JP2011151417A5 - - Google Patents

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Publication number
JP2011151417A5
JP2011151417A5 JP2011093561A JP2011093561A JP2011151417A5 JP 2011151417 A5 JP2011151417 A5 JP 2011151417A5 JP 2011093561 A JP2011093561 A JP 2011093561A JP 2011093561 A JP2011093561 A JP 2011093561A JP 2011151417 A5 JP2011151417 A5 JP 2011151417A5
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JP
Japan
Prior art keywords
lid
opening
container
axis
latch
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2011093561A
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English (en)
Japanese (ja)
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JP5263633B2 (ja
JP2011151417A (ja
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Priority to JP2011093561A priority Critical patent/JP5263633B2/ja
Priority claimed from JP2011093561A external-priority patent/JP5263633B2/ja
Publication of JP2011151417A publication Critical patent/JP2011151417A/ja
Publication of JP2011151417A5 publication Critical patent/JP2011151417A5/ja
Application granted granted Critical
Publication of JP5263633B2 publication Critical patent/JP5263633B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2011093561A 2008-09-08 2011-04-20 密閉容器及び該密閉容器の蓋開閉システム Active JP5263633B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2011093561A JP5263633B2 (ja) 2008-09-08 2011-04-20 密閉容器及び該密閉容器の蓋開閉システム

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2008229238 2008-09-08
JP2008229238 2008-09-08
JP2011093561A JP5263633B2 (ja) 2008-09-08 2011-04-20 密閉容器及び該密閉容器の蓋開閉システム

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2009006602A Division JP4732524B2 (ja) 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム

Publications (3)

Publication Number Publication Date
JP2011151417A JP2011151417A (ja) 2011-08-04
JP2011151417A5 true JP2011151417A5 (enExample) 2012-02-02
JP5263633B2 JP5263633B2 (ja) 2013-08-14

Family

ID=42251080

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2009006602A Active JP4732524B2 (ja) 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム
JP2011093561A Active JP5263633B2 (ja) 2008-09-08 2011-04-20 密閉容器及び該密閉容器の蓋開閉システム

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2009006602A Active JP4732524B2 (ja) 2008-09-08 2009-01-15 密閉容器及び該密閉容器の蓋開閉システム

Country Status (1)

Country Link
JP (2) JP4732524B2 (enExample)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US8528947B2 (en) * 2008-09-08 2013-09-10 Tdk Corporation Closed container and lid opening/closing system therefor
JP5270298B2 (ja) * 2008-10-28 2013-08-21 信越ポリマー株式会社 基板収納容器
JP4624458B2 (ja) * 2008-11-11 2011-02-02 Tdk株式会社 密閉容器及び該密閉容器の蓋開閉システム
JP4748816B2 (ja) * 2008-11-28 2011-08-17 Tdk株式会社 密閉容器の蓋開閉システム
JP4919123B2 (ja) * 2010-03-08 2012-04-18 Tdk株式会社 処理基板収納ポッド及び処理基板収納ポッドの蓋開閉システム
KR102346007B1 (ko) * 2020-09-14 2022-01-03 김진국 음식물 쓰레기 처리기
JP7654147B1 (ja) * 2024-09-27 2025-03-31 平田機工株式会社 作業装置、その制御方法、コンピュータ可読式記憶媒体およびコンピュータプログラム製品
CN119121397B (zh) * 2024-11-08 2025-05-13 浙江丽水中欣晶圆半导体科技有限公司 硅基外延片厚度均匀性控制装置及控制方法

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH11145269A (ja) * 1997-11-11 1999-05-28 Starlite Co Ltd 密閉式基板用カセット及びそれを用いたデバイスの製造方法
JP2000255677A (ja) * 1999-03-11 2000-09-19 Toshiba Corp 基板収納用容器と基板収納用容器の蓋体の開閉方法
JP3954287B2 (ja) * 1999-06-28 2007-08-08 東京エレクトロン株式会社 ウェハキャリア用蓋体の着脱装置
JP4223715B2 (ja) * 2001-12-04 2009-02-12 ミライアル株式会社 薄板用収納・保管容器
JP2003297896A (ja) * 2002-03-29 2003-10-17 Hitachi Kokusai Electric Inc 半導体製造装置
JP2004235516A (ja) * 2003-01-31 2004-08-19 Trecenti Technologies Inc ウエハ収納治具のパージ方法、ロードポートおよび半導体装置の製造方法

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