JP2011212526A - Coating pressure controller, coating pressure control method, program, and coating apparatus using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a coating pressure controller or the like capable of stably controlling the coating amount of a liquid material in spite of simple constitution.SOLUTION: The coating pressure controller 10 includes a plane image input part 11 for inputting plane image data (a) containing the coating shape a1 and light and shade distribution a2 of the liquid material applied to a member to be coated, a plane direction measuring part 12 for calculating the data b1 in the plane direction of the liquid material on the basis of the coating shape a1, a height direction measuring part 13 for calculating the data b2 in the height direction of the liquid material on the basis of the light and shade distribution a2, a coating pressure data input part 14 for inputting the data (c) of the coating pressure required in coating the member to be coated with the liquid material, and a coating pressure correction data output part 15 for calculating the correction value of the coating pressure from the data (c) of the coating pressure, the data b1 in the plane direction and the data b2 in the height direction and outputting the calculation result as coating pressure correction data (d).

Description

  The present invention relates to a coating pressure control device for controlling a coating pressure on a liquid material, and a coating device using the same.

  In recent years, products and parts have been miniaturized and improved in performance, and a diverse and high-quality product lineup has been demanded. Therefore, on the production site, it is necessary to realize high-mix, low-volume production with minimum tact and production cost. For this reason, in die bonders, mounters, etc., with the diversification and improvement in quality of liquid materials such as epoxy resins used for bonding, it is necessary to realize high precision and stabilization of coating amount at low cost. . In order to cope with such a situation, a mechanical coating method that achieves high-accuracy stabilization can be considered, but the operation cost such as introduction cost and liquid material replacement becomes expensive.

  Therefore, in order to achieve high accuracy and stabilization in the air-type coating method that suppresses introduction costs and operation costs, it is possible to achieve a certain level of stability by controlling coating conditions such as coating pressure, coating speed, and temperature management of liquid materials. Can be achieved. However, since it is difficult to measure the mass and volume of the coating amount in a short tact, it is difficult to realize further high accuracy.

Japanese Patent Laid-Open No. 2001-077942 JP 2008-253876 A JP 2007-250617 A

  In processes such as die bonding and mounting, a liquid material such as epoxy resin or solder is applied to a lead frame or a substrate, and electronic parts such as pellets cut out from a semiconductor wafer are mounted. At this time, if the coating amount is too large, the liquid material will crawl up on the electronic parts, causing quality incompatibility. Conversely, if the coating amount is small, the shear strength may not be obtained or it may cause cracks after completion. Since this leads to quality incompatibility, stable coating amount control is required with little variation. Moreover, in these processes, since the product type change accompanying the multi-product production is frequent, and the liquid material has an expiration date of several hours to several days, the liquid material must be easily exchangeable.

  There are two types of liquid material application methods, mechanical and pneumatic, which are properly used depending on the accuracy of application amount.

  The mechanical type can push a piston into a container containing a liquid material and apply the liquid material in proportion to the amount of the push, so generally high viscosity and high accuracy and stability of the application amount are required. Applies when However, since a piston and a mechanism for pushing it in are necessary and the configuration is complicated, the price of the apparatus is higher than that of the air type. In addition, since the liquid material is directly extruded, the mechanism such as the piston has to be disassembled and cleaned when changing the liquid material or replacing it on a regular basis, resulting in increased operating costs.

  On the other hand, in the air type, air pressure is applied directly or via a disposable piston to the liquid material and pushed out, so that the configuration is simple and the apparatus price is low. In addition, since the liquid material can be changed or regularly replaced, the operation cost can be suppressed because only the container needs to be replaced. However, it is affected by the expansion / contraction of air and the remaining amount / viscosity of the material.

  For the above reasons, in die bonding and mounting processes, the introduction and operation costs are suppressed, and the application amount is adjusted by adjusting the application amount in lot units, and the air method is adopted. Yes. However, in recent years, depending on the lead frame material, etc., the correlation between the wettability, which is the spread of the liquid material when mounting electronic components, and the quality has increased, and high accuracy and high stability of the coating amount have been required. became. For this reason, there is no problem with accuracy in the coating amount immediately after adjusting the coating amount after replacing the liquid material, but slight fluctuations in the coating amount due to the influence of the remaining amount of the liquid material and the change in viscosity over time deteriorate the wettability. The problem that quality nonconformity occurs frequently has come to occur. This can be dealt with by frequently adjusting the coating amount. However, since adjustment occurs in units of several tens of minutes to several hours, an operation cost due to adjustment man-hours is required.

  The above-mentioned patent documents 1 to 4 can be cited as attempts to solve such problems.

  In Patent Document 1, since the application amount at two kinds of application pressures is measured in advance, the proportional relationship between the pressure at the time of measurement and the application amount is obtained, and the application pressure corresponding to the required application amount is calculated. The company is trying to improve production efficiency compared with the case of making general adjustments. Further, by periodically obtaining this proportional relationship, it is intended to effectively remove the influence of viscosity change and maintain the coating amount with high accuracy. However, since the period for obtaining the proportional relationship is caused by the characteristics of the liquid material, it is necessary to frequently obtain the proportional relationship for a material having a large characteristic change. Further, in the processes such as die bonding and mounting, there is a problem that since it is necessary to use various liquid materials properly, it is not possible to expect improvement in production efficiency in practice.

  In Patent Document 2, in response to a request from a scheduling unit that plans the timing for measuring the coating amount, an attempt is made to increase efficiency by automatically measuring the coating amount during production operation and calculating an appropriate coating pressure. Yes. However, there is a problem that a measuring instrument for measuring the coating amount is required, and further operation costs such as calibration of the measuring instrument and cleaning of the coated material after the measurement are required.

  Compared with the above-mentioned two patent documents, in Patent Document 3, it is possible to roughly calculate the coating amount by imaging the coating state and calculating the coating area by image processing. The liquid material temperature is controlled to stabilize the coating amount efficiently. However, when the viscosity of the liquid material changes, if the viscosity increases, the horizontal spread of the coating shape slows down and the vertical height increases, and if the viscosity decreases, the horizontal spread increases and the vertical The direction height decreases. As described above, since only the horizontal change component can be captured in the application area, there is a problem in the accuracy of the application amount. In order to avoid this, three-dimensional shape measurement such as stereo camera image processing or laser measurement can be considered, but the tact time associated with the increase in equipment cost, measurement time, complicated image processing, etc. is extended, and production efficiency is increased. The problem of dropping occurs.

  Accordingly, an object of the present invention is to provide a coating pressure control device and the like that can stably control the coating amount of a liquid material with a simple configuration.

The coating pressure control device according to the present invention is
A planar image input unit for inputting planar image data including the application shape and density distribution of the liquid material applied to the member to be coated;
A plane direction measurement unit for obtaining information on the plane direction of the liquid material based on the application shape included in the plane image data input from the plane image input unit,
A height direction measurement unit that obtains information on the height direction of the liquid material based on the density distribution included in the planar image data input from the planar image input unit;
An application pressure data input unit for inputting application pressure data required to apply the liquid material to the application member;
Based on the coating pressure data input from the coating pressure data input unit, the plane direction information obtained by the plane direction measuring unit, and the height direction information obtained by the height direction measuring unit, the coating is performed. An application pressure correction data output unit that calculates a correction value of pressure and outputs the result as application pressure correction data;
It is equipped with.

The application pressure control method according to the present invention includes:
Input the plane image data including the application shape and density distribution of the liquid material applied to the coated member,
Based on the coating shape included in the input planar image data, obtain information on the planar direction of the liquid material,
Based on the density distribution included in the input planar image data, obtain information on the height direction of the liquid material,
Input application pressure data required to apply the liquid material to the application member,
The correction value of the application pressure is calculated from the input data of the application pressure, the obtained information on the plane direction, and the obtained information on the height direction.
Is.

The application pressure control program according to the present invention is:
Planar image input procedure for inputting planar image data including the application shape and density distribution of the liquid material applied to the member to be coated;
A plane direction measurement procedure for obtaining information on the plane direction of the liquid material based on the application shape included in the plane image data input in the plane image input procedure,
A height direction measurement procedure for obtaining information on the height direction of the liquid material based on the density distribution included in the planar image data input in the planar image input procedure,
Application pressure data input procedure for inputting application pressure data required to apply the liquid material to the application member;
From the coating pressure data input in the coating pressure data input procedure, the plane direction information obtained in the plane direction measurement procedure, and the height direction information obtained in the height direction measurement procedure, the coating is performed. Application pressure correction data output procedure for calculating a pressure correction value and outputting the result as application pressure correction data;
Is to make the computer execute.

  According to the present invention, it is possible to accurately grasp the relationship between the coating amount and the coating pressure of the liquid material by paying attention to the coating shape and the density distribution in the planar image data of the liquid material applied to the member to be coated. Therefore, it is possible to provide a coating pressure control device and the like that can stably control the coating amount of the liquid material with a simple configuration.

FIG. 1 [1] is a functional block diagram of a coating pressure control device, and FIG. 1 [1] is a flowchart of a coating pressure control method according to an embodiment of the present invention. It is a perspective view which shows the coating device in one Embodiment of this invention. It is explanatory drawing which shows the operation principle (the 1) of the coating device of FIG. It is explanatory drawing which shows the operation principle (the 2) of the coating device of FIG. It is explanatory drawing which shows the operation principle (the 3) of the coating device of FIG. It is explanatory drawing which shows the operation principle (the 4) of the coating device of FIG.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as “embodiments”) will be described with reference to the accompanying drawings. FIG. 1 shows an embodiment of the present invention, FIG. 1 [1] is a functional block diagram of a coating pressure control device, and FIG. 1 [1] is a flowchart of a coating pressure control method. The outline of the present embodiment will be described below based on this drawing.

  The application pressure control apparatus 10 according to the present embodiment includes a planar image input unit 11 that inputs planar image data a including an application shape a1 and a density distribution a2 of a liquid material applied to a member to be applied, and a planar image input unit 11. Based on the application shape a1 included in the input plane image data a, the plane direction measurement unit 12 that obtains information b1 on the plane direction of the liquid material, and the shading included in the plane image data a input from the plane image input unit 11 Based on the distribution a2, the height direction measuring unit 13 for obtaining the height direction information b2 of the liquid material, and the application pressure data input unit for inputting the application pressure data c required to apply the liquid material to the member to be applied 14, coating pressure data c input from the coating pressure data input unit 14, plane direction information b <b> 1 determined by the plane direction measuring unit 12, and height direction determined by the height direction measuring unit 13 And of calculating the correction value of the applied pressure from the information b2 Prefecture, the coating pressure correction data output unit 15 for outputting the result as applying pressure correction data d, are those having a.

  For example, the application pressure correction data output unit 15 calculates the application amount of the liquid material from the plane direction information b1 and the height direction information b2, and corrects the application pressure if the application amount is larger than an appropriate value. If the coating amount is smaller than the appropriate value, a correction value for increasing the coating pressure is calculated.

  For example, when the periphery of the application shape a1 is darkened (darkened) and the center is lightened (lightened), the height direction measuring unit 13 has a lower liquid material height and a lighter portion. Therefore, information b2 in the height direction of the liquid material is obtained. At this time, the height direction measurement unit 13 may determine that the height of the top of the liquid material is higher as the proportion of the light portion in the entire application shape is smaller. The plane direction measuring unit 12 may obtain the area of the application shape a1 or the line width of the application shape a1 as the information b1 in the plane direction of the liquid material. Needless to say, the height direction is a direction perpendicular to the plane direction. The line width is the width of a line when the coating shape is linear.

  The present inventor has found that the density distribution a2 of the liquid material applied to the member to be coated reflects the information b2 in the height direction of the liquid material, and has come to make the present invention based on this knowledge. For example, in the planar image data a of the liquid material, when the periphery of the application shape a1 becomes dark and the center becomes light, the darker portion has a lower liquid material height, and the lighter portion has a higher liquid material height. This is because the dark portion is a surface that is nearly perpendicular to the plane because of less reflected light, and the light portion is a surface that is nearly parallel to the plane because there is much reflected light. In addition, the smaller the proportion of the light portion in the entire coated shape, the higher the top of the liquid material. This is because the vertical cross section of the liquid material applied to the member to be coated is substantially semicircular if the amount is small, but is crushed by gravity and changes to a substantially trapezoid as the amount increases. That is, if the longitudinal section of the liquid material is substantially semicircular, the proportion of the portion that is nearly parallel to the plane near the top decreases, and if it is substantially trapezoidal, the portion that is nearly parallel to the plane near the top. This is because the proportion of Thereby, the three-dimensional shape of the liquid material can be accurately grasped from the planar image data a of the liquid material applied to the member to be coated. Therefore, since it is easy to acquire the planar image data a, it is possible to calculate the application amount of the liquid material applied to the member to be applied with high accuracy and simplicity. Thereby, since the relationship between the coating amount and the coating pressure of the liquid material can be accurately grasped, it is possible to provide the coating pressure control device 10 and the like that can stably control the coating amount of the liquid material with a simple configuration. .

  The application pressure control method of the present embodiment is realized as an operation of the application pressure control apparatus 10. That is, in the coating pressure control method of this embodiment, the planar image data a including the coating shape a1 and the density distribution a2 of the liquid material applied to the member to be coated is input (step 101), and the input planar image data a Information b1 in the planar direction of the liquid material is obtained based on the application shape a1 included in the liquid (step 102), and information b2 in the height direction of the liquid material is obtained based on the density distribution a2 included in the inputted planar image data a. Obtaining (step 103), inputting the application pressure data required to apply the liquid material to the member to be applied (step 104), and obtaining the inputted application pressure data and the obtained plane direction information b1. The correction value of the coating pressure is calculated from the height direction information b2 (step 105). Either step 101 or step 104 may be first. Either step 102 or step 103 may be first.

  The application pressure control device 10 can also be realized by a computer and its program. The application pressure control program of this embodiment is for causing a computer to realize the operation of each part of the application pressure control apparatus 10. That is, the application pressure control program of this embodiment is input by the planar image input procedure for inputting the planar image data a including the application shape a1 and the density distribution a2 of the liquid material applied to the member to be applied, and the planar image input procedure. Based on the coating shape a1 included in the planar image data a, the planar direction measurement procedure for obtaining the planar direction information b1 of the liquid material, and the density distribution a2 included in the planar image data a input in the planar image input procedure Based on the height direction measurement procedure for obtaining the height direction information b2 of the liquid material, the application pressure data input procedure for inputting the application pressure data c required to apply the liquid material to the member to be applied, and the application pressure Application pressure data c input in the data input procedure, plane direction information b1 obtained in the plane direction measurement procedure, and height direction information b2 obtained in the height direction measurement procedure It calculates a correction value of the coating pressure from, is intended for executing a coating pressure correction data output procedure to output the result as a pressure correction data d, to the computer. Either the planar image input procedure or the application pressure data input procedure may be performed first. Either the planar direction measurement procedure or the height direction measurement procedure may be first. The computer used here may be a general computer having a CPU, a memory (ROM and RAM), an input / output interface, and the like. At this time, the CPU reads, interprets, and executes the application pressure control program of the present embodiment stored in the memory.

  According to the coating pressure control method and program of the present embodiment, the same operations and effects as the coating pressure control device 10 are achieved. In addition, the coating pressure control method and program of the present embodiment can take various configurations according to the configuration of the coating pressure control apparatus 10.

  FIG. 2 is a perspective view showing the coating apparatus of the present embodiment. Hereinafter, description will be given based on this drawing.

  The coating apparatus 20 of the present embodiment includes the coating pressure control apparatus 10 of the present embodiment, a coating unit 30, a camera 21 as an imaging unit, and a controller 22 as a control unit. The coating pressure control device 10 is built in the controller 22. The application unit 30 applies an application pressure to the liquid material 41 ′ accommodated in the syringe 31 as a container, thereby discharging the liquid material 41 ′ from the syringe 31 and applying it to the lead frame 42 as the application target member. Specifically, the application means 30 includes a syringe 31 that stores the liquid material 41 ′, a nozzle 32 that is provided at the tip of the syringe 31 and discharges the liquid material 41 ′, and a liquid material 41 ′ that is stored in the syringe 31. It has a dispenser 33 that applies pressure, and an air pipe 34 that connects the syringe 31 and the dispenser 33. The camera 21 takes in the plane image data of the liquid material 41 applied to the lead frame 42 and outputs it to the application pressure control device 10. The controller 22 determines the application pressure applied to the liquid material 41 ′ and instructs the dispenser 33. Furthermore, the controller 22 outputs the current application pressure data to the application pressure control device 10 and determines the next application pressure based on the application pressure correction data output from the application pressure control device 10 to the dispenser 33. Has the function of indicating.

  The present embodiment provides a coating amount control method and a coating amount stabilizing device adapted to a change in remaining amount and a viscosity accompanying a change with time in application of a liquid material 41 such as an epoxy resin in a die bonding or mounting process. That is, by imaging the application state and performing image processing, the application pressure is controlled based on the application area and the density information of the application part, thereby realizing a stable application amount. This realizes high-efficiency production even with the air-type coating method at the minimum necessary operation cost. Hereinafter, the present embodiment will be described in more detail.

  FIG. 2 shows a configuration of coating amount stability control in die bonding as an example of the present embodiment. The die bonding apparatus is an apparatus for applying and bonding an epoxy resin as an adhesive in a predetermined drawing shape onto an object to be bonded such as a lead frame, and mounting and bonding a bonded body such as a pellet cut out from a semiconductor wafer. . In this embodiment, for the purpose of stabilizing the coating amount corresponding to the remaining amount of liquid material and the change in viscosity over time, using an air-type coating device that suppresses introduction and operation costs, here, about the application of epoxy resin Show.

  A liquid material 41 ′ is accommodated in a syringe 31 serving as a container, and the liquid material 41 ′ is applied from a nozzle 32 attached to the tip of the syringe 31. The dispenser 33 is connected to the syringe 31 via the air pipe 34 and applies pressure to the liquid material 41 ′ by supplying air of a predetermined application pressure set by the controller 22 to the syringe 31. Here, the dispenser 33 is used, but any device capable of controlling the air pressure such as an electropneumatic regulator may be used. The liquid material 41 is drawn and applied on the lead frame 42 by relatively moving the syringe 31 and the lead frame 42 by a drive system (not shown). The controller 22 captures an image obtained by capturing the application state of the liquid material 41 with the camera 21, calculates the application amount, and sets the application pressure to be set to an appropriate application amount for the dispenser 33.

  Next, a method for calculating the application pressure to be set from the captured image will be described. FIG. 3 shows a low-viscosity liquid material 411 (FIG. 3 [1]) and a high-viscosity liquid material 412 (FIG. 3 [2]) when the same amount of liquid material is applied by line drawing application. This shows the difference between the line widths L1 and L2. As shown in the figure, even when the application amount of the liquid material is the same, the application area varies depending on the viscosity. This is due to the following reason.

  When the same amount of liquid material is applied, it spreads in the horizontal direction under the influence of gravity applied to each liquid material itself. In the low-viscosity liquid material 411, compared with the high-viscosity liquid material 412, the liquid material can be deformed with a small force, so that it spreads in the horizontal direction and the line width L1 becomes thick. On the other hand, in the high-viscosity liquid material 412, the line width L2 is narrower than that of the low-viscosity liquid material 411. As a result, the coating area obtained by image processing of the coating shape is wider for the low-viscosity liquid material 411 and narrower for the high-viscosity liquid material 412. 3 and 5 indicate that the mesh size is lighter (brighter) as it is larger, and darker (darker) as it is smaller.

  FIG. 4 shows the cross section of the line drawing application in FIG. 3 and the amount of illumination reflection during imaging. As shown in the figure, the height varies depending on the viscosity even when the application amount of the liquid material is the same, and the degree of shading of the captured image changes. This is due to the following reason.

  In the low-viscosity liquid material 411 (FIG. 4 [1]), since it tends to spread in the horizontal direction, the height H1 is reduced, so that the gradient becomes gentle and the amount of reflected light at the coated portion is high-viscosity liquid material 412 (FIG. 4). More than (2)) (ie brighter). On the other hand, the high-viscosity liquid material 412 (in the figure, since it is difficult to spread in the horizontal direction, the height H2 is increased, so that the gradient becomes steep and the amount of reflected light at the application portion is smaller than that of the low-viscosity liquid material 411. 4 and 5, the direction of the arrow indicates the direction of light, and the length indicates the intensity of light.

  Liquid materials such as epoxy resins used in die bonders are cured by heat or ultraviolet rays, but have little volume change before and after curing. Even if the viscosity of the liquid material changes, it can be said that the coating amount is stable if the volume and mass do not change. Therefore, the case where the change in the viscosity of the liquid material is taken into account means that even if the application area is constant, it cannot be said that the application volume is constant. That is, as shown in FIGS. 3 and 4, even when the same amount of liquid material is applied, the application area varies due to the difference in viscosity. In addition, the drawing shape differs depending on the size of the pellets that are the joints, so even if there is a proportional correlation in the ratio of the coating amount to the pellet size, the coating amount and the coating area are proportional to each other. It does not always become. Considering this and the fact that the liquid material is changed for each product type, an appropriate application pressure must be calculated for each product type. Therefore, in the present embodiment, the appropriate application pressure is calculated from the captured image by the following calculation formula (1).

      ΔP = α × ΔS + β (1)

  ΔP: A correction amount from the current application pressure. ΔP is expressed by (pressure to be set) − (currently set pressure).

  ΔS: Deviation from the appropriate application area. ΔS is expressed as (appropriate application area) − (current application area). Here, the appropriate application area refers to the application area when the application conditions are adjusted in advance so that the optimum application amount is obtained by adjustment. The application pressure at this time is referred to as “appropriate application pressure”, and the application amount is also referred to as “appropriate application amount”.

  α: A coefficient mainly depending on a change in coating amount other than a viscosity change, for example, a coefficient depending on a pellet size, a coating drawing shape, a remaining amount change, and the like. α is expressed as a coating pressure change amount for maintaining a proper coating amount even when a viscosity change occurs, or a ratio of a coating area fluctuation amount between a predetermined pressure (± 5 kPa and ± 20 kPa) with respect to the proper coating pressure. . For example, when the appropriate application pressure is 20 kPa and the predetermined pressure is ± 5 kPa, α = (application area measured by applying at 25 kPa) ÷ (application area measured by applying at 15 kPa).

  β: a value calculated mainly depending on viscosity, which is a value calculated by the area gradient (referred to herein as “cross-sectional area gradient”) of the cross section of the coating portion shown in FIG. This is a value calculated depending on the height, the degree of change in the coating area, and the degree of shading of the image obtained by imaging.

  β is the ratio of the application area change or area change rate when applying the same shape and the same amount of liquid material according to the viscosity change, and the ratio of the density change or the density change rate. Viscosity changes must be grasped in time series, which is time consuming and unacceptable at the production site. Therefore, if the surface tension or specific gravity of the liquid material is known, the gradient curve of the cross section is calculated from the line width and volume at the time of application, and the change in shading from the angle formed by the reflection angle of the illumination and the imaging surface of the camera What is necessary is just to calculate a degree. Also, in a short time when there is no change in viscosity or there is no effect, the application amount is almost constant and the application area and the application height are kept constant by changing the application height slightly while keeping the application speed constant. Since different application shapes can be reproduced, the cross-sectional area gradient may be calculated as the ratio between the application area change or area change rate and the shade change or shade change rate.

  From the above description, the calculation associated with the change in coating amount will be considered. For example, let us consider a case where the application amount changes due to clogging of the application nozzle or the effect of water head difference due to a change in the remaining amount without changing the viscosity, thereby reducing the application amount. In this case, since there is no change in viscosity, there is no change in the force that spreads the liquid material horizontally without changing the height under the same application conditions, so the application area becomes small. That is, although ΔS varies, the cross-sectional area gradient does not change. Therefore, α × ΔS affects the application pressure correction amount, but the value of β is close to 0, and as a result, α × ΔS becomes the application pressure. The amount of correction is determined predominantly.

  On the contrary, a case will be considered in which the application amount becomes constant (FIG. 4) due to reasons such as the application nozzle being clogged despite the occurrence of a change in viscosity. In this case, the force that spreads in the horizontal direction of the liquid material is weakened by the increase in viscosity, so the area is reduced and the height is increased. At this time, since the coating area to be measured decreases, α × ΔS acts to increase the coating pressure. On the other hand, since the gradient of the cross-sectional area of the coating portion becomes steep, an image density change occurs and β acts to lower the coating pressure. As a result, when there is no change in the coating amount, α × ΔS and β are offset and the coating pressure is corrected to zero.

  For this reason, in the case of a viscosity increase that generally occurs, the coating amount decreases, but the height in the coating cross section does not change, and the horizontal spreading force of the liquid material decreases. The applied area is reduced. Therefore, α × ΔS acts to increase the coating pressure. On the other hand, β also has the same height and a smaller cross-sectional area than before the viscosity change, so that the cross-sectional area gradient is increased, so that the application pressure is increased.

  As described above, in the application amount change accompanying the viscosity change, not only the application area change amount due to the change in the force spreading in the horizontal direction, but also the application amount of the application amount can be accurately determined by using the cross-sectional area gradient to capture the application amount as a volume. A change can be captured, and a correction amount for stabilizing the coating amount can be appropriately calculated.

  In this way, α, ΔS, β shown in the calculation formula (1) are used as parameters for each product type, the application state is imaged by the camera 21 in a timely manner, and ΔP which is a correction amount from the image processing and the current application pressure by the controller 22. By calculating the above and giving an instruction to the dispenser 33 to correct the application pressure by ΔP, it is possible to realize stabilization of the application amount adapted to a change in the remaining amount of liquid material and a change in viscosity over time. It becomes possible.

  Next, the effect of this embodiment will be described. As a first effect, in the application of liquid materials such as epoxy resins, it is possible to stably secure an appropriate application amount without depending on the remaining amount change or viscosity change over time. Variations in the amount of liquid material applied can be suppressed and quality can be improved. As a second effect, in the application of liquid material, the mechanical mechanism is complicated and expensive, and the air type that is simple and can be configured at a lower cost than the mechanical method is used. it can. As a third effect, since it is a simple mechanism by using an air type, it is possible to reduce man-hours such as change of the liquid material, periodic replacement and maintenance, and to suppress the production cost.

  Next, another example of operation in the coating apparatus 20 of the present embodiment will be described.

  In the above-described example, high-precision stabilization of the coating amount is achieved by coating pressure correction based on change in the area of the coating portion and coating pressure correction based on the cross-sectional gradient calculated from the coating area and the degree of shading. However, the line width captured as a cross section of one or more predetermined application shapes may be used instead of the area of the entire application shape. In this example, another application pressure correction calculation method will be described with reference to FIG. 5 in the same configuration as the above example.

  FIG. 5 shows an image and a cross section of a predetermined portion of line coating drawing in a state where the same amount of a low-viscosity liquid material and a high-viscosity liquid material generated by viscosity change are applied. . In this case, since the application amount is the same, the cross-sectional area of both is constant. Since the low-viscosity liquid material 411 (FIG. 5 [1]) has a larger force spreading in the horizontal direction than the high-viscosity liquid material 412 (FIG. 5 [2]), the line width L1 is large but the height H1 is large. Since the reflection from the illumination during imaging is uniform, the cross-sectional area gradient described in the above example is also small. On the other hand, the high-viscosity liquid material 412 has a smaller force that spreads in the horizontal direction than the low-viscosity liquid material 411. Therefore, the line width L2 is small but the height H2 is high, and reflection from the illumination during imaging is low. The change is intense and the cross-sectional area gradient is large. For this reason, in this example, the appropriate application pressure is calculated from the captured image by the following calculation formula (2).

      ΔP = α × ΔL + β (2)

  ΔP: The same value as in the above example, and indicates the correction amount from the current application pressure. ΔP is expressed by (pressure to be set) − (currently set pressure).

  ΔL: Deviation from the appropriate coating width. ΔL is expressed by (appropriate application width) − (current application width). Here, the coating width refers to the length of the base in the cross section of the line coating drawing of a predetermined portion. The proper application width refers to the application width when the application conditions are adjusted in advance so as to obtain an optimum application amount.

  α: The same value as in the above-described example, which is a coefficient mainly depending on a change in coating amount other than a change in viscosity, for example, a coefficient depending on a pellet size, a coating drawing shape, and a remaining amount change. α is expressed as a coating pressure change amount for maintaining a proper coating amount even when a viscosity change occurs, or a ratio of a coating width fluctuation amount between a predetermined pressure (± 5 kPa and ± 20 kPa) with respect to the proper coating pressure. . For example, when the appropriate application pressure is 20 kPa and the predetermined pressure is ± 5 kPa, α = (application width measured by applying at 25 kPa) ÷ (application width measured by applying at 15 kPa).

  β: The same value as in the above-mentioned example, which is a value calculated mainly depending on the viscosity, and is based on the area gradient (herein referred to as “cross-sectional area gradient”) of the coating section shown in FIG. It is a calculated value that is calculated depending on the degree of change in height and coating width due to a change in viscosity and the degree of shading of an image obtained by imaging.

  β is a ratio of change in application width or change in application width when applying the same shape and the same amount of liquid material according to viscosity change, and ratio of change in density or change in density, in order to measure this However, it takes time and effort to grasp the change in viscosity in time series, which is unacceptable at the production site. Therefore, if the surface tension or specific gravity of the liquid material is known, the gradient curve of the cross section is calculated from the line width and volume at the time of application, and the change in shading from the angle formed by the reflection angle of the illumination and the imaging surface of the camera What is necessary is just to calculate a degree. Also, in a short period of time when there is no change in viscosity or there is no effect, the coating height can be changed slightly while applying at a constant coating speed. Since different application shapes can be reproduced, the cross-sectional area gradient may be calculated as the ratio between the application width change or application width change rate and the density change or density change rate.

  Here, the predetermined portion may be a single portion, but it is preferable to use a plurality of points because the line width in line coating drawing may not be stable and the coating width may fluctuate particularly at high viscosity. The accuracy increases when statistical processing such as weighting according to the sum, average, and variance at the plurality of points is performed. In FIG. 6, four intersections 41a, 41b, 41c, and 41d indicated by dotted lines in the X-line coating drawing of the liquid material 41 are shown as a plurality of predetermined portions. As in this example, it may be equidistant from the center or may be random, but the coating width in a cross section perpendicular to the line drawing is calculated.

  From the above description, the calculation associated with the change in coating amount will be considered. For example, let us consider a case in which the application amount is reduced due to a change in the application amount due to the clogging of the application nozzle or the effect of a water head difference due to a change in the remaining amount without causing a change in viscosity. In this case, since there is no change in the viscosity, the height does not fluctuate under the same application condition, and the horizontal spreading force of the liquid material does not change, so the application width becomes narrow. That is, although ΔL varies, the cross-sectional area gradient does not change, so α × ΔL affects the application pressure correction amount. On the other hand, since the value of β is close to 0, as a result, α × ΔL predominantly determines the application pressure correction amount.

  On the other hand, consider the case where the application amount becomes constant (FIG. 5) due to reasons such as the application nozzle being clogged despite the occurrence of a change in increasing viscosity. In this case, since the force spreading in the horizontal direction of the liquid material is weakened due to the increase in viscosity, the coating width is reduced and the height is increased. At this time, since the measured application width decreases, α × ΔL acts to increase the application pressure. On the other hand, since the gradient of the cross-sectional area of the coating portion becomes steep, image density changes occur, and β acts to lower the coating pressure. Therefore, when there is no change in the coating amount, α × ΔL and β cancel each other, and the correction of the coating pressure becomes zero.

  Consider the case of a viscosity increase that generally occurs. In this case, although the coating amount decreases, the height in the coating cross section does not change, and the spreading force of the liquid material in the horizontal direction decreases, so the coating cross section becomes small and the measured coating width becomes small. Therefore, α × ΔL acts to increase the coating pressure. On the other hand, β also has the same height and a smaller cross-sectional area than before the viscosity change, so that the cross-sectional area gradient increases and acts to increase the coating pressure.

  As described above, in the application amount change accompanying the viscosity change, not only the application width change amount due to the change in the force spreading in the horizontal direction, but also the application amount can be accurately determined by using the cross-sectional area gradient in order to capture the application amount as a volume. A change can be captured, and a correction amount for stabilizing the coating amount can be appropriately calculated.

  In this way, α, ΔL, β shown in the calculation formula (2) are used as parameters for each product type, the application state is imaged by the camera 21 in a timely manner, and ΔP, which is a correction amount from the image processing and the current application pressure by the controller 22. And by correcting the application pressure to the dispenser 33 by ΔP, it is possible to realize stabilization of the application amount adapted to the change in the remaining amount of liquid material and the change in viscosity over time. .

  The present invention has been described above with reference to the above embodiment, but the present invention is not limited to the above embodiment. Various changes that can be understood by those skilled in the art can be made to the configuration and details of the present invention. For example, the calculation formulas (1) and (2) are merely examples, and other calculation formulas may be used.

  Although a part or all of the above embodiments can be described as the following supplementary notes, the present invention is not limited to the following configurations.

(Appendix 1) In the step of applying a liquid material in advance using a liquid material for bonding and joining when mounting or joining an electronic component or the like,
A liquid material contained in a container;
Application means for applying the liquid material by pressurizing the container at a predetermined pressure;
Driving means for applying the liquid material in a predetermined shape;
Imaging means for imaging the application state of the liquid material;
A controller for controlling the driving means and processing an image obtained from the imaging means to calculate an optimum application pressure and designating an appropriate pressure for the application means;
A coating apparatus comprising:

(Appendix 2) In the coating apparatus according to Appendix 1,
The liquid material is a liquid fluid in the form of a gel, and the amount of application varies even under the same application conditions due to the influence of the remaining amount of the liquid material and the change in viscosity over time of the liquid material itself.
Coating apparatus characterized by that

(Appendix 3) In the coating apparatus according to Appendix 1 or 2,
The image processing is characterized in that the application amount is calculated by performing arithmetic processing using the area and density information of the application portion obtained from the application shape of the liquid material, and the application amount is maintained with high accuracy and stability. To calculate the application pressure for
An applicator characterized by that.

(Appendix 4) In the coating apparatus according to any one of appendices 1 to 3,
The image processing is characterized in that a coating amount is calculated by performing arithmetic processing using the coating width and shading information in one or more predetermined portions obtained from the coating shape of the liquid material, and the coating amount is highly accurate. And calculate the application pressure to keep it stable,
An applicator characterized by that.

(Additional remark 11) The plane image input part which inputs the plane image data containing the application | coating shape and density distribution of the liquid material apply | coated to the to-be-coated member,
A plane direction measurement unit for obtaining information on the plane direction of the liquid material based on the application shape included in the plane image data input from the plane image input unit,
A height direction measurement unit that obtains information on the height direction of the liquid material based on the density distribution included in the planar image data input from the planar image input unit;
The application amount of the liquid material is calculated from the information on the plane direction obtained by the plane direction measurement unit and the information on the height direction obtained by the height direction measurement unit, and the result is used as application amount data. A coating amount output section to output,
A coating amount calculation device comprising:

(Supplementary note 12) In the application amount calculation apparatus according to supplementary note 11,
The height direction measurement unit, when the periphery of the application shape is dark and the center is light, it is determined that the height of the liquid material is lower as the darker part is higher and the height of the liquid material is higher as the lighter part, Find information on the height direction of the liquid material,
Application amount calculation device.

(Supplementary note 13) In the application amount calculation apparatus according to supplementary note 12,
The height direction measurement unit determines that the height of the top of the liquid material is higher as the proportion of the light portion in the entire application shape is smaller.
Application amount calculation device.

(Supplementary note 14) In the application amount calculation device according to any one of supplementary notes 11 to 13,
The plane direction measurement unit obtains the area of the application shape as information on the plane direction of the liquid material.
Application amount calculation device.

(Supplementary note 15) In the application amount calculation device according to any one of Supplementary notes 11 to 13,
The plane direction measurement unit obtains the width of the application shape as information on the plane direction of the liquid material,
Application amount calculation device.

(Supplementary Note 16) The application amount calculation device according to any one of Supplementary Notes 11 to 15,
An applying means for applying a pressure to the liquid material contained in the container to discharge the liquid material from the container and applying the liquid material to the application member;
Imaging means for taking in the planar image data of the liquid material applied to the member to be applied and outputting it to the application amount calculation device;
Control means for determining the pressure applied to the liquid material and instructing the application means;
The control unit has a function of determining the optimum pressure based on the coating amount data output from the coating amount calculating device and instructing the coating unit.
Coating device.

(Additional remark 17) The plane image data containing the application | coating shape and density distribution of the liquid material apply | coated to the to-be-coated member are input,
Based on the coating shape included in the input planar image data, obtain information on the planar direction of the liquid material,
Based on the density distribution included in the input planar image data, obtain information on the height direction of the liquid material,
Calculate the coating amount of the liquid material from the obtained plane direction information and the obtained height direction information,
Application amount calculation method.

(Supplementary note 18) In the application amount calculation method according to supplementary note 17,
When the periphery of the coating shape is dark and the center is light, it is determined that the darker portion has a lower height of the liquid material and the lighter portion has a higher height of the liquid material. Ask for information,
Application amount calculation method.

(Supplementary note 19) In the application amount calculation method according to supplementary note 18,
It is judged that the height of the top of the liquid material is higher as the proportion of the light part in the entire coating shape is smaller.
Application amount calculation method.

(Supplementary note 20) In the coating amount calculation method according to any one of supplementary notes 17 to 19,
As information on the planar direction of the liquid material, the area of the application shape is obtained.
Application amount calculation method.

(Supplementary note 21) In the coating amount calculation method according to any one of supplementary notes 17 to 19,
As information on the planar direction of the liquid material, the width of the coating shape is obtained.
Application amount calculation method.

(Appendix 22) Plane image input procedure for inputting plane image data including the application shape and density distribution of the liquid material applied to the member to be coated;
A plane direction measurement procedure for obtaining information on the plane direction of the liquid material based on the application shape included in the plane image data input in the plane image input procedure,
A height direction measurement procedure for obtaining information on the height direction of the liquid material based on the density distribution included in the planar image data input in the planar image input procedure,
The application amount of the liquid material is calculated from the information on the planar direction obtained in the planar direction measurement procedure and the information on the height direction obtained in the height direction measurement procedure, and the result is used as application amount data. A procedure for outputting the coating amount to be output,
A coating amount calculation program for causing a computer to execute.

(Supplementary note 23) In the application amount calculation program according to supplementary note 22,
In the height direction measurement procedure, when the periphery of the application shape is dark and the center is light, it is determined that the height of the liquid material is lower as the dark part is higher and the height of the liquid material is higher as the lighter part, Find information on the height direction of the liquid material,
Application amount calculation program.

(Supplementary Note 24) In the application amount calculation program described in Supplementary Note 13,
In the height direction measurement procedure, it is determined that the height of the top of the liquid material is higher as the proportion of the light portion in the entire coating shape is smaller.
Application amount calculation program.

(Supplementary Note 25) In the application amount calculation program according to any one of Supplementary Notes 22 to 24,
In the plane direction measurement procedure, the area of the application shape is obtained as information on the plane direction of the liquid material.
Application amount calculation program.

(Supplementary note 26) In the coating amount calculation program according to any one of supplementary notes 22 to 24,
In the planar direction measurement procedure, the width of the application shape is obtained as information on the planar direction of the liquid material.
Application amount calculation program.

(Additional remark 31) The plane image input part which inputs the plane image data containing the application | coating shape and density distribution of the liquid material apply | coated to the to-be-coated member,
A plane direction measurement unit for obtaining information on the plane direction of the liquid material based on the application shape included in the plane image data input from the plane image input unit,
A height direction measurement unit that obtains information on the height direction of the liquid material based on the density distribution included in the planar image data input from the planar image input unit;
An application pressure data input unit for inputting application pressure data required to apply the liquid material to the application member;
Based on the coating pressure data input from the coating pressure data input unit, the plane direction information obtained by the plane direction measuring unit, and the height direction information obtained by the height direction measuring unit, the coating is performed. An application pressure correction data output unit that calculates a correction value of pressure and outputs the result as application pressure correction data;
A coating pressure control device.

(Supplementary Note 32) In the coating pressure control apparatus according to Supplementary Note 31,
The application pressure correction data output unit calculates the application amount of the liquid material from the information in the plane direction and the information in the height direction, and a correction value for reducing the application pressure if the application amount is larger than an appropriate value. Calculating a correction value to increase the application pressure if the application amount is smaller than the appropriate value,
Application pressure control device.

(Appendix 33) In the coating pressure control apparatus according to Appendix 31 or 32,
The height direction measurement unit, when the periphery of the application shape is dark and the center is light, it is determined that the height of the liquid material is lower as the darker part is higher and the height of the liquid material is higher as the lighter part, Find information on the height direction of the liquid material,
Application pressure control device.

(Appendix 34) In the coating pressure control device according to any one of appendices 31 to 33,
The height direction measurement unit determines that the height of the top of the liquid material is higher as the proportion of the light portion in the entire application shape is smaller.
Application pressure control device.

(Appendix 35) In the coating pressure control device according to any one of appendices 31 to 34,
The plane direction measurement unit obtains the area of the application shape as information on the plane direction of the liquid material.
Application pressure control device.

(Supplementary note 36) In the coating pressure control device according to any one of supplementary notes 31 to 35,
The plane direction measurement unit obtains the width of the application shape as information on the plane direction of the liquid material,
Application pressure control device.

(Supplementary note 37) The application pressure control device according to any one of supplementary notes 31 to 36;
An application means for applying the application pressure to the liquid material contained in the container to cause the liquid material to be discharged from the container and applied to the member to be applied;
Imaging means for taking in the planar image data of the liquid material applied to the application member and outputting the data to the application pressure control device;
Control means for determining the application pressure applied to the liquid material and instructing the application means;
The control means outputs the current application pressure data to the application pressure control device and determines the next application pressure based on the application pressure correction data output from the application pressure control device. Having the function of instructing the application means;
Coating device.

(Supplementary Note 38) Input planar image data including application shape and density distribution of liquid material applied to member to be applied;
Based on the coating shape included in the input planar image data, obtain information on the planar direction of the liquid material,
Based on the density distribution included in the input planar image data, obtain information on the height direction of the liquid material,
Input application pressure data required to apply the liquid material to the application member,
The correction value of the application pressure is calculated from the input data of the application pressure, the obtained information on the plane direction, and the obtained information on the height direction.
Application pressure control method.

(Supplementary note 39) In the coating pressure control method according to supplementary note 38,
When calculating the correction value of the application pressure, the application amount of the liquid material is calculated from the information in the plane direction and the information in the height direction, and if the application amount is larger than an appropriate value, the application pressure is set. Calculating a correction value to reduce, and calculating a correction value to increase the application pressure if the application amount is smaller than the appropriate value;
Application pressure control method.

(Supplementary Note 40) A planar image input procedure for inputting planar image data including the application shape and density distribution of the liquid material applied to the member to be coated;
A plane direction measurement procedure for obtaining information on the plane direction of the liquid material based on the application shape included in the plane image data input in the plane image input procedure,
A height direction measurement procedure for obtaining information on the height direction of the liquid material based on the density distribution included in the planar image data input in the planar image input procedure,
Application pressure data input procedure for inputting application pressure data required to apply the liquid material to the application member;
From the coating pressure data input in the coating pressure data input procedure, the plane direction information obtained in the plane direction measurement procedure, and the height direction information obtained in the height direction measurement procedure, the coating is performed. Application pressure correction data output procedure for calculating a pressure correction value and outputting the result as application pressure correction data;
Coating pressure correction control program for causing a computer to execute.

  As an application example of the present invention, in a joining / mounting apparatus such as a die bonder or a mounter, an apparatus for applying a liquid material for joining can be cited.

DESCRIPTION OF SYMBOLS 10 Application | coating pressure control apparatus 11 Plane image input part 12 Plane direction measurement part 13 Height direction measurement part 14 Application pressure data input part 15 Application pressure correction data output part a Plane image data a1 Application shape a2 Concentration distribution b1 Plane direction of liquid material Information of b2 Height direction of liquid material c Application pressure data d Application pressure correction data 20 Application device 21 Camera (imaging means)
22 Controller (control means)
30 Application means 31 Syringe (container)
32 Nozzle 33 Dispenser 34 Air piping 41, 41 ', 411, 412 Liquid material 41a, 41b, 41c, 41d Intersection 42 Lead frame (applied member)

Claims (10)

A planar image input unit for inputting planar image data including the application shape and density distribution of the liquid material applied to the member to be coated;
A plane direction measurement unit for obtaining information on the plane direction of the liquid material based on the application shape included in the plane image data input from the plane image input unit,
A height direction measurement unit that obtains information on the height direction of the liquid material based on the density distribution included in the planar image data input from the planar image input unit;
An application pressure data input unit for inputting application pressure data required to apply the liquid material to the application member;
Based on the coating pressure data input from the coating pressure data input unit, the plane direction information obtained by the plane direction measuring unit, and the height direction information obtained by the height direction measuring unit, the coating is performed. An application pressure correction data output unit that calculates a correction value of pressure and outputs the result as application pressure correction data;
A coating pressure control device. The application pressure control device according to claim 1,
The application pressure correction data output unit calculates the application amount of the liquid material from the information in the plane direction and the information in the height direction, and a correction value for reducing the application pressure if the application amount is larger than an appropriate value. Calculating a correction value to increase the application pressure if the application amount is smaller than the appropriate value,
Application pressure control device. In the application pressure control device according to claim 1 or 2,
The height direction measurement unit, when the periphery of the application shape is dark and the center is light, it is determined that the height of the liquid material is lower as the darker part is higher and the height of the liquid material is higher as the lighter part, Find information on the height direction of the liquid material,
Application pressure control device. In the application pressure control device according to any one of claims 1 to 3,
The height direction measurement unit determines that the height of the top of the liquid material is higher as the proportion of the light portion in the entire application shape is smaller.
Application pressure control device. In the application pressure control device according to any one of claims 1 to 4,
The plane direction measurement unit obtains the area of the application shape as information on the plane direction of the liquid material.
Application pressure control device. In the application pressure control device according to any one of claims 1 to 4,
The plane direction measurement unit obtains the line width of the coating shape as information on the plane direction of the liquid material.
Application pressure control device. An application pressure control device according to any one of claims 1 to 6,
An application means for applying the application pressure to the liquid material contained in the container to cause the liquid material to be discharged from the container and applied to the member to be applied;
Imaging means for taking in the planar image data of the liquid material applied to the application member and outputting the data to the application pressure control device;
Control means for determining the application pressure applied to the liquid material and instructing the application means;
The control means outputs the current application pressure data to the application pressure control device and determines the next application pressure based on the application pressure correction data output from the application pressure control device. Having the function of instructing the application means;
Coating device. Input the plane image data including the application shape and density distribution of the liquid material applied to the coated member,
Based on the coating shape included in the input planar image data, obtain information on the planar direction of the liquid material,
Based on the density distribution included in the input planar image data, obtain information on the height direction of the liquid material,
Input application pressure data required to apply the liquid material to the application member,
The correction value of the application pressure is calculated from the input data of the application pressure, the obtained information on the plane direction, and the obtained information on the height direction.
Application pressure control method. In the application pressure control method according to claim 8,
When calculating the correction value of the application pressure, the application amount of the liquid material is calculated from the information in the plane direction and the information in the height direction, and if the application amount is larger than an appropriate value, the application pressure is set. Calculating a correction value to reduce, and calculating a correction value to increase the application pressure if the application amount is smaller than the appropriate value;
Application pressure control method. Planar image input procedure for inputting planar image data including the application shape and density distribution of the liquid material applied to the member to be coated;
A plane direction measurement procedure for obtaining information on the plane direction of the liquid material based on the application shape included in the plane image data input in the plane image input procedure,
A height direction measurement procedure for obtaining information on the height direction of the liquid material based on the density distribution included in the planar image data input in the planar image input procedure,
Application pressure data input procedure for inputting application pressure data required to apply the liquid material to the application member;
From the coating pressure data input in the coating pressure data input procedure, the plane direction information obtained in the plane direction measurement procedure, and the height direction information obtained in the height direction measurement procedure, the coating is performed. Application pressure correction data output procedure for calculating a pressure correction value and outputting the result as application pressure correction data;
A coating pressure control program for causing a computer to execute.

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