JP2011151417A5 - - Google Patents
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- Publication number
- JP2011151417A5 JP2011151417A5 JP2011093561A JP2011093561A JP2011151417A5 JP 2011151417 A5 JP2011151417 A5 JP 2011151417A5 JP 2011093561 A JP2011093561 A JP 2011093561A JP 2011093561 A JP2011093561 A JP 2011093561A JP 2011151417 A5 JP2011151417 A5 JP 2011151417A5
- Authority
- JP
- Japan
- Prior art keywords
- lid
- opening
- container
- axis
- latch
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 230000002093 peripheral effect Effects 0.000 claims 3
- 230000037431 insertion Effects 0.000 claims 2
- 238000003780 insertion Methods 0.000 claims 2
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2011093561A JP5263633B2 (ja) | 2008-09-08 | 2011-04-20 | 密閉容器及び該密閉容器の蓋開閉システム |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2008229238 | 2008-09-08 | ||
| JP2008229238 | 2008-09-08 | ||
| JP2011093561A JP5263633B2 (ja) | 2008-09-08 | 2011-04-20 | 密閉容器及び該密閉容器の蓋開閉システム |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009006602A Division JP4732524B2 (ja) | 2008-09-08 | 2009-01-15 | 密閉容器及び該密閉容器の蓋開閉システム |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011151417A JP2011151417A (ja) | 2011-08-04 |
| JP2011151417A5 true JP2011151417A5 (enExample) | 2012-02-02 |
| JP5263633B2 JP5263633B2 (ja) | 2013-08-14 |
Family
ID=42251080
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009006602A Active JP4732524B2 (ja) | 2008-09-08 | 2009-01-15 | 密閉容器及び該密閉容器の蓋開閉システム |
| JP2011093561A Active JP5263633B2 (ja) | 2008-09-08 | 2011-04-20 | 密閉容器及び該密閉容器の蓋開閉システム |
Family Applications Before (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009006602A Active JP4732524B2 (ja) | 2008-09-08 | 2009-01-15 | 密閉容器及び該密閉容器の蓋開閉システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (2) | JP4732524B2 (enExample) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US8528947B2 (en) * | 2008-09-08 | 2013-09-10 | Tdk Corporation | Closed container and lid opening/closing system therefor |
| JP5270298B2 (ja) * | 2008-10-28 | 2013-08-21 | 信越ポリマー株式会社 | 基板収納容器 |
| JP4624458B2 (ja) * | 2008-11-11 | 2011-02-02 | Tdk株式会社 | 密閉容器及び該密閉容器の蓋開閉システム |
| JP4748816B2 (ja) * | 2008-11-28 | 2011-08-17 | Tdk株式会社 | 密閉容器の蓋開閉システム |
| JP4919123B2 (ja) * | 2010-03-08 | 2012-04-18 | Tdk株式会社 | 処理基板収納ポッド及び処理基板収納ポッドの蓋開閉システム |
| KR102346007B1 (ko) * | 2020-09-14 | 2022-01-03 | 김진국 | 음식물 쓰레기 처리기 |
| JP7654147B1 (ja) * | 2024-09-27 | 2025-03-31 | 平田機工株式会社 | 作業装置、その制御方法、コンピュータ可読式記憶媒体およびコンピュータプログラム製品 |
| CN119121397B (zh) * | 2024-11-08 | 2025-05-13 | 浙江丽水中欣晶圆半导体科技有限公司 | 硅基外延片厚度均匀性控制装置及控制方法 |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11145269A (ja) * | 1997-11-11 | 1999-05-28 | Starlite Co Ltd | 密閉式基板用カセット及びそれを用いたデバイスの製造方法 |
| JP2000255677A (ja) * | 1999-03-11 | 2000-09-19 | Toshiba Corp | 基板収納用容器と基板収納用容器の蓋体の開閉方法 |
| JP3954287B2 (ja) * | 1999-06-28 | 2007-08-08 | 東京エレクトロン株式会社 | ウェハキャリア用蓋体の着脱装置 |
| JP4223715B2 (ja) * | 2001-12-04 | 2009-02-12 | ミライアル株式会社 | 薄板用収納・保管容器 |
| JP2003297896A (ja) * | 2002-03-29 | 2003-10-17 | Hitachi Kokusai Electric Inc | 半導体製造装置 |
| JP2004235516A (ja) * | 2003-01-31 | 2004-08-19 | Trecenti Technologies Inc | ウエハ収納治具のパージ方法、ロードポートおよび半導体装置の製造方法 |
-
2009
- 2009-01-15 JP JP2009006602A patent/JP4732524B2/ja active Active
-
2011
- 2011-04-20 JP JP2011093561A patent/JP5263633B2/ja active Active
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