JP2011205418A - Vibrating reed and vibration device - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a vibrating reed and a vibration device, which can efficiently make a vibration arm perform flexion vibration in an in-plane direction, while attaining miniaturization and suppressing the vibration of unnecessary vibration mode.SOLUTION: A vibrating reed 2 has a base 27 and two vibration arms 28, 29 extended in a Y axis direction from the base 27 and provided along an X axis direction perpendicular to the Y axis for flexion vibration in the X axis direction, each vibration arm 28, 29 is equipped with a pair of mutually facing main planes with a Z axis direction intersecting perpendicularly respectively to the Y axis and the X axis as a normal line, and a pair of mutually facing side planes with the X axis direction as the normal line, in each main plane, grooves 282, 283 extended in the Y axis direction are formed, in each side plane, projections 284, 285 extended in the Y axis direction are formed.

Description

  The present invention relates to a vibrating piece and a vibrating device.

As a vibrating device such as a crystal oscillator, a vibrating device including a tuning fork type vibrating piece including a plurality of vibrating arms is known (for example, see Patent Document 1).
For example, the resonator element described in Patent Document 1 has a base portion and two vibrating arms extending from the base portion so as to be parallel to each other, and these are made of a piezoelectric material. Then, by applying an electric field to each vibrating arm, the two vibrating arms are flexibly vibrated in the direction in which they are arranged (in-plane direction).

Further, in the resonator element described in Patent Document 1, the cross section of the vibrating arm is H-shaped for the purpose of efficiently applying an electric field for exciting flexural vibration (in-plane vibration) as described above to the vibrating arm. I am doing.
However, in the resonator element described in Patent Document 1, since the cross section of the vibrating arm is merely H-shaped, the vibrating arm is more easily twisted than when the cross section of the vibrating arm is rectangular. As a result, there has been a problem that vibration in an unnecessary vibration mode is increased.

In particular, when the width on the base end portion side of the vibrating arm is made narrower than the width of the distal end portion, the vibrating arm becomes more easily twisted, and this problem becomes remarkable.
If the width on the base side of the vibrating arm is simply increased, the torsional rigidity of the vibrating arm is increased, but the rigidity in the in-plane direction of the vibrating arm is extremely increased. For this reason, the length of the vibrating arm having a simple H-shaped cross section as described above cannot be shortened, and the size of the vibrating piece cannot be sufficiently reduced.

JP 2005-5896 A

  An object of the present invention is to provide a vibrating piece and a vibrating device that can be flexibly vibrated in an in-plane direction while reducing the size and suppressing vibrations in unnecessary vibration modes. .

SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.
[Application Example 1]
The resonator element according to the invention includes a base,
A plurality of vibrating arms extending in the first direction from the base and arranged in a second direction orthogonal to the first direction, and bending and vibrating in the second direction;
Each of the vibrating arms is a surface having a normal direction in a third direction orthogonal to both the first direction and the second direction, and a pair of main surfaces facing each other, and the second direction A plane whose direction is normal, and a pair of side surfaces facing each other,
A groove extending in the first direction is formed on each main surface,
Each of the side surfaces is formed with a ridge extending in the first direction.

According to the present invention as described above, since the grooves extending in the first direction are provided on the main surfaces of the vibrating arm, the electric field in the second direction can be efficiently applied to the vibrating arm. .
In addition, since the protrusions extending in the first direction are provided on the side surfaces of the vibrating arm, the torsional rigidity can be increased while suppressing the bending rigidity of the vibrating arm in the second direction. Therefore, when the vibrating arm is bent and vibrated in the second direction, unnecessary vibration in the vibration mode can be suppressed. Further, since the bending rigidity of the vibrating arm in the second direction can be suppressed, the length of the vibrating arm can be prevented, and as a result, the size of the vibrating piece can be reduced.
For these reasons, the resonator element of the present invention can be reduced in size and can bend and vibrate efficiently in the in-plane direction while suppressing unnecessary vibration mode vibration.

[Application Example 2]
In the resonator element according to the aspect of the invention, it is preferable that a distal end portion of the vibrating arm is provided with a mass portion having a larger cross-sectional area than a proximal end portion of the vibrating arm.
Thereby, the mass of the front-end | tip part of a vibrating arm can be enlarged. Therefore, the vibration arm can be shortened, and as a result, the vibration piece can be reduced in size.

[Application Example 3]
In the resonator element according to the aspect of the invention, it is preferable that a width of the mass portion in the second direction is equal to a width of the base end portion of the vibrating arm in the second direction.
Thereby, it can prevent that a mass part protrudes from the both ends of the width direction of a vibrating arm. Therefore, the mass that contributes to the torsional moment of the vibrating arm can be reduced, and unnecessary vibrations in the vibration mode can be suppressed. Further, when the width of the mass part in the second direction is equal to the width of the base end of the vibrating arm in the second direction, the width of the mass part in the second direction is equal to the width of the base end of the vibrating arm. Compared to the case where the width is smaller than the width in the direction 2, the mass of the tip portion (mass portion) of the vibrating arm can be easily increased.

[Application Example 4]
In the resonator element according to the aspect of the invention, it is preferable that a width of the mass portion in the second direction is narrower than a width of the base end portion of the vibrating arm in the second direction.
Thereby, it can prevent that a mass part protrudes from the both ends of the width direction of a vibrating arm. Therefore, compared to the case where the width of the mass portion in the second direction is equal to the width of the base end portion of the vibrating arm in the second direction, the mass contributing to the torsional moment of the vibrating arm is reduced, and an unnecessary vibration mode is obtained. Can be suppressed. Further, since the width of the base end portion of the vibrating arm in the second direction is wider than the width of the mass portion in the second direction, the torsional rigidity of the vibrating arm can be increased.

[Application Example 5]
In the resonator element according to the aspect of the invention, it is preferable that the mass portion is not formed with the groove.
Thereby, the mass of a mass part can be enlarged, aiming at size reduction of a mass part.
[Application Example 6]
In the resonator element according to the aspect of the invention, it is preferable that a distal end portion of each protrusion is connected to a proximal end portion of the mass portion.
Thereby, each ridge can prevent or suppress the twist of a mass part.

[Application Example 7]
In the resonator element according to the aspect of the invention, it is preferable that each of the ridges is provided over the entire region of the vibrating arm other than the mass portion in the first direction.
Thereby, torsional rigidity can be enhanced over substantially the entire region in the longitudinal direction of the vibrating arm.
[Application Example 8]
In the resonator element according to the aspect of the invention, when W1 is the width of the mass portion in the second direction and W2 is the width of the base end portion of the vibrating arm in the second direction, W2 / W1 is 1 It is preferable that it is -1.2.
Thereby, it is possible to increase the mass of the mass portion while suppressing the vibration in the unnecessary vibration mode of the vibrating arm.

[Application Example 9]
In the resonator element according to the aspect of the invention, it is preferable that each of the ridges is provided at a central portion of the vibrating arm in the third direction.
As a result, the torsional rigidity can be increased while suppressing the bending rigidity of the vibrating arm in the second direction.

[Application Example 10]
In the resonator element according to the aspect of the invention, it is preferable that the width of each ridge is larger than the height of each ridge.
Thereby, the bending rigidity in the 2nd direction of a vibrating arm can be suppressed effectively.
[Application Example 11]
In the resonator element according to the aspect of the invention, it is preferable that the height of each ridge is larger than the width of each ridge.
Thereby, the torsional rigidity of the vibrating arm can be effectively increased.
[Application Example 12]
The vibrating device of the present invention includes the vibrating piece of the present invention,
And a package for housing the resonator element.
Thereby, the vibration device which is small and excellent in reliability can be provided.

It is sectional drawing which shows the vibration device which concerns on 1st Embodiment of this invention. It is a top view which shows the vibration device shown in FIG. It is the sectional view on the AA line in FIG. FIG. 3 is a partial perspective view showing a vibrating arm provided in the vibrating piece shown in FIG. 2. It is a figure for demonstrating the manufacturing method of the vibration piece shown in FIG. It is a figure for demonstrating the manufacturing method of the vibration piece shown in FIG. It is a figure for demonstrating the manufacturing method of the vibration piece shown in FIG. It is sectional drawing of the vibration piece with which the vibration device which concerns on 2nd Embodiment of this invention was equipped. It is sectional drawing of the vibration piece with which the vibration device which concerns on 3rd Embodiment of this invention was equipped. It is sectional drawing of the vibration piece with which the vibration device which concerns on 4th Embodiment of this invention was equipped. It is sectional drawing of the vibration piece with which the vibration device which concerns on 5th Embodiment of this invention was equipped.

Hereinafter, a resonator element and a vibration device of the present invention will be described in detail based on embodiments shown in the accompanying drawings.
<First Embodiment>
1 is a cross-sectional view showing the vibration device according to the first embodiment of the present invention, FIG. 2 is a top view showing the vibration device shown in FIG. 1, and FIG. 3 is a cross-sectional view taken along line AA in FIG. 4 is a partial perspective view showing a vibrating arm provided in the vibrating piece shown in FIG. 2, and FIGS. 5 to 7 are views for explaining a method of manufacturing the vibrating piece shown in FIG.

1 to 4, for convenience of explanation, an X axis, a Y axis, and a Z axis are illustrated as three axes orthogonal to each other. In the following, the direction parallel to the X axis (second direction) is the “X axis direction”, the direction parallel to the Y axis (first direction) is the Y axis direction, and the direction parallel to the Z axis (third Is referred to as the Z-axis direction. In the following description, for convenience of explanation, the upper side in FIG. 1 is referred to as “upper”, the lower side as “lower”, the right side as “right”, and the left side as “left”. In FIGS. 1, 2, and 4, the excitation electrode group is not shown. 5 to 7, only a portion corresponding to one of the two vibrating arms in the cross section corresponding to the cross section taken along the line AA in FIG. 2 is illustrated and corresponds to the other vibrating arm. The illustration of the part is omitted.
A vibrating device 1 illustrated in FIG. 1 includes a vibrating piece 2 and a package 3 that houses the vibrating piece 2.

Hereinafter, each part which comprises the vibration device 1 is demonstrated in detail sequentially.
(Vibration piece)
First, the resonator element 2 will be described.
The vibrating piece 2 is a tuning fork type vibrating piece as shown in FIG. The vibration piece 2 includes a vibration substrate 21 and connection electrodes 41 and 42 provided on the vibration substrate 21. In addition, as illustrated in FIG. 3, the resonator element 2 includes excitation electrode groups 22 and 23 provided on a vibration substrate 21.

As shown in FIG. 2, the vibration substrate 21 includes a base portion 27, two (one pair) vibration arms 28 and 29, and a pair of arm portions 25.
The vibration substrate (piezoelectric substrate) 21 is made of a piezoelectric material.
Examples of the piezoelectric material include crystal, lithium tantalate, lithium niobate, lithium borate, and barium titanate. In particular, the piezoelectric material constituting the vibration substrate 21 is preferably quartz. When the vibration substrate 21 is made of quartz, the vibration characteristics of the vibration substrate 21 can be made excellent. Further, the vibration substrate 21 can be formed with high dimensional accuracy by etching.
In such a vibration substrate 21, the base 27 has a plate shape whose thickness direction is the Z-axis direction.

The base portion 27 is connected to two vibrating arms 28 and 29 and two arm portions 24 and 25.
The two vibrating arms 28 and 29 are provided to extend from the base 27 so as to be parallel to each other. More specifically, the two vibrating arms 28 and 29 respectively extend from the base portion 27 in the Y axis direction and are arranged side by side in the X axis direction.
Each of the vibrating arms 28 and 29 has a longitudinal shape, and an end portion (base end portion) on the base portion 27 side is a fixed end, and an end portion (tip end portion) opposite to the base portion 27 is a free end.

The vibrating arms 28 and 29 are formed to have the same width. Thereby, when the vibrating arms 28 and 29 are vibrated in opposite directions (in opposite phases), vibration leakage can be reduced.
A mass portion 281 having a larger cross-sectional area than the proximal end portion of the vibrating arm 28 is provided at the distal end portion of the vibrating arm 28. Similarly, a mass portion 291 having a larger cross-sectional area than the proximal end portion of the vibrating arm 29 is provided at the distal end portion of the vibrating arm 29. Thereby, the mass of the front-end | tip part of the vibrating arms 28 and 29 can be enlarged, respectively. Therefore, the vibrating arms 28 and 29 can be shortened, and as a result, the vibrating piece 2 can be reduced in size.

Further, as shown in FIG. 3, a groove 282 extending in the Y-axis direction is formed on the upper surface (main surface) of the vibrating arm 28, and the lower surface (main surface) of the vibrating arm 28 is formed in the Y-axis direction. An extending groove 283 is formed. Here, the upper surface and the lower surface of the resonating arm 28 are surfaces having the Z-axis direction as a normal line and are opposed to each other.
As described above, since the grooves 282 and 283 extending in the Y-axis direction are provided on the respective main surfaces of the vibrating arm 28, an electric field in the X-axis direction is efficiently applied to the vibrating arm 28 using the excitation electrode group 22 described later. Can be applied.

In particular, a protrusion 284 extending in the Y-axis direction is formed on one side surface (left side surface in FIG. 3) of the vibrating arm 28, and the other side surface (right side surface in FIG. 3). ) Is formed with ridges 285 extending in the Y-axis direction. Here, the pair of side surfaces of the resonating arm 28 is a surface having the X-axis direction as a normal line and faces each other.
As described above, since the protrusions 284 and 285 extending in the Y-axis direction are provided on the respective side surfaces of the vibrating arm 28, the central axis of the vibrating arm 28 is suppressed while suppressing the bending rigidity of the vibrating arm 28 in the X-axis direction. The surrounding torsional rigidity (hereinafter simply referred to as “torsional rigidity”) can be increased. For this reason, when the vibrating arm 28 is bent and vibrated in the X-axis direction, unnecessary vibration in the vibration mode can be suppressed. In addition, since the bending rigidity of the vibrating arm 28 in the X-axis direction can be suppressed, the vibrating arm 28 can be prevented from being elongated, and as a result, the vibrating piece 2 can be reduced in size.

Similarly, a groove 292 extending in the Y-axis direction is formed on the upper surface (main surface) of the vibrating arm 29, and a groove 293 extending in the Y-axis direction is formed on the lower surface (main surface) of the vibrating arm 29. Is formed. Here, the upper surface and the lower surface of the resonating arm 29 are surfaces having a normal line in the Z-axis direction and are opposed to each other.
As described above, since the grooves 292 and 293 extending in the Y-axis direction are provided on the respective principal surfaces of the vibrating arm 29, an electric field in the X-axis direction is efficiently applied to the vibrating arm 29 using the excitation electrode group 23 described later. Can be applied.

In particular, a protrusion 294 extending in the Y-axis direction is formed on one side surface (left side surface in FIG. 3) of the vibrating arm 29, and the other side surface (right side surface in FIG. 3). ) Is formed with ridges 295 extending in the Y-axis direction. Here, the pair of side surfaces of the vibrating arms 29 are surfaces having the X-axis direction as a normal line and are opposed to each other.
As described above, the protrusions 294 and 295 extending in the Y-axis direction are provided on the side surfaces of the vibrating arm 29, so that the torsional rigidity can be increased while suppressing the bending rigidity of the vibrating arm 29 in the X-axis direction. . Therefore, when the vibrating arm 29 is bent and vibrated in the X-axis direction, unnecessary vibrations in the vibration mode can be suppressed. Further, since the bending rigidity of the vibrating arm 29 in the X-axis direction can be suppressed, the vibrating arm 29 can be prevented from being elongated, and as a result, the vibrating piece 2 can be reduced in size.

Hereinafter, the configuration of the vibrating arm 28 will be described in detail. Note that the configuration of the vibrating arm 29 is the same as that of the vibrating arm 28, and thus the description thereof is omitted.
In the vibrating arm 28, the grooves 282 and 283 as described above are provided in a portion other than the mass portion 281 in the Y-axis direction of the vibrating arm 28 over the entire longitudinal direction. Thereby, an electric field in the X-axis direction can be efficiently applied to the vibrating arm 28 using an excitation electrode group 22 described later.

Further, the above-described grooves 282 and 283 are not formed in the mass portion 281. Thereby, the mass of the mass part 281 can be increased while reducing the size of the mass part 281.
That is, by forming the grooves 282 and 283 in the vibrating arm 28, the mass corresponding to the volume of the grooves 282 and 283 can be reduced in a portion other than the tip of the vibrating arm 28. As a result, the mass of the tip portion of the vibrating arm 28 can be relatively increased.

The grooves 282 and 283 do not need to be provided over the entire region in the longitudinal direction in a portion other than the mass portion 281 in the Y-axis direction of the vibrating arm 28.
In the present embodiment, for convenience of explanation, the cross sections of the grooves 282 and 283 are square. The cross-sectional shape of the grooves 282 and 283 is not limited to a square, and may be a trapezoid, a parallelogram, a pentagon, or the like, for example. For example, the X-axis (electrical axis) direction, Y-axis (mechanical axis) direction, and Z-axis (optical axis) direction of the quartz substrate correspond to the X-axis direction, Y-axis direction, and Z-axis direction in each figure, respectively. When the vibration substrate 21 is formed by etching the quartz substrate, the cross-sectional shape of the grooves 282 and 283 does not accurately become a square or a rectangle, but becomes a pentagon due to etching anisotropy. . The method for manufacturing the vibration substrate 21 will be described in detail later.

  Further, the width (average width) of the grooves 282 and 283 is not particularly limited as long as the bending rigidity and torsional rigidity of the vibrating arm 28 as described above can be realized. It is preferably about 1 to 0.5 times. If the width is less than the lower limit value, when the depths of the grooves 282 and 283 are relatively deep, the aspect ratio of the grooves 282 and 283 becomes too high, and formation of the grooves 282 and 283 and an excitation electrode group 22 to be described later are performed. May be difficult to form. On the other hand, if the width exceeds the upper limit value, the side walls of the grooves 282 and 283 become too thin to obtain the mechanical strength necessary for the vibrating arm 28, or the height of the protrusions 284 and 285 is too high. It becomes too low, and it is difficult to increase the torsional rigidity of the vibrating arm 28 by the ridges 284 and 285.

  The depth (average depth) of the grooves 282 and 283 is not particularly limited as long as the bending rigidity and torsional rigidity of the vibrating arm 28 as described above can be realized. It is preferably about 0.3 to 0.45 times. When the depth is less than the lower limit, it is difficult to efficiently apply a voltage to the vibrating arm 28 by the excitation electrode group 23 depending on the cross-sectional shape, dimensions, and the like of the vibrating arm 28. On the other hand, when the depth exceeds the upper limit, when the width of the grooves 282 and 283 is relatively small, the aspect ratio of the grooves 282 and 283 becomes too high, and formation of the grooves 282 and 283 and an excitation electrode group described later are performed. The formation of 22 may be difficult.

From these viewpoints, the depth (average depth) of the grooves 282 and 283 is preferably about 0.5 to 1.5 times the width of the grooves 282 and 283.
Further, in the vibrating arm 28, the above-described convex ridges 284 and 285 are provided over the entire region other than the mass portion 281 in the Y-axis direction of the vibrating arm 28. Thereby, torsional rigidity can be enhanced over substantially the entire region of the vibrating arm 28 in the longitudinal direction.

In addition, the distal ends of the ridges 284 and 285 are connected to the proximal end portion 2811 of the mass portion 281. Thereby, each protruding item | line 284,285 can prevent or suppress the twist of the mass part 281. FIG.
In addition, each of the ridges 284 and 285 is provided at the center of the vibrating arm 28 in the thickness direction (Z-axis direction). Thereby, the torsional rigidity can be increased while suppressing the bending rigidity of the vibrating arm 28 in the X-axis direction.

In the present embodiment, the ridges 284 and 285 are provided in substantially the same range as the grooves 282 and 283 in the longitudinal direction of the vibrating arm 28. In addition, the formation range of each protrusion 284,285 in the longitudinal direction of the vibrating arm 28 may be different from the formation range of each groove 282,283. Moreover, the front-end | tip of each protruding item | line 284,285 may extend to the mass part 281 mentioned above.
In the present embodiment, for convenience of explanation, the cross sections of the ridges 284 and 285 are each square. The cross-sectional shape of the ridges 284 and 285 is not limited to a square, and may be a trapezoid, a parallelogram, a pentagon, or the like, for example. Further, the cross-sectional shape of the ridge 284 and the cross-sectional shape of the ridge 285 may be different. For example, the X-axis direction, the Y-axis direction, and the Z-axis direction of the quartz substrate correspond to the X-axis direction, the Y-axis direction, and the Z-axis direction in the drawings, respectively, and the vibrating substrate 21 is formed by etching the quartz substrate. In this case, due to the anisotropy of etching, the cross-sectional shape of the ridges 284 and 285 is not exactly square or rectangular, and the cross-section of the ridge 284 and the cross-section of the ridge 285 are mutually Different shapes.

  Further, the width (average width) of the ridges 284 and 285 is not particularly limited as long as it can realize the bending rigidity and torsional rigidity of the vibrating arm 28 as described above, but the thickness (Z It is preferably about 0.05 to 0.3 times the dimension in the axial direction. If the width is less than the lower limit, the mechanical strength of the ridges 284 and 285 may be insufficient depending on the cross-sectional shape of the ridges 284 and 285. On the other hand, when the width exceeds the upper limit, the bending rigidity of the vibrating arm 28 in the X-axis direction tends to increase extremely.

In this embodiment, the width of the ridges 284 and 285 is equal to the distance between the pair of grooves 282 and 283 described above, that is, the thickness of the bottom wall of each groove 282 and 283.
Further, the heights (average heights) of the ridges 284 and 285 are not particularly limited as long as they can realize the bending rigidity and torsional rigidity of the vibrating arm 28 as described above. It is preferably about 0.05 to 0.2 times the width. If the height is less than the lower limit value, it is difficult to increase the torsional rigidity of the vibrating arm 28 depending on the width of the ridges 284 and 285 and the like. On the other hand, when the height exceeds the upper limit value, the bending rigidity of the vibrating arm 28 in the X-axis direction tends to increase extremely.

From these viewpoints, the height (average height) of the ridges 284 and 285 is preferably about 0.5 to 5 times the width of the ridges 284 and 285.
Further, the width of the portion other than the mass portion 281 in the Y-axis direction of the vibrating arm 28 is equal to the width of the mass portion 281. That is, the width W1 in the X-axis direction of the mass portion 281 is equal to the width W2 in the X-axis direction of the proximal end portion of the vibrating arm 28. Thereby, it is possible to prevent the mass portion 281 from protruding from both ends of the vibrating arm 28 in the width direction. Therefore, the mass that contributes to the torsional moment of the vibrating arm 28 can be reduced, and unnecessary vibration mode vibrations can be suppressed. Further, when the width in the X-axis direction of the mass portion 281 is equal to the width in the X-axis direction of the base end portion of the vibrating arm 28, the width in the X-axis direction of the mass portion 281 is equal to that of the base end portion of the vibrating arm 28. Compared to a case where the width is smaller than the width in the X-axis direction, the mass of the distal end portion (mass portion 281) of the vibrating arm 28 can be easily increased.

Further, when the width in the X-axis direction of the mass portion 281 is W1 and the width in the X-axis direction of the proximal end portion of the vibrating arm 28 is W2, W2 / W1 is preferably 1 to 1.2. 1 to 1.1 is more preferable. Thereby, it is possible to increase the mass of the mass portion 281 while suppressing the vibration in the unnecessary vibration mode of the vibrating arm 28.
On the other hand, if W2 / W1 is less than the lower limit value, both ends of the mass portion 281 in the width direction protrude in the width direction of the vibrating arm 28, and the mass of the protruding portion contributes to the torsional moment of the vibrating arm 28. Therefore, the vibration of the unnecessary vibration mode tends to increase. On the other hand, when W2 / W1 exceeds the upper limit value, the bending rigidity of the vibrating arm 28 tends to increase extremely.

The vibrating arms 28 and 29 as described above are excited by energizing the excitation electrode groups 22 and 23.
As shown in FIG. 3, the excitation electrode group 22 is provided on the above-described vibrating arm 28, and the excitation electrode group 23 is provided on the vibrating arm 29.
The excitation electrode group 22 has a function of bending vibration (excitation) of the vibrating arm 28 by energization. The excitation electrode group 23 has a function of bending vibration (excitation) of the vibrating arm 29 by energization.

  Such an excitation electrode group 22 includes the excitation electrode 221 provided on the upper surface of the vibrating arm 28 (more specifically, the wall surface of the groove 282) and the lower surface of the vibrating arm 28 (more specifically, the groove 283). 3), the excitation electrode 223 provided on one side surface (left side surface in FIG. 3) of the vibrating arm 28, and the other side surface (FIG. 3). And the excitation electrode 224 provided on the right side surface).

The excitation electrodes 221, 222, 223, and 224 respectively extend from the vicinity of the proximal end of the vibrating arm 28 to the vicinity of the distal end portion. Further, the widths of the excitation electrodes 221, 222, 223, and 224 in the X-axis direction are constant over the entire region in the Y-axis direction.
Similarly, the excitation electrode group 23 includes the excitation electrode 231 provided on the upper surface of the vibration arm 29 described above, the excitation electrode 232 provided on the lower surface of the vibration arm 29, and one side surface of the vibration arm 29. The excitation electrode 233 provided and the excitation electrode 234 provided on the other side surface of the vibrating arm 29 are configured.

The excitation electrodes 231, 232, 233, and 234 extend from the vicinity of the proximal end of the vibrating arm 29 to the vicinity of the distal end portion, respectively. Further, the widths of the excitation electrodes 231, 232, 233, and 234 in the X-axis direction are constant over the entire region in the Y-axis direction.
Such excitation electrodes 221, 222, 233, and 234 are electrically connected to a connection electrode 41 (to be described later) via a wiring (not shown). Further, the excitation electrodes 223, 224, 231 and 232 are electrically connected to a connection electrode 42 described later via a wiring (not shown).

  In the resonator element 2 having such a configuration, when a voltage is applied between the connection electrode 41 and the connection electrode 42, the excitation electrodes 221, 222, 233, 234 and the excitation electrodes 223, 224, 231, 232 are reversed in polarity. In this manner, voltages in the direction including the X-axis direction component are applied to the vibrating arms 28 and 29, respectively. The vibrating arms 28 and 29 can be flexibly vibrated in the X-axis direction at a certain frequency (resonance frequency) by the inverse piezoelectric effect of the piezoelectric material. At this time, the vibrating arms 28 and 29 are flexibly vibrated in directions opposite to each other.

Further, when the vibrating arms 28 and 29 are bent and vibrated in this way, a voltage is generated between the connection electrodes 41 and 42 at a certain frequency due to the piezoelectric effect of the piezoelectric material. Utilizing these properties, the resonator element 2 can generate an electrical signal that vibrates at a resonance frequency.
Such excitation electrode groups 22 and 23, connection electrodes 41 and 42, and wiring (not shown) are conductive materials such as aluminum, aluminum alloy, silver, silver alloy, gold, gold alloy, chromium, chromium alloy, and gold, respectively. It can be formed of a metal material having excellent properties.

Examples of methods for forming these electrodes include physical film formation methods such as sputtering and vacuum deposition, chemical vapor deposition methods such as CVD, and various coating methods such as an ink jet method.
A pair of (two) arm portions (outer arm portions) 24, which are parallel to the vibrating arms 28 and 29 on both outer sides in the X-axis direction with respect to the two vibrating arms 28 and 29, 25 is provided.

The two arm portions 24 and 25 are provided to extend from the base portion 27 so as to be parallel to each other. More specifically, the two arm portions 24 and 25 each extend from the base portion 27 in the Y-axis direction and are arranged side by side in the X-axis direction.
A connection electrode 42 is provided on the lower surface of the arm portion 24, while a connection electrode 41 is provided on the lower surface of the arm portion 25. As will be described later, the electrodes are electrically connected to the mount electrodes 35a and 35b via the conductive adhesives 36a and 36b, and are fixed to the base substrate 31 of the package 3.

(package)
Next, the package 3 that houses and fixes the resonator element 2 will be described.
As illustrated in FIG. 1, the package 3 includes a plate-like base substrate 31, a frame-like frame member 32, and a plate-like lid member 33. The base substrate 31, the frame member 32, and the lid member 33 are laminated in this order from the lower side to the upper side, and the base substrate 31 and the frame member 32 are formed of a ceramic material or the like, which will be described later, and are fired integrally with each other. Are joined. The frame member 32 and the lid member 33 are joined by an adhesive or a brazing material. The package 3 houses the resonator element 2 in an internal space S defined by the base substrate 31, the frame member 32, and the lid member 33. In addition to the vibrating piece 2, an electronic component that drives the vibrating piece 2 and the like can be housed in the package 3.

As the constituent material of the base substrate 31, those having insulating properties (non-conductive) are preferable. For example, various glass materials, various ceramic materials such as oxide ceramics, nitride ceramics, carbide ceramics, polyimide, etc. Various resin materials can be used.
In addition, as the constituent material of the frame member 32 and the lid member 33, for example, the same constituent material as that of the base substrate 31, various metal materials such as Al and Cu, various glass materials, and the like can be used. In particular, when a material having light transmissivity such as a glass material is used as a constituent material of the lid member 33, if a metal covering portion (not shown) is formed on the vibrating piece 2 in advance, the vibrating piece 2 is packaged. Even after being housed in 3, by irradiating the metal coating part with a laser through the lid member 33, the metal coating part is removed to reduce the mass of the resonator element 2 (by a mass reduction method). ), The frequency of the resonator element 2 can be adjusted.

  In addition, a pair of mount electrodes 35 a and 35 b are formed on the upper surface of the base substrate 31 so as to be exposed to the internal space S. On the mount electrodes 35a and 35b, epoxy-based and polyimide-based conductive adhesives 36a and 36b containing conductive particles are respectively applied (stacked). The above-described vibrating piece 2 is placed on the agents 36a and 36b. Thereby, the resonator element 2 (base portion 27) is securely fixed to the mount electrodes 35a and 35b (base substrate 31).

  This fixing is performed by bonding the vibrating piece 2 to the conductive electrode 36 a so that the conductive adhesive 36 a contacts the connection electrode 41 of the vibrating piece 2 and the conductive adhesive 36 b contacts the connection electrode 42 of the vibrating piece 2. It is carried out by placing on the agents 36a and 36b. Accordingly, the resonator element 2 is fixed to the base substrate 31 via the conductive adhesives 36a and 36b, and the connection electrode 41 and the mount electrode 35a are electrically connected via the conductive adhesive 36a. The connection electrode 42 and the mount electrode 35b are electrically connected through the conductive adhesive 36b.

The conductive adhesives 36a and 36b are located on a line segment that passes through the center of gravity of the resonator element 2 and extends in the X-axis direction when viewed from the Z-axis direction. Thereby, even when the resonator element 2 is fixed to the package 3 at a part in the Y-axis direction, the resonator element 2 can be stably fixed to the package 3.
Further, four external terminals 34 a, 34 b, 34 c, 34 d are provided on the lower surface of the base substrate 31.

  Out of these four external terminals 34a to 34d, the external terminals 34a and 34b are electrically connected to the mount electrodes 35a and 35b via conductor posts (not shown) provided in via holes formed in the base substrate 31, respectively. It is a hot terminal connected to. The other two external terminals 34c and 34d are used to increase the bonding strength and equalize the distance between the package 3 and the mounting board when the package 3 is mounted on the mounting board, respectively. This is a dummy terminal.

Such mount electrodes 35a and 35b and external terminals 34a to 34d can be formed, for example, by applying gold plating to an underlying layer of tungsten and nickel plating.
The mount electrodes 35a and 35b and the connection electrodes 41 and 42 may be electrically connected through a metal wire (bonding wire) formed by, for example, a wire bonding technique. In this case, the resonator element 2 can be fixed to the base substrate 31 through an adhesive having no conductivity instead of the conductive adhesives 36a and 36b. Further, when an electronic component is accommodated in the package 3, the lower surface of the base substrate 31 may be used to check the characteristics of the electronic component and various information in the electronic component (for example, temperature compensation information of the vibration device) as necessary. A write terminal for rewriting (adjustment) may be formed. Further, the fixed position of the resonator element 2 with respect to the package 3 is not limited to the arm portions 24 and 25 described above, and may be, for example, the base portion 27.

Here, an example of a method for manufacturing the vibration substrate 21 of the resonator element 2 provided in the vibration device 1 configured as described above will be described with reference to FIGS. In the following description, the formation of the vibrating arm 28 portion of the vibration substrate 21 will be described for convenience of description. In the following description, a case where the vibration substrate 21 is made of quartz will be representatively described.
The manufacturing method of the vibration substrate 21 includes: [1] a step of forming the outer shape of the vibration substrate 21; [2] a step of forming the grooves 282 and 283 and the protrusions 284 and 285; [3] the excitation electrode groups 22 and 23; Forming the step.

Hereinafter, each process will be described in detail.
[1]
First, as shown in FIG. 5A, a crystal substrate 128 for forming the vibration substrate 21 is prepared.
The quartz substrate 128 is cut out so that its electric axis, mechanical axis, and optical axis are in the X-axis direction, Y-axis direction, and Z-axis direction, respectively.

Then, as shown in FIG. 5B, a corrosion resistant film 101 is formed on the quartz substrate 128.
The corrosion resistant film 101 is formed in a region corresponding to the outer shape of the vibration substrate 21.
In addition, the corrosion resistant film 101 is formed by laminating a layer made of Au on an underlayer made of Cr, for example.
Further, the corrosion resistant film 101 is formed by sequentially laminating Cr and Au, for example, by sputtering, vapor deposition, and the like, and then etching through a mask formed by a photolithography method, so that the shape (outer shape) of the vibration substrate 21 in a plan view is obtained. It is formed in the same shape.

Next, as shown in FIG. 5C, a mask 102 is formed on the corrosion resistant film 101.
This mask 102 is formed in a region corresponding to the walls of the grooves 282 and 283.
The mask 102 is formed, for example, by using a photolithography method, applying a photoresist, and performing exposure and development.
Thereafter, the quartz crystal substrate 128 is wet etched using the corrosion resistant film 101 as an etching mask. Thereby, as shown in FIG. 6A, a crystal substrate 128A is obtained.
The crystal substrate 128A in plan view has substantially the same shape as the vibration substrate 21 in plan view.

[2]
Next, the corrosion resistant film 101 is etched using the mask 102 as an etching mask. Thereby, as shown in FIG. 6B, a corrosion-resistant film 101A is obtained.
The plan view shape of the corrosion-resistant film 101A is substantially the same as the plan view shape of the mask 102.
Then, the quartz substrate 128A is wet-etched using the mask 102 and the corrosion-resistant film 101A as an etching mask. As a result, as shown in FIG. 6C, the vibrating arm 28 having the grooves 282 and 283 and the ridges 284 and 285 is formed. That is, the vibration substrate 21 is formed.

Etching time is managed so that this wet etching is half etching. Thereby, the central part in the thickness direction of the vibrating arm 28 remains, and the grooves 282 and 283 and the ridges 284 and 285 are formed.
Thereafter, the corrosion resistant film 101A and the mask 102 are removed, and the surface of the vibrating arm 28 is exposed as shown in FIG.

[3]
Next, as shown in FIG. 7B, a conductor film 103 is formed on the surface of the vibrating arm 28.
The conductor film 103 becomes the excitation electrode group 22 and is made of the same material as that of the excitation electrode group 22.
The conductor film 103 is formed by, for example, the same configuration and formation method as the above-described corrosion resistant film 101.

Then, as shown in FIG. 7C, the excitation electrode group 22 is formed by etching the conductor film 103.
Such etching is performed, for example, via a mask formed in the same shape as the mask 102 described above by photolithography.
As described above, the vibrating arm 28 having the grooves 282 and 283 and the ridges 284 and 285 and the excitation electrode group 22 is formed.

According to the first embodiment as described above, since the grooves 282, 283, 292, and 293 extending in the Y-axis direction are provided on the main surfaces of the vibrating arms 28 and 29, the vibrating arms 28 have X An axial electric field can be applied efficiently.
In addition, since the protrusions 284, 285, 294, and 295 extending in the Y-axis direction are provided on the side surfaces of the vibrating arms 28 and 29, the bending rigidity of the vibrating arms 28 and 29 in the X-axis direction is suppressed. Torsional rigidity can be increased. For this reason, when the vibrating arms 28 and 29 are flexibly vibrated in the X-axis direction, unnecessary vibration in the vibration mode can be suppressed. Further, since the bending rigidity of the vibrating arms 28 and 29 in the X-axis direction can be suppressed, the vibrating arms 28 and 29 can be prevented from being elongated, and as a result, the vibrating piece 2 can be downsized.
Further, the vibrating device 1 in which such a vibrating piece 2 is housed in the package 3 is small and has excellent reliability.

Second Embodiment
Next, a second embodiment of the vibration device of the present invention will be described.
FIG. 8 is a cross-sectional view of the resonator element included in the resonator device according to the second embodiment of the invention.
Hereinafter, the vibration device according to the second embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The vibration device according to the second embodiment is substantially the same as the first embodiment except that the width of the ridge of the vibrating arm is different. In FIG. 8, the same components as those in the above-described embodiment are denoted by the same reference numerals.
As illustrated in FIG. 8, the vibration device 1 </ b> A of the present embodiment includes a vibration piece 2 </ b> A housed in the package 3.

This vibrating piece 2A has a vibrating substrate 21A and excitation electrode groups 22 and 23 formed on the surface thereof.
The vibration substrate 21A has a pair of vibration arms 28A and 29A that extend in the Y-axis direction and are provided side by side in the X-axis direction.
Hereinafter, the vibrating arm 28A will be described in detail. Note that the vibrating arm 29A having the ridges 294A and 295A has the same configuration as the vibrating arm 28A, and thus the description thereof is omitted.

A mass portion 281 having a larger cross-sectional area than the proximal end portion of the vibrating arm 28A is provided at the distal end portion of the vibrating arm 28A.
A groove 282 extending in the Y-axis direction is formed on the upper surface (main surface) of the vibrating arm 28A, and a groove 283 extending in the Y-axis direction is formed on the lower surface (main surface) of the vibrating arm 28. Yes.
In addition, a protrusion 284A extending in the Y-axis direction is formed on one side surface (left side surface in FIG. 8) of the vibrating arm 28A, and the other side surface (right side surface in FIG. 8) is formed. ) Is formed with ridges 285A extending in the Y-axis direction.

In particular, in the present embodiment, the height of each ridge 284A, 285A is smaller than the width of each ridge 284A, 285A. In other words, the width of each protrusion 284A, 285A is larger than the height of each protrusion 284A, 285A. Thereby, the bending rigidity in the X-axis direction of the vibrating arm 28A can be effectively suppressed.
Also, the second embodiment as described above can achieve the same effects as those of the first embodiment described above.

<Third Embodiment>
Next, a third embodiment of the vibration device of the invention will be described.
FIG. 9 is a cross-sectional view of the resonator element included in the resonator device according to the third embodiment of the invention.
Hereinafter, the vibration device according to the third embodiment will be described focusing on differences from the above-described embodiment, and description of similar matters will be omitted.

The vibration device of the third embodiment is substantially the same as the first embodiment except that the groove depth of the vibrating arm is different. In FIG. 9, the same reference numerals are given to the same configurations as those in the above-described embodiment.
As shown in FIG. 9, the vibrating device 1 </ b> B of the present embodiment includes a vibrating piece 2 </ b> B housed in the package 3.

The vibrating piece 2B includes a vibrating substrate 21B and excitation electrode groups 22 and 23 formed on the surface thereof.
The vibration substrate 21B has a pair of vibration arms 28B and 29B that extend in the Y-axis direction and are provided side by side in the X-axis direction.
Hereinafter, the vibrating arm 28B will be described in detail. Note that the vibrating arm 29B having the grooves 292B and 293B has the same configuration as the vibrating arm 28B, and thus the description thereof is omitted.

A mass portion 281 having a larger cross-sectional area than the proximal end portion of the vibrating arm 28B is provided at the distal end portion of the vibrating arm 28B.
A groove 282B extending in the Y-axis direction is formed on the upper surface (main surface) of the vibrating arm 28B, and a groove 283B extending in the Y-axis direction is formed on the lower surface (main surface) of the vibrating arm 28B. Yes.
In addition, a protrusion 284 extending in the Y-axis direction is formed on one side surface (left side surface in FIG. 9) of the vibrating arm 28B, and the other side surface (right side surface in FIG. 9) is formed. ) Is formed with ridges 285 extending in the Y-axis direction.

In particular, in this embodiment, the depth of each groove 282B, 283B is smaller than the width of each groove 282B, 283B. In other words, the width of each groove 282B, 283B is larger than the depth of each groove 282B, 283B. As a result, the width of the ridges 284 and 285 is equal to the distance between the pair of grooves 282B and 283B, that is, the thickness of the bottom wall of each groove 282B and 283B.
Also, the third embodiment as described above can achieve the same effects as those of the first embodiment described above.

<Fourth embodiment>
Next, a fourth embodiment of the vibration device of the invention will be described.
FIG. 10 is a cross-sectional view of the resonator element included in the resonator device according to the fourth embodiment of the invention.
Hereinafter, the vibration device according to the fourth embodiment will be described with a focus on differences from the above-described embodiment, and description of similar matters will be omitted.

The vibration device according to the fourth embodiment is substantially the same as the first embodiment except that the height of the ridges of the vibrating arm is different. In FIG. 10, the same components as those in the above-described embodiment are denoted by the same reference numerals.
As shown in FIG. 10, the vibrating device 1 </ b> C of the present embodiment includes a vibrating piece 2 </ b> C housed in the package 3.

This vibrating piece 2C has a vibrating substrate 21C and excitation electrode groups 22 and 23 formed on the surface thereof.
The vibration substrate 21 </ b> C has a pair of vibrating arms 28 </ b> C and 29 </ b> C that extend in the Y-axis direction and are provided side by side in the X-axis direction.
Hereinafter, the vibrating arm 28C will be described in detail. Note that the vibrating arm 29C having the ridges 294C and 295C has the same configuration as the vibrating arm 28C, and thus the description thereof is omitted.

A mass portion 281 having a larger cross-sectional area than the proximal end portion of the vibrating arm 28C is provided at the distal end portion of the vibrating arm 28C.
A groove 282 extending in the Y-axis direction is formed on the upper surface (main surface) of the vibrating arm 28C, and a groove 283 extending in the Y-axis direction is formed on the lower surface (main surface) of the vibrating arm 28C. Has been.
In addition, a protrusion 284C extending in the Y-axis direction is formed on one side surface (left side surface in FIG. 10) of the vibrating arm 28C, and the other side surface (right side surface in FIG. 10) is formed. ) Is formed with ridges 285C extending in the Y-axis direction.
In particular, in the present embodiment, the height of each ridge 284C, 285C is larger than the width of each ridge 284C, 285C. In other words, the width of each ridge 284C, 285C is smaller than the height of each ridge 284C, 285C. Thereby, the torsional rigidity of the vibrating arm 28C can be effectively increased.

Further, the width W1 of the mass portion 281 in the X-axis direction is narrower than the width W2 of the base end portion of the vibrating arm 28C in the X-axis direction. In other words, the width W2 of the base end portion of the vibrating arm 28C in the X-axis direction is wider than the width W1 of the mass portion 281 in the X-axis direction. Thereby, it is possible to prevent the mass portion 281 from protruding from both ends in the width direction of the vibrating arm 28C. Therefore, as compared with the case where the width W1 of the mass portion 281 in the X-axis direction is equal to the width W2 of the base end portion of the vibrating arm 28C in the X-axis direction, the mass contributing to the torsional moment of the vibrating arm 28C is reduced and unnecessary. Vibrations in various vibration modes can be suppressed. In addition, since the width W2 in the X-axis direction of the base end portion of the vibrating arm 28C is wider than the width W1 of the mass portion 281 in the X-axis direction, the torsional rigidity of the vibrating arm 28C can be increased.
Also, the fourth embodiment as described above can achieve the same effects as those of the first embodiment described above.

<Fifth Embodiment>
Next, a fifth embodiment of the vibration device of the invention will be described.
FIG. 11 is a cross-sectional view of the resonator element included in the resonator device according to the fifth embodiment of the invention.
Hereinafter, the vibration device according to the fifth embodiment will be described focusing on the differences from the above-described embodiment, and description of similar matters will be omitted.

The vibrating device of the fifth embodiment is substantially the same as the first embodiment except that the number and width of the grooves of the vibrating arm are different. In FIG. 11, the same reference numerals are given to the same components as those in the above-described embodiment.
As shown in FIG. 11, the vibration device according to the present embodiment includes a vibration piece 2 </ b> D housed in the package 3.

This vibrating piece 2D has a vibrating substrate 21D and excitation electrode groups 22 and 23 formed on the surface thereof.
The vibration substrate 21D has a pair of vibration arms 28D and 29D that extend in the Y-axis direction and are provided side by side in the X-axis direction.
In addition, an excitation electrode group 22D configured by excitation electrodes 221D, 222D, 223D, and 224D is provided on the vibrating arm 28D, and configured by excitation electrodes 231D, 232D, 233D, and 234D on the vibrating arm 29D. Excited electrode group 23D is provided.
Hereinafter, the vibrating arm 28D will be described in detail. Note that the vibrating arm 29D having the grooves 2921, 2922, 2931, 2932 and the mass part 291D has the same configuration as the vibrating arm 28D, and thus the description thereof is omitted.

A mass portion 281D having a larger cross-sectional area than the proximal end portion of the vibrating arm 28D is provided at the distal end portion of the vibrating arm 28D.
Further, two grooves 2821 and 2822 extending in the Y-axis direction are formed on the upper surface (main surface) of the vibrating arm 28D, and the lower surface (main surface) of the vibrating arm 28D extends in the Y-axis direction. Two grooves 2831 and 2832 are formed. Thereby, the protruding item | line which protrudes respectively up and down is formed in the center part in the width direction of vibrating arm 28D.

Further, on one side surface (left side surface in FIG. 11) of the vibrating arm 28D, a protrusion 284 extending in the Y-axis direction is formed, and the other side surface (right side surface in FIG. 11) of the vibrating arm 28D. ) Is formed with ridges 285 extending in the Y-axis direction.
According to such a vibrating arm 28D, since the ridges projecting upward and downward are formed at the center in the width direction of the vibrating arm 28D, the twisting while suppressing the bending rigidity of the vibrating arm 28 in the X-axis direction. Stiffness can be effectively increased.
Also, the fifth embodiment as described above can achieve the same effects as those of the first embodiment described above.

The vibration device of each embodiment as described above can be applied to various electronic devices, and the obtained electronic device has high reliability.
The electronic apparatus provided with the vibration device of the present invention is not particularly limited. For example, a personal computer (mobile personal computer), a mobile phone, a digital still camera, an ink jet type ejection device (for example, an ink jet printer), a laptop personal computer , TV, video camera, video tape recorder, car navigation device, pager, electronic notebook (including communication function), electronic dictionary, calculator, electronic game device, word processor, workstation, video phone, security TV monitor, electronic binoculars POS terminal, medical equipment (eg electronic thermometer, blood pressure monitor, blood glucose meter, electrocardiogram measuring device, ultrasonic diagnostic device, electronic endoscope), fish detector, various measuring equipment, instruments (eg, vehicle, aircraft, ship) Instrumentation), hula Simulator, and the like.

As described above, the resonator element and the vibration device of the present invention have been described based on the illustrated embodiment. However, the present invention is not limited to this, and the configuration of each part is an arbitrary configuration having the same function. Can be substituted. In addition, any other component may be added to the present invention. Further, the present invention may be a combination of any two or more configurations (features) of the above embodiments.
For example, in the above-described embodiment, the case where the resonator element has two vibrating arms has been described as an example. However, the present invention is not limited to this, and the number of vibrating arms may be three or more.

Further, in the above-described embodiment, each vibration arm is made of a piezoelectric material, and the configuration in which each vibration arm is excited by energizing the excitation electrode provided on each vibration arm has been described as an example. For example, a configuration may be adopted in which a piezoelectric element in which an electrode layer, a piezoelectric layer, and an electrode layer are stacked in this order is provided on each vibrating arm, and the vibrating arm is vibrated by expansion and contraction of the piezoelectric element. .
In addition, the vibration device of the present invention can be applied to a gyro sensor or the like in addition to a piezoelectric oscillator such as a crystal oscillator (SPXO), a voltage controlled crystal oscillator (VCXO), a temperature compensated crystal oscillator (TCXO), a crystal oscillator with a thermostat (OCXO). Applied.

  DESCRIPTION OF SYMBOLS 1 ... Vibration device 2 ... Vibration piece 2A ... Vibration piece 2B ... Vibration piece 2C ... Vibration piece 2D ... Vibration piece 3 ... Package 21 ... Vibration board 21A ... Vibration board 21B ... Vibration board 21C ······························································ 22 Vibration arm 28A ... Vibration arm 28B ... Vibration arm 28C ... Vibration arm 28D ... Vibration arm 29 ... Vibration arm 29A ... Vibration arm 29B ... Vibration arm 29C ... Vibration arm 29D ... Vibration arm 31 ... Base substrate 32 ... Frame member 33 ... Lid member 34a ... External terminal 34b ... External terminal 34c ... External terminal 34d ... External terminal 35a ... Mount electrode 35b ... Mount Electrode 36a ... Conductive adhesive 36b ... Conductive adhesive 41 ... Connection electrode 42 ... Connection electrode 101 ... Corrosion resistant film 101A ... Corrosion resistant film 102 ... Mask 103 ... Conductive film 128 ... Crystal substrate 128A Quartz substrate 221 Excitation electrode 221D Excitation electrode 222 Excitation electrode 222D Excitation electrode 223 Excitation electrode 223D Excitation electrode 224 Excitation electrode 224D Excitation electrode 231 Excitation electrode 231D Excitation electrode 232 Excitation electrode 232D Excitation electrode 233 Excitation electrode 233D Excitation electrode 234 Excitation electrode 234D Excitation electrode 281 Mass part 281D Mass part 282 Groove 282B ... groove 283 ... groove 283B ... groove 284 ... ridge 284A ... ridge 284C ... ridge 285 ... Projection 285A ... Projection 285C ... Projection 291 ... Mass part 291 ... Mass part 291D ... Mass part 292 ... ... Groove 292B ... Groove 293 ... Groove 293B ... Groove 294 ... Convex Ridge 294A ... ridge 294C ... ridge 295 ... ridge 295A ... ridge 295C ... ridge 2811 ... base end 2821 ... groove 2822 ... groove 2831 ... groove 2832 ... groove 2921 ... ... groove 2922 ... groove 2931 ... groove 2932 ... groove W1 ... width W2 ... width

Claims (12)

The base,
A plurality of vibrating arms extending in the first direction from the base and arranged in a second direction orthogonal to the first direction, and bending and vibrating in the second direction;
Each of the vibrating arms is a surface having a normal direction in a third direction orthogonal to both the first direction and the second direction, and a pair of main surfaces facing each other, and the second direction A plane whose direction is normal, and a pair of side surfaces facing each other,
A groove extending in the first direction is formed on each main surface,
On each of the side surfaces, a protrusion extending in the first direction is formed.   2. The resonator element according to claim 1, wherein a mass portion having a larger cross-sectional area than a proximal end portion of the vibrating arm is provided at a distal end portion of the vibrating arm.   The resonator element according to claim 2, wherein a width of the mass portion in the second direction is equal to a width of the base end portion of the vibrating arm in the second direction.   The resonator element according to claim 2, wherein a width of the mass portion in the second direction is narrower than a width of the base end portion of the vibrating arm in the second direction.   The vibrating element according to claim 2, wherein the mass portion is not formed with the groove.   6. The resonator element according to claim 2, wherein a distal end portion of each protrusion is connected to a proximal end portion of the mass portion.   The vibrating element according to claim 6, wherein each of the protrusions is provided over the entire region of the vibrating arm other than the mass portion in the first direction.   W2 / W1 is 1-1.2 where W1 is the width of the mass part in the second direction and W2 is the width of the base end of the vibrating arm in the second direction. Item 8. The resonator element according to any one of Items 2 to 7.   9. The resonator element according to claim 1, wherein each of the protrusions is provided at a central portion of the vibrating arm in the third direction.   10. The resonator element according to claim 1, wherein a width of each ridge is larger than a height of each ridge.   10. The resonator element according to claim 1, wherein a height of each ridge is larger than a width of each ridge. A resonator element according to any one of claims 1 to 11,
A vibrating device comprising: a package for storing the vibrating piece.

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