JP2011160293A - Finline waveguide structure, polarization beam splitter, and method of manufacturing finline waveguide structure - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To improve characteristics of a waveguide component including finline waveguide structure. <P>SOLUTION: Fin bodies (fins 10, 20) are metal patterns and are held between films U, L. In this manner, mutual displacement of the fins 10, 20 can be prevented. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to a fin-line waveguide structure, a polarization separator, and a method for manufacturing a fin-line waveguide structure.

  In a polarization multiplexing system that realizes an increase in transmission capacity for unidirectional communication and bidirectional communication, a polarization separator that separates horizontal polarization and vertical polarization and outputs them to different ports is required.

  FIG. 17A is a cross-sectional view showing the structure of a conventional polarization separator, and FIG. 17B is an enlarged view of a portion indicated by reference numeral M in FIG.

  The polarization separator shown in the figure has a fin-line waveguide structure, and has a configuration in which a fin body (fins 10 and 20) is sandwiched between metal blocks 1 and 2 each having a waveguide groove formed therein. is there. For example, horizontal polarization is confined between fins and separated from vertical polarization.

IEEE microwave magazine Volume: 7 Issue: 6 Date: Dec. 2006 Page (s): 74-84, Low-noise 6-8 GHz receiver, Pandian, JD, Baker, L, Cortes, G, Goldsmith, PF, Deshpande, AA, Ganesan, R, Hagen, J, Locke, L, Wadefalk, N, Weinreb, S IRE Transactions on microwave theory and techniques Date: October.1956 Page (s): 263-267 Recent Advances in Finline Circuits Sloan D. Robertson

  Incidentally, as shown in FIG. 17B, the positions of the fins may be shifted from each other. The fin bends due to an inadvertent external force applied to the fins when assembling the polarization separator, or an impact is applied to the polarization separator when the polarization separator is incorporated into the equipment. Are shifted from each other.

  Due to this positional shift, in the conventional polarization separator, the effect of confining the horizontally polarized waves between the fins is reduced, and the separation characteristic (isolation) is deteriorated.

  The present invention has been made in view of the above problems, and an object thereof is to provide a technique for improving the characteristics of a waveguide component having a finline type waveguide structure.

  In order to solve the above problems, a finline waveguide structure according to the first aspect of the present invention is a finline waveguide structure including a fin body including two fins, and the fin body is a metal. It is a pattern, The said fin line type | mold waveguide structure is provided with the film in which the said fin body was provided.

  A fin line type waveguide structure according to a second aspect of the present invention is a fin line type waveguide structure including a fin body including two fins, the fin body being a metal pattern, and the fin body. Are provided, and the fin line type waveguide structure includes a film sandwiched between the two fin bodies.

  A fin line type waveguide structure according to a third aspect of the present invention is a fin line type waveguide structure including a fin body including two fins, wherein the fin body is a metal pattern, and the fin line type waveguide structure is provided. The wave tube structure includes two films sandwiching the metal pattern.

  For example, in the first to third aspects of the present invention, a metal member is provided so as to surround a portion of the film inside the waveguide.

  For example, the polarization separator includes the above-described fin line type waveguide structure.

  A manufacturing method of a fin line type waveguide structure according to a fourth aspect of the present invention is a manufacturing method of a fin line type waveguide structure, and the fin line type waveguide structure includes a fin body including two fins. And the manufacturing method includes a step of providing a metal pattern as the fin body on the film.

  A manufacturing method of a fin line type waveguide structure according to a fifth aspect of the present invention is a manufacturing method of a fin line type waveguide structure, and the fin line type waveguide structure includes a fin body including two fins. And the manufacturing method includes a step of sandwiching the film with two metal patterns which are the two fin bodies.

  A fin line type waveguide structure manufacturing method according to a sixth aspect of the present invention is a fin line type waveguide structure manufacturing method, wherein the fin line type waveguide structure includes two fins. And the manufacturing method includes a step of sandwiching the metal pattern as the fin body between the two films.

  For example, in the fourth to sixth aspects of the present invention, a step of arranging a metal member so as to surround a portion inside the waveguide in the film is provided. The present invention of claim 1

  According to the present invention, the fin body is made into a metal pattern, the fin body is provided on the film, the fin body is sandwiched between the films, or the fin body is sandwiched between the films, thereby preventing the positional deviation of the fins by the film and improving the characteristics. Can be improved.

It is a top view which shows the schematic structure of the polarization beam splitter which concerns on the 1st Embodiment of this invention. It is sectional drawing which shows the schematic structure of the polarization beam splitter which concerns on the 1st Embodiment of this invention. It is a top view which shows the schematic structure of the polarization beam splitter which concerns on the modification of the 1st Embodiment of this invention. It is a top view which shows the schematic structure of the polarization beam splitter which concerns on the 2nd Embodiment of this invention. It is sectional drawing which shows the schematic structure of the polarization beam splitter which concerns on the 2nd Embodiment of this invention. It is a top view which shows the schematic structure of the polarization beam splitter which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows the 1st step of the manufacturing method of the polarization separator which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows the 2nd step of the manufacturing method of the polarization separator which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows the 3rd step of the manufacturing method of the polarization separator which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows the 4th step of the manufacturing method of the polarization separator which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows the 5th step of the manufacturing method of the polarization separator which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows the 6th step of the manufacturing method of the polarization separator which concerns on the 3rd Embodiment of this invention. It is explanatory drawing which shows the 7th step of the manufacturing method of the polarization separator which concerns on the 3rd Embodiment of this invention. It is a top view which shows the schematic structure of the polarization beam splitter which concerns on the modification of the 3rd Embodiment of this invention. It is a top view which shows the schematic structure of the polarization beam splitter which concerns on the 4th Embodiment of this invention. It is sectional drawing which shows the schematic structure of the polarization beam splitter which concerns on the 4th Embodiment of this invention. It is sectional drawing which shows the structure of the conventional polarization separator.

  Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in each embodiment, the same code | symbol is provided to the member which has an equivalent function, and duplication description is abbreviate | omitted suitably.

[First Embodiment]
1 and 2 are diagrams showing a schematic structure of a polarization beam splitter according to the first embodiment of the present invention. FIG. 1 is a plan view of the surface indicated by line BB in FIG. 2 as viewed in the direction of the arrow. 2 is a cross-sectional view of the surface indicated by the line AA in FIG. Hereinafter, such a polarization separator is simply referred to as a polarization separator. The polarization separator includes metal blocks 1 and 2, fins 10 and 20 (collectively referred to as fin bodies), films U and L, and a plurality of pins P. The fin is a metal plate having electrical resistance.

  The polarization separator has a fin line type waveguide structure, and is composed of fins 10 and 20, films U and L, and a plurality of pins P, and a metal in which a groove for the waveguide is formed. The structure is sandwiched between blocks 1 and 2.

  Each of the fins 10 and 20 is a metal pattern. The fin body composed of the fins 10 and 20 is sandwiched between the films U and L, and the positional displacement of the fins is prevented by the film.

  Since the strongest electric field is generated at a location between the fin 10 and the fin 20, if a region where no film is present occurs at that location and the dielectric constant becomes nonuniform, the propagation characteristics may be deteriorated.

  Therefore, a highly fluid material is used for the film, and the fins 10 and 20 are strongly sandwiched between the films, so that the film material flows into the gaps between the fins 10 and 20, and as a result, as shown in FIG. In addition, it is preferable to prevent a region where no film is present between the fins 10 and 20.

  By being sandwiched between the films U and L, the fin body and the film are integrated, and these can be handled as one component. Therefore, it is possible to prevent an accident that the fin is accidentally dropped and the fin is bent.

  The film is, for example, a dielectric having a low dielectric constant (for example, a relative dielectric constant of 3 or less) and a low tan δ (for example, 0.001 or less). The film is, for example, a polyimide-based film having a thickness of 50 μm. The same applies to other films described later.

  Each pin P is a metal and is disposed so as to surround a portion of the films U and L inside the waveguide. The upper end of each pin P is in contact with the metal block 2, and the lower end of each pin P is in contact with the metal block 1.

  In FIG. 1, spaces inside the waveguide indicated by symbols P1, P2, and P3 are referred to as ports P1, P2, and P3, respectively. The width of each port is several millimeters when millimeter waves are handled. The same applies to other embodiments described later.

  Next, the operation of the polarization separator will be described.

  A millimeter wave including horizontal polarization having an electric field in the direction H and vertical polarization having an electric field perpendicular to the direction H is introduced into the port P1 in FIG. The vertically polarized wave is transmitted through the fins 10 and 20 and propagated to the port P2. On the other hand, the horizontally polarized wave is confined in the gap between the fins 10 and 20 and propagates to the port P3. Since the film prevents the positional deviation of the fins, the horizontally polarized wave is reliably confined in the gap between the fins 10 and 20 and propagated to the port P3. Therefore, the separation characteristics can be improved.

  As described above, according to the fin-line waveguide structure of the polarization separator according to the first embodiment, the fin body is a metal pattern, and includes two films sandwiching the metal pattern. Misalignment of the fins is prevented, and the separation characteristics can be improved.

  In addition, by providing a metal pin P that is disposed so as to surround the waveguide U in the films U and L, radio waves that leak to the outside through the film are reflected by the pin, and such leakage is prevented. Therefore, it is possible to prevent a decrease in separation characteristics. In view of this action, the pin position is preferably close to the inside of the waveguide.

  As shown in FIG. 3, the pin P may be provided at a place where the fins 10 and 20 are not provided. Since the pin position is preferably close to the inside of the waveguide, for example, the fins 10 and 20 are provided inside the waveguide, and the pins are provided near the fins 10 and 20 so that the pin position is inside the waveguide. Can be close to.

[Second Embodiment]
4 and 5 are diagrams showing a schematic structure of a polarization beam splitter according to the second embodiment of the present invention. FIG. 4 is a plan view of the surface indicated by the DD line in FIG. 5 when viewed in the direction of the arrow. FIG. 5 is a cross-sectional view of the surface indicated by line CC in FIG. Hereinafter, such a polarization separator is simply referred to as a polarization separator.

  The polarization separator includes metal blocks 1 and 2, fins 10 and 20 (collectively referred to as fin bodies), films U and L, and metal plates 101, 102, and 103.

  The polarization separator has a configuration in which metal blocks 1 and 2 are sandwiched between fins 10 and 20, films U and L, and metal plates 101, 102, and 103.

  The fin body composed of the fins 10 and 20 is sandwiched between the films U and L, and the positional displacement of the fins is prevented by the film.

  Further, the fin body and the film are integrated, and these can be handled as one part. Therefore, it is possible to prevent an accident that the fin is accidentally dropped and the fin is bent.

  As in the first embodiment, it is preferable to prevent a region where no film is present between the fins 10 and 20.

  Each metal plate is arrange | positioned so that the part inside the waveguide in the films U and L may be surrounded.

  The thickness of each metal plate is equal to the thickness of a fin and a film, and one flat plate shape is comprised with a fin, a film, and a metal plate.

  The metal plate 101 is disposed in contact with a part of the outer periphery of the fin 10. The metal plate 102 is disposed in contact with another part of the outer periphery of the fin 10. The metal plate 103 is disposed so as to contact a part of the outer periphery of the fin 20.

  Since the operation of the polarization separator is the same as that of the first embodiment, the description thereof is omitted.

  As described above, according to the fin-line type waveguide structure of the polarization separator according to the second embodiment, as in the first embodiment, the positional deviation of the fins can be prevented and the separation characteristics can be prevented. Can be improved.

  In addition, by providing the metal plates 101, 102, and 103 disposed so as to surround portions inside the waveguide in the films U and L, the film P is interposed in the same manner as the operation of the pin P in the first embodiment. Therefore, it is possible to prevent radio waves from leaking to the outside, thereby preventing a decrease in separation characteristics. In view of this action, the position of the metal plate is preferably close to the inside of the waveguide.

  Regarding the two films in the first and second embodiments, for example, only one of them may be provided, but it is preferable to provide both. By providing both films, the inside of the waveguide can be structurally symmetrical. The film is a dielectric or the like that affects the propagation characteristics inside the waveguide. However, if the inside of the waveguide is structurally symmetric, the influence on the separation characteristics can be reduced.

[Third Embodiment]
6 and 7 are diagrams showing a schematic structure of a polarization beam splitter according to the second embodiment of the present invention. FIG. 6 is a plan view of the surface indicated by the FF line in FIG. 7 when viewed in the direction of the arrow. 7 is a cross-sectional view of the surface indicated by the EE line in FIG. Hereinafter, such a polarization separator is simply referred to as a polarization separator.

  The polarization separator includes metal blocks 1 and 2, fins 10U and 20U (collectively referred to as fin bodies), 10L and 20L (collectively referred to as fin bodies), a film F, and a plurality of pins P.

  The polarization separator has a configuration in which a metal block 1 and 2 are sandwiched between two fin bodies, a film F, and a plurality of pins P.

  The film F is sandwiched between two fin bodies, and the positional deviation of the fins is prevented by the film.

  Further, the fin body and the film are integrated, and these can be handled as one part. Therefore, it is possible to prevent an accident that the fin is accidentally dropped and the fin is bent.

  Each pin P is a metal and is disposed so as to surround a portion of the film F inside the waveguide. Each pin P passes through one fin of one fin body, the film, and one fin of the other fin body, the upper end is in contact with the metal block 2, and the lower end of each pin P is in contact with the metal block 1.

  Next, a method for manufacturing a polarization separator will be described.

  As shown in FIG. 8, first, fins 10L and 20L, which are metal patterns, are formed on a substrate 100 on which a SiO2 (silicon dioxide) film is formed by a semiconductor exposure process such as metal vapor deposition, sputtering, and etching. The thickness of the fin is preferably such that the skin effect at the frequency of the radio wave introduced into the polarization separator does not become a problem. The thickness of the fin is on the order of nanometers in the case of millimeter waves.

  As shown in FIG. 9, next, a film F is provided on the substrate 100 on which the fins 10L and 20L are formed. For example, a film is pressure-bonded on the substrate 100 and heat-treated.

  As shown in FIG. 10, next, the fins 10U and 20U having the same size and shape as the fins 10L and 20L are formed on the film F so as not to be displaced.

  Next, as shown in FIG. 11, holes for pins P are provided, for example, at intervals of 300 μm, and the holes are filled with metal pins P.

  As shown in FIG. 12, next, the substrate 100 is removed by dicing or the like, and SiO 2 (silicon dioxide) remaining on the fins 10L, 20L, etc. is removed with hydrofluoric acid.

  Thus, the fin body and the film are integrated.

  Next, as shown in FIG. 13, the integrated fin and film are placed on the metal block 1.

  Next, as shown in FIG. 7, the metal block 2 is mounted on the integrated fin and film. Thus, the polarization separator is completed.

  Since the operation of the polarization separator is the same as that of the first embodiment, the description thereof is omitted.

  As described above, according to the fin-line waveguide structure of the polarization separator according to the third embodiment, the fin body is a metal pattern, and the fin is provided with a film sandwiched between the metal patterns. Misalignment is prevented, and separation characteristics can be improved.

  Further, by providing the metal pin P disposed so as to surround the portion inside the waveguide in the film F, radio waves are transmitted to the outside through the film in the same manner as the operation of the pin P in the first embodiment. Since leakage is prevented, it is possible to prevent a decrease in separation characteristics. In view of this action, the position of the pin P is preferably close to the inside of the waveguide.

  As shown in FIG. 14, the pin P may be provided at a place where the fins 10 and 20 are not provided. Since the pin position is preferably close to the inside of the waveguide, for example, the fins 10 and 20 are provided inside the waveguide, and the pins are provided near the fins 10 and 20 so that the pin position is inside the waveguide. Can be close to.

[Fourth Embodiment]
15 and 16 are diagrams showing a schematic structure of a polarization beam splitter according to the fourth embodiment of the present invention. FIG. 15 is a plan view of the surface indicated by the line HH in FIG. 16 when viewed in the direction of the arrow. 16 is a cross-sectional view of the surface indicated by line GG in FIG. Hereinafter, such a polarization separator is simply referred to as a polarization separator.

  The polarization separator includes metal blocks 1 and 2, fins 10U and 20U (collectively referred to as fin bodies), 10L and 20L (collectively referred to as fin bodies), a film F, and metal plates 101, 102, and 103. Prepare.

  The polarization separator has a configuration in which metal blocks 1 and 2 are sandwiched between fins, films U and L, and metal plates 101, 102, and 103.

  The film F is sandwiched between two fin bodies, and the positional deviation of the fins is prevented by the film.

  Further, the fin body and the film are integrated, and these can be handled as one part. Therefore, it is possible to prevent an accident that the fin is accidentally dropped and the fin is bent.

  Each metal plate is arrange | positioned so that the part inside the waveguide in the film F may be surrounded.

  The thickness of each metal plate is equal to the thickness of a fin and a film, and one flat plate shape is comprised with a fin, a film, and a metal plate.

  The metal plate 101 is arrange | positioned so that a part of outer periphery of a film may be touched. The metal plate 102 is disposed so as to contact another part of the outer periphery of the film. The metal plate 103 is arrange | positioned so that a part of outer periphery of a film may be touched.

  Since the operation of the polarization separator is the same as that of the first embodiment, the description thereof is omitted.

  As described above, according to the fin-line waveguide structure of the polarization separator according to the fourth embodiment, as in the third embodiment, the positional deviation of the fins can be prevented and the separation characteristics can be prevented. Can be improved.

  Moreover, by providing the metal plates 101, 102, and 103 disposed so as to surround a portion inside the waveguide in the film F, the same as the operation of each metal plate of the second embodiment, the film is interposed. Since radio waves are prevented from leaking to the outside, it is possible to prevent a decrease in separation characteristics. In view of this action, the position of the metal plate is preferably close to the inside of the waveguide.

  Regarding the two fin bodies in the third and fourth embodiments, for example, only one of them may be provided, but it is preferable to provide both. By providing both fin bodies, the inside of the waveguide can be structurally symmetrical. The fin body affects the propagation characteristics inside the waveguide. However, if the inside of the waveguide is structurally symmetrical, the influence on the separation characteristics can be reduced.

1, 2 ... Metal block 10, 10U, 10L, 20, 20U, 20L ... Fin (metal pattern)
101, 102, 103 ... Metal plate U, L, F ... Film P ... Pin P1, P2, P3 ... Port

Claims (9)

A fin-line waveguide structure comprising a fin body including two fins,
The fin body is a metal pattern;
The fin line type waveguide structure includes a film on which the fin body is provided. A fin-line waveguide structure comprising a fin body including two fins,
The fin body is a metal pattern, and two fin bodies are provided,
The fin line type waveguide structure includes a film sandwiched between the two fin bodies. A fin-line waveguide structure comprising a fin body including two fins,
The fin body is a metal pattern;
The fin line type waveguide structure includes two films sandwiching the metal pattern.   4. The fin-line type waveguide structure according to claim 1, further comprising a metal member disposed so as to surround an inner portion of the waveguide in the film.   A polarization separator comprising the fin-line waveguide structure according to claim 1. A method of manufacturing a fin-line waveguide structure,
The fin line type waveguide structure includes a fin body including two fins and a film,
The manufacturing method includes a step of providing a metal pattern, which is the fin body, on the film. A method of manufacturing a fin-line waveguide structure,
The fin line type waveguide structure includes a fin body including two fins and a film,
The manufacturing method includes a step of sandwiching the film between two metal patterns that are the two fin bodies, and a manufacturing method of a fin-line type waveguide structure. A method of manufacturing a fin-line waveguide structure,
The fin line type waveguide structure includes a fin body including two fins and a film,
The manufacturing method includes a step of sandwiching a metal pattern, which is the fin body, between two films.   9. The method of manufacturing a fin-line type waveguide structure according to claim 6, further comprising a step of arranging a metal member so as to surround a portion of the film inside the waveguide.

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