JP2011191158A5 - - Google Patents
Download PDFInfo
- Publication number
- JP2011191158A5 JP2011191158A5 JP2010056993A JP2010056993A JP2011191158A5 JP 2011191158 A5 JP2011191158 A5 JP 2011191158A5 JP 2010056993 A JP2010056993 A JP 2010056993A JP 2010056993 A JP2010056993 A JP 2010056993A JP 2011191158 A5 JP2011191158 A5 JP 2011191158A5
- Authority
- JP
- Japan
- Prior art keywords
- light
- image
- spectral characteristic
- characteristic acquisition
- openings
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000003595 spectral effect Effects 0.000 claims description 12
- 238000003384 imaging method Methods 0.000 claims description 8
- 230000003287 optical effect Effects 0.000 claims description 7
- 238000011156 evaluation Methods 0.000 claims description 3
- 238000004737 colorimetric analysis Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010056993A JP5402740B2 (ja) | 2010-03-15 | 2010-03-15 | 分光特性取得装置、画像評価装置及び画像形成装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2010056993A JP5402740B2 (ja) | 2010-03-15 | 2010-03-15 | 分光特性取得装置、画像評価装置及び画像形成装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011191158A JP2011191158A (ja) | 2011-09-29 |
| JP2011191158A5 true JP2011191158A5 (enExample) | 2013-02-21 |
| JP5402740B2 JP5402740B2 (ja) | 2014-01-29 |
Family
ID=44796256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2010056993A Expired - Fee Related JP5402740B2 (ja) | 2010-03-15 | 2010-03-15 | 分光特性取得装置、画像評価装置及び画像形成装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JP5402740B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102519594B (zh) * | 2012-01-04 | 2013-10-16 | 北京航空航天大学 | 用于大口径平行光束光谱辐照度的测量系统及方法 |
| JP2013142595A (ja) * | 2012-01-10 | 2013-07-22 | Ricoh Co Ltd | 分光特性取得装置、画像評価装置及び画像形成装置 |
| JP5880053B2 (ja) | 2012-01-12 | 2016-03-08 | 株式会社リコー | 分光特性取得装置及び画像形成装置 |
| JP6278625B2 (ja) * | 2012-07-30 | 2018-02-14 | キヤノン株式会社 | 測色装置及びそれを備える画像形成装置 |
| JP6311267B2 (ja) * | 2013-05-10 | 2018-04-18 | 株式会社リコー | 分光特性取得装置、画像評価装置、画像形成装置 |
| JP6292052B2 (ja) * | 2014-06-25 | 2018-03-14 | 株式会社リコー | 画像特性計測装置、画像評価装置、画像形成装置 |
| EP3606021B1 (en) * | 2017-03-24 | 2023-10-25 | Nippon Sheet Glass Company, Limited | Image sensor unit and image reading device |
| TWI831078B (zh) * | 2020-12-11 | 2024-02-01 | 國立中央大學 | 應用影像還原的光學系統及光學影像處理方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09178564A (ja) * | 1995-12-21 | 1997-07-11 | Shimadzu Corp | 分光測定装置 |
| JP2000301697A (ja) * | 1999-04-20 | 2000-10-31 | Mitsubishi Heavy Ind Ltd | 絵柄色計測装置及び絵柄色計測方法 |
| JP4135603B2 (ja) * | 2003-09-12 | 2008-08-20 | オムロン株式会社 | 2次元分光装置及び膜厚測定装置 |
| JP2009008471A (ja) * | 2007-06-27 | 2009-01-15 | Canon Inc | 分光測定装置及びそれを用いた光学装置 |
-
2010
- 2010-03-15 JP JP2010056993A patent/JP5402740B2/ja not_active Expired - Fee Related
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| JP2011191158A5 (enExample) | ||
| JP5646604B2 (ja) | 物体を3次元的に測定するための方法および測定装置 | |
| US8537332B2 (en) | Projection exposure tool for microlithography with a measuring apparatus and method for measuring an irradiation strength distribution | |
| KR102424799B1 (ko) | 초분광 이미징 계측을 위한 시스템 및 방법 | |
| US8842272B2 (en) | Apparatus for EUV imaging and methods of using same | |
| US11309202B2 (en) | Overlay metrology on bonded wafers | |
| JP5884021B2 (ja) | マルチスペクトル撮像装置およびマルチスペクトル撮像方法 | |
| JP2008268387A (ja) | 共焦点顕微鏡 | |
| CN103592108A (zh) | Ccd芯片调制传递函数测试装置及方法 | |
| US9448343B2 (en) | Segmented mirror apparatus for imaging and method of using the same | |
| TW200612082A (en) | Apparatus for measuring imaging spectrograph | |
| JP2006332586A5 (enExample) | ||
| CN104145205A (zh) | 包括测量光学元件的测量系统的投射曝光设备 | |
| JP5279280B2 (ja) | 形状測定装置 | |
| US10094774B2 (en) | Scattering measurement system and method | |
| JP2009532672A5 (enExample) | ||
| CN102288385A (zh) | 一种二维成像器件光电响应特性标定方法 | |
| US20140374603A1 (en) | Profilometry systems and methods based on absorption and optical frequency conversion | |
| CN111324006B (zh) | 检测光刻掩模的区域部分上的结构的检测装置及设备 | |
| JP2005302825A5 (enExample) | ||
| TWI749145B (zh) | 光譜測定裝置及光譜測定方法 | |
| CN103234634B (zh) | 一种实现极紫外波段多能点光谱分辨的成像系统及其应用 | |
| US20080116402A1 (en) | Method and a device for measurement of scattered radiation at an optical system | |
| RU2560245C1 (ru) | Способ мультиспектральной визуализации и устройство для измерения критического размера наноструктур | |
| JP2006322710A (ja) | 分光測定装置 |