JP2011169518A - Heat insulating structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a high-quality heat insulating structure which can be manufactured inexpensively and easily without restricting the shape of a liquid passage. <P>SOLUTION: The heat insulating structure 30 has: an inner surface panel 40 with high thermal conductivity and arranged on a heating element 11 side; an outer surface panel 50 with high thermal conductivity and arranged on an exterior 10b side of a unit 10; a resin tube 60 with low thermal conductivity arranged to be sandwiched between the inner surface panel 40 and the outer surface panel 50, which is a liquid passage (a flow passage) flowing a cooling medium 61 therein such as liquid (water) for example for heat-insulating heat generated by the heating element 11 and transmitted to the exterior 10b by the cooling medium 61; and a sandwiching member 70 for sandwiching the tube 60 between the inner surface panel 40 and the outer surface panel 50 to fix the tube 60. <P>COPYRIGHT: (C)2011,JPO&amp;INPIT

Description

  The present invention, for example, prevents the high-temperature heat generated from one unit in the precision device from affecting the other unit in the precision device adjacent to this unit, and this heat affects the installation environment in which these units are installed. It is related with the heat insulation structure which uses a resin tube in order to insulate the heat which generate | occur | produces from one unit.

  For example, precision devices such as semiconductor manufacturing devices and precision measuring instruments are composed of a plurality of units. These units are greatly affected by temperature changes in the environment in which the precision machine is installed. Therefore, in this precision device, this heat does not affect the installation environment where these units are installed so that the high temperature heat generated from one unit does not affect the other unit in the precision device adjacent to this unit. One unit is required to have high heat insulation performance to insulate heat so that the temperature of the environment in which the precision machine is installed is not changed by the heat generated from itself.

  Therefore, one unit is provided with a heat insulating structure for heat insulation. Note that the heat insulating structure may also be disposed in the other unit. Moreover, the heat insulation structure may be arrange | positioned between one unit and the other unit.

  The heat insulating structure is provided with a liquid path for flowing a cooling medium such as a liquid for heat insulation. This liquid path is made of a metal material having high thermal conductivity such as stainless steel or aluminum.

  For example, as shown in FIG. 8A, the heat insulating structure 120 is disposed in, for example, an outer panel 121, a unit having a heat generating element that generates heat, and an inner panel 122 that is a heat absorbing plate, and the liquid described above. And a cooling pipe 124 as a passage. Generally, the cooling pipe 124 is made of a metal material as described above, and is sandwiched between the outer panel 121 and the inner panel 122 as shown in FIG. The portion 126 is joined to the outer panel 121.

A cooling medium such as water flows through the cooling pipe 124. Thereby, the heat which goes to the exterior from a heat generating body via the unit, the inner surface panel 122, and the outer surface panel 121 is cooled. Further, heat from the outside toward the inside of the unit is cooled through the outer surface panel 121, and the inside of the unit is cooled through the inner surface panel 122.
Thus, the heat insulation structure 120 insulates.

  Such a heat insulating structure 120 is configured as a panel 130. When one panel 130a and the other panel 130b use the same cooling medium, the cooling pipe 124a in one panel 130a and the cooling pipe 124b in the other panel 130b are joints 132a and 132b and a resin tube 134. It is connected by. The joints 132a and 132b connect the tube 134 and the cooling pipes 124a and 124b.

  At this time, the cooling medium flows from the cooling pipe 124a to the cooling pipe 124b through the tube 134.

  For example, in Patent Document 1, in a heat exchanger having a structure for exchanging heat with a surrounding atmosphere by passing a refrigerant through a pipe, the pipe is serpentine-molded, and one or more plates parallel to a predetermined plane A heat exchanger is disclosed in which a plurality of slits are provided in the pipe and a plate material or the like is joined to the pipe by inserting fins so as to be alternately in contact with the pipe on the serpentine molding surface of the pipe.

JP 2001-41665 A

  As described above, the cooling pipe 124 that is a liquid path is made of a metal material. However, using a metal material has good thermal conductivity, but requires bending by a machine tool, for example. For this reason, the shape and length of the liquid channel are restricted, and the processing is costly. Moreover, the cooling pipe 124 needs to be joined to the outer surface panel 121 by the welded portion 126, which is costly and troublesome.

  In order to ensure the desired length of the cooling pipe 124, it is necessary to connect the short cooling pipe 124 by a joint or welding. However, in this case, liquid leakage or the like may occur, and the quality may be deteriorated.

  Moreover, in the panel 130a and the panel 130b, when the cooling pipe 124a and the cooling pipe 124b are connected to the resin tube 134 by the joints 132a and 132b, liquid leakage may occur from the joints 132a and 132b, and the quality may be deteriorated. There is.

  Therefore, in view of the above circumstances, an object of the present invention is to provide a high-quality heat insulating structure that can be manufactured inexpensively and easily without restricting the shape of the liquid channel.

  In order to achieve the object, the present invention provides a heat insulating structure having heat insulating performance disposed in a unit having a heat generating element that generates heat, and an inner panel disposed on the heat generating element side, and an exterior of the unit. A liquid path through which a cooling medium flows, and is disposed between the outer panel disposed on the side and the inner panel and the outer panel, and is generated from the heating element and transmitted to the outside A heat insulating structure comprising: a resin tube that insulates heat by the cooling medium; and a sandwiching member that sandwiches the tube between the inner panel and the outer panel and fixes the tube. I will provide a.

  In order to achieve the object of the present invention, a thermal insulating plate that is disposed between the sandwiching members and prevents the heat from being transmitted between the sandwiching members, and the sandwiching member sandwiches the tube. The heat insulating structure according to the above, further comprising: a fastening member that is disposed so as to penetrate the thermal insulating plate without contacting the sandwiching member and fastens the sandwiching member. provide.

  In order to achieve the object of the present invention, in the sandwiching member, one of the sandwiching members is disposed between the inner surface panel and the tube, and the one sandwiching member is adapted to the shape of the tube. It has a substantially semicircular arc shape, has a tube contact portion that makes surface contact with the tube, a sandwiching portion that sandwiches the thermal insulation plate, and a planar shape that matches the shape of the inner surface panel, The other sandwiching member is disposed between the outer panel and the tube, and the other sandwiching member has a substantially semicircular arc shape in accordance with the shape of the tube. A tube contact portion that is in surface contact with the tube, a sandwiching portion that sandwiches the thermal insulation plate together with the sandwiching portion of one of the sandwiching members, and a front Has a planar shape corresponding to the shape of the outer panel, providing a heat insulating structure according to above, characterized in that it has a said outer panel on the surface in contact with the outer panel contact portion.

  In order to achieve the object of the present invention, the one sandwiching member has a tube abutting portion that abuts on the tube in a state of being in close contact by compression, and a sandwiching portion that sandwiches the thermal insulating plate, The sandwiching member has a tube abutting portion that abuts on the tube in a state of being in close contact by compression, and a sandwiching portion that sandwiches the thermal insulating plate together with the sandwiching portion in one of the sandwiching members. Provided is a heat insulating structure as described.

  In order to achieve the object of the present invention, one of the sandwiching members is a lid of the inner surface panel having a concave shape, and the other sandwiching member has a concave shape so as to cover the tube, The above-described structure is characterized in that the tube is covered and is in close contact with and in surface contact with the outer surface panel having a concave shape at the bottom surface, and is in surface contact with the one sandwiching member at the upper surface portion. Provide heat insulation structure.

  In order to achieve the object of the present invention, a plurality of tubes are sandwiched by being bonded together, a pair of resin sheets that also serve as the sandwiching members, and wound around the tubes, and further, the sheets face each other There is provided a heat insulating structure as described above, comprising a heat insulating curtain having a metal foil attached to a surface and a heat insulating member sandwiched between the sheet and the sheet.

  In order to achieve the object, the present invention provides the heat insulating structure as described above, wherein a metal foil is wound around the tube, and the inner panel and the outer panel also serve as the sandwiching member. To do.

  ADVANTAGE OF THE INVENTION According to this invention, it can manufacture cheaply and easily, without restrict | limiting the shape of a liquid path, and can provide a high quality heat insulation structure.

FIG. 1A is a schematic perspective view of a unit having a heating element and a heat insulating structure provided in the unit in the first embodiment. FIG. 1B is a schematic perspective view of a heat insulating structure. FIG. 1C is an enlarged perspective view of the heat insulating structure. FIG. 1D is a side view of the heat insulating structure. FIG. 1E is a schematic perspective view of a heat insulating structure showing a modified example of arrangement of tubes. FIG. 2 is a schematic diagram illustrating a modification of the first embodiment. FIG. 3A is a schematic perspective view of a heat insulating structure in the second embodiment. FIG. 3B is a schematic perspective view showing the inside of the heat insulating structure. FIG. 3C is an exploded perspective view of the heat insulating structure. FIG. 3D is a schematic side view of the heat insulating structure. FIG. 3E is a schematic side view of the heat insulating structure. FIG. 4A is a schematic perspective view of a heat insulation structure of a first modification example of the second embodiment. 4B is a schematic side view of the heat insulating structure shown in FIG. 4A. FIG. 5A is a side view of a tube in the heat insulating structure of the second modification example of the second embodiment. FIG. 5B is a side view of the heat insulation structure of the second modification example of the second embodiment. FIG. 5C is a side view of the heat insulating structure of the second modification example of the second embodiment. FIG. 5D is a side view of the heat insulating structure of the second modification example of the second embodiment. FIG. 6 is a side view of the heat insulating structure of the third modification example of the second embodiment. FIG. 7 is a side view of the tube in the heat insulation structure of the fourth modification example of the second embodiment. FIG. 8A is a schematic view showing a conventional heat insulation structure. FIG.8 (b) is sectional drawing of the heat insulation structure shown to Fig.8 (a). FIG. 8C is an enlarged view of FIG.

Hereinafter, embodiments of the present invention will be described in detail with reference to the drawings. The first embodiment will be described with reference to FIGS. 1A, 1B, 1C, and 1D.
As shown in FIG. 1A, a precision device such as a semiconductor manufacturing device or a precision measuring instrument is composed of a plurality of units 10. The unit 10 has a heating element 11 that generates heat in the inside 10 a of the unit 10. The heating element 11 is, for example, a motor. Further, in the vicinity of the unit 10 or in the vicinity of the unit 10, another unit (not shown) that is greatly affected by the temperature change of the environment in which the precision device is installed is installed. The unit (not shown) has substantially the same configuration as the unit 10.

The unit 10 has a heat insulating structure 30 having heat insulating performance for preventing the temperature of the environment in which the unit 10 and other units are installed from being changed by the heat generated from the heating element 11.
As shown in FIG. 1A, the heat insulating structure 30 is disposed on the heating element 11 side and becomes the back surface of the unit 10.

  As shown in FIGS. 1B to 1D, the heat insulating structure 30 is disposed on the heating element 11 side, and is disposed on the inner panel 40 having a high thermal conductivity and on the outer side 10b of the unit 10, and has an outer surface having a high thermal conductivity. A liquid path (flow path) that is disposed between the panel 50 and the inner panel 40 and the outer panel 50 and through which a cooling medium 61 such as liquid (water) flows, is generated from the heating element 11. A resin tube 60 having a low thermal conductivity that insulates heat transmitted to the outside 10b by the cooling medium 61, and the sandwiching member 70 that sandwiches the tube 60 between the inner panel 40 and the outer panel 50 and fixes the tube 60. And a heat insulating plate 90 that is disposed between the sandwiching members 70 and prevents heat from being transferred between the sandwiching members 70.

  The inner surface panel 40 and the outer surface panel 50 are, for example, metal plates having a flat plate shape. As shown in FIG. 1D, a tube 60 and a sandwiching member 70 are disposed between the inner panel 40 and the outer panel 50 for heat insulation. The heat conductivity of the inner panel 40 and the heat conductivity of the outer panel 50 are substantially the same, and are higher than the heat conductivity of the tube 60.

  As shown in FIGS. 1B and 1C, the tube 60 has a cylindrical shape, for example, and has a desired length. As shown in FIG. 1B, the tube 60 includes a single tube 60 disposed along the longitudinal direction of the inner panel 40 and the outer panel 50 at both ends in the longitudinal direction of the inner panel 40 and the outer panel 50. The folded tube 60 is formed so that a plurality of folded tubes 60 are connected in the short direction between the inner panel 40 and the outer panel 50. That is, the tube 60 is formed in a convex shape in which the tube 60 protrudes in the longitudinal direction of the inner panel 40 and the outer panel 50, and a plurality of tubes 60 in this state are connected in the short direction between the inner panel 40 and the outer panel 50. It is formed so that it will be in the state which was made.

  As shown in FIG. 1D, in the pair of sandwiching members 70, one sandwiching member 71 is disposed between the inner surface panel 40 and the tube 60. The sandwiching member 71 has a substantially semicircular arc shape in accordance with the shape of the tube 60, and sandwiches the heat insulating plate 90 together with a tube contact portion 71 a that makes surface contact with the tube 60 and a sandwiching portion 73 b described later of the sandwiching member 73. It has a portion 71b and an inner surface panel abutting portion 71c that has a planar shape in accordance with the shape of the inner surface panel 40 and is in surface abutment with the inner surface panel 40. The sandwiching member 71 is manufactured in advance by a mold from a single sheet metal in accordance with the shape of the tube 60 and the shape of the inner surface panel 40. Therefore, the tube contact portion 71a, the sandwiching portion 71b, and the inner panel contact portion 71c are connected. Here, as long as the sandwiching portion 71b is separated from the inner surface panel 40, the tube contact portion 71a may be in contact with the inner surface panel 40 or may be separated.

  Further, as shown in FIG. 1D, the other sandwiching member 73 is disposed between the outer panel 50 and the tube 60. The sandwiching member 73 has a substantially semicircular arc shape in accordance with the shape of the tube 60, and a sandwiching portion 73 b that sandwiches the heat insulating plate 90 together with the sandwiching portion 71 b of the sandwiching member 71 and the tube contacting portion 73 a that makes surface contact with the tube 60. And an outer panel abutting portion 73 c that has a planar shape in accordance with the shape of the outer panel 50 and that abuts the outer panel 50. The sandwiching member 73 is made of a sheet metal in advance by a mold in accordance with the shape of the tube 60 and the shape of the outer panel 50. Therefore, the tube contact portion 73a, the sandwiching portion 73b, and the outer panel contact portion 73c are connected. As long as the sandwiching portion 73b is separated from the outer surface panel 50, the tube contact portion 73a may be in contact with the outer surface panel 50 or may be separated.

  The thermal conductivity of the sandwiching member 70 is higher than the thermal conductivity of the tube 60 and is substantially the same as the thermal conductivity of the inner panel 40 and the outer panel 50.

  The sandwiching member 70 is made of a metal such as copper or aluminum, and is formed by a mold, for example. In particular, the tube contact portions 71a and 73a secure a large contact area with the tube 60, transmit more heat to the tube 60, and prevent heat transfer and radiation to the outside 10b to insulate. , Formed in accordance with the shape of the tube 60.

  The sandwiching member 71 includes heat generated from the heating element 11 and conducted from the inner panel 40 and heat transmitted from the inner panel 40 by radiation, and the inner panel contact portion 71c, the sandwiching section 71b, and the tube from the inner panel 40. It is a transmission member which transmits to the tube 60 via the contact part 71a. Further, the sandwiching member 73 is generated from the heating element 11 and is transmitted to the outer panel 50 by radiation through the inner panel 40, and heat conducted from the outer panel 50 and heat transmitted from the outer panel 50 by radiation are transmitted. It is also a transmission member that transmits to the tube 60 through the outer panel contact portion 73c, the sandwiching portion 73b, and the tube contact portion 73a. In this way, the sandwiching member 70 transmits the heat transmitted from the inner panel 40 and the outer panel 50 to the sandwiching member 70 to the tube 60, thereby providing an environment in which the precision device (the other unit) is installed from the unit 10. By preventing heat transfer to the other unit and becoming a heat insulating plate to insulate, at the same time, by transmitting radiant heat to the tube 60, the environment from the unit 10 to the precision unit (the other unit) and the other unit It becomes a radiation prevention board which prevents radiation.

The heat insulating plate 90 is made of, for example, a resin material.
As shown in FIGS. 1C and 1D, the heat insulating plate 90 is sandwiched between the sandwiching portion 71b and the sandwiching portion 73b of the sandwiching member 70. The thermal insulating plate 90 is disposed between the sandwiching part 71b and the sandwiching part 73b, prevents heat from being transmitted from the sandwiching part 71b to the sandwiching part 73b, and from the sandwiching part 73b to the sandwiching part 71b. Prevent heat transfer.

  The thermal insulating plate 90 is provided with a fastening member 91 such as a screw for fastening the sandwiching members 71 and 73 when the sandwiching members 71 and 73 sandwich the tube 60. The fastening member 91 penetrates the heat insulating plate 90 without contacting the sandwiching part 71b and the sandwiching part 73b. Therefore, the heat insulation plate 90 prevents heat from being transmitted from the sandwiching member 71 (the sandwiching portion 71b) to the sandwiching member 73 (the sandwiching portion 73b) through the fastening member 91, and heat is sandwiched between the sandwiching member 73 (the sandwiching portion 73b). Is prevented from being transmitted toward the pinching member 71 (pinching portion 71b) through the fastening member 91.

  A plurality of such heat insulating structures 30 are arranged as the unit 10 in accordance with the size of the back surface of the unit 10 as shown in FIG. 1A. When a plurality of heat insulating structures 30 are provided, the tube 60 is a single long one provided over each heat insulating structure 30. For example, the tube 60 is exposed from one of the heat insulating structures 30, and the unit 10. And is folded back on the side surface of the unit 10 and disposed in the other heat insulating structure 30.

Next, the operation method of this embodiment will be described.
The sandwiching member 71 and the sandwiching member 73 sandwich the tube 60 between the tube contact portion 71a and the tube contact portion 73a, sandwich the heat insulating plate 90 between the sandwiching portion 71b and the sandwiching portion 73b, and are fastened by the fastening member 91. The

  The sandwiching member 71 and the sandwiching member 73 are the inner panel 40 and the outer panel in a state where the inner panel contact portion 71c is in surface contact with the inner panel 40 and the outer panel contact portion 73c is in surface contact with the outer panel 50. 50, the cooling medium 61 flows through the tube 60.

  At this time, the heat generated from the heating element 11 is transmitted from the inner panel 40 to at least the inner panel abutting portion 71c. Therefore, the pinching member 71 directly transfers this heat from the inner panel contact portion 71c to the tube 60 via the pinching portion 71b and the tube contact portion 71a.

  Further, the heat generated from the heating element 11 and transmitted to the outer panel 50 by radiation through the inner panel 40 is transmitted to at least the outer panel abutting portion 73c. Therefore, the pinching member 73 directly transfers this heat from the tube contact portion 73a to the tube 60 via the pinch portion 73b and the tube contact portion 73a.

  The tube 60 receives the heat transmitted from the inner panel 40 through the sandwiching member 71 (the inner panel contact portion 71c, the sandwiching portion 71b, and the tube contact portion 71a), and the sandwiching member 73 (the outer panel contact portion 73c) from the outer panel 50. The cooling medium 61 cools the heat transferred through the sandwiching portion 73b and the tube contact portion 73a).

  In this way, the sandwiching member 70 transfers heat in the inner panel 40 and the outer panel 50 to the tube 60 without waste, so that the tube 60 insulates the environment where the precision device is installed from the unit 10 and the other unit without waste. .

  The heat generated from the heating element 11 and transmitted to the inner panel 40 is radiated from the inner panel 40. The sandwiching member 71 receives this radiant heat at the inner panel contact portion 71c, the sandwiching portion 71b, and the tube contact portion 71a, and transmits the radiant heat from the tube contact portion 71a to the tube 60.

  Further, as described above, the heat transmitted to the outer panel 50 is radiated from the outer panel 50. The sandwiching member 73 receives this radiant heat at the outer panel contact portion 73c, the sandwiching portion 73b, and the tube contact portion 73a, and transmits the radiation heat to the tube 60 from the tube contact portion 73a.

  The tube 60 cools the heat radiated from the inner surface panel 40 and the heat radiated from the outer surface panel 50 by the cooling medium 61 via the tube contact portion 71a and the tube contact portion 73a.

  Thus, the pinching member 70 transmits radiant heat to the tube 60, so that the tube 60 insulates from the unit 10 to the environment where the precision device is installed and the other unit without waste.

  The heat insulating plate 90 prevents heat from being directly transferred from the inner panel 40 to the outer panel 50, and prevents heat from being transferred directly from the outer panel 50 to the inner panel 40.

  Further, the heat insulating plate 90 prevents heat from being transmitted from the sandwiching member 71 (the sandwiching portion 71b) to the sandwiching member 73 (the sandwiching portion 73b) through the fastening member 91, and heat is sandwiched between the sandwiching member 73 (the sandwiching portion 73b). Is prevented from being transmitted toward the pinching member 71 (pinching portion 71b) through the fastening member 91.

  As described above, in the present embodiment, the tube 60 is made of resin, so that the shape of the liquid channel can be manufactured without requiring special processing, and the manufacturing effort can be simplified at low cost. In the present embodiment, the tube 60 is sandwiched between the sandwiching members 70 and disposed between the inner panel 40 and the outer panel 50. Therefore, it is not necessary to join the inner panel 40 or the outer panel 50 with a welded portion or the like. Cost and effort can be reduced. In the present embodiment, a long tube 60 having a desired length for the resin can be used. Further, in this embodiment, by using the long tube 60 having the desired length, even if a plurality of the heat insulating structures 30 are arranged as the unit 10, a joint or the like is not necessary, liquid leakage can be prevented, and the cost is low. And high quality can be achieved.

  In this embodiment, the heat insulating plate 90 can prevent heat from being directly transferred from the inner panel 40 to the outer panel 50, and can prevent heat from being directly transferred from the outer panel 50 to the inner panel 40. .

  Further, in the present embodiment, the clamping member 91 and the sandwiching member 73 are fastened by the fastening member 91 through the heat insulating plate 90 without bringing the fastening member 91 into contact with the sandwiching member 71 and the sandwiching member 73. . Thereby, in this embodiment, it can prevent by the heat insulation plate 90 that heat transfer arises by the fastening member 91, and can insulate with high quality.

  In the present embodiment, the pinching member 70 transfers the heat transmitted to the inner panel 40 and the outer panel 50 and the heat transmitted by radiation from the inner panel 40 and the outer panel 50 to the tube 60. In order to do so, it can be insulated with high quality.

  In the present embodiment, the tube 60 is made of resin, so that the tube 60 can be disposed also in a heat insulating portion that requires flexibility.

  In the present embodiment, for example, the tube 60 is exposed from one heat insulating structure 30, is further exposed from the unit 10, is folded on the side surface of the unit 10, and is disposed in the other heat insulating structure 30. If it is one long thing arrange | positioned over each heat insulation structure 30, it will not be limited to this. As shown in FIG. 1E, for example, the tube 60 may be exposed from one of the heat insulating structures 30, folded at the inside 10 a of the unit 10, and disposed in the other heat insulating structure 30.

  The arrangement of the tube 60 is not necessarily limited to being folded at both ends as described above as long as heat can be transferred to the tube 60.

Further, in the present embodiment, when it is not necessary to consider the heat radiated from the inner panel 40 and the outer panel 50, the tube contact portion 71a and the sandwiching portion 71b contact the inner panel 40 together with the inner panel contact portion 71c. The tube contact part 73a and the sandwiching part 73b may be in contact with the outer panel 50 together with the outer panel contact part 73c.
In the present embodiment, when considering the heat radiated from the inner panel 40 and the outer panel 50, at least one of the tube contact portion 71a and the sandwiching portion 71b is separated from the inner panel 40, and the tube contact portion 73a It suffices that at least one of the sandwiching portions 73b is separated from the outer panel 50.
In this manner, the sandwiching member 70 is transmitted with heat from the inner panel 40 and the outer panel 50 only by conduction and radiation or conduction.

Next, a modification of the present embodiment will be described with reference to FIG.
The thermal conductivity of the inner panel 40 of this modification is lower than the thermal conductivity of the outer panel 50. Therefore, the inner panel 40 is easy to radiate. Therefore, the sandwiching member 70 is separated from the inner panel 40 and the outer panel 50 in order to transmit radiant heat to the tube 60. Further, the sandwiching member 71 and the sandwiching member 73 are alternately arranged.

  Thus, in this modification, more radiant heat can be transmitted to the tube 60, and a higher quality heat insulation performance can be obtained.

  Further, in this modified example, since only the tube contact portions 71a and 73a and the sandwiching portions 71b and 73b have to be manufactured with a mold, the sandwiching member 70 can be manufactured inexpensively and easily.

Next, a second embodiment according to the present invention will be described with reference to FIGS. 3A to 3E. In addition, about the structure same as 1st Embodiment, description is abbreviate | omitted by attaching | subjecting the same referential mark as 1st Embodiment.
The inner surface panel 40 and the outer surface panel 50 of this embodiment are box members having, for example, a concave shape, as shown in FIG. 3E. The inner panel 40 is smaller than the outer panel 50 and is covered by the outer panel 50. At this time, a tube 60 and a sandwiching member 70 are disposed between the inner panel 40 and the outer panel 50 for heat insulation.

  As shown in FIGS. 3C, 3D, and 3E, in the sandwiching member 70, the sandwiching member 71 includes a tube abutting portion 71a that abuts against the tube 60 in a state of being in close contact by compression, and a heat insulating plate 90 together with the sandwiching portion 73b. And a sandwiching portion 71b.

  As shown in FIGS. 3C, 3D, and 3E, the sandwiching member 73 includes a tube abutting portion 73a that abuts against the tube 60 in a state of being in close contact by compression, and a sandwiching portion that sandwiches the thermal insulating plate 90 together with the sandwiching portion 71b. 73b.

  The thermal conductivity of the sandwiching member 70 is higher than the thermal conductivity of the tube 60 and is substantially the same as the thermal conductivity of the inner panel 40 and the outer panel 50.

  As shown in FIG. 3C, the sandwiching member 70 is a metal such as copper or aluminum, for example, and is a sheet metal with a depression in advance to secure a large contact area with the tube 60 and prevent heat transfer and radiation to insulate. 3D and FIG. 3E, the tube 60 and the heat insulating plate 90 are sandwiched between the depressions and are compressed by bending to compress each other. This depression may be formed in advance with a mold or the like, or may be formed when compression is performed.

  When the sandwiching member 70 is processed in this manner, the sandwiching member 70, which is a sheet metal, contacts and sandwiches the tube 60 in a close contact state, and the tube contact portions 71a and 73a having a substantially rectangular shape and the heat insulating plate 90 are provided. The sandwiching portions 71b and 73b having a planar shape are sandwiched.

As shown in FIG. 3E, the sandwiching member 71 is a transmission member that transmits heat transmitted from the inner surface panel 40 by radiation to the tube 60 via the tube contact portion 71a and the sandwiching portion 71b. The sandwiching member 73 is a transmission member that transmits heat transmitted from the outer panel 50 by radiation to the tube 60 via the tube contact portion 73a and the sandwiching portion 73b. In this way, the sandwiching member 70 transmits the heat transmitted from the inner panel 40 and the outer panel 50 to the sandwiching member 70 to the tube 60, thereby providing an environment in which the precision device (the other unit) is installed from the unit 10. The heat transfer to the other unit is prevented and the heat insulating plate is insulated, and at the same time the radiant heat is transmitted to the tube 60, so that the precision device (the other unit) is installed from the unit 10 and the radiation to the other unit. It becomes the radiation prevention board which prevents.
The sandwiching member 70 is transmitted with heat only from the inner panel 40 and the outer panel 50 by radiation.

  As shown in FIG. 3E, the heat insulating plate 90 of the present embodiment prevents direct heat transfer from the inner surface panel 40 to the outer surface panel 50, and prevents direct heat transfer from the outer surface panel 50 to the inner surface panel 40. In order to do this, the inner panel 40 and the outer panel 50 are also disposed at the contact portion.

Next, the operation method of this embodiment will be described.
As shown in FIG. 3D, for example, in the sandwiching member 71, the heat insulating plate 90 is placed on the sandwiching portion 71b, and the tube 60 is placed on the tube contact portion 71a. In this state, the sandwiching member 73 sandwiches the heat insulating plate 90 and the tube 60.

  Next, the pinching member 71 and the pinching member 73 are compressed toward each other and manufactured by bending to ensure a large contact area with the tube 60. At this time, the tube abutting portions 71 a and 73 a are in close contact with each other to sandwich (crush) the tube 60, and the sandwiching portions 71 b and 73 b sandwich the heat insulating plate 90.

The sandwiching member 71 and the sandwiching member 73 are fastened by a fastening member 91 that penetrates the heat insulating plate 90.
In this state, the sandwiching member 70, the tube 60, the heat insulating plate 90, and the fastening member 91 are disposed on the inner panel 40, and the inner panel 40 is covered by the outer panel 50. At this time, the heat insulating plate 90 is disposed at the contact portion between the inner surface panel 40 and the outer surface panel 50, and the cooling medium 61 flows through the tube 60.

  The heat generated from the heating element 11 and transmitted to the inner panel 40 is radiated from the inner panel 40 toward the sandwiching member 71. The sandwiching member 71 receives this radiant heat at the tube abutting portion 71a and the sandwiching portion 71b and transmits the radiation heat from the tube abutting portion 71a to the tube 60 without waste.

  Further, the heat transmitted to the outer panel 50 by radiation from the inner panel 40 is radiated from the outer panel 50 toward the sandwiching member 73. The sandwiching member 73 receives this radiant heat at the tube abutting portion 73a and the sandwiching portion 73b and transmits it from the tube abutting portion 73a to the tube 60 without waste.

  The tube 60 cools the heat radiated from the inner surface panel 40 and the heat radiated from the outer surface panel 50 by the cooling medium 61 via the tube contact portion 71a and the tube contact portion 73a.

  Further, since the heat insulating plate 90 operates in the same manner as in the first embodiment, detailed description thereof is omitted. Note that the heat insulating plate 90 of this embodiment prevents direct heat transfer from the inner panel 40 to the outer panel 50 and prevents direct heat transfer from the outer panel 50 to the inner panel 40.

Thus, in this embodiment, the same effect as that of the first embodiment can be obtained.
Further, in the present embodiment, by compressing the sandwiching member 70, it is possible to secure a large contact area at the tube contact portions 71a and 73a and eliminate the need for special processing. The heat insulation structure 30 can be made inexpensive.

  In the present embodiment, the sandwiching portion can be brought into close contact with the tube 60 by compression, and the heat insulating plate 90 can be firmly sandwiched by the fastening member 91, so that heat can be more efficiently transferred to the tube 60. it can.

Next, a first modification of the present embodiment will be described with reference to FIGS. 4A and 4B.
In the present embodiment, the heat insulating structure 30 is not configured as the back surface of the unit 10, but is disposed on the back surface 10 c of the unit 10.

  The inner surface panel 40 and the outer surface panel 50 have, for example, a concave shape as in the first embodiment, but are approximately the same in size. The inner panel 40 is disposed on the back surface 10c. The outer panel 50 is deeper than the inner panel 40.

  Further, for example, the sandwiching member 71 is a flat plate and covers the inner panel 40. At this time, the sandwiching member 71 serves as a lid of the inner surface panel 40. A space 41 is formed between the sandwiching member 71 and the inner panel 40. The tube 60 is placed on the sandwiching member 71, and at this time, the sandwiching member 71 is in surface contact with the tube 60.

  The sandwiching member 73 has a concave shape so as to cover the tube 60. The sandwiching member 73 covers the tube 60 and is in close contact with and in surface contact with it. The sandwiching member 73 is in surface contact with the outer panel 50 at the bottom surface portion 73d, and is in surface contact with the sandwiching member 71 at the top surface portion 73e. The height of the sandwiching member 73 is substantially the same as the depth of the outer panel 50.

  The thermal conductivity of the sandwiching member 71 and the thermal conductivity of the sandwiching member 73 are substantially the same as the thermal conductivity of the inner surface panel 40.

Next, an operation method of this modification will be described.
The heat generated from the heating element 11 is transmitted to the sandwiching member 71 and the outer panel 50 via the back surface 10 c and the inner panel 40.
The sandwiching member 71 transmits the transmitted heat to the tube 60 via the sandwiching member 73 including the bottom surface portion 73 d and the top surface portion 73 e and the sandwiching member 71.
The sandwiching member 73 transmits the heat transmitted from the sandwiching member 71 via the upper surface portion 73e and the heat transmitted from the outer surface panel 50 via the bottom surface portion 73d to the tube 60.

Further, the heat generated from the heating element 11 is transmitted to the back surface 10 c and further transmitted to the inner panel 40 by radiation through the space 41.
The heat generated from the heating element 11 and transmitted to the inner panel 40 is radiated from the inner panel 40. Further, as described above, the heat transmitted to the outer panel 50 is radiated from the outer panel 50. The sandwiching member 73 receives this radiant heat and transmits it to the tube 60.
The tube 60 cools the heat transmitted through the sandwiching member 71 and the sandwiching member 73 by the cooling medium 61.
The sandwiching members 71 and 73 are in surface contact with the tube 60. Therefore, heat is transmitted to the tube 60 without waste and is insulated.

  In this way, the sandwiching member 70 transfers heat in the inner panel 40 and the outer panel 50 to the tube 60, so that the tube 60 insulates from the unit 10 to the environment where the precision device is installed and the other unit.

  Thus, in this modification, heat is transferred from the inner surface panel 40 by the entire surface of the sandwiching member 71 and further receives radiant heat. Further, in this modification, the sandwiching member 73 is in surface contact with the outer surface panel 50 at the bottom surface portion 73d and heat is transferred from the outer surface panel 50, and is in surface contact with the sandwiching member 70 at the upper surface portion 73e and is transferred from the sandwiching member 70. The outer panel 50 and the sandwiching member 70 receive radiant heat. Thereby, in this modification, more heat can be transmitted to the tube 60 than in the first embodiment, and high-quality heat insulation performance can be obtained.

Next, a second modification of the present embodiment will be described with reference to FIGS. 5A, 5B, 5C, and 5D.
In this modification, a heat insulating curtain 95 can be configured as shown in FIG. 5C. The heat insulating curtain 95 is disposed between the inner surface panel 40 and the outer surface panel 50.

  The heat insulating curtain 95 sandwiches the plurality of tubes 60 by sticking them together, and improves the thermal conductivity of the tubes 60 as shown in a pair of resin sheets 97 that also serve as the sandwiching members 70 and FIGS. 5A and 5B. In order to achieve this, the metal foil 63 wound around the tube 60 and attached to the opposite surfaces 97a of the sheet 97, and the heat insulating member 99 sandwiched between the one sheet 97 and the other sheet 97 are provided. Have.

For example, an aluminum material or the like is used for the metal foil 63.
The sheet 97 is also a sandwiching member 70 that sandwiches the tube 60. Since the sheet 97 is made of resin, it can be freely deformed according to the shape of the tube 60. Since the heat insulating curtain 95 is flexibly bent by the sheet 97, the degree of freedom of installation of the tube 60 can be improved.

Thereby, this modification can increase the freedom degree of installation of the tube 60.
Moreover, in this modification, heat transfer can be improved by the metal foil 63, and high-quality heat insulation performance can be obtained.

Next, a third modification of the present embodiment will be described with reference to FIG.
In the third modification, for example, if the metal foil 63 is wound around the tube 60, the tube 60 may be directly disposed between the outer panel 50 and the inner panel 40. At this time, the inner panel 40 and the outer panel 50 also serve as the sandwiching member 70. The inner panel 40 and the outer panel 50 are not manufactured by a mold like the sandwiching member 70, and a large contact area with the tube 60 is ensured to prevent heat transfer and radiation and to insulate. Therefore, the sheet metal is manufactured by a bending process in which the sheet metal is compressed toward each other with the tube 60 interposed therebetween.

  The inner surface panel 40 and the outer surface panel 50 are in surface contact with each other in order to crush the tube 60 when it is compressed. At this time, the inner panel 40 and the outer panel 50 fix the position of the tube 60.

  Therefore, in this modification, the heat in the inner surface panel 40 and the outer surface panel 50 can be more efficiently transferred to the tube 60 by the surface contact and the metal foil 63. Moreover, in this modification, the radiant heat in the inner surface panel 40 and the outer surface panel 50 can be more efficiently transmitted to the tube 60 by the metal foil 63. Thereby, in this modification, higher heat insulation performance can be obtained.

  Moreover, in this modification, since the inner surface panel 40 and the outer surface panel 50 serve as the sandwiching member 70, the cost can be reduced. Moreover, in this modification, since the inner surface panel 40 and the outer surface panel 50 compress and fix the tube 60 by compression, the labor of manufacture can be simplified and it can produce in a short time.

Next, a fourth modification of the present embodiment will be described with reference to FIG.
The resin tube 60 in each of the above-described embodiments and modifications may be molded by blending a resin material of the tube 60 with a material having good heat conductivity such as a metal filler in order to improve the heat conductivity. Good. In this case, the metal foil 63 is unnecessary and workability can be improved.

  As described above, the present invention is not limited to the above-described embodiment as it is, and can be embodied by modifying the constituent elements without departing from the scope of the invention in the implementation stage. Further, various inventions can be formed by appropriately combining a plurality of constituent elements disclosed in the embodiment.

  DESCRIPTION OF SYMBOLS 10 ... Unit, 11 ... Heat generating body, 30 ... Heat insulation structure, 40 ... Inner panel, 41 ... Space part, 50 ... Outer panel, 60 ... Tube, 61 ... Cooling medium, 70, 71, 73 ... Insertion member, 71a, 73a ... Tube abutting portions, 71b and 73b .. sandwiching portions, 71c... Inner surface panel abutting portions, 73c... Outer surface panel abutting portions, 90.

Claims (1)

A heat insulating structure that is disposed in a unit having a heating element that generates heat and has heat insulating performance,
An inner panel disposed on the heating element side;
An outer panel disposed on the outside of the unit;
A liquid passage that is disposed so as to be sandwiched between the inner surface panel and the outer surface panel and through which a cooling medium flows, and is made of a resin that insulates the heat generated from the heating element and transmitted to the outside by the cooling medium. Tube of
A sandwiching member that sandwiches the tube between the inner panel and the outer panel and fixes the tube;
The heat insulation structure characterized by comprising.

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