JP2011176665A - Resonator element, resonator and oscillator - Google Patents

Resonator element, resonator and oscillator Download PDF

Info

Publication number
JP2011176665A
JP2011176665A JP2010039785A JP2010039785A JP2011176665A JP 2011176665 A JP2011176665 A JP 2011176665A JP 2010039785 A JP2010039785 A JP 2010039785A JP 2010039785 A JP2010039785 A JP 2010039785A JP 2011176665 A JP2011176665 A JP 2011176665A
Authority
JP
Japan
Prior art keywords
resonator element
base
axis
notch
crystal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2010039785A
Other languages
Japanese (ja)
Other versions
JP5732728B2 (en
JP2011176665A5 (en
Inventor
Akinori Yamada
明法 山田
Shuhei Yoshida
周平 吉田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Seiko Epson Corp
Original Assignee
Seiko Epson Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Seiko Epson Corp filed Critical Seiko Epson Corp
Priority to JP2010039785A priority Critical patent/JP5732728B2/en
Priority to US13/030,449 priority patent/US8283988B2/en
Priority to KR1020110015272A priority patent/KR20110097655A/en
Priority to TW103107344A priority patent/TWI532315B/en
Priority to EP11155345.9A priority patent/EP2363954A3/en
Priority to TW103107346A priority patent/TWI554029B/en
Priority to TW100105836A priority patent/TWI536736B/en
Priority to BRPI1101771-6A priority patent/BRPI1101771A2/en
Priority to CN201310337047.2A priority patent/CN103401526B/en
Priority to CN201110045508.XA priority patent/CN102170275B/en
Priority to RU2011106951/07A priority patent/RU2469469C2/en
Priority to CN2013103367658A priority patent/CN103401525A/en
Publication of JP2011176665A publication Critical patent/JP2011176665A/en
Priority to US13/613,553 priority patent/US8593039B2/en
Priority to US13/613,622 priority patent/US8598770B2/en
Priority to US14/068,126 priority patent/US9252349B2/en
Publication of JP2011176665A5 publication Critical patent/JP2011176665A5/ja
Application granted granted Critical
Publication of JP5732728B2 publication Critical patent/JP5732728B2/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Images

Landscapes

  • Oscillators With Electromechanical Resonators (AREA)
  • Piezo-Electric Or Mechanical Vibrators, Or Delay Or Filter Circuits (AREA)

Abstract

<P>PROBLEM TO BE SOLVED: To provide a resonator element improving an impact resistance by increasing the strength of a base. <P>SOLUTION: A quartz crystal resonator element 1 is a resonator element formed by etching the outer shape of a Z plate, as a substrate, which is cut from the crystal in the rough at predetermined angles with respect to X, Y and Z axes orthogonal to each other as the crystal axes of the crystal. The quartz crystal resonator element 1 is equipped with: a base 10; a pair of resonating arms 11 extending from the base 10 in the Y-axis direction; and notches 12, 13 formed by notching the base 10 in the X-axis direction. The notch 12 has a tilting portion 12c formed between a side 12a along the notching direction and an outer circumference 10b of the base 10 by notching the base 10 from the negative side of the X axis towards the positive side so that the width of the notch 12 increases as it approaches the outer circumference 10b. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、振動片、この振動片を備えた振動子及びこの振動片を備えた発振器に関する。   The present invention relates to a resonator element, a vibrator including the resonator element, and an oscillator including the resonator element.

特許文献１には、基部と、基部から突出して形成されている振動腕部（以下、振動腕という）とを有し、振動腕に溝部が形成されている振動片であって、基部に切り込み部（以下、切り欠き部という）が形成されている振動片が開示されている。
特許文献１の振動片は、基部に切り欠き部が形成されていることにより、振動腕から基部への振動漏れが減少し、ＣＩ（クリスタルインピーダンス）値（Ｑ値）のばらつきの抑制が図られている。 Japanese Patent Application Laid-Open No. 2004-228561 is a vibrating piece having a base portion and a vibrating arm portion (hereinafter referred to as a vibrating arm) formed so as to protrude from the base portion and having a groove portion formed in the vibrating arm, and is cut into the base portion. A vibrating piece in which a portion (hereinafter referred to as a notch) is formed is disclosed.
The vibration piece of Patent Document 1 has a notch formed at the base, thereby reducing vibration leakage from the vibrating arm to the base and suppressing variations in CI (crystal impedance) value (Q value). ing.

特開２００２−２８０８７０号公報JP 2002-280870 A

上記振動片は、通常、エッチングによって外形形状が形成されている。そして、水晶を基材とした振動片においては、水晶の結晶軸に対する方向によってエッチング速度が異なるエッチング異方性を有する。
このエッチング異方性に起因して、振動片は、基部の切り欠き部の先端部分が、オーバーエッチング（エッチング過多）されることによって、本来の位置より基部の中央側に入り込み、例えば、先端が尖ったくさびのような、応力が集中しやすい形状に形成されることがある。
これにより、振動片は、落下時などの衝撃が加わった際に、切り欠き部の先端部分に応力が集中し、その部分から破損する虞がある。 The vibration piece has an outer shape usually formed by etching. And in the resonator element which uses quartz as a base material, it has etching anisotropy from which an etching rate changes with directions with respect to the crystal axis of quartz.
Due to this etching anisotropy, the resonator element has entered the center side of the base portion from the original position when the tip portion of the notch portion of the base portion is over-etched (excessive etching). It may be formed in a shape that tends to concentrate stress, such as a sharp wedge.
As a result, when an impact such as dropping is applied to the resonator element, stress concentrates on the tip portion of the notch portion, and there is a risk of damage from that portion.

本発明は、上記課題の少なくとも一部を解決するためになされたものであり、以下の形態または適用例として実現することが可能である。   SUMMARY An advantage of some aspects of the invention is to solve at least a part of the problems described above, and the invention can be implemented as the following forms or application examples.

［適用例１］本適用例にかかる振動片は、水晶の結晶軸としての互いに直交するＸ軸、Ｙ軸、Ｚ軸に対して所定の角度で切り出されたＺ板を基材とし、外形形状がエッチングによって形成された振動片であって、基部と、前記基部から前記Ｙ軸方向に延びる少なくとも１本の振動腕と、前記基部を前記Ｘ軸方向に切り欠いた切り欠き部と、を備え、前記切り欠き部の少なくとも１つは、前記基部を前記Ｘ軸のプラス側からマイナス側へ切り欠き、切り欠き方向に沿った少なくとも１つの辺と前記基部の外周との間に、前記切り欠き部の幅が前記外周に近づくに連れて広がるように形成された傾斜部を有することを特徴とする。   [Application Example 1] The resonator element according to this application example is based on a Z plate cut out at a predetermined angle with respect to the X axis, the Y axis, and the Z axis, which are orthogonal to each other, as crystal axes of quartz, and has an outer shape. Is a resonator element formed by etching, and includes a base, at least one vibrating arm extending from the base in the Y-axis direction, and a notch formed by cutting the base in the X-axis direction. And at least one of the notches is formed by notching the base portion from the plus side to the minus side of the X axis, and the notch portion between at least one side along the notch direction and the outer periphery of the base portion. It has the inclination part formed so that the width | variety of a part might spread as it approached the said outer periphery, It is characterized by the above-mentioned.

これによれば、振動片は、基部をＸ軸方向に切り欠いた切り欠き部を備え、切り欠き部の少なくとも１つが、基部をＸ軸のプラス側からマイナス側へ切り欠き、切り欠き部の幅が外周に近づくに連れて広がるように形成された傾斜部を有する。
振動片は、上記方向に切り欠き部を設けることで、振動漏れをより効果的に抑制できる。そして、振動片は、切り欠き部に傾斜部を有することで、切り欠き部の先端部分におけるエッチングの進行度合いが変化し、オーバーエッチングを抑制できる。
この結果、振動片は、切り欠き部の先端部分における応力集中が緩和されることから、基部の強度が向上し、耐衝撃特性を向上させることができる。 According to this, the resonator element includes a cutout portion in which the base portion is cut out in the X-axis direction, and at least one of the cutout portions cuts out the base portion from the plus side to the minus side of the X-axis. It has an inclined portion formed so that its width increases as it approaches the outer periphery.
The vibration piece can suppress vibration leakage more effectively by providing a notch in the above direction. And since the vibration piece has an inclined part in the notch part, the progress of etching at the tip part of the notch part changes, and over-etching can be suppressed.
As a result, in the resonator element, the stress concentration at the distal end portion of the notch portion is alleviated, so that the strength of the base portion is improved and the impact resistance characteristics can be improved.

［適用例２］上記適用例にかかる振動片において、前記傾斜部は、前記切り欠き部において前記Ｙ軸のプラス側に位置する一方の辺に接続され、前記一方の辺との成す角度が３度〜３５度の範囲内であることが好ましい。   Application Example 2 In the resonator element according to the application example described above, the inclined portion is connected to one side located on the plus side of the Y-axis in the cutout portion, and an angle formed with the one side is 3 It is preferable to be within the range of 35 degrees to 35 degrees.

これによれば、振動片は、Ｙ軸のプラス側に位置する一方の辺と傾斜部との成す角度が３度〜３５度の範囲内である。
振動片は、一方の辺と傾斜部との成す角度が上記範囲内であることにより、効果的にオーバーエッチングを抑制できる。なお、上記範囲は、発明者らが現物との整合性を検証した上でのエッチングのシミュレーションによる解析結果から得た知見である。 According to this, in the resonator element, the angle formed by the one side located on the plus side of the Y axis and the inclined portion is in the range of 3 degrees to 35 degrees.
The vibration piece can effectively suppress over-etching because the angle formed by one side and the inclined portion is within the above range. In addition, the said range is the knowledge obtained from the analysis result by the simulation of etching, after inventors verified consistency with the actual thing.

［適用例３］上記適用例にかかる振動片において、前記傾斜部は、前記切り欠き部において前記Ｙ軸のマイナス側に位置する他方の辺に接続され、前記他方の辺との成す角度が１０度〜３０度の範囲内であることが好ましい。   Application Example 3 In the resonator element according to the application example described above, the inclined portion is connected to the other side located on the negative side of the Y-axis in the cutout portion, and an angle formed with the other side is 10. It is preferable to be within the range of 30 degrees.

これによれば、振動片は、Ｙ軸のマイナス側に位置する他方の辺と傾斜部との成す角度が１０度〜３０度の範囲内である。
振動片は、他方の辺と傾斜部との成す角度が上記範囲内であることにより、効果的にオーバーエッチングを抑制できる。なお、上記範囲は、発明者らが現物との整合性を検証した上でのシミュレーションによる解析結果から得た知見である。 According to this, in the resonator element, the angle formed between the other side located on the negative side of the Y axis and the inclined portion is within a range of 10 degrees to 30 degrees.
The vibration piece can effectively suppress over-etching because the angle formed by the other side and the inclined portion is within the above range. In addition, the said range is the knowledge obtained from the analysis result by simulation, after inventors verified consistency with the actual thing.

［適用例４］上記適用例にかかる振動片において、前記切り欠き部は、対で設けられ、前記振動腕の延びる方向に沿った前記基部の中心線を対称軸として、対称形状に形成されていることが好ましい。   Application Example 4 In the resonator element according to the application example described above, the notch portions are provided in pairs and are formed in a symmetrical shape with a center line of the base portion along the extending direction of the vibrating arm as a symmetry axis. Preferably it is.

これによれば、振動片は、切り欠き部が対で設けられ、振動腕の延びる方向に沿った基部の中心線を対称軸として、対称形状に形成されていることから、バランスのとれた振動を得ることができる。   According to this, the vibration piece is provided with a pair of notches, and is formed in a symmetrical shape with the center line of the base along the extending direction of the vibrating arm as the axis of symmetry. Can be obtained.

［適用例５］上記適用例にかかる振動片において、前記振動腕を複数本備え、前記複数本の振動腕と、前記基部とを含んで音叉を構成することが好ましい。   Application Example 5 In the resonator element according to the application example described above, it is preferable that a plurality of the vibrating arms are provided, and the tuning fork is configured to include the plurality of vibrating arms and the base portion.

これによれば、振動片は、振動腕を複数本備え、複数本の振動腕と基部とを含んで音叉を構成することから、耐衝撃特性が向上した音叉型振動片を提供できる。   According to this, since the vibrating piece includes a plurality of vibrating arms and includes a plurality of vibrating arms and a base, the tuning fork type vibrating piece having improved impact resistance can be provided.

［適用例６］本適用例にかかる振動子は、上記適用例のいずれか一例に記載の振動片と、前記振動片を収容するパッケージと、を備えたことを特徴とする。   Application Example 6 A vibrator according to this application example includes the resonator element according to any one of the application examples described above and a package that accommodates the resonator element.

これによれば、振動子は、耐衝撃特性が向上した振動片を備えることから、耐衝撃特性を向上させることができる。   According to this, since the vibrator includes the resonator element having improved impact resistance characteristics, the impact resistance characteristics can be improved.

［適用例７］本適用例にかかる発振器は、上記適用例のいずれか一例に記載の振動片と、前記振動片を発振させる発振回路を有する回路素子と、前記振動片及び前記回路素子を収容するパッケージと、を備えたことを特徴とする。   Application Example 7 An oscillator according to this application example includes the resonator element according to any one of the application examples described above, a circuit element having an oscillation circuit that oscillates the resonator element, the resonator element, and the circuit element. And a package to be provided.

これによれば、発振器は、耐衝撃特性が向上した振動片を備えることから、耐衝撃特性を向上させることができる。   According to this, since the oscillator includes the resonator element having improved impact resistance characteristics, the impact resistance characteristics can be improved.

第１の実施形態の振動片の概略構成を示す模式図であり、（ａ）は平面図、（ｂ）は（ａ）の断面図。2A and 2B are schematic diagrams illustrating a schematic configuration of a resonator element according to the first embodiment, in which FIG. 3A is a plan view and FIG. 図１（ａ）の要部拡大図。The principal part enlarged view of Fig.1 (a). 切り欠き部における傾斜部の角度と、先端部分のエッチング形状との関係を示す図。The figure which shows the relationship between the angle of the inclination part in a notch part, and the etching shape of a front-end | tip part. 第２の実施形態の振動片の概略構成を示す模式図であり、（ａ）は平面図、（ｂ）は（ａ）の断面図。FIG. 6 is a schematic diagram illustrating a schematic configuration of a resonator element according to a second embodiment, in which (a) is a plan view and (b) is a cross-sectional view of (a). 図４（ａ）の要部拡大図。The principal part enlarged view of Fig.4 (a). 切り欠き部における傾斜部の角度と、先端部分のエッチング形状との関係を示す図。The figure which shows the relationship between the angle of the inclination part in a notch part, and the etching shape of a front-end | tip part. 第３の実施形態の振動子の概略構成を示す模式図であり、（ａ）は平面図、（ｂ）は（ａ）の断面図。It is a schematic diagram which shows schematic structure of the vibrator | oscillator of 3rd Embodiment, (a) is a top view, (b) is sectional drawing of (a). 第４の実施形態の発振器の概略構成を示す模式図であり、（ａ）は平面図、（ｂ）は（ａ）の断面図。It is a schematic diagram which shows schematic structure of the oscillator of 4th Embodiment, (a) is a top view, (b) is sectional drawing of (a).

以下、本発明を具体化した実施形態について図面を参照して説明する。   DESCRIPTION OF EXEMPLARY EMBODIMENTS Hereinafter, embodiments of the invention will be described with reference to the drawings.

（第１の実施形態）
図１は、第１の実施形態の振動片の概略構成を示す模式図であり、図１（ａ）は平面図、図１（ｂ）は、図１（ａ）のＡ−Ａ線での断面図である。図２は、図１（ａ）のＢ部拡大図である。 (First embodiment)
FIG. 1 is a schematic diagram illustrating a schematic configuration of the resonator element according to the first embodiment. FIG. 1A is a plan view, and FIG. 1B is a cross-sectional view taken along line AA in FIG. It is sectional drawing. FIG. 2 is an enlarged view of a portion B in FIG.

図１に示すように、振動片としての水晶振動片１は、水晶の原石などから、水晶の結晶軸としての互いに直交するＸ軸、Ｙ軸、Ｚ軸に対して所定の角度で切り出されたＺ板を基材とし、外形形状がフォトリソグラフィ技術を用いたエッチング（ウエットエッチング）によって形成された振動片である。
ここで、Ｚ板とは、切り出し面（主面１０ａ）がＺ軸に対して略直交したものをいい、このＺ軸に直交した主面１０ａが、Ｘ軸のプラス側から見てＹ軸からＺ軸の方向へ反時計回りまたは時計回りに０度〜数度の範囲で回転した状態で切り出されたものも含まれる。
水晶振動片１は、Ｘ軸が電気軸、Ｙ軸が機械軸、Ｚ軸が光軸となるように、水晶の単結晶から切り出される。
なお、水晶振動片１は、水晶からの切り出し角度の誤差を、Ｘ軸、Ｙ軸及びＺ軸の各々につき多少の範囲（例えば、０度〜５度程度の範囲）で許容できる。 As shown in FIG. 1, a quartz crystal vibrating piece 1 as a vibrating piece was cut out from a rough crystal or the like at a predetermined angle with respect to the X axis, Y axis, and Z axis orthogonal to each other as crystal axes of the crystal. This is a vibrating piece having a Z plate as a base material and having an outer shape formed by etching (wet etching) using a photolithography technique.
Here, the Z plate means that the cut surface (main surface 10a) is substantially orthogonal to the Z axis, and the main surface 10a orthogonal to the Z axis is from the Y axis when viewed from the plus side of the X axis. Those cut out in a state of rotating in the range of 0 degrees to several degrees counterclockwise or clockwise in the Z-axis direction are also included.
The crystal resonator element 1 is cut out from a single crystal of crystal so that the X axis is an electric axis, the Y axis is a mechanical axis, and the Z axis is an optical axis.
Note that the quartz crystal resonator element 1 can tolerate an error in the cut-out angle from the quartz crystal in a certain range (for example, a range of about 0 degree to 5 degrees) for each of the X axis, the Y axis, and the Z axis.

水晶振動片１は、基部１０と、基部１０からＹ軸方向に延びる互いに略平行な一対の振動腕１１と、基部１０をＸ軸方向に切り欠いた一対の切り欠き部１２，１３と、基部１０からＸ軸方向に突出し、振動腕１１側に折れ曲がってＹ軸方向に延びる一対の支持部１４とを備えている。
水晶振動片１は、基部１０と、一対の振動腕１１とを含んで音叉を構成することで、音叉型振動片となっており、支持部１４の所定の位置に形成された図示しないマウント電極を介してパッケージなどの外部部材に固定されるようになっている。 The quartz crystal resonator element 1 includes a base 10, a pair of substantially parallel vibrating arms 11 extending from the base 10 in the Y-axis direction, a pair of cutout portions 12 and 13 obtained by cutting the base 10 in the X-axis direction, and a base And a pair of support portions 14 that protrude in the X-axis direction, bend toward the vibrating arm 11 side, and extend in the Y-axis direction.
The crystal vibrating piece 1 includes a base 10 and a pair of vibrating arms 11 to form a tuning fork, thereby forming a tuning fork type vibrating piece. A mount electrode (not shown) formed at a predetermined position of the support portion 14. It is fixed to an external member such as a package through the.

振動腕１１は、基部１０側に位置する腕部１５と、腕部１５よりも先端側に位置し、腕部１５よりも幅が広い錘部１６と、振動腕１１の延びる方向（Ｙ軸方向）に沿って形成され、一対の振動腕１１の並ぶ方向（Ｘ軸方向）に切断した振動腕１１の断面形状が、Ｈ字状となる溝部１７とを有している。
水晶振動片１は、振動腕１１に形成された図示しない励振電極に、マウント電極を経由して外部から駆動信号が印加されることにより、一対の振動腕１１が、所定の周波数（例えば、３２ｋＨｚ）で矢印Ｃ方向及び矢印Ｄ方向に交互に屈曲振動（共振）する。 The resonating arm 11 includes an arm portion 15 located on the base 10 side, a weight portion 16 located on the distal end side of the arm portion 15 and wider than the arm portion 15, and a direction in which the resonating arm 11 extends (Y-axis direction). ), And the cross-sectional shape of the resonating arm 11 cut in the direction in which the pair of resonating arms 11 are arranged (X-axis direction) has an H-shaped groove portion 17.
In the crystal vibrating piece 1, when a drive signal is applied to an excitation electrode (not shown) formed on the vibrating arm 11 from the outside via the mount electrode, the pair of vibrating arms 11 have a predetermined frequency (for example, 32 kHz). ) To bend and vibrate (resonate) alternately in the direction of arrow C and the direction of arrow D.

ここで、一対の切り欠き部１２，１３について詳述する。
切り欠き部１２は、基部１０をＸ軸のプラス側からマイナス側へ切り欠いて形成されている。
そして、図２に示すように、切り欠き部１２は、切り欠き方向に沿った辺１２ａ，１２ｂの内、Ｙ軸のプラス側に位置する一方の辺としての辺１２ａと、基部１０の外周１０ｂとの間に、切り欠き部１２の幅が外周１０ｂに近づくに連れて広がるように形成された傾斜部１２ｃを有する。
傾斜部１２ｃは、上記のように、切り欠き部１２においてＹ軸のプラス側に位置する辺１２ａに接続され、辺１２ａとの成す角度θが、３度〜３５度の範囲内となるように形成されている。
一方、切り欠き部１３は、図１（ａ）に示すように、切り欠き部１２と対になるように設けられ、振動腕１１の延びる方向（Ｙ軸方向）に沿った基部１０の中心線１０ｃを対称軸として、切り欠き部１２と対称形状に形成されている。 Here, the pair of notches 12 and 13 will be described in detail.
The notch 12 is formed by notching the base 10 from the plus side to the minus side of the X axis.
As shown in FIG. 2, the notch 12 includes a side 12 a as one side located on the plus side of the Y-axis, and an outer periphery 10 b of the base 10, among the sides 12 a and 12 b along the notch direction. , And the inclined portion 12c formed so that the width of the notch portion 12 increases as it approaches the outer periphery 10b.
As described above, the inclined portion 12c is connected to the side 12a located on the plus side of the Y-axis in the notch portion 12, and the angle θ formed with the side 12a is in the range of 3 degrees to 35 degrees. Is formed.
On the other hand, the notch 13 is provided so as to be paired with the notch 12, as shown in FIG. 1A, and the center line of the base 10 along the extending direction of the vibrating arm 11 (Y-axis direction). It is formed symmetrically with the notch 12 with 10c as the axis of symmetry.

ここで、切り欠き部１２における傾斜部１２ｃの角度θと、切り欠き部１２の先端部分のエッチング形状との関係について、発明者らのシミュレーションによる解析結果に基づいて説明する。
図３は、切り欠き部における傾斜部の角度と、先端部分のエッチング形状との関係を示す図である。
シミュレーションによって得られたエッチング形状については、３段階で評価し、応力が集中しやすい形状順に×：不良、○：良、◎：優良、で表している。エッチング形状は、○、◎の評価であれば、応力が集中し難く量産に適用できるものと判断される。 Here, the relationship between the angle θ of the inclined portion 12c in the notch portion 12 and the etching shape of the tip portion of the notch portion 12 will be described based on the analysis result by the inventors' simulation.
FIG. 3 is a diagram showing the relationship between the angle of the inclined portion in the notch and the etching shape of the tip portion.
The etching shape obtained by the simulation is evaluated in three stages, and is represented by x: defective, ◯: good, and ◎: excellent in order of the shape in which stress tends to concentrate. If the etching shape is evaluated as ◯ or ◎, it is judged that the stress is difficult to concentrate and that it can be applied to mass production.

図３に示すように、エッチング形状は、傾斜部１２ｃの角度θが３度〜３５度の範囲内で○以上であり、特に１０度〜３０度の範囲内で◎である。これに対して、エッチング形状は、傾斜部１２ｃの角度θが０度、３７度、４０度で×である。
この解析結果によれば、傾斜部１２ｃの角度θは、３度〜３５度の範囲内が好ましく、１０度〜３０度の範囲内がより好ましい。また、角度θは、エッチング異方性の影響を踏まえた傾斜部１２ｃの形成精度の観点からすれば、ほぼ３０度とすることが特に好ましい。 As shown in FIG. 3, the etching shape is ◯ or more when the angle θ of the inclined portion 12 c is in the range of 3 degrees to 35 degrees, and particularly ◎ in the range of 10 degrees to 30 degrees. On the other hand, the etching shape is x when the angle θ of the inclined portion 12c is 0 degrees, 37 degrees, and 40 degrees.
According to the analysis result, the angle θ of the inclined portion 12c is preferably in the range of 3 degrees to 35 degrees, and more preferably in the range of 10 degrees to 30 degrees. Further, the angle θ is particularly preferably about 30 degrees from the viewpoint of the formation accuracy of the inclined portion 12c in consideration of the influence of etching anisotropy.

シミュレーションによるエッチング形状について詳述すると、図２の２点鎖線は、傾斜部１２ｃがない場合（従来形状であって、図３の角度θが０度の場合）の先端部分の形状を示している。
この場合には、切り欠き部１２の先端部分が、大きくオーバーエッチングされ、実線で示した本来の円弧状の形状より基部１０の中央側に入り込み、先端が尖ったくさびのような、応力が集中しやすい形状に形成されている。
これに対して、傾斜部１２ｃの角度θが３度〜３５度の範囲内の場合には、切り欠き部１２の先端部分におけるエッチングの進行度合いが変化し、オーバーエッチングが抑制され、切り欠き部１２の先端部分が、実線で示した本来の円弧状の形状に近似した形状で形成されている。 The etching shape by simulation will be described in detail. The two-dot chain line in FIG. 2 shows the shape of the tip portion when there is no inclined portion 12c (when the angle θ in FIG. 3 is 0 degree). .
In this case, the tip portion of the notch 12 is greatly over-etched, enters the center side of the base 10 from the original arc-shaped shape indicated by the solid line, and stress concentrates like a wedge with a sharp tip. It is formed in a shape that is easy to do.
On the other hand, when the angle θ of the inclined portion 12c is in the range of 3 degrees to 35 degrees, the degree of progress of etching at the tip portion of the notch portion 12 is changed, overetching is suppressed, and the notch portion The 12 tip portions are formed in a shape that approximates the original arc shape shown by the solid line.

上述したように、第１の実施形態の水晶振動片１は、基部１０をＸ軸方向に切り欠いた切り欠き部１２，１３を備えている。そして、水晶振動片１は、切り欠き部１２が、基部１０をＸ軸のプラス側からマイナス側へ切り欠き、切り欠き方向に沿った辺１２ａ，１２ｂの内、Ｙ軸のプラス側に位置する辺１２ａと、基部１０の外周１０ｂとの間に、切り欠き部１２の幅が外周１０ｂに近づくに連れて広がるように形成された傾斜部１２ｃを有する。   As described above, the crystal resonator element 1 according to the first embodiment includes the notches 12 and 13 obtained by notching the base 10 in the X-axis direction. In the crystal resonator element 1, the cutout portion 12 cuts the base portion 10 from the plus side of the X axis to the minus side, and is located on the plus side of the Y axis among the sides 12 a and 12 b along the cutout direction. Between the side 12a and the outer periphery 10b of the base portion 10, there is an inclined portion 12c formed so that the width of the notch portion 12 increases as it approaches the outer periphery 10b.

これによれば、水晶振動片１は、上記方向に切り欠き部１２，１３を設けることで、振動漏れをより効果的に抑制できる。
そして、水晶振動片１は、切り欠き部１２に傾斜部１２ｃを有することで、切り欠き部１２の先端部分におけるエッチングの進行度合いが変化し、オーバーエッチングを抑制できる。
この結果、水晶振動片１は、切り欠き部１２の先端部分における応力集中が緩和されることから、基部１０の強度が向上し、耐衝撃特性を向上させることができる。 According to this, the quartz crystal vibrating piece 1 can suppress vibration leakage more effectively by providing the notches 12 and 13 in the above-mentioned direction.
And the crystal vibrating piece 1 has the inclined part 12c in the notch part 12, and the progress degree of the etching in the front-end | tip part of the notch part 12 changes, and can suppress overetching.
As a result, since the crystal vibrating piece 1 is relaxed in stress concentration at the tip portion of the notch 12, the strength of the base 10 can be improved and the impact resistance can be improved.

また、水晶振動片１は、傾斜部１２ｃと辺１２ａとの成す角度θが３度〜３５度の範囲内であれば、効果的にオーバーエッチングを抑制でき、傾斜部１２ｃと辺１２ａとの成す角度θが１０度〜３０度の範囲内であれば、より効果的にオーバーエッチングを抑制できる。   Moreover, if the angle θ formed by the inclined portion 12c and the side 12a is within the range of 3 ° to 35 °, the crystal vibrating piece 1 can effectively suppress over-etching, and the inclined portion 12c and the side 12a are formed. If the angle θ is in the range of 10 degrees to 30 degrees, overetching can be more effectively suppressed.

また、水晶振動片１は、切り欠き部１２，１３が対で設けられ、振動腕１１の延びる方向（Ｙ軸方向）に沿った基部１０の中心線１０ｃを対称軸として、切り欠き部１２と切り欠き部１３とが対称形状に形成されていることから、バランスのとれた屈曲振動を得ることができる。   The crystal vibrating piece 1 is provided with a pair of notches 12 and 13, and the notch 12 and the center line 10 c of the base 10 along the extending direction (Y-axis direction) of the resonating arm 11 are used as symmetry axes. Since the notch 13 is formed symmetrically, a balanced flexural vibration can be obtained.

また、水晶振動片１は、振動腕１１を一対（２本）備え、２本の振動腕１１と基部１０とを含んで音叉を構成することから、耐衝撃特性が向上した音叉型振動片を提供できる。
なお、水晶振動片１は、水晶のエッチング異方性により切り欠き部１３の先端部分がオーバーエッチングされ難いことから、切り欠き部１３には傾斜部がなくてもよい。 In addition, the crystal vibrating piece 1 includes a pair (two) of vibrating arms 11 and includes the two vibrating arms 11 and the base portion 10 to form a tuning fork. Can be provided.
In the crystal vibrating piece 1, the notch portion 13 may not have an inclined portion because the tip portion of the notch portion 13 is difficult to be over-etched due to crystal etching anisotropy.

（第２の実施形態）
図４は、第２の実施形態の振動片の概略構成を示す模式図であり、図４（ａ）は平面図、図４（ｂ）は、図４（ａ）のＥ−Ｅ線での断面図である。図５は、図４（ａ）のＦ部拡大図である。
なお、第１の実施形態との共通部分については、同一符号を付して説明を省略し、第１の実施形態と異なる部分を中心に説明する。 (Second Embodiment)
4A and 4B are schematic views illustrating a schematic configuration of the resonator element according to the second embodiment. FIG. 4A is a plan view, and FIG. 4B is a line EE in FIG. It is sectional drawing. FIG. 5 is an enlarged view of a portion F in FIG.
In addition, about a common part with 1st Embodiment, the same code | symbol is attached | subjected and description is abbreviate | omitted and it demonstrates centering on a different part from 1st Embodiment.

図４に示すように、振動片としての水晶振動片２は、切り欠き部１２，１３の形状が第１の実施形態と異なる。
図５に示すように、水晶振動片２の切り欠き部１２は、切り欠き方向に沿った辺１２ａ，１２ｂの内、Ｙ軸のマイナス側に位置する他方の辺としての辺１２ｂと、基部１０の外周１０ｂとの間に、切り欠き部１２の幅が外周１０ｂに近づくに連れて広がるように形成された傾斜部１２ｄを有する。
傾斜部１２ｄは、上記のように、切り欠き部１２においてＹ軸のマイナス側に位置する辺１２ｂに接続され、辺１２ｂとの成す角度θ１が、１０度〜３０度の範囲内となるように形成されている。
一方、切り欠き部１３は、図４（ａ）に示すように、切り欠き部１２と対になるように設けられ、振動腕１１の延びる方向（Ｙ軸方向）に沿った基部１０の中心線１０ｃを対称軸として、切り欠き部１２と対称形状に形成されている。 As shown in FIG. 4, the crystal vibrating piece 2 as the vibrating piece is different from the first embodiment in the shape of the notches 12 and 13.
As shown in FIG. 5, the notch 12 of the crystal vibrating piece 2 includes a side 12 b as the other side located on the negative side of the Y axis among the sides 12 a and 12 b along the notch direction, and a base 10. Between the outer periphery 10b and the outer periphery 10b, there is an inclined portion 12d formed so that the width of the notch 12 increases as it approaches the outer periphery 10b.
As described above, the inclined portion 12d is connected to the side 12b located on the negative side of the Y-axis in the cutout portion 12, and the angle θ1 formed with the side 12b is within a range of 10 degrees to 30 degrees. Is formed.
On the other hand, the notch 13 is provided so as to be paired with the notch 12, as shown in FIG. 4A, and the center line of the base 10 along the extending direction of the vibrating arm 11 (Y-axis direction). It is formed symmetrically with the notch 12 with 10c as the axis of symmetry.

ここで、切り欠き部１２における傾斜部１２ｄの角度θ１と、切り欠き部１２の先端部分のエッチング形状との関係について、発明者らのシミュレーションによる解析結果に基づいて説明する。
図６は、切り欠き部における傾斜部の角度と、先端部分のエッチング形状との関係を示す図である。
シミュレーションによって得られたエッチング形状については、２段階で評価し、応力が集中しやすい形状順に×：不良、○：良、で表している。エッチング形状は、○の評価であれば、応力が集中し難く量産に適用できるものと判断される。 Here, the relationship between the angle θ1 of the inclined portion 12d in the cutout portion 12 and the etching shape of the tip portion of the cutout portion 12 will be described based on an analysis result by the inventors' simulation.
FIG. 6 is a diagram illustrating the relationship between the angle of the inclined portion in the notch and the etching shape of the tip portion.
The etching shape obtained by the simulation is evaluated in two stages, and is represented by x: defective and ◯: good in order of the shape in which stress tends to concentrate. If the etching shape is evaluated as “Good”, it is judged that the stress is not easily concentrated and it can be applied to mass production.

図６に示すように、エッチング形状は、傾斜部１２ｄの角度θ１が１０度〜３０度の範囲内で○である。これに対して、エッチング形状は、傾斜部１２ｄの角度θ１が０度で×である。
この解析結果によれば、傾斜部１２ｄの角度θ１は、１０度〜３０度の範囲内が好ましいことがわかる。 As shown in FIG. 6, the etching shape is ◯ when the angle θ1 of the inclined portion 12d is in the range of 10 degrees to 30 degrees. In contrast, the etching shape is x when the angle θ1 of the inclined portion 12d is 0 degrees.
According to this analysis result, it can be seen that the angle θ1 of the inclined portion 12d is preferably in the range of 10 degrees to 30 degrees.

シミュレーションによるエッチング形状について詳述すると、図５の２点鎖線は、傾斜部１２ｄがない場合（従来形状であって、図６の角度θ１が０度の場合）の先端部分の形状を示している。
この場合には、第１の実施形態と同様に、切り欠き部１２の先端部分が、大きくオーバーエッチングされ、実線で示した本来の円弧状の形状より基部１０の中央側に入り込み、先端が尖ったくさびのような、応力が集中しやすい形状に形成されている。
これに対して、傾斜部１２ｄの角度θ１が１０度〜３０度の範囲内の場合には、切り欠き部１２の先端部分におけるエッチングの進行度合いが変化し、オーバーエッチングが抑制され、切り欠き部１２の先端部分が、実線で示した本来の円弧状の形状に近似した形状で形成されている。 When the etching shape by simulation is described in detail, the two-dot chain line in FIG. 5 shows the shape of the tip portion when there is no inclined portion 12d (when it is a conventional shape and the angle θ1 in FIG. 6 is 0 degree). .
In this case, as in the first embodiment, the tip portion of the notch 12 is greatly over-etched and enters the center side of the base portion 10 from the original arcuate shape shown by the solid line, and the tip is sharp. It is formed in a shape that tends to concentrate stress, such as a wedge.
On the other hand, when the angle θ1 of the inclined portion 12d is in the range of 10 degrees to 30 degrees, the progress of etching at the tip portion of the notch portion 12 is changed, over-etching is suppressed, and the notch portion The 12 tip portions are formed in a shape that approximates the original arc shape shown by the solid line.

上述したように、第２の実施形態の水晶振動片２は、切り欠き部１２が、切り欠き方向に沿った辺１２ａ，１２ｂの内、Ｙ軸のマイナス側に位置する辺１２ｂと、基部１０の外周１０ｂとの間に、切り欠き部１２の幅が外周１０ｂに近づくに連れて広がるように形成された傾斜部１２ｄを有する。
そして、水晶振動片２は、傾斜部１２ｄと辺１２ｂとの成す角度θ１が、１０度〜３０度の範囲内となるように形成されている。 As described above, the crystal resonator element 2 according to the second embodiment includes the base portion 10 having the notch portion 12 on the negative side of the Y axis among the sides 12a and 12b along the notch direction. Between the outer periphery 10b and the outer periphery 10b, there is an inclined portion 12d formed so that the width of the notch 12 increases as it approaches the outer periphery 10b.
The quartz crystal vibrating piece 2 is formed such that an angle θ1 formed by the inclined portion 12d and the side 12b is within a range of 10 degrees to 30 degrees.

これにより、水晶振動片２は、切り欠き部１２の先端部分におけるエッチングの進行度合いが変化し、オーバーエッチングを抑制できる。
この結果、水晶振動片２は、切り欠き部１２の先端部分における応力集中が緩和されることから、基部１０の強度が向上し、耐衝撃特性を向上させることができる。
なお、水晶振動片２は、水晶のエッチング異方性により切り欠き部１３の先端部分がオーバーエッチングされ難いことから、切り欠き部１３には傾斜部がなくてもよい。 Thereby, in the crystal vibrating piece 2, the progress of etching at the tip portion of the notch 12 changes, and overetching can be suppressed.
As a result, since the crystal vibrating piece 2 is relaxed in the stress concentration at the tip portion of the notch 12, the strength of the base 10 can be improved and the impact resistance can be improved.
In the crystal vibrating piece 2, the notch portion 13 does not need to have an inclined portion because the tip portion of the notch portion 13 is difficult to be over-etched due to crystal etching anisotropy.

なお、上記各実施形態では、振動腕１１の数を２本としたが、これに限定するものではなく、１本、または３本以上でもよい。
また、支持部１４、錘部１６、溝部１７は、なくてもよい。また、振動腕１１の屈曲振動の方向は、振動腕１１の厚み方向（Ｚ軸方向）であってもよい。また、傾斜部１２ｃと傾斜部１２ｄとは、併用されてもよい。 In each of the above embodiments, the number of vibrating arms 11 is two. However, the number of vibrating arms 11 is not limited to this, and may be one or three or more.
Moreover, the support part 14, the weight part 16, and the groove part 17 may be omitted. The direction of bending vibration of the vibrating arm 11 may be the thickness direction (Z-axis direction) of the vibrating arm 11. Further, the inclined portion 12c and the inclined portion 12d may be used in combination.

（第３の実施形態）
次に、第３の実施形態として、上記で説明した水晶振動片を備えた振動子について説明する。
図７は、第３の実施形態の振動子の概略構成を示す模式図であり、図７（ａ）は平面図、図７（ｂ）は、図７（ａ）のＧ−Ｇ線での断面図である。 (Third embodiment)
Next, as a third embodiment, a vibrator provided with the crystal vibrating piece described above will be described.
7A and 7B are schematic views showing a schematic configuration of the vibrator according to the third embodiment. FIG. 7A is a plan view, and FIG. 7B is a GG line in FIG. It is sectional drawing.

図７に示すように、振動子としての水晶振動子５は、第１の実施形態の水晶振動片１と、水晶振動片１を収容するパッケージ８０と、を備えている。
パッケージ８０は、パッケージベース８１、シームリング８２、蓋体８５などから構成されている。
パッケージベース８１は、水晶振動片１を収容できるように凹部が形成され、その凹部に水晶振動片１の図示しないマウント電極と接続される接続パッド８８が設けられている。
接続パッド８８は、パッケージベース８１内の配線に接続され、パッケージベース８１の外周部に設けられた外部接続端子８３と導通可能に構成されている。 As shown in FIG. 7, a crystal resonator 5 as a resonator includes the crystal resonator element 1 of the first embodiment and a package 80 that houses the crystal resonator element 1.
The package 80 includes a package base 81, a seam ring 82, a lid 85, and the like.
The package base 81 is formed with a recess so as to accommodate the crystal vibrating piece 1, and a connection pad 88 connected to a mount electrode (not shown) of the crystal vibrating piece 1 is provided in the recess.
The connection pad 88 is connected to the wiring in the package base 81 and is configured to be electrically connected to the external connection terminal 83 provided on the outer periphery of the package base 81.

パッケージベース８１の凹部の周囲には、シームリング８２が設けられている。さらに、パッケージベース８１の底部には、貫通穴８６が設けられている。
水晶振動片１は、パッケージベース８１の接続パッド８８に導電性接着剤８４を介して接着固定されている。そして、パッケージ８０は、パッケージベース８１の凹部を覆う蓋体８５とシームリング８２とがシーム溶接されている。
パッケージベース８１の貫通穴８６には、金属材料などからなる封止材８７が充填されている。この封止材８７は、減圧雰囲気内で溶融後固化され、パッケージベース８１内が減圧状態を保持できるように、貫通穴８６を気密に封止している。
水晶振動子５は、外部接続端子８３を介した外部からの駆動信号により水晶振動片１が励振され、所定の周波数（例えば、３２ｋＨｚ）で発振する。 A seam ring 82 is provided around the recess of the package base 81. Further, a through hole 86 is provided at the bottom of the package base 81.
The quartz crystal resonator element 1 is bonded and fixed to the connection pad 88 of the package base 81 via a conductive adhesive 84. In the package 80, a lid body 85 and a seam ring 82 that cover the concave portion of the package base 81 are seam-welded.
A through hole 86 of the package base 81 is filled with a sealing material 87 made of a metal material or the like. The sealing material 87 is solidified after being melted in a reduced pressure atmosphere, and the through hole 86 is hermetically sealed so that the inside of the package base 81 can be kept in a reduced pressure state.
The crystal resonator 5 is oscillated at a predetermined frequency (for example, 32 kHz) when the crystal resonator element 1 is excited by an external drive signal via the external connection terminal 83.

上述したように、水晶振動子５は、耐衝撃特性が向上した水晶振動片１を備えていることから、耐衝撃特性を向上させることができる。
なお、水晶振動子５は、水晶振動片１に代えて水晶振動片２を用いても、同様の効果を得ることができる。 As described above, since the crystal unit 5 includes the crystal vibrating piece 1 with improved shock resistance, the shock resistance can be improved.
The crystal resonator 5 can obtain the same effect even when the crystal resonator element 2 is used in place of the crystal oscillator piece 1.

（第４の実施形態）
次に、第４の実施形態として、上記で説明した水晶振動片を備えた発振器について説明する。
図８は、第４の実施形態の発振器の概略構成を示す模式図であり、図８（ａ）は平面図、図８（ｂ）は図８（ａ）のＪ−Ｊ線での断面図である。 (Fourth embodiment)
Next, as a fourth embodiment, an oscillator including the quartz crystal vibrating piece described above will be described.
8A and 8B are schematic views showing the schematic configuration of the oscillator according to the fourth embodiment. FIG. 8A is a plan view, and FIG. 8B is a cross-sectional view taken along line JJ in FIG. It is.

発振器としての水晶発振器６は、上記水晶振動子５の構成に回路素子をさらに備えた構成となっている。なお、水晶振動子５との共通部分については、同一符号を付して詳細な説明を省略する。
図８に示すように、水晶発振器６は、第１の実施形態の水晶振動片１と、水晶振動片１を発振させる発振回路を有する回路素子としてのＩＣチップ９１と、水晶振動片１及びＩＣチップ９１を収容するパッケージ８０と、を備えている。
ＩＣチップ９１は、パッケージベース８１の底部に固着され、金線などの金属ワイヤー９２により他の配線と接続されている。
水晶発振器６は、ＩＣチップ９１の発振回路からの駆動信号により水晶振動片１が励振され、所定の周波数（例えば、３２ｋＨｚ）で発振する。 The crystal oscillator 6 as an oscillator has a configuration in which a circuit element is further provided in the configuration of the crystal resonator 5. In addition, about the common part with the crystal oscillator 5, the same code | symbol is attached | subjected and detailed description is abbreviate | omitted.
As shown in FIG. 8, the crystal oscillator 6 includes the crystal resonator element 1 according to the first embodiment, an IC chip 91 as a circuit element having an oscillation circuit that oscillates the crystal oscillator piece 1, the crystal oscillator piece 1 and the IC. And a package 80 for accommodating the chip 91.
The IC chip 91 is fixed to the bottom of the package base 81 and is connected to other wiring by a metal wire 92 such as a gold wire.
In the crystal oscillator 6, the crystal resonator element 1 is excited by a drive signal from the oscillation circuit of the IC chip 91, and oscillates at a predetermined frequency (for example, 32 kHz).

上述したように、水晶発振器６は、耐衝撃特性が向上した水晶振動片１を備えていることから、耐衝撃特性を向上させることができる。
なお、水晶発振器６は、水晶振動片１に代えて水晶振動片２を用いても、同様の効果を得ることができる。 As described above, since the crystal oscillator 6 includes the crystal vibrating piece 1 with improved shock resistance, the shock resistance can be improved.
The crystal oscillator 6 can obtain the same effect even if the crystal resonator element 2 is used instead of the crystal oscillator piece 1.

１，２…振動片としての水晶振動片、５…振動子としての水晶振動子、６…発振器としての水晶発振器、１０…基部、１０ａ…主面（切り出し面）、１０ｂ…外周、１１…振動腕、１２，１３…切り欠き部、１２ａ…一方の辺としての辺、１２ｂ…他方の辺としての辺、１２ｃ，１２ｄ…傾斜部、１４…支持部、１５…腕部、１６…錘部、１７…溝部、８０…パッケージ、８１…パッケージベース、８２…シームリング、８３…外部接続端子、８４…導電性接着剤、８５…蓋体、８６…貫通穴、８７…封止材、８８…接続パッド、９１…回路素子としてのＩＣチップ、９２…金属ワイヤー。   DESCRIPTION OF SYMBOLS 1,2 ... Crystal resonator element as a resonator element, 5 ... Crystal oscillator as an oscillator, 6 ... Crystal oscillator as an oscillator, 10 ... Base, 10a ... Main surface (cut-out surface), 10b ... Outer periphery, 11 ... Vibration Arms 12, 13 ... notches, 12a ... side as one side, 12b ... side as the other side, 12c, 12d ... inclined part, 14 ... support part, 15 ... arm part, 16 ... weight part, 17 ... groove, 80 ... package, 81 ... package base, 82 ... seam ring, 83 ... external connection terminal, 84 ... conductive adhesive, 85 ... lid, 86 ... through hole, 87 ... sealing material, 88 ... connection Pad, 91... IC chip as a circuit element, 92.

Claims (7)

水晶の結晶軸としての互いに直交するＸ軸、Ｙ軸、Ｚ軸に対して所定の角度で切り出されたＺ板を基材とし、外形形状がエッチングによって形成された振動片であって、
基部と、
前記基部から前記Ｙ軸方向に延びる少なくとも１本の振動腕と、
前記基部を前記Ｘ軸方向に切り欠いた切り欠き部と、を備え、
前記切り欠き部の少なくとも１つは、前記基部を前記Ｘ軸のプラス側からマイナス側へ切り欠き、切り欠き方向に沿った少なくとも１つの辺と前記基部の外周との間に、前記切り欠き部の幅が前記外周に近づくに連れて広がるように形成された傾斜部を有することを特徴とする振動片。 A vibrating plate whose outer shape is formed by etching using a Z plate cut at a predetermined angle with respect to the X axis, the Y axis, and the Z axis as crystal axes of quartz,
The base,
At least one vibrating arm extending in the Y-axis direction from the base,
A notch portion in which the base portion is notched in the X-axis direction,
At least one of the cutout portions is formed by cutting the base portion from the positive side to the negative side of the X axis, and the cutout portion between at least one side along the cutout direction and the outer periphery of the base portion. A vibrating piece having an inclined portion formed such that the width of the portion increases as the width approaches the outer periphery. 請求項１に記載の振動片において、前記傾斜部は、前記切り欠き部において前記Ｙ軸のプラス側に位置する一方の辺に接続され、前記一方の辺との成す角度が３度〜３５度の範囲内であることを特徴とする振動片。   2. The resonator element according to claim 1, wherein the inclined portion is connected to one side located on the plus side of the Y-axis in the cutout portion, and an angle formed with the one side is 3 degrees to 35 degrees. A vibrating piece characterized by being in the range of. 請求項１に記載の振動片において、前記傾斜部は、前記切り欠き部において前記Ｙ軸のマイナス側に位置する他方の辺に接続され、前記他方の辺との成す角度が１０度〜３０度の範囲内であることを特徴とする振動片。   2. The resonator element according to claim 1, wherein the inclined portion is connected to the other side located on the negative side of the Y-axis in the notch, and an angle formed with the other side is 10 degrees to 30 degrees. A vibrating piece characterized by being in the range of. 請求項１乃至請求項３のいずれか一項に記載の振動片において、前記切り欠き部は、対で設けられ、前記振動腕の延びる方向に沿った前記基部の中心線を対称軸として、対称形状に形成されていることを特徴とする振動片。   4. The resonator element according to claim 1, wherein the notch portions are provided in pairs and are symmetrical about a center line of the base portion along a direction in which the vibrating arm extends. A vibrating piece having a shape. 請求項１乃至請求項４のいずれか一項に記載の振動片において、前記振動腕を複数本備え、前記複数本の振動腕と、前記基部とを含んで音叉を構成することを特徴とする振動片。   5. The resonator element according to claim 1, wherein a plurality of the vibrating arms are provided, and the tuning fork includes the plurality of vibrating arms and the base portion. Vibrating piece. 請求項１乃至請求項５のいずれか一項に記載の振動片と、
前記振動片を収容するパッケージと、を備えたことを特徴とする振動子。 The resonator element according to any one of claims 1 to 5,
And a package for housing the resonator element. 請求項１乃至請求項５のいずれか一項に記載の振動片と、
前記振動片を発振させる発振回路を有する回路素子と、
前記振動片及び前記回路素子を収容するパッケージと、を備えたことを特徴とする発振器。 The resonator element according to any one of claims 1 to 5,
A circuit element having an oscillation circuit for oscillating the resonator element;
An oscillator comprising: the resonator element and a package that accommodates the circuit element.
JP2010039785A 2010-02-25 2010-02-25 Vibrating piece, vibrator and oscillator Active JP5732728B2 (en)

Priority Applications (15)

Application Number Priority Date Filing Date Title
JP2010039785A JP5732728B2 (en) 2010-02-25 2010-02-25 Vibrating piece, vibrator and oscillator
US13/030,449 US8283988B2 (en) 2010-02-25 2011-02-18 Resonator element, resonator, oscillator, and electronic device
KR1020110015272A KR20110097655A (en) 2010-02-25 2011-02-21 Vibrating reed, vibrator, oscillator, and electronic apparatus
TW103107344A TWI532315B (en) 2010-02-25 2011-02-22 Vibration plates, vibrators, oscillators, and electronic machines
EP11155345.9A EP2363954A3 (en) 2010-02-25 2011-02-22 Resonator element of the tuning fork type, oscillator and electronic device
TW103107346A TWI554029B (en) 2010-02-25 2011-02-22 Vibration plates, vibrators, oscillators, and electronic machines
TW100105836A TWI536736B (en) 2010-02-25 2011-02-22 Vibration plates, vibrators, oscillators, and electronic machines
BRPI1101771-6A BRPI1101771A2 (en) 2010-02-25 2011-02-23 vibrating reed, vibrator, oscillator and electronic device
CN201310337047.2A CN103401526B (en) 2010-02-25 2011-02-24 Vibrating reed, oscillator, oscillator and electronic equipment
CN201110045508.XA CN102170275B (en) 2010-02-25 2011-02-24 Resonator element, resonator, oscillator, and electronic device
RU2011106951/07A RU2469469C2 (en) 2010-02-25 2011-02-24 Vibrating plate, vibrator, generator and electronic device
CN2013103367658A CN103401525A (en) 2010-02-25 2011-02-24 Vibrating plate, vibrator, oscillator and electronic device
US13/613,553 US8593039B2 (en) 2010-02-25 2012-09-13 Resonator element having a notched base
US13/613,622 US8598770B2 (en) 2010-02-25 2012-09-13 Resonator element having a notched base
US14/068,126 US9252349B2 (en) 2010-02-25 2013-10-31 Resonator element, resonator, oscillator, and electronic device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010039785A JP5732728B2 (en) 2010-02-25 2010-02-25 Vibrating piece, vibrator and oscillator

Related Child Applications (3)

Application Number Title Priority Date Filing Date
JP2013199390A Division JP5725116B2 (en) 2013-09-26 2013-09-26 Vibrating piece, vibrator and oscillator
JP2014127564A Division JP5787007B2 (en) 2014-06-20 2014-06-20 Vibrating piece, vibrator and oscillator
JP2015083713A Division JP2015136182A (en) 2015-04-15 2015-04-15 Vibration piece, vibrator and oscillator

Publications (3)

Publication Number Publication Date
JP2011176665A true JP2011176665A (en) 2011-09-08
JP2011176665A5 JP2011176665A5 (en) 2013-11-07
JP5732728B2 JP5732728B2 (en) 2015-06-10

Family

ID=44689099

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010039785A Active JP5732728B2 (en) 2010-02-25 2010-02-25 Vibrating piece, vibrator and oscillator

Country Status (1)

Country Link
JP (1) JP5732728B2 (en)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013165455A (en) * 2012-02-13 2013-08-22 Seiko Instruments Inc Piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic apparatus, and atomic clock
JP2015023423A (en) * 2013-07-18 2015-02-02 セイコーエプソン株式会社 Vibration piece, vibrator, oscillator, electronic apparatus and mobile
JP2016072868A (en) * 2014-09-30 2016-05-09 エスアイアイ・クリスタルテクノロジー株式会社 Piezoelectric vibration piece and piezoelectric vibrator
US9413332B2 (en) 2013-07-18 2016-08-09 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic device, and moving object
JP2019140454A (en) * 2018-02-07 2019-08-22 リバーエレテック株式会社 Crystal device and manufacturing method thereof

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370421U (en) * 1989-11-10 1991-07-15
JP2002280870A (en) * 2001-01-15 2002-09-27 Seiko Epson Corp Vibration chip, vibrator, oscillator and electronic device
JP2005005896A (en) * 2003-06-10 2005-01-06 Seiko Epson Corp Piezoelectric oscillating piece, method for manufacturing piezoelectric oscillating piece, piezoelectric oscillator and electronic equipment mounted with piezoelectric oscillator
JP2005102138A (en) * 2003-08-19 2005-04-14 Seiko Epson Corp Tuning fork type piezo-electric oscillation piece, and method for mounting it
JP2007093485A (en) * 2005-09-29 2007-04-12 Citizen Watch Co Ltd Crystal vibrator and manufacturing method, and physical quantity sensor
JP2008109676A (en) * 2007-11-12 2008-05-08 Seiko Epson Corp Crystal device, tuning fork type crystal vibrating chip, and method of manufacturing tuning fork type crystal vibrating chip
JP2009027711A (en) * 2007-07-19 2009-02-05 Eta Sa Manufacture Horlogere Suisse Piezoelectric resonator with optimized motional capacitances
JP2009117939A (en) * 2007-11-02 2009-05-28 Epson Toyocom Corp Piezoelectric vibration chip, piezoelectric vibrator, and acceleration sensor
JP2009164775A (en) * 2007-12-28 2009-07-23 Nippon Dempa Kogyo Co Ltd Piezoelectric frame and piezoelectric device

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0370421U (en) * 1989-11-10 1991-07-15
JP2002280870A (en) * 2001-01-15 2002-09-27 Seiko Epson Corp Vibration chip, vibrator, oscillator and electronic device
JP2005005896A (en) * 2003-06-10 2005-01-06 Seiko Epson Corp Piezoelectric oscillating piece, method for manufacturing piezoelectric oscillating piece, piezoelectric oscillator and electronic equipment mounted with piezoelectric oscillator
JP2005102138A (en) * 2003-08-19 2005-04-14 Seiko Epson Corp Tuning fork type piezo-electric oscillation piece, and method for mounting it
JP2007093485A (en) * 2005-09-29 2007-04-12 Citizen Watch Co Ltd Crystal vibrator and manufacturing method, and physical quantity sensor
JP2009027711A (en) * 2007-07-19 2009-02-05 Eta Sa Manufacture Horlogere Suisse Piezoelectric resonator with optimized motional capacitances
JP2009117939A (en) * 2007-11-02 2009-05-28 Epson Toyocom Corp Piezoelectric vibration chip, piezoelectric vibrator, and acceleration sensor
JP2008109676A (en) * 2007-11-12 2008-05-08 Seiko Epson Corp Crystal device, tuning fork type crystal vibrating chip, and method of manufacturing tuning fork type crystal vibrating chip
JP2009164775A (en) * 2007-12-28 2009-07-23 Nippon Dempa Kogyo Co Ltd Piezoelectric frame and piezoelectric device

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2013165455A (en) * 2012-02-13 2013-08-22 Seiko Instruments Inc Piezoelectric vibration piece, piezoelectric vibrator, oscillator, electronic apparatus, and atomic clock
JP2015023423A (en) * 2013-07-18 2015-02-02 セイコーエプソン株式会社 Vibration piece, vibrator, oscillator, electronic apparatus and mobile
US9178470B2 (en) 2013-07-18 2015-11-03 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic device, and moving object
US9413332B2 (en) 2013-07-18 2016-08-09 Seiko Epson Corporation Resonator element, resonator, oscillator, electronic device, and moving object
JP2016072868A (en) * 2014-09-30 2016-05-09 エスアイアイ・クリスタルテクノロジー株式会社 Piezoelectric vibration piece and piezoelectric vibrator
JP2019140454A (en) * 2018-02-07 2019-08-22 リバーエレテック株式会社 Crystal device and manufacturing method thereof
JP7054177B2 (en) 2018-02-07 2022-04-13 リバーエレテック株式会社 Quartz device and its manufacturing method

Also Published As

Publication number Publication date
JP5732728B2 (en) 2015-06-10

Similar Documents

Publication Publication Date Title
JP4277818B2 (en) Piezoelectric vibrating piece and piezoelectric device
JP4169012B2 (en) Gyro vibrating piece, gyro sensor, and manufacturing method of gyro vibrating piece
JP5062413B2 (en) Tuning fork type piezoelectric resonator element and tuning fork type piezoelectric vibrator
JP2009010717A (en) Piezoelectric vibrator and manufacturing method thereof
KR20110097655A (en) Vibrating reed, vibrator, oscillator, and electronic apparatus
JP5732728B2 (en) Vibrating piece, vibrator and oscillator
JP2010154224A (en) Piezoelectric vibration chip, piezoelectric vibrator, piezoelectric oscillator
JP2008306468A (en) Piezoelectric vibration piece and piezoelectric vibrator
JP5652122B2 (en) Vibrating piece, vibrating device and electronic device
JP2008301021A (en) Tuning fork type oscillating piece and tuning fork type vibrator
JP5782707B2 (en) Electronics
JP2011239132A (en) Vibration piece, vibrator and oscillator
WO2012127685A1 (en) Tuning-fork-type oscillator
JP5533213B2 (en) Vibrating piece, vibrator and oscillator
JP5725116B2 (en) Vibrating piece, vibrator and oscillator
JP2007163200A (en) Vibrating reed and angular velocity sensor
JP5796280B2 (en) Vibrating piece, vibrator and oscillator
JP2011199330A (en) Vibration piece, vibrator, and oscillator
JP6137277B2 (en) Vibrating piece, vibrator and oscillator
JP5787007B2 (en) Vibrating piece, vibrator and oscillator
JP2011223228A (en) Vibration chip, vibrator and oscillator
JP5839083B2 (en) Vibrating piece, vibrator and oscillator
JP2005123828A (en) Tuning-fork piezo-electric oscillation piece and piezo-electric device
JP5552836B2 (en) Piezoelectric vibrating piece, piezoelectric vibrator and oscillator
JP2015136182A (en) Vibration piece, vibrator and oscillator

Legal Events

Date Code Title Description
A621 Written request for application examination

Free format text: JAPANESE INTERMEDIATE CODE: A621

Effective date: 20130131

A977 Report on retrieval

Free format text: JAPANESE INTERMEDIATE CODE: A971007

Effective date: 20130918

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20130924

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20131001

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20140422

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20140620

RD03 Notification of appointment of power of attorney

Free format text: JAPANESE INTERMEDIATE CODE: A7423

Effective date: 20140620

A131 Notification of reasons for refusal

Free format text: JAPANESE INTERMEDIATE CODE: A131

Effective date: 20141216

A521 Written amendment

Free format text: JAPANESE INTERMEDIATE CODE: A523

Effective date: 20150212

TRDD Decision of grant or rejection written
A01 Written decision to grant a patent or to grant a registration (utility model)

Free format text: JAPANESE INTERMEDIATE CODE: A01

Effective date: 20150317

A61 First payment of annual fees (during grant procedure)

Free format text: JAPANESE INTERMEDIATE CODE: A61

Effective date: 20150330

R150 Certificate of patent or registration of utility model

Ref document number: 5732728

Country of ref document: JP

Free format text: JAPANESE INTERMEDIATE CODE: R150

S531 Written request for registration of change of domicile

Free format text: JAPANESE INTERMEDIATE CODE: R313531

R350 Written notification of registration of transfer

Free format text: JAPANESE INTERMEDIATE CODE: R350