JP2011167810A - ワイヤソー - Google Patents

ワイヤソー Download PDF

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Publication number
JP2011167810A
JP2011167810A JP2010034178A JP2010034178A JP2011167810A JP 2011167810 A JP2011167810 A JP 2011167810A JP 2010034178 A JP2010034178 A JP 2010034178A JP 2010034178 A JP2010034178 A JP 2010034178A JP 2011167810 A JP2011167810 A JP 2011167810A
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JP
Japan
Prior art keywords
wire
workpiece
cutting
work
groove rollers
Prior art date
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Pending
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JP2010034178A
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English (en)
Japanese (ja)
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JP2011167810A5 (enExample
Inventor
Yoichi Tanihata
陽一 谷端
Katsutoshi Matsuo
勝利 松尾
Takahiro Ashida
隆博 蘆田
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Takatori Corp
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Takatori Corp
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Publication date
Application filed by Takatori Corp filed Critical Takatori Corp
Priority to JP2010034178A priority Critical patent/JP2011167810A/ja
Publication of JP2011167810A publication Critical patent/JP2011167810A/ja
Publication of JP2011167810A5 publication Critical patent/JP2011167810A5/ja
Pending legal-status Critical Current

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  • Processing Of Stones Or Stones Resemblance Materials (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP2010034178A 2010-02-19 2010-02-19 ワイヤソー Pending JP2011167810A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010034178A JP2011167810A (ja) 2010-02-19 2010-02-19 ワイヤソー

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010034178A JP2011167810A (ja) 2010-02-19 2010-02-19 ワイヤソー

Publications (2)

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JP2011167810A true JP2011167810A (ja) 2011-09-01
JP2011167810A5 JP2011167810A5 (enExample) 2013-04-25

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ID=44682458

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JP2010034178A Pending JP2011167810A (ja) 2010-02-19 2010-02-19 ワイヤソー

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JP (1) JP2011167810A (enExample)

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013047678A1 (ja) * 2011-09-30 2013-04-04 株式会社 安永 微細粒子製造方法
EP2633936A1 (en) * 2012-02-28 2013-09-04 Meyer Burger AG Holding device
CN103317607A (zh) * 2012-03-19 2013-09-25 松下电器产业株式会社 锭料的切割装置
JP2015062984A (ja) * 2013-09-26 2015-04-09 日特エンジニアリング株式会社 ワイヤソー及びワイヤによるワークの切断方法
CN109176931A (zh) * 2018-10-24 2019-01-11 宁波钜德精工机械有限公司 金刚线多工位截断机
CN111791381A (zh) * 2020-07-20 2020-10-20 唐山晶玉科技股份有限公司 一种多线切割机的倒置式摇摆工作台
CN116001118A (zh) * 2022-12-20 2023-04-25 浙江晶越半导体有限公司 一种碳化硅多线切割冷却系统、切割装置及方法
JP7880025B1 (ja) * 2026-01-05 2026-06-24 トーヨーエイテック株式会社 ワイヤソー装置及びワークの切断加工方法

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10202499A (ja) * 1997-01-14 1998-08-04 Tokyo Seimitsu Co Ltd ワイヤソー
JP2000141364A (ja) * 1998-11-13 2000-05-23 Komatsu Electronic Metals Co Ltd インゴット切断方法およびワイヤソー装置
DE102008030826A1 (de) * 2008-06-30 2009-12-31 Wacker Schott Solar Gmbh Drahtsägevorrichtung

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH10202499A (ja) * 1997-01-14 1998-08-04 Tokyo Seimitsu Co Ltd ワイヤソー
JP2000141364A (ja) * 1998-11-13 2000-05-23 Komatsu Electronic Metals Co Ltd インゴット切断方法およびワイヤソー装置
DE102008030826A1 (de) * 2008-06-30 2009-12-31 Wacker Schott Solar Gmbh Drahtsägevorrichtung

Cited By (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2013047678A1 (ja) * 2011-09-30 2013-04-04 株式会社 安永 微細粒子製造方法
EP2633936A1 (en) * 2012-02-28 2013-09-04 Meyer Burger AG Holding device
WO2013128258A1 (en) * 2012-02-28 2013-09-06 Meyer Burger Ag Holding device
CN104203471A (zh) * 2012-02-28 2014-12-10 梅耶博格公司 夹持装置
JP2015512792A (ja) * 2012-02-28 2015-04-30 マイヤー ブルガー アーゲー 保持装置
CN104203471B (zh) * 2012-02-28 2016-12-07 梅耶博格公司 夹持装置
CN103317607A (zh) * 2012-03-19 2013-09-25 松下电器产业株式会社 锭料的切割装置
JP2015062984A (ja) * 2013-09-26 2015-04-09 日特エンジニアリング株式会社 ワイヤソー及びワイヤによるワークの切断方法
CN109176931A (zh) * 2018-10-24 2019-01-11 宁波钜德精工机械有限公司 金刚线多工位截断机
CN111791381A (zh) * 2020-07-20 2020-10-20 唐山晶玉科技股份有限公司 一种多线切割机的倒置式摇摆工作台
CN116001118A (zh) * 2022-12-20 2023-04-25 浙江晶越半导体有限公司 一种碳化硅多线切割冷却系统、切割装置及方法
JP7880025B1 (ja) * 2026-01-05 2026-06-24 トーヨーエイテック株式会社 ワイヤソー装置及びワークの切断加工方法

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