JP2011091139A5 - - Google Patents
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- Publication number
- JP2011091139A5 JP2011091139A5 JP2009242175A JP2009242175A JP2011091139A5 JP 2011091139 A5 JP2011091139 A5 JP 2011091139A5 JP 2009242175 A JP2009242175 A JP 2009242175A JP 2009242175 A JP2009242175 A JP 2009242175A JP 2011091139 A5 JP2011091139 A5 JP 2011091139A5
- Authority
- JP
- Japan
- Prior art keywords
- mesa structure
- electrode
- mesa
- semiconductor substrate
- upper electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009242175A JP5483544B2 (ja) | 2009-10-21 | 2009-10-21 | 半導体受光装置 |
| US12/893,750 US8350351B2 (en) | 2009-10-21 | 2010-09-29 | Semiconductor light receiving device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2009242175A JP5483544B2 (ja) | 2009-10-21 | 2009-10-21 | 半導体受光装置 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2011091139A JP2011091139A (ja) | 2011-05-06 |
| JP2011091139A5 true JP2011091139A5 (cg-RX-API-DMAC10.html) | 2012-10-11 |
| JP5483544B2 JP5483544B2 (ja) | 2014-05-07 |
Family
ID=43878647
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2009242175A Expired - Fee Related JP5483544B2 (ja) | 2009-10-21 | 2009-10-21 | 半導体受光装置 |
Country Status (2)
| Country | Link |
|---|---|
| US (1) | US8350351B2 (cg-RX-API-DMAC10.html) |
| JP (1) | JP5483544B2 (cg-RX-API-DMAC10.html) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2013168635A (ja) | 2012-01-20 | 2013-08-29 | Sumitomo Electric Device Innovations Inc | 半導体受光装置 |
| JP2017157602A (ja) * | 2016-02-29 | 2017-09-07 | ルネサスエレクトロニクス株式会社 | 光半導体装置及びその製造方法 |
| US11695093B2 (en) * | 2018-11-21 | 2023-07-04 | Analog Devices, Inc. | Superlattice photodetector/light emitting diode |
| JP7454917B2 (ja) | 2018-12-12 | 2024-03-25 | 浜松ホトニクス株式会社 | 光検出装置 |
| US12113088B2 (en) | 2018-12-12 | 2024-10-08 | Hamamatsu Photonics K.K. | Light detection device |
| US11901379B2 (en) * | 2018-12-12 | 2024-02-13 | Hamamatsu Photonics K.K. | Photodetector |
| JPWO2020121858A1 (ja) | 2018-12-12 | 2021-11-04 | 浜松ホトニクス株式会社 | 光検出装置及び光検出装置の製造方法 |
| CN113167643B (zh) | 2018-12-12 | 2024-05-28 | 浜松光子学株式会社 | 光检测装置及光检测装置的制造方法 |
| JP2023174432A (ja) * | 2022-05-25 | 2023-12-07 | 日本ルメンタム株式会社 | 半導体受光素子 |
Family Cites Families (13)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2945438B2 (ja) * | 1990-04-23 | 1999-09-06 | 株式会社日立製作所 | 光半導体装置及びそれを用いた受光器 |
| JPH04167565A (ja) * | 1990-10-31 | 1992-06-15 | Fujitsu Ltd | フリップチップ型受光素子 |
| DE4314454C1 (de) * | 1993-05-03 | 1994-10-13 | Ika Analysentech Gmbh | Bombenkalorimeter |
| US5485010A (en) * | 1994-01-13 | 1996-01-16 | Texas Instruments Incorporated | Thermal isolation structure for hybrid thermal imaging system |
| US5426304A (en) * | 1994-01-13 | 1995-06-20 | Texas Instruments Incorporated | Infrared detector thermal isolation structure and method |
| US5574282A (en) * | 1994-06-30 | 1996-11-12 | Texas Instruments Incorporated | Thermal isolation for hybrid thermal detectors |
| US5559332A (en) * | 1994-11-04 | 1996-09-24 | Texas Instruments Incorporated | Thermal detector and method |
| US5644838A (en) * | 1995-01-03 | 1997-07-08 | Texas Instruments Incorporated | Method of fabricating a focal plane array for hybrid thermal imaging system |
| US5626773A (en) * | 1995-01-03 | 1997-05-06 | Texas Instruments Incorporated | Structure and method including dry etching techniques for forming an array of thermal sensitive elements |
| US6348739B1 (en) * | 1999-04-28 | 2002-02-19 | Matsushita Electric Industrial Co., Ltd. | Semiconductor device and method of manufacturing the same |
| JP3913402B2 (ja) * | 1999-06-02 | 2007-05-09 | 新日本無線株式会社 | 高周波回路装置 |
| US6547946B2 (en) * | 2000-04-10 | 2003-04-15 | The Regents Of The University Of California | Processing a printed wiring board by single bath electrodeposition |
| US8022390B1 (en) * | 2007-08-17 | 2011-09-20 | Sandia Corporation | Lateral conduction infrared photodetector |
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2009
- 2009-10-21 JP JP2009242175A patent/JP5483544B2/ja not_active Expired - Fee Related
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2010
- 2010-09-29 US US12/893,750 patent/US8350351B2/en not_active Expired - Fee Related