JP2011200973A - Method for correcting end face of spindle shaft - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a method for correcting an end face of a spindle shaft capable of transmitting stable ultrasonic vibration from the spindle shaft to a cutting blade.SOLUTION: In this method for correcting an end face 34 of the spindle shaft 26 of a cutting unit 4, the cutting blade 27 is fixed to the end face 34 of the spindle shaft 26 by a fixing bolt 41 via an adhering member 28, the ultrasonic vibration of an ultrasonic vibrator 43 provided in the spindle shaft 26 is transmitted to the cutting blade 27, and a workpiece W is cut. The used cutting blade 27 and the adhering member 28 are removed from the spindle shaft 26, an unused cutting blade 27 and a polishing sheet 65 are mounted, a polishing surface 67 of the polishing sheet 65 is made to abut on the end face 34 of the spindle shaft 26 by fastening the fixing bolt 41, the unused cutting blade 27 is vibrated in a radial direction by ultrasonic vibration, and the end face 34 of the spindle shaft 26 is polished by the polishing surface 67.

Description

  The present invention relates to a method for correcting a spindle shaft end surface of a cutting apparatus that cuts a workpiece with an ultrasonically oscillating cutting blade, and particularly to a spindle shaft end surface of a cutting apparatus suitable for cutting difficult-to-cut materials such as metal and thick glass. Regarding the correction method.

  2. Description of the Related Art Conventionally, as a cutting device that cuts difficult-to-cut materials such as metal and thick glass, a device that cuts a cutting blade by ultrasonic vibration in a radial direction is known (see, for example, Patent Document 1). The cutting apparatus described in Patent Document 1 transmits a workpiece by transmitting ultrasonic vibration from an ultrasonic vibrator provided on the rear end side of the spindle shaft to a cutting blade fixed to the front end side of the spindle shaft. To cut. The cutting blade is disposed at a minimum vibration amplitude point of ultrasonic vibration transmitted in the axial direction of the spindle shaft, that is, at a vibration transmission direction conversion point for converting the transmission direction of ultrasonic vibration from the axial direction to the radial direction.

  For this reason, the ultrasonic vibration generated from the ultrasonic vibrator is transmitted from the spindle shaft to the cutting blade in the axial direction, and the transmission direction is converted from the axial direction to the radial direction in the cutting blade. The ultrasonic vibration transmitted to the grinding blade is transmitted in the radial direction from the boss portion in contact with the spindle shaft to an annular cutting blade attached outside the boss portion in the radial direction. In this way, the cutting device is configured to cut the workpiece by repeatedly transmitting and contracting the grinding wheel instantaneously and radially in the radial direction by transmitting ultrasonic vibration to the cutting edge of the cutting blade in the radial direction. Has been.

  In this case, the cutting blade is fixed to the end surface of the spindle shaft via the contact member by the tightening torque of the fixing member. The adhesion member is formed of a PET (Polyethylene Terephthalate) film or the like, and improves the adhesion between the spindle shaft and the cutting blade. With this configuration, stable ultrasonic vibration is transmitted from the spindle shaft to the cutting blade. In addition, when the boss portion of the cutting blade is formed of, for example, aluminum, the contact member suppresses the contact between the spindle shaft and the boss portion, and a part of the boss portion is welded to the spindle shaft by frictional heat. Is preventing.

JP 2007-15095 A

  However, in the above-described cutting apparatus, the adhesion between the spindle shaft and the close contact member deteriorates due to loosening of the fixed member due to cutting for a long time or insufficient tightening of the fixed member when the cutting blade is attached. As a result, the end surface of the spindle shaft and the contact member were slightly rubbed. Due to the frictional heat generated by the minute sliding, a part of the contact member is welded to the end surface of the spindle shaft, and the flatness of the end surface of the spindle shaft may be deteriorated. As a result, there is a problem in that the adhesion between the spindle shaft and the cutting blade is impaired, and stable ultrasonic vibration cannot be transmitted from the spindle shaft to the cutting blade.

  The present invention has been made in view of such circumstances, and in a cutting apparatus that cuts a workpiece with a cutting blade that vibrates ultrasonically, the deposits attached to the end surface of the spindle shaft are removed, and the spindle shaft is removed. It is an object of the present invention to provide a spindle shaft end face correcting method capable of transmitting stable ultrasonic vibration to a cutting blade.

  A spindle shaft end surface correction method according to the present invention includes a spindle shaft, an ultrasonic transducer that is disposed on the spindle shaft and generates ultrasonic vibrations, and a spindle housing that rotatably supports the spindle shaft, and the end surface of the spindle shaft In an ultrasonic spindle for cutting a workpiece with the cutting blade which is brought into contact with an annular cutting blade through a close contact member and clamped and fixed with a fastening torque by a fixing member and ultrasonically vibrated in a radial direction. A method for correcting a spindle shaft end surface, wherein the cutting blade is attached to a boss portion having a first end surface facing the end surface of the spindle shaft and a second end surface facing the fixing member, and the boss portion. The end face of the spindle shaft and the boss part The adhesive member between the first end surface is removed, and a polishing sheet is mounted between the vibration conversion member that converts ultrasonic vibrations in a radial direction and the end surface of the spindle shaft, and the tightening torque is greater than the tightening torque. A polishing sheet mounting step in which the polishing surface of the polishing sheet is brought into contact with the end surface of the spindle shaft by the fixing member with a small torque, and after the polishing sheet mounting step, ultrasonic vibration is oscillated to cause the vibration converting member to have a diameter. A polishing step of sliding the polishing sheet on the end face of the spindle shaft to polish the end face of the spindle shaft by vibrating in a direction.

  According to this configuration, the polishing sheet is mounted between the spindle shaft and the vibration converting member, and the polishing surface of the polishing sheet is brought into contact with the end surface of the spindle shaft with a torque smaller than the tightening torque. The polishing surface of the polishing sheet and the end surface of the spindle shaft are slid. As a result, when a part of the contact member is welded to the end surface of the spindle shaft, deposits attached to the end surface of the spindle shaft are removed by the polishing surface of the polishing sheet. As a result, the flatness of the spindle shaft can be maintained, the adhesion between the spindle shaft and the cutting blade can be improved, and stable ultrasonic vibration can be transmitted from the spindle shaft to the cutting blade. The vibration converting member may be any member as long as ultrasonic vibration can be transmitted in the radial direction. For example, an unused cutting blade may be used as the vibration converting member. Further, the torque smaller than the tightening torque means a torque that can slide the polishing sheet and the end surface of the spindle shaft by the vibration of the vibration converting member.

  According to the present invention, in the spindle shaft end surface correcting method, in the polishing sheet mounting step, the polishing surface is further applied to the end surface side of the fixing member between the end surface of the fixing member and the vibration converting member. After mounting the abrasive sheet in contact, the cutting blade and the two abrasive sheets can be clamped and fixed to the end surface of the spindle shaft by the fixing member with a torque smaller than the tightening torque.

  According to the present invention, in the spindle shaft end face correcting method, the vibration converting member can be constituted by a cutting blade.

  According to the present invention, in a cutting device that cuts a workpiece with a cutting blade that vibrates ultrasonically, the adhering matter adhering to the end surface of the spindle shaft is removed, and stable ultrasonic vibration is transmitted from the spindle shaft to the cutting blade. can do.

It is a figure which shows embodiment of the spindle shaft end surface correction method which concerns on this invention, and is a perspective view of a cutting device. It is a figure which shows embodiment of the spindle shaft end surface correction method which concerns on this invention, and is sectional drawing of a cutting unit. It is a figure which shows embodiment of the spindle shaft end surface correction method which concerns on this invention, and is explanatory drawing of the transmission direction of the ultrasonic vibration in a cutting unit. It is a figure which shows embodiment of the spindle shaft end surface correction method which concerns on this invention, and is explanatory drawing of the correction method of the end surface of a spindle shaft and the press surface of a fixing bolt. It is a figure which shows the modification of the spindle shaft end surface correction method which concerns on this invention.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. In the following description, an example in which the present invention is applied to a cutting apparatus that cuts a workpiece with a cutting blade will be described. However, the present invention is not limited to this configuration. The present invention can be applied to any apparatus that cuts a workpiece.

  Hereinafter, embodiments of the present invention will be described in detail with reference to the accompanying drawings. A cutting apparatus according to an embodiment of the present invention will be described with reference to FIG. FIG. 1 is a perspective view of a cutting apparatus according to an embodiment of the present invention. In FIG. 1, for convenience of explanation, the cassette is indicated by a two-dot chain line.

  As shown in FIG. 1, the cutting apparatus 1 cuts the workpiece W held on the chuck table 3 on the housing 2 by a cutting unit 4 (ultrasonic spindle) provided above the chuck table 3. It is configured. The workpiece W is formed in a substantially disk shape, and is partitioned into a plurality of regions by streets 71 arranged in a lattice pattern on the surface, and devices 72 such as IC, LSI, LED, etc. are formed in the partitioned regions. Has been. Further, the workpiece W is supported by the annular frame 74 via the sticking tape 73 and is carried into and out of the cutting apparatus 1 while being accommodated in the cassette 8 (see FIG. 1).

In addition, as workpieces, adhesive members such as DAF (Die Attach Film) provided on the back surface of the workpiece for chip mounting, semiconductor product packages, silicon, gallium arsenide, ceramic, glass, sapphire (Al ₂ O ₃ ) Various inorganic materials, various electric parts such as LCD drivers, and various processing materials that require micron-order processing position accuracy are included.

  The chuck table 3 holds the workpiece W by suction, and is moved left and right in the X-axis direction, which is the machining feed direction, by a moving mechanism (not shown) in the housing 2. The movement position of the chuck table 3 on the right end side in the figure is set to a delivery position where the workpiece W is delivered to the chuck table 3, and the movement position facing the cutting unit 4 is that the workpiece W is cut. The processing position is set. FIG. 1 shows a state where the chuck table 3 is in a standby state at the delivery position.

  The housing 2 is provided with a cassette mounting table 11 adjacent to the chuck table 3 at the delivery position. The cassette mounting table 11 is configured such that a cassette 8 in which a workpiece W is stored is placed and can be moved up and down. The cassette mounting table 11 adjusts the drawing position and the pushing position of the workpiece W in the height direction by moving up and down with the cassette 8 mounted.

  A carry-in / carry-out unit 12 and a temporary placement table 13 are arranged behind the cassette placement table 11. The carry-in / carry-out unit 12 pulls out the workpiece W from the cassette 8 to the temporary placement table 13 while the height of the cassette 8 is adjusted by the cassette placement table 11, and also the workpiece W on the temporary placement table 13. Is pushed into the cassette 8. The temporary placement table 13 has a pair of guide rails and guides the drawing and pushing of the workpiece W by the carry-in / carry-out unit 12 from the side.

  A first transfer arm 14 is disposed in the vicinity of the temporary placement table 13. The first transport arm 14 transports the workpiece W between the temporary placement table 13 and the chuck table 3. Further, a cleaning unit 15 is provided adjacent to the temporary placement table 13 behind the chuck table 3 at the delivery position. The cleaning unit 15 includes a spinner cleaning table 21 and performs spinner cleaning in a state where the workpiece W is held on the spinner cleaning table 21.

  A support base 7 on which the monitor 16 is placed is provided on the left side of the housing 2 in the figure, and a second transfer arm 17 is provided on a side surface 22 of the support base 7. The second transfer arm 17 transfers the workpiece W between the chuck table 3 and the cleaning unit 15. The front surface 24 of the support base 7 supports the cutting unit 4 above the movement path of the chuck table 3. The cutting unit 4 processes the workpiece W with a cutting blade 27 that rotates at high speed while being ultrasonically vibrated.

  Further, the cutting unit 4 is moved in the Y-axis direction serving as the index feed direction and the Z-axis direction serving as the cutting direction by a moving mechanism (not shown) provided in the support base 7. As described above, in the cutting apparatus 1, the workpiece W on the chuck table 3 is moved by relatively moving the chuck table 3 processed and fed in the X-axis direction and the cutting unit 4 indexed and fed in the Y-axis direction. It can be processed into a grid. The details of the cutting unit 4 will be described later.

  An imaging unit 18 is provided on the support table 7 above the movement path of the chuck table 3. The imaging unit 18 is disposed so as to protrude from the lower surface of the holding unit 23 and is configured to image the upper surface of the workpiece W. The imaging result obtained by the imaging unit 18 is used for alignment between the cutting unit 4 and the workpiece W on the chuck table 3. The monitor 16 is disposed on the support base 7 and displays a captured image captured by the imaging unit 18 and processing conditions.

  The cutting unit will be described in detail with reference to FIG. FIG. 2 is a cross-sectional view of the cutting unit according to the embodiment of the present invention.

  As shown in FIG. 2, the cutting unit 4 includes a spindle housing 25, a spindle shaft 26 rotatably supported by the spindle housing 25, and a cutting attached to the tip of the spindle shaft 26 through contact members 28 and 29. And a blade 27. The spindle housing 25 is formed in a substantially cylindrical shape, and a spindle shaft 26 is rotatably supported inside. The inner peripheral surface of the spindle housing 25 has a slight gap with the outer peripheral surface of the spindle shaft 26, and functions as an air bearing by the high-pressure air supplied to the gap.

  The spindle shaft 26 is made of, for example, stainless steel, and a central portion supported by the spindle housing 25 is formed with a large diameter, and a front end portion and a rear end portion are formed with a small diameter. A flange portion 31 protruding in the radial direction is formed on the large diameter portion of the spindle shaft 26. An annular groove 32 is formed in the spindle housing 25 corresponding to the flange portion 31, and a slight gap in which high-pressure air is interposed is also formed between the flange portion 31 and the annular groove 32. With this configuration, the spindle shaft 26 is supported with respect to the spindle housing 25 in a state where axial blurring is suppressed.

  A small diameter portion on the distal end side of the spindle shaft 26 is an attachment portion 33 to which the cutting blade 27 is attached, and protrudes from the distal end side of the spindle housing 25. A screw hole 35 is formed in the attachment portion 33 from the end face 34 at the tip to the center of the shaft, and the cutting blade 27 is attached by the fixing bolt 41 via the annular contact members 28 and 29. The end face 34 of the attachment portion 33 is formed flat, and the close contact with the cutting blade 27 is enhanced through the close contact member 28.

  A part of the small-diameter portion on the rear end side of the spindle shaft 26 is attached with a permanent magnet to constitute a rotor 46 of the electric motor 42. The electric motor 42 includes the rotor 46 and a stator 47 disposed in the spindle housing 25 so as to surround the rotor 46. The electric motor 42 rotates the spindle shaft 26 to which the rotor 46 is fixed by applying an AC voltage to the stator 47.

  In addition, an ultrasonic transducer 43 is provided on the rear end side of the rotor 46 in the small diameter portion on the rear end side of the spindle shaft 26. The ultrasonic vibrator 43 is an electrostrictive vibrator and is formed of a piezoelectric ceramic material such as lead zirconate titanate. The ultrasonic vibrator 43 generates ultrasonic vibrations (longitudinal waves and dense waves) in the axial direction of the spindle shaft 26 when an alternating voltage having a predetermined frequency is applied. An AC voltage is applied to the ultrasonic transducer 43 from the non-contact power supply unit 44. The ultrasonic transducer 43 may be configured to generate ultrasonic vibration in the axial direction of the spindle shaft, and may be a magnetostrictive transducer, for example.

  The non-contact power feeding unit 44 includes a power receiving unit 48 provided on the rear end side of the ultrasonic transducer 43 in the spindle shaft 26 and a power transmitting unit 49 disposed in the spindle housing 25 so as to surround the power receiving unit 48. Have. The power reception unit 48 and the power transmission unit 49 are configured by arranging a power reception coil and a power transmission coil to face each other. The power transmission unit 49 transmits electric power from the outside to the power reception unit 48 in a non-contact manner using an electromagnetic induction method, and supplies power to the ultrasonic transducer 43 via the power reception unit 48.

  The cutting blade 27 is configured to be rotatable integrally with the spindle shaft 26, and includes a cutting blade 51 that grinds the workpiece W and a base portion 52 that holds the cutting blade 51. The cutting blade 51 is formed in an annular shape by bonding abrasive grains such as diamond with a bonding material, for example. The base portion 52 is made of, for example, aluminum, and includes a boss portion 53 that is fixed to the spindle shaft 26 and a flange portion 54 that extends in the radial direction from the outer peripheral surface of the boss portion 53.

  The boss portion 53 includes a first end surface 56 that faces the mounting portion 33 of the spindle shaft 26 with the contact member 28 interposed therebetween, and a second end surface 57 that faces the head portion 61 of the fixing bolt 41 with the contact member 29 interposed therebetween. have. The first and second end surfaces 56 and 57 are each formed flat and parallel to the end surface 34 of the spindle shaft 26 and the pressing surface 62 of the fixing bolt 41. Further, the boss portion 53 has a through-hole 63 formed in the center of the shaft so that the screw portion of the fixing bolt 41 can be inserted.

  The close contact member 28 is an annular sheet material made of PET, and is sandwiched between the first end surface 56 of the boss portion 53 and the end surface 34 of the spindle shaft 26, so that the cutting blade 27, the spindle shaft 26, Improves adhesion. The contact member 29 is formed in the same manner as the contact member 28, and is sandwiched between the second end surface 57 of the boss portion 53 and the pressing surface 62 of the fixing bolt 41, whereby the cutting blade 27 and the head portion of the fixing bolt 41. Adhesion with 61 is improved.

  The cutting blade 27 is fixed to the tip of the spindle shaft 26 by inserting the screw portion of the fixing bolt 41 through the boss portion 53 and the contact members 28 and 29 and tightening the screw hole 35 of the mounting portion 33 with a predetermined tightening torque. Is done. The predetermined tightening torque is set to a magnitude sufficient to bring the spindle shaft 26 and the cutting blade 27 into close contact so that ultrasonic vibration is stably transmitted to the cutting blade 27. The cutting blade 27 configured as described above functions as a vibration converting member, converts the vibration direction of the ultrasonic vibration transmitted in the axial direction of the spindle shaft 26 into a radial direction, and transmits it to the cutting edge of the cutting blade 51. . In this case, the cutting blade 27 has improved adhesion to the spindle shaft 26 via the adhesion member 28, so that ultrasonic vibration is stably transmitted from the spindle shaft 26 to the cutting blade 27.

  Thus, the cutting unit 4 is processing the workpiece W by ultrasonically vibrating the cutting blade 51 in the radial direction while rotating the cutting blade 27 at a high speed. That is, the cutting unit 4 instantaneously expands and contracts the cutting blade 51 in the radial direction, and repeatedly causes the abrasive grains of the cutting blade 51 to collide with the workpiece W with a large acceleration, thereby making it difficult to cut metal, thick glass, or the like. Even the workpiece W formed of a material can be effectively cut.

  Here, transmission of ultrasonic vibration in the cutting unit will be described with reference to FIG. FIG. 3 is an explanatory diagram of the transmission direction of ultrasonic vibrations in the cutting unit according to the embodiment of the present invention. In FIG. 3, W1 indicates the vibration waveform of ultrasonic vibration transmitted in the axial direction through the spindle shaft, and W2 indicates the vibration waveform of ultrasonic vibration transmitted in the radial direction through the cutting blade.

  As shown in FIG. 3, the vibration waveform W1 is a waveform that is transmitted in the axial direction in the spindle shaft 26 as a longitudinal wave (dense wave), and has a constant cycle including the maximum vibration amplitude point P1 and the minimum vibration amplitude point P2. Amplitude at. At the maximum vibration amplitude point P1, the axial displacement of the spindle shaft 26 is maximum, and at the minimum vibration amplitude point P2, the axial displacement of the spindle shaft 26 is minimum. The minimum vibration amplitude point P2 is a vibration direction conversion point for converting the transmission direction of the ultrasonic vibration from the axial direction to the radial direction, and the cutting blade 27 is disposed at this vibration direction conversion point.

  Therefore, the ultrasonic vibration generated from the ultrasonic transducer 43 is transmitted in the axial direction from the spindle shaft 26 to the cutting blade 27 and is converted in the radial direction by the cutting blade 27. The vibration waveform W2 indicates a waveform that is transmitted in the radial direction by a longitudinal wave (coherent wave) in the cutting blade 27, and is oscillated at a constant cycle including the maximum vibration amplitude point P3 and the minimum vibration amplitude point P4. At the maximum vibration amplitude point P3, the radial displacement of the cutting blade 51 is maximum, and at the minimum vibration amplitude point P4, the radial displacement of the cutting blade 51 is minimum.

  At this time, the diameter of the cutting blade 51 and the frequency of the ultrasonic transducer 43 are adjusted so that the maximum vibration amplitude point P3 of the vibration waveform W2 matches the cutting edge of the cutting blade 51. With this configuration, the cutting blade 51 can be instantaneously expanded and contracted in the radial direction. The thickness of the head 61 of the fixing bolt 41 is set such that the end face 64 on the open end side of the head 61 is the maximum vibration amplitude point P1 of the vibration waveform W1.

  In the present embodiment, the cutting blade 27 as the vibration conversion member is adjusted to the minimum vibration amplitude point (vibration direction conversion point) P2 of the vibration waveform W1, but the present invention is not limited to this configuration. . The cutting blade 27 may be displaced from the minimum vibration amplitude point P2 of the vibration waveform W1 as long as a desired ultrasonic vibration can be obtained with respect to the cutting blade 51. Similarly, the cutting edge of the cutting blade 51 is adjusted to the maximum vibration amplitude point P3 of the vibration waveform W2, but it is not limited to this configuration. The cutting edge of the cutting blade 51 may be displaced from the maximum vibration amplitude point P3 of the vibration waveform W2 as long as a desired ultrasonic vibration can be obtained with respect to the cutting blade 51.

  In the cutting unit 4 described above, replacement work of the cutting blade 27 and the contact members 28 and 29 is periodically performed. At this time, part of the contact members 28 and 29 may be welded to the end surface 34 of the spindle shaft 26 or the pressing surface 62 of the fixing bolt 41, and the unused cutting blade 27 and the spindle shaft 26 that have been replaced are exchanged. Adhesion may not be obtained. Therefore, in the present invention, polishing sheets 65 and 66 (see FIG. 4) are sandwiched between the spindle shaft 26 and the cutting blade 27 and between the fixing bolt 41 and the cutting blade 27, respectively, so that the end face 34 of the spindle shaft 26 is obtained. In addition, the deposits are removed from the pressing surface 62 of the fixing bolt 41.

  Hereinafter, a method for correcting the end surface of the spindle shaft and the pressing surface of the fixing bolt will be described with reference to FIG. FIG. 4 is an explanatory diagram of a method for correcting the end surface of the spindle shaft and the pressing surface of the fixing bolt according to the embodiment of the present invention.

  As shown in FIG. 4, when correcting the end surface of the spindle shaft and the pressing surface of the fixing bolt, polishing sheets 65 and 66 are attached in place of the contact members 28 and 29. The polishing sheets 65 and 66 are annular sheet materials formed of a resin such as polyethylene or PET, and are formed by fixing abrasive grains to the polishing surfaces 67 and 68 with an adhesive or the like. As the abrasive grains, # 1000 to # 2000 such as green carbon and white alundum are used. The polishing sheet 65 is sandwiched between the first end surface 56 of the boss portion 53 and the end surface 34 of the spindle shaft 26 with the polishing surface 67 in contact with the end surface 34 of the spindle shaft 26. The polishing sheet 66 is formed in the same manner as the polishing sheet 65, and the second surface of the pressing surface 62 of the fixing bolt 41 and the second of the boss portion 53 with the polishing surface 68 in contact with the pressing surface 62 of the fixing bolt 41. It is sandwiched between the end face 57.

  Further, the tightening torque of the fixing bolt 41 is smaller than the tightening torque at the time of cutting, for example, around 15 [N · m], and the tightening between the members is weaker than at the time of cutting. In this state, when the ultrasonic vibration is transmitted from the spindle shaft 26 to the cutting blade 27, the vibration direction of the ultrasonic vibration is converted to the radial direction in the cutting blade 27, and the polishing sheet 65, according to the vibration of the cutting blade 27, 66 is vibrated in the radial direction.

  This is because, in the vicinity of the vibration conversion point (minimum vibration amplitude point), the end surface 34 of the spindle shaft 26 is also vibrated in the radial direction, and in addition, the tightening torque of the tightening bolt 41 is small. Then, the polishing surface 67 of the polishing sheet 65 and the end surface 34 of the spindle shaft 26 are slid, and the deposits are removed from the end surface 34 of the spindle shaft 26. Further, the polishing surface 68 of the polishing sheet 66 and the pressing surface 62 of the fixing bolt 41 are slid, and the deposits are removed from the pressing surface 62 of the fixing bolt 41. Thus, the tightening torque of the fixing bolt 41 at the time of end face correction is smaller than the predetermined tightening torque at the time of cutting, and the spindle shaft is caused by the radial ultrasonic vibration of the end face 34 of the cutting blade 27 and the spindle shaft 26. The end surface 34, the polishing sheet 65, the pressing surface 62 of the fixing bolt 41, and the polishing sheet 66 are set so as to be slidable in the radial direction.

  The first and second end surfaces 56 and 57 of the boss portion 53 are formed in parallel to the end surface 34 of the spindle shaft 26 and the pressing surface 62 of the fixing bolt 41, respectively. Therefore, the end surface 34 of the spindle shaft 26 and the pressing surface 62 of the fixing bolt 41 are polished by the polishing sheets 65 and 66 in accordance with the flatness of the first and second end surfaces 56 and 57 of the boss portion 53. Therefore, the flatness of the end surface 34 of the spindle shaft 26 and the pressing surface 62 of the fixing bolt 41 can be appropriately maintained.

  When the end surfaces of the spindle shaft 26 and the fixing bolt 41 are corrected, unused contact members 28 and 29 are attached in place of the polishing sheets 65 and 66, and the end surface correction operation is completed. As a result, the adhesion between the cutting blade 27 and the spindle shaft 26 whose end face 34 is corrected to a flat surface is improved, and stable ultrasonic vibration can be transmitted from the spindle shaft 26 to the cutting blade 27. Further, the adhesion between the cutting blade 27 and the fixing bolt 41 is improved, and the fastening torque of the fixing bolt 41 can be sufficiently applied.

  In the present embodiment, the end surface of the pressing surface 62 of the fixing bolt 41 is corrected together with the end surface 34 of the spindle shaft 26. However, the present invention is not limited to this configuration. When the fixing bolt 41 is exchanged together with the cutting blade 27, it is only necessary to correct the end face of the end face 34 of the spindle shaft 26.

  In this embodiment, the used cutting blade 27 is mounted as a vibration converting member at the time of end face correction. However, the present invention is not limited to this configuration. The vibration converting member may be any member that can transmit the ultrasonic vibration transmitted from the spindle shaft 26 in the radial direction. For example, the vibration converting member may be in the radial direction capable of vibration conversion like the cutting blade 27 as shown in FIG. You may use the dummy blade 69 with the sufficient plane | planar precision of both surfaces which protruded. When the dummy blade 69 is used, the polishing sheets 65 and 66 may be attached in advance to the interface of the dummy blade 69 with the spindle shaft 26 and the fixing bolt 41.

  Further, the end surface of the spindle shaft 26 is corrected by driving only the ultrasonic transducer 43 while the spindle shaft 26 is stopped. For this reason, there is no problem in safety even if the cutting device 1 is operated with a tightening torque smaller than that during cutting.

  Here, the cutting operation by the cutting device 1 and the flow of the end face correction work will be briefly described. When the cutting apparatus 1 is operated, the carry-in / carry-out unit 12 moves forward and backward to draw the workpiece W from the cassette 8 on the cassette mounting table 11 onto the placing table 13. At this time, the workpiece W is guided by the temporary table 13 and positioned in the X-axis direction, and is aligned with the first transfer arm 14 in the Y-axis direction by the amount of movement of the loading / unloading unit 12. The

  Next, the first transfer arm 14 picks up the workpiece W on the temporary placement table 13 and places it on the chuck table 3 at the delivery position. Next, the chuck table 3 is moved toward the machining position facing the cutting blade 27 while the workpiece W is sucked and held. At this time, the chuck table 3 is moved below the imaging unit 18 and a part of the workpiece W is imaged by the imaging unit 18.

  Next, when the chuck table 3 is moved to the machining position, the street 71 of the workpiece W and the cutting blade 51 of the cutting blade 27 are aligned based on the captured image captured by the imaging unit 18. Then, the workpiece W is cut by the cutting blade 51 rotated at high speed as the cutting unit 4 is lowered. At this time, the machining load of the cutting blade 51 is reduced by ultrasonic vibration transmitted in the radial direction.

  When the workpiece W is cut by the cutting blade 27, the chuck table 3 is processed and fed in the X-axis direction, and one street 71 of the workpiece W is processed. Subsequently, the cutting unit 4 is moved by several pitches in the Y-axis direction, and the street 71 adjacent to the cutting blade 51 of the cutting blade 27 is processed. This operation is repeated to process all the streets 71 in the X-axis direction of the workpiece W. Next, the chuck table 3 is rotated 90 degrees by a moving mechanism (not shown), and machining of the street 71 in the Y-axis direction of the workpiece W is started.

  The processed workpiece W is transferred to the cleaning unit 15 by the second transfer arm 17, spinner cleaned in the cleaning unit 15, and then returned to the chuck table 3. Next, the first transfer arm 14 picks up the workpiece W on the chuck table 3 and places it on the temporary placement table 13. Then, the carry-in / carry-out unit 12 moves forward and backward to push the workpiece W into the cassette 8 on the cassette mounting table 11. In the cutting apparatus 1, this operation is repeated.

  In the cutting apparatus 1 operating as described above, when performing the end face correction work of the spindle shaft 26, first, the polishing sheets 65 and 66 are mounted instead of the contact members 28 and 29 as the polishing sheet mounting step. At this time, the polishing surface 67 of one polishing sheet 65 is in contact with the end surface 34 of the spindle shaft 26, and the polishing surface 68 of the other polishing sheet 66 is in contact with the pressing surface 62 of the fixing bolt 41. The fastening torque of the fixing bolt 41 is adjusted to an extent that allows the abrasive sheets 65 and 66 to slide.

  Next, as the polishing step, the ultrasonic vibrator 43 is driven, whereby the end surface 34 of the spindle shaft 26 is polished by sliding between the polishing surface 67 of one polishing sheet 65 and the end surface 34 of the spindle shaft 26. . At the same time, the pressing surface 62 of the fixing bolt 41 is polished by sliding between the polishing surface 68 of the other polishing sheet 66 and the pressing surface 62 of the fixing bolt 41. Since the polishing sheets 65 and 66 are subjected to end surface correction using the first and second end surfaces 56 and 57 of the boss portion 53 as reference surfaces, respectively, the flatness between the end surface 34 of the spindle shaft 26 and the pressing surface 62 of the fixing bolt 41 is increased. It is possible to maintain. Then, after the end face correction, unused contact members 28 and 29 are mounted instead of the polishing sheets 65 and 66, and the end face correction work is completed.

  As described above, according to the spindle shaft end surface correcting method according to the present embodiment, the polishing sheet 65 is mounted between the spindle shaft 26 and the cutting blade 27, and the polishing surface 67 of the polishing sheet 65 and the spindle shaft 26 are aligned. The cutting blade 27 is vibrated in the radial direction by ultrasonic vibration while being in contact with the end face 34. As a result, when a part of the contact member 28 is welded to the end surface 34 of the spindle shaft 26, deposits on the end surface of the spindle shaft are removed by the polishing surface 67 of the polishing sheet 65. As a result, the flatness of the spindle shaft 26 can be maintained, and the adhesiveness between the spindle shaft 26 and the cutting blade 27 can be improved when the cutting process is resumed. Can be transmitted.

  In the above-described embodiment, a part of the close contact member is welded to the end surface of the spindle shaft to remove the deposits, but the present invention is not limited to this structure. It is good also as a structure which suppresses beforehand that a deposit | attachment adheres to the end surface of a spindle shaft, and the press surface of a fixing bolt. In this case, the cutting process is performed while always sandwiching a polishing sheet having a function of a contact member instead of the contact member between the first end surface of the boss portion of the cutting blade and the end surface of the spindle shaft. . As a result, the polishing surface of the polishing sheet is directed to the end surface of the spindle shaft, so that no deposit is generated on the end surface of the spindle shaft. In this case, a polishing sheet of abrasive grains in the vicinity of # 10000 is used so as not to give a grinding force.

  The embodiment disclosed this time is illustrative in all respects and is not limited to this embodiment. The scope of the present invention is shown not by the above description of the embodiments but by the scope of the claims, and is intended to include all modifications within the meaning and scope equivalent to the scope of the claims.

  As described above, the present invention has an effect that it is possible to transmit a stable ultrasonic vibration from the spindle shaft to the cutting blade. In particular, the cutting blade that vibrates ultrasonically makes it difficult for metals, thick glass, and the like. This is useful for a spindle shaft end face correction method of a cutting apparatus suitable for cutting a work material.

1 Cutting Device 2 Housing 3 Chuck Table 4 Cutting Unit (Ultrasonic Spindle)
25 Spindle housing 26 Spindle shaft 27 Cutting blade (vibration converting member)
28, 29 Contact member 34 End surface (end surface of spindle shaft)
41 Fixing bolt (fixing member)
42 Electric motor 43 Ultrasonic vibrator 44 Non-contact power supply unit 51 Cutting blade 52 Base unit 53 Boss unit 54 Flange unit 56 First end surface 57 Second end surface 61 Head 62 Press surface 65, 66 Polishing sheet 67, 68 Polishing surface 69 Dummy blade (vibration converting member)
W Workpiece

Claims (3)

A spindle shaft, an ultrasonic vibrator that is disposed on the spindle shaft and generates ultrasonic vibrations, and a spindle housing that rotatably supports the spindle shaft;
An annular cutting blade is brought into contact with the end surface of the spindle shaft through a close contact member, and is clamped and fixed by a fastening torque by a fixing member, and the workpiece is cut by the cutting blade that is ultrasonically vibrated in the radial direction. A spindle shaft end face correction method in the ultrasonic spindle of
The cutting blade includes a boss portion having a first end surface facing the end surface of the spindle shaft and a second end surface facing the fixing member, and an annular cutting blade attached to the boss portion. ,
The contact member between the end surface of the spindle shaft and the first end surface of the boss portion is removed, and a vibration converting member that converts ultrasonic vibrations in a radial direction and the end surface of the spindle shaft A polishing sheet mounting step of mounting a polishing sheet, and abutting the polishing surface of the polishing sheet with the end surface of the spindle shaft by the fixing member with a torque smaller than the tightening torque;
After the polishing sheet mounting step, ultrasonic polishing is oscillated to vibrate the vibration converting member in the radial direction, thereby sliding the polishing sheet on the end surface of the spindle shaft and polishing the end surface of the spindle shaft. And a polishing step, comprising: a spindle shaft end face correction method.   In the polishing sheet mounting step, the tightening torque is further applied after mounting the polishing sheet by bringing the polishing surface into contact with the end surface of the fixing member between the end surface of the fixing member and the vibration converting member. 2. The spindle shaft end face correcting method according to claim 1, wherein the cutting blade and the two abrasive sheets are clamped and fixed to the end face of the spindle shaft by the fixing member with a smaller torque.   The spindle shaft end face correction method according to claim 1, wherein the vibration conversion member is a cutting blade.

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