JP2011191158A5 - - Google Patents

Download PDF

Info

Publication number
JP2011191158A5
JP2011191158A5 JP2010056993A JP2010056993A JP2011191158A5 JP 2011191158 A5 JP2011191158 A5 JP 2011191158A5 JP 2010056993 A JP2010056993 A JP 2010056993A JP 2010056993 A JP2010056993 A JP 2010056993A JP 2011191158 A5 JP2011191158 A5 JP 2011191158A5
Authority
JP
Japan
Prior art keywords
light
image
spectral characteristic
characteristic acquisition
openings
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010056993A
Other languages
Japanese (ja)
Other versions
JP2011191158A (en
JP5402740B2 (en
Filing date
Publication date
Application filed filed Critical
Priority to JP2010056993A priority Critical patent/JP5402740B2/en
Priority claimed from JP2010056993A external-priority patent/JP5402740B2/en
Publication of JP2011191158A publication Critical patent/JP2011191158A/en
Publication of JP2011191158A5 publication Critical patent/JP2011191158A5/ja
Application granted granted Critical
Publication of JP5402740B2 publication Critical patent/JP5402740B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Description

前記目的を達成するために請求項1に記載の分光特性取得装置は、光照射手段によって被測定物へ照射された光の反射光を通過させる複数の開口を含むピンホールアレイと、前記ピンホールアレイの前記複数の開口を通過した光をそれぞれ結像させる結像手段と、前記結像手段で結像させた光をそれぞれ回折させる回折手段と、前記回折手段回折させた光をそれぞれ受光する受光手段とを有し、前記結像手段が正立等倍結像光学系のアレイであることを特徴としている。 The spectroscopic characteristics acquisition unit of claim 1 in order to achieve the object, a pinhole array comprising multiple openings by the light irradiating means Ru passes the reflected light of the irradiated light to the measurement object, wherein an imaging means for the light passing through the plurality of openings of the pinhole array each Ru is focused, and the diffraction means for diffracting each were imaged light by the imaging means, the light is diffracted in the previous SL diffraction means the has a light receiving means for receiving, respectively, a, is characterized in that before Kiyuizo means is an array of erecting equal-magnification optical system.

請求項2に記載の分光特性取得装置は、前記ピンホールアレイの前記複数の開口に前記被測定物からの光の反射光を縮小して結像させる縮小集光手段を有し、該縮小集光手段は少なくとも像側テレセントリック特性を有することを特徴としている。 Spectroscopic characteristics acquisition unit of claim 2 has a reduced focusing means for focusing said by reducing the reflected light of the object to be measured or these light to the plurality of openings of the pinhole array, the fused small The light condensing means has at least image side telecentric characteristics.

請求項3に記載の分光特性取得装置は、前記ピンホールアレイの前記複数の開口に前記被測定物の複数の位置からの反射光の光をそれぞれ集光させる複数の集光手段よりなる等倍集光手段を有することを特徴としている。 Magnification is spectroscopic characteristics acquisition unit of claim 3, comprising a plurality of focusing means for respectively condensing the light of reflected light from a plurality of locations of the object to be measured in the plurality of openings of the pinhole array It has a condensing means.

請求項4に記載の分光特性取得装置は、前記等倍集光手段と前記ピンホールアレイの前記複数の開口とが、同一の光学部材の入射面と出射面に配置されていることを特徴としている。 The spectroscopic characteristics acquisition unit of claim 4, said equal-magnification focusing means, wherein a plurality of openings of the pinhole array, but that it is arranged on the incident surface and an exit surface of the same optical element It is a feature.

請求項5に記載の分光特性取得装置は、前記等倍集光手段の前記複数の集光手段の像側開口数が、前記結像手段を構成する前記正立等倍結像光学系単体の物体側開口数の2倍以上であることを特徴としている。 The spectral characteristic acquisition apparatus according to claim 5, wherein an image-side numerical aperture of the plurality of condensing units of the equal magnification condensing unit is a single unit of the erecting equal magnification imaging optical system constituting the imaging unit. It is characterized by being at least twice the object-side numerical aperture.

請求項7に記載の画像評価装置は、請求項1乃至6のいずれか一項に記載の分光特性取得装置と、該分光特性取得装置と被測定物との相対位置を変化させる移動手段と、前記分光特性取得装置からの出力情報と、に基づいて、被測定物の複数の位置での分光分布又は測色結果を算出する演算手段とを有することを特徴としている。
An image evaluation apparatus according to a seventh aspect includes a spectral characteristic acquisition apparatus according to any one of the first to sixth aspects, and a moving unit that changes a relative position between the spectral characteristic acquisition apparatus and the object to be measured. and output information from the spectroscopic characteristics acquisition unit, based on, is characterized by having a calculating means for calculating a spectral distribution or colorimetry results at a plurality of positions of the object to be measured.

Claims (8)

照射手段によって被測定物へ照射された光の反射光を通過させる複数の開口を含むピンホールアレイと、
前記ピンホールアレイの前記複数の開口を通過した光をそれぞれ結像させる結像手段と、
前記結像手段で結像させた光をそれぞれ回折させる回折手段と
記回折手段回折させた光をそれぞれ受光する受光手段とを有し
記結像手段が正立等倍結像光学系のアレイであることを特徴とする分光特性取得装置。
A pinhole array comprising multiple openings Ru passes the reflected light of light emitted to the object to be measured by the light irradiation means,
An imaging unit that Ru is respectively image light that has passed through the plurality of openings of the pinhole array,
Diffraction means for diffracting the light imaged by the imaging means ;
Anda receiving means for receiving the light is diffracted respectively in the previous SL diffraction means,
Spectroscopic characteristics acquisition unit, characterized in that before Kiyuizo means is an array of erecting equal-magnification optical system.
前記ピンホールアレイの前記複数の開口に前記被測定物からの光の反射光を縮小して結像させる縮小集光手段を有し、該縮小集光手段は少なくとも像側テレセントリック特性を有することを特徴とする請求項1記載の分光特性取得装置。 Have reduced condensing means for focusing said by reducing the reflected light of the object to be measured or these light to the plurality of openings of the pinhole array, the fused small condensing means to at least the image-side telecentricity The spectral characteristic acquisition apparatus according to claim 1. 前記ピンホールアレイの前記複数の開口に前記被測定物の複数の位置からの反射光の光をそれぞれ集光させる複数の集光手段よりなる等倍集光手段を有することを特徴とする請求項1記載の分光特性取得装置。 Claims, characterized in that it has a magnification focusing means consisting of a plurality of focusing means for respectively condensing the light of reflected light from a plurality of locations of the object to be measured in the plurality of openings of the pinhole array 1. The spectral characteristic acquisition device according to 1. 前記等倍集光手段と前記ピンホールアレイの前記複数の開口とが、同一の光学部材の入射面と出射面に配置されていることを特徴とする請求項3記載の分光特性取得装置。 Said magnification focusing means, wherein a plurality of openings of the pinhole array, but spectroscopic characteristics acquisition unit according to claim 3, characterized in that it is arranged on the incident surface and an exit surface of the same optical element . 前記等倍集光手段の前記複数の集光手段の像側開口数が、前記結像手段を構成する前記正立等倍結像光学系単体の物体側開口数の2倍以上であることを特徴とする請求項3又は4記載の分光特性取得装置。 The image side numerical aperture of the plurality of condensing means of the equal magnification condensing means is at least twice the object side numerical aperture of the erecting equal magnification imaging optical system alone constituting the image forming means. The spectral characteristic acquisition apparatus according to claim 3 or 4, 前記等倍集光手段が、正立等倍結像光学系のアレイであることを特徴とする請求項3記載の分光特性取得装置。   4. The spectral characteristic acquisition apparatus according to claim 3, wherein the equal magnification condensing means is an array of erecting equal magnification imaging optical systems. 請求項1乃至6のいずれか一項に記載の分光特性取得装置と、該分光特性取得装置と被測定物との相対位置を変化させる移動手段と、前記分光特性取得装置からの出力情報と、に基づいて、被測定物の複数の位置での分光分布又は測色結果を算出する演算手段とを有することを特徴とする画像評価装置。 The spectral characteristic acquisition device according to any one of claims 1 to 6, a moving unit that changes a relative position between the spectral characteristic acquisition device and the object to be measured, output information from the spectral characteristic acquisition device , And an arithmetic means for calculating a spectral distribution or a colorimetric result at a plurality of positions of the object to be measured. 記録媒体上に画像を形成して出力する画像形成装置において、
請求項7に記載の画像評価装置を搭載し、前記画像評価装置により画像形成装置から出力される記録媒体上の画像の評価を行うことを特徴とする画像形成装置。
In an image forming apparatus that forms and outputs an image on a recording medium,
An image forming apparatus comprising the image evaluation apparatus according to claim 7, wherein an image on a recording medium output from the image forming apparatus is evaluated by the image evaluation apparatus.
JP2010056993A 2010-03-15 2010-03-15 Spectral characteristic acquisition device, image evaluation device, and image forming device Active JP5402740B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010056993A JP5402740B2 (en) 2010-03-15 2010-03-15 Spectral characteristic acquisition device, image evaluation device, and image forming device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010056993A JP5402740B2 (en) 2010-03-15 2010-03-15 Spectral characteristic acquisition device, image evaluation device, and image forming device

Publications (3)

Publication Number Publication Date
JP2011191158A JP2011191158A (en) 2011-09-29
JP2011191158A5 true JP2011191158A5 (en) 2013-02-21
JP5402740B2 JP5402740B2 (en) 2014-01-29

Family

ID=44796256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010056993A Active JP5402740B2 (en) 2010-03-15 2010-03-15 Spectral characteristic acquisition device, image evaluation device, and image forming device

Country Status (1)

Country Link
JP (1) JP5402740B2 (en)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102519594B (en) * 2012-01-04 2013-10-16 北京航空航天大学 Measuring system and method for large-caliber parallel light beam spectral irradiance
JP2013142595A (en) * 2012-01-10 2013-07-22 Ricoh Co Ltd Spectroscopic characteristic acquisition device, image evaluation device, and image forming apparatus
JP5880053B2 (en) 2012-01-12 2016-03-08 株式会社リコー Spectral characteristic acquisition apparatus and image forming apparatus
JP6278625B2 (en) * 2012-07-30 2018-02-14 キヤノン株式会社 Color measuring device and image forming apparatus having the same
JP6311267B2 (en) * 2013-05-10 2018-04-18 株式会社リコー Spectral characteristic acquisition device, image evaluation device, image forming device
JP6292052B2 (en) * 2014-06-25 2018-03-14 株式会社リコー Image characteristic measuring device, image evaluation device, image forming device
WO2018173946A1 (en) * 2017-03-24 2018-09-27 日本板硝子株式会社 Image sensor unit and image reading device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH09178564A (en) * 1995-12-21 1997-07-11 Shimadzu Corp Spectrometric system
JP2000301697A (en) * 1999-04-20 2000-10-31 Mitsubishi Heavy Ind Ltd Device and method for measuring pattern color
JP4135603B2 (en) * 2003-09-12 2008-08-20 オムロン株式会社 Two-dimensional spectroscopic device and film thickness measuring device
JP2009008471A (en) * 2007-06-27 2009-01-15 Canon Inc Optical spectrometer and optical apparatus using same

Similar Documents

Publication Publication Date Title
JP2011191158A5 (en)
JP5646604B2 (en) Method and measuring apparatus for measuring an object three-dimensionally
US8537332B2 (en) Projection exposure tool for microlithography with a measuring apparatus and method for measuring an irradiation strength distribution
US8842272B2 (en) Apparatus for EUV imaging and methods of using same
US10018560B2 (en) System and method for hyperspectral imaging metrology
JP2010161261A5 (en)
JP2016535288A5 (en)
JP5884021B2 (en) Multispectral imaging apparatus and multispectral imaging method
JP2006332586A5 (en)
JP2008268387A (en) Confocal microscope
TW200612082A (en) Apparatus for measuring imaging spectrograph
EP2972226B1 (en) Segmented mirror apparatus for imaging and method of using the same
US20120133944A1 (en) Optical device and electronic apparatus
CN104145205A (en) Projection exposure apparatus comprising a measuring system for measuring an optical element
CN109827657B (en) Method and device for measuring grating constant of plain laser material
JP2009168593A (en) Shape measuring device
JP2008215833A (en) Apparatus and method for measuring optical characteristics
US11309202B2 (en) Overlay metrology on bonded wafers
US10094774B2 (en) Scattering measurement system and method
US20140374603A1 (en) Profilometry systems and methods based on absorption and optical frequency conversion
CN106996862A (en) A kind of object lens detection means measured based on point spread function
JP2005302825A5 (en)
JP2016102679A (en) Spectroscopic measurement device
TW201829991A (en) Optical spectrum measuring apparatus and optical spectrum measuring method
US20080116402A1 (en) Method and a device for measurement of scattered radiation at an optical system