JP2011208666A - Valve unit for vacuum double pipe, and connected structure of the valve unit and the vacuum double pipe - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a valve unit for a vacuum double pipe, suppressing deterioration of thermal insulation property and also reducing the time and labor required to evacuate the vacuum double pipe.SOLUTION: This valve unit 70A is used for the vacuum double pipes having outer pipes for covering inner pipes and evacuating portions between the inner pipes and the outer pipes, and controls a Galden (R) (a heating medium) circulating in the inner pipes. The valve unit 70A includes: first fluid passages connected to the inner pipes and allowing circulation of fluid led to flow into from the inner pipes; valves 76H, 76C having valve bodies 77 and valve elements 78 and controlling the Galden circulating in the first fluid passages; and a valve case 81 covering the first fluid passages and valve bodies 77 and also connected to the outer pipes. In an evacuation passage 75 formed by a space between the first fluid passage and valves 76H, 76C, and the valve case 81, spaces between the inner pipes and outer pipes of the vacuum double pipes are allowed to communicate with each other, and also midway parts between the vacuum double pipes are tightly closed.

Description

  The present invention relates to a valve unit used in a vacuum double pipe that evacuates between an inner pipe and an outer pipe, and a connection structure between the valve unit and the vacuum double pipe.

  Conventionally, as a structure for connecting vacuum double pipes, there is a structure in which a gap between an inner pipe and an outer pipe of a vacuum double pipe is sealed at both ends with flanges (see, for example, Patent Document 1). In the one described in Patent Document 1, the flanges are opposed to each other and connected by a ferrule clamp, the inner pipes are communicated with each other, and the periphery of the inner pipe is sealed with packing on the facing surface of the flange. A vacuum suction port is provided in the outer tube, and the sealed space between the inner tube and the outer tube is evacuated through the vacuum suction port to insulate between the inner tube and the outer tube.

JP 2000-213675 A

  However, in the thing of patent document 1, since heat conduction is performed between an inner pipe and an outer pipe via a flange, the heat insulation of an inner pipe and an outer pipe falls in the part of a joint containing this flange. Will be.

  Further, in the vacuum double pipe described in Patent Document 1, since the space between the inner pipe and the outer pipe is made independent by each double pipe, it is necessary to evacuate each double pipe. . For this reason, it takes much time to exhaust a plurality of vacuum double pipes to a vacuum.

  Similarly, when a valve unit is attached to a vacuum double pipe, it is necessary to consider problems such as a decrease in heat insulation and trouble of exhausting the vacuum double pipe to a vacuum.

  The present invention has been made in view of such circumstances, and a vacuum double pipe valve unit and a valve unit capable of suppressing a reduction in heat insulation and reducing the effort of exhausting the vacuum double pipe to a vacuum. The main purpose is to provide a connection structure between the pipe and the vacuum double pipe.

  The present invention employs the following means in order to solve the above problems.

  A first aspect of the present invention is a valve unit that has an outer tube that covers an inner tube and is used in a vacuum double pipe that evacuates between the inner tube and the outer tube, and controls a fluid that flows through the inner tube. A fluid passage part connected to the inner pipe for flowing a fluid flowing in from the inner pipe, a valve having a valve body and a valve body and controlling a fluid flowing through the fluid passage part, A valve case that covers the fluid passage portion and the valve body and is connected to the outer pipe, and an exhaust passage is formed by a space between the fluid passage portion and the valve and the valve case, and The passage is characterized in that a space between the inner pipe and the outer pipe of each vacuum double pipe communicates with each other, and a middle portion between each vacuum double pipe is sealed.

  According to the above configuration, the inner pipe of the vacuum double pipe is covered with the outer pipe, and the space between the inner pipe and the outer pipe is evacuated. For this reason, it will be in the state thermally insulated by the vacuum between the inner tube and the outer tube. And the fluid channel | path part is connected to the inner pipe of vacuum double piping, and the fluid which distribute | circulates a fluid channel | path part is controlled by a valve.

  Here, the valve case covers the fluid passage portion and the valve body, and is connected to the outer pipe of the vacuum double pipe. An exhaust passage is formed by a space between the fluid passage portion and the valve and the valve case. The exhaust passage communicates the space between the inner pipe and the outer pipe of each vacuum double pipe with each other, and the middle portion between each vacuum double pipe is sealed.

  Therefore, by evacuating the space between the inner pipe and the outer pipe of the vacuum double pipe to a vacuum, the exhaust passage communicating with this space, that is, the space between the fluid passage portion and the valve, and the valve case Can be evacuated to a vacuum. Therefore, it is possible to improve the heat insulation properties of the fluid passage portion and the valve and the valve case, and it is possible to suppress the heat insulation properties of the vacuum double pipe from being lowered at the valve unit.

  Further, since the space between the inner pipe and the outer pipe of each vacuum double pipe communicates with each other, the exhaust passage has a plurality of through the exhaust passage by exhausting one vacuum double pipe to a vacuum. The vacuum double pipes can be evacuated to a vacuum. As a result, it is possible to reduce the trouble of exhausting the vacuum double pipe to a vacuum.

  The valve case only needs to cover the fluid passage portion and the valve main body, and a part of the valve body, a drive mechanism of the valve body, and the like may come out of the valve case. Moreover, the vacuum double pipe should just have an outer pipe which covers an inner pipe, and makes a vacuum between an inner pipe and an outer pipe, and the double pipe part of the joint which connects a double pipe mutually ( For example, it may be an inner pipe joint for communicating the flow paths of the inner pipes with each other and an outer pipe joint for covering the inner pipes and connecting the outer pipes to each other. Incidentally, the vacuum includes a state where the pressure is lower than the atmospheric pressure.

  In a second invention, in the first invention, the valve body and the valve case are supported by each other in a point contact or line contact state. For this reason, these can be supported mutually, suppressing heat conduction between a valve body and a valve case.

  The valve body and the valve case may be in a state of point contact or line contact by a part of them, and may be in a state of point contact or line contact by another member attached to them. May be.

  Specifically, as in the third invention, in the second invention, a support member is assembled to the outer periphery of the valve body, the support member has a plurality of corners, and the valve case is A configuration in which the plurality of corner portions are supported in a point contact state or a line contact state can be employed.

  According to the said structure, the structure which supports a valve case in the state of a point contact or a line contact is easily realizable by assembling | attaching the support member which has a some corner | angular part to the outer periphery of a valve main body.

  According to a fourth invention, in any one of the first to third inventions, the fluid passage portion includes a first fluid passage portion and a second fluid passage portion at a twisted position, and the first fluid passage portion. And the second fluid passage portion are connected via the valve.

  According to the above configuration, since the first fluid passage portion and the second fluid passage portion are connected via the valve, the fluid flowing between the first fluid passage portion and the second fluid passage portion is controlled. be able to. Here, since the 1st fluid passage part and the 2nd fluid passage part are in the position of a twist, these passage parts are connected via a valve, without intersecting.

  Therefore, even when there is a temperature difference between the fluid flowing through the first fluid passage portion and the fluid flowing through the second fluid passage portion, the heat conduction between the first fluid passage portion and the second fluid passage portion. Can be suppressed. As a result, loss of heat energy possessed by the fluid can be suppressed.

  According to a fifth invention, in any one of the first to fourth inventions, a plurality of sets of the fluid passage portion and the valve are provided, and the valve case includes a plurality of sets of the fluid passage portion and the valve body. It is characterized by covering.

  According to the above configuration, since a plurality of sets of fluid passage portions and valves are provided, fluids having different temperatures can be circulated through each set. Here, a plurality of sets of fluid passage portions and valve bodies are covered with a valve case, and an exhaust passage formed by a space between the plurality of sets of fluid passage portions and valves and the valve case is evacuated to a vacuum. Is done. For this reason, a plurality of sets of fluid passage portions and valves can be accommodated in one valve case while suppressing a decrease in heat insulation between the plurality of sets. As a result, the entire valve unit including a plurality of sets of fluid passage portions and valves can be reduced in size.

  Furthermore, by evacuating one vacuum double pipe to a vacuum, the vacuum double pipes corresponding to a plurality of sets can be collectively evacuated through the exhaust passage. Therefore, it is possible to reduce the labor of exhausting the vacuum double pipe to a vacuum as compared with the case where the set of the fluid passage portion and the valve is individually accommodated in the valve case.

  In a sixth invention, in any one of the first to third inventions, the fluid passage portion includes a first fluid passage portion and a second fluid passage portion in a twisted position, and the first fluid passage portion. And the second fluid passage portion are connected via the valve, each of the first and second fluid passage portions and the valve is provided with a plurality of sets, and each set of the first fluid passage portion is provided via a connection passage portion including a bellows. Two fluid passage portions are connected to each other, and the valve case covers a plurality of sets of the first and second fluid passage portions, the valve main body, and the connection passage portion.

  According to the said structure, since it has the structure similar to 4th invention and 5th invention, there can exist an effect similar to them.

  Further, since the second fluid passage portions of each set are connected to each other via the connection passage portion, a plurality of sets of second fluid passage portions are shared, and a common second fluid passage portion is shared from the first fluid passage portions of each set. The fluid can flow into the two fluid passages. As a result, the temperature of the fluid circulated through the second fluid passage portion can be changed by making the temperatures of the fluid circulated through the first fluid passage portions of the respective sets different from each other.

  Here, since the connection passage portion includes the bellows, the expansion and contraction of the second fluid passage portion due to the temperature change can be absorbed by the bellows even if the temperature of the fluid flowing through the second fluid passage portion is changed. . Therefore, the thermal stress generated in the second fluid passage portion and the valve can be relaxed.

  According to a seventh invention, in any one of the first to sixth inventions, a drive member that applies a driving force to the valve body is provided, and the valve body and the drive member are connected via a heat insulating member. It is characterized by.

  According to the above configuration, since the driving force is applied to the valve body from the driving member, the fluid flowing through the fluid passage portion can be controlled through the driving of the valve body. Here, since the valve body and the drive member are connected via the heat insulating member, heat conduction between the valve body and the drive member can be suppressed. As a result, the heat insulation of the valve unit can be improved.

  According to an eighth aspect of the present invention, there is provided a vacuum double pipe valve unit according to any one of the first to seventh aspects, the vacuum double pipe, and the diameter of the inner pipe between the inner pipe and the fluid passage portion. An inner pipe sealing member that seals in a direction, an outer pipe sealing member that seals between the outer pipe and the valve case, and a connection member that connects the outer pipe and the valve case in a removable state. It is characterized by providing.

  According to the above configuration, the space between the inner tube and the fluid passage portion is sealed by the inner tube sealing member, and the space between the outer tube and the valve case is sealed by the outer tube sealing member.

  Here, since the inner pipe seal member seals the gap between the inner pipe and the fluid passage portion in the radial direction of the inner pipe, the inner pipe and the fluid passage portion extend in the direction in which the inner pipe extends (the axial direction of the inner pipe). Relative movement can be allowed. For this reason, the expansion and contraction due to the temperature change of the inner pipe and the fluid passage portion can be absorbed, and the thermal stress generated in the vacuum double pipe and the valve unit can be relaxed.

  In addition, since the connecting member connects the outer tube and the valve case in a detachable state, the outer tube and the valve case can be removed when performing maintenance or the like. At this time, since the inner pipe and the fluid passage portion are allowed to move relative to each other in the extending direction of the inner pipe, they can be removed simultaneously with the removal of the outer pipe and the valve case.

  According to a ninth aspect, in the eighth aspect, the outer pipe sealing member seals between the outer pipe and the valve case in a direction in which the outer pipe extends, and the connection member includes the outer pipe. The connection state between the outer tube and the valve case is maintained in a state where the seal member is deformed by a predetermined amount.

  According to the above configuration, the outer pipe seal member seals between the outer pipe and the valve case in the direction in which the outer pipe extends (the axial direction of the vacuum double pipe). By relatively moving in the extending direction of the tube, it is possible to seal between the outer tube and the valve case. That is, by inserting the vacuum double pipe and the valve unit into each other in the direction in which the outer pipe extends, the gap between the outer pipe and the valve case can be sealed.

  At this time, as described above, the inner pipe sealing member seals the space between the inner pipe and the fluid passage portion in the radial direction of the inner pipe, so that the vacuum double pipe and the valve unit are mutually connected in the direction in which the outer pipe extends. By inserting, the space between the inner pipe and the fluid passage portion can be sealed at the same time.

  Furthermore, since the connection state between the outer tube and the valve case is held by the connection member in a state where the outer tube seal member is deformed by a predetermined amount, the deformation amount of the outer tube seal member, that is, the seal state by the outer tube seal member It can be stabilized.

  According to a tenth aspect, in the eighth or ninth aspect, the valve case can be operated with respect to the connection member so as to release a connection state between the outer pipe and the valve case. An operation unit is provided.

  According to the said structure, the connection state of an outer tube | pipe and a valve case can be cancelled | released by operating a connection member via an operation part. At this time, the inner tube and the fluid passage portion cannot be operated from the outside, but the inner tube and the fluid passage portion are only sealed in the radial direction of the inner tube by the inner tube sealing member. is there.

  Therefore, the connection state between the inner pipe and the fluid passage portion can be released by pulling the vacuum double pipe and the valve unit apart in the direction in which the pipe extends. As a result, the connection state between the vacuum double pipe and the valve unit can be easily released.

  In addition, a notch part etc. which were provided in the valve case are employable as an operation part.

  Furthermore, in an eleventh aspect, in the tenth aspect, the operation section includes a visual recognition section that enables visual recognition that the outer pipe and the valve case are connected by the connecting member. is doing. For this reason, the operation part which can operate with respect to a connection member can be given the function as a visual recognition part which can visually recognize the connection of an outer tube | pipe and a valve case. Therefore, it is possible to more reliably connect the outer tube and the valve case while suppressing an increase in the number of processing steps for providing the visual recognition portion.

The perspective view which shows the external appearance of a temperature control system. The circuit diagram of a temperature control system. Sectional drawing of a vacuum double piping. The perspective view of a support ring. Sectional drawing of an L-shaped coupling. Sectional drawing of a U-shaped coupling. The front view of an operation part. The perspective view of a valve unit and its periphery. Sectional drawing which looked at the valve unit from the front. FIG. 10 is a sectional view taken along line 10-10 in FIG. 9; Sectional drawing which shows the connection state of vacuum double piping. The perspective view which shows a locking ring and its locking state. Sectional drawing which shows the connection state of the suction passage of a vacuum pump, and a valve unit. Sectional drawing which shows the modification of the connection state of vacuum double piping. Sectional drawing which shows the modification of an operation part. Sectional drawing which shows the modification of a coupling. The perspective view which shows the modification of a valve unit. The perspective view which shows the other modification of a valve unit. The fragmentary sectional view which shows the other modification of a valve unit. Sectional drawing which shows the other modification of a valve unit. Sectional drawing which shows the other modification of a coupling.

  Hereinafter, an embodiment will be described with reference to the drawings. In the present embodiment, a temperature control system is realized that circulates while switching the heat medium having different temperatures with respect to the work holder that holds and heats the work in the process chamber of the semiconductor manufacturing apparatus.

  FIG. 1 is a perspective view showing an appearance of the temperature control system. Note that FIG. 1 shows a portion related to the temperature control system in the semiconductor manufacturing apparatus.

  In this temperature control system, the supply unit 10, supply passages 21H and 21C, the supply side valve unit 70A, the introduction passage 23W, the work holder 15, the discharge passage 24W, the recovery side along the flow direction of Galden (heat medium). A valve unit 70B and recovery passages 22H and 22C are provided. Further, the valve unit 70A and the valve unit 70B are connected by bypass passages 25H and 25C, respectively. A suction passage 19 of a vacuum pump is connected to the valve unit 70B.

  The straight pipes constituting part of the supply passages 21H and 21C, the introduction passage 23W, the lead-out passage 24W, and the recovery passages 22H and 22C are connected by the L-shaped joint 50 and the valve units 70A and 70B, respectively. The straight pipes constituting part of the bypass passages 25H and 25C are connected to each other by a U-shaped joint 50U.

  The supply passage 21H on the high temperature side and the supply passage 21C on the low temperature side are installed in parallel, specifically, they are installed in parallel with each other. Similarly, the high-temperature side recovery passageway 22H and the low-temperature side recovery passageway 22C are installed in parallel, specifically, in parallel with each other. Further, the high temperature side bypass passage 25H and the low temperature side bypass passage 25C are installed in parallel, and specifically, are installed in parallel with each other. The passages, the joints 50 and 50U, the valve units 70A and 70B, and the work holder 15 are supported by a frame 18 assembled with an angle or the like.

  FIG. 2 is a circuit diagram showing a route through which Galden flows in the temperature control system.

  The supply unit 10 includes a high-temperature side feeder that supplies and collects high-temperature galden and a low-temperature-side feeder that supplies and collects low-temperature galden. The high temperature side supply machine supplies Galden at 150 ° C. via the high temperature side opening / closing valve 11H. The low temperature side supply machine supplies Galden at 15 ° C. via the low temperature side opening / closing valve 11C. In addition, each temperature of high temperature Galden and low temperature Galden can be suitably changed according to the apparatus to which it is applied.

  A high temperature side supply passage 21H is connected to the high temperature side on-off valve 11H. The on-off valve 11H opens and closes the supply passage 21H. The supply passage 21H is connected to the high temperature side bypass passage 25H and the introduction passage 23W via the supply side valve unit 70A. The supply passage 21H and the bypass passage 25H are always in communication with each other. The valve unit 70A switches the supply passage 21H and the introduction passage 23W between a communication state and a cutoff state.

  Similarly, a low temperature side supply passage 21C is connected to the low temperature side on-off valve 11C. The on-off valve 11C opens and closes the supply passage 21C. The supply passage 21C is connected to the low temperature side bypass passage 25C and the introduction passage 23W via the supply side valve unit 70A. The supply passage 21C and the bypass passage 25C are always in communication with each other. The valve unit 70A switches the supply passage 21C and the introduction passage 23W between a communication state and a cutoff state.

  The introduction passage 23 </ b> W is connected to the entrance of the in-holder passage provided in the work holder 15. The in-holder passage is formed in a double spiral shape so that Galden flows through the work holder 15 without deviation. The outlet of the in-holder passage is connected to the outlet passage 24W.

  The outlet passage 24W is connected to the high temperature side recovery passage 22H and the low temperature side recovery passage 22C via the recovery side valve unit 70B. The valve unit 70B switches the outlet passage 24W and the high temperature side recovery passage 22H between a communication state and a cutoff state. Further, the valve unit 70B switches the lead-out passage 24W and the low-temperature-side recovery passage 22C between a communication state and a cutoff state.

  The high temperature side bypass passage 25H is connected to the high temperature side recovery passage 22H via a recovery side valve unit 70B. The bypass passage 25H and the recovery passage 22H are always in communication with each other. The bypass passage 25H is connected to the lead-out passage 24W via the valve unit 70B.

  Similarly, the low temperature side bypass passage 25C is connected to the low temperature side recovery passage 22C via the recovery side valve unit 70B. The bypass passage 25C and the recovery passage 22C are always in communication with each other. The bypass passage 25C is connected to the outlet passage 24W via the valve unit 70B.

  The high temperature side pressure gauge 16H and the high temperature side throttle valve 17H are provided in the high temperature side bypass passage 25H. The pressure gauge 16H detects the pressure of Galden flowing through the bypass passage 25H. The throttle valve 17H adjusts the amount of Galden flowing through the bypass passage 25H by changing the flow passage area of the bypass passage 25H. Similarly, the low temperature side pressure gauge 16C and the low temperature side throttle valve 17C are provided in the low temperature side bypass passage 25C.

  The high temperature side collection passage 22H is connected to the high temperature side on-off valve 12H. The on-off valve 12H opens and closes the collection passage 22H. And hot Galden is collect | recovered by the high temperature side supply machine via the on-off valve 12H.

  Similarly, the low temperature side collection passage 22C is connected to the low temperature side opening / closing valve 12C. The on-off valve 12C opens and closes the collection passage 22C. And low temperature Galden is collect | recovered by the low temperature side supply machine via the on-off valve 12C.

  Here, the supply passages 21H and 21C, the valve units 70A and 70B, the introduction passage 23W, the discharge passage 24W, the bypass passages 25H and 25C, and the recovery passages 22H and 22C are each formed in a double structure. The gap portion of the double structure can be evacuated to a vacuum.

  Specifically, these passages and the gap portions of the valve units 70A and 70B communicate with each other to form a series of spaces. And the edge part of a series of space is sealed, and this series of space is sealed except the suction part for exhausting to a vacuum. For example, a series of spaces are sealed off at the connection portion between the introduction passage 23 </ b> W and the work holder 15 and at the connection portion between the lead-out passage 24 </ b> W and the work holder 15.

  A vacuum port is provided in the series of spaces, and the series of spaces are evacuated through the vacuum port. Specifically, a vacuum port is provided in the valve unit 70B on the recovery side, and a suction passage 19 of a vacuum pump is connected to this vacuum port. Then, by driving the vacuum pump, a series of spaces are exhausted to a vacuum through the suction passage 19.

  Instead of the recovery-side valve unit 70B, a vacuum port may be provided in the supply-side valve unit 70A, or a vacuum port may be provided in both of the valve units 70A and 70B.

  In a state where these passages and the gaps between the valve units 70A and 70B are evacuated to a vacuum, that is, in a state where they are insulated, the high-temperature Galden and the low-temperature Galden are switched and circulated through the work holder 15. Thereby, the temperature of the work holder 15 is changed as appropriate, and the temperature of the work held by the work holder 15 is controlled.

  Next, a description will be given of the vacuum double pipes constituting a part of the supply passages 21H and 21C, the introduction passage 23W, the lead-out passage 24W, the bypass passages 25H and 25C, and the recovery passages 22H and 22C.

  FIG. 3 is a cross-sectional view of the vacuum double pipe 30.

  The vacuum double pipe 30 includes an inner pipe 31 through which Galden flows and an outer pipe 41 that covers the inner pipe 31. The inner tube 31 and the outer tube 41 are each formed in a tubular shape extending linearly and have substantially the same length. An exhaust passage 37 is formed by a space between the outer surface of the inner tube 31 and the inner surface of the outer tube 41.

  In the extending direction (longitudinal direction) of the inner pipe 31 and the outer pipe 41, both end portions of the exhaust passage 37 are open. For this reason, the exhaust passages 37 of the two vacuum double pipes 30 can be communicated with each other via the exhaust passages formed inside the joints 50 and 50U.

  Specifically, the inner tube 31 and the outer tube 41 are each formed in a cylindrical shape, and the inner tube 31 is slightly longer than the outer tube 41. The inner diameter of the outer tube 41 is larger than the outer diameter of the inner tube 31.

  The inner tube 31 and the outer tube 41 are each sealed at a portion between both ends in the extending direction (axial direction). For this reason, when Galden is circulated inside the inner pipe 31, it is possible to prevent Galden from leaking outside the inner pipe 31. Further, when the exhaust passage 37 is evacuated to a vacuum, it is possible to prevent Galden from leaking into the exhaust passage 37 from the inside of the inner tube 31 and air from entering the exhaust passage 37 from the outside of the outer tube 41. .

  The inner tube 31 includes an inner tube main body 32 and end portions 33 provided at both ends thereof. The inner pipe main body 32 and the end 33 are connected by welding.

  Each end portion 33 is a portion connected to an inner portion of the joints 50 and 50U formed in a double structure and an inner portion of the valve units 70A and 70B formed in a double structure. An annular groove 34 into which an O-ring (inner pipe seal member) can be fitted is provided on the inner surface of the end portion 33.

  The tube wall of the inner tube body 32 is formed thinner than the tube wall of the end portion 33. In detail, the thickness of the tube wall of the inner tube main body 32 is 0.15 mm, and the thickness of the tube wall in the conventional vacuum double pipe is about 1.0 to 1.5 mm. ing. The outer diameter of the inner tube main body 32 is approximately 20 mm.

  The outer tube 41 includes an outer tube main body 42 and end portions 43 provided at both ends thereof. The outer pipe main body 42 and the end portion 43 are connected by welding.

  Each end portion 43 is a portion connected to the outer portion of the joint 50, 50U formed in a double structure or the outer portion of the valve units 70A, 70B formed in a double structure. On the outer surface of the end portion 43, a stepped portion 44 is provided in an annular shape. The stepped portion 44 is formed to have a size capable of pressing an O-ring (outer tube seal member) attached to the outer periphery of the end portion 43 in the extending direction of the outer tube 41. For this reason, when an O-ring is attached to the outer periphery of the end portion 43, the outer diameter of the O-ring substantially coincides with the outer diameter of the stepped portion 44 provided in an annular shape.

  An annular groove 46 into which a locking ring can be fitted is provided on the outer surface of each end 43 of the outer tube 41. The locking ring is a member that connects the outer portions of the joints 50 and 50U and the outer portions of the valve units 70A and 70B to the end 43 of the outer tube 41.

  Specifically, each end portion 43 of the outer tube 41 is provided with a step 45 in an annular shape in parallel with the step 44. The step portion 44 that presses the O-ring is provided closer to the end side of the outer tube 41 than the step portion 45. The step portions 44 and 45 provided in an annular shape have substantially the same outer diameter. And the recessed part pinched | interposed into the step parts 44 and 45 becomes the groove | channel 46 which fits a locking ring.

  The tube wall of the outer tube main body 42 is formed thinner than the tube wall of the end portion 43. Specifically, the thickness of the tube wall of the outer tube main body 42 is set to 0.15 mm as in the case of the inner tube main body 32. The outer diameter of the outer tube main body 42 is approximately 28 mm.

  Here, the inner tube main body 32 is formed with a plurality of nodes 38 spaced apart from each other by bending the tube wall and projecting it radially outward. Similarly, the outer tube main body 42 is formed with a plurality of nodes 48 spaced apart from each other by bending the tube wall and projecting radially outward. The outer diameter of the node portion 38 of the inner pipe main body 32 is smaller than the inner diameter of the outer pipe main body 42. For this reason, a gap is formed between the ridge (end in the radial direction) of the node portion 38 and the inner surface of the outer tube main body 42.

  The strength of the inner pipe main body 32 and the outer pipe main body 42 is improved by these node portions 38 and 48, respectively. Specifically, the strength against the force acting in the radial direction of the inner tube main body 32 and the outer tube main body 42 can be improved. For this reason, the inner pipe main body 32 and the outer pipe main body 42 can ensure the strength required for the vacuum double pipe 30 while adopting a pipe wall that is much thinner than the conventional pipe wall. Therefore, the inner tube main body 32 and the outer tube main body 42 can be reduced in weight, and their heat capacities can be reduced.

  In particular, in the vacuum double pipe 30, since the outer pipe 41 covers the inner pipe 31, the members constituting the pipe wall of the inner pipe 31 as long as the inner pipe 31 and the outer pipe 41 have the same wall thickness. The volume of the member that constitutes the tube wall of the outer tube 41 is larger than the volume of. Therefore, the double pipe 30 can be effectively reduced in weight by thinning the tube wall of the outer pipe 41.

  Specifically, the strength of the inner tube main body 32 and the outer tube main body 42 is improved as the distance between the nodes 38 and 48 is reduced. Here, although the inner tube 31 expands and contracts with the temperature change of the fluid flowing through the inner tube 31, the expansion and contraction of the inner tube 31 can be absorbed by the node portion 38 of the inner tube main body 32. For this reason, it is good to calculate this expansion-contraction amount based on the temperature of the fluid and the material of the inner pipe 31, and to set the space | interval and number of node parts 38 according to this expansion-contraction amount.

  Moreover, the strength with respect to the force which acts on the radial direction of the inner pipe | tube main body 32 and the outer pipe | tube main body 42 improves, so that the height of the node parts 38 and 48 is made high. It should be noted that the inner tube main body 32 and the outer tube main body 42 are more susceptible to forces acting in the extending direction (longitudinal direction) of the inner tube main body 32 and the outer tube main body 42 as the height of the node portions 38 and 48 is increased. Each becomes easy to deform.

  In the present embodiment, the interval between the node portions 38 of the inner tube main body 32 and the interval between the node portions 48 of the outer tube main body 42 are substantially equal. The height of the node 38 is set lower than the height of the node 48. Specifically, the height of the node 38 is approximately half of the height of the node 48. For this reason, the strength of the outer tube main body 42 can be further improved by the node 48.

  The inner tube 31 and the outer tube 41 are made of stainless steel, specifically austenitic stainless steel, more specifically SUS316L. The manufacturing method of the inner pipe main body 32 and the outer pipe main body 42 is as follows.

  First, a thin plate of SUS316L is rolled into a cylindrical shape, and ends that overlap each other are welded. In the cylindrical member formed in this way, a force shrinking in the longitudinal direction is applied to a part of the longitudinal direction (axial direction). Thereby, the tube wall of the portion to which the force is applied is bent and protrudes in an annular shape outward in the radial direction (outer radial direction).

  The protruding portions become the respective node portions 38 and 48 of the inner tube main body 32 and the outer tube main body 42. By appropriately adjusting the magnitude of the force acting in the longitudinal direction of the tubular member, the height of the node portions 38 and 48 can be adjusted.

  According to such a manufacturing method, the interval between the node portions 38, the interval between the node portions 48, and the height of the node portions 38 and 48 can be arbitrarily set. These dimensions include the diameter of the inner tube main body 32 and the outer tube main body 42, the pressure of Galden flowing through the inner tube 31, and the space formed between the inner tube 31 and the outer tube 41 (exhaust passage). It can be appropriately changed according to the degree of vacuum of 37).

  A support ring 35 </ b> A (support member) that supports the inner tube 31 and the outer tube 41 is assembled to the outer periphery of the inner tube 31. The support ring 35A is formed of a heat insulating resin having heat resistance in a working temperature range of Galden.

  Specifically, as shown in FIG. 4A, the support ring 35A includes a support ring main body 36a formed in a “C” shape. Corner portions 36c (protruding portions) are provided on the outer surface of the support ring body 36a at predetermined intervals. The outer shape of the support ring 35A is hexagonal.

  In the corner portion 36c, a ridge line extends in the central axis direction of the support ring main body 36a. In addition, a groove 36d that can be fitted into the node portion 38 of the inner tube main body 32 is provided in an annular shape on the inner surface of the support ring main body 36a.

  Then, after expanding the “C” -shaped support ring 35A, as shown in FIG. 3, a groove 36d of the support ring 35A is fitted into a predetermined node 38 of the inner tube main body 32, whereby the inner tube main body is fitted. A support ring 35 </ b> A is assembled to the outer periphery of 32. At this time, the corner portion 36c of the support ring 35A and the inner surface of the outer tube main body 42 are in a line contact state. Thereby, the inner pipe | tube 31 and the outer pipe | tube 41 are mutually supported in the state of the line contact.

  The support ring 35A can be changed to a support ring 35B shown in FIG. In addition, about the part same as support ring 35A, description is abbreviate | omitted by attaching | subjecting the same code | symbol.

  The support ring 35B includes two semi-annular support ring bodies 36e. The support ring body 36e is provided with engaging portions 36f that can be engaged with each other. Then, by engaging the engaging portions 36f with each other, an annular support ring 35B is constituted by the two support ring main bodies 36e. According to such a support ring 35B, the inner tube main body 32 can be assembled so as to be sandwiched from both sides by the two support ring main bodies 36e.

  Further, when the support ring 35A can be passed from the end portion 33 of the inner pipe 31, it can be changed to a support ring 35C shown in FIG. In addition, about the part same as support ring 35A, description is abbreviate | omitted by attaching | subjecting the same code | symbol.

  The support ring 35C includes an annular support ring main body 36g. Such a support ring 35 </ b> C can be employed when the outer diameter of the end portion 33 of the inner tube 31 is equal to or smaller than the outer diameter of the inner tube main body 32. Then, after passing the support ring 35C from the end 33 of the inner tube 31, the support ring 35C can be assembled by adhering the inner surface of the support ring 35C to the outer surface of the inner tube main body 32. At this time, there is a possibility that the support ring 35C may be prevented from passing by the node portion 38 of the inner pipe main body 32. However, if the length of the vacuum double pipe 30 is relatively short, the support ring 35C is only provided near both ends thereof. It may be provided.

  Further, the support ring 35A can be changed to a support ring 35D shown in FIG. According to the support ring 35D, the inner tube 31 and the outer tube 41 can be supported with each other in a point contact state.

  The support ring 35D includes a support ring main body 36h formed in a “C” shape. On the outer surface of the support ring main body 36h, protrusions 36j (projections) are provided at predetermined intervals. The protrusion 36j extends from the outer surface of the support ring main body 36h in the outer diameter direction of the support ring main body 36h, and has a pointed tip. For this reason, when the support ring 35D is assembled to the outer periphery of the inner tube main body 32, the protrusion 36j of the support ring 35D and the inner surface of the outer tube main body 42 are in a point contact state. According to such a configuration, the heat conduction between the support ring 35D and the outer tube main body 42, and hence the heat conduction between the inner tube main body 32 and the outer tube main body 42, can be further suppressed.

  Next, the L-shaped joint 50 constituting part of the supply passages 21H and 21C, the introduction passage 23W, the lead-out passage 24W, and the recovery passages 22H and 22C will be described.

  FIG. 5 is a cross-sectional view of the L-shaped joint 50.

  The L-shaped joint 50 includes an inner pipe joint portion 51 that connects the inner pipes 31 of the vacuum double pipe 30 to each other, and an outer pipe joint portion 61 that covers the inner pipe joint portion 51. The inner pipe joint 51 communicates the inside of the inner pipe 31, that is, the Galden flow path of the inner pipe 31, and Galden circulates inside the inner pipe joint 51. The inner pipe joint portion 51 and the outer pipe joint portion 61 are each formed in a tubular shape extending in an “L” shape, and have substantially the same length. The L-shaped joint 50 can also be considered as a vacuum double pipe. In this case, the inner pipe joint 51 corresponds to the inner pipe, and the outer pipe joint 61 corresponds to the outer pipe.

  Specifically, the inner pipe joint portion 51 and the outer pipe joint portion 61 are each formed in a cylindrical shape, and the inner pipe joint portion 51 is slightly shorter than the outer pipe joint portion 61. The inner diameter of the outer pipe joint portion 61 is larger than the outer diameter of the inner pipe joint portion 51. For this reason, a space is formed between the outer surface of the inner pipe joint portion 51 and the inner surface of the outer pipe joint portion 61, and this space is used as an exhaust passage when the vacuum double pipe 30 and the joint 50 are evacuated to vacuum. 55 (joint exhaust passage).

  In the inner pipe joint portion 51 and the outer pipe joint portion 61, the portion between both ends is sealed in the extending direction (longitudinal direction). For this reason, when Galden is circulated inside the inner pipe joint portion 51, it is possible to prevent Galden from leaking to the outside of the inner pipe joint portion 51. Further, when the exhaust passage 55 of the joint 50 is evacuated to a vacuum, Galden leaks from the inside of the inner pipe joint portion 51 to the exhaust passage 55 or air enters the exhaust passage 55 from the outside of the outer pipe joint portion 61. Intrusion can be prevented.

  In the extending direction of the inner pipe joint portion 51 and the outer pipe joint portion 61, both ends of the exhaust passage 55 are open. For this reason, when two vacuum double pipes 30 are connected via the joint 50, each space (exhaust passage 37) between the inner pipe 31 and the outer pipe 41 of the vacuum double pipe 30 is connected to the exhaust passage 55. Can communicate with each other.

  The inner pipe joint portion 51 is formed by bending a cylindrical pipe that extends linearly. For this reason, the pipe wall of the inner pipe joint portion 51 is made thicker than the inner pipe body 32 of the inner pipe 31 so that this bending process is possible. Specifically, the thickness of the tube wall of the inner pipe joint portion 51 is approximately 0.5 mm, which is thinner than the thickness of the tube wall in the conventional vacuum double pipe. The inner pipe joint portion 51 is formed of SUS316L in the same manner as the inner pipe 31.

  Since the inner pipe joint portion 51 is formed in an “L” shape, the strength against the radial force can be increased as compared with a configuration extending in a straight line. In addition, Galden is circulated inside the inner pipe joint 51 and the outside of the inner pipe joint 51 is evacuated to a vacuum. For this reason, a force in the direction from the inner surface to the outer surface acts on the inner pipe joint portion 51. In the tubular member, it is easy to secure the strength against the force from the inside as compared with the force from the outside.

  Therefore, the inner pipe joint portion 51 is not provided with a configuration corresponding to the node portion 38 provided in the inner pipe main body 32 of the inner pipe 31, but the pipe wall is thicker than the inner pipe main body 32. In addition, the strength required for the L-shaped joint 50 can be ensured.

  Both end portions of the inner pipe joint portion 51 are inner pipe connection portions 53 connected to the inner pipe 31 of the vacuum double pipe 30. The outer diameter of the inner pipe connecting portion 53 is slightly smaller than the inner diameter of the end portion 33 of the inner pipe 31.

  The outer pipe joint portion 61 includes an outer pipe joint portion main body 62 and outer pipe connection portions 63 provided at both ends thereof. The outer pipe joint main body 62 is formed by bending a linearly extending cylindrical pipe in the same manner as the inner pipe joint 51. The outer pipe joint portion main body 62 is formed of SUS316L like the outer pipe 41, and the thickness of the pipe wall is approximately 0.5 mm. For this reason, the outer pipe joint portion main body 62 can also ensure the strength required for the L-shaped joint 50.

  The outer pipe 41 of the vacuum double pipe 30 is connected to the outer pipe connecting portion 63. The inner diameter of the outer tube connecting portion 63 is slightly larger than the outer diameter of the end portion 43 of the outer tube 41.

  On the inner surface of the outer pipe connecting portion 63, a stepped portion 64 is provided in an annular shape. In the outer pipe connecting portion 63, the inner diameter of the end portion (expanded portion 63a) from the step portion 64 is larger than the inner diameter of the opposite portion.

  The step portion 44 extends an O-ring attached to the outer periphery of the end portion 43 of the outer tube 41, that is, an O-ring disposed on the inner periphery of the enlarged-diameter portion 63 a of the outer tube connecting portion 63. It is formed in a dimension that can be pressed in the direction. For this reason, when an O-ring is attached to the outer periphery of the end portion 43 of the outer tube 41, the outer diameter of the O-ring and the inner diameter of the enlarged diameter portion 63a substantially coincide.

  An annular groove 65 into which the locking ring can be fitted is provided on the inner surface of the enlarged diameter portion 63a of the outer pipe connecting portion 63. In the groove 65, the shape of the cross section perpendicular to the circumferential direction is a rectangular shape.

  A support ring 35 </ b> C (support member) that supports the inner pipe joint portion 51 and the outer pipe joint portion 61 is assembled to the outer periphery of the inner pipe joint portion 51. As described above, the support ring 35C has the configuration shown in FIG. 4C, and is formed of a heat insulating resin having heat resistance in the working temperature range of Galden.

  The inner diameter of the support ring 35 </ b> C is substantially equal to the outer diameter of the inner pipe joint portion 51. The support ring 35 </ b> C is passed from the inner pipe connection portion 53 of the inner pipe joint portion 51 to the center side of the inner pipe joint portion 51. The inner surface of the support ring 35 </ b> C is bonded to the outer surface of the inner pipe joint portion 51.

  The corner portion 36c of the support ring 35C and the inner surface of the outer pipe joint main body 62 are in a line contact state. Thereby, the inner pipe joint part 51 and the outer pipe joint part 61 are mutually supported in the state of line contact.

  Next, the U-shaped joint 50U that constitutes a part of the bypass passages 25H and 25C will be described.

  FIG. 6 is a cross-sectional view of a U-shaped joint 50U formed in a U shape. The U-shaped joint 50U has a structure in which bellows portions 56 and 66 are inserted in an intermediate portion of the L-shaped joint 50. For this reason, about the member same as the L-shaped coupling 50, description is abbreviate | omitted by attaching | subjecting the same code | symbol.

  The U-shaped joint 50U includes an inner pipe connecting portion 53 and an outer pipe connecting portion 63 covering the inner pipe connecting portion 53 at both ends. Each inner pipe joint portion 51 extends in an L shape with each inner pipe connecting portion 53 as an end portion. Each outer pipe joint main body 62 is connected to each outer pipe joint 63, and each outer pipe joint main body 62 extends in an L shape so as to cover each inner pipe joint 51. The two sets of the inner pipe connection portion 53, the outer pipe connection portion 63, the inner pipe joint portion 51, and the outer pipe joint portion main body 62 are arranged symmetrically with each other.

  Two inner pipe joints 51 are connected by an inner pipe bellows part 56, and two outer pipe joint parts main bodies are connected by an outer pipe bellows part 66. The overall shape of the bellows portions 56 and 66 extends linearly. The outer tube bellows portion 66 covers the inner tube bellows portion 56. A space is formed between the outer surface of the inner tube bellows portion 56 and the inner surface of the outer tube bellows portion 66. The U-shaped joint 50U can also be considered as a vacuum double pipe. In this case, the inner pipe joint 51 and the inner pipe bellows part 56 correspond to the inner pipe, and the outer pipe joint main body 62 and the outer pipe bellows part. 66 corresponds to the outer tube.

  The bellows portions 56 and 66 are formed of SUS316L, similarly to the inner tube main body 32 and the outer tube main body 42 of the vacuum double pipe 30. The thickness of the tube walls of the bellows portions 56 and 66 is 0.15 mm.

  The bellows portion 56 has a plurality of node portions 56a formed continuously. The bellows portion 66 has a plurality of node portions 66a formed continuously. These node portions 56a and 66a are formed in the same manner as the node portion 38 of the inner tube 31 and the node portion 48 of the outer tube 41. For this reason, the bellows portions 56 and 66 can ensure the strength required for the U-shaped joint 50U while adopting a tube wall that is much thinner than conventional ones.

  The support ring 35 </ b> C is disposed on the inner periphery of both end portions of the outer tube bellows portion 66. The support ring 35 </ b> C is provided on the outer periphery of the inner pipe connection portion 53 of the inner pipe joint portion 51. And the corner | angular part 36c of the support ring 35C and the inner surface of the edge part of the outer tube | pipe bellows part 66 are in the state of line contact. Thereby, the inner pipe joint part 51 and the outer pipe bellows part 66 are mutually supported in the state of line contact.

  The procedure for assembling the inner tube bellows portion 56, the outer tube bellows portion 66, and the support ring 35C is as follows.

  First, after the support rings 35C are assembled to the outer circumferences of the two inner pipe connecting portions 53 arranged opposite to each other, the inner pipe bellows portion 56 is connected to one inner pipe connecting portion 53 by welding. And the outer pipe bellows part 66 is connected to the end part of one outer pipe joint part main body 62 by welding so as to cover the connected inner pipe bellows part 56.

  While extending the inner tube bellows portion 56 and contracting the outer tube bellows portion 66, the end of the inner tube bellows portion 56 that is not connected is exposed from the inside of the outer tube bellows portion 66. And the end part of the exposed inner pipe bellows part 56 is connected to the other inner pipe connection part 53 by welding. Thereafter, the outer tube bellows portion 66 is connected to the end of the other outer tube joint main body 62 by welding so as to cover the connected inner tube bellows portion 56.

  Each outer pipe connection portion 63 of the L-shaped joint 50 and the U-shaped joint 50U is provided with an operation portion that allows the locking ring to be operated.

  FIG. 7 is a front view of the operation unit. The operation portion 69 is provided in the diameter-expanded portion 63 a of the outer pipe connection portion 63. The operation part 69 includes an insertion part 67 and a peeping part 68 (viewing part).

  The insertion portion 67 allows insertion of the knob portion of the locking ring, and is formed in a cutout shape at the end of the enlarged diameter portion 63a. Specifically, in the extending direction of the outer tube connecting portion 63, the insertion portion 67 is formed by cutting out a part of the enlarged diameter portion 63a from the end side of the outer tube connecting portion 63 into a rectangular shape. The width of the insertion portion 67 in the circumferential direction of the enlarged diameter portion 63a is slightly wider than the width occupied by the knob portion of the locking ring.

  The peeping portion 68 is formed so as to expand a part of the insertion portion 67 in the circumferential direction of the enlarged diameter portion 63a. Specifically, a part of the insertion portion 67 in the extending direction of the outer pipe connection portion 63 is enlarged in a rectangular shape in the circumferential direction of the enlarged diameter portion 63a. This enlarged portion is a peeping portion 68. The width of the peeping portion 68 in the extending direction of the outer pipe connecting portion 63 is slightly wider than the width of the groove 65 provided in the enlarged diameter portion 63a. For this reason, the state of the locking ring fitted in the groove 65 can be confirmed through the peeping portion 68.

  FIG. 8 is a perspective view of the valve unit 70A and its surroundings.

  The high temperature side supply passage 21H and the high temperature side bypass passage 25H are connected via a supply side valve unit 70A. The supply passage 21H and the bypass passage 25H are arranged on the same straight line. Similarly, the supply passage 21C on the low temperature side and the bypass passage 25C on the low temperature side are connected via the valve unit 70A. The supply passage 21C and the bypass passage 25C are arranged on the same straight line.

  The introduction passage 23W and the auxiliary passage 87 are connected via the valve unit 70A. The introduction passage 23W and the auxiliary passage 87 are arranged on the same straight line.

  The high temperature side supply passage 21 </ b> H and the high temperature side bypass passage 25 </ b> H, the introduction passage 23 </ b> W, and the auxiliary passage 87 are in a twisted position. Similarly, the supply passage 21C on the low temperature side and the bypass passage 25C on the low temperature side, the introduction passage 23W, and the preliminary passage 87 are in a twisted position.

  Also in the valve unit 70B on the recovery side, the recovery passage 22H, the bypass passage 25H, and the outlet passage 24W are in a twisted position. Similarly, the collection passage 22C, the bypass passage 25C, and the lead-out passage 24W are in a twisted position.

  The preliminary passage 87 has the same configuration as that of the vacuum double pipe 30. Each end of the inner pipe and the outer pipe of the preliminary passage 87 is sealed by a sealing flange 87a. The sealing flange 87 a is attached to the end portion of the preliminary passage 87 by a mounting bracket 88. In addition, it can replace with this sealing flange 87a and can also provide a vacuum gauge. In that case, it is preferable to block the inner pipe of the preliminary passage 87 and to arrange the detector of the vacuum gauge in the space (exhaust passage) between the inner pipe and the outer pipe.

  The valve unit 70A includes valves 76H and 76C. On the upper part of the valves 76H and 76C, a drive unit 76a for driving each valve body is provided. The drive unit 76a includes a cylinder and a piston (drive member), and the piston is reciprocated by compressed air introduced into and out of the cylinder from the outside. Thereby, the valve body connected to the piston is driven to reciprocate.

  FIG. 9 is a cross-sectional view of the valve unit as viewed from the front. 10 is a cross-sectional view taken along line 10-10 of FIG.

  The valve unit 70A (70B) includes a high temperature side valve 76H and a low temperature side valve 76C. The valve 76H and the valve 76C are arranged side by side in the same direction. Each of the valves 76H and 76C includes a valve body 77 and a valve body 78.

  The valve main body 77 includes a first main body passage 77a and a second main body passage 77b through which Galden flows. The first main body passage 77a is formed in a straight line, and both ends thereof are open. An intermediate portion of the first main body passage 77a communicates with the second main body passage 77b. The second body passage 77b is formed in a straight line, and one end thereof is orthogonal to the first body passage 77a. A guide portion 77c is provided at the other end of the second main body passage 77b. An intermediate portion of the second main body passage 77b is opened at two locations facing each other.

  The valve body 78 is reciprocated by the driving force applied from the piston, and switches the communication portion between the first main body passage 77a and the second main body passage 77b between a communication state and a cutoff state. The valve body 78 is slidably supported by the guide portion 77c.

  A first fluid passage portion 71H on the high temperature side is connected to each end portion of the first main body passage 77a in the valve 76H on the high temperature side. That is, the two first fluid passage portions 71H are connected via the first main body passage 77a. The first fluid passage portion 71H extends linearly and is formed in a cylindrical shape. The first main body passage 77a and the first fluid passage portion 71H are arranged on the same straight line.

  Similarly, a first fluid passage portion 71C on the low temperature side is connected to each end portion of the first main body passage 77a in the valve 76C on the low temperature side. That is, the two first fluid passage portions 71C are connected via the first main body passage 77a. The first fluid passage portion 71C extends linearly and is formed in a cylindrical shape. The first main body passage 77a and the first fluid passage portion 71C are arranged on the same straight line.

  The second fluid passage portion 72 is connected to one opening portion of the second main body passage 77b in the high temperature side valve 76H, and the connection passage portion 73 is connected to the other opening portion. That is, the second fluid passage portion 72 and the connection passage portion 73 are connected via the second main body passage 77b. Similarly, the second fluid passage portion 72 is connected to one opening portion of the second main body passage 77b in the low temperature side valve 76C, and the connection passage portion 73 is connected to the other opening portion. That is, the second fluid passage portion 72 and the connection passage portion 73 are connected via the second main body passage 77b.

  Here, in the valve body 77, the passage wall of the second body passage 77b is formed thinner than the passage wall of the first body passage 77a. For this reason, heat conduction between the first main body passage 77a and the connection passage portion 73 can be suppressed, and as a result, heat conduction between the high temperature side valve 76H and the low temperature side valve 76C can be suppressed. . Further, since the heat capacity of the second main body passage 77b can be reduced, the heat loss of the fluid can be suppressed when the temperature of the fluid flowing through the second main body passage 77b is changed.

  The connection passage portion 73 is common to the valves 76H and 76C, and connects the valve bodies 77 to each other. The connection passage portion 73 extends linearly and is formed in a cylindrical shape. The second fluid passage portion 72 of the high temperature side valve 76H, the second fluid passage portion 72 of the low temperature side valve 76C, and the connection passage portion 73 are arranged on the same straight line.

  A bellows portion 73 a is provided at an intermediate portion of the connection passage portion 73. For this reason, even if these expand and contract due to temperature changes of the second fluid passage portion 72 and the connection passage portion 73, the expansion and contraction can be absorbed by the bellows portion 73a.

  In the connection passage portion 73, the tube wall of the bellows portion 73a is formed thinner than the other portion of the tube wall, but the strength is ensured by the node portion of the bellows portion 73a. For this reason, heat conduction between the high temperature side valve 76H and the low temperature side valve 76C can be suppressed. Further, since the heat capacity of the connection passage 73 can be reduced, the heat loss of the fluid can be suppressed when the temperature of the fluid flowing through the connection passage 73 is changed.

  Regarding the high temperature side valve 76H, the first main body passage 77a and the first fluid passage portion 71H, and the second fluid passage portion 72 and the connection passage portion 73 are in a twisted position. And these in the position of a twist are connected by the 2nd main body channel | path 77b. Similarly, with respect to the low temperature side valve 76C, the first main body passage 77a and the first fluid passage portion 71C, the second fluid passage portion 72 and the connection passage portion 73 are in a twisted position. And these in the position of a twist are connected by the 2nd main body channel | path 77b.

  The first main body passage 77a and the first fluid passage portion 71H of the high temperature side valve 76H and the first main body passage 77a and the first fluid passage portion 71C of the low temperature side valve 76C are arranged in parallel. They are arranged parallel to each other.

  The valve unit 70 </ b> A includes a valve case 81. The valve case 81 covers the valve main body 77, the first fluid passage portion 71H, the second fluid passage portion 72, and the connection passage portion 73 with respect to the high temperature side valve 76H. Similarly, the valve case 81 covers the valve main body 77, the first fluid passage portion 71C, the second fluid passage portion 72, and the connection passage portion 73 with respect to the low temperature side valve 76C. The valve unit 70A (70B) can also be considered as a vacuum double pipe. In this case, the valve main body 77, the first fluid passage portion 71H, the second fluid passage portion 72, and the connection passage portion 73 are connected to the inner pipe. Correspondingly, the valve case 81 corresponds to the outer tube.

  The valve case 81 includes a valve case main body 82 and four outer pipe connection portions 83.

  The valve case main body 82 is formed in a rectangular parallelepiped shape and mainly covers the valve main bodies 77 and the connection passage portions 73 of the valves 76H and 76C. The first fluid passage portion 71H on the high temperature side, the first fluid passage portion 71C on the low temperature side, and the second fluid passage portion 72 are each covered with an outer pipe connection portion 83.

  As shown in FIG. 7, the outer pipe connection portion 83 has the same configuration as the outer pipe connection portion 63. That is, the outer pipe connecting portion 83 corresponds to the enlarged diameter portion 63a, the stepped portion 64, the groove 65, the insertion portion 67, the peeping portion 68, and the operation portion 69, respectively, and the enlarged diameter portion 83a, the stepped portion 84, the groove 85, An insertion portion 67, a peeping portion 68, and an operation portion 69 are provided.

  Returning to FIGS. 9 and 10, in the valve case 81, an intermediate portion between the enlarged diameter portions 83 a of the outer pipe connection portion 83 is sealed. That is, the valve case 81 is opened only at each end of the outer pipe connecting portion 83.

  A space is formed between the outer surfaces of the valves 76H and 76C and the connection passage portion 73 and the inner surface of the valve case 81, specifically, the inner surface of the valve case main body 82. A space is formed between the outer surfaces of the first fluid passage portions 71 </ b> H and 71 </ b> C and the second fluid passage portion 72 and the inner surface of the valve case 81. An exhaust passage 75 is formed by these spaces.

  The exhaust passage 75 communicates with the entire interior of the valve case 81. The exhaust passage 75 is opened at each end of the first fluid passage portions 71H and 71C inside each outer pipe connecting portion 83. Further, the exhaust passage 75 opens at the end of the second fluid passage portion 72 inside each outer pipe connection portion 83.

  For this reason, when two vacuum double pipes 30 are connected via the valve units 70A and 70B, each space (exhaust passage 37) between the inner pipe 31 and the outer pipe 41 of the vacuum double pipe 30 is The exhaust passages 75 can communicate with each other.

  In the exhaust passage 75, a midway portion between these openings is sealed. For this reason, when the exhaust passage 75 is evacuated to vacuum, Galden leaks from the passage portions and the valves 76H and 76C to the exhaust passage 75, and air enters the exhaust passage 75 from the outside of the valve case 81. Can be prevented.

  The valve unit 70A includes two sets of the first fluid passage portion 71H on the high temperature side and the outer pipe connection portion 83 that covers the first fluid passage portion 71H. And the vacuum double piping 30 which comprises the high temperature side supply passage 21H is connected to the one set, and the vacuum double piping 30 which comprises the high temperature side bypass passage 25H is connected to the other set.

  Similarly, the valve unit 70A includes two sets of the first fluid passage portion 71C on the low temperature side and the outer pipe connection portion 83 covering the first fluid passage portion 71C. And the vacuum double piping 30 which comprises the low temperature side supply channel | path 21C is connected to the one set, and the vacuum double piping 30 which comprises the low temperature side bypass channel 25C is connected to the other set.

  The pair connected to the high temperature side supply passage 21H and the pair connected to the low temperature side supply passage 21C are arranged in parallel, and the pair connected to the high temperature side bypass passage 25H and the low temperature side bypass passage 25C. The group connected to the is parallel.

  Further, the valve unit 70A includes two sets of the second fluid passage portion 72 and the outer pipe connection portion 83 that covers the second fluid passage portion 72. And the vacuum double piping 30 which comprises the introduction channel | path 23W is connected to the one set, and the vacuum double piping 30 which comprises the backup channel | path 87 is connected to the other set.

  On the other hand, in the recovery side valve unit 70B, a high temperature side recovery passage 22H is connected instead of the high temperature side supply passage 21H, and a low temperature side recovery passage 22C is connected instead of the low temperature side supply passage 21C. Further, a lead-out passage 24W is connected instead of the introduction passage 23W, and a suction passage 19 is connected instead of the auxiliary passage 87. Connection of the bypass passages 25H and 25C is the same as that of the supply-side valve unit 70A.

  Support pieces 86H and 86C (support members) for supporting the valve main body 77 and the valve case main body 82 are assembled to the outer circumferences of the valve main bodies 77 of the valves 76H and 76C, respectively. The support pieces 86H and 86C are formed of a heat insulating resin having heat resistance in the working temperature range of Galden.

  Specifically, the support pieces 86 </ b> H and 86 </ b> C are formed with through holes that are fitted to the outer periphery of the valve body 77. The support pieces 86H and 86C are provided with corner portions 86a and 86e protruding in directions orthogonal to each other. The ridge line of the corner portion 86a and the ridge line of the corner portion 86e are orthogonal to each other.

  The support pieces 86H and 86C are assembled to the valve body 77 by fitting the through holes of the support pieces 86H and 86C to the outer periphery of the valve body 77. The inner surfaces of the support pieces 86H and 86C are bonded to the outer surface of the valve body 77, respectively.

  At this time, the corner portions 86a and 86e are in a line contact state with the flat portions perpendicular to each other in the valve case 81 (specifically, the valve case main body 82). That is, the valve case 81 is supported in a line contact state by the corners 86a and 86e of the support pieces 86H and 86C. Thereby, the valve body 77 and the valve case 81 are supported by each other in a line contact state.

  Further, in a state where the support pieces 86H and 86C are attached to the valve body 77, the low-temperature side support piece 86C has a corner 86d that protrudes in the direction of the high-temperature side support piece 86H. Corresponding to this, the support piece 86H on the high temperature side has a receiving portion 86b that receives the corner 86d of the support piece 86C on the low temperature side. The corner portion 86d of the support piece 86C on the low temperature side and the receiving portion 86b of the support piece 86H on the high temperature side are in a line contact state.

  Thereby, the valve main body 77 of the high temperature side valve 76H and the valve main body 77 of the low temperature side valve 76C are supported in a state of line contact with each other. Therefore, even if the high temperature side valve 76H and the low temperature side valve 76C are accommodated in one valve case 81, it is possible to support them while suppressing heat conduction between them. it can.

  FIG. 11 is a cross-sectional view showing a connection state between the vacuum double pipe 30 and the joints 50 and 50U (valve units 70A and 70B). Specifically, the connection state between the end 33 of the inner pipe 31 in the vacuum double pipe 30 and the inner pipe connection part 53 (connection part of the second fluid passage part 72) of the joints 50 and 50U (valve units 70A and 70B). Is shown. Moreover, the connection state of the edge part 43 of the outer tube | pipe 41 in the vacuum double piping 30 and the outer tube | pipe connection part 63 (83) of the couplings 50 and 50U (valve unit 70A, 70B) is shown.

  By connecting the vacuum double pipe 30 and the joints 50 and 50U (valve units 70A and 70B), a space (exhaust passage 37) between the inner pipe 31 and the outer pipe 41 in the vacuum double pipe 30 is obtained. The joints 50 and 50U (valve units 70A and 70B) communicate with the exhaust passage 55 (75). Thus, in the vacuum double pipes 30 connected to each other by the joints 50 and 50U (valve units 70A and 70B), the exhaust passages 37 of the vacuum double pipes 30 communicate with each other.

  The exhaust passages 37 and 55 (75) are sealed by the following seal structure. Here, the case of the L-shaped joint 50 will be described as an example.

  The inner tube seal structure includes an O-ring 39A (an inner tube seal member) that seals between the end 43 of the inner tube 31 and the inner tube connection portion 53 of the L-shaped joint 50.

  Specifically, the O-ring 39 </ b> A is fitted in a groove 34 provided in the end portion 33 of the inner tube 31. An inner pipe connection portion 53 of the L-shaped joint 50 is inserted into the end portion 43 of the inner pipe 31 along the axial direction (longitudinal direction) of the inner pipe 31. In the inner pipe seal structure, the inner pipe 31 is provided by an O-ring 39A between the inner surface of the end portion 33 of the inner pipe 31, specifically, the bottom surface of the groove 34 and the outer surface of the inner pipe connecting portion 53 of the L-shaped joint 50. It is sealed in the radial direction.

  Further, the outer pipe seal structure includes an O-ring 39B (outer pipe seal member) that seals between the end 43 of the outer pipe 41 and the outer pipe connection portion 63 of the L-shaped joint 50.

  Specifically, the O-ring 39 </ b> B is provided on the outer periphery of the end portion 43 of the outer tube 41, that is, on the inner periphery of the enlarged diameter portion 63 a of the outer tube connection portion 63. Regarding the extending direction (longitudinal direction) of the outer tube 41, the O-ring 39 </ b> B is provided between the stepped portion 44 provided at the end 43 of the outer tube 41 and the stepped portion 64 of the outer tube connecting portion 63. It is pressed by these step portions 44 and 64. Thereby, in the outer tube seal structure, an O-ring is provided between the outer surface of the end portion 43 of the outer tube 41, specifically, the surface of the step portion 44 and the inner surface of the outer tube connection portion 63, specifically, the surface of the step portion 64. 39B is sealed in the direction in which the outer tube 41 extends.

  The outer pipe 41 and the outer pipe connecting portion 63 (83) of the vacuum double pipe 30 are connected by the following outer pipe connecting structure. Here, similarly to the above, the case of the L-shaped joint 50 will be described as an example.

  The outer pipe connecting structure includes a locking ring 57 (connecting member) that connects the end 43 of the outer pipe 41 and the outer pipe connecting portion 63 of the L-shaped joint 50, specifically, the enlarged diameter portion 63a in a removable state. I have. The locking ring 57 is fitted in both the groove 46 provided in the end portion 43 of the outer tube 41 and the groove 65 provided in the enlarged diameter portion 63 a of the outer tube connection portion 63.

  Thereby, in the outer tube connection structure, the connection state between the end portion 43 of the outer tube 41 and the enlarged diameter portion 63 a of the outer tube connection portion 63 is held by the locking ring 57. In this state, the O-ring 39B is pressed by the step portions 44 and 64, and the O-ring 39B is deformed by a predetermined amount.

  FIG. 12A is a perspective view showing the locking ring 57, and FIG. 12B is a perspective view showing the locking state.

  The locking ring 57 includes a locking ring main body 57a formed in a “C” shape and a knob 57b provided at each end of the locking ring main body 57a.

  The locking ring main body 57 a is fitted into both the groove 46 provided in the end 43 of the outer tube 41 and the groove 65 provided in the enlarged diameter portion 63 a of the outer tube connecting portion 63. For this reason, the radial thickness of the locking ring body 57a is constant over the entire circumference of the locking ring body 57a and is slightly smaller than the sum of the depth of the groove 46 and the depth of the groove 65. Furthermore, the radial thickness of the locking ring body 57a is constant in the width direction of the locking ring body 57a (the central axis direction of the locking ring body 57a).

  The knob portion 57b protrudes in the outer diameter direction of the locking ring body 57a at each end of the locking ring body 57a. The width of the knob 57b is made equal to the width of the locking ring body 57a.

  The widths of the locking ring main body 57a and the knob portion 57b are the width of the groove 46 provided in the end 43 of the outer tube 41 and the width of the groove 65 provided in the enlarged diameter portion 63a of the outer tube connecting portion 63. It is slightly narrower than.

  Here, the width of the peeping portion 68 in the extending direction of the outer pipe connecting portion 63 is slightly wider than the width of the groove 65 provided in the enlarged diameter portion 63a. For this reason, the state of the locking ring 57 fitted in the groove 65 can be confirmed through the peeping portion 68.

  The locking ring 57 is made of an elastic material, for example, spring steel. In the locking ring 57, the knobs 57b are separated from each other in a natural state (when not attached). In a state where the locking ring main body 57 a is contracted so that the knobs 57 b are brought close to each other, the outer diameter of the locking ring main body 57 a is slightly smaller than the inner diameter of the groove 65 of the outer pipe connection portion 63.

  At this time, in the circumferential direction of the locking ring main body 57 a, the width occupied by the knob portion 57 b, that is, the interval between both ends of the two knob portions 57 b is the insertion portion provided in the enlarged diameter portion 63 a of the outer tube connection portion 63. It becomes narrower than the width of 67. On the other hand, in the state where the locking ring main body 57 a is opened, the outer diameter of the locking ring main body 57 a is larger than the inner diameter of the groove 65 of the outer pipe connection portion 63.

  Each knob 57 b is provided with a through hole 57 d extending in the width direction of the locking ring 57. These through-holes 57d are formed to dimensions that allow insertion of a tool used when the locking ring main body 57a is contracted.

  In such a configuration, the connection between the end portion 43 of the outer tube 41 and the enlarged diameter portion 63a of the outer tube connection portion 63 is performed in the following procedure.

  The locking ring body 57 a is expanded and passed through the end portion 43 of the outer tube 41, and the locking ring 57 is disposed in accordance with the groove 46 of the end portion 43. Subsequently, a tool is inserted into the through-hole 57d of the knob portion 57b so that the locking ring body 57a is contracted. As a result, the locking ring main body 57a is fitted in the groove 46 of the end portion 43.

  At this time, the distance between both ends of the two knobs 57b is narrower than the width of the insertion part 67 of the outer tube connection part 63. For this reason, the end 43 of the outer tube 41 can be inserted into the outer tube connecting portion 63 along the axial direction of the outer tube 41 while maintaining this state.

  Then, the locking ring 57 is opened in a state where the groove 65 of the outer pipe connecting portion 63 and the locking ring 57 are aligned. As a result, the locking ring 57 expands due to elasticity, and the outer surface of the locking ring main body 57 a comes into contact with the inner surface of the groove 65 of the outer tube connecting portion 63.

  Accordingly, the locking ring 57 is fitted into both the groove 46 of the end 43 of the outer tube 41 and the groove 65 of the enlarged diameter portion 63a of the outer tube connecting portion 63. As a result, the end portion 43 of the outer tube 41 and the enlarged diameter portion 63a of the outer tube connecting portion 63 are connected.

  On the other hand, when the connection state between the end portion 43 of the outer tube 41 and the enlarged diameter portion 63a of the outer tube connection portion 63 is released, the following procedure is performed.

  A tool is inserted into the through-hole 57d of the knob portion 57b so that the locking ring body 57a is contracted. As a result, the locking ring 57 is engaged with the groove 46 of the end portion 43 of the outer tube 41, while being detached from the groove 65 of the outer tube connection portion 63. That is, the locking ring main body 57 a is accommodated in the groove 46 of the end portion 43 of the outer tube 41.

  At this time, the distance between both ends of the two knobs 57b is narrower than the width of the insertion part 67 of the outer tube connection part 63. For this reason, the end 43 of the outer tube 41 can be pulled out from the inside of the outer tube connector 63 along the axial direction of the outer tube 41 while maintaining this state.

  FIG. 13 is a cross-sectional view showing a connection state between the suction passage 19 of the vacuum pump and the recovery-side valve unit 70B. The suction passage 19 has a configuration in which the inner pipe 31 is removed from the vacuum double pipe 30 and further includes a bellows portion 48a.

  The connection structure between the suction passage 19 and the outer pipe connection part 83 of the valve unit 70B is the same as the connection structure between the outer pipe 41 and the outer pipe connection part 83 of the vacuum double pipe 30. For this reason, about the same member, description is abbreviate | omitted by attaching | subjecting the same code | symbol.

  Inside the outer pipe connecting portion 83 to which the suction passage 19 is connected, a sealing plug 89 is provided at the end of the second fluid passage portion 72 of the valve unit 70B. The sealing plug 89 seals the end portion of the second fluid passage portion 72. For this reason, the Galden flowing through the second fluid passage portion 72 is prevented from leaking from the end portion of the second fluid passage portion 72.

  The exhaust passage 75 of the valve unit 70B communicates with the suction passage 19. For this reason, the exhaust passage 75 can be evacuated to a vacuum through the suction passage 19 by a vacuum pump.

  The outer tube main body 42 is provided with a bellows portion 48a. The bellows portion 48a is formed by continuously forming a plurality of the node portions 48 of the outer tube 41. For this reason, the outer pipe | tube main body 42 and the bellows part 48a can be formed integrally.

  Specifically, when the node portion 48 and the bellows portion 48a are formed in the outer tube main body 42, the outer tube main body 42 is formed in a linear shape. Thereafter, the linear outer tube main body 42 is bent at the bellows portion 48a in accordance with the positional relationship between the valve unit 70B and the vacuum pump. For this reason, the function of a bending joint can be given to the bellows part 48a.

  The temperature control system having the above configuration is controlled as follows. The following control may be performed by an operator or a control unit of the temperature control system.

  As shown in FIG. 2, the vacuum pump is driven, and the exhaust passage 75 of the collection-side valve unit 70 </ b> B is evacuated to vacuum through the suction passage 19.

  Here, the exhaust passage 75 communicates throughout the interior of the valve case 81. Therefore, in each outer pipe connecting portion 83 of the valve case 81, the exhaust passage 75 communicates with a space (exhaust passage 37) between the inner pipe 31 and the outer pipe 41 in each vacuum double pipe 30. Therefore, the vacuum double pipe 30 of each passage connected to the valve unit 70B is evacuated to a vacuum. Specifically, each vacuum double pipe 30 constituting the high temperature side recovery passage 22H, the low temperature side recovery passage 22C, the outlet passage 24W, the high temperature side bypass passage 25H, and the low temperature side bypass passage 25C is evacuated to vacuum. .

  Further, the exhaust passage 75 of the valve unit 70A on the supply side is exhausted to a vacuum through the bypass passages 25H and 25C. For this reason, the vacuum double pipe 30 of the other passage connected to the valve unit 70A is evacuated to a vacuum. Specifically, the vacuum double pipes 30 constituting the high temperature side supply passage 21H, the low temperature side supply passage 21C, and the introduction passage 23W are evacuated to vacuum. Note that each end of the inner pipe and the outer pipe of the preliminary passage 87 is sealed by a sealing flange 87a.

  Here, each vacuum double piping 30 is connected by joints 50 and 50U. The exhaust passage 37 of the vacuum double pipe 30 communicates with the exhaust passage 55 of the joints 50 and 50U. For this reason, the exhaust passage 55 of the joints 50 and 50U can be exhausted to a vacuum by exhausting the vacuum double pipe 30 to a vacuum.

  Further, the exhaust passages 55 of the joints 50 and 50U communicate with each other the exhaust passages 37 of the vacuum double pipe 30 connected together. Therefore, by evacuating one vacuum double pipe 30 to a vacuum, the plurality of vacuum double pipes 30 can be exhausted to a vacuum through the exhaust passage 55 of the joints 50 and 50U.

  In this manner, by exhausting the exhaust passage 75 of the collection side valve unit 70B to the vacuum through the suction passage 19, the entire passage constituting the temperature control system can be exhausted to the vacuum collectively.

  Subsequently, the on-off valves 11H, 12H, 11C, and 12C of the supply unit 10 are opened. And the opening degree of the throttle valves 17H and 17C is adjusted based on the detected values of the pressure gauges 16H and 16C. That is, high temperature galden and low temperature galden are always circulated in small amounts in the bypass passages 25H and 25C.

  Therefore, regardless of whether high-temperature Galden or low-temperature Galden is circulated through the work holder 15, the high-temperature Galden always circulates through the high-temperature supply passage 21H and the high-temperature recovery passage 22H. The low temperature Galden is always circulated through the supply passage 21C and the recovery passage 22C on the low temperature side. Therefore, it is possible to suppress the temperature drop of the high temperature side supply passage 21H and the high temperature side recovery passage 22H and the temperature rise of the low temperature side supply passage 21C and the low temperature side recovery passage 22C.

  Thereafter, the state of the valves 70 </ b> A and 70 </ b> B is switched at a predetermined timing, so that the high-temperature Galden and the low-temperature Galden are switched and distributed to the work holder 15.

  For example, when high-temperature Galden is circulated through the work holder 15, the supply-side valve unit 70A causes the high-temperature supply passage 21H and the introduction passage 23W to communicate with each other and the low-temperature supply passage 21C and the introduction passage. 23W is cut off. The recovery side valve unit 70B allows the high temperature side recovery passage 22H and the outlet passage 24W to communicate with each other, and the low temperature side recovery passage 22C and the outlet passage 24W are blocked.

  Here, in the vacuum double pipe 30 constituting the introduction passage 23W and the lead-out passage 24W, the heat capacities of the inner pipe main body 32 and the outer pipe main body 42 are smaller than those of the conventional vacuum double pipe. For this reason, even if the temperature of Galden flowing through the introduction passage 23W and the lead-out passage 24W is changed, the thermal energy absorbed as a temperature change in the passages 23W and 24W can be reduced.

  Thus, Galden is circulated through the flow path of the inner pipe 31 of each vacuum double pipe 30. Further, a plurality of vacuum double pipes 30 are connected to each other by joints 50 and 50U, and Galden is circulated through the flow paths of the respective inner pipes 31 through the joints 50 and 50U.

  At this time, the differential pressure between the pressure of Galden flowing through the inside of the inner pipe 31 and the pressure of the exhaust passage 37 acts on the inner pipe 31, and the differential pressure between the pressure of the exhaust passage 37 and atmospheric pressure acts on the outer pipe 41. To do. In this respect, since the joint portions 38 and 48 are formed in the inner tube 31 and the outer tube 41 of the vacuum double pipe 30, the strength of the inner tube 31 and the outer tube 41 can be improved.

  Moreover, when Galden circulates inside the inner pipe 31 of the vacuum double pipe 30, the temperatures of the inner pipe 31 and the outer pipe 41 change, and the inner pipe 31 and the outer pipe 41 expand and contract. In this regard, in the inner pipe seal structure, the O-ring 39A is used in the radial direction of the inner pipe 31 between the end 33 of the inner pipe 31 and the inner pipe connecting portion 53 (the connecting portion of the second fluid passage portion 72). It is sealed. For this reason, the inner tube 31 and the inner tube connecting portion 53 can be allowed to move relative to each other in the direction in which the inner tube 31 extends (the axial direction of the inner tube 31).

  In particular, in the introduction passage 23W and the outlet passage 24W, the high-temperature Galden and the low-temperature Galden are switched and circulated. For this reason, in the vacuum double pipe 30 and the L-shaped joint 50 constituting the introduction passage 23W and the lead-out passage 24W, the expansion and contraction due to the temperature change becomes larger than the others. Even in that case, the expansion and contraction due to the temperature change of the inner tube 31 can be absorbed by the plurality of nodes 38 formed at intervals in the inner tube 31. Further, the water hammer phenomenon associated with the distribution and blocking of Galden can be suppressed by the node 38.

  Similarly, in the second fluid passage portion 72 and the connection passage portion 73 of the valve units 70A and 70B, the high temperature Galden and the low temperature Galden are switched and circulated. In this respect, since the connection passage portion 73 includes the bellows portion 73a, even if the temperature of Galden flowing through the second fluid passage portion 72 is changed, the expansion and contraction of the second fluid passage portion 72 due to the temperature change is prevented. It can be absorbed by 73a.

  In the U-shaped joint 50U, the inner pipe bellows part 56 and the outer pipe bellows part 66 can absorb the expansion and contraction of the inner pipe joint part 51 and the outer pipe joint part main body 62, respectively.

  In the state where the temperature control system is stopped, the connection state of the vacuum double pipe 30, the joints 50 and 50U, and the valve units 70A and 70B can be released to perform maintenance or the like.

  That is, in the outer tube connection structure, the outer tube 41 and the outer tube connection portion 63 (83) are connected in a detachable state by the locking ring 57, so the outer tube 41 and the outer tube connection portion 63 are connected. Can be removed. At this time, the inner tube 31 and the inner tube connecting portion 53 (the connecting portion of the second fluid passage portion 72) are allowed to move relative to each other in the extending direction of the inner tube 31. For this reason, these can also be removed simultaneously with the removal of the outer tube 41 and the outer tube connection part 63.

  Here, the connection state between the outer tube 41 and the outer tube connecting portions 63 and 83 can be released by operating the locking ring 57 via the operation portion 69. At this time, the inner tube 31 and the inner tube connecting portion 53 cannot be operated from the outside, but the radial direction of the inner tube 31 is set between the inner tube 31 and the inner tube connecting portion 53 by the O-ring 39A. It is only sealed with. Therefore, the inner pipe 31 and the inner pipe connecting portion 53 (second fluid passage portion 72) are separated by separating the vacuum double pipe 30 and the joints 50, 50U (valve units 70A, 70B) in the extending direction of the double pipe 30. Can be released from the connection state.

  The embodiment described above has the following advantages.

  The inner pipe 31 of the vacuum double pipe 30 is covered with the outer pipe 41, and an exhaust passage 37 is formed by a space between the outer surface of the inner pipe 31 and the inner surface of the outer pipe 41. The exhaust passage 37 is open at both ends and sealed in the middle in the direction (longitudinal direction) in which the inner pipe 31 extends.

  For this reason, by exhausting the exhaust passage 37 of one vacuum double pipe 30 to a vacuum, the joints 50 and 50U and valve units 70A and 70B connected to the vacuum double pipe 30 are connected via these. The other vacuum double pipe 30 can be evacuated to vacuum. As a result, it is possible to reduce labor (man-hours and working time) for exhausting the vacuum double pipe 30 to a vacuum.

  Each of the inner tube body 32 of the inner tube 31 and the outer tube body 42 of the outer tube 41 has a plurality of nodes 38 and 48 spaced apart from each other by bending the tube wall and projecting radially outward. Is formed. For this reason, the strength against the internal pressure acting on the inner tube main body 32 and the external pressure acting on the outer tube main body 42 can be improved by the joint portions 38 and 48. Therefore, even if the tube walls of the inner tube main body 32 and the outer tube main body 42 are made thinner and lighter, their strength can be ensured.

  Further, the expansion and contraction due to the temperature change of the inner tube 31 and the outer tube 41 can be absorbed by the plurality of nodes 38 and 48 formed at intervals. Therefore, even when the expansion / contraction bellows is not provided in the vacuum double pipe 30, the thermal stress generated in the double pipe 30 can be relaxed.

  Further, since the node portions 38 and 48 are formed by bending the tube walls of the inner tube main body 32 and the outer tube main body 42 and projecting them annularly outward in the radial direction, the inner tube main body 32 and the outer tube main body are formed. It can form easily by performing the process shrunk | reducing to the longitudinal direction (axial direction) with respect to 42. FIG.

 Since the outer tube main body 42 is formed with a plurality of the node portions 48 at intervals, the tube wall of the outer tube main body 42 can be made thin. As a result, the pipe wall member of the outer pipe main body 42 having a larger volume can be reduced in weight, so that the double pipe 30 can be effectively reduced in weight.

  Even when the temperature of Galden flowing through the inner pipe 31 is changed and the temperature change of the inner pipe 31 is increased, the inner pipe 31 is expanded and contracted by the plurality of nodes 38 provided in the inner pipe main body 32. Can be absorbed. Therefore, the thermal stress generated in the double pipe 30 can be relaxed.

  The inner tube main body 32 and the outer tube main body 42 are supported by each other in a line contact state. For this reason, these can be mutually supported, suppressing the heat conduction between the inner tube | pipe 31 and the outer tube | pipe 41. FIG.

  Similarly, the valve main body 77 and the valve case main body 82 are supported by each other in a line contact state. For this reason, these can be mutually supported, suppressing the heat conduction between the valve main body 77 and the valve case main body 82.

  Specifically, support rings 35 </ b> A and 35 </ b> C having a plurality of corners on the outer surface and a support piece 86 </ b> C are assembled to the outer periphery of the inner pipe main body 32, the inner pipe joint 51, and the valve main body 77. For this reason, the structure which each supports the outer pipe main body 42, the outer pipe joint part main body 62, and the valve case main body 82 in the state of a line contact is easily realizable.

  Since the support ring 35A is assembled by being fitted to the node portion 38 formed in the inner pipe main body 32, it is easy to adjust the interval between the support rings 35A. Furthermore, since the node portion 38 projects annularly outward in the radial direction of the inner tube main body 32, it is easy for the node portion 38 to suppress the movement of the support ring 35 </ b> A in the direction in which the inner tube main body 32 extends.

  The exhaust passage 55 of the joints 50 and 50U communicating with the exhaust passage 37 and the valve unit by exhausting the space (exhaust passage 37) between the inner pipe 31 and the outer pipe 41 of the vacuum double pipe 30 to a vacuum. The exhaust passages 75 of 70A and 70B can be evacuated to a vacuum. For this reason, the heat insulation between the inner pipe joint 51 and the outer pipe joint main body 62 of the joints 50 and 50U and the heat insulation between the fluid passage parts 71H, 71C and 72 of the valve units 70A and 70B and the valve case 81 are improved. Can be made. Therefore, it can suppress that the heat insulation of the vacuum double piping 30 falls in the part of the joints 50 and 50U and the part of valve unit 70A, 70B.

  Further, since the exhaust passages 55 and 75 communicate the exhaust passages 37 of the respective vacuum double pipes 30 with each other, the exhaust passages 55 and 75 are connected to each other by evacuating one vacuum double pipe 30 to a vacuum. The plurality of vacuum double pipes 30 can be evacuated to a vacuum in one operation through 75. As a result, it is possible to reduce the trouble of exhausting the vacuum double pipe 30 to a vacuum.

  In the inner tube seal structure, the end portion 33 of the inner tube 31 and the inner tube connection portion 53 (connection portion of the second fluid passage portion 72) are sealed in the radial direction of the inner tube 31 by the O-ring 39A. Yes. For this reason, the inner tube 31 and the inner tube connecting portion 53 can be allowed to move relative to each other in the direction in which the inner tube 31 extends (the axial direction of the inner tube 31). Therefore, the expansion and contraction due to the temperature change of the inner pipe 31 can be absorbed, and the thermal stress generated in the vacuum double pipe 30 and the joints 50 and 50U (valve units 70A and 70B) can be relaxed.

  Further, in the outer tube connection structure, the end portion 43 of the outer tube 41 and the outer tube connecting portions 63 and 83 are connected in a detachable state by the locking ring 57. For this reason, when performing a maintenance etc., the outer tube | pipe 41 and the outer tube | pipe connection parts 63 and 83 can be removed. At this time, since the inner tube 31 and the inner tube connecting portion 53 are allowed to move relative to each other in the extending direction of the inner tube 31, these are simultaneously removed from the outer tube 41 and the outer tube connecting portions 63 and 83. Can also be removed.

  In the outer pipe seal structure, the direction between the end 43 of the outer pipe 41 and the enlarged diameter parts 63a and 83a of the outer pipe connecting parts 63 and 83 extends in the direction in which the outer pipe 41 extends (the vacuum double pipe 30). In the axial direction). Therefore, the vacuum double pipe 30 and the joints 50 and 50U (valve units 70A and 70B) are moved relative to each other in the direction in which the outer pipe 41 extends, so that the space between the outer pipe 41 and the outer pipe connecting portions 63 and 83 is increased. Can be sealed. That is, by inserting the vacuum double pipe 30 and the joints 50 and 50U into each other in the extending direction of the outer pipe 41, the end 43 of the outer pipe 41 and the enlarged diameter portions 63a and 83a of the outer pipe connecting parts 63 and 83 are connected. The gap can be sealed.

  At this time, as described above, in the inner tube sealing structure, the end portion 33 of the inner tube 31 and the inner tube connecting portion 53 are sealed in the radial direction of the inner tube 31 by the O-ring 39A. For this reason, by inserting the vacuum double pipe 30 and the joints 50, 50 U into each other in the direction in which the outer pipe 41 extends, the gap between the inner pipe 31 and the inner pipe connecting portion 53 can be simultaneously sealed.

  Furthermore, in a state where the O-ring 39B is deformed by a predetermined amount, the connection state between the end portion 43 of the outer tube 41 and the outer tube connection portions 63 and 83 is maintained by the outer tube connection structure. For this reason, the deformation amount of the O-ring 39B, that is, the sealed state by the outer tube connection structure can be stabilized. And since this state is hold | maintained by the outer pipe | tube connection structure, it can control that the inner pipe | tube 31 and the outer pipe | tube connection parts 63 and 83 move relatively in the direction where the inner pipe | tube 31 is extended.

  Since the first fluid passage portions 71C and 71H and the second fluid passage portion 72 are in twisted positions, the first fluid passage portions 71C and 71H and the second fluid passage portion 72 do not intersect with each other, and the valve 76H , 76C, respectively. Therefore, even if there is a temperature difference between Galden flowing through the first fluid passage portions 71C and 71H and Galden flowing through the second fluid passage portion 72, the first fluid passage portions 71C and 71H and the second fluid Heat conduction with the passage portion 72 can be suppressed. As a result, the loss of thermal energy that Galden has can be suppressed.

  A set of the valve main body 77 of the fluid passage portions 71H and 72 and the high temperature side valve 76H and a set of the fluid passage portions 71C and 72 and the low temperature side valve 76C of the valve main body 77 are covered by the valve case 81. ing. The exhaust passage 75 formed by the space between the fluid passage portions 71H, 71C, 72, the connection passage portion 73, the valves 76H, 76C, and the valve case 81 is evacuated to a vacuum. For this reason, two sets of fluid passage portions and valves can be accommodated in one valve case 81 while suppressing a decrease in heat insulation between the two sets. As a result, the entire valve units 70A and 70B including two sets of fluid passage portions and valves can be reduced in size.

  Furthermore, by evacuating one vacuum double pipe 30 to a vacuum, the vacuum double pipes 30 corresponding to a plurality of groups can be collectively exhausted to a vacuum through the exhaust passages 75 of the valve units 70A and 70B. Therefore, compared with the case where the set of the first fluid passage portion 71H and the valve 76H on the high temperature side and the set of the first fluid passage portion 71C and the valve 76C on the low temperature side are individually accommodated in the valve case 81, The trouble of exhausting the vacuum double pipe 30 to a vacuum can be reduced.

  Since each set of the second fluid passage portions 72 is connected to each other via the connection passage portion 73, a plurality of sets of the second fluid passage portions 72 are shared and shared by the first fluid passage portions 71H and 71C. Galden can flow into the second fluid passage portion 72. As a result, the temperature of the fluid circulated through the second fluid passage portion 72 can be changed by making the temperature of Galden circulated between the first fluid passage portion 71H and the first fluid passage portion 71C different from each other.

  Here, since the connection passage portion 73 includes the bellows portion 73a, even if the temperature of Galden flowing through the second fluid passage portion 72 is changed, the expansion and contraction of the second fluid passage portion 72 due to the temperature change is prevented. It can be absorbed by 73a. Therefore, the thermal stress generated in the second fluid passage portion 72 and the valves 76H and 76C can be relaxed.

  By operating the locking ring 57 via the operation unit 69, the connection state between the outer tube 41 and the outer tube connection part 63 (83) can be released. At this time, the space between the inner tube 31 and the inner tube connecting portion 53 (the connecting portion of the second fluid passage portion 72) is only sealed in the radial direction of the inner tube 31 by the O-ring 39A. Therefore, the connection state between the inner pipe 31 and the inner pipe connecting portion 53 is released by pulling the vacuum double pipe 30 and the joints 50, 50U (valve units 70A, 70B) apart in the direction in which the double pipe 30 extends. Can do. As a result, the connection state between the vacuum double pipe 30 and the joints 50 and 50U can be easily released.

  The operation unit 69 employs a configuration including a peeping unit 68 that makes it possible to visually recognize that the outer tube 41 and the outer tube connection units 63 and 83 are connected by the locking ring 57. For this reason, the operation portion 69 that can be operated with respect to the locking ring 57 has a function as a peeping portion 68 that makes it possible to visually recognize the connection between the outer tube 41 and the outer tube connection portions 63 and 83. be able to. Therefore, it is possible to more reliably connect the outer tube 41 and the outer tube connecting portions 63 and 83 while suppressing an increase in the number of processing steps for providing the peeping portion 68.

  In the suction passage 19, a bellows portion 48a is formed by continuously forming a plurality of node portions 48. For this reason, it becomes possible to bend a pipe | tube in the bellows part 48a, and can give the function of a bending joint to the bellows part 48a. Therefore, even in the case of the suction passage 19 installed in a bent state, it can be formed integrally and long. As a result, since the connection part of the suction passage 19 can be reduced, the sealing performance of the suction passage 19 can be improved.

  It is not limited to the said embodiment, For example, it can also implement as follows.

  In the valve units 70A and 70B, a connection passage portion 73 that does not include the bellows portion 73a can be employed.

  As shown in FIG. 14, an annular groove 144 may be provided on the outer surface of the end 143 of the outer tube 141, and the O-ring 39 </ b> B may be fitted into the groove 144. That is, as the outer tube sealing structure, the end portion 143 of the outer tube 141 and the outer tube connecting portion 163 (183) may be sealed in the radial direction of the outer tube 141 by the O-ring 39B.

  According to such a configuration, it is easy to align the outer tube 141 and the outer tube connecting portion 163 (183) in the axial direction of the outer tube 141. However, regarding the sealing performance, generally, the configuration in which sealing is performed in the direction (axial direction) in which the outer tube 141 extends by the O-ring 39B is superior.

  In addition, a configuration in which an annular groove is provided on the outer surface of the inner pipe connection portion 53 (connection portion of the second fluid passage portion 72) to fit the O-ring 39A, or an outer surface of the outer pipe connection portion 163 (183) is annular. A configuration in which a groove is provided to fit the O-ring 39B may be employed.

  As shown in the figure, as an outer tube connection structure, an annular groove 165 (185) having a triangular cross-sectional shape is provided on the inner surface of the outer tube connection portion 163 (183), and an annular shape fitting into the groove 165 is provided. It is also possible to employ a locking ring 157 having a barb 157a.

  In such a configuration, the engagement ring 157 is aligned with the groove 46 of the end portion 143 of the outer tube 141 so as to be contracted, and the end portion of the outer tube 141 is placed inside the outer tube connection portion 163 along the axial direction of the outer tube 141. 143 is inserted. Then, when the return 157a of the locking ring 157 reaches the groove 165 of the outer tube connecting portion 163, the locking ring 157 expands due to elasticity and enters a state in which they are fitted. Thereby, the edge part 143 of the outer tube | pipe 141 and the outer tube | pipe connection part 163 can be connected.

  It is effective to employ the operation portion 169 shown in FIG. 15 in the locking ring 157 and the outer pipe connection portion 163 (183) shown in FIG. The operation portion 169 is a notch extending from the end portion of the outer tube connection portion 163 to the groove 165 (185) along the axial direction of the outer tube connection portion 163. A plurality of operation units 169 are provided at predetermined intervals in the circumferential direction of the outer tube connection unit 163.

  In such a configuration, the locking ring 157 is contracted by pressing the locking ring 157 in the inner diameter direction via the plurality of operation portions 169. Then, in a state where the locking ring 157 is contracted and the return 157a is removed from the groove 165, the outer tube 141 and the outer tube connecting portion 163 are separated in the extending direction of the outer tube 141. Thereby, the connection state of the outer pipe | tube 141 and the outer pipe | tube connection part 163 can be cancelled | released.

  Further, by enlarging the width of the operation part 169 in the circumferential direction of the outer pipe connection part 163, the fitting state between the return of the locking ring 157 and the groove 165 of the outer pipe connection part 163 is visually recognized through the operation part 169. Can do. That is, the operation unit 169 can have a function as a visual recognition unit that enables visual recognition that the end portion 143 of the outer tube 141 and the outer tube connection unit 163 are connected by the locking ring 157.

  In addition, the outer pipe connection part which is not provided with the operation part 69 of the outer pipe connection parts 63 and 83 mentioned above and the operation part 169 of the outer pipe connection parts 163 and 183 can also be adopted. In other words, the outer tube and the outer tube connecting portion may not necessarily be removable.

  A structure in which the groove 36d is not provided in the support ring 35D shown in FIG. 4D or the support ring 35A shown in FIG. 4A is adopted, and the support ring in the extending direction (axial direction) of the inner tube 31 It is also possible to adopt a configuration in which the node portion 38 of the inner tube 31 is provided in the vicinity of both sides of the inner tube 31. According to such a configuration, the movement of the support ring in the extending direction of the inner tube 31 can be suppressed by the node portion 38. Even when the interval between the node portions 38 sandwiching the support ring is wide, it is possible to suppress further movement of the support ring when the support ring moves until it abuts against the node portion 38.

  Moreover, a part of the inner tube 31 or the outer tube 41 is protruded to form a protruding portion or a corner portion, and the inner tube 31 and the outer tube 41 are in a point contact or line contact state by the protruding portion or the corner portion. They can also support each other. Similarly, in the joints 50 and 50U, a part of the inner pipe joint part 51 and the outer pipe joint part 61 are protruded to form a protrusion part and a corner part, and the inner pipe joint part 51 is formed by the protrusion part and the corner part. And the outer pipe joint portion 61 can be supported with each other in a point contact or line contact state. In the valve units 70A and 70B, a part of the valve main body 77 and the valve case 81 is protruded to form protrusions and corners, and the valve main body 77 and the valve case 81 are brought into point contact with each other by the protrusions and corners. It is also possible to support each other in a line contact state.

  -About the L-shaped joint 50 shown in FIG. 5, the inner pipe joint part 51 and the outer pipe joint part main body 62 can also be changed into a linear form, and it can also be set as an I-type joint. In this case, it is effective to configure the inner pipe joint 51 and the outer pipe joint main body 62 according to the inner pipe main body 32 and the outer pipe main body 42 of the vacuum double pipe 30. That is, the pipe wall of the inner pipe joint 51 and the outer pipe joint main body 62 is formed thinner than the pipe wall in the conventional vacuum double pipe, and one or a plurality of nodes similar to the nodes 38 and 48 are provided. Good.

  Moreover, about the U-shaped joint 50U shown in FIG. 6, the inner pipe joint part 51 and the outer pipe joint part main body 62 can be changed into a linear shape to form an I-type joint. Furthermore, in the I-type joint, the bellows portions 56 and 66 can be changed to a three-pronged passage portion to form a T-type joint. In the U-shaped joint 50U, the bellows portions 56 and 66 may be changed to a three-pronged passage portion to form a Y-shaped joint.

  Further, with respect to the U-shaped joint 50U shown in FIG. 6, the inner pipe joint 51 and the outer pipe joint main body 62 are changed to a linear shape, and the bellows portions 56 and 66 are bent into an L shape to form an L-shaped joint. You can also.

  In that case, it is effective to integrally form the inner pipe joint portion 51 and the bellows portion 56, and the outer pipe joint portion main body 62 and the bellows portion 66 in the same manner as in the suction passage 19 shown in FIG. is there. Furthermore, it is effective to provide the same joint portions as the joint portions 38 and 48 in the inner pipe joint portion 51 and the outer pipe joint portion main body 62, respectively.

  Further, an L-type vacuum double pipe can be formed by providing an inner tube having a diameter smaller than that of the suction passage 19 and having the same configuration as that of the suction passage 19 with respect to the suction passage 19 shown in FIG. According to such a structure, it becomes possible to bend double piping in a bellows part, and can give the function of a bending joint to a bellows part. Therefore, even in the case of a double pipe installed in a bent state, it can be formed integrally and long. As a result, since the connection part of double piping can be reduced, the sealing performance of a double piping pipe can be improved.

  As shown in FIG. 16, in the joint 150 connected to the vacuum double pipe 30, the inner pipe connection part 253 and the outer pipe connection part 263 are connected via the bellows part 266, and the inner pipe connection part 253 It is also possible to adopt a configuration in which the space between the outer tube connecting portion 263 and the outer tube connecting portion 263 is sealed by the bellows portion 266.

  Here, the outer pipe connecting portion 263 is provided with a flange 267, and the flange 267 is provided with a bolt hole 267a. Further, the inner pipe connecting portion 253 is provided with a flange 257. Then, for example, the joint 150 is fixed with a bolt so that the outer pipe connecting portion 263 is arranged outside and the inner pipe connecting portion 253 is arranged inside the casing of the supply unit 10.

  According to such a configuration, the flange 257 of the inner pipe connection part 253 is connected to the pipe of the Galden feeder inside the casing, and the vacuum double pipe is connected to the outer pipe connection part 263 and the inner pipe connection part 253 outside the casing. 30 can be connected. Therefore, the Galden feeder pipe accommodated in the housing can be easily connected to the vacuum double pipe 30.

  In the above embodiment, a configuration is adopted in which the first fluid passage portion 71H (71C) and the second fluid passage portion 72 at the twisted position are connected via the valve 76H (76C). However, as shown in FIG. 17, the first fluid passage portion 171H (171C) and the second fluid passage portion 172H (172C) arranged on the same straight line are connected to each other via a valve 176H (176C). A configuration can also be adopted. In this case, the high-temperature galden and the low-temperature galden are independently switched between a flow state and a cut-off state by the high-temperature side valve 176H and the low-temperature side valve 176C.

  Further, as shown in the figure, in the above configuration, the first fluid passage portion 171H, the second fluid passage portion on the high temperature side, and the main body of the valve 176H, the first fluid passage portion 171C on the low temperature side, the second It is effective to employ a configuration in which the fluid passage portion and the set of the main body of the valve 176C are covered by the valve case 181. Even with such a configuration, the entire valve unit 170A (170B) including a plurality of sets of fluid passage portions and valves can be reduced in size while suppressing a decrease in heat insulation between the plurality of sets.

  Further, in such a configuration, an exhaust passage is formed by the first fluid passage portions 171H and 171C, the second fluid passage portion, and the spaces between the valves 176H and 176C and the valve case 181; Adopting a configuration in which the space (exhaust passage 37) between the inner pipe 31 and the outer pipe 41 of the double pipe 30 is communicated with each other, and a middle portion between the vacuum double pipes 30 is sealed. Is effective. Thus, by exhausting the exhaust passage 37 of the vacuum double pipe 30 to a vacuum, the exhaust passage communicating with the exhaust passage 37 can be exhausted to a vacuum.

  As shown in FIG. 18, the valve unit 270A (270B) includes a first fluid passage portion 271 and a second fluid passage portion 272 that are in a twisted position, and the first fluid passage portion 271 and the second fluid passage portion. 272 may be connected via a valve 276. In addition, a configuration in which one set of fluid passage portions 271 and 272 and a main body of the valve 276 are covered with one valve case 281 may be adopted. Even in such a configuration, the first fluid passage portion 271, the second fluid passage portion 272, and the exhaust passage formed by the space between the valve 276 and the valve case 281 can be evacuated to a vacuum.

  FIG. 19 shows a shaft member 179 (heat insulating member) formed of a heat insulating material (for example, PEEK material) on the valve body 178 so as to show a part of the valve 76H (76C) of the valve unit 70A (70B). The shaft member 179 may be connected to the piston (drive member) of the drive unit 76a described above. That is, a configuration in which the valve body 178 and the piston are connected via the shaft member 179 may be employed. The shaft member 179 is formed in a straight line, and its end is screwed to the valve body 178 and the piston, respectively. The shaft member 179 is slidably supported by the guide portion 77c. In addition, since PEEK material is excellent in heat resistance and chemical resistance, it is effective as a shaft member of the valve 76H (76C).

  According to the above configuration, since a driving force is applied to the valve body 178 from the piston, the communication portion between the first main body passage 77a and the second main body passage 77b described above is in a communication state through the driving of the valve body 178. And can be switched to a blocking state. Here, since the valve body 178 and the piston are connected via the shaft member 179 formed of a heat insulating material, heat conduction between the valve body 178 and the piston can be suppressed. As a result, the heat insulation of the valve unit 70A (70B) can be improved.

  As shown in FIG. 20, in addition to the valve body 77, the first fluid passage portion 71H (71C), the second fluid passage portion 72, and the connection passage portion 73 described above, a drive portion 76a including a cylinder and a piston is provided. You may make it cover with the valve case 381. FIG. In this case, an air pipe 301 for introducing compressed air into the cylinder is introduced from the outside to the inside of the valve case 381 and connected to the drive unit 76a. The space between the valve case 381 and the air pipe 301 is sealed with a seal member or the like.

  Further, a joint 350 according to the joint 150 shown in FIG. 16 is connected to the valve case 381. The flange 257 of the joint 350 is connected to a flange 72 a provided at the end of the second fluid passage portion 72, and a seal member 339 seals between them. Here, the flange 267 of the joint 350 is provided with a plurality of through holes 267 b and a groove 267 c for accommodating the seal member 340 in addition to the configuration of the joint 150. A plurality of (more specifically, eight) through holes 267b are provided at equal intervals in the circumferential direction of the flange 267, and pass through a portion between the inner tube connecting portion 253 and the outer tube connecting portion 263. The groove 267 c is formed in an annular shape around the through hole 267 b and accommodates the seal member 340. A portion of the flange 267 outside the groove 267c is fastened to the valve case 381 with a bolt and a nut, and the flange 267 and the valve case 381 are sealed with a seal member 340. At this time, the opening 381a of the valve case 381 is disposed so as to overlap the plurality of through holes 267b. In such a configuration, the above-described vacuum double pipe 30 is connected to the joint 350.

  That is, the valve unit 370 and the above-described vacuum double pipe 30 are connected via the joint 350, and the exhaust passage 75 of the valve unit 370 and the space between the inner pipe 31 and the outer pipe 41 of the vacuum double pipe 30 Are communicated with each other by the exhaust passage 375 including the through hole 267 b of the joint 350. Even in this case, the valve unit 370, the joint 350, and the vacuum double pipe 30 can be collectively evacuated. Furthermore, since the flange 72a at the end of the second fluid passage portion 72 and the flange 257 of the joint 350 are connected, the configuration of the connection portion of the valve 376H (376C) can be generalized. Therefore, in the valve unit 370 for the vacuum double pipe 30, the connection between the second fluid passage portion 72 (fluid passage portion) and the joint 350 can be facilitated, and as a result, the second fluid passage portion 72 and the vacuum double portion can be easily connected. Connection with the piping 30 can be facilitated.

  21, the inner pipe connection portions 253 of the plurality of joints 350 are connected to each other by the joint connection passage portions 453, and the outer pipe connection portions 263 of the plurality of joints 350 cover the joint connection passage portions 453. The joint cases 481 may be connected to each other. Here, the joint connection passage portion 453 is formed in a “T” shape (triangular shape), and a Galden flow path is formed therein. An exhaust passage 475 is formed by a space between the joint connection passage portion 453 and the joint case 481, and the exhaust passage 475 communicates the exhaust passages 375 of the plurality of joints 350 with each other, and is an intermediate portion between the joints 350. A configuration in which is sealed may be employed. The above-described vacuum double pipe 30 is connected to each joint 350. Each joint 350 is connected to the joint case 481 in the same manner as the valve case 381 shown in FIG. 20, and the joint connection passage portion 453 is connected to the inner pipe connection portion 253 similarly to the joint 350. A flange 457 is provided. For this reason, the structure of the connection part of the joint connection channel | path part 453 can be generalized.

  Even with such a configuration, the joint case 481, the joint 350, and the vacuum double pipe 30 can be collectively exhausted to a vacuum. That is, when the whole of the plurality of joints 350, the joint connection passage portion 453, and the joint case 481 is considered as one joint, the inner pipe connection portion 253 and the joint connection passage portion 453 of the joint 350 become the inner pipe joint portion. The outer pipe connecting portion 263 and the joint case 481 of the joint 350 correspond to the outer pipe joint portion. At this time, by changing the number of the joints 350 and forming the joint case 481 correspondingly, the joints that connect the vacuum double pipes 30 to each other can be freely designed.

  The vacuum double pipe 30, the joints 50 and 50U, the valve case 81 of the valve units 70A and 70B, and the passage portions 71H, 71C, 72, and 73 can be formed of a material such as titanium or aluminum alloy.

  In the above embodiment, the pneumatic valves 76H and 76C are used, but electromagnetic valves and the like can also be used.

  In the above-described embodiment, the configuration in which the node portions 38 and 48 are provided in both the inner tube 31 and the outer tube 41 is adopted, but the configuration in which the node portion 38 is provided only in the inner tube 31 or the outer A configuration in which the node portion 48 is provided only in the tube 41 may be employed.

  -The heat medium is not limited to Galden, and liquids such as water and oil can also be used. A gas can also be used as the heat medium.

  Furthermore, the vacuum double pipe 30, the joints 50 and 50U, the valve units 70A and 70B, and modifications thereof may be applied not only to the temperature control system but also to a system for supplying fluid and a system for exhausting fluid. it can.

  -A vacuum should just be a state lower than atmospheric pressure, and may change a vacuum degree according to the environment where a temperature control system is used.

  DESCRIPTION OF SYMBOLS 10 ... Supply unit, 15 ... Work holder, 30 ... Vacuum double pipe, 31 ... Inner pipe, 32 ... Inner pipe main body, 41 ... Outer pipe, 42 ... Outer pipe main body, 37, 55, 75 ... Exhaust passage, 38, 48 ... Node, 50 ... L-shaped joint, 50U ... U-shaped joint, 51 ... Inner pipe joint, 53 ... Inner pipe joint, 61 ... Outer pipe joint, 62 ... Outer pipe joint body, 63, 83 ... Outer pipe connection part, 70A, 70B ... valve unit, 76H, 76C ... valve, 77 ... valve body, 78 ... valve body, 81 ... valve case.

Claims (11)

A valve unit that has an outer tube covering an inner tube and is used in a vacuum double pipe that evacuates between the inner tube and the outer tube, and controls a fluid flowing through the inner tube;
A fluid passage portion that is connected to the inner pipe and distributes the fluid flowing in from the inner pipe;
A valve having a valve body and a valve body and controlling a fluid flowing through the fluid passage portion;
Covering the fluid passage and the valve body, and having a valve case connected to the outer pipe,
An exhaust passage is formed by a space between the fluid passage portion and the valve and the valve case,
The exhaust passage communicates with each other a space between the inner pipe and the outer pipe of each vacuum double pipe, and a middle portion between each vacuum double pipe is sealed. Valve unit for vacuum double piping.   The valve unit for a vacuum double pipe according to claim 1, wherein the valve body and the valve case are supported by each other in a point contact or line contact state. A support member is assembled on the outer periphery of the valve body,
The vacuum double pipe according to claim 2, wherein the support member has a plurality of corner portions, and the valve case is supported by the plurality of corner portions in a point contact or line contact state. Valve unit for use. The fluid passage portion includes a first fluid passage portion and a second fluid passage portion in a twisted position,
4. The valve unit for a vacuum double pipe according to claim 1, wherein the first fluid passage part and the second fluid passage part are connected via the valve. 5. A plurality of sets of the fluid passage portion and the valve;
The valve unit for a vacuum double pipe according to any one of claims 1 to 4, wherein the valve case covers a plurality of sets of the fluid passage portions and the valve main body. The fluid passage portion includes a first fluid passage portion and a second fluid passage portion in a twisted position,
The first fluid passage portion and the second fluid passage portion are connected via the valve,
A plurality of sets of the first and second fluid passage portions and the valve;
The second fluid passage portions of each set are connected to each other via a connection passage portion including a bellows,
The valve case covers a plurality of sets of the first and second fluid passage portions, the valve main body, and the connection passage portion. Valve unit for vacuum double piping. A driving member for applying a driving force to the valve body;
The valve unit for a vacuum double pipe according to any one of claims 1 to 6, wherein the valve body and the driving member are connected via a heat insulating member. A valve unit for a vacuum double pipe according to any one of claims 1 to 7,
The vacuum double pipe;
An inner pipe sealing member that seals between the inner pipe and the fluid passage portion in a radial direction of the inner pipe;
An outer pipe sealing member that seals between the outer pipe and the valve case;
A connecting member for connecting the outer tube and the valve case in a removable state;
A connection structure between a valve unit and a vacuum double pipe characterized by comprising: The outer pipe sealing member seals between the outer pipe and the valve case in the extending direction of the outer pipe,
9. The valve unit according to claim 8, wherein the connection member holds a connection state between the outer tube and the valve case in a state where the outer tube seal member is deformed by a predetermined amount. Connection structure with piping.   The valve case is provided with an operation section that allows the connection member to be operated so as to release a connection state between the outer pipe and the valve case. A connection structure between the valve unit according to 8 or 9 and a vacuum double pipe.   The valve unit and the vacuum double pipe according to claim 10, wherein the operation unit includes a visual recognition unit that enables visual recognition that the outer pipe and the valve case are connected by the connection member. Connection structure with.

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