JP2011137139A - Organic film-forming apparatus and organic film-forming method - Google Patents

Abstract

<P>PROBLEM TO BE SOLVED: To provide a film-forming apparatus, for which the area for installation is small, and the treatment time is short, and whose inside is scarcely contaminated. <P>SOLUTION: The film-forming apparatus includes a vacuum chamber 1 having an exhaust port 8 to which a pipeline 81 in communication with a vacuum pump P is connected; a stage 2 disposed at the lower portion of the vacuum chamber while having, as a bottom surface thereof, the wall surface of the vacuum chamber to which the exhaust port is formed, holding a substrate W, and enabling to cool the substrate; a raw material introducing means 4 which evaporates raw material organic molecules and introduces the evaporated molecules into the vacuum chamber; and a light irradiation means 3 disposed above the substrate while being opposed thereto and, after accumulation of the raw material organic molecules introduced into the vacuum chamber onto the surface of the substrate, irradiating the accumulated raw material organic molecules with light to cause polymerization reaction. The raw material introducing means has a ring-shaped shower head 43 surrounding the irradiation surface. A guide means 5 for introducing the raw material organic molecules ejected from the shower head onto the surface of the substrate is disposed. <P>COPYRIGHT: (C)2011,JPO&INPIT

Description

  The present invention relates to an organic film forming apparatus and an organic film forming method used for forming raw organic molecules into a thin film.

  Electronic devices such as organic electroluminescent elements, solar cells, and thin film lithium batteries include those that are easily deteriorated by gases such as water vapor and oxygen in the atmosphere. It is conventionally known that a (sealing function) structure needs to be provided in an electronic device.

  In Patent Document 1, an organic film made of a polymer compound such as polyurea is provided so as to cover the organic EL element formed on the substrate surface and the surrounding substrate surface, and then the edge and the surrounding substrate surface. It is disclosed to provide an inorganic film made of alumina or the like that exhibits barrier performance so as to cover the surface. In this way, the multilayer structure of the inorganic film and the organic film can be achieved by, for example, increasing the strength of the electronic device while covering the device structure and smoothing the steps existing in the device structure, or making the electronic device flexible. It is for having it.

  Here, as an organic film forming apparatus for forming the organic film, vaporization is performed on the surface of a substrate (which is a processing object on which an organic film is formed, such as a device element formed on a glass substrate). A first processing chamber for supplying raw organic molecules to be deposited in a liquid phase (deposition process) and a polymerization reaction by irradiating the deposited raw organic molecules with light such as ultraviolet rays (polymerization process) A so-called in-line type apparatus has been conventionally used in which a processing chamber is provided in parallel and a transfer means for sequentially transferring the substrate between the first and second processing chambers is provided (for example, a website of Vitex System). Posted on).

  However, since the conventional apparatus is configured by arranging a plurality of processing chambers in which the deposition process and the polymerization process are separately performed, the installation area of the apparatus itself is increased and the substrate transport time is increased. When added, there is a problem that the processing time for forming the organic film becomes long. In addition, before the substrate on which the raw organic molecules are deposited is transferred to the next processing chamber, the raw organic molecules may re-evaporate due to heat from the apparatus or the like, thereby contaminating the inside of the apparatus.

  By the way, as a raw material organic molecule conventionally used for forming an organic film, epoxy acrylate is considered in consideration of adhesion to a processing substrate, flexibility of the organic film itself, handling property (toxicity) of the raw organic molecule, and the like. Urethane acrylate or polyester acrylate is used. However, these raw material organic molecules have poor vaporization efficiency, and when the organic film is formed through the deposition and polymerization steps as described above, there is a problem that the processing time becomes long. Moreover, since a resin-made substrate (base material) having flexibility may be used depending on the electronic device, it is necessary to further improve the adhesion with the substrate in consideration of the use environment.

JP 2007-27378 A

  In view of the above points, it is a first object of the present invention to provide an organic film forming apparatus having a structure in which an installation area is small and a processing time can be shortened and the inside of the apparatus is difficult to be contaminated. is there. In addition, an organic film forming method capable of further improving the adhesion with a processing substrate without impairing functions such as smoothness, and capable of forming an organic film through a deposition process and a polymerization process efficiently in a short processing time. Providing is a second problem.

  In order to solve the above-described problems, an organic film forming apparatus of the present invention has a vacuum chamber having an exhaust port to which a pipe leading to a vacuum pump is connected, and a wall surface of the vacuum chamber in which the exhaust port is formed. A stage disposed at the lower part of the vacuum chamber to hold the substrate and to cool the substrate, a raw material introducing means capable of vaporizing and introducing raw organic molecules into the vacuum chamber, and via the raw material introducing means A light irradiation means for depositing the raw material organic molecules introduced into the vacuum chamber on the surface of the substrate and then opposingly arranged above the substrate and irradiating the deposited raw material organic molecules with light to cause a polymerization reaction; The irradiation surface of the light irradiation means extends outward from the projection surface of the outline of the substrate onto the irradiation surface, and the raw material introduction means has an annular shower head surrounding the irradiation surface, The raw organic molecules ejected from Yawaheddo characterized in that a guide means for guiding to the substrate surface.

  According to the present invention, after the substrate is held on the stage and the processing chamber is evacuated, the vaporized raw organic molecules are introduced via the raw material introducing means. At this time, the raw organic molecules ejected from the shower head are guided toward the substrate by the guide means and reach the substrate. When the raw organic molecules reach the substrate, the raw organic molecules are deposited in the liquid phase because the stage holding the substrate is cooled to a predetermined temperature (for example, −10 ° C.). Then, light is irradiated onto the substrate on which the raw material organic molecules are deposited by the light irradiation means, the light is absorbed and activated, and a polymerization reaction is caused by the excitation action to be cured. As a result, a predetermined organic film is formed on the substrate surface. At this time, since the irradiation surface of the light irradiation means extends outward from the projection surface of the outline of the substrate on the irradiation surface, the light is reliably irradiated over the entire surface of the substrate, and the insufficiently cured portion is localized. There will be no problems such as

  As described above, according to the present invention, the light irradiation means is provided opposite to the substrate on the stage, and the shower head of the raw material introduction means is provided around the light irradiation means, and the raw material organic molecules ejected from the shower head are transferred to the upper surface of the substrate. By providing the guiding means for guiding, it is possible to realize a configuration in which the deposition process and the polymerization process can be performed in a vacuum chamber which is the same processing chamber, particularly when an organic film is formed with a thick film thickness (for example, 5 μm or more). In order to avoid curing shrinkage and insufficient curing, it is advantageous when forming an organic film in multiple steps. And the organic film forming apparatus of the present invention can significantly reduce the installation area of the apparatus itself as compared with the conventional example, and also eliminates the need for a substrate transfer means, etc. Device manufacturing costs can also be reduced. Moreover, it is not necessary to transfer the substrate held on the stage until light is irradiated by the light irradiating means, and the substrate is held in this stage in a state of being reliably cooled. There is no problem of evaporating and contaminating the inside of the apparatus.

  In the present invention, if the guide means is a funnel-like member arranged below the shower head and having a diameter reduced downward, the guide means can be easily mounted simply by fixing the guide means to the wall surface of the vacuum chamber. It's okay.

  In the present invention, it is preferable to employ a configuration further comprising a mask plate having an opening smaller than the contour of the substrate held by the stage, and a driving means for moving the mask plate up and down. According to this, if the mask plate is installed so that the peripheral edge of the opening of the mask plate is in contact with the peripheral edge of the upper surface of the substrate, the organic material molecules are deposited in the liquid phase on the substrate surface facing this opening, It is possible to prevent problems such as distortion occurring on the outer peripheral surface of the organic film after leaching to the periphery of the substrate due to the flow of the raw organic molecules and polymerization after the light is irradiated.

  Furthermore, in the present invention, it is preferable to employ a configuration further comprising heating means for heating the vacuum chamber. According to this, when light is applied to the substrate on which the raw organic molecules are deposited, a part of the substrate may re-evaporate. However, by heating the vacuum chamber to a predetermined temperature, the inner wall of the vacuum chamber, etc. It may be possible to prevent adhesion and deposition. For example, if the parts such as the guide means are installed in contact with the vacuum chamber, the parts are also heated by heat transfer when the vacuum chamber is heated, and adhesion and deposition to these parts are simultaneously performed. Can be prevented.

  In the present invention, if the structure in which the outlets of the shower head for ejecting the raw material organic molecules are arranged at equal intervals over the entire circumferential length of the shower head is used, the raw material with respect to the substrate is used. Organic molecules can be supplied uniformly, and an organic film can be formed with a uniform film thickness over the entire surface of the substrate.

  The raw material introducing means includes a gas pipe for supplying vaporized raw organic molecules to the shower head, and after the gas pipe is branched into a plurality of parts, it is connected to the shower head at equal intervals over the entire length in the circumferential direction. If the configuration is adopted, the raw material organic molecules can be ejected evenly from the respective outlets of the shower head, and coupled with the fact that the outlets are arranged at equal intervals, the raw organic molecules are further layered on the substrate. It becomes possible to supply evenly.

  Moreover, in order to solve the said subject, the organic film formation method of this invention forms an organic film on the substrate surface using the organic film formation apparatus of any one of Claims 1-6. An organic film forming method using a raw material organic molecule having benzyl acrylate as a main component, vaporizing the raw organic molecule, depositing the vaporized raw organic molecule on the substrate surface, and then emitting ultraviolet light. It is characterized by carrying out a polymerization reaction by irradiation.

  According to the present invention, the smoothness is good and the adhesion to the processing substrate can be remarkably improved. This is because benzyl acrylate is vaporized and deposited on the substrate surface, and when irradiated with ultraviolet rays in this state, a polymerization reaction of the polymerizable functional group occurs. At this time, the benzyl acrylate is positioned so that the benzene ring is located on the treated substrate surface side. This is considered to be caused by the fact that the polymer is oriented and polymerized. Since this benzyl acrylate has a high vapor pressure and low viscosity, the vaporization efficiency in the vaporizer is good, and the maintenance cycle of the vaporizer can be lengthened. As a result, an organic film can be formed through a deposition and polymerization process efficiently in a short processing time.

  By the way, benzyl acrylate has low curability when irradiated with ultraviolet light. For this reason, in this invention, it is preferable that a polymerization initiator is added to a raw material organic molecule. As a result, the ultraviolet light is absorbed and activated, and the excitation action thereof causes the polymerization reaction of the raw organic molecules at an early stage, and as a result, the processing time can be reliably shortened. The polymerization initiator is added at a ratio of 1 to 20% by weight. When the amount is less than 1% by weight, the polymerization reaction cannot be effectively caused. When the amount exceeds 20% by weight, the curability is excessively improved and the stress of the organic film increases, and particularly the surface of the organic film becomes smooth. There is a possibility that the property is impaired.

  Further, it is preferable to use a polymerization initiator having a vapor pressure equivalent to that of benzyl acrylate. Thereby, a raw material organic molecule and a polymerization initiator can be efficiently vaporized with a vaporizer. Note that the equivalent vapor pressure does not mean that the vapor pressures are exactly the same.For example, a liquid phase benzyl acrylate and a polymerization initiator are supplied to a vaporizer, and this vaporizer What is necessary is just to vaporize a polymerization initiator with benzyl acrylate at the said temperature when vaporizing by atomizing action by carrier gas, such as argon gas, heating at predetermined temperature.

Sectional drawing which illustrates roughly the structure of the organic film forming apparatus of embodiment of this invention. The figure explaining the structure of a shower head. Sectional drawing which illustrates roughly the structure of the organic film forming apparatus of other embodiment of this invention.

  Hereinafter, with reference to the drawings, an organic film forming apparatus according to an embodiment of the present invention will be described by taking as an example a case where a vaporized UV-curable raw material organic molecule is supplied onto a rectangular glass substrate W to form an organic film. The organic film forming method will be described. In addition, the thin film formation object which forms an organic film in this invention is not limited to the said glass substrate, The resin substrate etc. which have flexibility may be sufficient.

  Referring to FIG. 1, reference numeral 1 denotes a vacuum chamber 1 of an organic film forming apparatus. The vacuum chamber 1 has a cylindrical side wall, and a cylindrical stage 2 that holds the substrate W is provided at the center of the lower surface thereof. A passage 21 for circulating the refrigerant is formed in the stage 2, and the substrate W placed on the stage 2 can be cooled and held at a predetermined temperature (for example, −10 ° C.) by circulating the refrigerant by a chiller unit (not shown). I am doing so.

  In the center of the upper surface of the vacuum chamber 1 facing the substrate W placed on the stage 2, a light irradiation means 3 is arranged. The light irradiation means 3 includes a disk-shaped quartz plate 31 and a light source 32 composed of an ultraviolet lamp arranged above the quartz plate 31. The light irradiation surface 31a, which is the lower surface of the quartz plate 31, has a size that extends outward from the projection surface of the contour of the substrate W on the light irradiation surface 31a when the substrate W is positioned and held on the stage 2. In addition, ultraviolet light is reliably irradiated over the entire surface of the substrate W.

  A raw material introduction means 4 is provided on the upper surface of the vacuum chamber 1. The raw material introduction means 4 includes a vaporizer 41 provided with a heater 41a, and a shower head 43 connected to the vaporizer 41 via a gas pipe 42 having an on-off valve 42a. The shower head 43 is disposed concentrically around the quartz plate 31 of the light irradiation means 3 on the upper surface of the vacuum chamber 1.

  The raw organic molecules are appropriately selected according to the characteristics of the film to be formed on the substrate W. For example, in the case of an organic film formed with a barrier film in an electronic device, at least one molecule per molecule UV curable monomers (for example, those based on neopentyl glycol diacrylate and benzyl acrylate) and UV curable oligomers (for example, epoxy acrylate and urethane acrylate) having a polymerizable functional group (for example, vinyl group) Used. In this case, depending on the raw material organic material, there is a material that does not easily cause a direct polymerization reaction due to ultraviolet light. Therefore, the material is known to be activated by absorbing ultraviolet light and cause a polymerization reaction of raw organic molecules by its excitation action. A polymerization initiator may be added.

  In the organic film forming method of this embodiment, a method in which a polymerization initiator is added at a ratio of 1 to 20% by weight to a material mainly composed of benzyl acrylate as a raw material organic molecule is used. Thereby, the surface smoothness of an organic film is good, and also the adhesiveness between process substrates can be improved remarkably. This is because benzyl acrylate is vaporized and deposited on the substrate surface, and when irradiated with ultraviolet rays in this state, a polymerization reaction of the polymerizable functional group occurs. At this time, the benzyl acrylate is positioned so that the benzene ring is located on the treated substrate surface side. This is considered to be caused by the fact that the polymer is oriented and polymerized. Since this benzyl acrylate has a high vapor pressure and low viscosity, the vaporization efficiency in the vaporizer is good, and the maintenance cycle of the vaporizer can be lengthened. In addition, when the addition amount of the polymerization initiator is less than 1% by weight, the polymerization reaction cannot be effectively caused, and when it exceeds 20% by weight, the curability is excessively improved and the stress of the organic film is increased. In particular, the surface smoothness may be impaired.

  As the polymerization initiator, one having a vapor pressure equivalent to the vapor pressure of benzyl acrylate can be used so that it can be efficiently vaporized together with the raw material organic molecules in a vaporizer described later. Equivalent vapor pressure does not mean that the vapor pressures are exactly the same, but it is a slight difference within the range where there is no problem in efficiently vaporizing the polymerization initiator together with benzyl acrylate in the vaporizer. Including the case of having Examples of such a polymerization initiator include Darocur (registered trademark, manufactured by Ciba).

  The raw organic molecules and the polymerization initiator are mixed at a predetermined ratio and stored in the tank 41b in a liquefied state. A gas introduction pipe 41c is connected to the tank 41b. By introducing a gas such as argon from the gas introduction pipe 41c into the tank, the raw material organic molecules and the polymerization initiator liquid are provided via the mass flow controller 41d. It is introduced into the vaporizer 41 at a predetermined flow rate via the supply pipe 41e. The vaporizer 41 is connected to a carrier gas introduction pipe 41f that introduces a carrier gas into the vaporizer 41 and that is provided with a mass flow controller 41d. Then, the raw organic molecules and the polymerization initiator liquid heated in the vaporizer 41 are vaporized by the atomizing action with a carrier gas such as argon gas in the vaporizer 41, and the shower head 41 is connected via the gas pipe 42. Supplied to.

  The shower head 43 has an annular base material 43a having a predetermined width, and a ring-shaped spacer 43b having a predetermined height is fixed along the inner peripheral edge and the outer peripheral edge on the base. Is covered with a lid member 43c having the same shape as the base material 43a. As shown in FIG. 2, the nozzle 43d is formed in the lower surface of the base material 43a at equal intervals over the whole periphery. In this case, the interval (pitch) and opening diameter between the injection ports 43d are appropriately designed according to the type of the raw material organic molecules. Further, openings are formed in the lid member 43c at intervals of 90 degrees in the circumferential direction, and gas pipes 42 from the vaporizer 41 are branched and connected to the openings, and the vaporized raw material organics are emitted from the respective outlets 43d. The molecules are ejected uniformly. Note that the connection position and the number of connections of the pipes are not limited to the above as long as the raw material organic molecules can be uniformly ejected from the respective ejection ports 43d.

  By the way, when the area of the quartz plate 31 is made larger than the area of the substrate W as described above and the vaporized raw organic molecules are introduced into the vacuum chamber 1 from the shower head 43 outside the quartz plate 31 in the downflow state, the substrate W There is a possibility that the raw material organic molecules may not be supplied uniformly. Therefore, in the present embodiment, the funnel-shaped member 5 (guide means) having a diameter reduced toward the lower side thereof is provided below the shower head 43. In this case, the upper end of the funnel-shaped member 5 is fixed to the upper surface of the vacuum chamber 1. The inclination angle and length of the peripheral side wall of the funnel-shaped member 5 are appropriately set according to, for example, the type of raw material organic molecules and the flow rate thereof.

  Further, the vacuum chamber 1 is provided with a mask plate 6 and driving means 7 for moving the mask plate 6 up and down. The mask plate 6 is formed with a concave portion 61 directed downward at a central portion of a rectangular or circular plate material. The concave portion 61 has an opening 62 smaller than the contour of the substrate W positioned and held on the stage 2. Is formed. When the mask plate 6 is moved downward as will be described later, the peripheral edge of the opening 62 of the mask plate 6 comes into contact with the peripheral edge of the upper surface of the substrate W. As a result, the lower side of the opening 62 is closed by the substrate W.

  Further, the driving means 7 are provided at four positions at intervals of 90 degrees in the circumferential direction, and each driving means 7 of the same form has a driving source 71 such as an air cylinder or a linear motion motor provided below the vacuum chamber. A drive shaft 72 from the drive source 71 protrudes into the vacuum chamber 1 through seal means (not shown) and abuts the lower surface of the flange portion 63 of the mask plate 6. Then, by driving each driving means 7 synchronously, the mask position where the lower surface of the concave portion 61 of the mask plate 6 is in surface contact with the peripheral portion of the upper surface of the substrate W at the peripheral portion of the opening 62, and the concave portion 61 Is retreated above the stage 2 and the mask plate 6 is moved up and down between the retreat position where the transfer of the substrate W can be performed by a transfer robot (not shown).

  Four exhaust ports 8 are formed in the lower surface of the vacuum chamber 1 at intervals of 90 degrees in the circumferential direction (45 degrees intervals with respect to the position of the driving means). A vacuum for evacuating the vacuum chamber 1 is formed in the exhaust ports 8. A pipe 81 leading to the pump P is connected. In addition, each piping 8 can be gathered and exhausted with one vacuum pump. Here, in order to uniformly supply the raw material organic molecules introduced through the shower head 43 and the funnel-shaped member 5 over the entire surface of the substrate W, it is necessary to perform isotropic exhaust from around the stage 2. There is. In this case, a space having a large volume is formed between the inner wall surface of the vacuum chamber 1 and the side wall of the stage 2 that are concentrically arranged, and an exhaust passage that is narrow in the circumferential direction is formed in the circumferential direction and communicates with the exhaust passage below the stage 2. However, in this embodiment, the driving means 7 for moving the mask plate 6 up and down is provided. For this reason, the conductance plate 9 is locally disposed below and above the upper surface of the stage 2 so that isotropic exhaust is performed. Further, a passage 11 for circulating a heating medium is formed in the side wall of the vacuum chamber 1 so that the heating medium is circulated by a chiller unit (not shown) so that the vacuum chamber 1 can be heated to a predetermined temperature. Yes.

  Next, by using the organic film forming apparatus of the present embodiment, a material in which a polymerization initiator is added at a ratio of 1 to 20% by weight to a material mainly composed of benzyl acrylate as a raw material organic molecule. An organic film forming method will be described. First, the substrate W is carried in by a transfer robot (not shown) at the retracted position of the mask plate 6 and placed on the stage 2 while being positioned. When the substrate W is placed on the stage 2, each driving means 7 is moved downward. As a result, the peripheral edge of the opening 62 abuts on the peripheral edge of the upper surface of the substrate W, and the lower side of the opening 62 is closed with the substrate W. At this time, the mask plate 6 reaches the mask position.

  Thereafter, the vacuum pump P is operated to evacuate the vacuum chamber 1, and the refrigerant is circulated by a chiller unit (not shown) to cool the stage 2 to a predetermined temperature (for example, −10 ° C.). A heating medium is circulated through the circulation passage 11 to heat the vacuum chamber 1 to a predetermined temperature (for example, 60 ° C.).

  On the other hand, the raw material organic molecules and the polymerization initiator liquid are stored in the tank 41b in the liquefied state in the above-mentioned ratio in advance, and a gas such as argon is introduced into the tank 41b from the gas introduction pipe 41c. The polymerization initiator solution is introduced at a predetermined flow rate into the vaporizer 41 heated to a predetermined temperature via a supply pipe 41e provided with a mass flow controller 41d. Then, the carrier gas is introduced into the vaporizer 41 via the carrier gas introduction pipe 41f, and the raw organic molecules and the polymerization initiator liquid are vaporized by the atomizing action.

  When the vacuum chamber reaches a predetermined pressure, the vaporized raw organic molecules and the polymerization initiator liquid are introduced into the vacuum chamber 1 by the raw material introducing means. At this time, by appropriately controlling the mass flow controller 41d, vaporized raw organic molecules are supplied to the shower head 43 through the gas pipe 42 at a predetermined flow rate, and the raw organic molecules ejected from the shower head 43 are The funnel-shaped member 5 is guided toward the substrate W and reaches the substrate W uniformly. On the other hand, when the raw organic molecules reach the substrate W facing the opening 62 of the mask plate 6, since the stage 2 is cooled to a predetermined temperature, the raw organic molecules are deposited in a liquid phase (deposition). Process). At this time, the inside of the vacuum chamber 1 is maintained under a reduced pressure of about 100 Pa.

  When the raw material organic molecules are deposited on the substrate W at a predetermined thickness, the light source 32 is operated simultaneously with the operation of the raw material introducing means while maintaining the reduced pressure, and the substrate W is irradiated with ultraviolet light. As a result, the raw material organic molecules are activated by absorbing the ultraviolet light, and a polymerization reaction is caused by the excitation action to cure and form a predetermined organic film (polymerization step). At this time, since the light irradiation surface 31a of the quartz plate 31 extends outward from the projection surface of the outline of the substrate W on the light irradiation surface 31a, ultraviolet light is reliably irradiated over the entire surface of the substrate W. It is possible to prevent local occurrence of insufficiently cured portions on the substrate W.

  In addition, when forming an organic film with the thickness exceeding 5 micrometers, it is preferable to repeat the said operation in multiple times and to form an organic film. Finally, when an organic film having a predetermined thickness is formed, each driving means 7 is moved up in synchronization, and the processed substrate W is taken out by the transfer robot in this state.

  Next, in order to confirm the effect of the present invention, the following experiment was performed using the organic film forming apparatus shown in FIG. In this experiment, a raw material organic molecule obtained by adding a polymerization initiator (Darocur: registered trademark, manufactured by Ciba) at a ratio of 1% by weight to benzyl acrylate was used. Further, the heating temperature in the vaporizer 41 is set to 80 ° C., the gas flow rate of the carrier gas is set to 3 slm, and the raw organic molecules are introduced into the vacuum chamber 1 at a flow rate of 0.2 g / min for 600 seconds. , Attached to and deposited on the surface of a 140 × 140 mm glass substrate W. In addition, an organic film was formed by irradiating with ultraviolet light by the light irradiation means 3 for 60 seconds (invention product). When the film thickness in this case was measured, it was 3 μm, and the smoothness on the glass substrate surface was good.

  Next, as a comparative experiment, a raw material organic molecule neopentyl glycol diacrylate added with a polymerization initiator at a ratio of 1% by weight was used. Further, the heating temperature in the vaporizer 41 is set to 80 ° C., the gas flow rate of the carrier gas is set to 3 slm, and the raw organic molecules are introduced into the vacuum chamber 1 at a flow rate of 0.2 g / min for 600 seconds. The glass substrate W was adhered and deposited on the surface. In addition, ultraviolet light was irradiated by the light irradiation means 3 for 60 seconds to form an organic film (comparative product). The film thickness in this case was measured to be 3 μm.

  The above-mentioned invention product and comparative product were subjected to an adhesion test by a so-called tape test method. That is, the surface of the organic film was cut into a grid using a cutter, a commercially available tape was applied to the surface of the organic film, and then the tape was pulled and peeled at a predetermined angle to evaluate the peeled area. According to this, in the comparative product, the organic film peeled over almost the entire surface. On the other hand, in the product of the invention, the organic film was only peeled in the range of 3 to 10%. This confirmed that the adhesion between the substrate and the organic film was improved.

  As described above, according to the organic film forming apparatus of the present embodiment, the deposition process and the polymerization process can be performed in a single vacuum chamber 1, so that the apparatus of the present invention is remarkably compared with the conventional example. Since the installation area can be reduced and no means for transferring the substrate W is required, not only the processing time can be shortened, but also the cost for manufacturing the apparatus can be reduced. In addition, since the substrate W is reliably cooled on the stage 2 until light is irradiated by the light irradiation means 3, there is no problem that the raw organic molecules are re-evaporated and contaminate the inside of the apparatus.

  Since the guide means is composed of the funnel-shaped member 5 mounted on the upper surface of the vacuum chamber 1, the mounting operation is easy, and when the vacuum chamber 1 is heated, the funnel-shaped member 5 is also heated by heat transfer. Along with the inside of the chamber 1, it is possible to prevent the re-evaporated material in the polymerization process from adhering.

  Further, since the configuration including the mask plate 6 having an opening 62 smaller than the contour of the substrate W held by the stage 2 and the driving means 7 for moving the mask plate 6 up and down is employed, the opening 62 of the mask plate 6 is exposed. After depositing raw material organic molecules in the liquid phase on the surface of the substrate W, it is possible to prevent the occurrence of defects such as distortion on the outer peripheral surface of the organic film due to the flow of the raw material organic molecules. Combined with the fact that it can be carried out in a single vacuum chamber 1, in order to avoid curing shrinkage and insufficient curing, especially when the organic film is formed with a thick film thickness (for example, 5 μm or more) This is advantageous when the film is formed separately.

  As mentioned above, although embodiment of this invention was described, this invention is not limited to this. In the above embodiment, an example in which an ultraviolet lamp is used as the light irradiation means has been described as an example. However, the present invention can also be applied to a case where an electron beam is irradiated according to the type of the raw material organic material. Further, in the above-described embodiment, the case where the mask plate 6 is disposed to form the organic film has been described as an example. However, after the deposition of the source organic molecules, the viscosity of the source organic molecules in the liquid phase is strong and the surroundings of the substrate W If it is difficult to ooze out, it can be omitted.

  Moreover, in the said embodiment, although demonstrated as an example what was comprised from the funnel-shaped member 5 as a guide means, as long as the raw material organic molecule which ejected from the shower head 43 can supply uniformly over the whole surface of the board | substrate W, it is. The form is not particularly limited. Moreover, although the form which cools the stage 2 or heats the vacuum chamber 1 has been described as an example of a refrigerant or a heating medium, it is not limited to this, and an air-cooling cooling means or an electric heater is not limited thereto. These heating means can also be used.

  Further, in the above-described embodiment, the quartz plate 32 is disposed opposite to the substrate W and the shower head 43 is disposed around the quartz plate 32. However, as shown in FIG. 3, the shower head 40 passes through the center of the substrate W. A quartz plate 30 arranged on a line and formed in an annular shape around the line can also be arranged.

  DESCRIPTION OF SYMBOLS 1 ... Vacuum chamber of organic film formation apparatus, 2 ... Stage, 3 ... Light irradiation means, 31a ... Light irradiation surface of quartz plate, 41 ... Vaporizer (raw material introduction means), 43 ... Shower head (raw material introduction means), 5 ... funnel-shaped member (guide means), 6 ... mask plate, 62 ... opening, 7 ... driving means, 8 ... exhaust port of vacuum chamber, 81 ... piping, 11 ... passage for heating medium circulation (heating means), P ... vacuum Pump, W ... substrate.

Claims (9)

A vacuum chamber having an exhaust port to which piping leading to a vacuum pump is connected;
The vacuum chamber wall in which the exhaust port is formed is located below, and a stage is disposed below the vacuum chamber to hold the substrate and to cool the substrate;
Raw material introduction means capable of vaporizing and introducing raw organic molecules into the vacuum chamber;
Light is deposited on the substrate surface through the organic material molecules introduced into the vacuum chamber via the raw material introduction means, and then disposed oppositely above the substrate to irradiate the deposited organic material molecules with light to cause a polymerization reaction. Irradiation means,
The irradiation surface of the light irradiation means extends outward from the projection surface of the contour of the substrate to the irradiation surface,
The organic material forming apparatus characterized in that the raw material introducing means has an annular shower head surrounding the irradiation surface, and provided with guiding means for guiding raw organic molecules ejected from the shower head to the substrate surface.   2. The organic film forming apparatus according to claim 1, wherein the guide means is a funnel-shaped member disposed below the shower head and having a diameter reduced toward the bottom.   The organic film forming apparatus according to claim 1, further comprising: a mask plate having an opening smaller than a contour of the substrate held by the stage; and a driving unit that moves the mask plate up and down.   The organic film forming apparatus according to any one of claims 1 to 3, further comprising a heating unit that heats the vacuum chamber.   The jet nozzle of the shower head which jets out the said raw material organic molecule is lined up at equal intervals over the circumferential direction full length of the shower head in any one of Claims 1-4 characterized by the above-mentioned. The organic film forming apparatus described.   The raw material introducing means includes a gas pipe for supplying the vaporized raw organic molecules to the shower head, and after the gas pipe is branched into a plurality of parts, each is connected to the shower head at equal intervals over the entire length in the circumferential direction. The organic film forming apparatus according to any one of claims 1 to 5, wherein the organic film forming apparatus is formed. An organic film forming method for forming an organic film on a substrate surface using the organic film forming apparatus according to any one of claims 1 to 6,
Using organic benzyl acrylate as the main ingredient organic molecule, vaporizing this benzyl acrylate, depositing this vaporized benzyl acrylate on the substrate surface, and then irradiating it with ultraviolet light to cause a polymerization reaction An organic film forming method.   8. The organic film forming method according to claim 7, wherein a polymerization initiator is added to the raw organic molecules. 9. The organic film forming method according to claim 8, wherein the polymerization initiator has a vapor pressure equivalent to that of benzyl acrylate.

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