JP5062413B2 - Tuning fork type piezoelectric resonator element and tuning fork type piezoelectric vibrator - Google Patents
Tuning fork type piezoelectric resonator element and tuning fork type piezoelectric vibrator Download PDFInfo
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Description
本発明は、音叉型圧電振動片及び音叉型圧電振動子に関する。 The present invention relates to a tuning fork type piezoelectric vibrating piece and a tuning fork type piezoelectric vibrator.
特許文献１には、基部及び基部から延びる一対の振動腕を備え、基部にはさらに支持腕が延びる構造の音叉型圧電振動片が開示されている。支持腕の一部はパッケージに固定されて、基部及び一対の振動腕がパッケージから浮いた状態になる。この構造では、パッケージに加えられた衝撃は、固定部分を介して支持腕に伝えられるので、支持腕に耐衝撃性が要求されている。しかし、支持腕の剛性を高めると他の部分に破損が生じる。例えば、特許文献１には、振動腕の振動がパッケージに伝達されること（振動漏れ）を防止するために、基部に切り込みを形成することが開示されているが、これをウエットエッチングで形成すると材料の結晶方位に起因して切り込みの内面が山形形状になって応力が集中するので破損が生じやすかった。したがって、衝撃を吸収することができる支持腕の構造が望まれている。
本発明は、衝撃を吸収することができる音叉型圧電振動片及び音叉型圧電振動子を提供することを目的とする。 An object of the present invention is to provide a tuning fork type piezoelectric vibrating piece and a tuning fork type piezoelectric vibrator that can absorb an impact.
（１）本発明に係る音叉型圧電振動片は、
基部と、
前記基部から第１の方向に延びる一対の振動腕と、
前記基部に別々に接続する一対の支持腕と、
前記一対の振動腕、前記基部及び前記一対の支持腕に形成された電極と、
を有し、
それぞれの前記支持腕は、前記第１の方向とは反対の第２の方向に突出するように前記基部から延びる第１の部分と、前記第１の方向に向けて、前記基部よりも前記第２の方向に突出した位置から先端まで延びる第２の部分と、前記第１及び第２の部分を接続する第３の部分と、を含み、
前記基部は、一方の前記支持腕の前記第２の部分と、他方の前記支持腕の前記第２の部分とで挟まれる位置にあり、
前記第３の部分は、前記第１の方向を向く第１の外縁と、前記支持腕のなかで最も前記第２の方向に突出する第２の外縁と、を含み、
前記第２の方向に沿った前記基部から前記第２の外縁までの距離は、前記第２の方向に沿った前記第１及び第２の外縁の間隔よりも大きい。本発明によれば、支持腕が、振動腕が延びる第１の方向とは反対の第２の方向に延びる第１の部分を有し、さらに、振動腕の隣の第２の部分が第２の方向に基部の隣を超える位置まで延びるので、基部から横に延びて振動腕と同じ方向に屈曲する構造の支持腕よりも高い衝撃吸収性能を有する。
（２）音叉型圧電振動片において、
前記第１の部分は、前記第２の方向に沿って延びていてもよい。
（３）音叉型圧電振動片において、
前記第１、２及び３の部分は、接続されてコ字状又はＵ字状をなしてもよい。
（４）音叉型圧電振動片において、
前記第１の部分は、前記第２の方向に対して斜めに延びていてもよい。
（５）音叉型圧電振動片において、
前記第１の部分の延びる方向と前記第２の部分の延びる方向とのなす角度であって、前記第１の外縁を内側に配置する内角は、鋭角であってもよい。
（６）音叉型圧電振動片において、
前記第２の部分は、前記先端から直線状に延びる第１の直線部と、前記第３の部分から直線状に延びる第２の直線部と、前記第１及び第２の直線部の間で前記一対の振動腕の方向に屈曲する屈曲部と、を含んでもよい。
（７）本発明に係る音叉型圧電振動子は、
音叉型圧電振動片であって、前記電極は、前記支持腕に形成された接続電極を含む音叉型圧電振動片と、
前記音叉型圧電振動片を内部に収容するパッケージであって、前記内部に固定電極を有するパッケージと、
前記支持腕で前記音叉型圧電振動片及び前記パッケージを機械的に接合し、前記接続電極及び前記固定電極を電気的に接続する導電性接着剤と、
を含む。
（８）音叉型圧電振動子において、
前記第２の部分は、前記先端から直線状に延びる第１の直線部と、前記第３の部分から直線状に延びる第２の直線部と、前記第１及び第２の直線部の間で前記一対の振動腕の方向に屈曲する屈曲部と、を含み、
前記導電性接着剤は、前記第２の直線部及び前記屈曲部を避けて前記第１の直線部と前記パッケージを接合し、前記第２の直線部及び前記屈曲部を前記パッケージから浮いた状態に保持してもよい。
(1) A tuning-fork type piezoelectric vibrating piece according to the present invention includes:
The base,
A pair of vibrating arms extending in a first direction from the base;
A pair of support arms connected separately to the base;
Electrodes formed on the pair of vibrating arms, the base, and the pair of support arms;
Have
Each of the support arms includes a first portion extending from the base so as to protrude in a second direction opposite to the first direction, and the first portion extending from the base toward the first direction. A second portion extending from a position protruding in the direction of 2 to the tip, and a third portion connecting the first and second portions,
The base is in a position sandwiched between the second part of one of the support arms and the second part of the other support arm,
The third portion includes a first outer edge facing the first direction, and a second outer edge protruding most in the second direction among the support arms,
A distance from the base portion to the second outer edge along the second direction is larger than a distance between the first and second outer edges along the second direction. According to the present invention, the support arm has the first portion extending in the second direction opposite to the first direction in which the vibrating arm extends, and the second portion adjacent to the vibrating arm is the second portion. Therefore, it has a higher shock absorbing performance than a support arm having a structure that extends laterally from the base and bends in the same direction as the vibrating arm.
(2) In a tuning fork type piezoelectric vibrating piece,
The first portion may extend along the second direction.
(3) In a tuning fork type piezoelectric vibrating piece,
The first, second, and third portions may be connected to form a U shape or a U shape.
(4) In a tuning fork type piezoelectric vibrating piece,
The first portion may extend obliquely with respect to the second direction.
(5) In a tuning fork type piezoelectric vibrating piece,
The angle formed by the extending direction of the first portion and the extending direction of the second portion, and the inner angle at which the first outer edge is disposed inside may be an acute angle.
(6) In the tuning fork type piezoelectric vibrating piece,
The second portion includes a first straight portion extending linearly from the tip, a second straight portion extending linearly from the third portion, and the first and second straight portions. A bending portion that bends in the direction of the pair of vibrating arms.
(7) The tuning fork type piezoelectric vibrator according to the present invention is:
A tuning fork type piezoelectric vibrating piece, wherein the electrode includes a tuning fork type piezoelectric vibrating piece including a connection electrode formed on the support arm;
A package for accommodating the tuning-fork type piezoelectric vibrating piece in the package, the package having a fixed electrode in the interior;
A conductive adhesive for mechanically joining the tuning fork type piezoelectric vibrating piece and the package with the support arm, and electrically connecting the connection electrode and the fixed electrode;
including.
(8) In a tuning fork type piezoelectric vibrator,
The second portion includes a first straight portion extending linearly from the tip, a second straight portion extending linearly from the third portion, and the first and second straight portions. A bending portion bent in the direction of the pair of vibrating arms,
The conductive adhesive avoids the second straight portion and the bent portion, joins the first straight portion and the package, and floats the second straight portion and the bent portion from the package. May be retained.
（第１の実施の形態）
図１は、本発明の第１の実施の形態に係る音叉型圧電振動片を示す平面図である。図２は、図１に示す音叉型圧電振動片のII−II線断面拡大図である。なお、図１に示す音叉型圧電振動片の底面図は平面図と対称に表れる。
(First embodiment)
FIG. 1 is a plan view showing a tuning fork type piezoelectric vibrating piece according to the first embodiment of the present invention. FIG. 2 is an enlarged sectional view taken along line II-II of the tuning fork type piezoelectric vibrating piece shown in FIG. The bottom view of the tuning-fork type piezoelectric vibrating piece shown in FIG. 1 appears symmetrically with the plan view.
音叉型圧電振動片１０は、相互に反対を向いて厚みを定義する表裏面を有しており、水晶からなる。音叉型圧電振動片１０は、基部１２と、基部１２から第１の方向に延びる一対の振動腕１４と、を含む。 The tuning fork type piezoelectric vibrating piece 10 has front and back surfaces that are opposite to each other and define a thickness, and is made of quartz. The tuning fork-type piezoelectric vibrating piece 10 includes a base portion 12 and a pair of vibrating arms 14 extending from the base portion 12 in the first direction.
振動腕１４は、相互に反対を向いて厚みを定義する表裏面と、表裏面を両側で接続する側面を有する。一対の振動腕１４は、側面同士が対向するように並列している。図２に示すように、一方の側面（Ｘ軸の＋方向を向く面）は、表裏面の間隔によって定義される振動腕１４の厚みの中央方向に高くなる山型となるように形成されている。振動腕１４には、表裏面に、それぞれ、長手方向に延びる溝１６が形成されている。溝１６によって振動腕１４が動きやすくなって効率的に振動するのでＣＩ値を下げることができる。 The vibrating arm 14 has front and back surfaces that face each other and define a thickness, and side surfaces that connect the front and back surfaces on both sides. The pair of vibrating arms 14 are arranged in parallel so that the side surfaces face each other. As shown in FIG. 2, one side surface (the surface facing the + direction of the X axis) is formed in a mountain shape that increases in the central direction of the thickness of the vibrating arm 14 defined by the distance between the front and back surfaces. Yes. In the vibrating arm 14, grooves 16 extending in the longitudinal direction are formed on the front and back surfaces, respectively. Since the vibrating arm 14 is easily moved by the groove 16 and vibrates efficiently, the CI value can be lowered.
音叉型圧電振動片１０は、一対の支持腕１８を含む。一対の支持腕１８は基部１２に別々に接続している。支持腕１８は、振動腕１４が延びる第１の方向とは反対の第２の方向に突出するように（第２の方向に沿って）基部１２から延びる第１の部分２０を有する。支持腕１８は、先端を第１の方向に向けて一対の振動腕１４の隣で先端から第２の方向に基部１２の隣を超える位置まで延びる第２の部分２２を有する。第２の部分２２は、先端から直線状に延びる第１の直線部２６と、第３の部分２４から直線状に延びる第２の直線部２８と、第１及び第２の直線部２６，２８の間で一対の振動腕１４の方向に屈曲する屈曲部３０と、を含む。基部１２は、一方の支持腕１８の第２の部分２２と、もう一方の支持腕１８の第２の部分とで挟まれる位置にある。 The tuning fork type piezoelectric vibrating piece 10 includes a pair of support arms 18. The pair of support arms 18 are separately connected to the base 12. The support arm 18 has a first portion 20 that extends from the base 12 so as to protrude in a second direction opposite to the first direction in which the vibrating arm 14 extends (along the second direction). The support arm 18 has a second portion 22 that extends from the tip to the position beyond the base 12 in the second direction next to the pair of vibrating arms 14 with the tip directed in the first direction. The second portion 22 includes a first straight portion 26 extending linearly from the tip, a second straight portion 28 extending linearly from the third portion 24, and the first and second straight portions 26, 28. And a bent portion 30 bent in the direction of the pair of vibrating arms 14. The base 12 is located between the second portion 22 of one support arm 18 and the second portion of the other support arm 18.
支持腕１８は、基部１２から第２の方向にずれた位置で第１及び第２の部分２０，２２を接続する第３の部分２４を有する。第３の部分２４は、第１の方向を向く第１の外縁３２と、支持腕１８のなかで最も第２の方向に突出する第２の外縁３４と、を含む。第２の方向に沿った基部１２から第２の外縁３４までの距離ｂは、第２の方向に沿った第１及び第２の外縁３２，３４の間隔ａよりも大きい。 The support arm 18 includes a third portion 24 that connects the first and second portions 20 and 22 at a position shifted from the base portion 12 in the second direction. The third portion 24 includes a first outer edge 32 that faces the first direction, and a second outer edge 34 that protrudes most in the second direction among the support arms 18. A distance b from the base portion 12 along the second direction to the second outer edge 34 is larger than a distance a between the first and second outer edges 32 and 34 along the second direction.
第１、２及び３の部分２０，２２，２４は、接続されて、折り返すようにコ字状になっているので、屈曲部３０（応力集中しやすい部位）が２箇所ある。変形例として、第１、２及び３の部分２０，２２，２４は、コ字状の代わりにＵ字状に接続してもよい。また、屈曲部３０と振動腕１４との間の距離を短くしても良い。そのようにすれば、Ｘ軸方向に衝撃が加わった際に、屈曲部３０が振動腕１４を受け止めて、変位量を抑制することができ、振動腕１４の折れを防止することができる。 Since the first, second, and third portions 20, 22, and 24 are connected and folded in a U shape, there are two bent portions 30 (sites where stress is easily concentrated). As a modification, the first, second, and third portions 20, 22, and 24 may be connected in a U shape instead of a U shape. Further, the distance between the bent portion 30 and the vibrating arm 14 may be shortened. By doing so, when an impact is applied in the X-axis direction, the bending portion 30 can receive the vibrating arm 14 to suppress the amount of displacement, and the vibrating arm 14 can be prevented from being broken.
本実施の形態によれば、支持腕１８が、振動腕１４が延びる第１の方向とは反対の第２の方向に延びる第１の部分２０を有し、さらに、振動腕１４の隣の第２の部分２２が第２の方向に基部１２の隣を超える位置まで延びるので、基部１２から横に延びて振動腕１４と同じ方向に屈曲する構造の支持腕１８よりも高い衝撃吸収性能を有する。 According to the present embodiment, the support arm 18 has the first portion 20 extending in the second direction opposite to the first direction in which the vibrating arm 14 extends, and further, the first arm 20 adjacent to the vibrating arm 14. Since the second portion 22 extends in the second direction to a position beyond the base 12, the second portion 22 has a higher shock absorbing performance than the support arm 18 that extends laterally from the base 12 and bends in the same direction as the vibrating arm 14. .
一対の振動腕１４、基部１２及び一対の支持腕１８には電極が形成されている。振動腕１４には励振電極３６が形成されている。励振電極３６は、振動腕１４の側面及び溝の内面にそれぞれ分離されて形成されている（図２参照）。１つの振動腕の相互に反対を向く側面に形成された励振電極３６は、振動腕１４の先端部上で電気的に接続され、溝１６の内面に形成された励振電極３６は基部１２の側面上及び支持腕１８の側面上で電気的に接続されている。一方の振動腕１４の側面にある励振電極３６と他方の振動腕１４の溝１６の内面にある励振電極３６とは基部１２上で電気的に接続されて第１のパターンを構成し、一方の振動腕１４の溝１６の内面にある励振電極３６と他方の振動腕１４の側面にある励振電極３６とは基部１２上で電気的に接続されて第２のパターンを構成している。 Electrodes are formed on the pair of vibrating arms 14, the base 12, and the pair of support arms 18. An excitation electrode 36 is formed on the vibrating arm 14. The excitation electrode 36 is separately formed on the side surface of the vibrating arm 14 and the inner surface of the groove (see FIG. 2). Excitation electrodes 36 formed on the opposite sides of one vibrating arm are electrically connected on the tip of the vibrating arm 14, and the excitation electrode 36 formed on the inner surface of the groove 16 is connected to the side surface of the base 12. Electrical connection is made on the upper and side surfaces of the support arm 18. The excitation electrode 36 on the side surface of one vibrating arm 14 and the excitation electrode 36 on the inner surface of the groove 16 of the other vibrating arm 14 are electrically connected on the base 12 to form the first pattern, The excitation electrode 36 on the inner surface of the groove 16 of the vibrating arm 14 and the excitation electrode 36 on the side surface of the other vibrating arm 14 are electrically connected on the base 12 to form a second pattern.
なお、振動腕１４上で側面に形成された励振電極３６を電気的に接続する電極膜は、振動腕１４の錘の役割を果たしており、その一部を除去することで錘の重さを調整することができる。振動腕１４の先端部の重さが重いほど振動腕１４の振動周波数が低くなり、軽いほど振動腕１４の振動周波数が高くなる。これを利用して周波数調整を行うことができる。そこで、電極膜には、第１及び第２の電極膜除去部３８，４０が形成されている。第１及び第２の電極膜除去部３８，４０から振動腕１４の表面が露出している。 Note that the electrode film that electrically connects the excitation electrode 36 formed on the side surface on the vibrating arm 14 plays the role of the weight of the vibrating arm 14, and the weight is adjusted by removing a part of the electrode film. can do. The heavier the tip part of the vibrating arm 14, the lower the vibration frequency of the vibrating arm 14, and the lighter the vibration frequency of the vibrating arm 14 becomes. This can be used to adjust the frequency. Therefore, first and second electrode film removal portions 38 and 40 are formed in the electrode film. The surface of the vibrating arm 14 is exposed from the first and second electrode film removal portions 38 and 40.
音叉型圧電振動片１０には接続電極４２が形成されている。接続電極４２は、支持腕１８に形成されており、支持腕１８の表面に少なくとも形成され、支持腕１８の側面にも形成されている。接続電極４２は励振電極３６と電気的に接続されている。詳しくは、一方の支持腕１８に形成された接続電極４２は上述した第１のパターンの一部をなす励振電極３６と電気的に接続され、他方の支持腕１８に形成された接続電極４２は上述した第２のパターンの一部をなす励振電極３６と電気的に接続されている。 A connection electrode 42 is formed on the tuning fork type piezoelectric vibrating piece 10. The connection electrode 42 is formed on the support arm 18, is formed at least on the surface of the support arm 18, and is also formed on the side surface of the support arm 18. The connection electrode 42 is electrically connected to the excitation electrode 36. Specifically, the connection electrode 42 formed on one support arm 18 is electrically connected to the excitation electrode 36 that forms part of the first pattern described above, and the connection electrode 42 formed on the other support arm 18 is It is electrically connected to the excitation electrode 36 that forms part of the second pattern described above.
少なくとも接続電極４２は、Ａｕからなる表面を有し、例えば、１００Å以上３００Å以下の厚みを有する下地のＣｒ膜と、Ｃｒ膜上に形成された２００Å以上５００Å以下の厚みを有するＡｕ膜と、を含む多層構造であってもよい。Ｃｒ膜は水晶との密着性が高く、Ａｕ膜は電気抵抗が低く酸化し難い。 At least the connection electrode 42 has a surface made of Au. For example, a base Cr film having a thickness of 100 to 300 mm and an Au film having a thickness of 200 to 500 mm formed on the Cr film are provided. The multilayer structure may be included. The Cr film has high adhesion to the crystal, and the Au film has low electrical resistance and is difficult to oxidize.
本実施の形態では、溝１６の内面に形成された励振電極３６と側面に形成された励振電極３６との間に電圧を印加する。印加電圧によって、図２に矢印で示すように電界が発生する。励振電極３６は、クロス配線によって交流電源に接続され、駆動電圧としての交番電圧が印加されるようになっている。これにより、振動腕１４は、互いに逆相振動となるように（振動腕１４の先端側が互いに接近・離間するように）励振されて屈曲振動する。また、基本モードで振動するように、駆動電圧としての交番電圧が調整されている。 In the present embodiment, a voltage is applied between the excitation electrode 36 formed on the inner surface of the groove 16 and the excitation electrode 36 formed on the side surface. The applied voltage generates an electric field as shown by the arrow in FIG. The excitation electrode 36 is connected to an AC power supply by a cross wiring, and is applied with an alternating voltage as a drive voltage. As a result, the vibrating arms 14 are excited and flexurally vibrated so that the vibration arms 14 are in opposite-phase vibrations (the tip sides of the vibrating arms 14 are close to and away from each other). Further, the alternating voltage as the drive voltage is adjusted so as to vibrate in the basic mode.
図３は、本発明の第１の実施の形態に係る音叉型圧電振動子の断面図であり、図４は、図３に示す音叉型圧電振動子の平面図であり、図５は、図３に示す音叉型圧電振動子の底面図である。 3 is a cross-sectional view of the tuning fork type piezoelectric vibrator according to the first embodiment of the present invention, FIG. 4 is a plan view of the tuning fork type piezoelectric vibrator shown in FIG. 3, and FIG. 4 is a bottom view of the tuning fork type piezoelectric vibrator shown in FIG.
音叉型圧電振動子は、音叉型圧電振動片１０を内部に収容するパッケージ４４を有する。パッケージ４４は、音叉型圧電振動片１０が固定される底部４６と、底部４６を囲む枠壁部４８と、を含む。底部４６には、真空引きを行うための通気孔４９が形成され、通気孔４９は、ロウ材（ＡｕＧｅ等）からなるシール部５０で塞がれている。 The tuning fork type piezoelectric vibrator has a package 44 that accommodates the tuning fork type piezoelectric vibrating piece 10 therein. The package 44 includes a bottom portion 46 to which the tuning fork type piezoelectric vibrating piece 10 is fixed, and a frame wall portion 48 surrounding the bottom portion 46. A vent hole 49 for evacuation is formed in the bottom portion 46, and the vent hole 49 is closed with a seal portion 50 made of a brazing material (AuGe or the like).
パッケージ４４（底部４６）の内面には固定電極５２が形成されている。固定電極５２は、Ａｕからなる表面を有する。パッケージ４４（底部４６）の外面には外部端子５４が形成されている。固定電極５２と外部端子５４は図示しない配線で電気的に接続されている。なお、音叉型圧電振動片１０は２つの支持腕１８を有し、パッケージ４４には２つの外部端子５４が形成され、一方の支持腕１８上の接続電極４２が一方の外部端子５４に電気的に接続され、他方の支持腕１８上の接続電極４２が他方の外部端子５４に電気的に接続されている。外部端子５４は、ハンダなどによって回路基板の配線パターン（図示せず）に実装される。 A fixed electrode 52 is formed on the inner surface of the package 44 (bottom 46). The fixed electrode 52 has a surface made of Au. External terminals 54 are formed on the outer surface of the package 44 (bottom 46). The fixed electrode 52 and the external terminal 54 are electrically connected by a wiring (not shown). The tuning fork type piezoelectric vibrating piece 10 has two support arms 18, two external terminals 54 are formed on the package 44, and the connection electrode 42 on one support arm 18 is electrically connected to one external terminal 54. The connection electrode 42 on the other support arm 18 is electrically connected to the other external terminal 54. The external terminals 54 are mounted on a circuit board wiring pattern (not shown) by soldering or the like.
パッケージ４４（底部４６）に音叉型圧電振動片１０が固定されている。音叉型圧電振動片１０は、振動腕１４が基部１２から枠壁部４８に向かって延びるように固定されている。支持腕１８が底部４６に固定されて、振動腕１４がパッケージ４４から浮いた状態になっている。底部４６は、振動腕１４の先端部と対向する領域が低くなっており、振動腕１４が曲がっても底部４６に接触し難いようになっている。 The tuning fork type piezoelectric vibrating piece 10 is fixed to the package 44 (bottom 46). The tuning fork type piezoelectric vibrating piece 10 is fixed so that the vibrating arm 14 extends from the base 12 toward the frame wall 48. The support arm 18 is fixed to the bottom 46, and the vibrating arm 14 is lifted from the package 44. The bottom 46 has a low area facing the tip of the vibrating arm 14 so that it does not easily come into contact with the bottom 46 even if the vibrating arm 14 is bent.
パッケージ４４と音叉型圧電振動片１０の固定は導電性接着剤５６によって図られる。導電性接着剤５６は、第２の直線部２８及び屈曲部３０を避けて、第１の直線部２６とパッケージ４４を接合し、第２の直線部２８及び屈曲部３０をパッケージ４４から浮いた状態に保持している。導電性接着剤５６は、接続電極４２と固定電極５２を電気的及び機械的に接合する。本実施の形態では、導電性接着剤５６によって接続電極４２と固定電極５２のみを接合し、音叉型圧電振動片１０の材料（水晶）とパッケージ４４の材料（セラミックス）は接合しないが、変形例としてはこれらを接合してもよい。 The package 44 and the tuning fork type piezoelectric vibrating piece 10 are fixed by the conductive adhesive 56. The conductive adhesive 56 avoids the second straight portion 28 and the bent portion 30, joins the first straight portion 26 and the package 44, and lifts the second straight portion 28 and the bent portion 30 from the package 44. Held in a state. The conductive adhesive 56 electrically and mechanically joins the connection electrode 42 and the fixed electrode 52. In the present embodiment, only the connection electrode 42 and the fixed electrode 52 are joined by the conductive adhesive 56, and the material of the tuning fork type piezoelectric vibrating piece 10 (crystal) and the material of the package 44 (ceramics) are not joined. These may be joined.
パッケージ４４は、その全体を金属で形成してもよいが、主としてセラミックス等の非金属で形成する場合には、枠壁部４８の上端面はメタライズされている。枠壁部４８の非金属部上に、Ｍｏ（又はＷ）膜、Ｎｉ膜及びＡｕ膜が順に積層されて、上端面はＡｕからなる。上端面は、底部４６の上方を囲む形状をなしている。上端面には、例えばＡｇを含む合金からなるロウ材層を介して、リング５８が固定されている。リング５８は、上端面とオーバーラップして、底部４６の上方を切れ目なく囲む。リング５８は、シーム溶接用のものであり、例えばコバールから構成される層を有する。リング５８には、蓋６０が固定されている。 The package 44 may be entirely made of metal, but when it is mainly made of non-metal such as ceramics, the upper end surface of the frame wall portion 48 is metallized. On the non-metal part of the frame wall part 48, a Mo (or W) film, a Ni film and an Au film are sequentially laminated, and the upper end surface is made of Au. The upper end surface has a shape surrounding the bottom 46. A ring 58 is fixed to the upper end surface via a brazing material layer made of an alloy containing Ag, for example. The ring 58 overlaps the upper end surface and surrounds the upper portion of the bottom portion 46 without a break. The ring 58 is for seam welding and has a layer made of, for example, Kovar. A lid 60 is fixed to the ring 58.
蓋６０は、音叉型圧電振動片１０が固定されるパッケージ４４とオーバーラップしてパッケージ４４の開口を塞ぐ。蓋６０は、表面及び裏面を貫通する貫通穴６２を有する。貫通穴６２は、円形の開口形状をなしている。蓋６０は、ガラス又は樹脂などの材料からなる光透過性部材６４を含む。光透過性部材６４は、貫通穴６２の内面に密着してなる。 The lid 60 overlaps the package 44 to which the tuning fork type piezoelectric vibrating piece 10 is fixed, and closes the opening of the package 44. The lid 60 has a through hole 62 that penetrates the front surface and the back surface. The through hole 62 has a circular opening shape. The lid 60 includes a light transmissive member 64 made of a material such as glass or resin. The light transmissive member 64 is in close contact with the inner surface of the through hole 62.
上述した音叉型圧電振動子を使用して、発振器又はセンサを構成することができる。音叉型圧電振動子を含む発振回路で発振器を構成すると、周波数精度の高い交流信号を得ることができる。また、音叉型圧電振動子を使用したセンサは、物理量に応じて音叉型圧電振動片１０の周波数が変動することを利用してその物理量を検出するセンサである。例えば、温度、加速度によって発生する応力、角速度によって発生するコリオリ力などを検出するセンサが例に挙げられる。 An oscillator or a sensor can be configured using the tuning fork type piezoelectric vibrator described above. When an oscillator is constituted by an oscillation circuit including a tuning fork type piezoelectric vibrator, an AC signal with high frequency accuracy can be obtained. In addition, a sensor using a tuning fork type piezoelectric vibrator is a sensor that detects a physical quantity by utilizing a change in the frequency of the tuning fork type piezoelectric vibrating piece 10 according to the physical quantity. For example, a sensor that detects stress generated by temperature, acceleration, Coriolis force generated by angular velocity, and the like can be given as an example.
次に、本発明の実施の形態に係る音叉型圧電振動子の製造方法を説明する。音叉型圧電振動子の製造方法は、音叉型圧電振動片１０の形成を含む。音叉型圧電振動片１０を水晶から構成する場合、水晶ウエハは、Ｘ軸、Ｙ軸及びＺ軸からなる直交座標系において、Ｚ軸を中心に時計回りに０度ないし５度の範囲で回転して切り出した水晶Ｚ板であって所定の厚みに切断研磨して得られるものを用いる。１つの水晶ウエハから複数の音叉型圧電振動片１０を連結された状態で切り出し、最終的に個々の音叉型圧電振動片１０に切断する。音叉型圧電振動片１０には、励振電極３６及び接続電極４２を含む電極膜を形成する。 Next, a method for manufacturing a tuning fork type piezoelectric vibrator according to an embodiment of the present invention will be described. The manufacturing method of the tuning fork type piezoelectric vibrator includes the formation of the tuning fork type piezoelectric vibrating piece 10. When the tuning fork-type piezoelectric vibrating piece 10 is made of quartz, the quartz wafer rotates in the range of 0 to 5 degrees clockwise around the Z axis in the Cartesian coordinate system consisting of the X, Y, and Z axes. A crystal Z plate cut out by cutting and polishing to a predetermined thickness is used. A plurality of tuning fork type piezoelectric vibrating pieces 10 are cut out from one crystal wafer in a connected state, and finally cut into individual tuning fork type piezoelectric vibrating pieces 10. An electrode film including the excitation electrode 36 and the connection electrode 42 is formed on the tuning fork type piezoelectric vibrating piece 10.
電極膜の一部を除去して第１の電極膜除去部３８を形成する工程は、音叉型圧電振動片１０をパッケージ４４に固定する工程前に行う。つまり、音叉型圧電振動子に組み込む前（水晶ウエハから連結された状態で切り出された複数の音叉型圧電振動片１０を個々に切断する前であっても後でもよい。）に、第１の電極膜除去部３８を形成することで周波数調整を行う。電極膜の一部の除去は、レーザービームによって行う。第１の電極膜除去部３８は、第２の電極膜除去部４０よりも振動腕１４の先端に近いので、振動腕１４を振動しやすくする（周波数を上げる）効果が大きい。第１の電極膜除去部３８の形成による周波数調整プロセスは、おおまかな調整を目的としたもので粗調整ということができる。音叉型圧電振動片１０をパッケージ４４に取り付ける前に既に周波数調整を行っているため、次に行う第２の電極膜除去部４０の形成による電極膜の除去量を少なくすることができる。 The step of removing part of the electrode film to form the first electrode film removal portion 38 is performed before the step of fixing the tuning fork type piezoelectric vibrating piece 10 to the package 44. That is, before being incorporated into the tuning fork type piezoelectric vibrator (may be before or after individually cutting the plurality of tuning fork type piezoelectric vibrating pieces 10 cut out in a state of being connected from the quartz wafer). The frequency adjustment is performed by forming the electrode film removing portion 38. A part of the electrode film is removed by a laser beam. Since the first electrode film removing unit 38 is closer to the tip of the vibrating arm 14 than the second electrode film removing unit 40, the effect of facilitating the vibration arm 14 to vibrate (increasing the frequency) is great. The frequency adjustment process by forming the first electrode film removal unit 38 is intended for rough adjustment, and can be referred to as rough adjustment. Since the frequency adjustment has already been performed before the tuning-fork type piezoelectric vibrating piece 10 is attached to the package 44, the amount of electrode film removal due to the formation of the second electrode film removal unit 40 to be performed next can be reduced.
音叉型圧電振動子の製造方法では、パッケージ４４を用意する。なお、パッケージ４４の枠壁部４８には、ロウ接合によってリング５８を固定しておく。そして、音叉型圧電振動片１０を底部４６に固定する。その固定には導電性接着剤５６を使用する。その他の詳細は、上述した音叉型圧電振動子の構造の説明から自明な内容が該当する。 In the method for manufacturing a tuning fork type piezoelectric vibrator, a package 44 is prepared. A ring 58 is fixed to the frame wall 48 of the package 44 by brazing. Then, the tuning fork type piezoelectric vibrating piece 10 is fixed to the bottom 46. A conductive adhesive 56 is used for the fixing. The other details correspond to the content that is obvious from the description of the structure of the tuning fork type piezoelectric vibrator described above.
音叉型圧電振動子の製造方法は、光透過性部材６４の下面が電極膜と対向するように蓋６０を配置し、枠壁部４８及び蓋６０を接合することを含む。接合は、シーム溶接によって行う。こうして、パッケージ４４の開口を蓋６０によって塞ぐ。シーム接合によって蓋６０を接合するので、局所的な加熱を行うが全体的な加熱はしない。そのため、熱によって音叉型圧電振動片１０に生じる歪みが少ないので、周波数調整のための第２の電極膜除去部４０の形成による電極膜の除去は少ない量の除去で足り、ガスの発生が少ない。なお、シーム接合を行うときに光透過性部材６４の歪みを抑えるため、光透過性部材６４の位置を、シーム接合を行う部分から離してある。 The method for manufacturing the tuning fork type piezoelectric vibrator includes disposing the lid 60 so that the lower surface of the light transmissive member 64 faces the electrode film, and joining the frame wall portion 48 and the lid 60 to each other. Joining is performed by seam welding. Thus, the opening of the package 44 is closed by the lid 60. Since the lid 60 is joined by seam joining, local heating is performed, but overall heating is not performed. Therefore, since the distortion generated in the tuning fork type piezoelectric vibrating piece 10 due to heat is small, the removal of the electrode film by the formation of the second electrode film removal unit 40 for frequency adjustment is sufficient, and the generation of gas is small. . In addition, in order to suppress distortion of the light transmissive member 64 when performing seam bonding, the position of the light transmissive member 64 is separated from a portion where seam bonding is performed.
パッケージ４４の開口を蓋６０によって塞いだ後に、パッケージ４４に形成された通気孔４９を介して、蓋６０によって塞がれたパッケージ４４内を真空にし、その後、ロウ材で通気孔４９を塞ぐ。 After the opening of the package 44 is closed by the lid 60, the inside of the package 44 closed by the lid 60 is evacuated through the ventilation holes 49 formed in the package 44, and then the ventilation holes 49 are closed by a brazing material.
音叉型圧電振動子の製造方法は、第２の電極膜除去部４０を形成する工程をさらに含む。この工程は、パッケージ４４の開口を蓋６０によって塞いだ後（例えばさらに真空引き工程後）に行う。この工程は、光透過性部材６４を通して、電極膜に対してレーザービームを照射して行う。第２の電極膜除去部４０は、第１の電極膜除去部３８よりも振動腕１４の先端から離れているので、振動腕１４を振動しやすくする（周波数を上げる）効果は小さいが、このことから逆に微調整が可能であると言える。 The manufacturing method of the tuning fork type piezoelectric vibrator further includes a step of forming the second electrode film removal unit 40. This step is performed after the opening of the package 44 is closed by the lid 60 (for example, after the evacuation step). This step is performed by irradiating the electrode film with a laser beam through the light transmissive member 64. Since the second electrode film removing unit 40 is farther from the tip of the vibrating arm 14 than the first electrode film removing unit 38, the effect of making the vibrating arm 14 easier to vibrate (increasing the frequency) is small. On the contrary, it can be said that fine adjustment is possible.
本実施の形態に係る音叉型圧電振動子の製造方法は、上記プロセスを含み、上述した音叉型圧電振動子の構成から自明の製造プロセスをさらに含む。 The method for manufacturing a tuning fork type piezoelectric vibrator according to the present embodiment includes the above process, and further includes a manufacturing process that is obvious from the configuration of the tuning fork type piezoelectric vibrator described above.
（第２の実施の形態）
図６は、本発明の第２の実施の形態に係る音叉型圧電振動片を示す平面図である。本実施の形態では、支持腕１１８の第１の部分１２０は、第２の方向に対して斜めに延びているが、第２の方向に突出している点では第１の実施の形態と同じである。また、支持腕１１８の第２の部分１２２は先端から第２の方向に延びる。支持腕１１８は、基部１１２から第２の方向にずれた位置で第１及び第２の部分１２０，１２２を接続する第３の部分１２４を有する。第１の部分１２０の延びる方向と第２の部分１２２の延びる方向とのなす角度α（第１の外縁１３２を内側に配置する内角）は鋭角である。支持腕１１８の第２の部分１２２は、屈曲部１３０を有し、屈曲部１３０の第１又は第２の直線部１２６，１２８とのなす角度は、第１の実施の形態よりも大きくなっている。本実施の形態のその他の内容は、第１の実施の形態の内容が該当する。
(Second Embodiment)
FIG. 6 is a plan view showing a tuning fork type piezoelectric vibrating piece according to the second embodiment of the present invention. In the present embodiment, the first portion 120 of the support arm 118 extends obliquely with respect to the second direction, but is the same as the first embodiment in that it protrudes in the second direction. is there. The second portion 122 of the support arm 118 extends from the tip in the second direction. The support arm 118 includes a third portion 124 that connects the first and second portions 120 and 122 at a position shifted from the base 112 in the second direction. An angle α (inner angle at which the first outer edge 132 is disposed on the inner side) formed by the extending direction of the first portion 120 and the extending direction of the second portion 122 is an acute angle. The second portion 122 of the support arm 118 has a bent portion 130, and the angle formed by the first or second straight portion 126, 128 of the bent portion 130 is larger than that in the first embodiment. Yes. The other contents of the present embodiment correspond to the contents of the first embodiment.
本発明は、上述した実施の形態に限定されるものではなく、種々の変形が可能である。例えば、本発明は、実施の形態で説明した構成と実質的に同一の構成（例えば、機能、方法及び結果が同一の構成、あるいは目的及び結果が同一の構成）を含む。また、本発明は、実施の形態で説明した構成の本質的でない部分を置き換えた構成を含む。また、本発明は、実施の形態で説明した構成と同一の作用効果を奏する構成又は同一の目的を達成することができる構成を含む。また、本発明は、実施の形態で説明した構成に公知技術を付加した構成を含む。 The present invention is not limited to the above-described embodiments, and various modifications can be made. For example, the present invention includes configurations that are substantially the same as the configurations described in the embodiments (for example, configurations that have the same functions, methods, and results, or configurations that have the same purposes and results). In addition, the invention includes a configuration in which a non-essential part of the configuration described in the embodiment is replaced. In addition, the present invention includes a configuration that exhibits the same operational effects as the configuration described in the embodiment or a configuration that can achieve the same object. Further, the invention includes a configuration in which a known technique is added to the configuration described in the embodiment.
１０…音叉型圧電振動片、 １２…基部、 １４…振動腕、 １６…溝、 １８…支持腕、 ２０…第１の部分、 ２２…第２の部分、 ２４…第３の部分、 ２６…第１の直線部、 ２８…第２の直線部、 ３０…屈曲部、 ３２…第１の外縁、 ３４…第２の外縁、 ３６…励振電極、 ３８…第１の電極膜除去部、 ４０…第２の電極膜除去部、 ４２…接続電極、 ４４…パッケージ、 ４６…底部、 ４８…枠壁部、 ４９…通気孔、 ５０…シール部、 ５２…固定電極、 ５４…外部端子、 ５６…導電性接着剤、 ５８…リング、 ６０…蓋、 ６２…貫通穴、 ６４…光透過性部材、 １１２…基部、 １１８…支持腕、 １２０…第１の部分、 １２２…第２の部分、 １２４…第３の部分、 １２６…第１の直線部、 １２８…第２の直線部、 １３０…屈曲部、１３２…第１の外縁 DESCRIPTION OF SYMBOLS 10 ... Tuning fork type piezoelectric vibrating reed, 12 ... Base, 14 ... Vibrating arm, 16 ... Groove, 18 ... Support arm, 20 ... First part, 22 ... Second part, 24 ... Third part, 26 ... First 1 straight portion 28. Second straight portion 30 30 bent portion 32 first outer edge 34 second outer edge 36 excitation electrode 38 ... first electrode film removal portion 40 ... first 2 ... Electrode film removal part 42 ... Connection electrode 44 ... Package 46 ... Bottom part 48 ... Frame wall part 49 ... Vent hole 50 ... Seal part 52 ... Fixed electrode 54 ... External terminal 56 ... Conductivity Adhesive, 58 ... Ring, 60 ... Lid, 62 ... Through-hole, 64 ... Light transmissive member, 112 ... Base, 118 ... Support arm, 120 ... First part, 122 ... Second part, 124 ... Third 126: the first straight part, 128: the second straight part, 130: bent portion, 132: first outer edge
Claims (8)
前記基部から第１の方向に延びる一対の振動腕と、
前記基部に別々に接続する一対の支持腕と、
前記一対の振動腕、前記基部及び前記一対の支持腕に形成された電極と、
を有し、
それぞれの前記支持腕は、前記第１の方向とは反対の第２の方向に突出するように前記基部から延びる第１の部分と、前記第１の方向に向けて、前記基部よりも前記第２の方向に突出した位置から先端まで延びる第２の部分と、前記第１及び第２の部分を接続する第３の部分と、を含み、
前記基部は、一方の前記支持腕の前記第２の部分と、他方の前記支持腕の前記第２の部分とで挟まれる位置にあり、
前記第３の部分は、前記第１の方向を向く第１の外縁と、前記支持腕のなかで最も前記第２の方向に突出する第２の外縁と、を含み、
前記第２の方向に沿った前記基部から前記第２の外縁までの距離は、前記第２の方向に沿った前記第１及び第２の外縁の間隔よりも大きい音叉型圧電振動片。 The base,
A pair of vibrating arms extending in a first direction from the base;
A pair of support arms connected separately to the base;
Electrodes formed on the pair of vibrating arms, the base, and the pair of support arms;
Have
Each of the support arms includes a first portion extending from the base so as to protrude in a second direction opposite to the first direction, and the first portion extending from the base toward the first direction. A second portion extending from a position protruding in the direction of 2 to the tip, and a third portion connecting the first and second portions,
The base is in a position sandwiched between the second part of one of the support arms and the second part of the other support arm,
The third portion includes a first outer edge facing the first direction, and a second outer edge protruding most in the second direction among the support arms,
A tuning fork type piezoelectric vibrating piece in which a distance from the base portion along the second direction to the second outer edge is larger than a distance between the first and second outer edges along the second direction.
前記第１の部分は、前記第２の方向に沿って延びている音叉型圧電振動片。 In the tuning fork type piezoelectric vibrating piece according to claim 1,
The first portion is a tuning fork-type piezoelectric vibrating piece extending along the second direction.
前記第１、２及び３の部分は、接続されてコ字状又はＵ字状をなす音叉型圧電振動片。 The tuning fork type piezoelectric vibrating piece according to claim 2,
The first, second, and third portions are tuning fork-type piezoelectric vibrating pieces that are connected to form a U shape or a U shape.
前記第１の部分は、前記第２の方向に対して斜めに延びている音叉型圧電振動片。 In the tuning fork type piezoelectric vibrating piece according to claim 1,
The first portion is a tuning fork type piezoelectric vibrating piece extending obliquely with respect to the second direction.
前記第１の部分の延びる方向と前記第２の部分の延びる方向とのなす角度であって、前記第１の外縁を内側に配置する内角は、鋭角である音叉型圧電振動片。 The tuning fork type piezoelectric vibrating piece according to any one of claims 1 to 4,
A tuning-fork type piezoelectric vibrating piece, which is an angle formed by a direction in which the first portion extends and a direction in which the second portion extends, and an inner angle at which the first outer edge is disposed on the inner side is an acute angle.
前記第２の部分は、前記先端から直線状に延びる第１の直線部と、前記第３の部分から直線状に延びる第２の直線部と、前記第１及び第２の直線部の間で前記一対の振動腕の方向に屈曲する屈曲部と、を含む音叉型圧電振動片。 The tuning fork type piezoelectric vibrating piece according to any one of claims 1 to 5,
The second portion includes a first straight portion extending linearly from the tip, a second straight portion extending linearly from the third portion, and the first and second straight portions. A tuning-fork type piezoelectric vibrating piece including a bent portion bent in the direction of the pair of vibrating arms.
前記音叉型圧電振動片を内部に収容するパッケージであって、前記内部に固定電極を有するパッケージと、
前記支持腕で前記音叉型圧電振動片及び前記パッケージを機械的に接合し、前記接続電極及び前記固定電極を電気的に接続する導電性接着剤と、
を含む音叉型圧電振動子。 The tuning fork type piezoelectric vibrating piece according to any one of claims 1 to 5, wherein the electrode includes a tuning fork type piezoelectric vibrating piece including a connection electrode formed on the support arm,
A package for accommodating the tuning-fork type piezoelectric vibrating piece in the package, the package having a fixed electrode in the interior;
A conductive adhesive for mechanically joining the tuning fork type piezoelectric vibrating piece and the package with the support arm, and electrically connecting the connection electrode and the fixed electrode;
Tuning fork type piezoelectric vibrator.
前記第２の部分は、前記先端から直線状に延びる第１の直線部と、前記第３の部分から直線状に延びる第２の直線部と、前記第１及び第２の直線部の間で前記一対の振動腕の方向に屈曲する屈曲部と、を含み、
前記導電性接着剤は、前記第２の直線部及び前記屈曲部を避けて前記第１の直線部と前記パッケージを接合し、前記第２の直線部及び前記屈曲部を前記パッケージから浮いた状態に保持する音叉型圧電振動子。 The tuning fork type piezoelectric vibrator according to claim 7,
The second portion includes a first straight portion extending linearly from the tip, a second straight portion extending linearly from the third portion, and the first and second straight portions. A bending portion bent in the direction of the pair of vibrating arms,
The conductive adhesive avoids the second straight portion and the bent portion, joins the first straight portion and the package, and floats the second straight portion and the bent portion from the package. Tuning fork type piezoelectric vibrator held in
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| JP4685910B2 (en) * | 2008-09-29 | 2011-05-18 | 日本電波工業株式会社 | Piezoelectric device |
| CN102025342B (en) | 2009-09-18 | 2014-12-17 | 精工爱普生株式会社 | Vibration reed, vibrator, oscillator and electronic device |
| JP5565158B2 (en) * | 2009-09-18 | 2014-08-06 | セイコーエプソン株式会社 | Vibrating piece, vibrator, oscillator, and electronic device |
| JP5652122B2 (en) * | 2009-12-25 | 2015-01-14 | セイコーエプソン株式会社 | Vibrating piece, vibrating device and electronic device |
| US8283988B2 (en) | 2010-02-25 | 2012-10-09 | Seiko Epson Corporation | Resonator element, resonator, oscillator, and electronic device |
| JP2011239132A (en) * | 2010-05-10 | 2011-11-24 | Seiko Epson Corp | Vibration piece, vibrator and oscillator |
| JP5605501B2 (en) * | 2011-03-24 | 2014-10-15 | 富士通株式会社 | Tuning fork type vibrator |
| JP5884849B2 (en) * | 2014-03-20 | 2016-03-15 | セイコーエプソン株式会社 | Vibrating piece, vibrator, oscillator, gyro sensor and electronic equipment |
| JP6450551B2 (en) * | 2014-09-30 | 2019-01-09 | エスアイアイ・クリスタルテクノロジー株式会社 | Piezoelectric vibrator element and piezoelectric vibrator |
| JP5842984B2 (en) * | 2014-11-26 | 2016-01-13 | セイコーエプソン株式会社 | Vibration element, vibration element support structure, and vibration device |
| CN115940876A (en) * | 2022-10-11 | 2023-04-07 | 泰晶科技股份有限公司 | Miniature quartz tuning fork wafer |
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| JP4219737B2 (en) * | 2003-05-30 | 2009-02-04 | リバーエレテック株式会社 | Piezoelectric vibrator |
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