JP2011141724A - Id code reading apparatus for glass substrate - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide an ID code reading apparatus for reading out an ID code of a glass substrate, while storing the glass substrate in a storing tray. <P>SOLUTION: The ID code reading apparatus, for reading out the ID code of the glass substrate stored in a laminated-glass-substrate storing tray, includes: an illuminator for emitting illumination light; a refractor for refracting the illumination light emitted from the illuminator; an imager for imaging an ID code image illuminated by the illumination light refracted by the refractor; a device for moving the illuminator and the imager in a direction vertical to the glass substrate storing tray; and a decoder for converting the imaged ID code image. In the ID code reading apparatus for the glass substrate, the ID code of the glass substrate is read out while storing the glass substrate in the laminated glass substrate storing tray. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an apparatus for reading an ID code of a glass substrate in a state where a glass substrate used for a semiconductor or a color liquid crystal display device is stored in a storage tray.

  FIG. 1 is a view showing a cross section of a color filter substrate used in a color liquid crystal display device as an example of a glass substrate. The color filter 1 includes a black matrix (hereinafter referred to as BM) 3, a red R colored pixel (hereinafter referred to as R pixel) 4-1, a green G colored pixel (hereinafter referred to as G pixel) 4-2, blue on a glass substrate 2. B colored pixels (hereinafter referred to as B pixels) 4-3, a transparent electrode 5, a photo spacer (hereinafter referred to as PS) 6, and a vertical alignment (hereinafter referred to as VA) 7 were sequentially formed. Is.

  As a method for manufacturing a color filter having the above structure, a photolithography method, a printing method, and an ink jet method are known. FIG. 2 is a flowchart showing steps of a commonly used photolithography method. The color filter includes a step of forming BM on a glass substrate (C1), a step of cleaning the glass substrate (C2), a step of applying and pre-drying a colored photoresist (C3), and a colored photoresist. A pre-baking step (C4) for drying and curing, a step (C5) for exposing, a step (C6) for developing, a step (C7) for curing a colored photoresist, and a step (C8) for depositing a transparent electrode. , PS and VA are formed and processed in this order (C9).

  For example, when the pixels are formed in the order of R pixel, G pixel, and B pixel, red is performed between the process of cleaning the color filter glass substrate (C2) and the process of curing the colored photoresist (C7). The color resist is changed in the order of R, green G, and blue B, and the process is repeated three times to form R pixels, G pixels, and B pixels.

  In the manufacturing process of the color filter substrate shown in FIG. 2, in order to manage the glass substrate, an identification code (hereinafter referred to as ID code) is given to each glass substrate by printing or the like. In general, the ID code is printed in an identifiable barcode or two-dimensional code format on the ineffective image portion of the color filter. Traceability of the color filter substrate is obtained by associating the ID code with various data such as glass substrate location information (in-process, storage cassette, number of steps, etc.), quality data and manufacturing history data, and storing them in a computer system. The mechanism is built.

  The ID code reader is mainly composed of a decoding device that decodes (converts) image data into character string data and a CCD camera. The ID code image data captured by the CCD camera is code-recognized by the decoding device and converted into character data. Conversion processing is performed. In order to capture an ID code by a CCD camera, a dedicated light source is generally used to obtain a light amount, and LED illumination is often used as the light source.

  In manufacturing color filters, glass substrate storage trays are used for storing, transporting, transporting and storing glass substrates, which are the main materials. The use of the storage tray is also applied to a glass substrate that is in the middle of the manufacturing process and has been manufactured, and has a wide variety of uses.

As shown in FIG. 3, the packaging state when the glass substrate is stored, transported and stored in the substrate storage tray is usually in a state where a plurality of trays are stacked and mounted on the tray transfer pallet 10. A data carrier 11 such as RFID (Radio Frequency Identification) is attached to the tray conveying pallet 10 and the number of glass substrates stored in the tray, ID data, and the like are stored. This data is mainly stored in the tray with the glass substrate stored and updated on the tray glass substrate take-out device (hereinafter referred to as “tray transfer device”), and referred to by the tray transfer device or an automatic warehouse for storing the glass substrate. Is done.

  One of the plurality of trays shown in FIG. 3 is shown in FIG. The glass substrate storage tray 12 includes a frame portion 13, a glass substrate support portion 14, a glass substrate support portion 15 and the like.

  FIG. 5 shows a cross section taken along line AB in FIG.

  In addition, with the recent increase in display size, the size of glass substrates has also increased, and glass substrates can be stored, transported, and stored efficiently in a limited space without the glass substrates contacting each other. Tray has been proposed.

JP 2004-359343 A JP 2007-314215 A JP 2006-319005 A

  As described above, information such as the number of glass substrates stored in the glass substrate storage tray and the number of storage stages is normally stored in the data carrier attached to the tray transfer pallet, but troubles in the tray transfer device, etc. For some reason, a situation may occur where the glass substrate actually stored and the data stored in the data carrier do not match.

  The tray transfer device and the automatic warehouse perform operation control such as determination of the number of stored / removed sheets and determination of the pallet transport destination based on the information described in the data carrier. For this reason, if there is an error in the data, an error in the number of stored / removed sheets, a problem in the pallet transport destination, or a device stoppage may occur. For example, when a customer puts and ships a pallet into the company's own process, if the ID data recorded on the data carrier differs from the glass substrate ID that was actually put in, the customer is good. The previous line stops in error and becomes a customer complaint, and a great deal of labor and time is required for investigation of the spillover range of trouble and sorting of glass substrates.

  In another example, when a glass substrate is put into a line from a tray on a pallet in which 20 pieces of ID data are stored in a data carrier, 21 glasses are actually stored. There also arises a problem that one glass substrate remains on the top.

  In order to prevent such troubles, before and after pallet entry / exit to / from the automatic warehouse, the presence / absence of glass substrates actually stored in each glass substrate storage tray on the pallet and the data carrier stored data are matched. However, since the glass substrate storage trays are hermetically sealed for dust protection of the stored glass substrates in the stacked state, the glass substrate storage status and glass substrate ID of each tray are externally displayed. It is difficult to confirm. For example, by using a tray transfer device, it is possible to lift each stacked tray and check the presence or absence of the glass substrate in the tray and the glass substrate ID. This is not a desirable method because there is a possibility that a new problem such as a loss of a glass substrate may occur.

  In view of the above problems, an object of the present invention is to provide an apparatus for reading an ID code of a glass substrate in a state of being stored in a storage tray.

The invention according to claim 1 of the present invention is an apparatus for reading an ID code of a glass substrate stored in a stacked glass substrate storage tray,
An illumination means for generating illumination light;
Refracting means for refracting illumination light emitted from the illumination means;
Means for capturing an image of the ID code illuminated by the illumination light refracted by the refraction means;
Means for moving the illumination means and the imaging means in a direction perpendicular to the glass substrate storage tray;
Decoding means for converting the image of the captured ID code,
An ID code reading device for a glass substrate, wherein the ID code of the glass substrate is read in a state of being stored in a stacked glass substrate storage tray.

  The invention according to claim 2 of the present invention is the glass substrate ID code reader according to claim 1, wherein the refracting means includes a prism and a half mirror and a light reflecting material.

  The invention according to claim 3 of the present invention is characterized in that the illumination means and the imaging means are provided in a pallet entry / exit position of an automatic warehouse in which the stacked glass substrate storage trays are stored. It is an ID code reader of the glass substrate of description.

  Using the tray transfer device that has been used so far, the stacked trays are lifted one by one by the mechanism for reading the ID of the glass substrate stored in the storage tray, the presence or absence of the glass substrate in the tray, the glass substrate It is possible to suppress a great amount of time for confirming the ID and a loss such as a scratch on the glass substrate that has occurred during the confirmation.

  It becomes possible to quickly find the mismatch between the actual storage glass substrate and the data carrier information, and as a result, it is possible to prevent device troubles and device stop loss due to the mismatch between the actual glass substrate and data, When the actual storage glass substrate and the data carrier information do not match, it is possible to quickly recover the data.

The figure which showed an example of the color filter used for a color liquid crystal display device in a cross section. The flowchart of the process of the photolithographic method generally used. The figure which shows the state in which the some laminated | stacked tray was mounted on the pallet for tray conveyance. The figure which shows one of several trays. The figure which shows the cross section cut | disconnected by line segment AB in FIG. The figure which shows the example with which the ID code reader of the tray for glass substrate storage which concerns on this invention was equipped in the automatic warehouse entry / exit position. Diagram showing an example of a commonly used automated warehouse The figure which shows the laminated glass substrate storage tray which concerns on this invention. Schematic which shows one glass substrate storage tray in the laminated | stacked glass substrate storage tray which concerns on this invention. The figure which shows the cross section shown by CD of FIG. The figure which showed the ID code reflection mechanism concerning this invention in detail. The figure which shows the ID code reading method which concerns on this invention. The figure which shows ID code reading operation | movement flow concerning this invention. The figure which shows another ID code reflection mechanism which concerns on this invention.

  Hereinafter, an embodiment of an ID code reader in a glass substrate storage tray according to the present invention will be described with reference to the drawings.

  FIG. 6 is a view showing an example in which an ID code reader for a glass substrate storage tray according to the present invention is provided at an automatic warehouse entry / exit position. As shown in FIG. 7, a generally used automatic warehouse is provided with a glass substrate storage cassette loading / unloading port 45 as shown in FIG. 7. The automatic warehouse loading / unloading position is a loading / unloading position. The port 45 is indicated. As an example, the ID code reader of the present invention is provided in the loading / unloading port 45 of the glass substrate storage cassette to the automatic warehouse.

  In the example of the automatic warehouse shown in FIG. 7, the glass substrate storage cassette is carried in from the carry-in port 45-1 and loaded into the automatic warehouse. After the glass substrate stored in the stored glass substrate storage tray is loaded (LD: LOAD) into the BM process, RGB process, inspection process, and other processes (not shown) and processed as necessary. , Unloaded (ULD) and stored in a storage rack in an automatic warehouse by stacker clay. In addition, it is unloaded from the unloading port 45-2.

  The ID code reading head 51 shown in FIG. 6 has an illumination LED light source 53 as an illuminating means and a CCD camera 52 as an imaging means. The illuminating means and the imaging means are arranged in a direction perpendicular to the glass substrate storage tray (Z It is moved in the Z-axis direction by a Z-axis moving mechanism 54 that is a means for moving in the axial direction. The glass substrate storage tray 56 is placed on a tray transport pallet 57 provided with a data carrier 71 and transported to a position where the ID code is read by the ID code reading head 51.

  The ID code image picked up by the CCD camera 52 is transmitted to an ID code decoding device 58 as decoding means using a camera cable. The ID code image is decoded (converted) from image data to character string data by an ID code decoding device, and stored in a specific device of the automatic warehouse control sequencer 59. The ID code image can be confirmed by the ID code confirmation monitor 60. The ID code information stored in the control sequencer is transmitted to a computer system (not shown) via a network as necessary.

  FIG. 8 is a view showing a stacked glass substrate storage tray according to the present invention, and the stacked glass substrate storage tray 70 is mounted on a tray conveying pallet 57. The tray transport pallet 57 is provided with an RFID data carrier 71.

  FIG. 9 is a schematic view showing one glass substrate storage tray 22 among the laminated glass substrate storage trays 70. The glass substrate storage tray 22 includes a frame portion 23, a glass substrate support portion 24, A glass substrate support unit 25, an ID code reflecting mechanism 26, and a glass substrate ID confirmation window 27 are provided.

  FIG. 10 is a diagram showing a cross section indicated by CD in FIG. 9, and the ID code 41 of the glass substrate 40 can be observed through the glass substrate ID confirmation window 27 by the ID code reflecting mechanism 26 provided below the ID code 41. It has a structure.

FIG. 11 is a diagram showing in detail an ID code reflecting mechanism that is means for refracting illumination light. The ID code reflecting mechanism 26 is a prism having a prism shape (the cross-sectional shape is a right isosceles triangle) 28.
Are provided with a half mirror 29 and a light reflecting material 30.

  The pallet containing the glass substrate is loaded into the automatic warehouse loading / unloading port, and the ID code is read in a positioned state. The reading operation flow will be described with reference to the ID code reading method in FIG. 12 and the reading operation flowchart in FIG.

  First, after the start (S1), as shown in FIG. 12A, the CCD camera 52 is at the same height as the position of the glass substrate ID confirmation window 27-1 of the lowermost tray (tray A) on the pallet. As described above, the read head 51 moves in the Z-axis direction (S2). At that time, the LED light source 53 for illumination is set at the same height as the position of the glass substrate ID confirmation window 27-2 of the upper tray (tray B). The CCD camera 52 and the illumination LED light source 53 may be provided at the same interval as the interval between the trays, or may have a structure in which either the CCD camera 52 or the illumination LED light source 53 is movable.

  Next, as shown in FIG. 12B, a part of the light beam a61 emitted from the illumination LED light source 53 is transmitted through the half mirror 29-2 of the ID code reflecting mechanism of the tray B, and the prism 28-2. Are diffused / diffusely reflected and irradiated as a light beam b62 onto the ID code X41-1 of the glass substrate placed on the tray A from the bottom of the tray B (S3).

  Further, the light beam b62 passes through the ID code X41-1 so that the image of the ID code X41-1 is reflected by the half mirror 29-1 of the tray A (S4).

  The image of the ID code X41-1 reflected by the half mirror 29-1 is picked up by the CCD camera 52, and the glass substrate ID (character string data) recorded in the ID code is read by the decoding device. The reading operation of the ID code X41-1 is completed by the above flow (S5).

  Next, when reading of all trays has not been completed (NO in S6), the process returns to step (S2) and shifts to the operation of reading the ID code of the next tray. In the case of FIG. 7A, in order to read the ID code 41-2 of the glass substrate placed on the tray B, the CCD camera 52 is at the same position as the glass substrate ID confirmation window 27-2 on the tray B. The reading head 51 moves (rises) so as to reach a height.

  When reading of the ID codes of all trays is completed in step (S6) (YES in S6), the reading operation is finished (S7).

  In order to read the ID code of the glass substrate stored in the uppermost tray, it is necessary to attach an ID code reflecting mechanism to the dust-proof lid of the pallet in order to secure the light source (a) 27-n.

  In the embodiment for carrying out the present invention, as shown in FIG. 10, the ID code reflecting mechanism 26 is provided in the tray. However, the present invention is not limited to this, and the same number of ID codes as the tray is shown in FIG. An ID code reflecting mechanism group 46 having a reflecting mechanism may be provided outside the stacked trays and moved in the direction indicated by the arrow 47.

  As described above, according to the glass substrate ID code reader according to the present invention, the glass substrates in the trays stacked by using the tray transfer device that has been performed so far are lifted one by one to form the glass substrate in the tray. It is not necessary to confirm the presence / absence and the ID code of the glass substrate, and as a result, it is possible to suppress the occurrence of loss such as damage to the glass substrate at the time of confirmation without requiring much time.

  It is possible to quickly find the discrepancy between the glass substrate stored in the actual storage tray and the data carrier information, and it is possible to prevent device trouble and device stop loss due to discrepancy between the actual glass substrate and data. Furthermore, when the actual storage glass substrate and the data carrier information do not match, it is possible to quickly recover the data and prevent a great time loss.

DESCRIPTION OF SYMBOLS 1 ... Color filter 2 ... Glass substrate 3 ... Black matrix (BM)
4-1 ... Red R colored pixels (R pixels)
4-2 ... Green G coloring pixel (G pixel)
4-3 ... Blue B colored pixels (B pixels)
5 ... Transparent electrode 6 ... Photospacer (PS)
7 ... Vertical alignment (VA)
DESCRIPTION OF SYMBOLS 10 ... Pallet for tray conveyance 11 ... Data carrier 12 ... Glass substrate storage tray 13 ... Frame part 14 ... Glass substrate support part 15 ... Glass substrate support part 22 ... Glass Substrate storage tray 23 ... frame part 24 ... glass substrate support part 25 ... glass substrate support part 26 ... ID code reflection mechanism 27 ... glass substrate ID confirmation window 27-1 ... tray Glass substrate ID confirmation window 27-2 of A ... Glass substrate ID confirmation window 28 of tray B ... Prism 28-1 ... Prism 28-2 of tray A ... Prism 29 of tray B ... Half mirror 29-1 ... Tray A half mirror 29-2 ... Tray B ID mirror reflecting mechanism half mirror 30 ... Light reflecting material 40 ... Glass substrate 41 ... ID De 41-1 ID code of the glass substrate placed on ... tray A X
41-2 ... ID code 45 of glass substrate placed on tray B ... Glass substrate storage cassette loading / unloading port 45-1 ... Glass substrate storage cassette loading port 45-2 ... Unloading port 46... ID code reflection mechanism group 47... Arrow 51 indicating the direction of movement of the ID code reflection mechanism group... ID code reading head 52... CCD camera 53. ... Z-axis moving mechanism 56 ... Glass substrate storage tray 57 ... Tray conveying pallet 58 ... ID code decoding device 59 ... Automatic warehouse control sequencer 60 ... ID code confirmation monitor 61 ..Ray a
62 ... Ray b
70 ... Stacked glass substrate storage tray 71 ... Data carrier

Claims (3)

An apparatus for reading an ID code of a glass substrate stored in a stacked glass substrate storage tray,
An illumination means for generating illumination light;
Refracting means for refracting illumination light emitted from the illumination means;
Means for capturing an image of the ID code illuminated by the illumination light refracted by the refraction means;
Means for moving the illumination means and the imaging means in a direction perpendicular to the glass substrate storage tray;
Decoding means for converting the image of the captured ID code,
An ID code reader for a glass substrate, wherein the ID code of the glass substrate is read in a state of being stored in a stacked glass substrate storage tray.   2. The glass substrate ID code reader according to claim 1, wherein the refracting means comprises a prism and a half mirror and a light reflecting material.   3. The glass substrate ID code reading apparatus according to claim 1, wherein the illumination means and the imaging means are provided at a pallet entry / exit position of an automatic warehouse in which the stacked glass substrate storage trays are stored.