expected.

.

First, in order to calculate the inclination through the acceleration sensor or the gyro sensor, the measurement value must be integrated and drift occurs due to the integral constant generated in the process. Since the present invention directly measures the inclination, the sensor is free from drift.

Second, it is easy to adjust the measurement range and precision and can be used for precisely measuring the inclination and the moving direction of a mobile device such as a mobile phone, a game machine, a remote controller, and a mouse when a semiconductor package is miniaturized. It can be applied to a machine tool or the like which needs to maintain a precise horizontal position.

Third, in order to eliminate the phenomenon of wetting of liquid at a corner portion formed when a rectangular parallelepiped is formed, the shape of the container for holding the liquid can be formed into a spherical shape, so that the horizontal plane of the conductive liquid maintains the same plane.

Fourth, in case of reading all the sensing input terminals directly in the processor, 1,080 IO (Input Output) terminals are required for 3 axes in case of 0.5 degree spherical container. However, through the present invention, The package size can be drastically reduced.

Fifth, in order to connect 1,080 I / O terminals to 3 axes, it is not possible to connect them to each other, so it is necessary to use an independent processor for each axis. In the present invention, up to 9 I / It has cost, size and power saving effect.

FIG. 1 is a view showing a configuration in which three substrates provided with sensing input terminals are assembled and integrated with a spherical container.
FIG. 2 is a view showing a configuration in which all the sensing input terminals are directly connected to the semiconductor input terminals.
FIG. 3 shows a configuration in which a resistor is connected to a sensing input terminal, and only a maximum of three sensing input terminals are directly connected to a semiconductor.
FIG. 4 shows one resistance between each sensing input terminal and the resistance value and direction at both ends when the conductive liquid is between the seventh and eighth of the twelve input terminals.
FIG. 5 shows the resistance values and directions of both ends when the conductive liquid is between 1 and 2 of the 12 input terminals, connecting between the sensing input terminals by one resistor.
FIG. 6 shows the resistance values and directions of both ends when the conductive liquid is between 10th and 11th of the 12 input terminals by connecting two sensing input terminals and two resistances therebetween at the same position.
FIG. 7 shows the resistance value and the direction of both ends when the conductive liquid is between 1 and 2 of the 12 input terminals by connecting two sensing input terminals and two resistances therebetween at the same position.

The present invention utilizes the principle that the liquid horizontal surface that flows in the direction of the centrifugal additional gravity direction always maintains a vertical plane with respect to the gravitational direction and is provided with a sensing input terminal provided at a predetermined interval to allow electricity to flow through the conductive liquid, In order to measure the height or coordinate of the conductive liquid, when the electric signal is applied to the voltage supply terminal, electric current flows to the sensing input terminal through the conductive liquid to detect the position of the electrically connected sensing input terminal. To achieve this, the sensing input terminals are formed at regular intervals according to the accuracy to be measured in the form of a substrate or a lead frame, and a circuit is directly connected to the IC or ASIC so as to read how much electricity flows to each sensing input terminal . When electricity is supplied to the voltage supply terminal, electricity is transmitted to the sensing input terminal which is in contact with the conductive liquid, and a signal is detected. Therefore, when the value is read, the height or coordinate of the conductive liquid horizontal plane can be known. In order to measure the tilt in the three-axis direction, a sensing input terminal is provided in each of the 12 corners of the square groove in which the conductive liquid is contained, or a rectangular pattern is formed on at least three axes The sensing input terminal is provided. By measuring the position (coordinates) of the sensing input terminals at the boundary touching the conductive liquid at at least three points, the plane equation is obtained, and the normal vector is calculated. The formula for calculating a normal vector by finding a plane equation connecting three points is well known. However, in the case where the displacement is measured directly by a digital value differently from the conventional sensors as in the case of the present invention, a large number of sensing input terminals are required and the size of a wafer die is increased due to a connection with a terminal of a semiconductor . To solve this problem, the same resistance (or a capacitor or an inductor) is connected in series (or parallel) to each sensing input terminal, and a resistance value at both ends (or capacitance or inductance ) To measure the coordinates of the conductive liquid, the position of the conductive liquid touching one axis can be measured with two IO (Input Output) terminals. The present invention intends to fundamentally solve various problems caused by connecting hundreds to thousands of sensing input terminals to the semiconductor IO terminal according to the accuracy in this way. The present invention includes an innovative concept of increasing the precision by increasing the number of sensing input terminals while ensuring stable sensor characteristics because it forms a stepped waveform instead of an analog waveform according to the position of the liquid. Will be described in detail as follows.

FIG. 1 shows a configuration in which three substrates on which sensing input terminals are provided are integrated with a spherical container. When a spherical container 2 is used, at least three axes are set and a sensing input terminal 4, it is possible to know the coordinates of three points in contact with the conductive liquid 3 in the entire measurement region, so that the slope of the horizontal plane of the conductive liquid 3 can be obtained. The plane equations passing through the three coordinates A (x1, y1, z1), B (x2, y2, z2) and C (x3, y3, z3) are given by ax + by + cz + d = , c, d are calculated as follows.

a = y1 (z2-z3) + y2 (z3-z1) + y3 (z1-z2)

b = z1 (x2-x3) + z2 (x3-x1) + z3 (x1-x2)

c = x1 (y2-y3) + x2 (y3-y1) + x3 (y1-y2)

d = - (x1 (y2x3-y3z2) + x2 (y3x1-y1z3) + x3 (y1x2-y2z1)

Here, since the normal vector is given by (a, b, c), the slope for each axis is calculated as the direction cosine. The direction cosines of the directions indicated by the vector v = (a, b, c) are cos α, cos β, cos γ and α, β and γ are defined by the angles that the vector v makes with the x, y, have.

That is, cos? = A /? (A2 + b2 + c2)

cos? = b /? a2 + b2 + c2,

cos? = c /? (a2 + b2 + c2), and?,?, and? are calculated as arccos for each.

2 shows a configuration in which all of the sensing input terminals are connected to the IO (Input Output) terminal of the semiconductor. For example, in a case where the sensing input terminal 7 of each axis touching the horizontal surface 6 of the conductive liquid in the spherical container 5 The entire sensing input terminal 7 is directly connected to the IC or the IO terminal of the processor 10 and a voltage is applied to the conductive liquid to measure the sensing voltage of the sensing input terminal 7 And the position or coordinates of the sensing input terminal 7 touching the horizontal surface 6 of the conductive liquid. The IC or the processor 10 on the substrate 9 provided with the sensing input terminal 7 is provided with a communication means 11 for communicating the position and coordinates of the horizontal surface 6 of the measured conductive liquid to the outside and a power supply means 12 ). With this structure, the position of the horizontal plane of the conductive liquid in three axes and three coordinates are simultaneously measured to calculate the slopes α, β, and γ of the horizontal plane.

FIG. 3 shows a configuration in which a resistor is connected to all the sensing input terminals, and a maximum of three sensing input terminals, which sense the terminals and the directions at one end of one axis, are directly connected to the semiconductor. If at least three measuring axes are installed in a spherical container as shown in Fig. 1, if all of the sensing input terminals are directly connected to the semiconductor as in Fig. 2, 360 ° , And 1,800 sensing input terminals are required at intervals of 0.1 DEG, there is a problem that the size of the semiconductor wafer die and the package size are increased for connection processing. As the size of the semiconductor wafer increases, the size of the product increases (at least about 20 x 20 mm in the case of a semiconductor package having 360 terminals), and the power consumption and the unit price increase in proportion to the wafer die size. In order to improve this, a 20 × 20 key scan system can process 400 sensing inputs through 40 IO (Input Output) terminals. However, the sensing input terminal 14, which is immersed in a conductive liquid, Are all shorted, the key scan method does not work. All the sensing input terminals are connected to the sensing input terminal 13 shorted by the conductive liquid and the sensing input terminal 13 opened by the conductive liquid, Respectively. Therefore, if the resistors 17 of the same value are connected in series between the sensing input terminals 13 and 14 and are connected to each other, the section of the shorted sensing input terminal 14 is represented by the intrinsic resistance value of the conductive liquid (The number of the open sensing input terminals 13, the resistance 17), and the total resistance value of the sensing input terminal section opened to the intrinsic resistance value of the conductive liquid. That is, by measuring the resistance value between the lower terminal 15 and the upper terminal 16 at one end of one axis, the number of the open sensing input terminals 13 or the number of the shortened sensing input terminals 14 can be known, The position and coordinates of the horizontal plane (6) of the liquid can be measured. That is, the position of the conductive liquid touching one axis can be measured with two IO terminals as well as measuring the resistance values of the lower terminal 15 and the upper terminal 18 at one end of one axis. In this case, since only the number of sensing input terminals 13 or the number of sensing input terminals 14 that are not open in the direction of the conductive liquid-immersed portion 14 is measured, (Resistance value of the conductive liquid in a strict sense) or whether it is open or not. However, in the case of precisely measuring only a certain range (for example, +/- 45 deg.) Instead of 360 deg. Like the inclination of a machine tool, since the direction in which the conductive liquid is filled is always fixed, ) Need not be installed.

In this manner, the position of the horizontal plane 6 of the conductive liquid touching one axis with only three IO terminals composed of the direction measurement terminal 16, the measurement lower terminal 15 and the measurement upper terminal 18, And the resistance value is read through the IC or the A / D conversion means of the processor 10. When the resistance value is measured using a multimeter, the constant current is applied to the resistance to be measured. The resistance value is calculated by measuring the voltage drop (voltage = current x resistance, resistance = voltage / current) . If the resistance R1 to be measured is connected to the reference resistor R2, the total resistance value R1 + R2 and the resistance ratio R1 / R2 are determined. Therefore, the voltage drop occurring when the constant voltage V is applied (I = V / (R1 + R2)).

FIG. 4 shows one resistance connected between each sensing input terminal and the resistance value and direction at both ends when the conductive liquid is between 7th and 8th of the 12 input terminals. For example, when the value of the resistor 20 connecting each of the sensing input terminals 19 is set to 100 k [Omega], and the conductivity liquid is 0 to 7, the resistance value at both ends is calculated as 500 k [Omega]. Then, the resistance value between the lower terminal and the first terminal of the one-axis resistance measuring end is measured, and a short (meaning a short circuit of the electric circuit, meaning strictly speaking, a resistivity value of the conductive liquid) , And 100 ㏀, the upper part is filled. When the sensing input terminal is expanded to N, the resistance value at both ends is calculated as (N-7) x 100 k ?. Of course, if the value of the resistor 20 connecting each sensing input terminal 19 is 470 k ?, the resistance value at both ends is calculated as (N-7) x 470 k ?, and the conductive liquid is calculated as 3 (N-3) x 470 k [Omega] when it is between times # 4 and # 4. FIG. 5 shows a resistance value and a direction at both ends when the conductive liquid is between 1 and 2 of 12 input terminals by connecting one resistance between each sensing input terminal. Assuming that the value of the resistor 20 connecting each sensing input terminal 19 is 100 k ?, when the ion liquid is 0 to 1, the resistance value at both ends is 1,100 k ?. Likewise, the resistance value between the lower terminal and the terminal 1 of the one-axis resistance measuring end is measured and the lower part of the state is filled with a short circuit (when the conductive liquid intrinsic resistance is 0Ω). (N-1) x 100 k [Omega] when the sensing input terminal is expanded to N units.

FIG. 7 shows the resistance value and the direction of both ends when the conductive liquid is between 10th and 11th of all 12 input terminals by connecting two sensing input terminals and two resistances therebetween at the same position. When a conductive liquid touches the sensing input terminal at the same position, the circuit is electrically short-circuited (in the case of a conductive liquid intrinsic resistance of 0 Ω), and a circuit is formed in which two resistors are connected in parallel. do. Therefore, when the value of the resistor 22 connecting each sensing input terminal 21 is set to 100 k ?, the resistance value of the both ends of the conductive liquid is 250 k? The resistance value between the lower terminal and the terminal 1 of the one-axis resistance measuring end is measured, and if it is 50 k? (When the conductive liquid intrinsic resistance value is 0?), The lower part is filled. When the sensing input terminal is enlarged to N, it is calculated as 50 k? + (N-10) x 100 k ?. Figure 8 shows the resistance values and directions of both ends when two conductive sensing inputs and two resistances are connected in the same position and the conductive liquid is between 1 and 2 of the 12 sensing input terminals . When the conductive liquid touches the sensing input terminal at the same position, a short circuit (when the conductive liquid intrinsic resistance value is 0?) Becomes a parallel circuit, and when only one resistance is connected, When the resistance value 22 to be connected is 100 kΩ, the resistance value at both ends is 1,150 k? In the same way, the resistance value between the lower terminal and the terminal 1 of the resistance measurement end of one shaft is measured. When the resistance value is 50 k? (When the conductive liquid intrinsic resistance is 0?), The lower part is filled. . And when the sensing input terminal is expanded to N, it is calculated as 50 k? + (N-1) x 100 k ?.

With this configuration, the position and the coordinates of the horizontal plane of the conductive liquid can be measured with a maximum of three sensing input terminals per one axis regardless of the accuracy. 1 and 2, if all of the sensing input terminals are directly connected to the semiconductor, 360 is required to measure 0.5 ° in one axis of the 180 ° region, and 1,800 in case of 0.1 ° interval Terminals are required to solve the problem that the semiconductor wafer die and the package size increase. In this case, the resistance can be replaced by a capacitor and an inductor (coil). In this case, the capacitance and the inductance can be measured instead of the resistance value. Instead of connecting the resistors, the capacitors and the inductors in series, it is also possible to change the circuit to a parallel connection or a composite connection depending on the circuit, or to mix a resistor, a capacitor and an inductor, And variations are included in the scope of the present invention. A means for replacing the resistor 17 with a capacitor or an inductor (coil); (Capacitance) or inductance (coil) instead of the resistance value to measure the position and coordinates of the horizontal plane 6 of the conductive liquid.

In order to obtain a slope by measuring at least three points constituting the liquid horizontal plane by using such a mechanism, means for obtaining the coordinates of the sensing input terminal, which is in contact with the horizontal plane 6 of the conductive liquid, on at least three axes; Means for calculating plane equations and normal vectors of the conductive liquid horizontal surface (6) with at least three coplanar coordinates; The slope for each axis is calculated as a means of calculating the direction cosine of the normal vector. In order to obtain the tilt by measuring at least two points constituting the liquid horizontal plane, means for obtaining the coordinates of the sensing input terminal which touches the horizontal plane 6 of the conductive liquid, respectively, on at least two axes; The slope of each direction is calculated by the trigonometric function. Means for obtaining three coordinates of a sensing input terminal which is in contact with a horizontal plane (6) of the conductive liquid in at least three axes, because the displacement amount with time is an acceleration and the velocity change amount with time is acceleration; Means for calculating a slope in each axial direction; Means for calculating an angular velocity by a gradient change per unit time of each axis; and means for calculating angular acceleration by a change in angular velocity per unit time of each axis.

1: substrate with sensing input terminal 2: spherical container
3: conductive liquid 4: sensing input terminal
5: spherical container 6: horizontal plane of conductive liquid
7: Sensing input terminal 8: Direct connection pattern
9: substrate 10: IC or processor
11: communication means 12: power supply means
13: Open sensing input terminal 14: Short sensing input terminal
15: 1 Measurement of resistance between both ends of lower shaft 16: Direction measurement terminal
17: Resistance
18: 1 Measurement of the resistance between both ends of the shaft
19: sensing input terminal 20: resistance
21: sensing input terminal 22: resistance

Claims

In measuring the slope of the liquid flowing inside the vessel and maintaining a horizontal plane,
Means for setting at least two axes in the vessel (5) and installing a plurality of sensing input terminals (13, 14) in each axis;
Means for establishing a connection between all the sensing input terminals 13 and 14 with a resistor 17 in order to calculate the position or coordinates of the sensing input terminal 14 in contact with the horizontal surface 6 of the conductive liquid;
Since the sensing input terminal 14 section, which is a short circuit filled with conductive liquid (hereinafter, referred to as a conductive liquid intrinsic resistance value 0 Ω), is measured by the intrinsic resistance value of the conductive liquid,
The resistance value between the lower terminal (15) and the upper terminal (16) of the one-axis short-axis resistance measuring end is determined by the resistance value of the conductive liquid
And the total resistance value of the open sensing input terminal section (the number of open sensing input terminals 13 x resistance 17);
Means for measuring the resistance value between the lower terminal (15) and the upper terminal (16) to calculate the number of open sensing input terminals (13) or the number of sensing input terminals (14) shorted;
The horizontal plane (6) is measured by calculating the position and the coordinates of the horizontal plane (6) of the conductive liquid by the number of open sensing input terminals (13) of at least two axes or the number of sensing input terminals Sensor and method for measuring the inclination by detecting the position of sensing input terminal touching conductive liquid

In measuring the slope of the liquid flowing inside the vessel and maintaining a horizontal plane,
Means for setting at least two axes in the vessel (5) and installing a plurality of sensing input terminals (13, 14) in each axis;
Means for connecting all of the sensing input terminals 13 and 14 to the resistor 17 in order to calculate the position or coordinates of the sensing input terminal 14 in contact with the horizontal surface 6 of the conductive liquid;
A sensing input terminal (14) section with a conductive liquid-filled short-circuit (hereinafter referred to as a conductive liquid intrinsic resistance value 0 Ω) is measured as a resistivity value of a conductive liquid,
The resistance value between the lower terminal (15) and the upper terminal (16) of the one-axis short-axis resistance measuring end is determined by the resistance value of the conductive liquid
And the total resistance value of the open sensing input terminal section (the number of open sensing input terminals 13 x resistance 17);
Means for measuring the resistance value between the lower terminal (15) and the upper terminal (16) to calculate the number of open sensing input terminals (13) or the number of sensing input terminals (14) shorted;
Means for measuring the slope by calculating the position and coordinates of the horizontal plane (6) of the conductive liquid with the number of open sensing input terminals (13) of at least two axes or the number of sensing input terminals (14) shorted;
And means for measuring the resistance value of the innermost direction measuring terminal 16 to determine whether the conductive liquid is filled or not by dividing whether it is a short circuit (when the conductive liquid intrinsic resistance is 0?) Or open circuit. A sensor for measuring the inclination by detecting the position of a sensing input terminal touching a conductive liquid holding a horizontal plane, and a method of applying the same

3. The method according to claim 1 or 2,
The shape of the container
Spherical shape;
Or cylindrical;
Or triangular shape;
Or a square bevel;
A method of detecting a position of a sensing input terminal contacting a conductive liquid holding a horizontal plane in a specific container to calculate a tilt, and a sensor

3. The method according to claim 1 or 2,
A resistance value between two IO (Input Output) terminals such as the measurement lower terminal 15 and the measurement upper terminal 18,
Or the resistance value between one direction measuring terminal 16 is measured,
Means for measuring the position and the coordinates of the horizontal plane (6) of the conductive liquid in contact with one axis;
The resistance value between the terminals is
A voltage drop due to the constant current method or a voltage drop according to the resistance ratio with respect to the reference resistance is read through an AD (Analog to Digital) conversion means of the IC or the processor 10, A method and a sensor for detecting the position of the sensing input terminal contacting with the liquid by the AD conversion means and calculating the inclination

3. The method according to claim 1 or 2,
In the means for connecting between all the sensing input terminals by a resistor,
And a sensing resistor (20) connected in series between the sensing input terminals (19). The sensing resistor is connected in series with a sensing input terminal that is in contact with a conductive liquid holding a horizontal plane to calculate a slope Methods and Sensors

3. The method according to claim 1 or 2,
For example, when the resistance value 20 connecting all the sensing input terminals 19 is set to 100 kohms, the number of sensing input terminals is set to 12, and when the conductive liquids are 0 to 7,
Means for determining (N-7) x 100 k [Omega] when the sensing input terminal is enlarged to N, since the resistance value between the lower terminal and the upper terminal of the one-axis short-
Alternatively, the resistance value between the lower terminal and the No. 1 terminal of the one-axis resistance measuring end is measured, and it is judged that the upper part is filled with a short circuit (when the resistance value of the conductive liquid is 0Ω) A method of calculating a slope by connecting a sensing input terminal in contact with a conductive liquid holding a horizontal plane in series by a resistor,

3. The method according to claim 1 or 2,
Means for setting two sensing input terminals (21) adjacent to each other at the same position;
Two resistors 22 are connected between the sensing input terminals 21 at the same position,
(The resistance value of the conductive liquid is 0 OMEGA) between the sensing input terminals 21 to which the conductive liquid is filled, so that the effect of connecting two resistors in parallel is used. Sensing method and sensor for calculating the tilt by connecting two sensing resistors between two input terminals

3. The method according to claim 1 or 2,
Means for setting two sensing input terminals (21) adjacent to each other at the same position;
When two resistors 22 are connected between the sensing input terminals 21 at the same position
When a conductive liquid touches the sensing input terminal of the same position (hereinafter, the resistance value of the conductive liquid is 0Ω), a parallel circuit is formed, and when only one resistance is connected,
For example, when the resistance value 22 connecting all the sensing input terminals 21 is set to 100 kΩ, the number of sensing input terminals is set to 12, and conductive liquids are filled from 0 to 11,
Means for determining the resistance value between the lower terminal and the upper terminal of the one-axis short-axis resistance measurement terminal to be 250 k? When the sensing input terminal is expanded to N, to 50 k? + (N-10)
The resistance value is measured between the lower terminal and the first terminal of the one-axis short-axis resistance measuring end, and the means for judging that the upper portion is filled up when the resistance is 100k is satisfied. A method and a sensor for calculating the slope by connecting two conductive resistive liquids and a sensing input terminal connected to each other by two resistors

3. The method according to claim 1 or 2,
Means for replacing the resistor 17 with a capacitor or an inductor (coil);
The position and the coordinates of the horizontal plane 6 of the conductive liquid are measured by measuring the capacitance (the capacitor) or the inductance (the coil) instead of the resistance value, and the position of the sensing input terminal touching the conductive liquid holding the horizontal plane is detected How to calculate tilt and sensor

3. The method according to claim 1 or 2,
On at least three axes
Means for respectively obtaining coordinates of a sensing input terminal in contact with the horizontal surface (6) of the conductive liquid;
Means for calculating plane equations and normal vectors of the conductive liquid horizontal surface (6) with at least three coplanar coordinates;
As means for calculating the direction cosine of the normal vector,
And calculating a tilt of each of the plurality of sensing electrodes on the basis of the tilt of the sensing input terminal contacting the conductive liquid holding the horizontal surface.

3. The method according to claim 1 or 2,
On at least two axes
Means for respectively obtaining coordinates of a sensing input terminal in contact with the horizontal surface (6) of the conductive liquid;
As means for calculating the slope of each direction by the trigonometric function,
Calculating a tilt of each sensor based on the position of the sensing input terminal touching the conductive liquid holding the horizontal surface.

3. The method according to claim 1 or 2,
On at least three axes
Means for obtaining three coordinates of a sensing input terminal which is in contact with the horizontal plane (6) of the conductive liquid;
Means for calculating a slope in each axial direction;
Means for calculating an angular velocity with a gradient change per unit time of each axis: and
And calculating the angular velocity and angular velocity of the sensor for detecting the position of the sensing input terminal touching the conductive liquid holding the horizontal plane.