JP2011175090A - Method for manufacturing liquid crystal display element - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a method for manufacturing a liquid crystal display element, for inexpensively and easily obtaining a liquid crystal display element without requiring a large expensive apparatus. <P>SOLUTION: Liquid crystal alignment layers 16, 20 formed on a silicon substrate 4 and a counter electrode substrate 6, respectively, are partially removed in a prescribed portion by scraping and peeling to expose electrodes under the respective alignment layers. To scrape and peel off the alignment layers, for example, a probe pin 5, which is a sharp member, may be used to stick into the layer to scratch. Subsequently, the silicon substrate 4 and the counter electrode substrate 6 are cleaned to remove foreign substances around the portions 1, 2 removed by scraping and peeling. Finally, the silicon substrate 4 and the counter electrode substrate 6 are bonded to each other with a sealing agent 7 leaving a prescribed gap. In the bonding step, an electrode pad 50 in the portion 1 where the liquid crystal alignment layer is removed on the silicon substrate 4, and a counter electrode 18 in the portion 2 where the liquid crystal alignment layer is removed on the counter electrode substrate 6 are electrically connected with a conducting agent 3. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a method for manufacturing a liquid crystal display element.

  In general, a liquid crystal display element called LCOS (Liquid Crystal On Silicon) is formed by forming a liquid crystal alignment film on a silicon substrate having a pixel electrode formed on the surface and a glass substrate having a counter electrode formed on the surface. A liquid crystal display panel in which the two substrates are bonded in a predetermined positional relationship and liquid crystal is injected between the substrates is mounted on a circuit substrate or a base, and a potential difference is applied between the pixel electrode and the counter electrode to control the alignment of the liquid crystal. By doing so, various displays are obtained.

  The supply of the potential to the silicon substrate of the liquid crystal display element is realized by connecting the silicon substrate and the electrode pad on the circuit substrate with a wire and making them electrically conductive. On the other hand, the potential is supplied to the counter electrode by applying a thermosetting conductive resin such as silver paste between the glass substrate and the circuit board to electrically connect the counter electrode and the electrode pad on the circuit board. Is realized.

  Further, when supplying the potential to the counter electrode substrate, the silicon substrate on which the pixel electrode is formed and the liquid crystal alignment film formed on the counter electrode are removed, and the two substrates are bonded in a predetermined positional relationship. It is also possible to perform electrical connection directly to the counter electrode and supply potential to the counter electrode at the same time when the silicon substrate and the electrode pad on the circuit substrate are connected by a wire.

  FIG. 4 is a diagram showing a liquid crystal display element and is a sectional view of the structure. Liquid crystal alignment films 16 and 20 are provided on the silicon substrate 4 on which the plurality of pixels 10 are formed and the counter electrode substrate 6 on which the counter electrode 18 is formed, respectively. The liquid crystal alignment film 16 on the silicon substrate 4 and the liquid crystal alignment film 20 on the counter electrode substrate 6 are irradiated with a powerful laser LA to destroy the liquid crystal alignment film, and on the counter electrode substrate 6 side, the counter electrode 18 is destroyed. A part of the electrode pad 50 for conducting with the counter electrode 18 is exposed on the silicon substrate 4 side. A conductive agent 52 is applied to this portion, and the silicon substrate 4 and the counter electrode substrate 6 are bonded to each other with a seal agent 22 at a predetermined gap, whereby the electrode pad 50 on the silicon substrate 4 and the counter electrode 18 on the counter electrode substrate 6 are bonded. There is an electrical connection between them. (For example, see Patent Document 1)

JP 2006-343515 A

  According to the prior art shown in FIG. 4, a powerful laser LA apparatus is required to remove the liquid crystal alignment films 16 and 20. The laser LA apparatus is a large-scale apparatus and requires a large amount of cost for installation and maintenance. In addition, since a plurality of liquid crystal display elements are formed on the silicon substrate 4 in the wafer state, in order to remove the liquid crystal alignment films 16 and 20 by the powerful laser LA irradiation, the pixel electrode A large stage larger than the formed silicon substrate 4 is required. Similarly, a large apparatus is required when performing simultaneously with a plurality of lasers LA.

  The present invention provides a method for manufacturing a liquid crystal display element that can easily and inexpensively remove the liquid crystal alignment film without requiring a large and expensive device, and as a result, can obtain an inexpensive liquid crystal display element. For the purpose.

  In order to achieve the above object, a method of manufacturing a liquid crystal display element according to the present invention includes a first electrode substrate having a plurality of pixel electrodes and a second electrode substrate having a counter electrode facing the first electrode substrate with a predetermined gap. A liquid crystal alignment film for aligning the liquid crystal on at least the first electrode substrate and the second electrode substrate in a method for manufacturing a liquid crystal display device manufactured by injecting liquid crystal into the predetermined gap A step of removing a predetermined portion of each liquid crystal alignment film of each of the first electrode substrate and the second electrode substrate by removing a part thereof to expose an electrode immediately below the liquid crystal alignment film; And a cleaning process for removing foreign matter remaining around the exposed electrode.

  Further, the step of removing a predetermined portion of the liquid crystal alignment film of each of the first electrode substrate and the second electrode substrate to remove a part thereof to expose the electrode immediately below the liquid crystal alignment film is performed in the state of a wafer substrate. be able to.

  Further, the step of removing a predetermined portion of the liquid crystal alignment film of each of the first electrode substrate and the second electrode substrate to remove a part of the liquid crystal alignment film to expose the electrode immediately below the liquid crystal alignment film, Can be done.

  According to the present invention, since the removal of the liquid crystal alignment film on the silicon substrate on which the pixel electrode is formed and the counter electrode substrate is performed by a simple scraping means, it is possible to efficiently perform the substrate unit without using a large apparatus. Is possible.

  In addition, it is possible to easily remove the liquid crystal alignment film on the silicon substrate on which the pixel electrode is formed and the counter electrode substrate by the above-described effect, and as a result, it is possible to supply an inexpensive and small liquid crystal display element. Become.

Structural sectional view showing a liquid crystal display device according to the present invention Sectional drawing for every process which shows the manufacturing method of the liquid crystal display element of this invention The schematic diagram of the example which performs the manufacturing method of the liquid crystal display element of this invention in a wafer substrate state Structural sectional view showing a liquid crystal display element

  FIG. 1 is a diagram showing a liquid crystal display device according to the present invention, and is a sectional view of the structure. A liquid crystal alignment film 16 is formed on a silicon substrate 4 having a plurality of pixels 10. Similarly, a liquid crystal alignment film 20 is formed on the counter electrode substrate 6 having the counter electrode 18. The liquid crystal alignment films 16 and 20 are partially removed in the substrate state, and have portions 1 and 2 from which the liquid crystal alignment films 16 and 20 are removed, respectively.

  The electrode pad 50 exposed at the portion 1 of the silicon substrate 4 where the liquid crystal alignment film is removed and the counter electrode 18 exposed at the portion 2 of the counter electrode substrate 6 where the liquid crystal alignment film is removed. Is electrically connected by a conductive agent 3 having a conductive ball (not shown), for example. The silicon substrate 4 and the counter electrode substrate 6 are bonded together with a sealant 7 at a predetermined gap.

  FIG. 2 is a diagram showing a method for manufacturing a liquid crystal display element of the present invention, and is a cross-sectional view for each process. Hereinafter, description will be given according to FIG.

(A): Liquid crystal alignment films 16 and 20 are formed on the silicon substrate 4 and the counter electrode substrate 6. The liquid crystal alignment layers 16 and 20 are formed, for example, by oblique deposition of SiO ₂ material.

(B): Subsequently, a predetermined part of the liquid crystal alignment films 16 and 20 is removed by scraping to expose the electrodes directly under the respective alignment films. As the scraping means, for example, the removal can be performed by puncturing the probe pin 5 which is a pointed member and scratching it. By performing the probe pins or the like in this way, this step can be performed in the substrate state of the silicon substrate 4 and the counter electrode substrate 6 and can be performed without requiring a large and expensive apparatus. .

  The process shown in (B) can be performed in a wafer substrate state. FIG. 3 is a schematic view of an example in which the method for producing a liquid crystal display element of the present invention is performed in a wafer substrate state. By using a jig with the probe pins 5 aligned at predetermined positions of the liquid crystal alignment films of the individual liquid crystal display element regions 8 on the silicon substrate 4, the step (B) can be handled in the wafer substrate state. Is possible. According to such a configuration, since it is possible to perform batch processing with easy means, productivity is improved as compared with the case where processing is performed one by one with laser means.

(C): Subsequently, the silicon substrate 4 and the counter electrode substrate 6 are cleaned. In this cleaning step, foreign matters remaining around the portions 1 and 2 where the liquid crystal alignment films 16 and 20 are removed by scraping, for example, SiO ₂ which is the removed liquid crystal alignment film, are removed.

(D): Finally, the silicon substrate 4 and the counter electrode substrate 6 are bonded together with a sealant 7 at a predetermined gap. At this time, the electrode pad 50 in the portion 1 of the silicon substrate 4 from which the liquid crystal alignment film has been removed and the counter electrode 18 in the portion 2 of the counter electrode substrate 6 from which the liquid crystal alignment film has been removed are electrically conductive, for example. Electrical connection is made by a conductive agent 3 having a sphere (not shown).

DESCRIPTION OF SYMBOLS 1 The part from which the liquid crystal aligning film on the silicon substrate was removed 2 The part from which the liquid crystal aligning film on the counter electrode substrate was removed 3 Conducting agent 4 Silicon substrate 5 Probe pin 6 Counter electrode substrate 7 Sealing agent 8 Liquid crystal display element region 10 Pixel Electrode 16 Liquid crystal alignment film 18 on silicon substrate Counter electrode 20 Liquid crystal alignment film 22 on counter electrode substrate Sealing agent 50 Electrode pad 52 Conducting agent

Claims (3)

A first electrode substrate having a plurality of pixel electrodes and a second electrode substrate having a counter electrode facing the first electrode substrate are bonded together with a predetermined gap, and liquid crystal is injected into the predetermined gap. In the manufacturing method of the liquid crystal display element to
at least,
Forming a liquid crystal alignment film for aligning the liquid crystal on the first electrode substrate and the second electrode substrate;
Removing a portion of the liquid crystal alignment film of each of the first electrode substrate and the second electrode substrate by removing a predetermined portion thereof to expose the electrode immediately below the liquid crystal alignment film;
A cleaning step of removing foreign matter remaining around the electrode exposed by the step;
A method for producing a liquid crystal display element, comprising:   The step of removing a predetermined portion of the liquid crystal alignment film of each of the first electrode substrate and the second electrode substrate by removing a part thereof to expose the electrode immediately below the liquid crystal alignment film is performed in the state of a wafer substrate. The method for producing a liquid crystal display element according to claim 1. The step of removing a predetermined portion of the liquid crystal alignment film of each of the first electrode substrate and the second electrode substrate to remove a part thereof to expose the electrode immediately below the liquid crystal alignment film is to stab a pointed member. The method for producing a liquid crystal display element according to claim 1, wherein:

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