JP2011200941A - Polishing tool, device and method of polishing using the same - Google Patents

Abstract

PROBLEM TO BE SOLVED: To evenly polish a surface of an article to be polished with respect to a polishing tool, a device and method of polishing using the same.SOLUTION: The polishing tool 1 includes a body 2 for polishing a face of the article T to be polished. The body 2 includes a recess 8, and a plurality of communication passages 10 that communicate the inner part with the outer part of the recess 8. One ends of a plurality of the communication passages 10 are communicated with the inner part of the recess 8, and the other ends are positioned outer than the one ends in the body 2 in a plan perspective view.

Description

  The present invention relates to a polishing jig, a polishing apparatus using the same, and a polishing method.

  In the manufacturing process of metal products and ceramic products, polishing is performed to flatten and mirror the surface. In this polishing process, for example, a slurry having abrasive grains and liquid for polishing is supplied between a grindstone and an object to be polished, and the surface of the object to be polished (hereinafter, “surface to be polished”) is rotated by rotating the grindstone. (Refer also to Patent Document 1). The slurry is usually supplied between the grindstone and the surface to be polished, and is discharged to the outside, thereby moving on the surface to be polished.

JP 2007-222960 A

  However, the polishing object has, for example, a concave shape, and when polishing the bottom surface inside the concave shape, it is difficult to discharge the slurry to the outside of the concave shape. The slurry will stay. In particular, when polishing with the grindstone recess facing the surface to be polished, the slurry stays in the recess, and the abrasive grains in the slurry settle in the recess and deposit unevenly on the surface to be polished, As a result, there arises a problem that the surface to be polished cannot be uniformly polished.

  Accordingly, there is a need for a polishing jig that can polish the surface of an object more uniformly, a polishing apparatus using the same, and a polishing method.

  A polishing jig according to an aspect of the present invention includes a main body that polishes the surface of an object, and the main body includes a recess and a plurality of communication passages that connect the inside and the outside of the recess. The plurality of communication paths have one end communicating with the inside of the recess and the other end positioned outside the one end when the main body is seen through the plane.

  A polishing apparatus according to an aspect of the present invention includes the polishing jig, a support unit that supports the object, and a supply unit that supplies a polishing fluid onto the surface of the object.

  A polishing method according to an aspect of the present invention includes a main body that polishes the surface of an object, the main body includes a recess, and a plurality of communication paths that connect the inside and the outside of the recess, The plurality of communication passages is a polishing method using a polishing jig in which one end communicates with the inside of the recess and the other end is positioned outside the one end when the main body is seen through a plane. Installing the main body on the surface of the object; supplying a polishing fluid onto the surface of the object; and passing the polishing fluid into the recess through the plurality of communication passages. And rotating the main body while flowing in and out of the recess.

  According to the polishing jig according to one aspect of the present invention, the surface of the object can be polished more uniformly.

  According to the polishing apparatus according to one aspect of the present invention, the surface of an object can be more uniformly polished.

  According to the polishing method of one embodiment of the present invention, the surface of the object can be polished more uniformly.

(A) is a perspective view of the grinding | polishing jig | tool which concerns on one Embodiment of this invention, (b) is a perspective view which shows the grinding | polishing apparatus using the grinding | polishing jig | tool shown to (a). (A) is sectional drawing of a grinding | polishing apparatus, (b) is the expanded sectional view which expanded a part of (a). FIG. 2 is a plan perspective view of the main body of FIG. (A), (c) is the elements on larger scale which showed typically the state where the object is ground using the polish jig concerning one embodiment of the present invention, and (b), (d) (A), (c) is a plane perspective view showing the configuration of the polishing jig shown in (a), (c) when the polishing surface is viewed in plan with the rotation direction. (A), (b) is the top view which showed an example of the locus | trajectory of the grinding | polishing jig | tool which moves on a target object. (A), (b) is a plane perspective view which shows the variation when the main body is planarly seen with the surface for polishing as the front. (A)-(e) is sectional drawing of the main body for demonstrating the form of a communicating path.

  Embodiments of the present invention will be described below with reference to the drawings.

  A polishing jig according to an embodiment of the present invention will be described. As shown in FIGS. 1 and 2, the polishing jig 1 according to the present embodiment has a main body 2 that polishes the surface of an object T. The main body 2 has a surface (hereinafter, also referred to as “polishing surface”) 4 that acts on the polishing of the surface to be polished Ts, facing the surface to be polished Ts of the object T. The main body 2 is transmitted with the rotational driving force by the rotating shaft 3 and rotates together with the rotating shaft 3. Here, it is assumed that the object T is a concave container body, and the bottom surface inside the concave shape is the surface to be polished Ts. In addition, the object T is fixed to the support base 6.

  The polishing apparatus is rotationally driven by the rotating shaft 3 and the support base 6 that supports the polishing jig 1 and the object T, the supply unit Sp that supplies the polishing fluid onto the surface Ts of the object T to be polished. And a driving force transmission portion Rt for transmitting force. Here, the supply part Sp and the driving force transmission part Rt are shown only in FIG. 2A and are omitted in the other figures.

As shown in FIG. 2, the main body 2 includes a recess 8 and a plurality of communication passages 10 that connect the recess 8 and the outside. One end of each communication passage 10 communicates with the inside of the recess 8, and the other end is located outside the one end when the main body 2 is seen through the plane. Preferably, as shown in FIG. 2, the entire communication path 10 is provided on the side of the recess 8. Specifically, the plurality of communication passages 10 include a plurality of grooves 10 a (10 a _{1 to} 10 a ₆ ) provided in the polishing surface 4 of the main body 2 and a plurality of through holes 10 b (10 b ₁ to 10 b provided in the main body 2. 10b ₆ ). The plurality of grooves 10a lead to the openings 8a of the recesses 8 provided in the polishing surface 4, and the plurality of through holes 10b penetrate the main body 2 between the recesses 8 and the outside. The plurality of grooves 10 a are at the same position in the direction perpendicular to the polishing surface 4. The plurality of through holes 10b are at the same position in the direction perpendicular to the polishing surface 4, and are at positions different from the plurality of grooves 10a. Here, the plurality of through holes 10b are formed along a plane that is parallel to the polishing surface 4 and that is different from the surface on which the plurality of grooves 10a are formed (here, the polishing surface 4). In this specification, when not distinguished each groove _10a 1 10 A _6, referred to as "grooves 10a ', when not distinguished from each other through-holes _10b 1 _{~10b 6,} referred to as" through-hole 10b " .

  Next, these communication paths 10 will be described in detail. As shown in FIG. 3, the plurality of grooves 10 a are arranged along the outer circumferential direction when the main body 2 is viewed in plan with the polishing surface 4 as a front surface, and from the recess side end to the external side end. The direction of the inclination is aligned. The plurality of through-holes 10b are arranged along the outer peripheral direction when the main body 2 is seen through a plane with the polishing surface 4 as a front surface, and the direction of inclination from the recess side end to the external side end is It's all there.

  Further, when the main body 2 is seen in a plan view with the polishing surface 4 as a front surface, the groove 10am (m is an integer of 1 to 6) and the through hole 10bm (m is an integer of 1 to 6) are provided on the outer side from the recess side end. It is provided so as to be inclined with respect to the corresponding virtual straight line Am among the virtual straight lines that radiate from the recess 8 toward the end. Further, the inclination directions of the groove 10am and the through hole 10bm are opposite to each other with respect to the virtual straight line Am. Here, the groove 10am and the through hole 10bm have outer end portions on both sides of the virtual straight line Am across the virtual straight line Am, and the outer side end portion from the portion where the groove 10am and the through hole 10bm intersect the virtual straight line Am. The distance between the groove 10am and the through hole 10bm and the imaginary straight line Am is increased.

  Moreover, it is preferable that the groove | channel 10am and the through-hole 10bm are located in line symmetry with respect to the said virtual straight line Am. For example, as shown in FIG. 3, the groove 10a1 and the through hole 10b1 are positioned symmetrically with respect to a virtual straight line A1 indicated by a dotted line. By locating the groove 10a and the through-hole 10b symmetrically on both sides of the virtual straight line in this way, the temporal variation of the flow rate when the polishing fluid F flows into and out of the recess 8 Can be suppressed. For this reason, even if the polishing jig 30 moves while rotating, the inflow amount of the polishing fluid F into the concave portion 8 and the outflow amount from the concave portion 8 are constant. That is, changes over time such as the inflow amount changing each time it flows in and the outflow amount changing every time it flows out are suppressed, and as a result, the surface to be polished Ts can be polished more uniformly.

  Furthermore, if the shapes of the grooves 10a and the through holes 10b are all the same, and the number of the grooves 10a and the number of the through holes 10b are the same, the inflow and the outflow of the polishing fluid F are performed under the same conditions. The temporal change of the inflow amount and the outflow amount of the working fluid F with respect to the concave portion 8 is further suppressed, and the surface to be polished Ts can be polished more uniformly. However, when the easiness of accumulation of the polishing fluid F in the recess 8 and the easiness of discharge from the recess 8 differ depending on the polishing method and the type of the polishing fluid F, the shape of the groove 10a and the through hole 10b and It is also possible to vary the inflow amount and the outflow amount of the polishing fluid F by varying at least one of the numbers.

  When the polishing surface 4 is circular, the virtual straight line Am can be regarded as a straight line perpendicular to the tangent of the circle, and the groove 10am and the through hole 10bm can be disposed.

  Next, a method of using the polishing jig 1 when the object T is polished using the polishing jig 1 will be described. A polishing fluid F is supplied into the concave shape of the object T. The main body 2 of the polishing jig 1 is rotated by the rotating shaft 3. As shown in FIG. 4, when the main body 2 of the polishing jig 1 rotates in the D1 direction, the direction from the outer end of the groove 10a to the end of the recess is along the rotation direction. F flows into the recess 8 in the f1 direction through the groove 10a. Then, the polishing fluid F flowing into the recess 8 is discharged to the outside through the through hole 10b. At this time, since the direction from the outer end of the through hole 10b to the end of the recess is opposite to the rotation direction D1, the inflow of the polishing fluid F from the through hole 10b is suppressed.

  On the other hand, when the main body 2 rotates in the direction D2, which is opposite to the direction D1, the direction from the outer end of the through hole 10b to the end of the recess is along the rotation direction. It flows into the concave portion 8 in the f1 direction from the through hole 10b. Then, the polishing fluid F that has flowed into the recess 8 flows out of the groove 10a in the f2 direction. At this time, since the direction from the outer end of the groove 10a to the end of the recess is opposite to the rotational direction D2, the inflow of the polishing fluid F from the groove 10a is suppressed.

  As described above, when the communication path 10 is provided in the main body 2, one end of the communication path 10 communicates with the inside of the recess 8, and the other end is positioned outside the one end when the main body 2 is seen through the plane. When the main body 2 is rotated, the polishing fluid F is forced to flow into the recess 8 through the communication hole 10 and further flows out of the recess 8. It is possible to prevent the polishing fluid F from staying between the polishing surface 4 of the polishing jig 1 and the surface to be polished Ts of the object T.

  Further, when the main body 2 is seen through the plane, a plurality of communication holes 10 having the same function of inflow of the polishing fluid into the recess 8 or out of the recess 8 are arranged along the outer peripheral direction, When the direction of inclination from the recess side end portion to the outer side end portion is aligned, the inflow or outflow is performed more smoothly, and therefore the circulation between the recess 8 and the outside is performed more smoothly. Therefore, the polishing fluid is prevented from staying on the surface to be polished, and the surface to be polished can be more uniformly polished. In addition, about the some communicating hole 10 used for discharge | emission from the recessed part 8 of polishing fluid, while they are arranged along an outer peripheral direction, the direction of the inclination from a recessed part side edge part to an external side edge part has gathered. It is more preferable that the polishing fluid stays in the recess 8.

  The polishing method using the polishing member 1 described above includes a step of installing the main body 2 on the surface to be polished Ts of the object T, and a step of supplying the polishing fluid F onto the surface to be polished Ts of the object T. And a step of rotating the main body 2 while allowing the polishing fluid F to flow into and out of the recess 8 through the plurality of communication passages 10.

  In the polishing fluid F, abrasive grains G are dispersed. The polishing surface 4 of the polishing jig 1 and the polished surface Ts of the object T slide through the polishing fluid F, and the polished surface Ts is polished. The main body 2 rotates together with the rotating shaft 3 and the locus 22 of the center of the polishing surface moves on the surface to be polished Ts as shown in FIGS. 5 (a) and 5 (b), for example.

  In FIG. 5A, the rotation center of the main body 2 of the polishing jig 1 moves from the start point 22a to the end point 22b while drawing a spiral trajectory 22. At this time, the sliding start end portion of the polishing surface 4 is at a position 24a, and the sliding end portion is at a position 24b.

  In FIG. 5B, the rotation center of the main body 2 moves while bending from the start point 22a to the end point 22b. At this time, the sliding start end portion of the polishing surface 4 is at a position 24a and the sliding end portion is at a position 24b.

  According to the polishing jig 1 according to the present embodiment, the polishing fluid F stays between the polishing surface 4 of the polishing jig 1 and the surface to be polished Ts of the object T when polishing. This can be suppressed. Therefore, it is possible to suppress the abrasive grains G in the polishing fluid F from being settled and depositing unevenly on the surface to be polished. Accordingly, the abrasive grains G are not depleted and the abrasive grains G are also prevented from staying, and the abrasive grains G spread more uniformly on the surface to be polished Ts, so that the entire surface to be polished Ts can be more uniformly polished. it can. Here, uniform polishing means polishing so that the unevenness of the surface to be polished Ts is eliminated as much as possible, and reducing the flatness value of the surface to be polished Ts.

  In FIG. 3, the corresponding grooves 10a and through-holes 10b are provided so as to intersect when the main body 2 is seen through the plane, but may be provided so as to be separated from each other. In this case, each of the groove 10am and the through hole 10bm extends from the recess side end portion (the portion closest to the virtual straight line Am) toward the external end portion so that the distance from the virtual straight line Am increases.

  Further, the grooves 10a and the through-holes 10b are not necessarily the same in shape, and may be partially different. Furthermore, the number of the grooves 10a and the number of the through holes 10b are not necessarily the same, and may be different. However, if the shapes of the grooves 10a and the through holes 10b are all the same, and the number of the grooves 10a and the number of the through holes 10b are the same, the inflow and the outflow of the polishing fluid F are performed under the same conditions. The convection of the working fluid F becomes smooth, and the surface to be polished Ts can be polished more uniformly.

  6A and 6B are plan perspective views showing variations when the main body 2 is seen through the plane with the polishing surface 4 as the front. Also in these cases, when the main body 2 is seen in a plan view with the polishing surface 4 as the front surface, the groove 10a and the through hole 10b are virtual straight lines that radially extend from the recess 8 toward the external end. Of these, they are provided so as to be inclined with respect to the corresponding virtual straight line Am.

  FIG. 6A shows the polishing surface 4 in which the grooves 10a and the through holes 10b are formed in a spiral shape. Thus, the groove 10a and the through hole 10b formed in the polishing surface 4 may be not only linear but also curved.

  FIG. 6B shows a case where the polishing surface 4 has a polygonal shape instead of a circular shape. Thus, the shape of the polishing surface 4 is not limited to a circular shape, and various shapes such as a polygonal shape can be selected.

The communication path 10 may have various forms as long as one end communicates with the inside of the recess 8 and the other end is positioned outside the one end when the main body 2 is seen through the plane. According to this configuration, the polishing fluid F flows out of the recess 8 due to centrifugal force. In addition, the polishing fluid F also flows into the recess 8.

FIG. 7 is a cross-sectional view of the main body 2 for explaining the form of the communication passage 10. In FIG. 7, the communication path 10 is indicated by a thick line for the sake of simplicity. 7A to 7E, the communication path 10 has one end 25a communicating with the inside of the recess 8, and the other end 25b is located outside the one end 25a when the main body 2 is seen through the plane in the direction of arrow K. Is located. With this configuration, one end 2
5 a may be present at any position on the inner surface of the recess 8, and the other end 25 a may be present at any position on the outer surface of the main body 2. For example, in (a), one end 25 a of the communication path 10 is located on the side surface of the recess 8, and the other end 25 b is located on the side surface of the main body 2. Moreover, in this structure, the communicating path 10 inclines toward the other end 25b from the one end 25a. In (b), the communication path 10
One end 25 a is located on the side surface of the recess 8, and the other end 25 b is located on the upper surface of the main body 2 facing the polishing surface 4. In (c), one end 25 a of the communication path 10 is located on the bottom surface of the recess 8, and the other end 25 b is located on the side surface of the main body 2. In (d), one end 25 a of the communication path 10 is located on the bottom surface of the recess 8, and the other end 25 b is located on the top surface of the main body 2. In (e), one end 25 a of the communication path 10 is located on the bottom surface of the recess 8, and the other end 25 b is located on the side surface of the polishing surface 4.

These communication paths 10 shown in FIGS. 7A to 7E can be used both for inflow of the polishing fluid F into the recess 8 and for discharging the polishing fluid F from the recess 8. is there. Therefore, any combination of FIG. 7A to FIG. 7E can be used as the communication path for inflow of the polishing fluid F into the recess 8 and the communication path for discharge of the polishing fluid F from the recess 8. Good. However, polishing fluid F
For the smooth movement, for example, as shown in FIGS. 7A, 7 </ b> D, and 7 </ b> E, the communication path 10 does not have a corner and is preferably linear or curved. . Further, as shown in FIG. 2, the communication path 10 preferably extends from one end 25 a to the other end 25 b along a plane parallel to the polishing surface 4. 7B and 7D, since the other end 25b is located on the upper surface of the main body 2, in order to use this as the inflow communication path, the level of the polishing fluid F is: It is necessary to be located above the upper surface of the main body 2.

  Further, a part of the communication path 10 may be a groove of the polishing surface 4. For example, a part 26 a of the communication path 10 in FIG. 7B may be provided on the polishing surface 4.

  2 and FIG. 7A, the one end 25a of the communication path 10 is located on the side surface of the recess 8, that is, the inner peripheral surface of the recess 8, and the other end of the communication path 10 when viewed in plan. 25 b is located on the outer surface of the main body 2. 2 and 7A, the communication path 10 passes through the main body 2.

  In addition, the above-described communication path 10 shown in FIG. 7 is also arranged along the outer peripheral direction when seen in a plan view, and the direction of inclination from the concave side end to the external side end is aligned. Is preferred.

  In the above description, the surface on which the groove 10a is formed and the surface on which the through hole 10b is formed are made parallel, but they are not necessarily parallel. Further, the plurality of grooves 10a are not necessarily provided on the same plane, and the plurality of through holes 10b are not necessarily provided on the same plane. However, if at least one of the plurality of grooves 10a and the plurality of through-holes 10b is formed on the same plane, the turbulent flow of the polishing fluid F moving in the recess 8 is suppressed, so the surface to be polished Ts and the polishing surface The amount of abrasive grains G intervening with 4 is always constant to such an extent that it does not adversely affect the polishing, and hardly changes with time. For this reason, the whole surface to be polished Ts is polished more uniformly. Further, when the plurality of grooves 10a and the plurality of through holes 10b are formed on the same plane, and the surface on which the plurality of grooves 10a are formed and the surface on which the plurality of through holes 10b are formed are parallel, The amount of abrasive grains G interposed between the polishing surface Ts and the polishing surface 4 is further less likely to change over time, and the entire surface to be polished Ts is polished more uniformly.

  Further, the main body 2 described above has the grooves 10a and the through holes 10b as the communication holes 10, but the inflow and outflow communication portions 10 for the recess 8 of the polishing fluid F are all grooves. Alternatively, all may be through holes.

T: Object Ts: Surface to be polished 2: Main body 3: Rotating shaft 4: Polishing surface 6: Support base 8: Recessed portion 8a: Opening 10: Communication path 10a, 10a _{1 to} 10a ₆ : Groove 10b, 10b _{1 to} 10b ₆ : Through-hole 22: Trajectory 22a: Start point 22b: End point 24a: Sliding start end part 24b: Sliding end part Rt: Driving force transmission part Sp: Supply part F: Polishing fluid G: Abrasive grains D1, D2: Rotation direction f1: Inflow direction f2: Outflow direction

Claims (13)

  A main body for polishing the surface of the object, the main body having a recess and a plurality of communication paths communicating the inside and the outside of the recess, the plurality of communication paths having one end of the recess A polishing jig that leads to the inside and has the other end positioned outside the one end when the main body is seen through the plane.   When viewed through, the one end is located on the inner peripheral surface of the recess, the other end is located on the outer surface of the main body, and the communication path penetrates from the concave portion to the outer surface of the main body. The polishing jig according to claim 1. The main body has a polishing surface for polishing the object,
The recess has an opening in the polishing surface;
The polishing jig according to claim 1, wherein the plurality of communication passages have grooves provided on the polishing surface that communicate with the opening.   The polishing jig according to any one of claims 1 to 3, wherein the plurality of communication paths have through holes provided in the main body.   The plurality of communication passages have a plurality of first communication passages that are arranged along the outer peripheral direction when seen in a plan view, and that are inclined in the direction from the recess-side end portion to the external-side end portion. Item 5. The polishing jig according to any one of Items 1 to 4. The main body has a polishing surface for polishing the object,
The plurality of communication paths are a plurality of first communication paths that are in the same position in the direction perpendicular to the polishing surface, and positions that are the same in the vertical direction and different from the first communication path. The polishing jig according to claim 1, further comprising a plurality of second communication passages.   The plurality of first communication passages are formed along a plane parallel to the polishing surface, the plurality of second communication passages are parallel to the polishing surface, and the first communication passage is The polishing jig according to claim 6, wherein the polishing jig is formed along a surface different from the formed surface.   When the polishing surface is viewed from the front, the first communication path and the second communication path are inclined with respect to an imaginary straight line extending radially from the recess toward the external end from the recess side end. The polishing jig according to claim 6 or 7, wherein an inclination of the first communication path and the second communication path is reverse with respect to the virtual straight line.   The polishing jig according to claim 8, wherein the first communication path and the second communication path are positioned in line symmetry with respect to the virtual straight line.   When the polishing surface is viewed from the front, the first communication path and the second communication path are positioned symmetrically with respect to a corresponding straight line among a plurality of straight lines extending radially from the recess, and the first communication path Each of the passage and the second communication passage extends so as to increase a distance from the straight line from a portion that intersects or is closest to the straight line toward the outer end. The polishing jig according to 8. When viewed through a plane with the polishing surface as the front, the main body is circular,
The first communication path and the second communication path are positioned symmetrically with respect to each straight line perpendicular to the tangent line of the circle, and each of the first communication path and the second communication path intersects the straight line or the The polishing jig according to claim 8, wherein the polishing jig extends from a portion closest to the straight line toward an outer side end portion so that a distance from the straight line increases. A polishing jig according to claim 1 to 11,
A support part for supporting the object;
A polishing apparatus comprising: a supply unit that supplies a polishing fluid onto the surface of the object. A main body for polishing the surface of the object, the main body having a recess and a plurality of communication passages communicating the inside and the outside of the recess; A polishing method using a polishing jig that leads to the inside and has the other end positioned outside the one end when the main body is seen through a plane.
Installing the body on the surface of the object;
Supplying a polishing fluid onto the surface of the object;
And a step of rotating the main body while allowing the polishing fluid to flow into and out of the recess through the plurality of communication passages.

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