JP2011140101A5 - - Google Patents

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Publication number
JP2011140101A5
JP2011140101A5 JP2010002884A JP2010002884A JP2011140101A5 JP 2011140101 A5 JP2011140101 A5 JP 2011140101A5 JP 2010002884 A JP2010002884 A JP 2010002884A JP 2010002884 A JP2010002884 A JP 2010002884A JP 2011140101 A5 JP2011140101 A5 JP 2011140101A5
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JP
Japan
Prior art keywords
layer
metal material
conductive metal
resist layer
sacrificial layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2010002884A
Other languages
English (en)
Japanese (ja)
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JP2011140101A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2010002884A priority Critical patent/JP2011140101A/ja
Priority claimed from JP2010002884A external-priority patent/JP2011140101A/ja
Publication of JP2011140101A publication Critical patent/JP2011140101A/ja
Publication of JP2011140101A5 publication Critical patent/JP2011140101A5/ja
Withdrawn legal-status Critical Current

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JP2010002884A 2010-01-08 2010-01-08 Ｍｅｍｓデバイスの製造方法 Withdrawn JP2011140101A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010002884A JP2011140101A (ja) 2010-01-08 2010-01-08 Ｍｅｍｓデバイスの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010002884A JP2011140101A (ja) 2010-01-08 2010-01-08 Ｍｅｍｓデバイスの製造方法

Publications (2)

Publication Number Publication Date
JP2011140101A JP2011140101A (ja) 2011-07-21
JP2011140101A5 true JP2011140101A5 (enExample) 2013-01-10

Family

ID=44456324

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010002884A Withdrawn JP2011140101A (ja) 2010-01-08 2010-01-08 Ｍｅｍｓデバイスの製造方法

Country Status (1)

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JP (1) JP2011140101A (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5477711B2 (ja) * 2010-02-01 2014-04-23 日本電子材料株式会社 Ｍｅｍｓデバイスの製造方法
CN111983272B (zh) * 2020-08-14 2021-02-12 强一半导体（苏州）有限公司 一种导引板mems探针结构制作方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3842318B2 (ja) * 1994-10-27 2006-11-08 Ｔｄｋ株式会社 マイクロマシン部品の取り扱い方法

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