JP2011184790A - Method and apparatus for producing barrier film - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method and an apparatus for producing a barrier film, wherein abnormality of the barrier performance of the barrier film can be obtained in real time to take action to the abnormality quickly. <P>SOLUTION: In the apparatus for producing the barrier film, the barrier film is formed while conveying a long flexible film W in a vacuum film formation unit and a stepped roller R is used for conveying the flexible film W. The film formation unit includes: a deformation distance detection means 72 which is arranged above the stepped roller that is disposed at the least in the succeeding stage after the barrier film is formed, and which is used for detecting a deformation distance in which the flexible film is deformed in the central part 52 of the stepped roller, in a non-contact state; a comparison means 74 for comparing the detected value with the preset reference value of the deformation distance L; and a determination means 76 for determining that the barrier performance of the deformed portion of the barrier film is rejectable when the detected value is larger than the preset reference value. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a barrier film manufacturing method and a manufacturing apparatus, and more particularly to a barrier film manufacturing method and a manufacturing apparatus for conveying a flexible film with a stepped roller in a film forming apparatus under reduced pressure.

  In various devices such as optical devices, display devices such as liquid crystal displays and organic EL displays, semiconductor devices, and thin film solar cells, barrier films are used for parts and parts that require moisture barrier properties and gas barrier properties such as oxygen. ing. Furthermore, as an example familiar to daily life, in the packaging of food, clothing, electronic parts, etc., the packaging material may require moisture barrier properties and gas barrier properties such as oxygen, and gas barrier films are used.

  For example, a moisture-proof gas barrier film is formed by forming an inorganic barrier film, such as silicon oxide or silicon nitride, on the surface of a flexible film such as a plastic film or a metal film by a vacuum film formation method. It is usually produced by filming.

  In order to efficiently perform film formation while ensuring high productivity by the vacuum film formation method, it is preferable to continuously form a barrier film on a long flexible film.

  As an apparatus for carrying out such a vacuum film-forming method, a barrier film is formed on a roll-like long flexible film fed from a feed roll, and then the flexible film is rolled again with a take-up roll. There is known a so-called roll-to-roll type film forming apparatus that is wound around a film.

  This roll-to-roll film forming apparatus maintains a predetermined path passing through a film forming chamber (film forming unit) for forming a film on a flexible film by a gas phase film forming method such as plasma CVD. The flexible film is conveyed by a conveying roller disposed in a film forming chamber under reduced pressure.

  However, if the barrier film surface on which the flexible film is formed, for example, the inorganic film surface is in contact with the roller surface, scratches such as pinholes are likely to occur on the barrier film surface. Thereby, the barrier film manufactured will be inferior goods.

  Therefore, if you do not want to damage the barrier film surface of the flexible film, use a stepped roller with holding parts whose both ends are larger in diameter than the center part, and use the width direction of the flexible film. It is performed that only both ends are wrapped around and supported by a holding unit. In this case, since both ends of the flexible film are cut before the final product, the quality of the barrier film is not affected.

  By the way, as a general method for evaluating the performance of the barrier film, there is a Ca reaction method. Patent Document 1 proposes a method for detecting the position of a pinhole formed on a film surface.

JP 11-218523 A

  However, since the Ca reaction method is a destructive inspection method, it cannot be used during the production of a barrier film. Further, Patent Document 1 is a method of detecting an electrode in contact with a film carrying the electrode. In the case of a barrier film, contact with a solid object such as an electrode itself produces a defective product such as a scratch. Thereby, there also exists a problem that patent document 1 cannot be used during manufacture of a barrier film.

  Therefore, at present, in the manufacture of barrier films, it is the actual situation that abnormalities in the barrier performance of barrier films cannot be grasped during manufacturing. From such a background, it is desired to grasp in real time an abnormality in the barrier performance of the barrier film even during the production of the barrier film.

  The present invention has been made in view of such circumstances, and even when the barrier film is being manufactured, the abnormality in the barrier performance of the barrier film can be grasped in real time. It aims at providing the manufacturing method and manufacturing apparatus of a barrier film which can be manufactured.

  In order to achieve the above object, the method for producing a barrier film according to claim 1 of the present invention conveys a long flexible film in a film forming apparatus under a reduced pressure while applying it to the surface of the flexible film. A barrier film that suppresses the passage of water vapor or gas is formed, and the flexible film is transported at both end portions by holding portions having a larger diameter than the central portion, and the flexible film is provided in the holding portion. In the method of manufacturing a barrier film using a stepped roller that wraps and holds and conveys the flexible film, the flexible film is located at the center of the stepped roller at least after the barrier film is formed. A deformation distance detecting step for detecting the deformation distance to be deformed in a non-contact manner, a comparison step for comparing the detected detection value with a set reference value for the deformation distance, and as a result of the comparison, the detected value is the set reference value. A determination step that determines that the barrier performance of the barrier film part that has caused the deformation is unacceptable, and grasps abnormalities in the barrier performance of the barrier film during manufacturing. To do.

  In order to prevent the barrier film surface formed on the flexible film from coming into contact with the roller surface, the present inventor needs to use a stepped roller having a depressed central portion, but when passing through the stepped roller. In addition, it was found that when the flexible film is deformed due to slack or the like and falls into the central depression, the barrier performance of the barrier film deteriorates. Causes of the deformation of the flexible film when passing through the stepped roller include fluctuations in the conveyance tension of the flexible film W, static electricity generated between the stepped roller R and the flexible film W, and the like. .

  Based on this knowledge, the present invention is configured so that abnormalities in the barrier performance can be grasped in real time even during the production of the barrier film.

  According to the present invention, in the deformation distance detection step, the deformation distance of the flexible film with respect to the center portion of the stepped roller (the distance of the largest deformation portion) is detected without contact. Then, the detected value is compared with the set reference value of the deformation distance in the comparison step, and when the detected value is larger than the set reference value in the determination step, the barrier performance of the barrier film portion where the deformation has occurred is poor. Is determined. Thereby, abnormality of the barrier performance of a barrier film can be grasped | ascertained during manufacture.

  Therefore, since the abnormality of the barrier performance of the barrier film can be grasped in real time even during the production of the barrier film, it is possible to quickly cope with the abnormality. As a countermeasure against the abnormality, for example, a barrier film portion where a deformation distance larger than a set reference value has been removed after the manufacture.

  Note that the set reference value varies somewhat depending on the flexibility of the flexible film, the material and thickness that affect the hardness of the barrier film, the distance between the holding portions of the stepped rollers, etc. This can be obtained by conducting a preliminary test. However, in general, it is possible to grasp an abnormality in the barrier property by setting the reference value to 3 mm.

  In the present invention, it is preferable to use a non-contact sensor that scans in the axial direction of the stepped roller in the deformation distance detecting step.

  Any non-contact type sensor such as an ultrasonic sensor or a transmissive LED sensor does not contact the barrier film, so that the deformation distance can be detected without damaging the barrier film.

  In the present invention, in the deformation distance detecting step, a colorant is applied to a central portion of the stepped roller, and whether or not the colorant is transferred to the barrier film is detected by an image sensor. And

  This is a method for detecting the deformation distance without using a sensor. For example, the step between the holding portion and the central portion of the stepped roller may be set to 3 mm. Thereby, if the colorant is transcribe | transferred to the flexible film, it turns out that it deform | transformed exceeding the reference value.

  In this invention, it is preferable to convey the said flexible film at 10 m / min or less.

  This is because when the conveyance speed of the flexible film is higher than 10 m / min, the deformation distance is detected due to the influence of static electricity generated by the conveyance of the flexible film even under a reduced pressure. This is because the values are likely to vary. Thereby, the detection stability of the deformation distance is deteriorated, and the detection accuracy is lowered.

  In order to achieve the above object, a barrier film manufacturing apparatus according to a sixth aspect of the present invention conveys a long flexible film in a film forming apparatus under reduced pressure while applying it to the surface of the flexible film. A barrier film that suppresses the passage of water vapor or gas is formed, and the flexible film is transported at both end portions by holding portions having a larger diameter than the central portion, and the flexible film is provided in the holding portion. In the barrier film manufacturing apparatus using the stepped roller that wraps and holds the film, the flexible film is provided in the film forming apparatus and provided at least on the stepped roller disposed after the barrier film is formed. A deformation distance detecting means for detecting a deformation distance by which the adhesive film is deformed toward the center of the stepped roller in a non-contact manner, a comparison means for comparing the detected detection value and a set reference value for the deformation distance, and the comparison As a result, When the detected value is larger than the set reference value, the barrier film is provided with a barrier performance detection mechanism that determines that the barrier performance of the barrier film portion that has undergone the deformation is rejected, and the barrier film It is characterized by grasping abnormalities in the barrier performance during manufacturing.

  Claim 6 constitutes the present invention as an apparatus.

  According to the barrier film manufacturing method and the manufacturing apparatus of the present invention, even when the barrier film is being manufactured, it is possible to grasp the abnormality of the barrier performance of the barrier film in real time. it can.

The whole block diagram which shows an example of the manufacturing apparatus of the barrier film of this invention Perspective view explaining stepped roller Schematic diagram showing an example of the barrier performance detection mechanism Explanatory drawing when an ultrasonic sensor is used as the deformation distance detection means Explanatory drawing when transmissive LED sensor is used as deformation distance detection means

  Hereinafter, preferred embodiments of the barrier film production method and production apparatus of the present invention will be described in detail.

  FIG. 1 is an overall configuration diagram showing an example of a barrier film manufacturing apparatus according to the present invention.

  In the present embodiment, a so-called roll is formed by forming a barrier film on the long flexible film W fed from the feed roll 20 in the film forming chamber 14 and then winding the roll film again on the take-up roll 30. -An example of a roll-to-roll method will be described.

  As the flexible film W in this Embodiment, various resin films, such as PET film, or various metal sheets, such as an aluminum sheet, can be used, for example.

  The film forming apparatus 10 is an apparatus for continuously forming a barrier film on a long flexible film W, and basically includes a delivery chamber 12 having a delivery roll 20 for delivering the flexible film W; A film forming chamber (chamber) 14 for forming a barrier film on the flexible film W, a winding chamber 16 having a winding roll 30 for winding the flexible film W on which the barrier film is formed, and a vacuum exhaust unit 32 And the control unit 36. The operation of each element in the film forming apparatus 10 is controlled by the control unit 36.

  A partition wall 15 a is provided between the delivery chamber 12 and the film forming chamber 14, and a partition wall 15 b is provided between the film forming chamber 14 and the winding chamber 16. A slit-like opening 15c through which the flexible film W passes is formed in each partition wall 15a, 15b.

  The delivery chamber 12, the film formation chamber 14, and the winding chamber 16 are connected to the vacuum exhaust unit 32 via a pipe 34. The vacuum exhaust unit 32 is provided with a vacuum pump such as a dry pump and a turbo molecular pump. The control unit 36 controls the vacuum exhaust unit 32 to control the inside of the delivery chamber 12, the film formation chamber 14, and the winding chamber 16 to a predetermined pressure reduction degree.

  In addition, each of the delivery chamber 12, the film formation chamber 14, and the winding chamber 16 is provided with a pressure sensor (not shown) for measuring the internal pressure, and the measured value of the pressure sensor is sent to the control unit 36 to be vacuumed. The exhaust unit 32 is feedback-controlled.

  In the film forming chamber 14, a barrier film is continuously formed on the surface of the flexible film while the flexible film is conveyed. The film forming chamber 14 is mainly provided with two stepped rollers 24 and 28, a drum 26, and a film forming unit 40. The stepped roller 24 and the stepped roller 28 are arranged to face each other at a predetermined interval with the drum 26 interposed therebetween, and the flexible film W is stretched over the stepped roller 24, the drum 26, and the stepped roller 28 in this order.

  The drum 26 is provided below the space H between the stepped roller 24 and the stepped roller 28 and is electrically grounded (grounded). The drum 26 is formed in a cylindrical shape and is rotatably supported via a rotation shaft. The drum 26 has a predetermined film formation position with respect to the film forming unit 40 that forms a barrier film on the flexible film W by rotating the flexible film W around the surface (circumferential surface). Hold on. The drum 26 may be provided with a temperature adjusting unit (not shown) for adjusting the temperature.

  As the film forming unit 40, for example, a vapor deposition method that forms a film using plasma CVD can be suitably employed. The film forming unit 40 is mainly configured by a film forming electrode 42, a high frequency power supply 44, a source gas supply unit 46 and a partition unit 48, and the control unit 36 described above controls the high frequency power supply 44 and the source gas supply unit 46 of the film formation unit 40. Is controlled.

  The film forming electrode 42 is disposed with a predetermined gap S with respect to the drum 26 around which the flexible film W is wound, and is connected to the high frequency power supply 44. A high frequency voltage is applied to the film forming electrode 42 by the high frequency power source 44. As the high-frequency power source 44, a known high-frequency power source used for film formation by plasma CVD can be used. Further, the high-frequency power supply 44 is not particularly limited in the maximum output, and can be appropriately selected / set according to the barrier film to be formed.

  The film forming electrode 42 is formed in, for example, a rectangular flat plate shape in plan view, and a plurality of holes (not shown) are formed at equal intervals on a wide surface, and the wide surface is arranged facing the drum 26. The The film forming electrode 42 is generally called a shower electrode. The film formation electrode 42 is not limited to a flat plate shape, and may be any film that can be formed by plasma CVD, such as a configuration in which a plurality of electrodes divided in the axial direction of the drum 26 are arranged. Various electrode configurations are available. However, the film-forming electrode 42 is preferably a flat-plate shower electrode having a rectangular shape in plan view when viewed from the viewpoint of the electric field with respect to the flexible film W and the uniformity of plasma and the like. In addition, the film forming electrode 42 and the high frequency power supply 44 may be connected via a matching box for impedance matching, if necessary.

  The source gas supply unit 46 supplies source gas for forming a barrier film in the plasma generation space, that is, the gap S between the drum 26 and the film forming electrode 42, and the source gas supplied through the pipe 47 is supplied. Gas is blown into the gap S from the plurality of holes of the film forming electrode 42.

In the present embodiment, as the source gas, for example, when forming a SiO ₂ film, a TEOS gas and an oxygen gas can be suitably used as the active species gas.

  In the source gas supply unit 46, not only the source gas but also various gases used in plasma CVD, such as an inert gas such as argon gas or nitrogen gas, and an active species gas such as oxygen gas, are used as the source gas. You may supply to the clearance gap S with gas. Thus, when introducing multiple types of gas, each gas may be mixed and supplied by the same piping, or each gas may be supplied by a different piping. Furthermore, the types or introduction amounts of the source gas or other inert gas and active species gas can also be appropriately selected / set according to the type of film to be formed, the target film formation rate, or the like.

The partition part 48 (partition part) partitions the film forming electrode 42 in the film forming chamber 14.
The partition 48 includes, for example, a pair of partition plates 48a, and is disposed so that the film formation electrode 42 is sandwiched between the pair of partition plates 48a.

  Each partition plate 48 a is a plate-like member extending in the length direction of the drum 26, and an end portion on the drum 26 side is bent to the opposite side to the film forming electrode 42. The partition 48 partitions the gap S, that is, the plasma generation space in the film forming chamber 14.

  Next, the conveyance device 50 that conveys the flexible film W in the delivery chamber 12, the film formation chamber 14, and the winding chamber 16 under reduced pressure as described above will be described.

  The transport device 50 mainly includes a plurality of stages that form a transport path for the flexible film W that passes through the film forming chamber 14 between the feed roll 20, the take-up roll 30, and the feed roll 20 and the take-up roll 30. It is composed of attached rollers 60, 24, 28, 31.

  Of the plurality of stepped rollers 60, 24, 28, 31, at least the rollers 28, 31 that come into contact with the barrier film surface after forming the barrier film on the flexible film W are stepped rollers R. There is a need. However, for the reference numerals 60 and 24, it is also possible to use normal conveying rollers having a flat roller surface.

  The take-up roll 30 is formed as a drive roller that conveys the flexible film W. The delivery roll 20 and the stepped rollers 60, 24, 28, 31 may be driven to rotate by conveying the flexible film W, or may be synchronized with the rotation of the take-up roll 30 with a driving force. . Note that the transport device 50 may be provided with tension adjusting means (for example, a dancer roller) that adjusts the tension during transport of the flexible film W in the middle of the transport path.

  FIG. 2 is a perspective view illustrating a stepped roller.

  As shown in FIG. 2, the stepped roller R has a holding part 54 having a larger diameter than the central part 52 at both ends, and a flexible film W is wound around the holding part 54 and conveyed. be able to. Thereby, even when the barrier film surface of the flexible film W is conveyed while facing the stepped roller R, the barrier film surface can be prevented from coming into contact with the stepped roller R. Strictly speaking, both ends of the barrier film come into contact with the holding portion 54 of the stepped roller R, but this portion is cut before the final product, so that the quality of the barrier film is not affected.

  In the conveyance of the flexible film W by the stepped roller R, the inventor in the longitudinal direction of the manufactured barrier film although the barrier film surface of the flexible film W does not contact the stepped roller R. I found that there are places where the barrier properties are partially degraded.

  The inventor needs to use the stepped roller R in which the central portion 52 is depressed so that the barrier film surface formed on the flexible film W does not come into contact with the roller surface. When the degree to which the flexible film W is deformed and falls into the depression of the central portion 52 when passing through R is large, the barrier performance of the manufactured barrier film is deteriorated. As a cause of the deformation of the flexible film W when passing through the stepped roller R, there is a variation in the conveyance tension of the flexible film. That is, if the conveyance tension is too weak, the flexible film is loosened and deformed toward the central portion 52 side, and even if the conveyance tension is too strong, the flexible film becomes wrinkles and deformed toward the central portion 52 side. Further, it may be deformed by static electricity generated between the stepped roller R and the flexible film W.

  Therefore, in the present invention, the barrier performance detection mechanism 70 that can grasp the abnormality of the barrier performance in real time even during the production of the barrier film is incorporated in the film forming apparatus 10.

  The barrier performance detection mechanism 70 is provided in the stepped roller R at least after the barrier film is formed on the flexible film W in the film forming apparatus 10, and the flexible film W is provided on the stepped roller R. The deformation distance detecting means 72 for detecting the deformation distance deformed to the center portion 52 side of the contactlessly, the comparison means 74 for comparing the detected detection value with the set reference value of the deformation distance, and the detected value is compared. And determining means 76 for determining that the barrier performance of the deformed barrier film portion is unacceptable when the value is larger than the set reference value.

  Therefore, in the case of the film forming apparatus 10 of FIG. 1, it is preferable to incorporate the barrier performance detecting mechanism 70 into the two stepped rollers 28 and 31 after the barrier film is formed.

  The barrier performance detection mechanism 70 shown in FIGS. 3 and 4 is a schematic diagram when an ultrasonic sensor is used as the deformation distance detection means 72.

  As shown in FIG. 3, a rail 78 is provided in parallel with the direction of the axis O of the stepped roller R, and an ultrasonic sensor 72 is suspended from the rail 78 supported by a self-propelled monorail 80. Thereby, the deformation distance L of the flexible film W conveyed to the stepped roller R is detected while scanning in the width direction of the flexible film W. The deformation distance L was set to 0 mm in the horizontal state S (two-dot chain line) in FIG. 3 in which the flexible film W was not deformed at all.

  The ultrasonic sensor 72 continuously monitors the deformation distance L, and the result is input to the computer 82 via a signal cable or wireless. The computer 82 compares the detection value detected by the comparison means 74 with the set reference value of the deformation distance, and the deformation occurs when the detection value is larger than the reference value by the determination means 76 based on the comparison result. It is determined that the barrier performance of the barrier film portion is unacceptable.

  In this case, it is preferable that the relationship between the delivery time and the delivery distance of the flexible film W delivered from the delivery roll 20 and the relationship between the delivery time and the monitoring time at the deformation distance detecting means 72 are associated with each other. Thereby, since the rejection part of the manufactured barrier film is known, a rejection part can be excluded after manufacture.

  The set reference values include the flexibility of the flexible film W, the material and thickness that affect the hardness of the barrier film, the distance between the holding portions 54 of the stepped roller R, the conveyance speed of the flexible film W, and the like. Therefore, it is preferable to obtain an accurate set reference value by conducting a preliminary test using an experimental apparatus or an actual apparatus. However, in general, it is possible to grasp an abnormality in the barrier property by setting the reference value to 3 mm.

  As a detection condition of the deformation distance detecting means 72 described above, it is preferable that the conveyance speed of the flexible film W is 10 m / min or less in the film forming apparatus 10 under a reduced pressure. This is because if the conveyance speed of the flexible film W exceeds 10 m / min, the deformation distance is likely to fluctuate due to the influence of static electricity generated by the conveyance of the flexible film W.

  FIG. 5 is a schematic diagram when a transmissive LED sensor is used as the deformation distance detecting means 72.

  As shown in FIG. 5, the transmissive LED sensor 72 includes a light emitting unit 84 that emits parallel LED light and a light receiving unit 86 that receives the emitted LED light. The light emitting unit 84 and the light receiving unit 86 are disposed to face each other in a direction orthogonal to the axial direction of the stepped roller R. And parallel LED light is arrange | positioned so that it may pass through the level | step difference space of the holding part 54 of the stepped roller R, and the center part 52. FIG. Thereby, the deformation distance of the flexible film W with respect to the center part 52 of the stepped roller R can be detected in a non-contact manner.

  In FIG. 5, the rail 78, the monorail 80, and the computer 82 described in FIG. 3 are not shown. However, the detected value detected by the transmissive LED sensor 72 is compared with the set reference value, and when the detected value is larger than the reference value, it is determined that the barrier performance of the barrier film portion that has caused the deformation distance is unacceptable. The same is true for what to do.

  In addition, although not particularly illustrated, a coating means for applying the colorant to the central portion 52 of the stepped roller R and an image sensor for determining whether the colorant has been transferred to the flexible film W are formed. It is also possible to detect the deformation distance by incorporating the coloring material on the flexible film W by incorporating it in the apparatus 10. In this case, the step distance between the holding portion 54 and the central portion 52 of the stepped roller R is made to coincide with a set reference value (for example, 3 mm), and if there is a colorant attached, the set reference value is exceeded and a deformation distance is generated. Judge that

  Specific examples of the present invention will be described below.

  An ultrasonic type and transmissive LED type deformation distance detecting means 72 is provided at the position of the stepped roller 31 of the film forming apparatus 10 shown in FIG.

  As the deformation distance detecting means 72 of the ultrasonic sensor, a sensor head (UD-20 type) and an amplifier unit (UD-500) manufactured by KEYENCE were used. As the deformation distance detecting means 72 of the transmissive LED sensor, a fiber unit (FU-5F) and a digital fiber amplifier (FS-V30) manufactured by KEYENCE were used.

  In the stepped roller R, the step between the holding portion 54 and the central portion 52 is 4 mm, and the distance between the holding portions 54 is set to 450 mm, which is slightly smaller than the width of the flexible film W. In the film forming chamber 14 of the film forming apparatus 10, a silicon oxide barrier film was formed on the flexible film W so as to have a film thickness of 50 nm.

  In the test, the relationship between the delivery time and the delivery distance of the flexible film W delivered from the delivery roll 20 and the relationship between the delivery time and the monitoring time in the deformation distance detecting means 72 are correlated with each other, Samples 1 to 8 shown below were prepared by cutting off a portion of the barrier film that was deformed after production. And the barrier performance was investigated by Ca reaction method about each sample 1-8. The evaluation level of the barrier performance by the Ca reaction method is as follows.

    ◎… Good barrier performance.

    ○… Although the barrier performance is inferior to ◎, it is a pass level.

    Δ: There is a slight problem with the barrier performance.

×… There is a problem in the barrier performance.
(Embodiment 1) Embodiment 1 uses the above ultrasonic sensor as the deformation distance detecting means 72.

As can be seen from the results in Table 1, the barrier performance deteriorates as the deformation distance L at which the flexible film W is deformed toward the central portion 52 of the stepped roller R when passing through the stepped roller R increases. It is considered that this is because when the deformation distance L increases, the normal structure of the barrier film having a high film quality is broken by the deformation stress at the time of deformation. When the deformation distance L was 3 mm, the barrier performance was x and the test was rejected.
(Embodiment 2) Embodiment 2 uses the transmissive LED sensor as the deformation distance detecting means 72. FIG.

  From the comparison between sample 2 in table 1 and sample 6 in table 2 and the comparison between sample 3 in table 1 and sample 7 in table 2, there is a difference in deformation distance and barrier performance, but due to the difference in detection method Inferred. However, in both the results of Table 1 and Table 2, when the deformation distance L was 3 mm, the barrier performance was x and the test was rejected.

  (Embodiment 3) Embodiment 3 examines how the detection stability changes when the degree of vacuum of the film forming apparatus 10 and the conveyance speed of the flexible film W are changed as detection conditions of the deformation distance detecting means 72. It was. For the detection stability, the ultrasonic sensor described above was used as the deformation distance detecting means 72.

  The repeated test was performed by repeating the test five times while adjusting the conveyance tension so that the sample 4 evaluated as x in Example 1 was obtained. The case where the same deformation distance L was 3 mm in all 5 times was evaluated as ◯, and the case where the result was other than 3 mm more than once was expressed as Δ.

As can be seen from the results in Table 3, when air is present in the film forming apparatus 10 at atmospheric pressure, accompanying air is generated by the conveyance of the flexible film W regardless of the conveyance speed, and the deformation distance L is likely to fluctuate.
As a result, the detection repeatability (detection stability) deteriorates.

  On the other hand, in the case of 50 Pa or less which is a normal pressure reduction degree in the film forming apparatus when manufacturing the barrier film, it can be seen that it is influenced by the conveyance speed. In particular, when the conveyance speed of the flexible film W exceeds 10 m / min, the stability of detection decreases, but this is considered to be because the influence of static electricity increases unlike the accompanying wind under atmospheric pressure. Is done.

  In addition, the said test does not limit the pressure reduction degree of the film-forming apparatus of this invention to 50 Pa or less, Of course, it can apply also when it is 50 Pa or more.

  DESCRIPTION OF SYMBOLS 10 ... Film-forming apparatus, 12 ... Delivery chamber, 14 ... Film-forming chamber, 16 ... Winding chamber, 20 ... Delivery roll, 24, 28, 31, 60 ... Guide roller, 26 ... Drum, 30 ... Winding roller, 32 DESCRIPTION OF SYMBOLS ... Vacuum exhaust part, 34 ... Pipe, 36 ... Control part, 40 ... Film-forming part, 42 ... Film-forming electrode, 44 ... High frequency power supply, 46 ... Raw material gas supply part, 47 ... Pipe, 48 ... Partition part, 48a ... Partition Plate 50: Conveying device 52 ... Center part of stepped roller 54 ... Holding part of stepped roller 70 ... Barrier performance detecting mechanism 70, 72 ... Deformation distance detecting means (ultrasonic type, laser type), 74 ... Comparison means 76 ... Determination means 78 ... Rail 80 ... Monorail 82 ... Computer 84 ... Light emitting part 86 ... Light receiving part W ... Flexible film R ... Stepped roller

Claims (6)

While transporting a long flexible film in a film forming apparatus under reduced pressure, a barrier film that suppresses the passage of water vapor or gas is formed on the surface of the flexible film. In the method of manufacturing a barrier film using a stepped roller that has a holding part having a larger circular diameter than the center part at both ends for conveyance, and wraps and holds the flexible film around the holding part.
A deformation distance detecting step for detecting, without contact, a deformation distance at which the flexible film is deformed toward the center of the stepped roller, at least about the stepped roller disposed after the barrier film is formed;
A comparison step of comparing the detected detection value and a set reference value of the deformation distance;
A determination step of determining that the barrier performance of the deformed barrier film portion is unacceptable when the detected value is larger than the set reference value as a result of the comparison, and a barrier of the barrier film A method for producing a barrier film, wherein abnormalities in performance are grasped during production.   The method for producing a barrier film according to claim 1, wherein the deformation distance detecting step uses a non-contact type sensor that scans in the axial direction of the stepped roller.   The method for producing a barrier film according to claim 2, wherein the sensor is one of an ultrasonic sensor and a transmissive LED sensor.   2. The deformation distance detecting step, wherein a colorant is applied to a central portion of the stepped roller, and whether or not the colorant is transferred to the barrier film is detected by an image sensor. Manufacturing method of the barrier film.   The said flexible film is conveyed at 10 m / min or less, The manufacturing method of the barrier film in any one of Claims 1-4 characterized by the above-mentioned. While transporting a long flexible film in a film forming apparatus under reduced pressure, a barrier film that suppresses the passage of water vapor or gas is formed on the surface of the flexible film. In the barrier film manufacturing apparatus using a stepped roller that has a holding part having a larger circular diameter than the central part at both ends for conveyance, and wraps and holds the flexible film around the holding part.
In the film forming apparatus, provided at least on the stepped roller disposed after the barrier film is formed, the deformation distance at which the flexible film is deformed toward the central portion side of the stepped roller is contactless. Deformation distance detecting means for detecting;
A comparison means for comparing the detected detection value with a set reference value of the deformation distance;
As a result of the comparison, when the detection value is larger than the set reference value, a barrier performance detection mechanism comprising: a determination unit that determines that the barrier performance of the deformed barrier film portion is unacceptable. An apparatus for producing a barrier film, characterized in that an abnormality in the barrier performance of the barrier film is detected during production.

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