JP2008177418A - Board container - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To solve the problem that, in a conventional board container, board identification information and board information measured concerning the board cannot be moved and it is difficult to ensure the consistency between the board identification information and board data. <P>SOLUTION: The board container has an upper plate, a lower plate and a support member formed between the upper plate and lower plate, and it is possible to move or convey with a plurality of boards being contained. Further, the board container further has a holding part formed in the support member for holding the plurality of boards mutually at a distance one by one, and an information acquisition part for acquiring identification information and incidental information on each of the plurality of boards. <P>COPYRIGHT: (C)2008,JPO&INPIT

Description

  The present invention relates to a substrate storage device, and more particularly to a substrate storage device used for storing and transporting or storing a substrate.

  2. Description of the Related Art Conventionally, a device having a fine pattern such as a liquid crystal display device is manufactured in a clean room where foreign matter is managed at a micro level in order to prevent a decrease in manufacturing yield due to contamination from a manufacturing environment. During the manufacturing process in this clean room, the substrates constituting the liquid crystal display are stored in multiple stages in the substrate storage device, and are transported and stored between the manufacturing devices and to the storage, and stored in the storage. Is repeated. In this case, foreign matter such as dust scattered from the worker or the apparatus, or mist such as organic gas adheres to the substrate of the liquid crystal display device, causing a deterioration in the quality of the liquid crystal display device. Patent Document 1 discloses a substrate storage device for reducing the deterioration of the quality of the liquid crystal display device.

  FIG. 6 shows a substrate storage device described in Patent Document 1. A substrate storage device 60 shown in FIG. 6 includes an upper plate 2, a lower plate 3, a cassette 1 formed in a box shape by a plurality of support members 4 provided on a pair of opposing side surfaces, and an opening for carrying in and out the substrate 6. A door 7 having an opening / closing mechanism 9 provided on the surface 8 and a cover 10 covering the other side surface of the cassette 1 are configured. The cover 10 is fixed by the support member 4 of the cassette 1. Further, the door 7 and the cover 10 provided on the opening surface 8 are constituted by a transparent resin plate and a transparent resin sheet so that the presence or absence of the substrate 6 in the substrate storage device 60 can be confirmed. A holding portion 5 is formed on the inner wall surface of the support member 4 to hold the plurality of substrates 6 one by one at intervals. Thus, the conventional cassette was covered with the door and cover which have the opening-and-closing mechanism for carrying in / out a board | substrate.

  A conventional general substrate storage apparatus is configured as described above, and basically has a function of only storing a substrate and being used for transportation and storage. A substrate on which a fine pattern such as a TFT (thin film transistor) such as a liquid crystal display device is formed is usually formed with a pattern indicating a lot ID and a substrate number for managing a manufacturing history and a process history. Has been identified. Here, it is conceivable that the substrate is cracked during the manufacturing process and missing, or the order of the substrates stored in multiple stages in the cassette is reversed before and after the process. Therefore, in order to confirm in which position of the substrate storage device these individual substrates are stored, it is necessary to check the substrate number and the like formed on the substrate after each substrate is taken out of the substrate storage device. . In order to solve such a problem, Patent Document 2 discloses a substrate storage device to which a substrate identifier reading device for reading a substrate identification ID is added.

In the technique described in Patent Document 2, a board identifier reading apparatus that reads a board identification ID, a foreign substance inspection apparatus that inspects a foreign substance attached to the board, and a storage medium that holds board identification information are provided outside the provided board storage apparatus. Including a calculator is included. However, in the technique described in Patent Document 2, since the substrate storage device is provided, information associated with the substrate and substrate identification ID measured with respect to the substrate cannot be moved. In addition, since the substrate identifier reading device and the foreign matter inspection device are separately provided outside the substrate storage device, it is difficult to ensure the consistency between the substrate identification information and the substrate data (foreign matter information).
Japanese Patent Laid-Open No. 11-204630 Japanese Patent Laid-Open No. 3-109750

  As described above, in the conventional substrate storage device, the substrate identification information and the information associated with the substrate measured with respect to the substrate cannot be moved, and the consistency between the substrate identification information and the substrate data can be ensured. It was difficult.

  The present invention has been made in order to solve the above-described problems. When a substrate is stored in a cassette, the cassette itself reads the identification ID and substrate data of each substrate in the manufacturing process. It is an object of the present invention to provide a substrate storage device that facilitates process management of a substrate and can improve production efficiency and manufacturing quality.

  A substrate storage device according to an aspect of the present invention has an upper plate, a lower plate, and a support member formed between the upper plate and the lower plate, and can store or move a plurality of substrates. A substrate storage device, wherein the plurality of substrates are held one by one at a distance from each other, a holding portion formed on the support member, and information for acquiring identification information and incidental information of each of the plurality of substrates And an acquisition unit.

  According to the present invention, process management of a substrate in a manufacturing process can be facilitated, and production efficiency and manufacturing quality can be improved.

Embodiment 1
Embodiments of the present invention will be described below with reference to the drawings. FIG. 1 is a diagram showing a substrate storage apparatus 100 according to Embodiment 1 of the present invention. As shown in FIG. 1, the substrate storage apparatus 100 of the present embodiment has a cassette 1, a door 7, and a cover 10. The storage unit 12 and the data communication unit 13 illustrated in FIG. 1 will be described later.

  The cassette 1 includes an upper plate 2, a lower plate 3, and a plurality of support members (hereinafter simply referred to as support members) 4. The support member 4 is provided on a pair of opposing side surfaces of the upper plate 2 and the lower plate 3. A plurality of holding portions (hereinafter simply referred to as holding portions) 5 for holding a plurality of substrates (hereinafter simply referred to as substrates) 6 one by one on the inner wall surface of the support member 4 at intervals. Is formed. The sensor 11 is installed between the plurality of holding units 5 on the inner wall of the cassette 1, and reads the substrate identification ID information set on the substrate 6. The sensor 20 will be described later.

  The door 7 has an opening mechanism portion 9 provided on an opening surface 8 through which the substrate 6 is carried in and out. The cover 10 covers the side surface of the cassette 1 except for the opening surface 8. Moreover, the door 7 and the cover 10 are each comprised with the transparent resin board and the transparent resin sheet, in order to confirm the presence or absence of the board | substrate 6 accommodated in a board | substrate storage apparatus. The board | substrate 6 is accommodated in the board | substrate storage apparatus comprised as mentioned above.

  FIG. 2 is a cross-sectional view of the substrate storage device 100. The substrates 6 are stored one by one at intervals. Here, a substrate identification ID is acquired by a first sensor (hereinafter referred to as a substrate identification sensor) 11 installed in the substrate storage apparatus 100. In this way, by reading the substrate identification ID when the substrate is stored, even if the substrate becomes a missing number when the substrate is cracked or dropped, an error in storing the substrate does not occur. Therefore, it is possible to ensure the consistency between the actual substrate and the substrate on the system. In addition, in the substrate storage device 100, another sensor that acquires various data of the substrate 6 can be installed together with the substrate identification sensor 11. The sensor 20 will be described later.

  FIG. 3 is a conceptual diagram when a second sensor (hereinafter referred to as a data acquisition sensor) 20 is installed together with the substrate identification sensor 11. For example, a data acquisition sensor 20 that measures the charge amount of the substrate identification sensor 11 and the substrate 6 is installed. With this installation, when the substrate 6 is stored in the substrate storage apparatus 100, a change in the charge amount before and after processing by the production apparatus can be captured.

  In addition to the substrate identification sensor 11, a data acquisition sensor 20 that counts the number of foreign matters or dust on the substrate 6 is installed. In this case, a change in the number of dusts before and after processing by the production apparatus when the substrate is stored in the substrate storage apparatus 100 can be captured.

  In addition to the substrate identification sensor 11, a data acquisition sensor 20 equipped with a light receiving unit and capable of measuring the substrate reflectivity is installed based on a laser that is obliquely incident on the substrate or a light source 21 that irradiates the substrate (FIG. 3 ( b)). In this case, when the substrate is stored in the substrate storage apparatus 100, the change in reflectance before and after the processing by the production apparatus can be captured.

  In addition to the substrate identification sensor 11, a data acquisition sensor 20 that can measure a pattern defect provided with a light receiving unit is installed based on a laser incident obliquely on the substrate or a light source 21 that irradiates the substrate (FIG. 3B). )reference). In this case, when a substrate is stored in the substrate storage apparatus 100, occurrence of pattern defects before and after processing by the production apparatus can be captured.

  In addition to the substrate identification sensor 11, a data acquisition sensor 20 that can measure unevenness is installed based on a laser incident obliquely on the substrate or a light source 21 that irradiates the substrate (FIG. 3B). reference). In this case, when the substrate is stored in the substrate storage apparatus 100, it is possible to capture a change in unevenness before and after processing by the production apparatus.

  Next, the memory | storage part 12 holding the board | substrate data which are the identification information acquired by the board | substrate identification sensor 11, and the incidental information acquired by the data acquisition sensor 20, and the information transmission part (output the held data to an external communication apparatus ( Hereinafter, the data communication unit) will be described. FIG. 4 is a conceptual diagram showing a connection relationship between the storage unit 12 and the data communication unit 13 and the upper management system in the substrate storage apparatus 100 shown in FIG. The storage unit 12 built in the cassette 1 includes a storage medium 14, a controller 15, a power supply 16, a sensor 11, and a data acquisition sensor 20.

  The storage medium 14 is, for example, an IC chip, a flash memory, a hard disk, or the like, and stores data acquired by the substrate identification sensor 11 and the data acquisition sensor 20. The controller 15 controls the storage medium 14 and the data communication unit 13. A power source 16 is connected to the controller 15.

  The data communication unit 13 controlled by the controller 15 inputs / outputs substrate data to / from the host host production process centralized management system 17 outside the cassette 1. Further, for data communication with the data communication unit 13 and the host host production process centralized management system 17, communication means such as infrared communication, IC chip, and wireless are desirable. The host host production process centralized management system 17 inputs and outputs substrate data with the production apparatus (inspection apparatus) 18.

  When reporting the substrate data acquired and stored by the substrate identification sensor 11 and the data acquisition sensor 20 to the host system when the substrate is stored, it is loaded and received into a transport system such as an AGV (Automated Guided Vehicle) or a stocker (storage shelf). Occasionally, the device processing data and the substrate data are integrally processed by a production process centralized management system or the like which is a host system.

  FIG. 5 is a conceptual diagram showing the case where the substrate storage device directly communicates with the production apparatus. The data communication unit 13 inputs / outputs board data to / from each of the host host production process centralized management system and the production apparatus (inspection apparatus). That is, it is not necessary for the production apparatus to communicate with the host system (host host production process centralized management system). Therefore, the processing data and QC data of the production device are transferred to the substrate storage device by communication with the substrate storage device, the substrate storage device holds it, performs the processing that has been taken over to the next process, and reports to the upper level collectively. It is also possible.

  Here, the board storage device and the external communication system shown in FIG. 4 and FIG. 5 have means for transmitting the acquired and held board data to the host system. Connected communication may be used. Further, since it is assumed that the substrate storage apparatus is transported, it is desirable to have a non-connection type communication means.

  As described above, in the present invention, the substrate identification sensor 11 is provided in the substrate storage device 100, and the substrate identification ID is read when the substrate is stored. Therefore, even if the substrate is cracked or dropped and becomes a missing number, there is no possibility that the substrate will be stored incorrectly. Therefore, it is possible to ensure the consistency between the actual substrate and the substrate on the system.

  In addition to the substrate identification sensor, a data acquisition sensor 20 for measuring the charge amount of the substrate 6 was installed. In this case, when the substrate 6 is stored in the substrate storage apparatus 100, it is possible to capture the change in the charge amount before and after the processing by the production apparatus 18. Therefore, it is possible to find an abnormality in the production apparatus or process or an abnormality in the substrate.

  In addition to the substrate identification sensor, a sensor for counting the number of foreign matters or dust on the substrate 6 is installed. In this case, when the substrate is stored in the substrate storage apparatus 100, it is possible to capture the change in the number of dusts before and after processing by the production apparatus. Therefore, it is possible to find an abnormality in the production apparatus or process or an abnormality in the substrate.

  In addition to the substrate identification sensor, a light source for irradiating the substrate and a sensor capable of measuring the substrate reflectance provided with a light receiving unit were installed. In this case, when the substrate is stored in the substrate storage device, it is possible to capture the change in reflectance before and after the processing by the production apparatus. Therefore, it is possible to find an abnormality in the production apparatus or process or an abnormality in the substrate. Further, in a reflective liquid crystal display device or a transflective liquid crystal display device having a reflective electrode, the reflectance can be grasped during the reflective electrode manufacturing process. Therefore, capturing changes in reflectivity before and after processing with a production device is effective in preventing outflow of defective products and finding process abnormalities.

  In addition to the substrate identification sensor, a light source for irradiating the substrate and a sensor capable of measuring pattern defects provided with a light receiving portion were installed. In this case, when the substrate is stored in the substrate storage device, it is possible to catch the occurrence of pattern defects before and after the processing by the production apparatus. Therefore, it is possible to find an abnormality in the production apparatus or process or an abnormality in the substrate. Furthermore, since the measurement can be performed every time the substrate is stored, the conveyance to the pattern defect inspection apparatus can be omitted. Moreover, the conveyance to a repair process becomes possible directly.

  In addition to the substrate identification sensor, a light source for irradiating the substrate and a sensor capable of measuring unevenness provided with a light receiving portion were installed. In this case, when the substrate is stored in the substrate storage apparatus, it is possible to capture a variation in unevenness before and after processing by the production apparatus. Therefore, it is possible to find an abnormality in the production apparatus or process or an abnormality in the substrate.

  The sensor 20 described above has a function of correcting the deflection of the substrate. Therefore, even if the central part of the substrate is bent, accurate measurement can be performed.

  In addition, the substrate storage device of the present invention has a storage unit that holds the acquired data. Therefore, it is also possible to hold own history data such as the number of times of use, the frequency of cleaning, or the processing history. In addition, items that were conventionally managed only by the host system can be managed by themselves. Therefore, it is possible to eliminate the occurrence of data shift and the like, and it is possible to directly confirm the actual product.

  Further, when the substrate is stored in the substrate storage device, the substrate storage device directly acquires and stores the information on the substrate. Therefore, it is possible to reliably manage the board information even if the stored cassette is always replaced. Moreover, it becomes possible to give an individual marking to a board | substrate for every process. In addition, it is possible to manage each of the plurality of substrates in the process of sequentially processing the plurality of substrates.

  Further, the substrate storage device disclosed in the prior art includes a substrate identification reading device outside. On the other hand, in the substrate storage device in the present embodiment, the substrate identification reading device can be built in the substrate storage device.

  Further, the substrate storage device shown in the prior art is a storage device provided. On the other hand, the substrate storage device in this embodiment can be moved and carried. Therefore, it is possible to move the information accompanying the substrate and the substrate identification ID measured with respect to the substrate by the cassette that accommodates and moves the substrate.

  In addition, data can be acquired simultaneously with the confirmation of the board without the need for data shift due to the centralized management of the host or the inquiry to the host. Furthermore, it is possible to immediately grasp changes before and after processing of each process manufacturing apparatus.

  Although the embodiments of the present invention have been described in detail above, various modifications can be made without departing from the spirit of the present invention.

1 is a diagram illustrating a substrate storage device according to Embodiment 1. FIG. 1 is a cross-sectional view of a substrate storage device according to Embodiment 1. FIG. FIG. 3 is a diagram illustrating a configuration of an ID acquisition sensor and a data acquisition sensor installed in the substrate storage apparatus according to the first embodiment. 1 is a configuration diagram of a system including a substrate storage device according to Embodiment 1. FIG. 1 is a configuration diagram of a system including a substrate storage device according to Embodiment 1. FIG. It is a figure which shows the conventional board | substrate storage apparatus.

Explanation of symbols

1 cassette, 2 upper plate, 3 lower plate, 4 support member, 5 holding unit, 6 substrate, 7 door, 8 opening surface, 9 opening / closing mechanism unit, 10 cover, 11 substrate identification sensor, 12 storage unit, 13 data communication unit , 14 Storage medium, 15 Controller, 16 Power supply, 17 Host host production process centralized management system, 18 Production device (inspection device) 20 Data acquisition sensor, 21 Light source

Claims (11)

An upper plate and a lower plate, and a support member formed between the upper plate and the lower plate,
A substrate storage device capable of storing or moving or transporting a plurality of substrates,
A holding part formed on the support member for holding the plurality of substrates one by one at intervals, and
A substrate storage device comprising: an information acquisition unit that acquires identification information and incidental information of each of the plurality of substrates.   The substrate storage apparatus according to claim 1, further comprising a storage unit that holds the identification information and the incidental information in association with each other.   3. The substrate storage device according to claim 1, further comprising an information transmission unit configured to transmit the identification information and the incidental information held in the storage unit to an external device.   The substrate storage device according to claim 3, wherein the information transmission unit transmits the identification information and the incidental information to the external device using a radio signal.   5. The substrate storage device according to claim 3, wherein the information transmission unit transmits the identification information and the incidental information to the external device when the substrate storage device is loaded on a transfer system. The information acquisition unit includes a first sensor that acquires identification information set on the substrate;
The substrate storage device according to claim 1, further comprising a second sensor that acquires the incidental information.   The substrate storage device according to claim 1, wherein the supplementary information is a charge amount of the substrate.   The substrate storage device according to claim 1, wherein the incidental information is the number of foreign matters on the substrate.   The substrate storage device according to claim 1, wherein the incidental information is a reflectance of the substrate.   The substrate storage device according to claim 1, wherein the incidental information is a pattern defect of a pattern formed on the substrate.   7. The substrate storage device according to claim 1, wherein the incidental information is a variation in film thickness of a film formed on the substrate.

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