JP2011143331A - Inkjet head, and inkjet apparatus - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To keep the pressure of ink present in a common ink chamber of an inkjet head constant to keep the pressure of ink present in a plurality of ink chambers each connected to the common ink chamber constant, so that the amount of ink ejected as droplets from nozzles each attached to the individual ink chambers and the ejection velocity thereof can be kept constant. <P>SOLUTION: The inkjet head including an ink feed passage 10 comprising a feed port 50 for feeding ink from outside; an ink discharge passage comprising a discharge port for discharging ink to outside; a plurality of ink chambers 12A to 12C each communicating with the ink feed passage 10 and the ink discharge passage and comprising a nozzle for ejecting ink therefrom; and a plurality of actuators 13A to 13C each disposed in the pressurized ink chambers 12A to 12C respectively, is characterized in that the cross section of the ink feed passage 10 decreases according to the distance from the feed port 50, and at least a part of the side wall of the ink feed passage 10 is a diaphragm 20. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an inkjet head and an inkjet apparatus including the inkjet head.

  The inkjet head includes a common ink chamber to which ink is supplied from an ink supply source; a plurality of ink chambers communicating with the common ink chamber and having nozzles; and an actuator (for example, a piezo element) disposed in each of the ink chambers May have. When the actuator applies pressure to the ink in the ink chamber, the ink is ejected from the nozzle.

  In order to appropriately eject ink from the nozzle, it is preferable to efficiently convert the pressure by the actuator into a force for ejecting ink from the nozzle. However, there is a problem that the pressure by the actuator is easily dispersed into a force for ejecting ink from the nozzles and a force for moving the ink to the common ink chamber (see Patent Document 1).

  In addition, air may be mixed into the ink inside the inkjet head, or the nozzles of the inkjet head may be clogged, making it impossible to discharge ink appropriately. Therefore, it has been proposed to reduce air contamination and nozzle clogging by circulating ink in the ink jet head (supplying ink to the ink jet head from the outside and discharging ink from the ink jet head) (Patent Document 2). reference). In order to circulate the ink in the inkjet head, there are a mode in which only the ink in the common ink chamber is circulated and a mode in which the ink in the common ink chamber and the ink in the ink chamber are circulated together.

  FIG. 1 shows an example of a mode in which the ink in the common ink chamber and the ink in the ink chamber are circulated together (see Patent Document 2). The ink supply channel 100 and the ink discharge channel 110 constitute a common ink chamber. The ink chambers 120A to 120C communicate with the ink supply channel 100 and the ink discharge channel 110, respectively. That is, the ink chambers 120A to 120C communicate with the ink supply channel 100 via the communication ports 160A to 160C; and communicate with the ink discharge channel 110 via the communication ports 170A to 170C. Further, actuators 130A to 130C are arranged in the ink chambers 120A to 120C, respectively, and nozzles 140A to 140C are formed.

  As shown in FIG. 1, the ink supplied from the ink supply port 500 and flowing through the ink supply channel 100 is provided to each of the ink chambers 120 </ b> A to 120 </ b> C. Part of the ink provided to each of the ink chambers 120A to 120C is ejected as droplets from the nozzles 140A to 140C by the action of the actuators 130A to 130C; the remaining ink is provided to the ink discharge channel 110, and the ink It is discharged from the discharge port 510.

JP 2009-126121 A JP 2008-254196 A

  As described above, in order to properly discharge the ink in the ink jet head, it is important to efficiently convert the pressure of the actuator into a force for discharging the ink from the nozzle; It is also important to keep the supply amount of ink constant, that is, make the ink pressure in each ink chamber constant. This is because if the ink pressure in each ink chamber is not constant, the amount of ink ejected as droplets from the nozzles in each ink chamber and the ejection speed vary.

  However, in the conventional ink jet head, a relatively high pressure is applied to the ink in the ink chamber connected to the vicinity of the supply port of the common ink chamber among the plurality of ink chambers communicating with the common ink chamber; A low pressure was applied to the ink in the ink chamber connected to the portion away from the supply port of the common ink chamber. This is because the ink pressure near the supply port of the common ink chamber is relatively high, but the ink pressure gradually decreases as the distance from the vicinity of the supply port increases. That is, there is a problem that the ink pressure in the common ink chamber is not uniform.

  Therefore, the present inventor makes the ink pressure in the plurality of ink chambers constant by making the ink pressure in the common ink chamber constant, and thereby the amount of ink ejected as droplets from the nozzles in each ink chamber. In addition, it was examined to make the discharge speed constant.

That is, the present invention relates to the following inkjet head and an inkjet apparatus including the inkjet head.
[1] An ink supply channel having a supply port for supplying ink from the outside; a plurality of ink chambers communicating with the ink supply channel and having nozzles for discharging ink; and each of the ink chambers An ink jet head comprising:
The ink-jet head, wherein the cross-sectional area of the ink supply flow path decreases with increasing distance from the supply port, and at least a part of the side wall of the ink supply flow path is a diaphragm.
[2] An ink supply channel having a supply port for supplying ink from the outside and a discharge port for discharging ink to the outside; a nozzle for communicating with the ink supply channel and discharging ink An inkjet head having a plurality of ink chambers; and an actuator disposed in each of the ink chambers,
The ink-jet head, wherein the cross-sectional area of the ink supply flow path decreases with increasing distance from the supply port, and at least a part of the side wall of the ink supply flow path is a diaphragm.
[3] An ink supply channel having a supply port for supplying ink from the outside; an ink discharge channel having a discharge port for discharging ink to the outside; the ink supply channel and the ink discharge channel A plurality of ink chambers having nozzles for discharging ink; and an actuator disposed in each of the ink chambers;
The ink-jet head, wherein the cross-sectional area of the ink supply flow path decreases with increasing distance from the supply port, and at least a part of the side wall of the ink supply flow path is a diaphragm.

[4] The inkjet head according to any one of [1] to [3], wherein the diaphragm is a vibrating metal film.
[5] The ink jet head according to [3], wherein a channel cross-sectional area of the ink discharge channel decreases as the distance from the discharge port increases.
[6] An ink jet apparatus comprising the ink jet head according to any one of [1] to [5].

  The ink jet head of the present invention can make the ink pressure in the ink common chamber, preferably the ink supply flow path, uniform. Therefore, the ink pressure in the plurality of ink chambers connected to the ink common chamber can be made constant, and the amount of droplets ejected from the nozzles of each ink chamber and the ejection speed can be made constant.

FIG. 6 is a schematic diagram showing ink circulation in a conventional inkjet head. It is a figure which shows the flow of the ink in the 1st aspect of the inkjet head of this invention. It is a figure which shows the flow (circulation) of the ink in the 2nd aspect of the inkjet head of this invention. It is a figure which shows the flow (circulation) of the ink in the 3rd aspect of the inkjet head of this invention. It is a figure which shows the preparation examples of the inkjet head of this invention. It is sectional drawing of the flow-path flame | frame shown by FIG. 5C. It is a figure which shows the example of preparation of the flow-path flame | frame shown by FIG. 5C.

  First, the present inventor studied to decrease the capacity of the common ink chamber stepwise or gradually as it moves away from the vicinity of the supply port. As a result, it has been found that the ink pressure in the common ink chamber is made uniform; on the other hand, the ink pressure in each ink chamber cannot be made sufficiently constant only by changing the capacity of the common ink chamber. Was also found. Therefore, the present inventor has provided a diaphragm (diaphragm) acting as a pressure adjusting member in the common ink chamber in order to make the ink pressure in each ink chamber communicating with the shared ink chamber constant. That is, the diaphragm provided in the common ink chamber vibrates to equalize the ink pressure in the common ink chamber.

  The inkjet head of the present invention includes an ink supply channel having a supply port; a plurality of ink chambers having nozzles; and an actuator disposed in each of the ink chambers. Ink is supplied to the ink supply channel of the inkjet head from the outside through a supply port.

  In the ink jet head of the first aspect, all the ink provided to the ink supply channel is ejected from the nozzles without being circulated (see FIG. 2).

  In the ink jet head of the second aspect, a discharge port is also disposed in the ink supply channel along with the supply port. Therefore, the ink provided to the ink supply channel circulates by being discharged from the discharge port to the outside (see FIG. 3).

  The ink jet head according to the third aspect includes an ink discharge channel having an ink discharge port as well as an ink supply channel having a supply port. Therefore, the ink provided to the ink supply channel flows through each ink chamber to the ink discharge channel and is circulated by being discharged to the outside (see FIG. 4).

About Ink Chamber The ink jet head of the present invention has a plurality of ink chambers (see 12A to C in FIGS. 2 to 4). Each of the plurality of ink chambers communicates with an ink supply channel (see 10 in FIGS. 2 to 4) and a communication port (see 16A to C in FIGS. 2 to 4). Although it is only necessary to have a plurality of ink chambers for one ink supply flow path, a maximum of about 1000 ink chambers can be provided. The number of ink chambers may be 2 ⁿ (n is an integer of 1 or more). Since the number of actuators arranged in each ink chamber can be ²ⁿ , waste of circuit components can be eliminated.

  When the ink jet head has an ink discharge channel (see 11 in FIG. 4), each of the plurality of ink chambers communicates with the ink discharge channel through communication ports (see 17A to C in FIG. 4). ing.

  In the ink chamber, nozzles for discharging ink (see 14A to C in FIGS. 2 to 4) are formed. Usually, one nozzle is arranged for one ink chamber. The ink in the ink chamber is ejected as droplets from the nozzles when pressure is applied by an actuator described later (see 13A to C in FIGS. 2 to 4). The volume of droplets ejected from the nozzle is not particularly limited, and may be in the range of 1 to 20 pl.

  In this way, ink is provided from the ink supply channel to each ink chamber, and the ink provided to the ink chamber is ejected from the nozzle. However, when the ink discharge channel is provided, the remaining ink that has not been ejected is provided to the ink discharge channel.

About the actuator The ink jet head of the present invention has an actuator arranged in each ink chamber. One or more actuators are disposed in each ink chamber. An actuator is an operating device that converts a control signal into an actual motion, and may be a heater (a heating element) or a piezo (piezoelectric element), but is preferably a piezo. When the actuator is a heater, it is referred to as a thermal method, and when the heater generates heat, bubbles are generated in the ink in the ink chamber, pressure is applied, and the ink is ejected. Therefore, depending on the type of ink, there is a risk of deterioration due to heat. On the other hand, when the actuator is a piezo, it is called a piezoelectric system, and the piezo is distorted to change the capacity of the ink chamber, thereby applying pressure to the ink and ejecting the ink.

  Piezoelectric actuators can be classified into thin film piezos and laminated piezos. Thin film piezos have a fast output response to input but tend to have low output. For this reason, the thin film piezo tends to vary in ejection depending on the ink pressure and viscosity in the ink chamber to be ejected. Therefore, depending on the type of ink, proper ejection may not be possible. On the other hand, the laminated piezo has a slow output response to the input, but it is easy to increase the output. Therefore, the laminated piezo is less affected by the ink pressure in the ink chamber to be ejected, and can realize stable ejection. Therefore, in some cases, the piezoelectric head actuator of the present invention is preferably a laminated piezo.

  Piezoelectric actuators can be broadly classified into share mode, push mode, and bend mode depending on the output form (distortion method). The ink jet head of the present invention may employ any mode of piezo.

About Ink Supply Channel The inkjet head of the present invention has one or a plurality of ink supply channels. The ink supply channel has an ink supply port for supplying ink from the outside, for example, an ink tank of an ink jet apparatus. The ink supply flow path constitutes an ink flow path with the ink supply port on the upstream side. A plurality of the aforementioned ink chambers are connected to the ink supply channel along the ink flow.

  The ink supply channel may not have a discharge port for discharging the ink to the outside (see FIG. 2), or may have a discharge port (see 51 in FIG. 3). When the ink supply channel does not have a discharge port, the ink is not circulated. When the ink supply channel has a discharge port, it is preferable to dispose the discharge port on the most downstream side of the ink supply channel.

  The ink supply amount supplied to the ink supply channel is not particularly limited, and may be several ml / min or more. The ink supplied to the ink supply channel through the supply port is distributed and provided to each of the plurality of ink chambers.

It is preferable that the channel cross-sectional area of the ink supply channel is not constant and decreases from upstream to downstream (as the distance from the ink supply port) (see 10 in FIGS. 2 to 4). With decreasing, it may decrease gradually with a gradient and may decrease in steps. The upstream channel cross-sectional area S ₁ of the ink supply channel is preferably 5 to 20 mm ² ; the downstream channel cross-sectional area S ₂ is preferably ^2.5 to 10 mm ² . The ratio of _{S 2} relative to _{S 1 (S 2 / S 1} ) is may be less than 1, it is preferable that 0.9 to 0.3. The channel length of the ink supply channel is not particularly limited, but is 50 to 120 mm.

  A part of the wall surface of the ink supply flow path of the ink jet head of the present invention is preferably a vibrating film (see 20, 20 'in FIGS. 2 to 4). The membrane that can vibrate is, for example, a diaphragm. The diaphragm is a member that can vibrate by attaching a metal film or a resin film to a frame-shaped member, for example.

  The amplitude of the diaphragm is preferably set to about 100 nm or less. This is because the maximum displacement of the piezoelectric element is about 200 to 300 nm.

In the diaphragm, the product EI of the Young's modulus E and the secondary moment of inertia I is preferably set in the range of 2.9 × 10 ⁻¹⁹ GPa · m ^{4 to} 6.2 × 10 ⁻¹⁵ GPa · m ⁴ . The Young's modulus E is a constant specific to the substance. Second moment I ^{are, I = b × h 3/} 12 (b: width of the film, h: thickness of the film) is calculated by.

Examples of the metal film constituting the diaphragm include a stainless steel film (Young's modulus E = 190 to 220 GPa). The thickness of the stainless steel film may be adjusted so that the value of the moment of inertia of the cross section is 1.5 × 10 ^{−20 to} 2.8 × 10 ⁻¹⁶ m ^4, and the width of the stainless steel film is about 1 mm 1 to 25 μm, for example, 20 μm.

  The resin film constituting the diaphragm is required to be a resin film having high chemical resistance, such as polyimide (Young's modulus E = 3 to 5 GPa) or polyallyl ether ketone film, but is not particularly limited.

About the ink discharge channel The ink jet head of the present invention may have one or a plurality of ink discharge channels (see 11 in FIG. 4). Providing the ink discharge channel is preferable because the ink in the ink chamber can be circulated. One ink discharge channel may be provided for one ink supply channel, or a plurality of ink discharge channels may be provided.

  The ink discharge channel has an ink discharge port for discharging ink to the outside, for example, an ink tank of an ink jet apparatus. The ink discharge flow path constitutes an ink flow path with the ink discharge port on the downstream side. A plurality of the aforementioned ink chambers are connected to the ink discharge channel along the ink flow.

  Ink is supplied from the plurality of ink chambers to the ink discharge channel, and the ink is discharged to the outside through the ink supply port.

The channel cross-sectional area of the ink discharge channel may be constant; however, it is not constant, and may decrease from downstream to upstream (see 11 in FIG. 4). With decreasing, it may decrease gradually with a gradient and may decrease in steps. The upstream channel cross-sectional area S ₃ of the ink discharge channel is preferably ₃ to 18 mm ² ; the downstream channel cross-sectional area S ₄ is preferably 0.5 to 8 mm ² . The ratio of _{S 3} for _{S 4 (S 2 / S 1} ) is may be less than 1, it is preferable that 0.9 to 0.3.

  In the ink jet head of the present invention, 1) the flow path cross section of the ink supply flow path is not made constant, and the ink supply flow path is made smaller as it goes away from the supply port. 2) A part of the wall surface of the ink supply flow path can vibrate. It can be characterized by having a thin film. Accordingly, the pressure of the ink in the ink supply channel is made uniform, the amount of ink supplied to each ink chamber is made constant, and the pressure of the ink in each ink chamber is made constant. As a result, the ejection speed and ejection amount of ink ejected from the nozzles of each ink chamber are made constant.

  The above mechanism will be described with reference to FIG. 1 and FIG. As shown in FIG. 1, ink is supplied to the ink supply channel 100 from an ink supply port 500. Part of the supplied ink is first provided to the ink chamber 120A, then provided to the ink chamber 120B, further provided to the ink chamber 120C, and similarly distributed to each ink chamber. Accordingly, the ink flow rate flowing through the ink supply channel 100 gradually decreases. For this reason, the ink pressure inside the ink supply channel 100 having a constant channel cross-section becomes non-uniform. That is, the ink pressure in the vicinity of the supply port 500 increases, and the ink pressure decreases as the distance from the supply port 500 increases.

  Then, a large amount of ink is provided to the ink chamber 120A connected in the vicinity of the ink supply port 500, and the ink pressure in the ink chamber 120A increases; on the other hand, the ink chamber 120C connected to a portion away from the ink supply port 500 In this case, only a small amount of ink is provided, and the ink pressure in the ink chamber 120C is lowered.

  As described above, when the ink pressure in the ink chambers 120A to 120C is not constant, the amount and speed of ink ejected as droplets from the nozzles 140A to 140C are not constant. That is, a relatively large amount of ink is ejected at a high speed from the nozzle 140A of the ink chamber 120A; a relatively small amount of ink is ejected at a low speed from the nozzle 140C of the ink chamber 120C.

  In contrast, in FIG. 4, ink is supplied to the ink supply channel 10 from the ink supply port 50. Part of the supplied ink is first provided to the ink chamber 12A, then provided to the ink chamber 12B, further provided to the ink chamber 12C, and so on. Accordingly, as in the case of FIG. 1, the ink flow rate flowing through the ink supply channel 10 gradually decreases as the distance from the supply port 50 increases. However, the cross-sectional area of the ink supply channel 10 decreases as the distance from the supply port 50 increases. Therefore, even if the flow rate of ink flowing through the ink supply channel 10 gradually decreases, the ink pressure inside the ink supply channel 10 is made uniform.

  Therefore, the amount of ink provided to each of the ink chambers 12A to 12C is also made uniform, and the ink pressure in each of the ink chambers 12A to 12C is constant. As a result, the amount and speed of ink ejected as droplets from the nozzles 14A to 14C of the ink chambers 12A to 12C are also constant.

  Further, a part of the wall surface of the ink supply flow path 10 in FIG. Since the diaphragm 20 is a vibrating film, when the ink pressure inside the ink supply channel 10 is not uniform, the cross-sectional area of the ink supply channel 10 can be expanded by expanding at a portion where the ink pressure is high. it can. For example, when the ink pressure on the upstream side of the ink supply channel 10 (in the vicinity of the supply port 50) is high, the upstream diaphragm 20 expands to a state shown by 20 'in FIG. Thereby, the ink pressure inside the ink supply channel 10 is further uniformized.

  With the above mechanism, the ink pressure inside the ink supply channel of the ink jet head of the present invention is made uniform. As described with reference to FIG. 4, the ink pressure is similarly made uniform in the ink jet head shown in FIGS. 2 and 3 having the ink supply flow path having the same configuration.

  Further, as shown in FIG. 4, the channel cross-sectional area of the ink discharge channel 11 may be changed in the same manner as the channel cross-sectional area of the ink supply channel 10. The ink discharge channel is provided with ink from the ink chamber 12A, then supplied with ink from the ink chamber 12B, further supplied with ink from the ink chamber 12C, and similarly provided from each ink chamber. . Therefore, the flow rate of ink flowing through the ink discharge channel 11 gradually increases as it approaches the discharge port 51. Therefore, as shown in FIG. 2, the ink pressure in the ink discharge channel 11 can be made uniform by increasing the cross-sectional area of the ink discharge channel 11 as it approaches the discharge port 51.

  Furthermore, as with the ink supply channel 10, a part of the wall surface of the ink discharge channel 11 may be used as the diaphragm 21. The diaphragm 21 can make the ink pressure in the ink discharge flow path 11 more uniform. For example, when the ink pressure in the vicinity of the discharge port 51 is high, the downstream diaphragm 21 expands to a state shown by 21 ′ in FIG. 4.

  As described above, the ink jet head of the present invention has a diaphragm on a part of the wall surface of the ink supply channel; it can also have a diaphragm on a part of the wall surface of the ink discharge channel. These diaphragms are effective in equalizing the ink pressure in the ink supply flow path and the ink discharge flow path and suppressing crosstalk. Crosstalk means that when an actuator is operated in one ink chamber and pressure is applied to the ink, the pressure becomes a reaction wave and propagates to the ink in another ink chamber. The diaphragm can suppress crosstalk by absorbing the reaction wave.

Manufacturing method of inkjet head The method of manufacturing the inkjet head of the present invention is not particularly limited. Hereinafter, a manufacturing example of the ink jet head (see FIG. 4) according to the third aspect having the ink discharge channel will be described with reference to FIGS.

  The ink jet head of the present invention can be manufactured by laminating a plurality of plate-like members. Although the material of a plate-shaped member is not specifically limited, For example, it is a stainless plate.

  A plurality of piezos 60 as actuators are arranged on the piezo plate shown in FIG. 5D. Further, a supply port 70 of the ink supply channel (see 71 in FIG. 5C) and a discharge port 80 of the ink discharge channel (see 81 in FIG. 5C) are formed.

  In the channel frame shown in FIG. 5C, one ink supply channel 71 and two ink discharge channels 81 are formed. In addition, a gap 61 is also provided between the ink supply channel 71 and the ink discharge channel 81 to accommodate the piezo 60 disposed on the piezo plate.

  6A is a cross-sectional view (cross-sectional view along the line XX) along the ink supply flow path 71 of the flow path frame shown in FIG. 5C. As shown in FIG. 6A, as the distance from the ink supply port 70 increases, the depth of the top surface 72 decreases. In this manner, the flow path cross section of the ink supply flow path 71 decreases as the distance from the ink supply port 70 increases. Moreover, the top surface 72 of the ink supply channel shown in FIG. 6A is formed of a diaphragm. A groove 73 is formed so that the diaphragm can vibrate.

  6B is a cross-sectional view (cross-sectional view taken along line YY) along the ink discharge flow path 81 of the flow path frame shown in FIG. 5C. As shown in FIG. 6B, the depth of the top surface 82 is reduced as the distance from the ink discharge port 80 increases. In this way, the cross section of the ink discharge flow path 81 decreases as the distance from the ink discharge port 80 increases. Moreover, the top surface 82 of the ink discharge channel shown in FIG. 6B may be formed of a diaphragm. A groove 83 is formed so that the diaphragm can vibrate.

  What is necessary is just to produce a flow-path flame | frame as shown by FIG. First, a housing precursor 92 (FIG. 7A) in which a flow path whose depth changes is prepared. Then, a groove is machined to obtain a housing 92 '(FIG. 7B). On the other hand, the diaphragm 93 is manufactured by etching processing or laser processing. A diaphragm 93 is bonded so as to close the groove of the housing 92 ′ to obtain a flow path frame 92 ″. The diaphragm 93 may be bonded by thermal diffusion bonding, or may be bonded by an adhesive (such as a UV curable resin).

  In the ink chamber plate shown in FIG. 5B, a plurality of flow paths 90 that connect the ink supply flow path 71 and the ink discharge flow path 81 of the flow path frame (FIG. 5C) are arranged. The position of each flow path 90 and the position of each piezo 60 arranged on the first plate are matched. Each flow path 90 of the ink chamber plate becomes an ink chamber.

  In the nozzle plate shown in FIG. 5A, nozzles 91 corresponding to the flow paths 90 of the ink chamber plate are formed.

  Each plate may be laminated by being affixed by an adhesive or affixed by welding, but may be laminated by thermal diffusion bonding (thermocompression bonding).

About Inkjet Device The inkjet device of the present invention is characterized by including the above-described inkjet head, but otherwise has members of known inkjet devices as appropriate. For example, it has a member for fixing the ink jet head, a moving stage for placing and moving an object to which ink is applied, and the like.

  The ink jet device includes an ink circulation device when the ink of the ink jet head is circulated. The ink is circulated by a driving pressure of a pump or the like, but is preferably circulated through a circulation tank so that the supply pressure is constant. The ink jet device may circulate ink of the ink jet head constantly during operation of the device; it may circulate intermittently.

  In the ink jet apparatus of the present invention, the amount of ink ejected as droplets from each nozzle and the ejection speed can be made constant for each nozzle. Therefore, it is possible to uniformly apply ink to an object to be applied with ink. Therefore, for example, it is preferably used as an apparatus for coating and forming an organic light emitting material in the manufacture of an organic EL display panel.

DESCRIPTION OF SYMBOLS 10 Ink supply flow path 11 Ink discharge flow path 12A, 12B, 12C Ink chamber 13A, 13B, 13C Actuator 14A, 14B, 14C Nozzle 16A, 16B, 16C Communication port 17A, 17B, 17C Communication port 20, 21 Diaphragm 20 ', 21 'Diaphragm in an expanded state 50 Ink supply port 51 Ink discharge port 60 Piezo 61 Gap 70 Ink supply port 71 Ink supply channel 72 Top surface of the ink supply channel 73 Groove 80 Ink discharge port 81 Ink discharge channel 82 Ink discharge channel Top surface of channel 83 Groove 90 Channel (ink chamber)
91 Nozzle 92 Housing precursor 92 'Housing 93 Diaphragm 92''Channel frame 100 Ink supply channel 110 Ink discharge channel 120A, 120B, 120C Ink chamber 130A, 130B, 130C Actuator 140A, 140B, 140C Nozzle 160A, 160B, 160C Communication Port 170A, 170B, 170C Communication port 500 Ink supply port 510 Ink discharge port

Claims (6)

An ink supply channel having a supply port for supplying ink from the outside; a plurality of ink chambers communicating with the ink supply channel and having nozzles for ejecting ink; and disposed in each of the ink chambers An inkjet head comprising:
The ink-jet head, wherein the cross-sectional area of the ink supply flow path decreases with increasing distance from the supply port, and at least a part of the side wall of the ink supply flow path is a diaphragm. An ink supply channel having a supply port for supplying ink from outside and a discharge port for discharging ink to the outside; and a plurality of inks having nozzles for communicating with the ink supply channel and for discharging ink An inkjet head comprising: a chamber; and an actuator disposed in each of the ink chambers,
The ink-jet head, wherein the cross-sectional area of the ink supply flow path decreases with increasing distance from the supply port, and at least a part of the side wall of the ink supply flow path is a diaphragm. An ink supply channel having a supply port for supplying ink from the outside; an ink discharge channel having a discharge port for discharging ink to the outside; and communicating with the ink supply channel and the ink discharge channel An inkjet head having a plurality of ink chambers having nozzles for ejecting ink; and an actuator disposed in each of the ink chambers,
The ink-jet head, wherein the cross-sectional area of the ink supply flow path decreases with increasing distance from the supply port, and at least a part of the side wall of the ink supply flow path is a diaphragm.   The inkjet head according to claim 1, wherein the diaphragm is a vibrated metal film or a resin film.   The inkjet head according to claim 3, wherein a flow path cross section of the ink discharge flow path decreases as the distance from the discharge port increases.   An ink jet apparatus comprising the ink jet head according to claim 1.

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