JP2011154994A - レーザ熱転写装置及びこれを利用した有機発光表示装置の製造方法 - Google Patents
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Abstract
【解決手段】アクセプタ基板130が置かれるステージ101と、アクセプタ基板130上に配置されるドナーフィルム140を支持し、アクセプタ基板130とドナーフィルム140との間隔を調節できるように、ステージ上で昇降自在な支持部110、120と、ステージ101に備えられ、アクセプタ基板130とドナーフィルム140との間の空間に存在するガスを外部に排出させる排出口101aとを有するレーザ熱転写装置である。これにより、基板とドナーフィルムとの密着特性を向上させ、ラミネーション工程やデラミネーション工程中、基板に形成された有機膜がはがれることを最小化できる。
【選択図】図1
Description
101 ステージ、
101a 排出口、
110,120 支持部、
111,121 第1固定部、
112,122 第2固定部、
130 アクセプタ基板、
140 ドナーフィルム、
140a,140b 両端部、
160 加圧部材、
170 レーザ発振装置、
180 チャンバ。
Claims (20)
- アクセプタ基板が置かれるステージと、
前記アクセプタ基板上に配置されるドナーフィルムを支持し、前記アクセプタ基板と前記ドナーフィルムとの間隔を調節できるように、前記ステージ上で昇降する支持部と、
前記ステージに備えられていて、前記アクセプタ基板と前記ドナーフィルムとの間の空間に存在するガスを外部に排出させる排出口と、
を有することを特徴とするレーザ熱転写装置。 - 前記支持部は、前記ドナーフィルムの一端部を支持する第1部材と、前記ドナーフィルムの一端部に対向する他端部を支持する第2部材とを備え、
前記第1部材と前記第2部材とは、相互個別的に前記ステージ上で昇降自在であることを特徴とする請求項1に記載のレーザ熱転写装置。 - 前記第1部材は、前記ドナーフィルムの一端部を固定する第1固定部と、前記第1固定部を前記ステージ上で上下に移動させる第1連結部とを備えることを特徴とする請求項2に記載のレーザ熱転写装置。
- 前記第2部材は、前記ドナーフィルムの他端部を固定する第2固定部と、前記第2固定部を前記ステージ上で上下に移動させる第2連結部とを備えることを特徴とする請求項2または3に記載のレーザ熱転写装置。
- 前記ドナーフィルムと前記アクセプタ基板とのデラミネーション工程時、前記第2部材は、停止した状態で前記第1部材が上昇しつつ、前記ドナーフィルムの一端部から前記アクセプタ基板と分離され、前記第1部材の上昇高が増加するほど、前記ドナーフィルムの一端部から前記ドナーフィルムの他端部に向かって前記ドナーフィルムと前記アクセプタ基板とが分離されることを特徴とする請求項2〜4のいずれか一つに記載のレーザ熱転写装置。
- 前記支持部は、前記アクセプタ基板と前記ドナーフィルムとのラミネーション工程前に、前記アクセプタ基板と離隔されるように前記ドナーフィルムを移動させ、前記排出口は、前記アクセプタ基板と前記ドナーフィルムとによって作られる空間に存在するガスを外部に排出させることを特徴とする請求項1〜5のいずれか一つに記載のレーザ熱転写装置。
- 前記支持部は、前記ガスを外部に排出する間に、前記ドナーフィルムが前記アクセプタ基板に向かって下垂することを防止することを特徴とする請求項1〜6のいずれか一つに記載のレーザ熱転写装置。
- 前記支持部は、前記ドナーフィルムの一端部と他端部とから外部に延びる方向に向かってチルトされて、前記ドナーフィルムが前記アクセプタ基板に向かって下垂することを防止することを特徴とする請求項7に記載のレーザ熱転写装置。
- 前記ドナーフィルム上に配され、前記アクセプタ基板に向かって前記ドナーフィルムに圧力を加える加圧部材をさらに備えることを特徴とする請求項1〜8のいずれか一つに記載のレーザ熱転写装置。
- 前記加圧部材は、前記ドナーフィルムと前記アクセプタ基板とのラミネーション工程時、前記ドナーフィルムに前記アクセプタ基板に向かって圧力を加えて、前記ドナーフィルムと前記アクセプタ基板とを密着させることを特徴とする請求項9に記載のレーザ熱転写装置。
- 前記ドナーフィルムと前記アクセプタ基板とのデラミネーション工程時、前記支持部は、前記ドナーフィルムの一端部を持ち上げ、前記支持部が前記ドナーフィルムの一端部を持ち上げることによって、前記加圧部材は、前記ドナーフィルムの一端部から前記一端部に対向する他端部に沿って移動しつつ、前記ドナーフィルムに圧力を加えることによって、前記アクセプタ基板に転写された薄膜が前記デラミネーション工程中にはがれることを防止することを特徴とする請求項9に記載のレーザ熱転写装置。
- 前記加圧部材は、ローラ形状を有することを特徴とする請求項9〜11のいずれか一つに記載のレーザ熱転写装置。
- レーザ熱転写法を利用した有機発光表示装置の製造方法において、
ステージ上にアクセプタ基板を配置する工程と、
前記アクセプタ基板と離隔されるようにドナーフィルムを配置する工程と、
前記アクセプタ基板と前記ドナーフィルムとの間に存在するガスを除去する工程と、
前記ドナーフィルムと前記アクセプタ基板とをラミネーションする工程と、
前記ドナーフィルムの転写層を前記アクセプタ基板に転写する工程と、
前記ドナーフィルムと前記アクセプタ基板とをデラミネーションする工程と、を含むことを特徴とする有機発光表示装置の製造方法。 - 前記ガスを除去する間に、前記アクセプタ基板と前記ドナーフィルムとの間隔を一定に維持することを特徴とする請求項13に記載の有機発光表示装置の製造方法。
- 前記間隔を維持する間に、前記ドナーフィルムが前記アクセプタ基板に向かって下垂することを防止することを特徴とする請求項14に記載の有機発光表示装置の製造方法。
- 前記ドナーフィルムの一端部と前記一端部に対向する他端部とをそれぞれ前記一端部と前記他端部とから外部に向かう方向に引っ張って、前記ドナーフィルムが前記アクセプタ基板に向かって下垂することを防止することを特徴とする請求項15に記載の有機発光表示装置の製造方法。
- 前記ラミネーション工程は、前記ドナーフィルムに前記アクセプタ基板に向かって圧力を加える工程をさらに含むことを特徴とする請求項13〜16のいずれか一つに記載の有機発光表示装置の製造方法。
- 前記ラミネーション工程は、前記ドナーフィルムの一端部を前記アクセプタ基板に密着させ、前記一端部に対向する他端部を前記アクセプタ基板に密着させることを特徴とする請求項13〜17のいずれか一つに記載の有機発光表示装置の製造方法。
- 前記転写工程は、前記ドナーフィルム上にレーザを照射して、前記転写層をアクセプタ基板に転写させることを特徴とする請求項13〜18のいずれか一つに記載の有機発光表示装置の製造方法。
- 前記デラミネーション工程は、前記ドナーフィルムの一端部を持ち上げつつ、加圧部材を前記一端部から前記一端部に対向する他端部に向かって前記ドナーフィルム上で移動させつつ、前記ドナーフィルムに圧力を加えることを特徴とする請求項13〜19のいずれか一つに記載の有機発光表示装置の製造方法。
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KR20110087830A (ko) | 2011-08-03 |
KR101156437B1 (ko) | 2012-07-03 |
US8784599B2 (en) | 2014-07-22 |
JP5307091B2 (ja) | 2013-10-02 |
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