JP2003172466A - Manifold valve - Google Patents

Manifold valve

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Publication number
JP2003172466A
JP2003172466A JP2001373128A JP2001373128A JP2003172466A JP 2003172466 A JP2003172466 A JP 2003172466A JP 2001373128 A JP2001373128 A JP 2001373128A JP 2001373128 A JP2001373128 A JP 2001373128A JP 2003172466 A JP2003172466 A JP 2003172466A
Authority
JP
Japan
Prior art keywords
flow path
main
sub
valve chamber
communication port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2001373128A
Other languages
Japanese (ja)
Inventor
Kenji Hamada
Toshihiro Hanada
健志 濱田
敏広 花田
Original Assignee
Asahi Organic Chem Ind Co Ltd
旭有機材工業株式会社
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Asahi Organic Chem Ind Co Ltd, 旭有機材工業株式会社 filed Critical Asahi Organic Chem Ind Co Ltd
Priority to JP2001373128A priority Critical patent/JP2003172466A/en
Priority claimed from US10/497,527 external-priority patent/US20050072481A1/en
Publication of JP2003172466A publication Critical patent/JP2003172466A/en
Application status is Pending legal-status Critical

Links

Abstract

(57) [Problem] To provide a manifold valve which is compact and has an excellent cleaning effect. SOLUTION: The manifold valve of the present invention comprises a main body 1 and driving portions 2, 3, 4, and 5, and the main body 1 is composed of a main flow passage side valve chamber 17 and a sub flow passage side valve room 19 which are connected by a connection flow passage 11. The main flow path 6 communicating with the main flow path communication port 13 of the valve chamber 17, the branch flow path 9 communicating with the valve chamber 17, the sub flow path 7 communicating with the sub flow path communication port 15 of the valve chamber 19, and the main flow path 6. The main flow path side communication port 14 that communicates, the main flow path side valve chamber 18 corresponding to the communication port 14, the branch flow path 10, the connection flow path 12, the sub flow path side valve chamber 20, and the sub flow path It has a roadside communication port 16 and a sub flow path 8. Drive unit 2,
Reference numerals 3, 4, and 5 denote valve bodies 46, 48, 47, and 49 for opening and closing the main flow path side communication ports 13, 14 and the sub flow path side communication ports 15, 16, respectively.
have.

Description

Description: BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a manifold valve having a main flow path, a sub flow path, and a branch flow path, and more particularly to a compact and excellent cleaning effect. It relates to a manifold valve. 2. Description of the Related Art Conventionally, in a semiconductor industry, a slurry line or various chemical liquid lines are used to supply a fluid by branching from a main flow path to prevent problems such as agglomeration and sticking of a slurry and precipitation of crystals. In some cases, a line for cleaning the branch line is provided. As a general method, there is a method of combining a three-way valve, a two-way valve, and cheese as shown in FIG. [0003] However, in the conventional method, the two-way valve 9 shown in FIG.
There is a problem that the slurry stays in the channels up to 6,97 and a problem that the channels from the three-way valves 94,95 to the cheeses 98,99 are not sufficiently washed. The present invention has been made in view of the above-mentioned problems of the prior art, and has as its object to provide a manifold valve which is compact and has excellent cleaning effects. The structure of the present invention for achieving the above object will be described with reference to FIGS. 1 to 5 showing an embodiment of the present invention. A main flow path 6 having a main flow path side valve chamber 17 and a sub flow path side valve chamber 19 communicated with the main flow path and a main flow path side communication port 13 provided at the bottom center of the main flow path side valve chamber 17; Room 17
And a sub flow path 7 connected to a sub flow path side communication port 15 provided at the bottom center of the sub flow path side valve chamber 19, and at least one main flow path 6 is provided in the main flow path 6. The main flow path side communication port 14 is provided, and the main flow path side communication port 1 is provided.
4, a main flow path side valve chamber 18, a branch flow path 10, a connection flow path 12, a sub flow path side valve chamber 20, a sub flow path side communication port 16, and a sub flow path 8 and the plurality of main flow path side communication ports 1
A drive unit 2 having valve bodies 46, 48 and 47, 49 for opening and closing the sub flow path side communication ports 15, 16 respectively;
The first feature is to have 3, 4, and 5. In the above-mentioned manifold valve,
The second feature is that the main flow path 6 is provided on one side of the main body 1 or through the main body 1. In the above-mentioned manifold valve,
A third feature is that the sub flow paths 7, 8 are provided in a direction perpendicular to the axis of the main flow path 6, and the plurality of sub flow paths 7, 8 are respectively provided in a parallel direction. In the above-mentioned manifold valve,
The connection channels 11 and 12 and the bottoms of the branch channels 9 and 10 are provided so as to be substantially flush with the bottoms of the main channel side valve chambers 17 and 18 and the sub channel side valve chambers 19 and 20. Is the fourth feature. Embodiments of the present invention will be described below with reference to the drawings, but it goes without saying that the present invention is not limited to these embodiments. FIG. 1 is an AA sectional view showing a first embodiment in which four driving parts are fixed to the main body of FIG.
It is a longitudinal cross-sectional view showing a state in which a main flow path side communication port 13 is open and a sub flow path side communication port 15 is closed. FIG. 2 is a cross-sectional view taken along line BB when four driving units are fixed to the main body of FIG. 5, and is a longitudinal cross-sectional view showing a state in which both main flow path side communication ports 13 and 14 are open. FIG. 3 is a cross-sectional view taken along the line CC when four driving units are fixed to the main body in FIG. 5, and a vertical cross-sectional view showing a state in which the main flow path side communication port 14 is open and the sub flow path side communication port 16 is closed. It is.
FIG. 4 is a longitudinal sectional view of the driving unit 2. FIG. 5 is a plan view of the main body of the manifold valve of the present invention. FIG. 6 is a three-dimensional perspective view of the main body of FIG. FIG. 7 is a plan view of a main body of the manifold valve according to the second embodiment of the present invention. FIG. 8 is a plan view of the main body of the third embodiment of the manifold valve of the present invention. In FIG. 1, reference numeral 1 denotes a main body, and a cylindrical main flow path side valve chamber 17 and a sub flow path side valve chamber 19 which are communicated with each other by a connection flow path 11 are provided at an upper portion of the main body 1. Reference numeral 6 denotes a main flow path, which communicates with a main flow path side communication port 13 provided at the center of the bottom of the main flow path side valve chamber 17, and is provided through the main body 1 as shown in FIGS. I have. Reference numeral 7 denotes a sub-flow path, which communicates at right angles to a sub-flow path side communication port 15 provided at the center of the bottom of the sub-flow path side valve chamber 19. Reference numeral 9 denotes a branch passage communicating with the main passage side valve chamber 17, and is located on the opposite side of the main body 1 from the sub passage 7. The connection flow path 11 is provided such that the bottom thereof is substantially flush with the bottoms of the main flow path side valve chamber 17 and the sub flow path side valve chamber 19, and the bottom of the branch flow path 9 is also provided in the main flow path side valve chamber. 17 is provided so as to be substantially flush with the bottom.
Therefore, the structure is such that no fluid stagnation portion occurs in the main passage side valve chamber 17 and the sub passage side valve chamber 19. As can be seen from FIGS. 1 to 5, the main flow path 6 is provided in a direction orthogonal to the sub flow path 7, the branch flow path 9, and the connection flow path 11. That is, the sub flow path 7, the branch flow path 9, and the connection flow path 11 are provided in parallel and in the same direction. Also, the edges or peripheral edges of the respective openings of the main flow path side communication port 13 and the sub flow path side communication port 15 are valve seats 21 and 22 to which the valve bodies 46 and 47 of the driving units 2 and 3 are pressed and separated. ing. The diameter of the main flow path side valve chamber 17 is the main flow path side communication port 1
3 and the diameter of the valve element 46 are larger than the diameter of the sub-flow path side valve chamber 19.
Is larger than the diameter. The main flow path 6 is further provided with a main flow path side communication port 14 separately from the main flow path side communication port 13 (see FIG. 2), and a main flow path side valve chamber 18 having the same relationship as the main flow path side communication port 14 and a branch flow path. 10, a connection flow path 12, a sub flow path side valve chamber 20, a sub flow path side communication port 16, and a sub flow path 8 are provided integrally. That is, in the present embodiment, the main body 1 is provided with four valve chambers (see FIGS. 5 and 6). In the present embodiment, the main flow path 6 is provided with two main flow path side communication ports 13 and 14, but the main flow path 6 is provided with three or more main flow path side communication ports according to the purpose, and the same as described above. The valve chamber may be increased by using a structure, and is not particularly limited. Further, in the drawings in the description of the present embodiment, the sub flow path with respect to the diameter of the main flow path,
Although the diameter of the branch channel and the connection channel are the same,
It goes without saying that the size of the caliber can be changed according to the purpose. In this embodiment, joint portions 25 and 26 are formed integrally on the side surface of the main body 1 so as to protrude therefrom.
Are formed to extend inside thereof. The sub flow paths 7 and 8 and the branch flow paths 9 and 10 are formed in the same state (see FIG. 5). In order to connect the pipe tube 37 to the joint 25, first, the pipe tube 37 is fitted to the distal end 44 of the joint 25, and the female thread 45 of the cap nut 31 is fitted to the male thread 43 provided on the outer periphery of the joint 25.
Is screwed on to fix the end of the piping tube 37 (see FIG. 2). Other joints 26 to 3
For 0, the piping tubes 38 to 42 are connected in the same manner. The connection structure between the main body 1 and the piping tubes 37 to 42 is not limited to this embodiment, and another general connection structure may be adopted. The driving units 2 to 5 are fixed to the upper part of the main body 1 by bolts and nuts (not shown). Since the respective structures are the same, a description will be given using the driving unit 2 as a representative (FIG.
reference). In FIG. 4, reference numeral 50 denotes a cylinder main body, which has a cylindrical cylinder portion 54 inside and a columnar projection 55 on the lower surface.
Is provided to penetrate through. An O-ring 69 is fitted into the inner peripheral surface of the through hole 56. Further, a pair of working fluid supply ports 6 communicated above and below the cylinder portion 54 are provided on the side surface of the cylinder body 50.
4, 65 are provided. Reference numeral 51 denotes a cylinder lid having a columnar projection 57 on the bottom surface of which an O-ring 67 is inserted. The columnar projection 57 is fitted on the upper portion of the cylinder portion 54 via the O-ring 67. It is joined to the cylinder body 50 by being inserted. In this embodiment, the main body 1, the cylinder main body 50, and the cylinder lid 51 are integrally fixed with through bolts and nuts (not shown). An O-ring 68 is fitted on the outer peripheral surface of the piston 52. The piston 52 is slidably inserted into the cylinder portion 54 of the cylinder body 50 via the O-ring 68 so as to be slidable up and down. At the center of the lower end surface, a rod portion 58 is integrally provided so as to slidably penetrate through the through hole 56 of the cylinder body 50, and the valve body 46 of the diaphragm 53 is joined to the tip of the rod portion 58. Connecting portion 59 is provided. Further, the upper surface of the piston 52 and the cylinder 54
The upper gap 6 is defined by the inner peripheral surface of
2, a lower space 63 is formed by the lower surface of the piston 52, the outer peripheral surface of the rod portion 58, and the inner peripheral surface and the bottom surface of the cylinder portion 54. The diaphragm 53 has a valve seat 21 provided on the main body 1 on the lower surface at the center, that is, the communication port 1 on the main flow path side.
A valve body 46 that is pressed and separated from the edge of the opening 3 is integrally provided, and this valve body 46 is screwed to the distal end of the rod portion 58 of the piston 52. A cylindrical membrane portion 60 is provided on the outer peripheral edge of the diaphragm 53,
Further, an annular protrusion 61 is provided on the outer periphery of the upper end of the cylindrical film part 60. The cylindrical membrane portion 60 is sandwiched between the inner peripheral surface of the main flow path side valve chamber 17 of the main body 1 and the outer peripheral surface of the projection 55 of the cylinder main body 50.
Stepped portion 66 provided on the upper part of the inner peripheral surface of main passage side valve chamber 17
The O-ring 70 is sandwiched between the cylinder body 50 and the O-ring 70. The O-ring 70 is sandwiched and fixed between the inner peripheral surface of the main passage side valve chamber 17 of the main body 1 and the outer peripheral surface of the projection 55 of the cylinder main body.
The shape of the diaphragm 53 is not limited to this embodiment, and may be any shape having a membrane portion sandwiched between the main body 1 and the cylinder main body 50, and may be a bellows type or the like. As for the structure of the drive section, a structure having a spring or the like inside or a manual type can be used as long as it has a valve body for opening and closing each of the main flow path side communication port and the sub flow path side communication port. It may have a structure, and is not particularly limited to this embodiment. In addition, the drive units having these valve elements are preferably provided separately on the main flow path side and the sub flow path side, but both may be provided integrally, and the way of providing them is not particularly limited. . In the present invention, the members such as the main body have excellent chemical resistance and little elution of impurities. Therefore, polytetrafluoroethylene (hereinafter referred to as PTFE) or tetrafluoroethylene-perfluoroalkylvinyl ether copolymer (hereinafter referred to as PTFE) is used. Fluororesins such as PFA) are preferably used, but other plastics such as polyvinyl chloride and polypropylene or metals may be used and are not particularly limited. The material of the diaphragm is PTF
Fluororesins such as E and PFA are preferably used, but may be rubber or metal and are not particularly limited. Next, the operation of the manifold valve of the present invention will be described. FIGS. 1 and 2 show a state in which the main channel side communication port 13 is open and the sub channel side communication port 15 is closed. In this state, the fluid in the main flow path 6 is supplied to the sub flow path side valve chamber 19, the connection flow path 11,
It flows to the main channel side valve chamber 17 and the branch channel 9. In this state, when a working fluid, for example, compressed air, is externally injected into the upper space 62 from the working fluid supply port 64 of the drive unit 2 shown in FIG.
Since the valve body 2 is pushed down, the valve body 46 joined to the lower end of the rod portion 58 is pressed against the valve seat 21, and the main flow path side communication port 13 is closed. On the other hand, when the working fluid is injected into the lower space 63 from the working fluid supply port 65 of the drive unit 3,
Since the piston 52 is pushed up by the pressure of the working fluid, the valve body 47 joined to the lower end of the rod portion 58 is separated from the valve seat 22, and the sub-flow path side communication port 15 is opened,
The fluid in the sub flow path 7 is supplied to the sub flow path side valve chamber 19,
It flows to the main channel side valve chamber 17 and the branch channel 9. (The working fluid supply port, the lower gap, the piston, and the rod portion of the drive unit 3 are common to the drive unit 2 and thus the numbers in the drive unit 2 are used.) Also, the main channel side communication port 14 and the sub channel side shown in FIG. The opening / closing operation of the communication port 16 is similarly performed. For example, the valve of the present embodiment is used in a line that supplies slurry from the main flow path 6 side and supplies cleaning liquid from the sub flow paths 7 and 8 and discharges the same through the branch flow paths 9 and 10. In the case shown in FIGS. 1, 2 and 3, the main flow path 6
Is passed through the main flow path side valve chambers 17 and 18 and is discharged from the branch flow paths 9 and 10, but the connection flow paths 11 and 1
2, and the slurry is retained in the sub-flow passage side valve chambers 19 and 20. However, in this state, the main channel side communication ports 13, 14
Is closed and the sub-flow path side communication ports 15 and 16 are opened, and when the cleaning liquid flows from the sub-flow paths 7 and 8, the retained slurry is discharged from the branch flow paths 9 and 10 and the inside of the valve is cleaned. In the present embodiment, the bottom surfaces of the branch flow paths 9 and 10, the main flow path side valve chambers 17 and 18, the connection flow paths 11 and 12, and the sub flow path side valve chambers 19 and 20 are designed to be substantially flush as described above. Therefore, the volume of the stagnation portion is as small as possible, and since each flow path is formed in a straight line, the pressure loss is small, and an excellent cleaning effect can be obtained. FIG. 7 is a plan view of only a main body 71 showing a second embodiment of the present invention. The difference from the first embodiment is that the sub flow paths 73 and 74 at both ends of the main body are provided in parallel with the main flow path 72 and on the same side surface of the main body 71. The operation is the same as that of the first embodiment, except that the flow direction of the fluid flowing through the sub-flow paths 73 and 74 is changed at right angles to the connection flow paths 77 and 78, and therefore, the description is omitted. FIG. 8 is a plan view of only a main body 79 showing a third embodiment of the present invention. The difference from the first embodiment is that the main channel 80 is provided on only one side of the main body 79. The operation is the same as that of the first embodiment, and the description is omitted. FIG. 9 shows a typical fluid obtained by combining the opening and closing of each communication port when a chemical solution is supplied to the main flow path and a cleaning liquid is supplied to the sub flow path when the first embodiment of the present invention is used. It shows the flow of the process. In the present embodiment, since the driving units 2 to 5 can be operated independently of each other, it is clear that various usages are possible by a combination of opening and closing, and this is a very effective valve. FIG. 10 shows an external view of a chemical branch supply line when the first embodiment of the present invention is used in the above-mentioned conventional technology. As can be seen from the figure, as compared with the conventional line shown in FIG. 11, the number of valves and cheeses can be reduced, that is, one embodiment can cope with this. Therefore, the piping line can be simplified, the piping space can be reduced, and the construction can be easily performed. The present invention has a structure as described above, and the use of this structure provides the following excellent effects. (1) When a cleaning liquid or the like flows from the sub flow path in a state where the valve on the main flow path side is closed and the valve on the sub flow path side is open, the sub flow path side valve chamber, the connection flow path, and the main flow path side valve chamber are branched. When the flow path is formed in a substantially linear shape and the bottoms thereof are substantially flush, the chemical solution remaining in the valve chamber can be efficiently washed and discharged,
As a result, the cleaning time of the flow path in the valve can be significantly reduced. (2) When the main flow path is provided through the main body, and even when the main flow path side communication port and the sub flow path side communication port are closed, the fluid can be flowed or circulated respectively, and the slurry can be used. It can also be used for highly sedimentable fluids. (3) Since the structure of the valve is compact, the number of valves and cheeses can be reduced in the piping line as compared with the conventional one, so that the piping line can be simplified, the piping space can be reduced, and Construction is also easy. (4) PTFE, P as the material of the main body and the diaphragm
Use of fluororesin such as FA increases chemical resistance,
Further, since elution of impurities into the fluid is small, it can be suitably used for ultrapure water lines and various chemical liquid lines in the semiconductor industry.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is an AA longitudinal sectional view in a case where four driving units are fixed to a main body in FIG. 5 according to an embodiment of the present invention. FIG. 2 is a BB vertical cross-sectional view when four driving units are fixed to the main body of FIG. 5; FIG. 3 is a vertical sectional view taken along the line CC when four driving units are fixed to the main body of FIG. 5; FIG. 4 is a longitudinal sectional view of the driving unit 2. FIG. 5 is a plan view of only the main body showing the first embodiment of the present invention. FIG. 6 is a perspective view of the main body in FIG. FIG. 7 is a plan view of only a main body showing a second embodiment of the present invention. FIG. 8 is a plan view of only a main body showing a third embodiment of the present invention. FIG. 9 is an external view showing a flow of a fluid by a combination of opening and closing of each communication port using the first embodiment of the present invention. FIG. 10 is an external view showing a chemical liquid branch supply line when the first embodiment of the present invention is used. FIG. 11 is an external view showing a chemical branch supply line using a three-way valve, a two-way valve, and cheese. DESCRIPTION OF SYMBOLS 1... Main body 2. Drive section 3. Drive section 4. Drive section 5. Drive section 6. Main flow path 7. Connecting flow path 12 ... Connecting flow path 13 ... Main flow path side communication port 14 ... Main flow path side communication port 15 ... Sub flow path side communication port 16 ... Sub flow path side communication port 17 ... Main flow path side valve chamber 18 ... Main flow path side valve chamber 19 ... Sub flow Roadside valve chamber 20 ... Sub flow path side valve chamber 21 ... Valve seat 22 ... Valve seat 23 ... Valve seat 24 ... Valve seat 46 ... Valve element 47 ... Valve element 48 ... Valve element 49 ... Valve element

Continuation of front page    F-term (reference) 3H051 AA01 AA08 BB02 BB10 CC03                       CC14 FF13                 3H067 AA01 AA32 AA38 BB08 BB14                       CC02 CC32 CC36 CC38 DD02                       DD12 DD33 EA24 EA32 EA38                       EB24 EC13 FF11 GG19 GG28

Claims (1)

  1. Claims: 1. A main channel side valve chamber and a sub channel side valve chamber which are communicated with each other by a connecting channel, and which communicates with a main channel side communication port provided at the bottom center of the main channel side valve chamber. A main flow path, a branch flow path communicating with the main flow path side valve chamber, and a sub flow path communicating with a sub flow path side communication port provided at the bottom center of the sub flow path side valve chamber. At least one main passage side communication port is provided in the passage, the main flow passage side valve chamber corresponding to the main flow passage side communication port, the branch flow passage, the connection flow passage, and the sub flow passage having the same relation as the valve chamber and the above. A main body in which a roadside valve chamber, a sub-flow path side communication port, and a sub-flow path are integrally provided, and a driving unit having a valve body that opens and closes each of the plurality of main flow path-side communication ports and the sub-flow path side communication port. A manifold valve, comprising: 2. The manifold valve according to claim 1, wherein the main flow path is provided on one side of the main body or through the main body. 3. The method according to claim 1, wherein the sub flow path is provided in a direction perpendicular to the axis of the main flow path, and the plurality of sub flow paths are respectively provided in a parallel direction. The described manifold valve. 4. The connection flow path and the branch flow path are provided such that bottoms thereof are substantially flush with respective bottoms of the main flow path side valve chamber and the sub flow path side valve chamber. To 3
    The manifold valve according to any one of the above.
JP2001373128A 2001-12-06 2001-12-06 Manifold valve Pending JP2003172466A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2001373128A JP2003172466A (en) 2001-12-06 2001-12-06 Manifold valve

Applications Claiming Priority (6)

Application Number Priority Date Filing Date Title
JP2001373128A JP2003172466A (en) 2001-12-06 2001-12-06 Manifold valve
US10/497,527 US20050072481A1 (en) 2001-12-06 2002-12-05 Manifold valve
PCT/JP2002/012765 WO2003048617A1 (en) 2001-12-06 2002-12-05 Manifold valve
CN 02824276 CN100351565C (en) 2001-12-06 2002-12-05 Manifold valve
KR10-2004-7008036A KR20040071690A (en) 2001-12-06 2002-12-05 Manifold value
TW91135482A TW200300830A (en) 2001-12-06 2002-12-06 Manifold valve

Publications (1)

Publication Number Publication Date
JP2003172466A true JP2003172466A (en) 2003-06-20

Family

ID=19181898

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2001373128A Pending JP2003172466A (en) 2001-12-06 2001-12-06 Manifold valve

Country Status (1)

Country Link
JP (1) JP2003172466A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004036099A1 (en) * 2002-10-21 2004-04-29 Ckd Corporation Integrated gas valve
JP2011208666A (en) * 2010-03-29 2011-10-20 Ckd Corp Valve unit for vacuum double pipe, and connected structure of the valve unit and the vacuum double pipe

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2004036099A1 (en) * 2002-10-21 2004-04-29 Ckd Corporation Integrated gas valve
JP2011208666A (en) * 2010-03-29 2011-10-20 Ckd Corp Valve unit for vacuum double pipe, and connected structure of the valve unit and the vacuum double pipe

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