JP2011214056A - Carburizing treatment apparatus - Google Patents

Carburizing treatment apparatus Download PDF

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JP2011214056A
JP2011214056A JP2010082737A JP2010082737A JP2011214056A JP 2011214056 A JP2011214056 A JP 2011214056A JP 2010082737 A JP2010082737 A JP 2010082737A JP 2010082737 A JP2010082737 A JP 2010082737A JP 2011214056 A JP2011214056 A JP 2011214056A
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carburizing
workpiece
processing chamber
atmosphere gas
gas
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JP5663186B2 (en
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Yasushi Nagashima
靖 長嶋
Ryosuke Yamamoto
亮介 山本
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JTEKT Thermo Systems Corp
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Koyo Thermo Systems Co Ltd
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Priority to KR1020110024878A priority patent/KR20110109882A/en
Priority to CN201110084669XA priority patent/CN102206798A/en
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    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C8/00Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals
    • C23C8/06Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases
    • C23C8/08Solid state diffusion of only non-metal elements into metallic material surfaces; Chemical surface treatment of metallic material by reaction of the surface with a reactive gas, leaving reaction products of surface material in the coating, e.g. conversion coatings, passivation of metals using gases only one element being applied
    • C23C8/20Carburising
    • C23C8/22Carburising of ferrous surfaces
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F27FURNACES; KILNS; OVENS; RETORTS
    • F27DDETAILS OR ACCESSORIES OF FURNACES, KILNS, OVENS, OR RETORTS, IN SO FAR AS THEY ARE OF KINDS OCCURRING IN MORE THAN ONE KIND OF FURNACE
    • F27D7/00Forming, maintaining, or circulating atmospheres in heating chambers
    • F27D7/04Circulating atmospheres by mechanical means
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02PCLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P10/00Technologies related to metal processing
    • Y02P10/25Process efficiency

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • General Engineering & Computer Science (AREA)
  • Solid-Phase Diffusion Into Metallic Material Surfaces (AREA)
  • Muffle Furnaces And Rotary Kilns (AREA)

Abstract

PROBLEM TO BE SOLVED: To provide a carburizing treatment apparatus with which the heat-loss during carburizing treatment to a work-piece can be restrained and the consumed quantity of energy can be reduced at lower than the conventional method.SOLUTION: A cylindrical directional regulating member 31, with which a shell-wall 11 of a treatment chamber 10 and an induction-heating coil 20, and the work-piece W in the carburizing treatment apparatus 1, are separated, and the carburizing atmospheric gas convected in the treatment chamber, made to flow from the work-piece W side to the shell-wall 11 side of the treatment chamber 10 and the induction-heating coil 20 side is regulated, is arranged. Thus, the heat-interchange among the carburizing atmospheric gas, the shell-wall 11 and the induction-heating coil 20, is restrained.

Description

本発明は、鋼製のワークに浸炭処理を施す浸炭処理装置に関する。   The present invention relates to a carburizing apparatus that performs a carburizing process on a steel workpiece.

自動車や産業機械などに用いられる鋼製部品の表面硬化処理方法の一つとして、例えば低炭素鋼製のワークを処理室の内部にセットし、このワークの表面層を高周波誘導加熱により所定温度まで加熱した後、処理室内に浸炭ガスを供給して、浸炭処理を行なう高周波浸炭方法が採用されている(例えば、特許文献1参照)。   As one of the surface hardening treatment methods for steel parts used in automobiles and industrial machines, for example, a low-carbon steel workpiece is set inside the treatment chamber, and the surface layer of this workpiece is heated to a predetermined temperature by high-frequency induction heating. A high frequency carburizing method in which carburizing treatment is performed by supplying carburizing gas into the processing chamber after heating is employed (see, for example, Patent Document 1).

前記高周波浸炭方法では、例えば、図4に示されるように、ワークWを内部にセットする処理室110と、処理室110の内部に設置され、ワークWを加熱する水冷式の誘導加熱コイル120と、処理室110内に浸炭ガスを供給するガス流路150と、処理室110内の排ガスを排出する排ガス流路160とを備えた浸炭処理装置101が用いられている。   In the high-frequency carburizing method, for example, as shown in FIG. 4, a processing chamber 110 that sets a work W inside, a water-cooled induction heating coil 120 that is installed inside the processing chamber 110 and heats the work W, A carburizing apparatus 101 including a gas flow path 150 for supplying a carburizing gas into the processing chamber 110 and an exhaust gas flow path 160 for discharging the exhaust gas in the processing chamber 110 is used.

前記浸炭処理装置101を用いた高周波浸炭方法では、まず、処理室110の内部にセットされたワークWの表面層を誘導加熱コイル120によって所定温度まで誘導加熱する。その後、例えば炭化水素ガスボンベ151から供給された炭化水素ガスに、希釈ガスボンベ152から供給された希釈ガスを混合した浸炭ガスを、ガス流路150を介して処理室110内に送給して、処理室110内で浸炭雰囲気ガスを生成し、当該浸炭雰囲気ガスを、高温になっているワークWの表面に接触させる。このとき、ワークW表面における浸炭雰囲気ガス中の炭化水素の浸炭反応により生じた炭素がワークWの表面から内部に拡散浸透する。これにより、ワークWの表面における炭素含有量が向上するので、ワークWの表面層が硬化する。   In the high-frequency carburizing method using the carburizing apparatus 101, first, the surface layer of the workpiece W set in the processing chamber 110 is induction-heated to a predetermined temperature by the induction heating coil 120. Thereafter, for example, a carburizing gas obtained by mixing the hydrocarbon gas supplied from the hydrocarbon gas cylinder 151 with the dilution gas supplied from the dilution gas cylinder 152 is fed into the processing chamber 110 via the gas flow path 150 to perform the processing. A carburizing atmosphere gas is generated in the chamber 110, and the carburizing atmosphere gas is brought into contact with the surface of the workpiece W at a high temperature. At this time, carbon generated by the carburizing reaction of hydrocarbons in the carburizing atmosphere gas on the surface of the workpiece W diffuses and penetrates from the surface of the workpiece W to the inside. Thereby, since the carbon content on the surface of the workpiece W is improved, the surface layer of the workpiece W is cured.

特開2004−360057号公報JP 2004-360057 A

しかしながら、前記従来の浸炭処理装置101では、ワークWの浸炭処理時において、加熱されたワークWの輻射熱により当該ワークWの近傍の浸炭雰囲気ガスが温められることによって、処理室110の内部で浸炭雰囲気ガスの対流(矢印C)や拡散(矢印D)が生じるので、当該浸炭雰囲気ガスと処理室110の殻壁111および誘導加熱コイル120との間で熱交換が促進される。このため、前記浸炭処理装置101は、ワークWの浸炭処理時の熱損失が大きく、浸炭処理に要するエネルギーの消費量が多くなって、浸炭処理コストが高くつくという問題があった。   However, in the conventional carburizing apparatus 101, the carburizing atmosphere gas in the vicinity of the workpiece W is heated by the radiant heat of the heated workpiece W during the carburizing process of the workpiece W, so that the carburizing atmosphere is generated inside the processing chamber 110. Since gas convection (arrow C) and diffusion (arrow D) occur, heat exchange is promoted between the carburizing atmosphere gas and the shell wall 111 of the processing chamber 110 and the induction heating coil 120. For this reason, the carburizing apparatus 101 has a problem that heat loss during the carburizing process of the workpiece W is large, the amount of energy consumed for the carburizing process is increased, and the carburizing process cost is high.

本発明は、このような問題点に鑑みてなされたものであり、ワークの浸炭処理時の熱損失を抑制することができ、浸炭処理コストを安くすることができる浸炭処理装置を提供することを目的とする。   The present invention has been made in view of such problems, and can provide a carburizing apparatus that can suppress heat loss during the carburizing process of a workpiece and can reduce the cost of carburizing process. Objective.

本発明の浸炭処理装置は、鋼製のワークに浸炭処理を施す浸炭処理装置であって、前記ワークを内部にセットする処理室と、前記処理室の内部に設置され、前記ワークを包囲して加熱する誘導加熱コイルと、前記処理室内に浸炭ガスを供給するガス供給路と、前記処理室内の浸炭雰囲気ガスを排気する排ガス流路と、前記ワークと処理室の殻壁および誘導加熱コイルとを区画して処理室内を対流する浸炭雰囲気ガスがワーク側から処理室の殻壁側および誘導加熱コイル側へ流動するのを規制する筒状の方向規制部材とを備えていることを特徴としている。   The carburizing apparatus of the present invention is a carburizing apparatus that performs a carburizing process on a steel workpiece, and is installed in the processing chamber in which the workpiece is set, and surrounds the workpiece. An induction heating coil for heating, a gas supply passage for supplying a carburizing gas into the processing chamber, an exhaust gas passage for exhausting a carburizing atmosphere gas in the processing chamber, a shell wall of the workpiece and the processing chamber, and an induction heating coil. A carburizing atmosphere gas that divides and convects the processing chamber is provided with a cylindrical direction regulating member that regulates the flow of the carburizing atmosphere gas from the workpiece side to the shell wall side and the induction heating coil side of the processing chamber.

本発明の浸炭処理装置では、前記方向規制部材によって、前記処理室内を対流する浸炭雰囲気ガスがワーク側から処理室の殻壁側および誘導加熱コイル側へ流動するのを規制して、浸炭雰囲気ガスと前記処理室の殻壁および誘導加熱コイルとの間の熱交換を抑制することができるので、ワークの浸炭処理時における熱損失を抑制することができる。   In the carburizing treatment apparatus of the present invention, the direction restriction member restricts the flow of the carburizing atmosphere gas convection in the processing chamber from the workpiece side to the shell wall side of the processing chamber and the induction heating coil side, and thereby the carburizing atmosphere gas. Exchange between the shell wall of the processing chamber and the induction heating coil can be suppressed, so that heat loss during the carburizing process of the workpiece can be suppressed.

本発明の浸炭処理装置は、前記方向規制部材の内部を通過した浸炭雰囲気ガスを導入して、当該浸炭雰囲気ガスを、前記処理室の殻壁と方向規制部材との間の空間へ所定流量還流させる還流規制部材を備えているのが好ましい。この浸炭処理装置によれば、前記方向規制部材の内部から導入した浸炭雰囲気ガスを、前記還流規制部材によって、前記処理室の殻壁と方向規制部材との間の空間へ所定流量還流させることができる。前記還流規制部材による前記空間への炭雰囲気ガスの還流量を、ワークの材質や表面積などの特性に応じた適正な値に設定しておくことにより、処理室内の浸炭雰囲気ガスの温度および/または組成を、ワークの特性に合わせた適切な値にすることができる。したがって、この浸炭処理装置によれば、ワークの浸炭処理を均一かつ効率よく行なうことができる。また、前記空間へ還流させた浸炭雰囲気ガス中の未反応ガスを再利用することもできるので、浸炭処理コストを安くすることができる。   The carburizing apparatus of the present invention introduces a carburizing atmosphere gas that has passed through the inside of the direction regulating member, and returns the carburizing atmosphere gas to a space between the shell wall of the processing chamber and the direction regulating member at a predetermined flow rate. It is preferable that a reflux regulating member is provided. According to this carburizing apparatus, the carburizing atmosphere gas introduced from the inside of the direction regulating member can be refluxed at a predetermined flow rate to the space between the shell wall of the processing chamber and the direction regulating member by the reflux regulating member. it can. By setting the recirculation amount of the charcoal atmosphere gas to the space by the recirculation restriction member to an appropriate value according to characteristics such as the material and surface area of the workpiece, the temperature of the carburizing atmosphere gas in the processing chamber and / or The composition can be set to an appropriate value according to the characteristics of the workpiece. Therefore, according to this carburizing apparatus, the carburizing process of the workpiece can be performed uniformly and efficiently. Moreover, since the unreacted gas in the carburizing atmosphere gas refluxed to the space can be reused, the carburizing cost can be reduced.

本発明の浸炭処理装置は、前記方向規制部材の内部における浸炭雰囲気ガスの滞留時間を調節する滞留時間調節部材を備えているのが好ましい。この浸炭処理装置によれば、前記滞留時間調節部材によって、ワークの材質や表面積などの特性に応じて、前記方向規制部材の内部における浸炭雰囲気ガスの滞留時間を適切に設定しておくことにより、ワークの浸炭処理をさらに均一かつ効率よく行うことができる。   The carburizing apparatus according to the present invention preferably includes a residence time adjusting member that adjusts the residence time of the carburizing atmosphere gas inside the direction regulating member. According to this carburizing apparatus, by setting the residence time of the carburizing atmosphere gas in the direction regulating member appropriately according to the characteristics such as the material and surface area of the workpiece by the residence time adjusting member, Carburizing treatment of the workpiece can be performed more uniformly and efficiently.

前記滞留時間調節部材は、前記方向規制部材の内部から前記還流規制部材の内部へ導入される浸炭雰囲気ガスの流量を可変調整可能なダンパであってもよい。この場合には、前記ダンパを操作することによって、前記方向規制部材の内部における浸炭雰囲気ガスの滞留時間を容易に調整することができる。   The dwell time adjusting member may be a damper capable of variably adjusting the flow rate of the carburizing atmosphere gas introduced from the inside of the direction regulating member to the inside of the reflux regulating member. In this case, it is possible to easily adjust the residence time of the carburizing atmosphere gas inside the direction regulating member by operating the damper.

前記方向規制部材の表面または前記誘導加熱コイルの表面は、ワークからの輻射熱をワーク側空間へ反射する反射層として構成されているのが好ましい。
この場合、ワークからの輻射熱を前記反射層によってワーク側空間へ反射することができるので、当該輻射熱と前記誘導加熱コイルおよび処理室の殻壁との熱交換を抑制することができる。このため、ワークの浸炭処理時における熱損失を一層効果的に抑制することができる。
The surface of the direction regulating member or the surface of the induction heating coil is preferably configured as a reflective layer that reflects radiant heat from the work to the work side space.
In this case, since the radiant heat from the work can be reflected to the work side space by the reflective layer, heat exchange between the radiant heat and the induction heating coil and the shell wall of the processing chamber can be suppressed. For this reason, the heat loss at the time of the carburizing process of a workpiece | work can be suppressed more effectively.

本発明の浸炭処理装置によれば、ワークの浸炭処理時の熱損失を抑制して、浸炭処理に要するエネルギーの消費量を低減させることができるので、浸炭処理コストを安くすることができる。   According to the carburizing apparatus of the present invention, heat loss during the carburizing process of the workpiece can be suppressed and the energy consumption required for the carburizing process can be reduced, so that the carburizing process cost can be reduced.

本発明の一実施形態に係る浸炭処理装置の要部を示す断面図である。It is sectional drawing which shows the principal part of the carburizing processing apparatus which concerns on one Embodiment of this invention. 本発明の他の実施形態に係る浸炭処理装置の要部を示す断面図である。It is sectional drawing which shows the principal part of the carburizing processing apparatus which concerns on other embodiment of this invention. 本発明のさらに他の実施形態に係る浸炭処理装置の要部を示す断面図である。It is sectional drawing which shows the principal part of the carburizing processing apparatus which concerns on other embodiment of this invention. 従来の浸炭処理装置の要部を示す断面図である。It is sectional drawing which shows the principal part of the conventional carburizing processing apparatus.

以下、添付図面を参照しつつ、本発明の浸炭処理装置を詳細に説明する。
図1は、本発明の一実施形態に係る浸炭処理装置の要部を示す断面図である。同図において、浸炭処理装置1は、低炭素鋼、低炭素合金鋼などの鋼製のワークWを内部にセットする処理室10と、ワークWを誘導加熱する誘導加熱コイル20と、浸炭雰囲気ガスの流動方向を規制する円筒状の方向規制部材31と、この方向規制部材31の内部を通過した浸炭雰囲気ガスを導入して、当該浸炭雰囲気ガスを、処理室10の殻壁11と方向規制部材31との間の空間へ所定量還流させる還流規制部材35と、処理室10内に浸炭ガスを供給するガス供給路50と、処理室10内の浸炭雰囲気ガスを排出する排ガス流路60等を備えている。
Hereinafter, the carburizing apparatus of the present invention will be described in detail with reference to the accompanying drawings.
FIG. 1 is a cross-sectional view showing a main part of a carburizing apparatus according to an embodiment of the present invention. In FIG. 1, a carburizing apparatus 1 includes a processing chamber 10 in which a work W made of steel such as low carbon steel or low carbon alloy steel is set, an induction heating coil 20 for induction heating the work W, and a carburizing atmosphere gas. A cylindrical direction regulating member 31 that regulates the flow direction of the gas, and a carburizing atmosphere gas that has passed through the inside of the direction regulating member 31 are introduced, and the carburizing atmosphere gas is supplied to the shell wall 11 of the processing chamber 10 and the direction regulating member. A recirculation regulating member 35 that recirculates a predetermined amount to the space between the gas chamber 31, a gas supply path 50 that supplies carburizing gas into the processing chamber 10, an exhaust gas flow path 60 that discharges the carburizing atmosphere gas in the processing chamber 10 I have.

処理室10は、底部が開口した殻壁11と、この殻壁11の底部を開放可能に閉塞する円板状の底板14とによって構成されている。前記殻壁11は、円筒状の周壁12の上端部を、円板状の天井壁13によって閉塞しているものである。これら周壁12および天井壁13は、それぞれ石英、耐熱鋼などの耐熱性材料によって形成されている。
前記底板14は図示しない昇降機構によって昇降可能であり、その上昇端位置で前記殻壁11の底部を閉塞することができる。
The processing chamber 10 includes a shell wall 11 having an open bottom and a disk-shaped bottom plate 14 that closes the bottom of the shell wall 11 so as to be openable. The shell wall 11 is such that the upper end of a cylindrical peripheral wall 12 is closed by a disk-shaped ceiling wall 13. The peripheral wall 12 and the ceiling wall 13 are each formed of a heat resistant material such as quartz or heat resistant steel.
The bottom plate 14 can be moved up and down by a lifting mechanism (not shown), and the bottom portion of the shell wall 11 can be closed at the rising end position.

前記誘導加熱コイル20は、処理室10の内部に配置されている。この誘導加熱コイル20はワークWの外周を包囲可能な螺旋状のものであり、その内周内方にワークWがセットされる。この誘導加熱コイル20は、高周波電流が供給されることにより、ワークWを所望の温度に誘導加熱することができる。
前記ワークWは図示しない昇降可能な支持部材に支持されている。この支持部材は、前記底板14と一体に昇降することにより、ワークWを誘導加熱コイル20の内周内方へ供給したり、この供給したワークWを処理室10の下方へ搬出したりすることができる。
The induction heating coil 20 is disposed inside the processing chamber 10. The induction heating coil 20 has a spiral shape that can surround the outer periphery of the workpiece W, and the workpiece W is set inside the inner periphery thereof. The induction heating coil 20 can induction-heat the workpiece W to a desired temperature by supplying a high-frequency current.
The workpiece W is supported by a support member (not shown) that can be raised and lowered. The support member moves up and down integrally with the bottom plate 14 to supply the work W to the inner periphery of the induction heating coil 20 and to carry the supplied work W to the lower side of the processing chamber 10. Can do.

前記方向規制部材31は、ワークWの外周を包囲する第1の円筒部32と、この第1の円筒部32の上端部に連設され、上方に向かって漸次縮径したテーパ筒部33と、このテーパ筒部33の上端部に連設された第2の円筒部34とからなる。これら方向規制部材31の材料は、誘導加熱されない材料から選択され、好ましくは、石英またはセラミックスである。
前記方向規制部材31は、ワークWと誘導加熱コイル20との間の空間に配置されて、ワークWと処理室10の殻壁11および誘導加熱コイル20とを区画している。これにより、加熱されたワークWの輻射熱によって温められた浸炭雰囲気ガスが、ワークW側から誘導加熱コイル20側および殻壁11側へ流動するのを規制している(図1の矢印A参照)。したがって、前記浸炭雰囲気ガスと前記殻壁11および誘導加熱コイル20との間の熱交換を抑制して、浸炭処理時における熱損失を低減することができる。
The direction regulating member 31 includes a first cylindrical portion 32 that surrounds the outer periphery of the workpiece W, and a tapered cylindrical portion 33 that is connected to the upper end portion of the first cylindrical portion 32 and gradually decreases in diameter upward. , And a second cylindrical portion 34 connected to the upper end portion of the tapered cylindrical portion 33. The material of these direction regulating members 31 is selected from materials that are not induction-heated, and is preferably quartz or ceramics.
The direction regulating member 31 is disposed in a space between the workpiece W and the induction heating coil 20, and partitions the workpiece W from the shell wall 11 of the processing chamber 10 and the induction heating coil 20. Thereby, the carburizing atmosphere gas heated by the radiant heat of the heated workpiece W is restricted from flowing from the workpiece W side to the induction heating coil 20 side and the shell wall 11 side (see arrow A in FIG. 1). . Therefore, heat exchange between the carburizing atmosphere gas and the shell wall 11 and the induction heating coil 20 can be suppressed, and heat loss during the carburizing process can be reduced.

前記還流規制部材35は、処理室10の天井壁13側空間の一部を区画している箱形のものであり、その天板部は天井壁13で兼用している。また、前記還流規制部材35の底部には開口が設けられており、この開口には、前記第2の円筒部34が嵌め込まれている。これにより、前記方向規制部材31の内部で上昇する浸炭雰囲気ガスを、還流規制部材35の内部に導入可能になっている。さらに、前記側壁部35aには、その全周にわたって複数の排出孔35bが設けられている。また、前記還流規制部材35の内部は、前記排ガス流路60に連通されており、当該内部に導入された浸炭雰囲気ガスの一部または全部を、前記排ガス流路60を通して排出することができるようになっている。   The reflux regulating member 35 is a box-shaped member that divides a part of the space on the ceiling wall 13 side of the processing chamber 10, and the top plate portion is shared by the ceiling wall 13. In addition, an opening is provided at the bottom of the reflux restriction member 35, and the second cylindrical portion 34 is fitted into the opening. Thereby, the carburizing atmosphere gas rising inside the direction regulating member 31 can be introduced into the reflux regulating member 35. Further, the side wall portion 35a is provided with a plurality of discharge holes 35b over the entire circumference thereof. Further, the inside of the recirculation restriction member 35 communicates with the exhaust gas passage 60 so that a part or all of the carburizing atmosphere gas introduced into the inside can be discharged through the exhaust gas passage 60. It has become.

各排出孔35bの開口面積の総和は、ワークWの材質や表面積等の特性に応じた適切な値に設定されている。この開口面積の総和は、浸炭雰囲気ガスの還流率が0〜100%となる範囲で、ワークWの特性に応じてワークW毎に設定される。ここに、前記「還流率」とは、還流規制部材35に導入された浸炭雰囲気ガスのうちから、排ガス流路60を通して排出される浸炭雰囲気ガスを除いたガスの量Xに対する、処理室10の殻壁11と方向規制部材31との間の空間へ還流させる浸炭雰囲気ガスの量Yの割合(X/Y)をいう。「還流率0%」は、ワークWの浸炭処理で用いられた後の浸炭雰囲気ガスを、排ガス流路60を通して100%排出することを意味し、「還流率100%」は、ワークWの浸炭処理で用いられた後の浸炭雰囲気ガスのうち排ガス流路60を通って排出されるガスをゼロとし、100%還流させることを意味する。   The sum total of the opening area of each discharge hole 35b is set to an appropriate value according to characteristics such as the material and surface area of the workpiece W. The sum of the opening areas is set for each workpiece W in accordance with the characteristics of the workpiece W in a range where the reflux rate of the carburizing atmosphere gas is 0 to 100%. Here, the “recirculation rate” refers to the amount X of the processing chamber 10 with respect to the amount X of the carburizing atmosphere gas introduced into the reflux regulating member 35 excluding the carburizing atmosphere gas discharged through the exhaust gas passage 60. The ratio (X / Y) of the amount Y of carburizing atmosphere gas to be returned to the space between the shell wall 11 and the direction regulating member 31. “Reflux rate 0%” means that the carburized atmosphere gas used in the carburizing process of the workpiece W is discharged 100% through the exhaust gas flow channel 60, and “reflux rate 100%” means the carburization of the workpiece W. It means that the gas discharged through the exhaust gas flow path 60 in the carburized atmosphere gas after being used in the treatment is zeroed and refluxed 100%.

このように、前記還流規制部材35によれば、各排出孔35bの開口面積の総和が、ワークWの材質や表面積等の特性に応じた適切な値に設定されているので、前記処理室10の殻壁11と方向規制部材31との間の空間へ還流される浸炭雰囲気ガスの量を、適正化することができる。このため、処理室10内の浸炭雰囲気ガスの温度および/または組成を、ワークWの特性に合わせた適切な値に設定することができる。したがって、ワークWの浸炭処理を均一かつ効率よく行なうことができる。
なお、前記還流率が0%を超えるように排出孔35bの開度を調節した場合、還流規制部材35の内部に導入された浸炭雰囲気ガスを、前記排出孔35bを通して前記処理室10の殻壁11と方向規制部材31との間の空間へ排出し、還流させて再びワークの近傍に供給することができる(図1の矢印B参照)。この場合には、前記浸炭雰囲気ガス中の未反応ガスを再利用することができるので、浸炭処理コストを安くすることができる。
As described above, according to the reflux restriction member 35, the sum of the opening areas of the respective discharge holes 35b is set to an appropriate value in accordance with characteristics such as the material and surface area of the workpiece W. The amount of the carburizing atmosphere gas returned to the space between the shell wall 11 and the direction regulating member 31 can be optimized. For this reason, the temperature and / or composition of the carburizing atmosphere gas in the processing chamber 10 can be set to an appropriate value according to the characteristics of the workpiece W. Therefore, the carburizing process of the workpiece W can be performed uniformly and efficiently.
When the opening degree of the discharge hole 35b is adjusted so that the reflux rate exceeds 0%, the carburizing atmosphere gas introduced into the reflux restriction member 35 is passed through the discharge hole 35b and the shell wall of the processing chamber 10 is passed. 11 and the direction regulating member 31 can be discharged, refluxed, and supplied again to the vicinity of the workpiece (see arrow B in FIG. 1). In this case, since the unreacted gas in the carburizing atmosphere gas can be reused, the carburizing cost can be reduced.

前記処理室10には、当該処理室10内に炭化水素ガスとしてのメタンガスと希釈ガスとしての窒素ガスからなる浸炭ガスを供給するガス流路50が接続されている。このガス流路50には、メタンガスを供給するための炭化水素ガスボンベ51と、窒素ガスを供給するための希釈ガスボンベ52とが、それぞれ接続されている。
さらに、前記浸炭処理装置1には、処理室10内の浸炭雰囲気ガスの温度および組成を検出するセンサ70が設けられている。このセンサ70の先端の検知部は、例えば、図1に示される位置に配置されるが、図2および3に示されるように、ワークWと方向規制部材31との間の空間に配置されていてもよい。
このセンサ70により、ワークWの浸炭処理に用いられる浸炭雰囲気ガスの温度および組成をモニターすることができるので、浸炭雰囲気ガスの温度および組成を、ワークWの材質、表面積などの特性に合わせた適切な値に調節することができる。また、前記センサ70は、浸炭雰囲気ガスの温度および組成のいずれか一方を検出するものであってもよい。
Connected to the processing chamber 10 is a gas flow path 50 for supplying a carburizing gas comprising methane gas as a hydrocarbon gas and nitrogen gas as a dilution gas into the processing chamber 10. A hydrocarbon gas cylinder 51 for supplying methane gas and a dilution gas cylinder 52 for supplying nitrogen gas are connected to the gas flow path 50, respectively.
Further, the carburizing apparatus 1 is provided with a sensor 70 for detecting the temperature and composition of the carburizing atmosphere gas in the processing chamber 10. For example, the detection unit at the tip of the sensor 70 is disposed at the position illustrated in FIG. 1, but is disposed in a space between the workpiece W and the direction regulating member 31 as illustrated in FIGS. 2 and 3. May be.
Since the temperature and composition of the carburizing atmosphere gas used for the carburizing process of the workpiece W can be monitored by the sensor 70, the temperature and composition of the carburizing atmosphere gas can be appropriately adjusted in accordance with characteristics such as the material and surface area of the workpiece W. Can be adjusted to any value. The sensor 70 may detect either the temperature or the composition of the carburizing atmosphere gas.

以上の構成の浸炭処理装置1によれば、方向規制部材31の内部の浸炭雰囲気ガスが、処理室10の殻壁11側および誘導加熱コイル20側へ流動するのを、前記方向規制部材31によって規制しているので、浸炭雰囲気ガスと前記処理室10の殻壁11及び誘導加熱コイル20との熱交換を効果的に抑制することができる。
したがって、本発明の浸炭処理装置1によれば、ワークWの浸炭処理時の熱損失を抑制して、浸炭処理に要するエネルギーの消費量を低減させることができる。具体的には、本発明の浸炭処理装置1は、前記方向規制部材31を設置していない従来の浸炭処理装置と比べて、浸炭処理時の熱損失を約17〜23%程度低減できることが確認されている。よって、本発明の浸炭処理装置1は、浸炭処理コストを安くすることができる。
According to the carburizing apparatus 1 having the above configuration, the carburizing atmosphere gas inside the direction regulating member 31 flows to the shell wall 11 side and the induction heating coil 20 side of the processing chamber 10 by the direction regulating member 31. Since it regulates, heat exchange between the carburizing atmosphere gas and the shell wall 11 of the processing chamber 10 and the induction heating coil 20 can be effectively suppressed.
Therefore, according to the carburizing apparatus 1 of the present invention, it is possible to suppress the heat loss during the carburizing process of the workpiece W and reduce the energy consumption required for the carburizing process. Specifically, it is confirmed that the carburizing apparatus 1 of the present invention can reduce the heat loss during the carburizing process by about 17 to 23% as compared with the conventional carburizing apparatus in which the direction regulating member 31 is not installed. Has been. Therefore, the carburizing apparatus 1 of the present invention can reduce the carburizing cost.

前記方向規制部材31は、図2に示されるように、少なくとも誘導加熱コイル20側表面が、ワークWからの輻射熱を反射する反射層31aとして構成されていてもよい。この反射層31aとしては、例えば、方向規制部材31の母材の表面に対して、金めっき等を施すことにより形成することができる。
また、前記誘導加熱コイル20は、図3に示されるように、当該誘導加熱コイル20の表面が、ワークWからの輻射熱を反射する反射層22として構成されていてもよい。この反射層22についても、誘導加熱コイル20の母材の表面に対して、金めっき等を施すことにより形成することができる。
As shown in FIG. 2, at least the induction heating coil 20 side surface of the direction regulating member 31 may be configured as a reflective layer 31 a that reflects radiant heat from the workpiece W. The reflective layer 31a can be formed, for example, by performing gold plating or the like on the surface of the base material of the direction regulating member 31.
Further, as shown in FIG. 3, the induction heating coil 20 may be configured such that the surface of the induction heating coil 20 is a reflective layer 22 that reflects radiant heat from the workpiece W. The reflective layer 22 can also be formed by performing gold plating or the like on the surface of the base material of the induction heating coil 20.

この場合、前記方向規制部材31の反射層31aまたは、誘導加熱コイル20の反射層22によって、ワークWからの輻射熱をワークW側空間へ反射することができるので、当該輻射熱と、前記誘導加熱コイル20および処理室10の殻壁11との熱交換をさらに抑制することができる。このため、ワークWの浸炭処理時における熱損失を一層効果的に抑制することができる。具体的には、前記方向規制部材31に反射層31aを形成した場合には、反射層31aを形成していない場合に比べて、浸炭処理時の熱損失を約8〜12%程度低減できることが確認されている。   In this case, since the radiant heat from the work W can be reflected to the work W side space by the reflective layer 31a of the direction regulating member 31 or the reflective layer 22 of the induction heating coil 20, the radiant heat and the induction heating coil can be reflected. 20 and the heat exchange with the shell wall 11 of the processing chamber 10 can be further suppressed. For this reason, the heat loss at the time of the carburizing process of the workpiece | work W can be suppressed more effectively. Specifically, when the reflective layer 31a is formed on the direction regulating member 31, the heat loss during the carburizing process can be reduced by about 8 to 12% compared to the case where the reflective layer 31a is not formed. It has been confirmed.

なお、前記浸炭処理装置1においては、図2および図3に示されるように、方向規制部材31の第2の円筒部34の内部に、方向規制部材31の内部の浸炭雰囲気ガスの滞留時間を調節するためのダンパ38(滞留時間調節部材)を設けてもよい。このダンパ38は、その回動軸38aを処理室10の外部から回動操作することにより、第2の円筒部34の内部の開口率を変化させることができ、これにより、方向規制部材31の内部における浸炭雰囲気ガスの滞留時間をワークWの特性に応じて適切にする調節することができる。したがって、ワークWの浸炭処理をより均一かつ効率よく行なうことができる。
また、前記ダンパ38によって、浸炭雰囲気ガスの還流量および排気量の総量を調節することにより、滞留時間を適切に調節することができる。
なお、前記ダンパ38の回動軸38aは、手動によって回動操作する場合の他、ステッピングモータ等の駆動手段によって遠隔操作する場合もある。
In the carburizing apparatus 1, as shown in FIGS. 2 and 3, the residence time of the carburizing atmosphere gas inside the direction regulating member 31 is set inside the second cylindrical portion 34 of the direction regulating member 31. A damper 38 (residence time adjusting member) for adjustment may be provided. The damper 38 can change the opening ratio inside the second cylindrical portion 34 by rotating the rotation shaft 38 a from the outside of the processing chamber 10. The residence time of the carburizing atmosphere gas inside can be adjusted to be appropriate according to the characteristics of the workpiece W. Therefore, the carburizing process of the workpiece W can be performed more uniformly and efficiently.
Further, the residence time can be appropriately adjusted by adjusting the total amount of the recirculation amount and the exhaust amount of the carburizing atmosphere gas by the damper 38.
The rotating shaft 38a of the damper 38 may be remotely operated by a driving means such as a stepping motor, in addition to being manually rotated.

この実施形態においては、滞留時間調節部材としてダンパ38を用いて、方向規制部材31の内部における浸炭雰囲気ガスの滞留時間を可変調整可能としているが、前記ダンパ38に代えて、第2の円筒部34の口径を適宜選択することにより、当該第2の円筒部34で滞留時間調節部材を兼用するようにしてもよい。   In this embodiment, the damper 38 is used as the residence time adjusting member, and the residence time of the carburizing atmosphere gas inside the direction regulating member 31 can be variably adjusted. However, instead of the damper 38, the second cylindrical portion is used. By appropriately selecting the diameter of 34, the second cylindrical portion 34 may also serve as a residence time adjusting member.

また、前記浸炭処理装置1においては、ワークの材質、表面積などの特性に応じた適正な浸炭雰囲気ガスの温度および組成の値を予め求めておき、この値を維持できるように、センサ70からの信号を入力として前記排出孔35bをフィードバック制御して、浸炭雰囲気ガスの処理室10への還流量を自動的に調整するようにしてもよい。   Further, in the carburizing apparatus 1, an appropriate temperature and composition value of the carburizing atmosphere gas corresponding to characteristics such as the material and surface area of the workpiece are obtained in advance, and the values from the sensor 70 are maintained so that these values can be maintained. The exhaust hole 35b may be feedback-controlled using a signal as an input to automatically adjust the amount of reflux of the carburizing atmosphere gas to the processing chamber 10.

1 浸炭処理装置
10 処理室
11 殻壁
20 誘導加熱コイル
22 反射層
31 方向規制部材
31a 反射層
35 還流規制部材
35b 排出口
38 ダンパ(滞留時間調節部材)
50 ガス流路
70 センサ
W ワーク
DESCRIPTION OF SYMBOLS 1 Carburizing apparatus 10 Processing chamber 11 Shell wall 20 Induction heating coil 22 Reflective layer 31 Direction control member 31a Reflective layer 35 Reflux control member 35b Outlet 38 Damper (residence time adjustment member)
50 Gas flow path 70 Sensor W Workpiece

Claims (5)

鋼製のワークに浸炭処理を施す浸炭処理装置であって、
前記ワークを内部にセットする処理室と、
前記処理室の内部に設置され、前記ワークを包囲して加熱する誘導加熱コイルと、
前記処理室内に浸炭ガスを供給するガス供給路と、
前記処理室内の浸炭雰囲気ガスを排気する排ガス流路と、
前記ワークと処理室の殻壁および誘導加熱コイルとを区画して処理室内を対流する浸炭雰囲気ガスがワーク側から処理室の殻壁側および誘導加熱コイル側へ流動するのを規制する筒状の方向規制部材と、
を備えていることを特徴とする浸炭処理装置。
A carburizing apparatus for carburizing a steel workpiece,
A processing chamber for setting the workpiece inside;
An induction heating coil that is installed inside the processing chamber and surrounds and heats the workpiece;
A gas supply path for supplying a carburizing gas into the processing chamber;
An exhaust gas passage for exhausting the carburizing atmosphere gas in the processing chamber;
A cylindrical shape that regulates the flow of the carburizing atmosphere gas that divides the workpiece, the shell wall of the processing chamber, and the induction heating coil from the workpiece side to the shell wall side of the processing chamber and the induction heating coil side. A direction regulating member;
A carburizing apparatus characterized by comprising:
前記方向規制部材の内部を通過した浸炭雰囲気ガスを導入して、当該浸炭雰囲気ガスを、前記処理室の殻壁と方向規制部材との間の空間へ所定流量還流させる還流規制部材を備える請求項1記載の浸炭処理装置。   A recirculation restriction member is provided that introduces the carburizing atmosphere gas that has passed through the inside of the direction restriction member and causes the carburizing atmosphere gas to flow at a predetermined flow rate to a space between the shell wall of the processing chamber and the direction restriction member. The carburizing apparatus according to 1. 前記方向規制部材の内部における浸炭雰囲気ガスの滞留時間を調節する滞留時間調節部材を備える請求項1または2記載の浸炭処理装置。   The carburizing apparatus according to claim 1, further comprising a residence time adjusting member that adjusts a residence time of the carburizing atmosphere gas inside the direction regulating member. 前記滞留時間調節部材が、前記方向規制部材の内部から前記還流規制部材の内部へ導入される浸炭雰囲気ガスの流量を可変調整可能なダンパである請求項3記載の浸炭処理装置。   The carburizing apparatus according to claim 3, wherein the residence time adjusting member is a damper capable of variably adjusting the flow rate of the carburizing atmosphere gas introduced from the inside of the direction regulating member to the inside of the reflux regulating member. 前記方向規制部材の表面または前記誘導加熱コイルの表面が、ワークからの輻射熱をワーク側空間へ反射する反射層として構成されている請求項1から請求項4のいずれかに記載の浸炭処理装置。   The carburizing apparatus according to any one of claims 1 to 4, wherein a surface of the direction regulating member or a surface of the induction heating coil is configured as a reflective layer that reflects radiant heat from a work to a work side space.
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