JP2011140015A - Suction nozzle - Google Patents

Suction nozzle Download PDF

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Publication number
JP2011140015A
JP2011140015A JP2010017414A JP2010017414A JP2011140015A JP 2011140015 A JP2011140015 A JP 2011140015A JP 2010017414 A JP2010017414 A JP 2010017414A JP 2010017414 A JP2010017414 A JP 2010017414A JP 2011140015 A JP2011140015 A JP 2011140015A
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JP
Japan
Prior art keywords
suction
slit
plate
packing
hole
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2010017414A
Other languages
Japanese (ja)
Inventor
Akio Inoue
晃男 井上
Yoshihiro Okamoto
義弘 岡本
Mitsuhiro Takeda
光弘 武田
Yuichi Tanaka
雄一 田中
Suguru Kawamoto
卓 川本
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Sawa Corp
Original Assignee
Sawa Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Sawa Corp filed Critical Sawa Corp
Priority to JP2010017414A priority Critical patent/JP2011140015A/en
Publication of JP2011140015A publication Critical patent/JP2011140015A/en
Pending legal-status Critical Current

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Abstract

<P>PROBLEM TO BE SOLVED: To make adjustable suction openings and a suction section area of a suction nozzle in a simple method. <P>SOLUTION: Since the respective suction openings formed by layering slit plates 30 having slits 31 and punched holes 32 and packing plates 20 having punched holes 21 comprises plate thickness t and slit widths 33 of the slit plates 30, the adjustment is not required, and the suction section is calculated by totaling up the respective suction openings. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

本発明は、基板実装で用いるメタルマスク、または、シルク印刷などで用いるスクリーンマスクなどのような平板状物体の洗浄と乾燥に関して、電気吸引機やエゼクターに配管を介して接続し、それらによって発生される負圧を利用して吸引洗浄、または吸引乾燥を行なう吸引ノズルに関するものである。  The present invention relates to cleaning and drying of a flat object such as a metal mask used for board mounting or a screen mask used for silk printing, etc., and is generated by connecting to an electric suction machine or ejector via a pipe. The present invention relates to a suction nozzle that performs suction cleaning or suction drying using negative pressure.

これまでマスク洗浄機に組み込まれる吸引ノズルは吹出し用スリットノズルを利用して吸引を行なっていた。特にスリット幅を広狭自在に可変できる可変スリットノズルは便利ではあるがスリット幅の調整に手間がかかる。または、ねじ止めのために緩むなどの欠点があり、マスク洗浄機への組込み後の調整などは困難であった。  Until now, suction nozzles incorporated in mask cleaners have been suctioned by using blowing slit nozzles. In particular, a variable slit nozzle that can vary the slit width in a wide and narrow manner is convenient, but it takes time to adjust the slit width. Or, there is a defect such as loosening for screwing, and adjustment after incorporation into a mask cleaning machine is difficult.

他にも管や厚板にスリット穴を加工して吸引孔としこれを利用して吸引する、またはスリットとなるように部品を組み合わせ吸引するという方法があるが、これらはスリット幅が固定されているので吸引断面積を調整しようとすると、ノズル自体の交換が必要であった。  There are other methods of making a slit hole in a tube or a thick plate and using it as a suction hole, or sucking it by combining parts so that it becomes a slit, but these have a fixed slit width Therefore, when adjusting the suction cross-sectional area, it was necessary to replace the nozzle itself.

吸引孔の寸法と吸引断面積の調整が難しい点である。  It is difficult to adjust the size of the suction hole and the suction cross-sectional area.

スリット形状31と刳り抜き穴32をもつスリット板30と、刳り抜き穴21を持つパッキン20を重ね合わせることにより形成される各吸引孔34はスリット板30の板厚tとスリット幅33で構成されるので確実な寸法となり、従来可変スリットノズルで必要であったスリット幅の調整は必要ないものとなる。  Each suction hole 34 formed by overlapping the slit plate 30 having the slit shape 31 and the punched hole 32 and the packing 20 having the punched hole 21 is constituted by the thickness t and the slit width 33 of the slit plate 30. Therefore, it becomes a reliable dimension, and the adjustment of the slit width, which is conventionally required for the variable slit nozzle, is not necessary.

従って、吸引孔の寸法または吸引断面積は、スリット幅33または板厚tの異なるスリット板30を追加、または取外し、あるいは交換することにより容易に調整できる。  Therefore, the dimension or suction cross-sectional area of the suction hole can be easily adjusted by adding, removing, or replacing the slit plate 30 having a different slit width 33 or thickness t.

吸引ノズルの構成図(図面煩雑化を避けるためネジとネジ穴は省略している)  Suction nozzle configuration diagram (screws and screw holes are omitted to avoid complicated drawings) 吸引ノズル(正面図)(図面煩雑化を避けるためネジとネジ穴は省略している)  Suction nozzle (front view) (screws and screw holes are omitted to avoid complicated drawings) 吸引ノズル(図2の拡大図)  Suction nozzle (enlarged view of Fig. 2) 吸引ノズルの吸引イメージ図  Suction nozzle suction image

各吸引孔34より吸引された気体または液体はXよりスリット形状31を通過し、パッキン20の刳り抜き穴21を、またはスリット板30の刳り抜き穴32を、あるいはその両方を通過し、ベース41の底面に取り付けられた接続口42より吸引される。  The gas or liquid sucked from each suction hole 34 passes through the slit shape 31 from X, and passes through the punched hole 21 of the packing 20, the punched hole 32 of the slit plate 30, or both, and the base 41. It is sucked from the connection port 42 attached to the bottom surface of.

20 パッキン
21 刳り抜き穴
30 スリット板
31 刳り抜き穴
32 スリット
33 スリット幅
34 吸引孔
40 蓋
41 ベース
42 接続口
e パッキン板板厚
t スリット板板厚
X 吸引方向
Y 至 接続口
20 Packing 21 Drilling hole 30 Slit plate 31 Drilling hole 32 Slit 33 Slit width 34 Suction hole 40 Lid 41 Base 42 Connection port e Packing plate plate thickness t Slit plate plate thickness X Suction direction Y To connection port

Claims (8)

気体または液体を吸引するノズルのおいて、スリット形状と刳り抜き穴を有する平板と、刳り抜き穴を有するパッキン板とを有し、平板およびパッキン板をそれぞれ少なくとも1枚ずつ重ね合わせた構造を持ち、平板の板厚とスリットの幅の組み合わせで吸引孔を形成することを特徴とするノズル。  The nozzle for sucking gas or liquid has a structure in which a flat plate having a slit shape and a punched hole and a packing plate having a punched hole are overlapped, and at least one flat plate and a packing plate are overlapped. A nozzle characterized in that a suction hole is formed by a combination of a plate thickness and a slit width. 請求項1を有し、吸引元へと接続する接続口を備えたベースと一体となった吸引機構。  A suction mechanism integrated with a base having a connection port connected to a suction source. 請求項1において、平板材質が金属または樹脂である吸引ノズル。  The suction nozzle according to claim 1, wherein the flat plate material is metal or resin. 請求項1において、パッキン材質が金属または樹脂・ゴムのような弾性材料である吸引ノズル。  2. The suction nozzle according to claim 1, wherein the packing material is an elastic material such as metal or resin / rubber. 請求項1を有するメタルマスク洗浄機  A metal mask cleaning machine having claim 1. 請求項1を有するスクリーンマスク洗浄機  A screen mask washer having the claim 1. 請求項2を有するメタルマスク洗浄機  A metal mask cleaning machine having claim 2. 請求項2を有するスクリーンマスク洗浄機  A screen mask washer having claim 2.
JP2010017414A 2010-01-07 2010-01-07 Suction nozzle Pending JP2011140015A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2010017414A JP2011140015A (en) 2010-01-07 2010-01-07 Suction nozzle

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2010017414A JP2011140015A (en) 2010-01-07 2010-01-07 Suction nozzle

Publications (1)

Publication Number Publication Date
JP2011140015A true JP2011140015A (en) 2011-07-21

Family

ID=44456257

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2010017414A Pending JP2011140015A (en) 2010-01-07 2010-01-07 Suction nozzle

Country Status (1)

Country Link
JP (1) JP2011140015A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI765876B (en) * 2015-12-28 2022-06-01 瑞典商坎菲爾公司 A test probe for a filter

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI765876B (en) * 2015-12-28 2022-06-01 瑞典商坎菲爾公司 A test probe for a filter

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