JP2003148637A - Multi-directional valve - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a multi-directional valve with excellent external seal performance and excellent flow characteristic, which prevents the looseness of a handle and regularly holds the valve opening constant. SOLUTION: This multi-directional valve comprises a PTFE-made valve body 1 comprising a main passage 9 provided in the lower part and a valve chamber 13 provided in the upper part and allowed to communicate with the main passage by a communicating port 12 provided vertically to the main passage 9, and the peripheral part of the opening part of the communicating port 12 is a valve seat 14. The valve chamber 13 is formed larger than the outer diameters of the opening part of the communicating port 12 and a valve element 24, and a pair of branch passages 10 and 11 communicating with the valve chamber 13 are provided on the upper side surface of the valve body 1 in the direction orthogonal to the main passage 9. The branch passages 10 and 11 are formed so that the position of the inside lowest part is substantially flushed with the bottom surface of the valve chamber 13.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a multi-way valve having a main flow path and a branch flow path, and more specifically,
The present invention relates to a multi-way valve that has excellent external sealing performance and excellent flow rate characteristics, and that can prevent the handle from loosening and maintain a constant valve opening.

[0002]

2. Description of the Related Art Conventionally, in the slurry line and various chemical liquid lines in the semiconductor industry, in a line for branching and supplying a fluid from a main flow path, there is a branching for the purpose of preventing troubles such as aggregation / sticking of slurry and precipitation of crystals. A line for cleaning the line was sometimes provided. As a general method, there has been a method of combining two two-way valves and two cheeses as shown in FIG. However, in FIG. 9, there is a problem that the chemical solution stays in the flow path from the cheese 62 to the two-way valve 64 and a problem that the flow path from the two-way valve 64 to the cheese 63 is not sufficiently washed.

As a solution to these problems, a four-way valve shown in FIG. 7 has been proposed. According to FIG. 7, 4
Reference numeral 7 denotes a valve body, which has a main channel 48 in the lower part and a valve chamber 49 in the upper part. The upper portion of the main flow path 48 and the center of the bottom surface of the valve chamber 49 are communicated with each other through a communication port 50, and a corner of the opening on the valve chamber 49 side serves as a valve seat 51. Two branch channels 52 and 53 are provided on the side surface of the valve body 47 so as to communicate with the outer peripheral portion of the bottom surface of the valve chamber 49. Since the main flow path 48 and the branch flow paths 52 and 53 are formed at substantially the same height,
The branch channels 52 and 53 are substantially L-shaped. By operating the driving portion 54 joined to the upper portion of the valve body 47, the valve body 56 provided at the center of the lower end of the diaphragm 55 is moved to the valve seat 5
The valve is opened and closed by being pressed and separated from 1.

A method of using this four-way valve is shown in FIG. Figure 8
According to the method, the two-way valve 57 and the four-way valve 6 are closed while the two-way valve 57 is closed and the four-way valve 61 is opened to branch and supply the fluid from the main flow path.
Although the fluid stays during the period of time 1, if the four-way valve 61 is closed and the two-way valve 57 is opened to wash the fluid, the staying fluid is swept down to the four-way valve 61 and the branch passage 59. Can be washed.

[0005]

However, since such a four-way valve has an L-shaped branch passage,
When the valve is open or closed, the flow of the fluid is bent and the flow rate characteristics are poor. Also, since the valve chamber is large, it takes time to completely discharge the liquid chemical remaining in the valve chamber. Also, when cleaning the branch channel with the valve closed, the diaphragm is pushed upward by the pressure of the cleaning liquid, the valve body and the valve seat are separated, and the cleaning liquid leaks to the main flow channel, or the chemical liquid in the main flow channel However, there was a problem that it leaked to the branch flow path. Further, the handle may be rotated due to vibration of the pump or the like or accidental contact with the handle, and the initial valve opening may not be maintained and the initial flow rate may not be maintained.

The present invention has been made in view of the above-mentioned problems of the prior art, and has an excellent external sealing performance and an excellent flow rate characteristic, and prevents the handle from loosening and always keeps the valve opening constant. The purpose is to provide a multi-way valve capable of

[0007]

According to the present invention, a communication port 1 is provided at a lower part of a main flow path 9 and at an upper part thereof perpendicularly to the main flow path 9.
2 and the peripheral portion of the communication port 12 is connected to the valve seat 14
And a branch body 10 that is connected to the valve chamber 13 and is formed so that the position of the lowermost part of the inner diameter thereof is substantially flush with the bottom surface of the valve chamber 13. , A bottomed cylindrical spring receiver 2 having a flange portion 16 on the upper portion and a through hole 17 at the center of the bottom portion, and a valve body 24 that is pressed against and separated from the valve seat 14 are integrally provided on the lower surface of the center. A diaphragm 7 held between a valve body 1 and a spring receiver 2, and a cylinder portion 21 into which a stem 3 described later is slidably fitted.
A substantially cylindrical bonnet 4 that has a male threaded portion 22 on the outer periphery of the upper portion and holds the spring receiver 2 together with the valve body 1, and the central upper surface of the diaphragm 7 is connected to the lower portion through the spring bearing 2 and the upper portion A flange portion 19 is provided that is in sliding contact with the cylinder portion 21, and the tip end portion of the stem 3 is supported by the bonnet 4 in a non-rotatable state, and the spring portion 8 held between the flange portion 19 of the stem 3 and the spring receiver 2. And the male thread 2 of the bonnet 4
The first feature is that the lock nut 6 is screwed to the screw nut 2 and the cap-shaped handle 5 is screwed to the male screw portion 22 above the lock nut 6, and the main flow path 9 is the valve body 1. The second feature is that it is provided on one side of the valve body 1 or through the valve body 1, and further that the branch flow passage 10 is provided on one side of the valve body 1 or through the valve body 1. The third feature.

In the present invention, the member such as the valve body has excellent chemical resistance and less elution of impurities. Therefore, polytetrafluoroethylene (hereinafter referred to as PTFE) or tetrafluoroethylene-perfluoroalkyl vinyl ether copolymer (hereinafter referred to as PFA) is used. Fluorine resin such as) is preferably used, but polyvinyl chloride, polypropylene (hereinafter P
Other plastics or metals such as P) may be used and are not particularly limited. The material of the diaphragm is preferably fluororesin such as PTFE or PFA, but it may be rubber or metal and is not particularly limited.

[0009]

BEST MODE FOR CARRYING OUT THE INVENTION Hereinafter, embodiments of the present invention will be described with reference to the drawings, but it goes without saying that the present invention is not limited to the embodiments.

FIG. 1 is a longitudinal sectional view showing an open state of a multi-way valve according to a first embodiment of the present invention. FIG. 2 is a perspective view of the valve body of FIG. FIG. 3 is a vertical sectional view showing a closed state of the multi-way valve of FIG. FIG. 4 is a longitudinal sectional view showing a state of the intermediate opening of the multi-way valve of FIG. FIG. 5 is a perspective view of the valve body of the multi-way valve of the second embodiment. FIG. 6 is a perspective view of the valve body of the multi-way valve of the third embodiment.

In FIGS. 1 to 4, reference numeral 1 denotes a PTFE valve main body, which has a main flow passage 9 in a lower portion and a valve chamber 13 communicated with a communication opening 12 vertically provided to the main flow passage 9 in an upper portion. The peripheral portion of the opening of the communication port 12 has a valve seat 1
4 is set. The valve chamber 13 is formed larger than the opening of the communication port 12 and the outer diameter of the valve body 24. Also, the valve body 1
A pair of branch flow paths 1 communicating with the valve chamber 13 on the upper side surface of the
0 and 11 are provided in a direction orthogonal to the main channel 9. The branch flow passages 10 and 11 are formed such that the lowermost position of the inner diameter thereof is substantially flush with the bottom surface of the valve chamber 13. In addition, in the present embodiment, the main flow passage 9 is provided linearly and penetrating the valve body 9, but it may be provided only on one side of the valve body 9. Further, the valve body 9 may be provided in the L-shape.

In this embodiment, the branch channel 1 is provided inside.
A pair of joint portions 28 and 29, in which 0 and 11 are formed, are integrally formed on the upper side surface of the valve body 1 so as to project. To fix the piping tube 34 to the valve body 1, the joint portion 28
The cap nut 32 is attached to the male screw portion 30 provided on the outer periphery of the
This is performed by screwing the female threaded portion 33 of No. 3 and clamping and fixing the end portion of the piping tube 34 fitted to the tip end portion 31 of the joint portion 28. Further, the joint portion formed integrally with the lower side surface of the valve body 1 and having the main flow passage 9 inside is also similarly piped. The structure for piping the multi-way valve is not limited to this embodiment, and any structure that allows piping can be used.

Reference numeral 2 denotes a PP spring receiver having a cylindrical shape with a bottom. A flange 16 is continuously provided on the upper portion, a fitting convex portion 18 is continuously provided on the lower portion, and a through hole 17 is provided at the center of the bottom portion. ing. Further, the lower end surface of the fitting convex portion 18 is provided with an inverted mortar-shaped tapered surface. (See FIG. 3.)

A PTFE diaphragm 7 is integrally provided with a valve body 24, which is pressed against and separated from a valve seat 14 on the central lower surface of the valve chamber 13 of the valve body 1, on the lower surface of the center. Is screwed to the lower part of the stem 3 described later. A cylindrical membrane portion 25 is provided on the outer peripheral edge portion of the diaphragm 7, and a collar portion 26 is provided on the outer periphery of the upper end portion of the cylindrical membrane portion 25.
Is provided. The cylindrical membrane portion 25 is the valve chamber 1 of the valve body 1.
3 and the outer peripheral surface of the fitting convex portion 18 of the spring receiver 2, and the flange portion 26 is fitted and inserted into the step portion 15 provided at the upper portion of the inner peripheral surface of the valve chamber 13. The O-ring 27 is sandwiched between the spring receiver 2 and the
And the outer peripheral surface of the fitting convex portion 18 of the spring receiver 2 are sandwiched and fixed. The shape of this diaphragm 7 is not limited to this embodiment, and may be any shape as long as it has a film portion sandwiched by the valve body 1 and the spring receiver 2, and may be a bellows shape or the like.

Reference numeral 4 denotes a PP bonnet having a substantially cylindrical shape, and a male screw portion 22 is provided on the outer circumference of the upper portion. Further, a cylinder portion 21 into which the stem 3 described later is slidably fitted is provided, and a fitting recess 23 into which the flange portion 16 of the spring receiver 2 is fitted is provided below the cylinder portion 21 to fit the spring receiver 2 in place. It is fixed to the valve body 1 with bolts (not shown) in a sandwiched state.

Reference numeral 3 is a PP stem, and the central upper surface of the diaphragm 7 is screwed to the lower portion in a state of penetrating the through hole 17 of the spring receiver 2. A rod portion 20 is provided at an intermediate portion, and a flange portion 19 which is in sliding contact with a cylinder portion 21 is provided at an upper portion,
The tip end is supported by the bonnet 4 in a non-rotatable state and is fitted into the bonnet 4 in a vertically movable state.

Reference numeral 8 is a spring made of SUS, which is fitted in the rod portion 20 of the stem 3 in a compressed state and is clamped and fixed by the lower end surface of the collar portion 19 of the stem 3 and the bottom surface of the spring receiver 2. . A ring-shaped PP lock nut 6 is screwed to the male screw portion 22 of the bonnet 4. Reference numeral 5 is a cap-shaped PP handle, which is screwed above the lock nut 6 and to the male screw portion 22 of the bonnet 4.

Next, the operation of the multi-way valve of this embodiment will be described.

FIG. 1 shows an open state of the valve. First, at this time, the fluid is flowing through the main flow path 9 and the connection flow path 1
2. It also flows into the branch flow paths 10 and 11 via the valve chamber 13. At this time, as compared with the conventional valve, there is no rising part of the flow path and the flow of the fluid becomes linear, so that the pressure loss is small and excellent flow rate characteristics are obtained. When the handle 5 is rotated in the valve closing direction in this state, the bottom surface of the handle 5 presses the upper end surface of the stem 3, and the spring 8 sandwiched between the lower end surface of the collar portion 16 of the stem 3 and the bottom surface of the spring receiver 2. The stem 3 descends while compressing. At the same time, the valve body 24 screwed to the lower part of the stem 3 descends, and when the handle 5 is further rotated in the valve closing direction, the valve body 24 is finally brought into pressure contact with the valve seat 14 of the valve body 1 and the valve is closed. (Fig. 3
State).

On the other hand, when the handle 5 is rotated in the valve opening direction with the valve closed as shown in FIG. 3, the stem 3 which has been urged upward by the compressed spring 8 is pushed upward, and Along with this, the valve element 24 is separated from the valve seat 14, and the valve is opened (state in FIG. 1). At this time,
The stem 8 is constantly urged upward by the spring 8 sandwiched between the lower end surface of the collar portion 16 of the stem 3 and the bottom surface of the spring receiver 2, so that the tip end surface of the stem 3 comes into pressure contact with the bottom surface of the handle 5. Therefore, the handle 5 is fixed so as not to loosen. Further, when the lock nut 6 is rotated to bring the upper end surface of the lock nut 6 into pressure contact with the lower end surface of the handle 5, the handle 5 is completely fixed and the valve can be completely maintained in the closed state. Therefore, the vibration of the pump and the handle 5
The trouble that the handle 5 is rotated by an accidental contact with the handle does not occur.

When a valve (not shown) for supplying a cleaning liquid, which is attached to one branch flow passage 11 side, is opened when the valve is closed (FIG. 3), the fluid remaining in the valve chamber 13 is removed. It is pushed out by the cleaning liquid and discharged from the other branch flow channel 10 to clean the branch flow channels 10 and 11 and the valve chamber 13. At this time, since the position of the lowermost part of the inner diameter of the branch flow passages 10 and 11 is designed to be substantially flush with the bottom surface of the valve chamber 13, the flow passages are substantially linear and the pressure loss is small and the flow rate characteristic is small. It is excellent and the chemical liquid in the valve chamber 13 can be discharged efficiently. Further, since the valve chamber 13 is compact and the pressure receiving area of the diaphragm 7 is smaller than that of the conventional valve, the diaphragm 7 is unlikely to be pushed upward even if the pressure of the cleaning liquid rises, and the valve body 24 and The valve seat 14 is separated, and the problem that the cleaning liquid leaks to the main flow passage 9 or the chemical liquid of the main flow passage 9 leaks to the branch flow passages 10 and 11 is unlikely to occur. Further, the spring receiver 2 is constantly urged by the compressed spring 8 toward the valve body 1, that is, the collar portion 26 of the diaphragm 7 has the O-ring 2
It is constantly pressed against the stepped portion 15 of the valve body 1 via 7, and as a result, excellent external sealing performance can be obtained.

Next, the setting of the intermediate opening degree of the valve will be described. First, the handle 5 is rotated in the direction in which the valve is closed from the open state of the valve (the state of FIG. 1), and when the desired opening is reached, the rotation of the handle 5 is stopped. After that, the lock nut 6 is rotated until the upper end surface of the lock nut 6 comes into pressure contact with the lower end surface of the handle 5. When the lock nut 6 is pressed against the handle 5, the handle 5 is fixed and the valve is completely maintained in the intermediate opening state (state of FIG. 4).
Therefore, the trouble that the handle 5 is rotated due to vibration of the pump or the like or accidental contact with the handle 5 does not occur, and the desired flow rate can be maintained.

FIG. 5 is a three-dimensional perspective view of the valve body of the second embodiment. The difference from the first embodiment is that the branch flow passage 37 provided on the upper side surface of the valve body 35 and communicating with the valve chamber 38 is in a direction orthogonal to the main flow passage 36 and only on one side of the valve body 1. This is a point provided and a point that a joint portion 39 in which the branch flow passage 37 is formed is formed integrally projecting on the upper side surface of the valve body 35. The other structure and material are the same as in the first embodiment.

FIG. 6 is a perspective view of the valve body of the third embodiment. The difference from the first embodiment is that one of the branch flow passages 42 provided on the upper side surface of the valve body 40 and communicating with the valve chamber 44 is provided in a direction orthogonal to the main flow passage 41, and the other branch flow is provided. A passage 43 is provided in parallel with the main flow passage 41, and joint portions 45 and 46 in which the respective branch flow passages 42 and 43 are formed are formed integrally projecting on the upper side surface of the valve body 40. That is the point. The other structure and material are the same as in the first embodiment.

As a method of providing the branch flow passage, the branch flow passage 42 may be omitted and only the branch flow passage 43 may be provided. Further, the branch flow channel 42 may be provided at a position targeted for the branch flow channel 43. That is, the branch channels 42 and 43 are provided in parallel with the main channel 9.
May be provided.

[0026]

The present invention has the structure as described above, and by using this structure, the following excellent effects can be obtained. (1) When the cleaning liquid is flown into the branch channel when fully closed, the branch channel has a shape with little pressure loss, that is, the position of the lowest part of the inner diameter of the branch channel is substantially flush with the bottom surface of the valve chamber. Therefore, it is possible to efficiently wash and discharge the chemical solution and the like remaining in the valve chamber. Therefore, the flow rate characteristics are excellent, and a chemical liquid containing a slurry can be used. (2) Since the valve chamber is compact and the pressure receiving area of the diaphragm is smaller than before, even if the pressure of the cleaning liquid rises, it is difficult for the diaphragm to be pushed upwards, the valve element separates from the valve seat, and the cleaning liquid mixes into the main flow path. Or the problem that the chemical liquid in the main flow channel mixes into the branch flow channel is unlikely to occur. (3) The spring receiver is constantly urged toward the valve body by the spring, and as a result, excellent external sealing performance can be obtained. (4) Since the handle is always biased upward through the stem, the handle can be prevented from loosening, and by fixing the handle with a lock nut, the desired flow rate can be stably maintained. . (5) PTFE as the material of the valve body and diaphragm,
When a fluororesin such as PFA is used, the chemical resistance becomes high, and the elution of impurities into the fluid is small, so that it can be suitably used for ultrapure water lines and various chemical liquid lines in the semiconductor industry.

[Brief description of drawings]

FIG. 1 is a longitudinal sectional view showing an open state of a multi-way valve according to a first embodiment of the present invention.

FIG. 2 is a perspective view showing a valve body of the multi-way valve of FIG.

FIG. 3 is a vertical cross-sectional view showing a closed state of the multi-way valve of FIG.

FIG. 4 is a vertical cross-sectional view showing a state of an intermediate opening degree of the multi-way valve of FIG.

FIG. 5 is a perspective view of a valve body of the multi-way valve of the second embodiment.

FIG. 6 is a perspective view of a valve body of a multi-way valve according to a third embodiment.

FIG. 7 is a partial cross-sectional view showing a closed state of a conventional four-way valve.

FIG. 8 is an external view showing a chemical solution branch supply line using a conventional four-way valve.

FIG. 9 is an external view showing a chemical solution branch supply line using a conventional two-way valve.

[Explanation of symbols]

1 valve body 2 Spring support 3 stems 4 bonnet 5 handles 6 lock nuts 7 diaphragm 8 springs 9 main flow path 10 branches 11 branch channels 12 communication ports 13 valve chamber 14 seat 15 Step 16 collar part 17 through 18 Fitting convex part 19 Tsubabe 20 Rod part 21 Cylinder part 22 Male thread 23 Fitting recess 24 valve 25 Cylindrical membrane part 26 collar part 27 O-ring 28 Joint part 29 Joint 30 Male thread 31 Tip 32 cap nut 33 Female thread 34 Piping tube 35 valve body 36 Mainstream pipe 37 Branch flow path 38 valve chamber 39 Joint 40 valve body 41 Main flow path 42 branch flow path 43 branches 44 valve chamber 45 Joint part 46 Joint part

Continued front page    F term (reference) 3H052 AA01 BA35 CD01 EA07 EA08                       EA09                 3H067 AA01 AA26 CC02 CC32 CC38                       CC44 CC47 DD03 DD12 DD23                       DD43 EC01 FF07 FF09 FF11                       GG12 GG26 GG28

Claims (3)

[Claims] 1. A main flow path (9) at the bottom and a main flow path (9) at the top.
Is communicated with a valve chamber (13), which is communicated by a communication port (12) provided perpendicularly to the valve chamber, and a peripheral portion of the communication port (12) is a valve seat (14). A valve body (1) having a branch flow channel (10) formed so that the position of the lowest part of the inner diameter thereof is substantially flush with the bottom surface of the valve chamber (13), and a collar part (16) at the upper part are provided. A bottomed cylindrical spring receiver (2) provided with a through hole (17) in the center of the bottom
And a diaphragm (7) in which a valve body (24) pressed against and separated from the valve seat (14) is integrally provided on the central lower surface and sandwiched by the valve body (1) and the spring receiver (2), and A cylinder having a cylinder part (21) through which a stem (3) described later is slidably inserted, and an external thread part (22) provided on the outer periphery of the upper part, for sandwiching a spring receiver (2) with a valve body (1). -Shaped bonnet (4) and a spring support (2) are penetrated, the center upper surface of a diaphragm (7) is connected to the lower part, and a flange part (19) slidably contacting a cylinder part (21) is provided in the upper part, and a tip is provided. A stem (3) supported by the bonnet (4) in a non-rotatable state, a spring (8) clamped by the collar portion (19) of the stem (3) and the spring receiver (2), A lock nut (6) screwed to the male screw part (22) of the bonnet (4), and a lock nut Multiposition valve, characterized in that consists the screwed by a cap-shaped handle (5) on and the external thread portion at the upper (22) 6). 2. A multiway valve according to claim 1, characterized in that the main channel (9) is provided on one side of the valve body (1) or through the valve body (1). 3. A branch channel (10) is provided on one side of the valve body (1),
Alternatively, the multi-way valve according to claim 1 or 2, which is provided so as to penetrate the valve body (1).